CN115790864A - Black body response rate testing device and method - Google Patents

Abstract

The invention discloses a black body response rate testing device and a method, wherein the same testing signals are respectively provided for a unit to be tested and a reference unit through a signal input module; converting the first light emitted by the black body module into second light of a required wave band through the light source processing module, equally dividing the second light into two beams, and respectively irradiating the two beams to the unit to be measured and the reference unit; the first output signal voltage of the unit to be measured and the second output signal voltage of the reference unit are measured through the signal analyzing and calculating module respectively, the first blackbody response rate of the unit to be measured is calculated according to the known first nominal area of the unit to be measured, the known second nominal area of the reference unit and the known second blackbody response rate of the reference unit, loss of light rays emitted by a blackbody in the transmission process can be eliminated, errors between theoretical calculation and actual measurement can be eliminated, and measuring accuracy is improved.

Description

A black body responsivity test device and method

technical field

The invention relates to the technical field of semiconductor testing, in particular to a blackbody responsivity testing device and method.

Background technique

The thermal sensor is a device that converts the incident thermal radiation signal into an electrical signal output, and the blackbody responsivity is defined as the ratio of the electrical signal output by the thermal sensor to the incident radiation power. Therefore, the blackbody responsivity is one of the important performance indicators for evaluating thermal sensors.

At present, the black body responsivity test of the thermal sensor generally adopts the direct measurement method, which detects the signal output of the thermal sensor under a certain incident power condition, obtains the signal of the thermal sensor at the unit incident power, and then judges the thermal sensor’s response to the incident power. energy responsiveness. That is, after measuring the output voltage signal with a spectrum analyzer, calculate the black body irradiance E according to the following formula (1), and then calculate the radiation power P incident on the thermal sensor according to the formula (2), and finally according to the formula (3) Calculate the blackbody response rate R _bb .

Formula (1) to formula (3) are expressed as follows:

In the formula:

E——black body irradiance, W/cm ² ;

α—modulation factor;

ε——the effective emissivity of the blackbody radiation source;

σ——Spinfan-Boltzmann constant;

T——black body temperature, K;

T ₀ ——ambient temperature, K;

A - the aperture area of the blackbody radiation source, cm ² ;

L——the distance between the light barrier of the blackbody radiation source and the thermal sensor under test, cm;

P=A _n E (2)

In the formula:

P—radiation power, W;

An - nominal area of thermal sensor, cm ² ;

In the formula:

R _bb —— blackbody responsivity, V/W;

V _s ——signal voltage, V.

However, the above method needs to measure the distance between the light barrier of the blackbody radiation source and the thermal sensor under test, as well as parameters with variable errors such as the ambient temperature, and then perform theoretical calculations on the blackbody radiation illuminance, without considering the transmission process of the blackbody radiation source loss caused. Therefore, when using the above-mentioned method to measure the black body responsivity of the thermal sensor, there is an error that cannot be eliminated between the theoretical value and the actual value calculated by using the formula (1) to formula (3).

Contents of the invention

The purpose of the present invention is to overcome the above-mentioned defects in the prior art, and provide a blackbody responsivity testing device and method.

To achieve the above object, the technical scheme of the present invention is as follows:

The invention provides a blackbody response rate testing device, comprising:

Signal input module, black body module, light source processing module, measured module, and signal analysis and calculation module;

The module under test includes a unit under test and a reference unit, the signal input module is used to provide the same test signal to the unit under test and the reference unit respectively, and the light source processing module is used to convert the black body module Converting the emitted first light into a second light of a required wavelength band, and dividing the second light into two beams, which are respectively directed to the unit under test and the reference unit to be received simultaneously;

The signal analysis and calculation module is used to respectively measure the first output signal voltage of the unit under test and the second output signal voltage of the reference unit, and according to the known first nominal area of the unit under test and the second nominal area of the reference unit, and the second blackbody responsivity of the reference unit to calculate the first blackbody responsivity of the unit under test.

Further, the light source processing module includes a light modulation unit, a wavelength selection unit, and a beam splitting unit, and the light modulation unit is used to convert the first light with constant light energy into a third light with alternating light energy. light, the wavelength selection unit is used to separate the second light having a monochromatic photothermal radiation wavelength band from the third light, and the beam splitting unit is used to split the second light through transmission and reflection Divide into a bundle of fourth rays and a bundle of fifth rays, and shoot to the unit under test and the reference unit respectively.

Further, the signal input module includes a first signal input unit and a second signal input unit for providing the same first test signal and second test signal to the unit under test and the reference unit respectively.

Further, the signal analysis and calculation module includes a first signal analysis module, a second signal analysis module and a calculation module, the first signal analysis module and the second signal analysis module are respectively used to measure the first output The signal voltage and the second output signal voltage are calculated by the calculation module to obtain the first black body responsivity.

Further, it also includes: a signal processing module; the signal processing module includes a first signal amplifying unit and a second signal amplifying unit, respectively used for the first initial output signal of the unit under test and the first initial output signal of the reference unit. The two initial output signals are equally amplified, and correspondingly output a first intermediate output signal and a second intermediate output signal, and the first signal analysis module and the second signal analysis module are respectively based on the first intermediate output signal and the A second intermediate output signal, measuring the first output signal voltage and the second output signal voltage.

Further, it also includes: a power supply module; the power supply module includes a first power supply unit and a second power supply unit, which are used to provide the same first bias signal and second bias signal to the unit under test and the reference unit respectively. set signal.

The present invention also provides a blackbody response rate testing method, comprising:

Provide the unit under test and the reference unit;

providing the same test signal to the unit under test and the reference unit respectively;

Converting the first light emitted by the blackbody module into a second light of the required wavelength band, and dividing the second light into two beams, which are respectively directed to the unit under test and the reference unit to be received simultaneously;

measuring the first output signal voltage of the unit under test and the second output signal voltage of the reference unit;

According to the known first nominal area of the unit under test and the second nominal area of the reference unit, and the second black body responsivity of the reference unit, calculate the first black body of the unit under test response rate.

Further, the first light emitted by the black body module is converted into the second light of the required wavelength band, and the second light is divided into two beams, which are directed to the unit under test and the reference unit respectively to be received simultaneously, including:

converting the first light with constant light energy into third light with alternating light energy;

separating the second light having a monochromatic photothermal radiation band from the third light;

The second light rays are equally divided into a bundle of fourth rays and a bundle of fifth rays through transmission and reflection, and are irradiated to the unit under test and the reference unit to be received simultaneously.

Further, the measuring the first output signal voltage of the unit under test and the second output signal voltage of the reference unit specifically includes:

Respectively amplifying the first initial output signal of the unit under test and the second initial output signal of the reference unit equally, and correspondingly outputting the first intermediate output signal and the second intermediate output signal;

The first output signal voltage and the second output signal voltage are measured based on the first intermediate output signal and the second intermediate output signal, respectively.

Further, the calculated first black body responsivity R _D of the unit under test satisfies the following formula:

Among them, _AC is the second nominal area of the reference unit, V _D is the first output signal voltage of the unit under test, _AD is the first nominal area of the unit under test, and V _C is the second output signal of the reference unit Voltage, R _C is the second blackbody responsivity of the reference cell.

As can be seen from the above technical solution, the present invention introduces a reference unit and splits the modulated light source (the third light) into the transmitted light (the fourth light) after separating the monochromatic light (the second light). ) and reflected light (the fifth ray), place the unit to be measured on the transmitted light path, and place the reference unit on the reflected light path, so that the reference unit and the unit to be measured are measured simultaneously, and pass through two signal analysis modules (the first signal analysis module and the second signal analysis module) measure the output signal voltages (first output signal voltage and second output signal voltage) of the unit under test and the reference unit respectively, so that the known unit under test and the reference unit can be The nominal area (the first nominal area and the second nominal area), and the blackbody response rate of the reference unit (the second blackbody response rate), the blackbody response rate of the unit under test (the first blackbody response rate) can be obtained by simple calculation Rate). The present invention replaces the traditional direct test method with the reference comparison method, can eliminate the loss in the black body radiation transmission process, and can avoid the influence of the error between the theoretical value and the actual value in the calculation process, so that the measured unit under test The black body responsivity is more accurate, which is beneficial to the performance evaluation and accurate analysis of thermal sensing devices.

Description of drawings

Fig. 1 is a test principle block diagram of a kind of blackbody responsivity testing device of the present invention;

Fig. 2 is a schematic structural diagram of a black body responsivity testing device according to a preferred embodiment of the present invention.

Detailed ways

In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of them. the embodiment. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein shall have the usual meanings understood by those skilled in the art to which the present invention belongs. As used herein, "comprising" and similar words mean that the elements or items appearing before the word include the elements or items listed after the word and their equivalents, without excluding other elements or items.

The specific embodiment of the present invention will be further described in detail below in conjunction with the accompanying drawings.

Please refer to FIG. 1 . FIG. 1 is a test principle block diagram of a black body responsivity test device of the present invention. As shown in Figure 1, a kind of blackbody responsivity testing device of the present invention comprises: form the signal input module of coupling, blackbody module (blackbody radiation module), light source processing module, tested module (tested thermal sensing module) , and signal analysis and calculation modules and other main components.

Wherein, the module under test includes a unit under test (thermal sensing unit to be tested) and a reference unit (reference thermal sensing unit).

The signal input module is used to provide the same test signal to the unit under test and the reference unit respectively.

The light source processing module is used to convert the first light (first thermal radiation light) emitted by the black body module into the second light (second thermal radiation light) of the required wavelength band, and divide the second light into two beams, and emit them respectively. to the unit under test and the reference unit to be received simultaneously.

The signal analysis and calculation module is used to respectively measure the first output signal voltage of the unit under test and the second output signal voltage of the reference unit, and according to the known first nominal area of the unit under test and the second nominal area of the reference unit Area, and the second black body responsivity of the reference unit, calculate the first black body responsivity of the unit under test.

See Figure 2 in conjunction with Figure 1. In some embodiments, the light source processing module may include a light modulation unit, a wavelength selection unit and a beam splitting unit.

In some embodiments, a blackbody module may include, for example, a blackbody radiation source or the like.

In some embodiments, the light modulation unit may include, for example, a dimmer disc or the like.

In some embodiments, the wavelength selective unit may include, for example, a monochromator or the like.

In some embodiments, the beam splitting unit may include, for example, a beam splitting mirror or the like. The beam splitter can split the incident light into reflected light and transmitted light.

In some embodiments, the signal input module may include a first signal input unit and a second signal input unit; the first signal input unit and the second signal input unit are respectively used to provide the same first test to the unit under test and the reference unit signal and a second test signal.

In some embodiments, the first signal input unit may include, for example, a first standard signal generator and the like; the second signal input unit may include, for example, a second standard signal generator and the like.

In some embodiments, a bias power module may also be included. The bias power supply module may include a first power supply unit and a second power supply unit. Further, the first power supply unit may include a first bias power supply; the second power supply unit may include a second bias power supply. The first bias power supply and the second bias power supply can be used to provide the same first bias signal and second bias signal to the unit under test and the reference unit respectively. The first bias signal and the second bias signal can be, for example, bias voltage signals or the like.

In some embodiments, the first bias power supply and the second bias power supply may include batteries or the like capable of providing the same voltage.

In some embodiments, the unit to be tested may include a thermal sensor to be tested and the like; the reference unit may include a reference thermal sensor and the like.

Further, the thermal sensor under test and the reference thermal sensor may have the same nominal area. That is, the first nominal area and the second nominal area may be equal.

Further, the distances between the thermal sensor to be measured and the reference thermal sensor and the beam splitter can be equal.

In some embodiments, a signal processing module may also be included. The signal processing module may include a first signal amplifying unit and a second signal amplifying unit.

In some embodiments, the first signal amplifying unit may include a first operational amplifier; the second signal amplifying unit may include a second operational amplifier having the same specifications as the first operational amplifier.

In some embodiments, the signal analysis and calculation module may include a first signal analysis module, a second signal analysis module and a calculation module.

In some embodiments, the first signal analysis module may include a first spectrum analyzer; the second signal analysis module may include a second spectrum analyzer conforming to the specification of the first spectrum analyzer.

In some embodiments, the computing module may include a host computer and the like.

See Figure 2. In some embodiments, the first light with constant light energy emitted by the black body radiation source is converted into the third light with alternating light energy (third thermal radiation light) after being modulated by the modulation disc. The third light passes through the monochromator, from which the second light with a monochromatic photothermal radiation band is separated (that is, the second light is monochromatic light with a certain thermal radiation band), so as to obtain thermal radiation light with a desired wavelength. The beam splitter can divide the second light into a fourth light (the fourth heat radiation light) and a fifth light (the fifth heat radiation light) through transmission and reflection, and send them to the thermal sensor to be tested respectively and reference thermal sensor. Wherein, the thermal sensor to be measured can be placed on the transmitted light path, and the reference thermal sensor can be placed on the reflected light path. In this way, the fourth light and the fifth light can be simultaneously received by the thermal sensor to be measured and the reference thermal sensor respectively, so as to realize the simultaneous measurement of the thermal radiation light emitted by the black body radiation source, and output respective electrical signals through photoelectric conversion.

Further, the output terminal of the first bias power supply is input to the thermal sensor to be measured, and the output terminal of the first standard signal generator is connected to the input terminal of the thermal sensor to be measured. The output terminal of the thermal sensor to be measured is input to the input terminal of the first operational amplifier, and the output terminal of the first operational amplifier is input to the input terminal of the first spectrum analyzer.

The output terminal of the second bias power supply is input to the reference thermal sensor, and the output terminal of the second standard signal generator is connected to the input terminal of the reference thermal sensor. The output terminal of the reference thermal sensor is input to the input terminal of the second operational amplifier, and the output terminal of the second operational amplifier is input to the input terminal of the second spectrum analyzer.

The output end of the first spectrum analyzer and the output end of the second spectrum analyzer are input to the host computer.

Wherein, the first spectrum analyzer is used to measure the first output signal voltage of the thermal sensor to be tested; the second spectrum analyzer is used to measure the second output signal voltage of the reference thermal sensor. The upper computer is used to calculate the first blackbody response rate of the thermal sensor to be tested.

Further, the first operational amplifier and the second operational amplifier are respectively used to equally amplify the first initial output signal output by the thermal sensor to be measured and the second initial output signal output by the reference thermal sensor, and correspondingly output the first intermediate output signal and Second intermediate output signal. Through the first spectrum analyzer and the second spectrum analyzer, the first intermediate output signal and the second intermediate output signal can be respectively read out to measure the first output signal voltage and the second output signal voltage.

The host computer can calculate the first black body of the thermal sensor to be measured according to the known first nominal area of the thermal sensor to be measured, the second nominal area of the reference thermal sensor, and the second black body responsivity of the reference thermal sensor response rate.

A blackbody responsivity test method of the present invention will be described in detail below through specific implementation methods and in conjunction with the accompanying drawings.

See Figure 1-Figure 2. A blackbody responsivity test method of the present invention can be realized based on the above-mentioned blackbody responsivity test device of the present invention, and can include the following steps:

Step S1: providing a unit under test and a reference unit.

In some embodiments, the unit under test may be a thermal sensor under test; the reference unit may use a reference thermal sensor.

Step S2: providing the same test signal to the unit under test and the reference unit respectively.

In some embodiments, a first bias power supply may be used to provide a first bias signal to the thermal sensor under test. At the same time, a second bias signal may be provided to the reference thermal sensor using a second bias power supply. The first bias signal and the second bias signal can be, for example, bias voltage signals or the like.

Moreover, the first standard signal generator can be used to provide the first test signal to the thermal sensor to be tested. At the same time, a second standard signal generator may be utilized to provide a second test signal to the reference thermal sensor.

Step S3: converting the first light emitted by the black body radiation source into the second light of the required wavelength band, and dividing the second light into two beams, which are respectively directed to the unit under test and the reference unit to be received simultaneously.

In some embodiments, the blackbody radiation source can be used to emit the first light with constant light energy, and the first light can be converted into the third light with alternating light energy after being modulated by a modulator.

Then, the monochromator can be used to separate the second light having a certain thermal radiation wavelength band and being monochromatic light from the third light, so as to obtain the second light with the required wavelength.

Then, a beam splitter can be used to split the second light into a bundle of fourth light and a bundle of fifth light through transmission and reflection, and irradiate to the thermal sensor to be measured and the reference thermal sensor respectively.

By placing the thermal sensor to be measured on the transmitted light path of the beam splitter, and placing the reference thermal sensor on the reflected light path of the beam splitter, the fourth light and the fifth light can be respectively detected by the thermal sensor to be measured and the reference The thermal sensor simultaneously receives, realizes the synchronous measurement of the thermal radiation light emitted by the black body radiation source, and outputs respective electrical signals through photoelectric conversion.

Step S4: Measure the first output signal voltage of the unit under test and the second output signal voltage of the reference unit.

In some embodiments, the first operational amplifier and the second operational amplifier can be used to amplify the first initial output signal output by the thermal sensor to be measured and the second initial output signal output by the reference thermal sensor respectively, and output the first initial output signal correspondingly. an intermediate output signal and a second intermediate output signal.

Then, the first intermediate output signal and the second intermediate output signal can be read out respectively by the first spectrum analyzer and the second spectrum analyzer, so as to measure and obtain the first output signal voltage and the second output signal voltage.

Step S5: Calculate the first blackbody responsivity of the unit under test according to the known first nominal area of the unit under test, the second nominal area of the reference unit, and the second blackbody responsivity of the reference unit.

In some embodiments, the host computer can be used to measure the first output signal voltage V _D of the thermal sensor to be tested, the second output signal voltage V _C of the reference thermal sensor, and the known first output signal voltage V C of the thermal sensor to be measured. A nominal area A _D and the second nominal area A _C of the reference thermal sensor, and the second black body responsivity R _C of the reference thermal sensor can be converted according to the aforementioned formula (1) to formula (3) to obtain the following formula (4):

Therefore, the first blackbody responsivity R _D of the thermal sensor to be tested can be obtained through simple calculation.

In summary, the present invention introduces a reference thermal sensor, and after separating the modulated light source (third light) into monochromatic light (second light), the beam is split into transmitted light (fourth light) and reflected light. (fifth ray), place the heat sensor to be measured on the transmission light path, place the reference heat sensor on the reflection light path, make the reference heat sensor and the heat sensor to be measured measure simultaneously, and pass through the first spectrum analyzer and the second The spectrum analyzer respectively measures the first output signal voltage of the thermal sensor to be measured and the second output signal voltage of the reference thermal sensor), so that according to the known first nominal area of the thermal sensor to be measured and the first nominal area of the reference thermal sensor Two nominal areas, and the second blackbody responsivity of the reference thermal sensor, the first blackbody responsivity of the thermal sensor to be tested can be obtained by simple calculation. The present invention replaces the traditional direct test method with the reference comparison method, can eliminate the loss in the black body radiation transmission process, and can avoid the influence of the error between the theoretical value and the actual value in the calculation process, so that the measured unit under test The black body responsivity is more accurate, which is beneficial to the performance evaluation and accurate analysis of thermal sensing devices.

Although the embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and changes can be made to the embodiments. However, it should be understood that such modifications and changes are within the scope and spirit of the present invention described in the claims. Furthermore, the invention described herein is capable of other embodiments and of being practiced or carried out in various ways.

Claims (10)

1. A blackbody responsivity testing device, characterized in that, comprising: Signal input module, black body module, light source processing module, measured module, and signal analysis and calculation module; The module under test includes a unit under test and a reference unit, the signal input module is used to provide the same test signal to the unit under test and the reference unit respectively, and the light source processing module is used to convert the black body module Converting the emitted first light into a second light of a required wavelength band, and dividing the second light into two beams, which are respectively directed to the unit under test and the reference unit to be received simultaneously; The signal analysis and calculation module is used to respectively measure the first output signal voltage of the unit under test and the second output signal voltage of the reference unit, and according to the known first nominal area of the unit under test and the second nominal area of the reference unit, and the second blackbody responsivity of the reference unit to calculate the first blackbody responsivity of the unit under test. 2. The black body responsivity test device according to claim 1, wherein the light source processing module comprises a light modulation unit, a wavelength selection unit and a beam splitting unit, and the light modulation unit is used to convert The first light is converted into a third light with alternating light energy, the wavelength selection unit is used to separate the second light with a monochromatic photothermal radiation band from the third light, the The beam splitting unit is used for dividing the second light into a bundle of fourth light and a bundle of fifth light through transmission and reflection, and irradiate to the unit under test and the reference unit respectively. 3. The blackbody responsivity testing device according to claim 1, wherein the signal input module comprises a first signal input unit and a second signal input unit, which are respectively used to provide the unit under test and the reference The unit provides the same first and second test signals. 4. blackbody responsivity testing device according to claim 1, is characterized in that, described signal analysis and calculation module comprise first signal analysis module, second signal analysis module and calculation module, described first signal analysis module and The second signal analysis module is used to measure the first output signal voltage and the second output signal voltage respectively, and calculate the first black body responsivity through the calculation module. 5. blackbody responsivity testing device according to claim 4, is characterized in that, also comprises: signal processing module; Said signal processing module comprises a first signal amplifying unit and a second signal amplifying unit, is respectively used for said The first initial output signal of the unit under test and the second initial output signal of the reference unit are equally amplified, and correspondingly output the first intermediate output signal and the second intermediate output signal, the first signal analysis module and the second The second signal analysis module measures the first output signal voltage and the second output signal voltage according to the first intermediate output signal and the second intermediate output signal respectively. 6. The blackbody responsivity testing device according to claim 1, further comprising: a power supply module; the power supply module comprises a first power supply unit and a second power supply unit, which are respectively used to supply the unit under test and The reference unit provides the same first and second bias signals. 7. A test method for blackbody responsivity, comprising: Provide the unit under test and the reference unit; providing the same test signal to the unit under test and the reference unit respectively; Converting the first light emitted by the blackbody module into a second light of the required wavelength band, and dividing the second light into two beams, which are respectively directed to the unit under test and the reference unit to be received simultaneously; measuring the first output signal voltage of the unit under test and the second output signal voltage of the reference unit; According to the known first nominal area of the unit under test and the second nominal area of the reference unit, and the second black body responsivity of the reference unit, calculate the first black body of the unit under test response rate. 8. The black body responsivity testing method according to claim 7, wherein the first light emitted by the black body module is converted into the second light of the required waveband, and the second light is equally divided into Two beams, which are directed to the unit under test and the reference unit respectively to be received simultaneously, specifically include: converting the first light with constant light energy into third light with alternating light energy; separating the second light having a monochromatic photothermal radiation band from the third light; The second light rays are equally divided into a bundle of fourth rays and a bundle of fifth rays through transmission and reflection, and are irradiated to the unit under test and the reference unit to be received simultaneously. 9. The blackbody responsivity testing method according to claim 7, wherein the measuring the first output signal voltage of the unit under test and the second output signal voltage of the reference unit specifically comprises: Respectively amplifying the first initial output signal of the unit under test and the second initial output signal of the reference unit equally, and correspondingly outputting the first intermediate output signal and the second intermediate output signal; The first output signal voltage and the second output signal voltage are measured based on the first intermediate output signal and the second intermediate output signal, respectively. 10. blackbody responsivity testing method according to claim 7, is characterized in that, the described first blackbody responsivity R _D of the described unit under test that is calculated satisfies the following formula:

Among them, _AC is the second nominal area of the reference unit, V _D is the first output signal voltage of the unit under test, _AD is the first nominal area of the unit under test, and V _C is the second output signal of the reference unit Voltage, R _C is the second blackbody responsivity of the reference cell.

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