CN115758735A - Scanning magnet dynamic identification real-time segmentation slope feedback method and system - Google Patents
Scanning magnet dynamic identification real-time segmentation slope feedback method and system Download PDFInfo
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Abstract
The invention belongs to the technical field of synchrotron, and relates to a scanning magnet dynamic identification real-time segmentation slope feedback method, a system, a readable medium and computing equipment, which comprises the following steps: acquiring beam position distribution information of beams in horizontal and vertical directions; obtaining different kinds of error information according to the beam position distribution information; performing segmented slope feedback according to the error information to obtain an optimized power supply triangular wave excitation curve; and inputting the power supply triangular wave excitation curve into the magnet power supply, and obtaining new segment slope feedback after the beam current passes again until the scanning beam spot of the terminal meets the preset uniformity. The invention can directly detect and optimize the beam uniformity, has high compatibility and reliability, does not need to introduce additional hardware equipment, and has low cost and convenient use.
Description
Technical Field
The invention relates to a scanning magnet dynamic identification real-time segmentation slope feedback method and system, and belongs to the technical field of synchrotrons.
Background
Nowadays, accelerators have been developed rapidly in both basic research and extended application. Accelerators come in a very wide variety: linear accelerators, cyclotrons, synchrotrons, and the like. After accelerating the particles to a desired energy, the various accelerators are typically selected for use by transporting the particles to the beam end via a transport line. In order to maintain a large beam transport efficiency while reducing the size of the accelerator elements to save costs, the beam size during transport is generally kept at a small level. If the final required beam size is much larger than the size in the transmission process, a scanning magnet is usually used to increase the beam spot to reach the target of the beam size required by the terminal. The scanning magnet is a widely used magnet element, is similar to a common dipolar magnet in structure and principle, generates dipolar magnetic fields perpendicular to the plane of a coil through an iron core and a pair of excitation coils, and generates deflection force proportional to excitation current to a beam current.
Because the scanning magnet power supply current needs to be continuously bidirectional and linearly adjustable, the output current waveform often has the problem of zero-crossing distortion, namely, certain tracking deviation is generated when the current is converted between positive and negative every time. In addition, because the exciting current works in a high-frequency triangular wave mode, the vibration, eddy current and other effects of the scanning magnet can cause the actually generated magnetic field to deviate from an ideal value, a large-size beam spot with poor uniformity is finally obtained, the beam quality finally obtained by the terminal is reduced, and the effect of beam application of an accelerator such as radiotherapy, irradiation experiment and the like is influenced.
Disclosure of Invention
In view of the above problems, the present invention aims to provide a scanning magnet dynamic identification real-time segmented slope feedback method and system, which can improve the beam uniformity to more than 90%, and can optimize the high terminal uniformity.
In order to realize the purpose, the invention provides the following technical scheme: a scanning magnet dynamic identification real-time segmentation slope feedback method comprises the following steps: acquiring beam position distribution information of beams in horizontal and vertical directions; obtaining different kinds of error information according to the beam position distribution information; performing segmented slope feedback according to the error information to obtain an optimized power supply triangular wave excitation curve; and inputting the power supply triangular wave excitation curve into the magnet power supply, and obtaining new segment slope feedback after the beam current passes again until the scanning beam spot of the terminal meets the preset uniformity.
Further, the kinds of error information include: the segment slope deviation, the positive and negative half shaft deviation and the zero-crossing region are raised.
Further, the method for feeding back the segment slope comprises the following steps: the positive and negative half shaft deviation is solved through the positive and negative zero drift of the power supply waveform; solving the bulge of the zero-crossing region through the zero-crossing intercept of the power supply waveform; segmenting the power supply triangular wave after positive and negative zero drift and zero-crossing intercept correction according to the slope, and optimizing the power supply triangular wave according to the segmentation result; and sending the optimized power supply triangular wave to a scanning magnet power supply, and feeding back a result of the optimization of the segmentation slope after the beam passes through again.
Further, the positive and negative zero drift means that the positive and negative amplitudes of the waveforms of the scanning iron currents are no longer equal and can be respectively increased or decreased.
Further, the zero-crossing intercept is that a fixed value is respectively added to the absolute values of the positive half and the negative half of the scanning iron waveform as a whole.
Further, the method for segmenting the power supply triangular wave according to the slope comprises the following steps: and segmenting the counting curve in the beam position distribution information according to positions, segmenting the power waveform slope curve by the same number in the corresponding range according to the current value, and corresponding each segment of the segmented curves obtained in the two steps to obtain a final segmented curve.
Further, the calculation formula of the terminal beam current is as follows:
wherein, A max And A min The maximum and minimum counts in the beam distribution data of the strip ionization chamber are respectively, and U is the terminal beam uniformity.
The invention also discloses a scanning magnet dynamic identification real-time segmentation slope feedback system, which comprises: the beam position distribution information acquisition module is used for acquiring beam position distribution information of beams in the horizontal and vertical directions; the error information classification module is used for obtaining different types of error information according to the beam position distribution information; the error optimization module is used for carrying out segmented slope feedback according to error information to obtain an optimized power supply triangular wave excitation curve; and the output feedback module is used for inputting the power supply triangular wave excitation curve into the magnet power supply, and obtaining new subsection slope feedback after the beam current passes through again until the scanning beam spot of the terminal meets the preset uniformity.
Further, the error optimization module includes: the positive and negative zero drift module is used for solving the deviation of the positive and negative half shafts through the positive and negative zero drift of the power waveform; the zero-crossing intercept module is used for solving the problem of the bulge of the zero-crossing region through the zero-crossing intercept of the power waveform; the segmentation slope optimization module is used for segmenting the power supply triangular wave after positive and negative zero drift and zero-crossing intercept correction according to the slope and optimizing the power supply triangular wave according to the segmentation result; and the feedback module is used for sending the optimized power supply triangular wave to the power supply and the scanning magnet, and feeding back the result of the optimization of the segmentation slope after the beam passes through again.
The invention also discloses a computer readable storage medium, wherein a computer program is stored on the computer readable storage medium and is executed by a processor to realize the method for feeding back the slope of the real-time segment dynamically identified by the scanning magnet.
The invention also provides a computing device comprising: one or more processors, memory, and one or more programs, wherein the one or more programs are stored in the memory and configured to be executed by the one or more processors, the one or more programs including instructions for performing the method for scanning magnet dynamic identification real-time segment slope feedback as described in any of the above.
Due to the adoption of the technical scheme, the invention has the following advantages:
1. the invention can be applied to a miniaturized cancer treatment accelerator or a large synchrotron as long as a terminal is provided with a beam distribution detector similar to a scanning iron and a strip ionization chamber. The invention can directly detect and optimize the beam uniformity, has high compatibility and reliability, does not need to introduce additional hardware equipment, and has low cost and convenient use.
2. The method directly uses the beam distribution data collected by the strip ionization chamber, calculates the optimized waveform in real time and sends the optimized waveform to the scanning magnet power supply, the optimized beam distribution data can be collected by the strip ionization chamber again and optimized again immediately after the waveform is updated by the power supply, and the feedback control can be carried out by repeated iteration after repeated times. The calculation of the optimized waveform can be completed within a few seconds, and the time is mainly spent on data acquisition and transmission of the strip ionization chamber, waveform updating of the scanning iron power supply and pulse intervals of the beam current.
3. The algorithm used by the invention can efficiently analyze various error sources of the terminal uniformity through the online operation for several months, and respectively carry out the most effective correction means and correction value on the scanning magnet power waveform. There is a certain corresponding relationship between the scanning magnet waveform and the terminal uniformity, but the sources of the final errors are very different, and if the same correction method is directly adopted on the waveform, a good correction effect cannot be obtained. By summarizing a large amount of beam current test data, the algorithm can simply and efficiently optimize the beam current uniformity.
4. The invention can consider the complex eddy current and vibration effect of the magnet and the optimization of zero crossing point correction of the power supply less, directly obtain the final beam uniformity from the result, and feed back the final beam uniformity to the power supply waveform of the source, can greatly reduce the capital and time cost of the optimization in the middle process, optimizes the terminal beam uniformity with low cost and high efficiency, and becomes the best choice for the application and experimental accelerator in the fields of cancer treatment, material irradiation, aerospace research and the like.
Drawings
FIG. 1 is a graph of the relationship between beam position and excitation current for a sectioned ionization chamber in accordance with an embodiment of the present invention;
FIG. 2 is a graph of beam position distribution information for a sectioned ionization chamber prior to calibration in an embodiment of the present invention;
FIG. 3 is a graph of a step slope correction of a current waveform, FIG. 3 (a) is a graph of a triangular waveform of a scan-iron power supply output, and FIG. 3 (b) is a graph of a slope of a triangular waveform of a scan-iron power supply output, according to an embodiment of the present invention;
FIG. 4 is a flow chart of a method of segment slope feedback in an embodiment of the present invention;
fig. 5 is a schematic diagram of a method for feeding back a segment slope according to an embodiment of the present invention, where fig. 5 (a) is beam position distribution information collected by a segmented ionization chamber, fig. 5 (b) is a triangular waveform diagram of a scanned iron power output, fig. 5 (c) is a schematic diagram of a zero-crossing region protrusion, fig. 5 (d) is a schematic diagram of zero-crossing intercept optimization, fig. 5 (e) is a schematic diagram of positive and negative half-axis deviation, fig. 5 (f) is a schematic diagram of positive and negative zero-drift optimization, fig. 5 (g) is a schematic diagram of a segment count curve, fig. 5 (h) is a schematic diagram of segment slope optimization, and fig. 5 (i) is a graph after correction is completed;
fig. 6 is a diagram illustrating beam position distribution information of the corrected segmented ionization chamber according to an embodiment of the present invention.
Detailed Description
The present invention is described in detail with reference to specific embodiments for better understanding of the technical solutions of the present invention. It should be understood, however, that the detailed description is provided for a better understanding of the invention only and that they should not be taken as limiting the invention. In describing the present invention, it is to be understood that the terminology used is for the purpose of description only and is not intended to be indicative or implied of relative importance.
The method aims to solve the problem that the current waveform output by the current of the scanning magnet power supply in the prior art often has zero-crossing distortion, namely, certain tracking deviation is generated when the current is converted between positive and negative every time; and because the exciting current works in a high-frequency triangular wave mode, the actually generated magnetic field deviates from an ideal value due to the vibration, eddy current and other effects of the scanning magnet, a large-size beam spot with poor uniformity is finally obtained at the beam terminal, the quality of the beam finally obtained at the terminal is reduced, and the application effect of the accelerator beam in radiotherapy, irradiation experiment and the like is influenced. The invention provides a scanning magnet dynamic identification real-time segmentation slope feedback method, a system, a readable medium and computing equipment, which can analyze beam current distribution obtained by a segmentation ionization chamber in real time to obtain different kinds of error information, and are called as dynamic identification. The counting curve obtained by the strip ionization chamber is subjected to optimization algorithm mainly based on the sectional slope, the optimized waveform is loaded to the scanning iron power supply, a new optimized waveform is obtained through the measurement result of the next strip ionization chamber, and the scanning uniformity with high enough uniformity can be obtained after several times of iterative feedback optimization, which is called as real-time sectional slope feedback. The dynamic identification real-time segmentation slope feedback system can feed back and optimize the scanning iron exciting current in real time by analyzing the beam distribution of the terminal strip ionization chamber, improves the uniformity of the terminal beam to more than 90 percent, and meets the requirements of research, experiments and application. The solution of the invention is explained in detail below by way of example with reference to the accompanying drawings.
Example one
The embodiment discloses a scanning magnet dynamic identification real-time segmentation slope feedback method, which comprises the following steps:
s1, acquiring beam position distribution information of beams in horizontal and vertical directions;
in the embodiment, the sectional ionization chamber is adopted to obtain the beam position distribution information of the beam in the horizontal and vertical directions, and other beam diagnosis devices can play the same role and can also be used for substitution. The strip ionization chamber is a common diagnostic apparatus, in which a pair of electrode plates is filled with thin gas, the beam passing through the gas ionizes positive and negative ion pairs, the charges move along an electric field perpendicular to the beam moving direction, and are received by the electrode plates divided into a certain number of strips, and electrical signals are generated on the corresponding electrode plates. Different polar plates correspond to different spatial positions, the horizontal and vertical strip polar plates are combined together, the position distribution information of the beam current can be obtained by analyzing the electric signals, and the intensity of the current signals is in direct proportion to the number of particles at the position. For a beam terminal or a cancer treatment accelerator, a strip ionization chamber is usually placed near a target chamber or a sickbed during acceptance, beam position distribution information during actual application of beams is obtained, and the relationship between the beam position of the strip ionization chamber and excitation current is shown in fig. 1.
S2, obtaining different types of error information according to the beam position distribution information;
since the scanning magnet in fig. 1 is loaded with a triangular wave, ideally, the position of the beam on the strip ionization chamber also changes uniformly with time, and the strip ionization chamber can show a flat beam distribution. However, due to the influence of the power supply, the magnet and the beam current, the stripe ionization chamber actually displays the beam current distribution as shown in fig. 2, the beam current is not uniformly distributed, and the aim of the invention is to correct the non-uniformity. The invention firstly provides that the nonuniformity of the beam current when being unfolded by the scanning iron is corrected by adjusting the waveform slope of the scanning iron.
FIG. 3 is a graph of a step slope correction of a current waveform, FIG. 3 (a) is a graph of a triangular waveform of a scan iron power output, and FIG. 3 (b) is a graph of a slope of a triangular wave of a scan iron power output, in accordance with an embodiment of the present invention; it can be seen that the dashed line in fig. 3 (b) represents a constant value where the slope of the original waveform changes positively and negatively without correction. At this time, the waveform is segmented to facilitate adjustment, the slope of each segment of the waveform can be adjusted independently, the solid line in fig. 3 (b) is a segmented slope curve adjusted according to beam current distribution feedback, and the original waveform and the adjusted correction amount are respectively represented by the solid line and the dashed line in fig. 3 (a).
S3, after receiving the beam current signals, the segmented current chamber carries out segmented slope feedback according to error information to obtain an optimized power supply triangular wave excitation curve;
the types of error information include: the segment slope deviation, the positive and negative half shaft deviation and the zero-crossing region are raised. As shown in fig. 4, the method of segment slope feedback is:
s3.1, solving the deviation of a positive half shaft and a negative half shaft through positive and negative zero drift of a power supply waveform;
s3.2, solving the bulge of the zero-crossing region through the zero-crossing intercept of the power supply waveform;
s3.3, segmenting the power supply triangular wave after positive and negative zero drift and zero-crossing intercept correction according to the slope, and optimizing the power supply triangular wave according to the segmentation result;
and S3.4, sending the optimized power supply triangular wave to a power supply and a scanning magnet, and feeding back a result of the optimization of the segmentation slope after the beam passes through again.
Figure 5 is a schematic of an algorithmic analysis of a striped ionization chamber count curve and correction on a scanned iron waveform. Fig. 5 (a) is beam position distribution information acquired by a strip ionization chamber, fig. 5 (b) is a triangular waveform diagram output by a scanning iron power supply, fig. 5 (c) is a schematic diagram of a bulge of a zero-crossing region, fig. 5 (d) is a schematic diagram of zero-crossing intercept optimization, fig. 5 (e) is a schematic diagram of positive and negative half-axis deviation, fig. 5 (f) is a schematic diagram of positive and negative zero-drift optimization, fig. 5 (g) is a schematic diagram of a segmented counting curve, fig. 5 (h) is a schematic diagram of segmented slope optimization, and fig. 5 (i) is a graph after correction is completed;
the scan iron waveform segment slope control is the main optimization method, corresponding to the correction optimization process in fig. 5 (g) and 5 (h). The method for segmenting the power supply triangular wave according to the slope comprises the following steps: after the counting curve in the beam position distribution information, i.e., the counting curve in fig. 2, is segmented according to the position (horizontal axis) (as shown in fig. 5 (g)), the power waveform slope curve is segmented by the same number (as shown in fig. 5 (h)) according to the corresponding range of the triangular wave current value (vertical axis), and each segment of the segmented curves obtained in the two steps is corresponded to obtain the final segmented curve. The final correction result is shown in fig. 5 (i), and the overall correction-optimized scan iron waveform is shown in fig. 3. However, all inhomogeneities cannot be corrected by the piecewise slope control alone, and two further optimization methods are required, which do not succeed each other, but which need to be performed before the piecewise slope control.
For the salient zero-crossing region in fig. 2, the zero-crossing intercept is used in the scan iron waveform to resolve. The zero-crossing intercept refers to that a fixed value can be respectively and integrally added to the absolute values of the positive half and the negative half of the scanning iron waveform, and corresponds to the correction optimization in fig. 5 (d).
For the positive and negative half-axes one high and one low in fig. 2, this is solved by adding positive and negative zero-drift in the scan iron waveform. The positive and negative zero drift means that the positive and negative amplitudes of the waveforms of the scanned iron currents are no longer equal and can be respectively increased or decreased, which corresponds to the correction optimization in fig. 5 (f).
And S4, inputting the triangular wave excitation curve of the power supply into the magnet power supply to obtain new subsection slope feedback until the uniformity of the terminal beam current meets the terminal scanning beam spot of a preset condition.
The dynamic identification real-time segmentation slope feedback system can feed back and optimize the scanning iron exciting current in real time by analyzing the beam distribution of the terminal strip ionization chamber, improves the uniformity of the terminal beam to more than 90 percent, and meets the requirements of research, experiments and application.
As shown in fig. 6, the beam uniformity of the corrected beam distribution data of the strip ionization chamber is improved from 76.6% to 93.6%. It can be seen that the zero crossing distortion, the average deviation of the positive and negative half-axes, and the overall deviation level are well corrected. The calculation formula of the terminal beam current is as follows:
wherein A is max And A min The maximum and minimum counts in the beam distribution data of the strip ionization chamber are respectively, and U is the terminal beam uniformity.
Example two
Based on the same inventive concept, the embodiment discloses a scanning magnet dynamic identification real-time segmentation slope feedback system, which comprises:
the beam position distribution information acquisition module is used for acquiring beam position distribution information of beams in the horizontal and vertical directions;
the error information classification module is used for obtaining different types of error information according to the beam position distribution information;
the error optimization module is used for carrying out segmented slope feedback according to the error information to obtain an optimized power supply triangular wave excitation curve;
and the output feedback module is used for inputting the power supply triangular wave excitation curve into the magnet power supply, and obtaining new subsection slope feedback after the beam passes through again until the scanning beam spot of the terminal meets the preset uniformity.
The error optimization module comprises: the positive and negative zero drift module is used for solving the deviation of the positive and negative half shafts through positive and negative zero drift; the zero-crossing intercept module is used for solving the problem of the bulge of the zero-crossing region through the zero-crossing intercept; the segmentation slope optimization module is used for segmenting the power supply triangular wave subjected to positive and negative zero drift and zero-crossing intercept according to the slope and optimizing the power supply triangular wave according to a segmentation result; and the feedback module is used for sending the optimized power supply triangular wave to the power supply and the scanning magnet, and feeding back the result of the optimization of the segmentation slope after the beam passes through again.
EXAMPLE III
Based on the same inventive concept, the present embodiments disclose a computer readable storage medium storing one or more programs, the one or more programs comprising instructions, which when executed by a computing device, cause the computing device to perform a non-resonant fast acceleration full waveform dynamic compensation method according to any of the above.
Example four
Based on the same inventive concept, the present embodiment discloses a computing device, comprising: one or more processors, memory, and one or more programs stored in the memory and configured to be executed by the one or more processors, the one or more programs including instructions for performing a non-resonant fast acceleration full waveform dynamic compensation method according to any of the above.
As will be appreciated by one skilled in the art, embodiments of the present application may be provided as a method, system, or computer program product. Accordingly, the present application may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, the present application may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, and the like) having computer-usable program code embodied therein.
The present application is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of the application. It will be understood that each flow and/or block of the flow diagrams and/or block diagrams, and combinations of flows and/or blocks in the flow diagrams and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solutions of the present invention and not for limiting the same, and although the present invention is described in detail with reference to the above embodiments, those of ordinary skill in the art should understand that: modifications and equivalents may be made to the embodiments of the invention without departing from the spirit and scope of the invention, which is to be covered by the claims. The above disclosure is only for the specific embodiments of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present application, and shall be covered by the scope of the present application. Therefore, the protection scope of the present application should be defined by the claims.
Claims (10)
1. A scanning magnet dynamic identification real-time segmentation slope feedback method is characterized by comprising the following steps:
acquiring beam position distribution information of beams in horizontal and vertical directions;
obtaining different kinds of error information according to the beam position distribution information;
performing segmented slope feedback according to the error information to obtain an optimized power supply triangular wave excitation curve;
and inputting the power supply triangular wave excitation curve into a magnet power supply, and obtaining new subsection slope feedback after the beam current passes through again until the scanning beam spot of the terminal meets the preset uniformity.
2. The method as claimed in claim 1, wherein the type of the error information comprises: the segment slope deviation, the positive and negative half shaft deviation and the zero-crossing region are raised.
3. The method for feeding back the slope of the segment of the scanning magnet in real time by dynamic recognition according to claim 2, wherein the method for feeding back the slope of the segment comprises:
the positive and negative half shaft deviation is solved through positive and negative zero drift of the power supply waveform;
solving the bulge of the zero-crossing region through the zero-crossing intercept of the power supply waveform;
segmenting the power supply triangular wave after positive and negative zero drift and zero-crossing intercept correction according to the slope, and optimizing the power supply triangular wave according to the segmentation result;
and sending the optimized power supply triangular wave to a power supply and a scanning magnet, and feeding back a result of the optimization of the segmentation slope after the beam passes through again.
4. The method as claimed in claim 3, wherein the zero-crossing intercept is a fixed value added to the absolute values of the positive and negative halves of the scanned iron waveform.
5. The feedback method for scanning magnet dynamic identification real-time segmentation slope of claim 3, wherein the method for segmenting the power supply triangular wave according to the slope comprises the following steps: and segmenting the counting curve in the beam position distribution information according to positions, segmenting the power waveform slope curve by the same number in the corresponding range according to the current value, and corresponding each segment of the segmented curves obtained in the two steps to obtain a final segmented curve.
6. The method for feeding back the slope of the scanning magnet according to any one of claims 1 to 5, wherein the equation for calculating the uniformity of the terminal beam current is as follows:
wherein, A max And A min Respectively, the beam distribution data of the strip ionization chamberMedium and minimum counts, U is the terminal beam uniformity.
7. A scanning magnet dynamic identification real-time segmentation slope feedback system is characterized by comprising:
the beam position distribution information acquisition module is used for acquiring beam position distribution information of beams in the horizontal and vertical directions;
the error information classification module is used for obtaining different types of error information according to the beam position distribution information;
the error optimization module is used for carrying out segmented slope feedback according to the error information to obtain an optimized power supply triangular wave excitation curve;
and the output feedback module is used for inputting the power supply triangular wave excitation curve into the magnet power supply, and obtaining new subsection slope feedback after the beam current passes through again until the scanning beam spot of the terminal meets the preset uniformity.
8. The system of claim 7, wherein the error optimization module comprises:
the positive and negative zero drift module is used for solving the deviation of the positive and negative half shafts through the positive and negative zero drift of the power waveform;
the zero-crossing intercept module is used for solving the problem of the bulge of a zero-crossing region through the zero-crossing intercept of the power waveform;
the segmentation slope optimization module is used for segmenting the power supply triangular wave after positive and negative zero drift and zero-crossing intercept correction according to the slope and optimizing the power supply triangular wave according to the segmentation result;
and the feedback module is used for sending the optimized power supply triangular wave to the power supply and the scanning magnet, and feeding back the result of the optimization of the segmentation slope after the beam passes through again.
9. A computer-readable storage medium having a computer program stored thereon, the computer program being executable by a processor to implement the scanning magnet dynamic identification real-time segment slope feedback method as claimed in any one of claims 1 to 6.
10. A computing device, comprising: one or more processors, memory, and one or more programs stored in the memory and configured to be executed by the one or more processors, the one or more programs comprising instructions for performing the scanning magnet dynamic recognition real-time segment slope feedback method of any of claims 1-6.
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| US20020081788A1 (en) * | 2000-09-15 | 2002-06-27 | Varian Semiconductor Equipment Associates, Inc. | Ion implanter optimized scan waveform retention and recovery |
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