CN115790864A - Black body response rate testing device and method - Google Patents
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Abstract
The invention discloses a black body response rate testing device and a method, wherein the same testing signals are respectively provided for a unit to be tested and a reference unit through a signal input module; converting the first light emitted by the black body module into second light of a required wave band through the light source processing module, equally dividing the second light into two beams, and respectively irradiating the two beams to the unit to be measured and the reference unit; the first output signal voltage of the unit to be measured and the second output signal voltage of the reference unit are measured through the signal analyzing and calculating module respectively, the first blackbody response rate of the unit to be measured is calculated according to the known first nominal area of the unit to be measured, the known second nominal area of the reference unit and the known second blackbody response rate of the reference unit, loss of light rays emitted by a blackbody in the transmission process can be eliminated, errors between theoretical calculation and actual measurement can be eliminated, and measuring accuracy is improved.
Description
Technical Field
The invention relates to the technical field of semiconductor testing, in particular to a blackbody response rate testing device and method.
Background
The thermal sensor is a device that converts an incident thermal radiation signal into an electrical signal output, and the blackbody response is defined as the ratio of the electrical signal output by the thermal sensor to the incident radiation power. Therefore, blackbody response rate is one of the important performance indicators for evaluating thermal sensors.
Currently, the black body response rate test of the thermal sensor generally adopts a direct measurement method, which obtains the unit incident work of the thermal sensor by detecting the signal output of the thermal sensor under a certain incident power conditionThe rate signal, and further judging the response capability of the heat sensor to the incident energy. After the output voltage signal is measured by a spectrum analyzer, the blackbody irradiance E is calculated according to the following formula (1), the radiant power P incident on the heat sensor is calculated according to the formula (2), and finally the blackbody response rate R is calculated according to the formula (3) bb 。
The formulas (1) to (3) are expressed as follows:
in the formula:
e-black body irradiance, W/cm 2 ；
α -modulation factor;
ε -effective emissivity of blackbody radiation source;
σ -core Pan-Boltzmann constant;
t-black body temperature, K;
T 0 -ambient temperature, K;
a-diaphragm area of black body radiation source, cm 2 ；
L is the distance between the diaphragm of the blackbody radiation source and the measured thermal sensor, cm;
P＝A n E (2)
in the formula:
p-radiation power, W;
an-nominal area of thermal sensor, cm 2 ；
In the formula:
R bb -black body response rate, V/W;
V s -a signal voltage, V.
However, the above method needs to measure the distance between the diaphragm of the blackbody radiation source and the measured thermal sensor, and parameters with variation errors such as the ambient temperature, and then perform theoretical calculation on the blackbody radiation illuminance, and does not consider the loss caused in the transmission process of the blackbody radiation source. Therefore, when the blackbody response rate of the thermal sensor is measured using the above method, there is an error that cannot be eliminated between the theoretical value and the actual value calculated using the equations (1) to (3).
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provides a blackbody response rate testing device and a blackbody response rate testing method.
In order to achieve the purpose, the technical scheme of the invention is as follows:
the invention provides a blackbody response rate testing device, which comprises:
the device comprises a signal input module, a black body module, a light source processing module, a tested module and a signal analysis and calculation module;
the measured module comprises a unit to be measured and a reference unit, the signal input module is used for providing the same test signal for the unit to be measured and the reference unit respectively, the light source processing module is used for converting a first light ray emitted by the blackbody module into a second light ray with a required wave band, equally dividing the second light ray into two light rays, and respectively irradiating the two light rays to the unit to be measured and the reference unit to be received simultaneously;
the signal analysis and calculation module is used for measuring a first output signal voltage of the unit to be measured and a second output signal voltage of the reference unit respectively, and calculating to obtain a first blackbody response rate of the unit to be measured according to a known first nominal area of the unit to be measured, a known second nominal area of the reference unit and a known second blackbody response rate of the reference unit.
Further, the light source processing module comprises a light modulation unit, a wavelength selection unit and a beam splitting unit, wherein the light modulation unit is used for converting the first light with constant light energy into third light with alternating light energy, the wavelength selection unit is used for separating the second light with a monochromatic light thermal radiation waveband from the third light, and the beam splitting unit is used for dividing the second light into a beam of fourth light and a beam of fifth light through transmission and reflection and emitting the beams of fourth light and the beams of fifth light to the unit to be measured and the reference unit respectively.
Further, the signal input module includes a first signal input unit and a second signal input unit, which are respectively used for providing the same first test signal and second test signal to the unit to be tested and the reference unit.
Further, the signal analyzing and calculating module includes a first signal analyzing module, a second signal analyzing module and a calculating module, and the first signal analyzing module and the second signal analyzing module are respectively used for measuring the first output signal voltage and the second output signal voltage, and calculating the first blackbody response rate through the calculating module.
Further, still include: a signal processing module; the signal processing module comprises a first signal amplification unit and a second signal amplification unit which are respectively used for carrying out equal amplification on a first initial output signal of the unit to be detected and a second initial output signal of the reference unit and correspondingly outputting a first intermediate output signal and a second intermediate output signal, and the first signal analysis module and the second signal analysis module respectively measure the voltage of the first output signal and the voltage of the second output signal according to the first intermediate output signal and the second intermediate output signal.
Further, the method also comprises the following steps: a power supply module; the power supply module comprises a first power supply unit and a second power supply unit which are respectively used for providing the same first bias signal and second bias signal for the unit to be tested and the reference unit.
The invention also provides a blackbody response rate testing method, which comprises the following steps:
providing a unit to be tested and a reference unit;
providing the same test signal to the unit to be tested and the reference unit respectively;
converting a first light ray emitted by a black body module into a second light ray with a required wave band, equally dividing the second light ray into two beams, and respectively emitting the two beams to the unit to be measured and the reference unit to be simultaneously received;
measuring a first output signal voltage of the unit to be measured and a second output signal voltage of the reference unit;
and calculating to obtain the first blackbody response rate of the unit to be measured according to the known first nominal area of the unit to be measured, the known second nominal area of the reference unit and the known second blackbody response rate of the reference unit.
Further, the first light emitted by the black body module is converted into second light of a required waveband, the second light is equally divided into two beams, and the two beams are respectively emitted to the unit to be measured and the reference unit to be received simultaneously, and the method specifically comprises the following steps:
converting the first light with constant light energy into a third light with alternating light energy;
separating the second light ray with monochromatic light heat radiation waveband from the third light ray;
and dividing the second light into a fourth light and a fifth light by transmission and reflection, and respectively emitting the fourth light and the fifth light to the unit to be detected and the reference unit to be received simultaneously.
Further, the measuring the first output signal voltage of the unit to be measured and the second output signal voltage of the reference unit specifically includes:
respectively carrying out equal amplification on a first initial output signal of the unit to be detected and a second initial output signal of the reference unit, and correspondingly outputting a first intermediate output signal and a second intermediate output signal;
measuring the first output signal voltage and the second output signal voltage from the first intermediate output signal and the second intermediate output signal, respectively.
Further, the first blackbody response rate R of the unit to be tested is obtained through calculation D The following formula is satisfied:
wherein A is C Is the second nominal area, V, of the reference cell D Is the first output signal voltage of the unit under test, A D Is the first nominal area, V, of the unit under test C Is the second output signal voltage of the reference cell, R C Is the second blackbody responsivity of the reference cell.
According to the technical scheme, the reference unit is introduced, monochromatic light (second light) is separated from a modulated light source (third light), the modulated light source (third light) is split into transmitted light (fourth light) and reflected light (fifth light), the unit to be measured is placed on the transmitted light path, the reference unit is placed on the reflected light path, the reference unit and the unit to be measured are simultaneously measured, output signal voltages (first output signal voltage and second output signal voltage) of the unit to be measured and the reference unit are respectively measured through the two signal analysis modules (the first signal analysis module and the second signal analysis module), and accordingly, the blackbody response rate (first blackbody response rate) of the unit to be measured can be obtained through simple calculation according to the known nominal areas (first nominal area and second nominal area) of the unit to be measured and the reference unit and the blackbody response rate (second blackbody response rate) of the reference unit. The invention can eliminate the loss in the blackbody radiation transmission process by adopting a reference comparison method to replace the traditional direct test method, can avoid the error influence between a theoretical value and an actual value in the calculation process, ensures that the measured blackbody response rate of the unit to be tested is more accurate, and is beneficial to the performance evaluation and accurate analysis of the heat sensor.
Drawings
FIG. 1 is a block diagram of the testing principle of a blackbody response rate testing device according to the present invention;
fig. 2 is a schematic structural diagram of a blackbody responsivity testing apparatus according to a preferred embodiment of the invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below, and it is obvious that the described embodiments are a part of the embodiments of the present invention, but not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without inventive step based on the embodiments of the present invention, are within the scope of protection of the present invention. Unless defined otherwise, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. As used herein, the word "comprising" and similar words are intended to mean that the element or item listed before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items.
The following provides a more detailed description of embodiments of the present invention, with reference to the accompanying drawings.
Referring to fig. 1, fig. 1 is a schematic block diagram illustrating a testing principle of a blackbody response rate testing apparatus according to the present invention. As shown in fig. 1, a blackbody responsivity test apparatus of the present invention includes: the device comprises a signal input module, a blackbody module (blackbody radiation module), a light source processing module, a module to be tested (thermal sensing module to be tested), a signal analysis and calculation module and the like which are coupled.
The module to be tested comprises a unit to be tested (a heat sensing unit to be tested) and a reference unit (a reference heat sensing unit).
The signal input module is used for providing the same test signal for the unit to be tested and the reference unit respectively.
The light source processing module is used for converting first light (first heat radiation light) emitted by the black body module into second light (second heat radiation light) with a required wave band, dividing the second light into two beams equally, and respectively emitting the two beams to the unit to be measured and the reference unit to be received simultaneously.
The signal analysis and calculation module is used for measuring a first output signal voltage of the unit to be measured and a second output signal voltage of the reference unit respectively, and calculating to obtain a first blackbody response rate of the unit to be measured according to a known first nominal area of the unit to be measured, a known second nominal area of the reference unit and a known second blackbody response rate of the reference unit.
Please refer to fig. 2 in conjunction with fig. 1. In some embodiments, the light source processing module may include a light modulation unit, a wavelength selection unit, and a beam splitting unit.
In some embodiments, the blackbody module may include, for example, a blackbody radiation source or the like.
In some embodiments, the light modulation unit may comprise, for example, a reticle or the like.
In some embodiments, the wavelength selection unit may comprise, for example, a monochromator or the like.
In some embodiments, the beam splitting unit may comprise, for example, a beam splitter mirror or the like. The beam splitter can divide incident light into two paths of reflected light and transmitted light.
In some embodiments, the signal input module may include a first signal input unit and a second signal input unit; the first signal input unit and the second signal input unit are respectively used for providing the same first test signal and second test signal for the unit to be tested and the reference unit.
In some embodiments, the first signal input unit may include, for example, a first standard signal generator or the like; the second signal input unit may include, for example, a second standard signal generator, etc.
In some embodiments, a bias power supply module may also be included. The bias power supply module may include a first power supply unit and a second power supply unit. Further, the first power supply unit may include a first bias power supply; the second power supply unit may include a second bias power supply. The first bias power supply and the second bias power supply may be used to provide the same first bias signal and second bias signal to the cell under test and the reference cell, respectively. The first bias signal and the second bias signal may be, for example, bias voltage signals or the like.
In some embodiments, the first bias power supply and the second bias power supply may include batteries or the like that can provide the same voltage.
In some embodiments, the unit under test may include a thermal sensor under test, or the like; the reference unit may include a reference thermal sensor, etc.
Further, the thermal sensor under test and the reference thermal sensor may have the same nominal area. I.e. the first nominal area and the second nominal area may be equal.
Further, the distances between the thermal sensor under test and the reference thermal sensor and the beam splitter may be equal.
In some embodiments, a signal processing module may also be included. The signal processing module may include a first signal amplifying unit and a second signal amplifying unit.
In some embodiments, the first signal amplifying unit may include a first operational amplifier; the second signal amplifying unit may include a second operational amplifier conforming to the first operational amplifier.
In some embodiments, the signal analysis and computation module may include a first signal analysis module, a second signal analysis module, and a computation module.
In some embodiments, the first signal analysis module may comprise a first spectrum analyzer; the second signal analysis module may include a second spectrum analyzer that conforms to the first spectrum analyzer specification.
In some embodiments, the computing module may include an upper computer or the like.
Please refer to fig. 2. In some embodiments, the first light ray with constant luminous energy emitted from the blackbody radiation source is modulated by the chopper wheel and converted into a third light ray with alternating luminous energy (third thermal radiation light). The third light passes through the monochrometer, separates the second light (being the monochromatic light that the second light is for having certain thermal radiation wave band) that has monochromatic light thermal radiation wave band from it to obtain the thermal radiation light of required wavelength. The beam splitter can divide the second light into a fourth light (fourth thermal radiation light) and a fifth light (fifth thermal radiation light) by transmission and reflection, and the fourth light and the fifth light are respectively emitted to the thermal sensor to be measured and the reference thermal sensor. Wherein a thermal sensor to be measured can be placed on the transmitted light path and a reference thermal sensor can be placed on the reflected light path. Therefore, the fourth light ray and the fifth light ray can be simultaneously received by the thermal sensor to be detected and the reference thermal sensor respectively, synchronous measurement of thermal radiation light emitted by the blackbody radiation source is achieved, and respective electric signals are output through photoelectric conversion.
Furthermore, the output end of the first bias power supply is input into the heat sensor to be tested, and the output end of the first standard signal generator is connected to the input end of the heat sensor to be tested. The output end of the thermal sensor to be tested is input to the input end of the first operational amplifier, and the output end of the first operational amplifier is input to the input end of the first spectrum analyzer.
The output end of the second bias power supply is input into the reference heat sensor, and the output end of the second standard signal generator is connected to the input end of the reference heat sensor. The output terminal of the reference thermal sensor is input to the input terminal of the second operational amplifier, and the output terminal of the second operational amplifier is input to the input terminal of the second spectrum analyzer.
And the output end of the first spectrum analyzer and the output end of the second spectrum analyzer are input to the upper computer.
The first spectrum analyzer is used for measuring a first output signal voltage of the thermal sensor to be measured; the second spectrum analyzer is for measuring a second output signal voltage of the reference thermal sensor. The upper computer is used for calculating to obtain a first blackbody response rate of the thermal sensor to be measured.
Further, the first operational amplifier and the second operational amplifier are respectively used for equally amplifying a first initial output signal output by the thermal sensor to be tested and a second initial output signal output by the reference thermal sensor, and correspondingly outputting a first intermediate output signal and a second intermediate output signal. The first intermediate output signal and the second intermediate output signal may be read out by the first spectrum analyzer and the second spectrum analyzer, respectively, to measure the first output signal voltage and the second output signal voltage.
And the upper computer can calculate the first blackbody response rate of the thermal sensor to be measured according to the known first nominal area of the thermal sensor to be measured, the known second nominal area of the reference thermal sensor and the known second blackbody response rate of the reference thermal sensor.
The black body responsivity test method of the present invention is described in detail below with reference to the accompanying drawings.
Please refer to fig. 1-2. The blackbody response rate testing method can be realized based on the blackbody response rate testing device, and can comprise the following steps of:
step S1: a unit under test and a reference unit are provided.
In some embodiments, the unit under test may be a thermal sensor under test; the reference unit may employ a reference thermal sensor.
Step S2: the same test signal is supplied to the unit under test and the reference unit, respectively.
In some embodiments, a first bias power supply may be utilized to provide a first bias signal to a thermal sensor under test. At the same time, a second bias power supply may be utilized to provide a second bias signal to the reference thermal sensor. The first bias signal and the second bias signal may be, for example, bias voltage signals or the like.
Also, a first standard signal generator may be utilized to provide a first test signal to the thermal sensor under test. At the same time, a second reference signal generator may be utilized to provide a second test signal to the reference thermal sensor.
And step S3: the first light emitted by the blackbody radiation source is converted into second light of a required wave band, the second light is divided into two beams equally, and the two beams respectively irradiate to the unit to be measured and the reference unit to be received simultaneously.
In some embodiments, a blackbody radiation source can be used to emit a first light ray having constant light stability and can be modulated by a chopper wheel to convert the first light ray into a third light ray having alternating light energy.
Then, the second light having a certain thermal radiation band and being monochromatic light can be separated from the third light by using a monochromator, thereby obtaining the second light having a desired wavelength.
Then, the second light can be equally divided into a fourth light and a fifth light by transmission and reflection by using a beam splitter, and the fourth light and the fifth light are respectively emitted to the thermal sensor to be measured and the reference thermal sensor.
The thermal sensor to be measured can be placed on the transmission light path of the beam splitter, and the reference thermal sensor is placed on the reflection light path of the beam splitter, so that the fourth light ray and the fifth light ray can be simultaneously received by the thermal sensor to be measured and the reference thermal sensor respectively, synchronous measurement of thermal radiation light emitted by the blackbody radiation source is realized, and respective electric signals are output through photoelectric conversion.
And step S4: and measuring a first output signal voltage of the unit to be measured and a second output signal voltage of the reference unit.
In some embodiments, a first operational amplifier and a second operational amplifier may be utilized to equally amplify a first initial output signal output by the heat sensor to be measured and a second initial output signal output by the reference heat sensor, respectively, and correspondingly output a first intermediate output signal and a second intermediate output signal.
Then, the first intermediate output signal and the second intermediate output signal can be read out by the first spectrum analyzer and the second spectrum analyzer respectively to obtain a first output signal voltage and a second output signal voltage through measurement.
Step S5: and calculating to obtain the first blackbody response rate of the unit to be measured according to the known first nominal area of the unit to be measured, the known second nominal area of the reference unit and the known second blackbody response rate of the reference unit.
In some embodiments, the upper computer may be utilized to measure the first output signal voltage V of the thermal sensor under test D Reference to the second output signal voltage V of the thermal sensor C And a known first nominal area A of the thermal sensor under test D And a second nominal area A of the reference thermal sensor C And a second blackbody response rate R of the reference thermal sensor C The following formula (4) can be obtained by conversion according to the above formulas (1) to (3):
therefore, the first blackbody response rate R of the thermal sensor to be measured can be obtained through simple calculation D 。
In summary, the present invention introduces a reference thermal sensor, splits a modulated light source (third light) into a transmitted light (fourth light) and a reflected light (fifth light) after separating a monochromatic light (second light), places a thermal sensor to be measured on the transmitted light path, places the reference thermal sensor on the reflected light path, so that the reference thermal sensor and the thermal sensor to be measured simultaneously perform measurement, and measures a first output signal voltage of the thermal sensor to be measured and a second output signal voltage of the reference thermal sensor respectively by a first spectrum analyzer and a second spectrum analyzer, so that a first blackbody response rate of the thermal sensor to be measured can be obtained by simple calculation according to a known first nominal area of the thermal sensor to be measured and a known second nominal area of the reference thermal sensor, and a second blackbody response rate of the reference thermal sensor. The invention can eliminate the loss in the blackbody radiation transmission process by adopting a reference comparison method to replace the traditional direct test method, can avoid the error influence between a theoretical value and an actual value in the calculation process, ensures that the measured blackbody response rate of the unit to be tested is more accurate, and is beneficial to the performance evaluation and accurate analysis of the heat sensor.
Although the embodiments of the present invention have been described in detail hereinabove, it is apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it is to be understood that such modifications and variations fall within the scope and spirit of the present invention as set forth in the following claims. Moreover, the invention as described herein is capable of other embodiments and of being practiced or of being carried out in various ways.
Claims (10)
1. A black body responsivity testing device, comprising:
the device comprises a signal input module, a black body module, a light source processing module, a tested module and a signal analysis and calculation module;
the device comprises a black body module, a tested module, a signal input module, a light source processing module and a control module, wherein the tested module comprises a unit to be tested and a reference unit, the signal input module is used for providing the same test signal for the unit to be tested and the reference unit respectively, the light source processing module is used for converting a first light ray emitted by the black body module into a second light ray with a required wave band, equally dividing the second light ray into two beams, and respectively irradiating the two beams to the unit to be tested and the reference unit to be received simultaneously;
the signal analysis and calculation module is used for measuring a first output signal voltage of the unit to be measured and a second output signal voltage of the reference unit respectively, and calculating to obtain a first blackbody response rate of the unit to be measured according to a known first nominal area of the unit to be measured, a known second nominal area of the reference unit and a known second blackbody response rate of the reference unit.
2. The blackbody responsivity testing device according to claim 1, wherein the light source processing module comprises a light modulation unit, a wavelength selection unit and a beam splitting unit, the light modulation unit is used for converting the first light with constant light energy into a third light with alternating light energy, the wavelength selection unit is used for separating the second light with monochromatic light thermal radiation waveband from the third light, and the beam splitting unit is used for dividing the second light into a fourth light and a fifth light by transmission and reflection and emitting the fourth light and the fifth light to the unit to be tested and the reference unit respectively.
3. The blackbody response rate test apparatus of claim 1, wherein the signal input module comprises a first signal input unit and a second signal input unit for providing a same first test signal and a same second test signal to the unit under test and the reference unit, respectively.
4. The blackbody response rate testing device of claim 1, wherein the signal analyzing and calculating module comprises a first signal analyzing module, a second signal analyzing module and a calculating module, and the first signal analyzing module and the second signal analyzing module are respectively configured to measure the first output signal voltage and the second output signal voltage and calculate the first blackbody response rate through the calculating module.
5. The blackbody responsivity test apparatus according to claim 4, further comprising: a signal processing module; the signal processing module comprises a first signal amplifying unit and a second signal amplifying unit which are respectively used for carrying out equal amplification on a first initial output signal of the unit to be detected and a second initial output signal of the reference unit and correspondingly outputting a first intermediate output signal and a second intermediate output signal, and the first signal analyzing module and the second signal analyzing module respectively measure the voltage of the first output signal and the voltage of the second output signal according to the first intermediate output signal and the second intermediate output signal.
6. The blackbody responsivity testing apparatus according to claim 1, further comprising: a power supply module; the power supply module comprises a first power supply unit and a second power supply unit which are respectively used for providing the same first bias signal and second bias signal for the unit to be tested and the reference unit.
7. A blackbody responsivity test method is characterized by comprising the following steps:
providing a unit to be tested and a reference unit;
providing the same test signal to the unit to be tested and the reference unit respectively;
converting a first light ray emitted by a black body module into a second light ray with a required wave band, equally dividing the second light ray into two beams, and respectively emitting the two beams to the unit to be measured and the reference unit to be simultaneously received;
measuring a first output signal voltage of the unit to be measured and a second output signal voltage of the reference unit;
and calculating to obtain the first blackbody response rate of the unit to be measured according to the known first nominal area of the unit to be measured, the known second nominal area of the reference unit and the known second blackbody response rate of the reference unit.
8. The blackbody response rate testing method of claim 7, wherein the converting a first light beam emitted from the blackbody module into a second light beam of a desired wavelength band, and dividing the second light beam equally into two beams, which are respectively emitted to the unit to be tested and the reference unit to be received simultaneously, specifically comprises:
converting the first light with constant light energy into a third light with alternating light energy;
separating the second light ray with monochromatic light heat radiation waveband from the third light ray;
and dividing the second light into a fourth light and a fifth light by transmission and reflection, and respectively emitting the fourth light and the fifth light to the unit to be detected and the reference unit to be received simultaneously.
9. The blackbody response rate testing method of claim 7, wherein the measuring the first output signal voltage of the unit under test and the second output signal voltage of the reference unit specifically comprises:
respectively carrying out equal amplification on a first initial output signal of the unit to be detected and a second initial output signal of the reference unit, and correspondingly outputting a first intermediate output signal and a second intermediate output signal;
measuring the first output signal voltage and the second output signal voltage from the first intermediate output signal and the second intermediate output signal, respectively.
10. The blackbody response rate testing method of claim 7, wherein the first blackbody response rate R of the unit under test is calculated D The following formula is satisfied:
wherein A is C Is the second nominal area, V, of the reference cell D Is the first output signal voltage of the unit under test, A D Is the first nominal area, V, of the unit under test C Is the second input of the reference cellOut signal voltage, R C Is the second blackbody response rate of the reference cell.
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| CN117949098B (en) * | 2024-03-25 | 2024-06-04 | 杭州海康微影传感科技有限公司 | Response rate testing method and device |
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