CN115793292A

CN115793292A - Light field regulation and control device and light field regulation and control method

Info

Publication number: CN115793292A
Application number: CN202310102459.1A
Authority: CN
Inventors: 赵自强
Original assignee: Changxin Memory Technologies Inc
Current assignee: Changxin Memory Technologies Inc
Priority date: 2023-02-13
Filing date: 2023-02-13
Publication date: 2023-03-14
Anticipated expiration: 2043-02-13
Also published as: CN115793292B

Abstract

The embodiment of the present disclosure provides an optical field regulation and control device and an optical field regulation and control method, the optical field regulation and control device includes: a light emitting device for providing light; a grating array layer over the light emitting device, comprising: the light rays are emitted to the outside through the grating units to form emergent light rays; and the phase control layer is embedded at the bottom of the grating array layer and is used for adjusting the temperature of different grating units so as to modulate the emergent angle of emergent light. The embodiment of the disclosure is at least beneficial to improving the reliability of the light field regulation device.

Description

Light field regulation and control device and light field regulation and control method

Technical Field

The embodiment of the disclosure relates to the technical field of semiconductors, in particular to an optical field regulating device and an optical field regulating method.

Background

With the development of the photoelectric technology, the light field regulation device develops rapidly, and for example, a waveguide and a grating phased array can be used for realizing complex functions. This is usually achieved by giving phase differences between the optical signals, so that the optical signals interfere with each other, thereby deflecting the beam, and this technique can be applied to off-chip beam steering (for laser radar, etc.), spatial focusing, holographic image projection, and the like.

However, the current optical field regulation device has the problem of low reliability.

Disclosure of Invention

The embodiment of the disclosure provides an optical field regulation and control device and an optical field regulation and control method, which are at least beneficial to improving the reliability of the optical field regulation and control device.

The embodiment of the present disclosure provides an optical field regulation device, including: a light emitting device for providing light; a grating array layer located over the light emitting device, comprising: the light rays are emitted to the outside through the grating units to form emergent light rays; and the phase control layer is positioned between the grating array layer and the light-emitting device and is used for adjusting the temperature of at least two grating units so as to modulate the emergent angle of the emergent light.

In some embodiments, the phase control layer comprises: a plurality of temperature control units, each temperature control unit facing one of the grating units, configured to: and adjusting the temperature of each grating unit to enable the temperature of two adjacent grating units to have a temperature difference, wherein the light field regulation and control device modulates the phase of the emergent light ray based on the temperature difference.

In some embodiments, the temperature control unit comprises: the light-emitting part is used for emitting the light to the grating unit through the light-emitting part; the heating part surrounds the light emergent part and is opposite to the peripheral area of the grating unit.

In some embodiments, the heating portion is a thermal resistance wire.

In some embodiments, the grating unit comprises a light-transmitting portion through which the light rays exit and a non-light-transmitting portion comprising at least one grating structure, the grating structure being wedge-shaped.

In some embodiments, in a direction pointing to the non-light-transmitting portion along the light-transmitting portion, a ratio of a width of the light-transmitting portion to a width of the non-light-transmitting portion is 1.

In some embodiments, the width of the light-transmitting portion is 10 μm to 30 μm and the width of the non-light-transmitting portion is 20 μm to 40 μm in a direction pointing to the non-light-transmitting portion along the light-transmitting portion.

In some embodiments, the grating units have metasurfaces.

In some embodiments, the light emitting device comprises: a plurality of light emitting lasers for emitting said light, said light emitting lasers comprising: follow grating array layer is directional P type electrode, upper reflector, active area layer, oxide layer, lower floor's reflector and the N type electrode that the luminescent device direction stacks gradually, wherein, the active area layer is used for producing light, light emission laser still has the light emission district, light via the light emission district outgoing.

In some embodiments, further comprising: a lens layer between the light emitting device and the phase control layer, the light being transmitted to the grating array layer via the lens layer.

In some embodiments, the lens layer comprises: either a microlens array or a super-structured lens.

In some embodiments, further comprising: the driving layer is used for driving the light-emitting device to emit light, and the driving layer is further used for providing a control signal to the phase control layer, and the phase control layer adjusts the temperature of the grating units based on the control signal.

In some embodiments, the light emitting device comprises: a plurality of light emitting units for emitting the light, the phase control layer comprising: a plurality of temperature control units, each temperature control unit is just right to one grating unit, the drive layer includes: a first layer of row/column signal traces between the phase control layer and the light emitting device, comprising: a first row of signal traces and a first column of signal traces, the first tier row/column of signal traces configured to: selecting a first row signal wiring and a first column signal wiring to provide a driving signal for the light-emitting unit, wherein the light-emitting unit emits the light based on the driving signal; a second layer of row/column signal traces, comprising: a second row of signal traces and a second column of signal traces on a side of the phase control layer facing the light emitting device, the second layer of row/column of signal traces configured to: and selecting a second row signal wire and a second column signal wire to provide the control signal for the temperature control unit, wherein the temperature control unit adjusts the temperature of the grating unit based on the control signal.

In some embodiments, further comprising: and the packaging structure is used for packaging the light-emitting device, the grating array layer, the phase control layer and the driving layer so as to enable the light field regulating and controlling device to be solid hardware.

In some embodiments, further comprising: the phase detection device is used for detecting the phase of the emergent light penetrating through each grating unit and generating a compensation signal based on the detection result; a control device to receive the compensation signal and generate the control signal based on the compensation signal.

Correspondingly, the embodiment of the disclosure further provides an optical field regulation and control method, including: providing a light field modulation device as described in any one of the above; the phase control layer adjusts the temperature of different grating units; the light emitting device provides light rays, and the light rays are emitted to the outside through the grating unit to form emergent light rays.

In some embodiments, the phase control layer adjusting the temperature of the plurality of grating units comprises: and generating a control signal, wherein the phase control layer receives the control signal and adjusts the temperature of each grating unit in response to the control signal so as to enable the phases of the emergent rays penetrating through the adjacent grating units to have a preset phase difference.

In some embodiments, the step of the phase control layer adjusting the temperature of the plurality of grating units further comprises: detecting an initial phase of the emergent light penetrating through each grating unit, and acquiring a phase difference of the initial phases of the emergent light penetrating through two adjacent grating units; generating an initial compensation signal based on the phase difference of the initial phase; adjusting the temperature of the grating units based on the initial compensation signal to make the initial phase of the emergent light passing through each grating unit the same.

The technical scheme provided by the embodiment of the disclosure at least has the following advantages:

among the above-mentioned technical scheme, the grating array layer is located the luminescent device top, make the light that luminescent device sent can be via grating array layer outgoing to the external world, it is located grating array layer below to set up the phase control layer, the temperature of two at least grating units can be adjusted to the phase control layer, thereby can change the refracting index of two at least grating units, and thus, when different light sees through different grating units, because the change of refracting index, make the optical path difference between the light that different grating units correspond change, and then change the phase difference between the different light, realize the interference between the different wave beams according to the phased array principle, thereby change the exit angle of emergent light. It is not difficult to find that the exit angle of the emergent light is not adjusted by adopting a micro-mechanical structure, so that the influence of external conditions such as stress, environment and the like on the performance of the micro-mechanical structure can be avoided, the influence on the adjustment of the exit angle of the light is further reduced, and the reliability of the light field adjusting device on the adjustment of the light angle is improved.

Drawings

One or more embodiments are illustrated by corresponding figures in the drawings, which are not to be construed as limiting the embodiments, unless expressly stated otherwise, and which are not to scale; in order to more clearly illustrate the embodiments of the present disclosure or technical solutions in the conventional technologies, the drawings required to be used in the embodiments will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present disclosure, and other drawings can be obtained by those skilled in the art without creative efforts.

Fig. 1 is a schematic cross-sectional structure diagram of an optical field adjusting device according to an embodiment of the present disclosure;

fig. 2 is a schematic partial cross-sectional structural view of a light field modulation device according to an embodiment of the present disclosure;

fig. 3 is a schematic structural diagram of a temperature control unit in an optical field regulation device according to an embodiment of the present disclosure;

fig. 4 is a schematic top view of a temperature control unit in the optical field control device according to the embodiment of the present disclosure;

fig. 5 is a schematic view of a partial structure of a grating array layer in a light field modulation device according to an embodiment of the present disclosure;

fig. 6 is a schematic view of a partial structure of a grating array layer in another optical field modulation device according to an embodiment of the present disclosure;

fig. 7 is a schematic structural diagram of a light emitting laser in a light field modulation device according to an embodiment of the present disclosure;

fig. 8 is a schematic partial cross-sectional structure diagram of another optical field modulation device provided in the embodiment of the present disclosure;

fig. 9 is a schematic view of light emission in a light field modulation device according to an embodiment of the present disclosure;

fig. 10 is a schematic cross-sectional structure diagram of another optical field modulation device provided in the embodiment of the present disclosure;

fig. 11 is a schematic view of a driving layer in an optical field modulation device according to an embodiment of the present disclosure;

fig. 12 is a schematic diagram corresponding to a step of adjusting and controlling phases of emergent light rays in a light field adjusting and controlling method provided by the embodiment of the disclosure;

fig. 13 is a functional block diagram of a control system according to an embodiment of the present disclosure.

Detailed Description

As known from the background art, the current optical field regulation device has the problem of low reliability.

Analysis finds that one of the reasons for the low reliability of the optical field control device is that, in the current optical field control device, the phase of the light beam is changed based on the micro-mechanical structure, so as to change the emergent angle of the light beam. However, since the micromechanical structure is susceptible to changes in external conditions such as stress and environmental conditions, which affect the reliability and durability of the micromechanical structure, the micromechanical structure is further limited by the resonance frequency kHz, the size of the array unit in the micrometer range, and the like.

The embodiment of the disclosure provides a light field regulation and control device, which is characterized in that a phase control layer is arranged below a grating array layer and used for regulating the temperature of at least two grating units, so that the refractive indexes of the at least two grating units are changed, the optical path difference of an emergent grating emitted by the two grating units is changed, the phase difference is generated between emergent rays emitted by the two grating units, and the emergent angle of the emergent rays is changed. Because the outgoing angle of the outgoing light is adjusted by the phase control layer without adopting a micro-mechanical structure, the influence of external conditions such as stress, environment and the like on the performance of the light field regulation device can be avoided, the accuracy of the light field regulation device on the outgoing light angle modulation is further improved, and the reliability of the light field regulation device is improved.

Embodiments of the present disclosure will be described in detail below with reference to the accompanying drawings. However, it will be appreciated by those of ordinary skill in the art that in the embodiments of the disclosure, numerous technical details are set forth in order to provide a better understanding of the embodiments of the disclosure. However, the claimed embodiments of the present disclosure may be practiced without these specific details or with various changes and modifications based on the following embodiments.

Referring to fig. 1 and 2, the light field modulation device includes: a light emitting device 101, the light emitting device 101 for providing light 1; a grating array layer 102, the grating array layer 102 being located above the light emitting device 101, including: a plurality of grating units 10 (refer to fig. 2), through which the light is emitted to the outside to form an emitted light 2; and the phase control layer 103 is embedded at the bottom of the grating array layer 102 and is used for adjusting the temperature among different grating units, so that the emergent angle of the emergent ray 2 is modulated.

In some embodiments, the phase control layer 103 is embedded in the bottom of the grating unit 10, so that the temperature of the grating unit 10 can be better adjusted. In some embodiments, there is some air gap between the phase control layer 103 and the light emitting device 101.

When the grating unit 10 disperses light by using the principle of multi-slit diffraction and the refractive index of the grating unit 10 changes, the optical path of light passing through the grating unit 10 changes, and the optical path changes to change the phase of the light. When there is a phase difference between the light beams passing through two adjacent grating units 10, interference occurs, and the light beams emitted as a whole are deflected, so that the emission angle of the emitted light beams is changed.

The temperature of at least two grating units 10 is adjusted by the phase control layer 103, and the refractive index of the grating units 10 changes with the change of the temperature. The two grating units 10 are adjusted to have different temperatures, so that the refractive indexes of the two grating units 10 are different, and the emergent angle of the emergent light can be adjusted by using the principle. Compared with a micro-mechanical structure, the temperature is not affected by stress, so that the temperature regulation of the phase control layer 103 due to stress can be prevented from being affected, the accurate regulation of the phase control layer 103 on the temperature of the grating unit 10 can be kept even under the influence of external stress, and the reliability of the optical field regulation device is improved.

From the above analysis, it is found that a temperature difference between the temperatures of two adjacent grating units 10 causes a phase difference between the phases of the outgoing light rays transmitted through the two adjacent grating units 10 to change, thereby causing a change in the angle of the light rays. In some embodiments, in order to accurately adjust the outgoing angle of the outgoing light, a linear relationship between the temperature difference of the adjacent grating units 10 and the phase difference of the outgoing light passing through the two adjacent grating units 10 may be established, so that the temperature difference corresponding to the phase difference may be found based on the linear relationship to accurately adjust the angle of the outgoing light.

Referring to fig. 2 in addition to fig. 3, in some embodiments, phase control layer 103 (see fig. 1) includes: a plurality of temperature control units 20, each temperature control unit 20 being opposite to one grating unit 10, the optical field regulating device being configured to: the temperature of each grating unit 10 is adjusted to have a temperature difference between the temperatures of two adjacent grating units 10, and the phase of the outgoing light is modulated based on the temperature difference. That is, each grating unit 10 has a temperature control unit 20 for adjusting the temperature, so that the temperature of each grating unit 10 is precisely controlled, and thus, the temperature difference between two adjacent grating units 10 can be precisely controlled, so that the phase difference of the outgoing light passing through between two adjacent grating units 10 is consistent with the expected phase difference, and the outgoing angle of the outgoing light can be precisely controlled.

Referring to fig. 4, in some embodiments, the temperature control unit 20 includes: a light emitting portion 21 through which light is incident on the grating unit 10 (see fig. 2); and a heating part 22, wherein the heating part 22 surrounds the light emergent part 21, and the heating part 22 is opposite to the peripheral area of the grating unit 10. In this way, the heating portion 22 can uniformly heat the grating unit 10, so that the temperature of the grating unit 10 (see fig. 2) is uniform, and the problem that the phase difference of the emergent light is not as expected due to the fact that the local refractive index of the grating unit 10 is too large or too small caused by the non-uniform temperature of the grating unit 10 (see fig. 2) is prevented from occurring. The light emitting portion 21 is provided so that the temperature control unit 20 is provided without adversely affecting the propagation of light, so that the light can reach the grating unit 10 (refer to fig. 2).

In some embodiments, the light emitting portion 21 may be a hollow structure or made of a transparent material so that light can pass through.

In some embodiments, heated portion 22 is a thermal resistance wire. The temperature of the thermal resistance wire can be adjusted by applying voltage to the thermal resistance wire. The temperature of the thermal resistance wire changes along with the change of the voltage, and the temperature changes in a positive temperature coefficient or a negative temperature coefficient. Therefore, the temperature of the thermal resistance wire can be regulated and controlled by adjusting the voltage according to the relation between the voltage and the temperature of the thermal resistance wire. In this way, the linear relationship between the temperature difference between the two adjacent grating units 10 (refer to fig. 2) and the phase difference of the light transmitted through the two adjacent grating units 10 (refer to fig. 2) is converted into the linear relationship between the voltage difference applied to the two adjacent temperature control units 20 and the phase difference of the light transmitted through the two adjacent grating units 10 (refer to fig. 2). Compared with the method of controlling the angle of the light by adopting a mechanical structure, the change of the electrical signal can reach a micro level, so that the change of the optical signal can also reach a micro level, for example, the change can reach a nanometer level, and the angular resolution of the emergent light is enhanced. In addition, the effect of low-delay and high-speed switch control can be achieved due to the fact that the switch is driven by the electric signals, and the switch is not influenced by external environment changes.

In some embodiments, the material of the thermistor wire may be any one of nichrome wire or constantan wire.

Referring to fig. 2, in some embodiments, the grating unit 10 includes a light-transmitting portion 11 and a non-light-transmitting portion 12, light is emitted through the light-transmitting portion 11, and the non-light-transmitting portion 12 includes at least one grating structure, and the grating structure is in a shape of a wedge. The number of the grating units 10 is multiple, and in two adjacent grating units 10, the arrangement directions of the light-transmitting portions 11 and the non-light-transmitting portions 12 are the same, that is, a light-transmitting portion 11 is arranged between the two non-light-transmitting portions 12, so that the light-transmitting portions 11 form a slit, and light passes through the slit to generate a diffraction effect, so that the emergent angle of the formed emergent light is changed.

The shape that sets up the grating structure is the wedge, that is to say, the cross-section of grating structure is slope triangle-shaped, is favorable to strengthening the diffraction effect of light at the grating structure, compares in setting up the grating structure for leveling the surface, is favorable to strengthening to enlarge the diffraction angle of emergent ray to can increase the scope to emergent ray angle regulation and control.

In some embodiments, in one grating unit 10, the number of the grating structures may be multiple, the multiple grating structures are adjacent to each other, and the heights of the multiple grating structures change in a stepwise manner along the arrangement direction of the grating structures, for example, the heights of the multiple grating structures may decrease sequentially, or the heights of the multiple grating structures may increase sequentially, so that the diffraction angle of the outgoing light ray may be further increased.

In some embodiments, the material of the grating structure may be any one of PET (polyethylene terephthalate), PP (Polypropylene), PVC (Polyvinyl chloride), or TPU (thermoplastic urethane elastomer).

In some embodiments, in a direction pointing along the light-transmitting portion 11 toward the non-light-transmitting portion 12, a ratio of a width of the light-transmitting portion 11 to a width of the non-light-transmitting portion 12 is 1. Within this range, the width of the light-transmitting portion 11 is not too large, which is advantageous for forming a slit shape, and light passing through the light-transmitting portion 11 is subjected to multiple single slit diffraction and multiple slit interference, which is advantageous for generating a diffraction effect of light, thereby forming a certain diffraction angle and expanding a diffraction range.

The diffraction angle of the outgoing light is related to the grating constant and the wavelength of the light, and the diffraction angle is proportional to the wavelength and inversely proportional to the grating constant. That is, in the case where the wavelength of the light is constant, the diffraction angle is increased as the grating constant is decreased, and the grating constant may be decreased in order to obtain a larger diffraction angle. And the grating constant is equal to the sum of the width of the light-transmitting portion 11 and the width of the non-light-transmitting portion 12, that is, the diffraction angle of the outgoing light is related to the entire width of the grating unit 10. Based on this, in some embodiments, the width of the light-transmitting portion 11 in the direction pointing to the non-light-transmitting portion 12 along the light-transmitting portion 11 is 10 μm to 30 μm, and may be 15 μm, 20 μm, or 25 μm, for example; the width of the non-light-transmitting part 12 is 20 μm to 40 μm, and may be 25 μm, 30 μm or 35 μm, for example. Can design the grating structure according to actual in service behavior for the grating constant is less in this within range that this disclosed embodiment provided, and then can obtain great diffraction angle, is favorable to expanding the scope of carrying out the angle regulation and control to emergent ray. In addition, the width of the light transmission part 11 is not too small in this range, so that the incident light can pass through the light transmission part 11 to generate diffraction effect.

In some embodiments, the grating units have metasurfaces. The metasurface is composed of dielectric circular nano-cylinder antenna arrays with different geometric dimensions. By adjusting the geometric shape, the size and the space azimuth angle of the nano antenna array, the wave surface of incident light can be flexibly adjusted and controlled, and then the emergent angle of emergent light can be adjusted and controlled.

Referring to fig. 5 and 6, in some embodiments, the nanopillar antenna array of the metasurface may be V-shaped or Y-shaped. Taking the V-shaped nanorod antenna array as an example, by designing the included angle θ of the V-shaped nanorod antenna array, when linearly polarized light is incident, the emergent light in the orthogonal polarization state has the capability of regulating and controlling the phase and the amplitude, the modulation range of the phase can be 0 to 2 pi, and the regulation and control range of the angle of the emergent light is expanded. In some embodiments, the metasurface may also be a huygens metasurface.

Referring to fig. 1 and 7, in some embodiments, a light emitting device 101 includes: a plurality of light emitting lasers for emitting light 1, the light emitting lasers comprising: the light emitting laser comprises a P-type electrode 5, an upper reflector 6, an active region layer 7, an oxide layer 8, a lower reflector 9 and an N-type electrode 13 which are sequentially stacked along the direction of a grating array layer 102 pointing to a light emitting device 101, wherein the active region layer 7 is used for generating light, the light emitting laser further comprises a light emitting region 14, and the light is emitted through the light emitting region 14.

When the two ends of the P-type electrode 5 and the N-type electrode 13 are connected with an external power supply to enable the light emitting laser to be conducted in the forward direction, the holes in the P-type electrode 5 and the electrons in the N-type electrode 13 are transmitted to the active region layer 7, the holes and the electrons meet each other in the active region layer 7, recombination occurs, and the potential energy is converted into light energy, so that light is generated.

In some embodiments, the upper mirror 6 and the lower mirror 9 may be DBR (Distributed bragg reflector), and the upper mirror 6 and the lower mirror 9 are formed by alternately stacking two thin films having different refractive indexes. In some embodiments, the two films with different refractive indexes may be periodically stacked, that is, each of the upper mirror 6 and the lower mirror 9 may include a plurality of films in which two films with different refractive indexes are periodically and alternately stacked. When light generated by the active region layer 7 passes through the lower reflector 9 and the upper reflector 6 in sequence, the light passes through the layers with different refractive indexes in sequence, the layers with different refractive indexes reflect the light, and the phase angle of the reflected light is changed due to the different refractive indexes, so that the light reflected by each layer interferes constructively due to the change of the phase angle, and then the light is combined with each other to obtain strong reflected light. That is, the upper mirror 6 and the lower mirror 9 are provided to reduce reflection in a certain wavelength range and enhance the amount of transmitted light.

In some embodiments, the cross-sectional shapes of the P-type electrode 5, the upper mirror 6, the active region layer 7 and the oxide layer 8 stacked in sequence are circular, and the cross-sectional areas of the P-type electrode 5, the upper mirror 6, the active region layer 7 and the oxide layer 8 are smaller than the cross-sectional area of the lower mirror 9 and smaller than the cross-sectional area of the N-type electrode 13, so that the P-type electrode 5, the upper mirror 6, the active region layer 7 and the oxide layer 8 form pillars to separate light generated by the light emitting laser.

In some embodiments, the cross-sectional shape of the P-type electrode 5 in the direction parallel to the surface of the upper mirror 6 may be a ring shape, and the light emitting region 14 is located in the region surrounded by the P-type electrode 5, so that the P-type electrode 5 does not block the emission of light.

Referring to fig. 8, in some embodiments, further comprising: and a lens layer 104, wherein the lens layer 104 is located between the light emitting device 101 and the phase control layer 103, and light is transmitted to the grating array layer 102 through the lens layer 104.

Referring to fig. 9, the lens layer 104 collimates the emitted light, so as to improve the quality of the light, so that the light emitted by different light emitting lasers is incident perpendicularly to the grating array layer 102, and the light emitted by each light emitting laser is emitted as parallel light. Therefore, the initial emitting angles of different light rays are consistent, and the phase control layer 103 is favorable for adjusting the temperature of the grating unit 10 to modulate the phase difference between the emergent light rays, so that the emergent angle of the emergent light rays can be accurately adjusted. In addition, the lens layer 104 is also beneficial to reducing or inhibiting the side lobe effect of the emergent ray and reducing the attenuation of the emergent ray.

The micro-lens array is an array formed by arranging a plurality of micron-sized sub-lenses with the same shape according to a certain rule, and the parameters of each sub-lens are the same, so that the optical performance of each sub-lens is the same, each sub-lens can transmit optical signals independently, light emitted by each laser is a parallel light path, and meanwhile, the micro-lens array can play a role in light uniformization on the light.

The super-structure lens has a super-surface with a nano-scale structure, light is projected to an expected place by utilizing the condensation of the nano-scale structure, and the light and partial atoms arranged in the nano-scale structure are locally interacted through the shape, size and angle of the nano-scale structure and the spatial arrangement mode of the whole plane array, so that the control of the phase, amplitude and polarization state of the wave front passing through the structured plane is realized. In the transverse dimension, the units of the super-structured surface are all structures with sub-wavelength, so that the super-structured surface has sub-wavelength scale and high resolution; in the longitudinal direction, the action distance of the super-structured surface is extremely short, and the wave front distribution of the light wave can be controlled on an approximate plane.

Referring to fig. 8, in some embodiments, further comprising: a driving layer 105, the driving layer 105 being used for driving the light emitting device 101 to emit light, and the driving layer 105 being further used for providing a control signal to the phase control layer 103, the phase control layer 103 adjusting the temperature of the plurality of grating units 10 (refer to fig. 2) based on the control signal. The driving layer 105 causes the light emitting device 101 to emit light by applying a driving voltage to the light emitting device 101. In some embodiments, when the heating portion 22 (refer to fig. 4) of the phase control layer 103 is a thermal resistance wire, the control signal may be an electrical signal, for example, may be a voltage signal. So, can turn into the light signal with the signal of telecommunication to realize the signal of telecommunication drive, because the signal of telecommunication is very sensitive, even make the signal of telecommunication produce small change, also can control the temperature of thermal resistance silk and change, and then make the exit angle of outgoing ray can take place minimum change, increase the regulation and control scope of exit angle, strengthen the resolution ratio of the exit angle of outgoing ray. In addition, the effect of low-delay and high-speed switch control can be achieved, external environment changes can be resisted, and the reliability of the optical field regulation and control device is improved.

Referring to fig. 10 and 11, in some embodiments, a light emitting device includes: a plurality of light emitting units 30, the light emitting units 30 being for emitting light, the phase control layer 103 (refer to fig. 8) including: a plurality of temperature control units 20, each temperature control unit 20 being opposite to one of the grating units 10, the driving layer 105 (see fig. 8) comprising: the first layer row/column signal trace 41, which is located between the phase control layer 103 (refer to fig. 8) and the light emitting device 101 (refer to fig. 8), includes: a first row of signal traces 411 and a first column of signal traces 412, the first layer row/column of signal traces 41 being configured to: selecting a first row signal trace 411 and a first column signal trace 412 to provide a driving signal to a light emitting unit 30, wherein the light emitting unit 30 emits light based on the driving signal; the second layer of row/column signal traces 42 includes: a second row signal trace 421 and a second column signal trace 422, which are located on a side of the phase control layer 103 (refer to fig. 8) facing the light emitting device 101 (refer to fig. 8), the second layer row/column signal trace 42 is configured to: one second row signal trace 421 and one second column signal trace 422 are selected to provide a control signal to a temperature control unit 20, and the temperature control unit 20 adjusts the temperature of the grating unit 10 based on the control signal. Preferably, the light emitting unit corresponds to the intersection of the orthographic projections of the row signal wiring and the column signal wiring.

In some embodiments, a first row signal trace 411 and a first column signal trace 412 are electrically connected to a light emitting unit 30, respectively, wherein the first row signal trace 411 may be electrically connected to the positive electrode of the light emitting unit 30, such as a P-type electrode of a light emitting laser, and the first column signal trace 412 may be electrically connected to the negative electrode of the light emitting unit 30, such as an N-type electrode of the light emitting laser, so as to form a loop. In some embodiments, the first row signal trace 411, the first column signal trace 412 and the light emitting unit 30 can be electrically connected through a through silicon via interconnection structure.

If a certain light emitting unit 30 needs to be lit, the first row signal trace 411 corresponding to the light emitting unit 30 that is desired to be lit is gated, and the driving signal in the first row signal trace 411 is transmitted to the corresponding light emitting unit 30 through the intersecting first column signal trace 412, so as to light the light emitting unit 30. In some embodiments, the first row signal trace 411 in the first layer row/column signal traces 41 can be scanned row by row, so that the light emitting unit 30 to be lit can be selected quickly. In other embodiments, the first row signal traces 411 in the first layer row/column signal traces 41 can be interlaced, and whether the light-emitting units 30 are lighted or not can be selectively controlled precisely through different scanning modes.

In some embodiments, a second row of signal traces 421 and a second column of signal traces 422 are electrically connected to a temperature control unit 20, respectively, wherein the second row of signal traces 421 can be electrically connected to the positive electrode of the temperature control unit 20, and the second column of signal traces 422 can be electrically connected to the negative electrode of the temperature control unit 20, so as to form a loop. In some embodiments, the second row signal trace 421, the second column signal trace 422 and the temperature control unit 20 can be electrically connected through a through silicon via interconnection structure.

If a certain temperature control unit 20 needs to be regulated, the second row of signal traces 421 corresponding to the temperature control unit 20 that needs to be regulated can be gated, and the control signal in the second row of signal traces 421 is transmitted to the corresponding temperature control unit 20 through the second column of signal traces 422 that intersect, so as to regulate the temperature of the temperature control unit 20. In some embodiments, the second row signal trace 421 in the second layer row/column signal trace 42 can be scanned line by line, so that the temperature control unit 20 requiring temperature regulation can be selected quickly. In other embodiments, the second row signal traces 421 in the second layer row/column signal traces 42 can also be interlaced, and the temperature of the temperature control unit 20 can be selectively controlled precisely through different scanning modes.

That is, each light emitting unit 30 and each temperature control unit 20 can be precisely accessed by means of addressing, so that the light emitting units 30 and the temperature control units 20 can be precisely controlled.

Referring to fig. 10, in some embodiments, the light emitting units 30 do not correspond to the grating units 10 one to one, that is, the light emitting units 30 may not be directly opposite to the grating units 10, so that the process difficulty may be reduced, and the number of the light emitting units may be flexibly adjusted to meet different requirements. This is because the outgoing light rays emitted from the light emitting unit 30 have divergence, and the divergent outgoing light rays can be incident into the grating unit 10 from different angles even if the light emitting unit 30 is not located directly below the grating unit 10.

In some embodiments, the grating units 10 and the light emitting units 30 may be arranged to face each other, that is, one light emitting unit 30 may be located directly below one grating unit 10.

In some embodiments, the light field modulation device further comprises: the driving layer 105 may be located on the substrate, and the first layer of row/column signal traces 41 and the second layer of row/column signal traces 42 are formed by a CMOS (Complementary Metal Oxide Semiconductor) manufacturing process using photolithography/etching/deposition/grinding. In some embodiments, the substrate may be a semiconductor substrate, which may be a wafer, for example.

In some embodiments, further comprising: and the light emitting device 101, the grating array layer 102, the phase control layer 103 and the driving layer 105 are packaged in a packaging structure (not shown) so that the light field control device is solid hardware, thereby maximally preventing the external environment from influencing the temperature of the grating array layer 102 and further improving the reliability of the light field control device.

Specifically, in some embodiments, the light field modulation device further comprises: the substrate and the lens layer 104, and the substrate and the lens layer 104 are sealed inside by the package structure.

In some embodiments, further comprising: phase detection means (not shown) for detecting the phase of the outgoing light transmitted through each grating unit 10 and generating a compensation signal based on the detection result; and the control device is used for receiving the compensation signal and generating a control signal based on the compensation signal. The phase of the emergent light is detected through the phase detection device, the real phase of the emergent light can be obtained, the phase control layer 103 is adjusted to provide the feedback of the result, if the phase of the emergent light is deviated from the expected phase, the phase of the emergent light can be correspondingly compensated through the compensation signal generated by the phase detection device, the phase of the emergent light is enabled to be in line with the expectation, and the accuracy and the reliability of the light field regulation and control device for controlling the angle of the emergent light are further improved.

In some embodiments, before the phase control layer 103 is used to perform temperature adjustment, the initial phases of the emergent light rays passing through different grating units 10 need to be adjusted and controlled to be the same, so as to facilitate the subsequent endowment of the same phase difference to the emergent light rays passing through different grating units 10, thereby adjusting and controlling the angle of the emergent light rays. Based on this, a phase detection device may be used to detect the initial phases of the emergent light beams passing through different grating units 10 before the phase control layer 103 performs temperature adjustment, and compare the detection result with a preset phase to generate a compensation signal. It can be understood that different grating units 10 correspond to different compensation signals, so that the grating units 10 corresponding to the emergent rays not reaching the preset phase and the emergent rays exceeding the preset phase can be respectively subjected to temperature compensation based on different compensation signals, so as to make the initial phases of all the emergent rays consistent.

In some embodiments, after the temperature of the grating unit 10 is adjusted by using the phase control layer 103 to modulate the phase of the outgoing light, the phase of the outgoing light may also be detected by using the phase detection device, so as to verify the phase modulation result of the outgoing light, and if there is a deviation between the phase of the outgoing light and the expected phase, the phase of the outgoing light may be correspondingly compensated by using a compensation signal generated by the phase detection device, so that the phase of the outgoing light meets the expectation, and the accuracy and reliability of the optical field control device for controlling the angle of the outgoing light are further improved.

In some embodiments, the phase of the modulated outgoing light may be detected by using a phase detection device at a fixed frequency period, for example, the phase of the outgoing light may be detected after a round of scanning is performed on the first row of signal traces 411 in the first layer of row/column signal traces 41, so that a certain regular phase gradient control is implemented, which is favorable for the interference effect between the light emitting units 30. One scan pass refers to scanning all the first row signal traces 411 in the first layer row/column signal traces 41 once according to the set scan pattern.

In the light field control device provided in the above embodiment, the phase control layer 103 is disposed below the grating array layer 102, and the phase control layer 103 is configured to adjust the temperatures of the at least two grating units 10, so as to change the refractive indexes of the at least two grating units 10, so that the optical path difference of the emergent gratings emitted through the two grating units 10 changes, so that a phase difference is generated between the emergent rays emitted through the two grating units 10, and further the emergent angle of the emergent rays is changed. Because the emergent angle of the emergent ray is adjusted by the phase control layer 103, a micro-mechanical structure is omitted, the influence of external conditions such as stress and environment on the performance of the light field regulating device can be avoided, the accuracy of the light field regulating device on the emergent ray angle modulation is improved, and the reliability of the light field regulating device is improved.

Correspondingly, the embodiment of the disclosure also provides a preparation method of the optical field regulation and control device, which can be used for preparing the optical field regulation and control device provided by the embodiment.

The preparation method of the light field regulation device comprises the following steps:

referring to fig. 8, first, a substrate is provided, a driving layer 105 is formed in the substrate, the driving layer 105 is used to drive the light emitting device 101 to emit light, and the driving layer 105 is also used to provide a control signal to the phase control layer 103, and the phase control layer 103 adjusts the temperature of the plurality of grating units 10 based on the control signal. Referring to fig. 10 and 11, in some embodiments, the driving layer 105 includes: a first tier row/column signal trace 41, comprising: a first row signal trace 411 and a first column signal trace 412, where the first row signal trace 411 and the first column signal trace 412 are located at different layers and intersect, and the first row/column signal trace 41 is used for driving the light emitting device 101 to emit light; the second layer of row/column signal traces 42 includes: the second row signal trace 421 and the second column signal trace 422, the second row signal trace 421 and the second column signal trace 422 are located at different layers and intersect, and the second layer row/column signal trace 42 is used for providing a control signal to the phase control layer 103.

With continued reference to fig. 8, in some embodiments, a damascene process can be employed to form the driving layer 105 in the substrate, for example, a photolithography/etching/deposition/grinding process can be utilized to form the structure of the first layer of row/column signal traces and the second layer of row/column signal traces.

Next, a light emitting device 101 is formed on the surface of the driving layer 105, and referring to fig. 7, the light emitting device 101 includes: a plurality of light emitting lasers, light emitting laser for emitting light, light emitting laser including: and the P-type electrode 5, the upper reflector 6, the active region layer 7, the oxide layer 8, the lower reflector 9 and the N-type electrode 13 are sequentially stacked along the direction in which the grating array layer 102 points to the light emitting device 101. In some embodiments, a deposition process and an etching process may be used to form the P-type electrode 5, the upper mirror 6, the active region layer 7, the oxide layer 8, the lower mirror 9, and the N-type electrode 13, which are sequentially stacked, on the surface of the driving layer 105.

With continued reference to fig. 8, the lens layer 104 may be formed by a separate manufacturing process, and the formed lens layer 104 is covered on the surface of the light emitting device 101 through a precise alignment process. In some embodiments, the lens layer 104 may be formed using any one of a photoresist thermal reflow process, a laser direct writing process, a micro-jet printing process, a sol-gel process, a reactive ion etching process, a gray mask process, a hot press molding process, or a photosensitive glass thermoforming process.

After the lens layer 104 is prepared, the grating array layer 102 and the phase control layer 103 are prepared, and in some embodiments, the grating array layer 102 may be prepared separately. In some embodiments, the grating array layer 102 may be prepared by: providing a substrate for preparing the grating unit 10, wherein the substrate is made of any one of PET, PP, PVC or TPU, a series of parallel equidistant scratches are scribed on the substrate, a non-light-transmitting part 12 (refer to FIG. 2) is formed at the scribed part, and a light-transmitting part 11 (refer to FIG. 2) is formed at the non-scribed part.

Referring to fig. 3 and 4, in some embodiments, phase control layer 103 includes: a light emitting part 21 through which light is incident on the grating unit 10; and a heating part 22, wherein the heating part 22 surrounds the light emergent part 21, and the heating part 22 is opposite to the peripheral area of the grating unit 10. The light emitting part 21 may be a thermal resistance wire, and the light emitting part 21 may have a hollow structure. That is, a thermal resistance wire may be fixed to the outer peripheral area of the grating unit 10, and the area surrounded by the thermal resistance wire forms the light emitting portion 21.

Referring to fig. 10, after the grating array layer 102 and the phase control layer 103 are prepared, the electrical connection of the phase control layer 103 and the driving layer 105 and the electrical connection of the light emitting device 101 and the driving layer 105 may be achieved using the through-silicon via interconnection structure 43. In some embodiments, a through hole with a micron-sized diameter is manufactured in a peripheral region of a substrate by reactive ion etching, a barrier layer is formed on a side wall of the through hole, and a silicon oxide layer can be formed on the side wall of the through hole by a thermal oxidation process; or forming a tantalum nitride layer on the side wall of the through hole by adopting a diffusion process; the through-hole is filled with a conductive body portion, such as copper, by an electroplating process. And then, carrying out surface grinding on the conductive main body part through a chemical mechanical grinding process, wherein the conductive main body part is used as a bonding point of the phase control layer 103 connected with the driving layer 105 and is used as a bonding point of the light-emitting device 101 connected with the driving layer 105.

In some embodiments, after forming the through silicon via interconnection structure 43, in order to form better electrical connection, micro bumps, such as copper/zinc bumps, are prepared at the connection points of the through silicon via interconnection structure and the phase control layer 103, the driving layer 105 and the light emitting device 101.

Finally, the substrate, the driving layer 105, the light emitting device 101, the lens layer 104, the phase control layer 103 and the light emitting array layer are sealed by adopting a packaging process to form a packaging structure, so that the influence of the external environment on the temperature of the grating array layer 102 can be prevented to the maximum extent, and the reliability of the light field regulating device is further improved.

Correspondingly, the embodiment of the disclosure further provides an optical field regulation and control method, including: providing a light field regulating device, wherein the light field regulating device is provided by the embodiment; the phase control layer 103 (refer to fig. 1) adjusts the temperature of the different grating units 10 (refer to fig. 2); the light emitting device 101 (refer to fig. 1) provides light, and the light is emitted to the outside through the grating unit 10 to form an emergent light.

The temperature of at least two grating units 10 is adjusted by the phase control layer 103, and the refractive index of the grating units 10 changes with the change of the temperature. The two grating units 10 are adjusted to have different temperatures, so that the refractive indexes of the two grating units 10 are different, and the emergent angle of the emergent light can be adjusted by utilizing the principle. Compared with a micro-mechanical structure, the temperature is not affected by stress, so that the influence of stress on the temperature regulation of the phase control layer 103 can be avoided, the accurate regulation of the phase control layer 103 on the temperature of the grating unit 10 can be kept even under the influence of external stress, and the reliability of the optical field regulation device is improved.

In some embodiments, the phase control layer adjusting the temperature of the plurality of grating units 10 comprises: the phase control layer 103 receives the control signal and adjusts the temperature of each grating unit 10 in response to the control signal, so that the phases of the emergent light rays passing through the adjacent grating units 10 have a predetermined phase difference. Therefore, the temperature of each grating unit 10 is precisely controlled, so that the temperature difference between two adjacent grating units 10 can be precisely controlled, the phase difference of the emergent light passing through the two adjacent grating units 10 is expected, and the emergent angle of the emergent light can be precisely controlled.

In some embodiments, the phase control layer 103 includes a plurality of temperature control units 20 (refer to fig. 2), and each temperature control unit 20 corresponds to one grating unit 10 (refer to fig. 2) for controlling the temperature of each grating unit 10. In some embodiments, the temperature control unit 20 includes an emergent portion 21 (refer to fig. 4), through which the light is incident to the grating unit 10; a heating portion 22 (refer to fig. 4), the heating portion 22 surrounds the light emitting portion 21, and the heating portion 22 is opposite to the peripheral area of the grating unit 10. In some embodiments, heated portion 22 is a thermal resistance wire. The temperature of the thermal resistance wire can be adjusted by applying voltage to the thermal resistance wire. That is, the voltage difference applied to two adjacent temperature control units 20 can be converted into the phase difference of the light transmitted through two adjacent grating units 10.

Referring to fig. 12, in some embodiments, when the number of grating units 10 (refer to fig. 2) is plural, the same phase difference may be imparted between outgoing light rays transmitted through adjacent two grating units 10 by adjusting the temperature of each grating unit 10. For example, when there are 4 grating units 10 and 4 grating units 10 are arranged at intervals, the phase difference between the emergent light passing through the second grating unit 10 and the emergent light passing through the first grating unit 10 can be set to be

The phase difference between the outgoing light passing through the third grating unit 10 and the outgoing light passing through the first grating unit 10 is

The phase difference between the outgoing light passing through the fourth grating unit 10 and the outgoing light passing through the first grating unit 10 is

In this way, the phase difference between the emergent ray of the nth grating unit and the emergent ray passing through the first grating unit 10 is

。

Different phase differences correspond to different voltage differences, so that different temperature control units 20 can have different temperatures by applying different voltages to the temperature control units 20 corresponding to different grating units 10, thereby forming a phase difference between the emergent light rays passing through different grating units 10. For example, the temperature control unit 20 corresponding to the first grating unit 10 may apply a voltage of V1, the temperature control unit 20 corresponding to the second grating unit 10 may apply a voltage of V2, the temperature control unit 20 corresponding to the third grating unit 10 may apply a voltage of V3, the temperature control unit 20 corresponding to the fourth grating unit 10 may apply a voltage of V4, and so on, the temperature control unit 20 corresponding to the nth grating unit 10 may apply a voltage of Vn.

In some embodiments, the light emitting device 101 includes a plurality of light emitting units 30 (refer to fig. 10), each of the light emitting units 30 for emitting light. The first layer of row/column signal traces 41 may be arranged to drive the light emitting unit 30 of the light emitting device 101 and the temperature control unit 20 (refer to fig. 10) arranged with the second layer of row/column signal traces 42 to adjust the temperature, and the first layer of row/column signal traces 41 includes: a first row signal trace 411 and a first column signal trace 412, wherein the first layer row/column signal trace 41 is used for driving the light emitting device 101 to emit light; the second layer row/column signal traces 42 include: the second row signal trace 421 and the second column signal trace 422, and the second layer row/column signal trace 42 is used for providing a control signal to the temperature control unit 20.

If a certain light emitting unit 30 needs to be lit, the first row signal trace 411 corresponding to the light emitting unit 30 that is desired to be lit is gated, and the driving signal in the first row signal trace 411 is transmitted to the corresponding light emitting unit 30 through the intersecting first column signal trace 412, so as to light the light emitting unit 30. In some embodiments, the first row signal trace 411 in the first layer row/column signal traces 41 can be scanned row by row, so that the light emitting unit 30 to be lit can be selected quickly. In other embodiments, the first row signal traces 411 in the first tier row/column signal traces 41 can also be interlaced.

If a certain temperature control unit 20 needs to be regulated, a second row of signal traces 421 corresponding to the temperature control unit 20 that needs to be regulated can be gated, and a control signal (e.g., a voltage signal) in the second row of signal traces 421 is transmitted to the corresponding temperature control unit 20 through a second column of signal traces 422 that intersect with the second row of signal traces 422, so as to regulate the temperature of the temperature control unit 20. In some embodiments, the second row signal trace 421 in the second layer row/column signal trace 42 can be scanned line by line, so that the temperature control unit 20 requiring temperature regulation can be selected quickly. In other embodiments, the second row signal traces 421 in the second layer row/column signal traces 42 can also be interlaced.

In some embodiments, the step of the phase control layer adjusting the temperature of the plurality of grating units 10 further comprises: detecting the initial phase of the emergent light passing through each grating unit 10, and acquiring the phase difference of the initial phases of the emergent light passing through two adjacent grating units 10; generating an initial compensation signal based on the phase difference of the initial phase; the temperature of the grating units 10 is adjusted based on the initial compensation signal so that the initial phase of the outgoing light passing through each grating unit 10 is the same. Therefore, the same phase difference is provided for the emergent rays passing through different grating units 10 in the following process, so as to adjust and control the angle of the emergent rays. It can be understood that different grating units 10 correspond to different initial compensation signals, so that the grating units 10 corresponding to the emergent light rays which do not reach the preset phase and the emergent light rays which exceed the preset phase can be respectively subjected to temperature compensation based on different initial compensation signals, so that the initial phases of all the emergent light rays are consistent.

In some embodiments, after the temperature of the grating unit 10 is adjusted by using the phase control layer 103 to modulate the phase of the outgoing light, the phase of the outgoing light may also be detected by using a phase detection device, so as to verify the phase modulation result of the outgoing light, and if there is a deviation between the phase of the outgoing light and the expected phase, the phase of the outgoing light may be correspondingly compensated by using a compensation signal generated by the phase detection device, so that the phase of the outgoing light is in accordance with an expectation, and the accuracy and reliability of the optical field control device in controlling the angle of the outgoing light are further improved.

In some embodiments, the phase of the modulated outgoing light may be detected by using a phase detection device at a fixed frequency period, for example, the phase of the outgoing light may be detected after a round of scanning is performed on the first row of signal traces 411 in the first layer of row/column signal traces 41, so that a certain regular phase gradient control is implemented, which is favorable for the interference effect between the light emitting units 30. One scan refers to scanning all the first row signal traces 411 in the first layer row/column signal traces 41 once according to the set scan pattern.

Accordingly, the embodiment of the present disclosure further provides a control system, which is applied to the optical field modulation device provided in the above embodiment, and referring to fig. 13, the control system is configured to generate a control signal, and the phase control layer 103 (refer to fig. 1) adjusts the temperature of at least two grating units 10 (refer to fig. 2) in response to the control signal. The control system includes: the device comprises an upper computer 51, a storage unit 52, a control unit 53, a digital-to-analog conversion unit 54 and a signal generation unit 55; the upper computer 51 is used to preset a program, which can be used to preset an operation mode, for example, to set a preset temperature of the grating unit 10; the storage unit 52 is in communication connection with the upper computer 51, and the storage unit 52 is used for storing program data set in the upper computer 51; the control unit 53 is in communication connection with the storage unit 52, and is configured to demodulate program data stored in the upper computer 51 to obtain a first control signal; the digital-to-analog conversion unit 54 is in communication connection with the control unit 53, and is configured to receive the first control signal, perform digital-to-analog conversion on the first control signal, and obtain a second control signal; the signal generating unit 55 is communicatively connected to the digital-to-analog converting unit 54, and is configured to receive the second control signal and obtain the control signal in response to the control signal; the control signal is transmitted to the signal generation unit 55, and the signal generation unit 55 drives the phase control layer 103 to generate heat based on the control signal. In some embodiments, the control signal may be a voltage value signal, the signal generation unit 55 may be a controllable voltage source module, and the signal generation unit 55 outputs a corresponding voltage value to the phase control layer 103 in response to the voltage value signal to regulate and control the temperature of the phase control layer 103.

In some embodiments, the storage unit 52 may be a ROM (Read only Memory) or a RAM (Random Access Memory), and may be, for example, a DRAM (Dynamic Random Access Memory), an SRAM (static Random Access Memory) or an SDRAM (Synchronous Dynamic Random Access Memory).

In some embodiments, the control Unit 53 may be any one of an MCU (micro controller Unit) or an FPGA (Field programmable gate Array).

In some embodiments, the digital-to-analog conversion unit 54 may be a digital-to-analog converter, and is configured to convert a digital signal into an analog signal, and data transmission between the digital-to-analog conversion unit 54 and the control unit 53 may be performed through an I2C interface, and specifically, a communication connection may be implemented through an I/O port.

In some embodiments, if the phase control layer 103 includes a plurality of temperature control units 20 (refer to fig. 2), each temperature control unit 20 includes: the thermal resistance wire is used for adjusting the temperature of the grating unit 10, and the signal generating unit 55 may be a controllable current source or voltage source, and the second control signal is a current value or a voltage value, so that the temperature of the thermal resistance wire is increased under the conducting condition.

It will be understood by those of ordinary skill in the art that the foregoing embodiments are specific examples for carrying out the present disclosure, and that various changes in form and details may be made therein without departing from the spirit and scope of the present disclosure in practice. Various changes and modifications may be effected by one skilled in the art without departing from the spirit and scope of the disclosure, and it is intended that the scope of the disclosure be limited only by the terms of the appended claims.

Claims

1. An optical field modulation device, comprising:

a light emitting device for providing light;

a grating array layer located over the light emitting device, comprising: the light rays are emitted to the outside through the grating units to form emergent light rays;

and the phase control layer is embedded at the bottom of the grating array layer and is used for adjusting the temperature of different grating units so as to modulate the emergent angle of the emergent light.

2. The light field modulation device according to claim 1, wherein the phase control layer comprises: a plurality of temperature control units, each temperature control unit directly opposite to one grating unit, configured to: and adjusting the temperature of each grating unit to enable the temperature of two adjacent grating units to have a temperature difference, and the light field regulation and control device modulates the phase of the emergent light ray based on the temperature difference.

3. The light field manipulation device of claim 2 wherein said temperature control unit comprises:

the light-emitting part is used for emitting the light to the grating unit through the light-emitting part;

the heating part surrounds the light emergent part and is opposite to the peripheral area of the grating unit.

4. The light field modulation device according to claim 3, wherein the heating portion is a thermal resistance wire.

5. The light field modulation device according to claim 1 or 2, wherein the grating unit comprises a light-transmitting portion through which the light rays exit and a non-light-transmitting portion comprising at least one grating structure, wherein the grating structure is wedge-shaped.

6. The light field adjusting device according to claim 5, wherein a ratio of a width of the light transmitting portion to a width of the non-light transmitting portion in a direction pointing to the non-light transmitting portion along the light transmitting portion is 1 to 4.

7. The light field adjusting device as claimed in claim 6, wherein the width of the light transmitting portion is 10 μm to 30 μm and the width of the non-light transmitting portion is 20 μm to 40 μm in a direction pointing to the non-light transmitting portion along the light transmitting portion.

8. The light field manipulation device of claim 1 or 2, wherein said grating elements have metasurfaces.

9. The light field manipulation device of claim 1, wherein said light emitting device comprises: a plurality of light emitting lasers for emitting the light, the light emitting lasers including: follow grating array layer is directional P type electrode, upper reflector, active area layer, oxide layer, lower floor's reflector and the N type electrode that the luminescent device direction stacked gradually, wherein, the active area layer is used for producing light, light emission laser still has the light emission district, light via the light emission district outgoing.

10. The light field modulation device according to claim 1 or 9, further comprising: a lens layer between the light emitting device and the phase control layer, the light being transmitted to the grating array layer via the lens layer.

11. The light field manipulation device of claim 10 wherein said lens layer comprises: either a microlens array or a super-structured lens.

12. The light field modulation device according to claim 1, further comprising: the driving layer is used for driving the light-emitting device to emit light, and the driving layer is further used for providing a control signal to the phase control layer, and the phase control layer adjusts the temperature of the grating units based on the control signal.

13. The light field manipulation device of claim 12 wherein said light emitting device comprises: a plurality of light emitting units for emitting the light, the phase control layer comprising: a plurality of temperature control units, each temperature control unit is just right to one grating unit, the drive layer includes:

a first layer of row/column signal traces between the phase control layer and the light emitting devices, comprising: a first row of signal traces and a first column of signal traces, the first layer of row/column signal traces configured to: selecting a first row signal wiring and a first column signal wiring to provide a driving signal for a light-emitting unit, wherein the light-emitting unit emits the light based on the driving signal;

a second layer of row/column signal traces on a side of the phase control layer facing the light emitting device, comprising: a second row of signal traces and a second column of signal traces, the second layer of row/column signal traces configured to: and selecting one second row signal wire and one second column signal wire to provide the control signal for one temperature control unit, wherein the temperature control unit adjusts the temperature of the grating unit based on the control signal.

14. The light field modulation device according to claim 12, further comprising: and the packaging structure is used for packaging the light-emitting device, the grating array layer, the phase control layer and the driving layer so as to enable the light field regulating and controlling device to be solid hardware.

15. The light field modulation device according to claim 12, further comprising:

the phase detection device is used for detecting the phase of the emergent light penetrating through each grating unit and generating a compensation signal based on the detection result;

a control device to receive the compensation signal and generate the control signal based on the compensation signal.

16. A method of modulating a light field, comprising:

providing a light field modulation device as claimed in any one of the preceding claims 1-15;

the phase control layer adjusts the temperature of different grating units;

the light-emitting device provides light rays, and the light rays penetrate through the grating unit to be emitted to the outside to form emergent light rays.

17. The light field modulation method according to claim 16, wherein the phase control layer adjusting the temperature of the plurality of grating units comprises: and generating a control signal, wherein the phase control layer receives the control signal and adjusts the temperature of each grating unit in response to the control signal so as to enable the phases of the emergent rays penetrating through the adjacent grating units to have a preset phase difference.

18. The light field modulation method according to claim 17, wherein the step of the phase control layer adjusting the temperature of the plurality of grating units is preceded by the step of:

detecting an initial phase of the emergent light penetrating through each grating unit, and acquiring a phase difference of the initial phases of the emergent light penetrating through two adjacent grating units;

generating an initial compensation signal based on the phase difference of the initial phase;

adjusting the temperature of the grating units based on the initial compensation signal to make the initial phase of the emergent light passing through each grating unit the same.