CN115754020A - Circulating operation type ultrasonic scanning detection system - Google Patents

Abstract

The invention relates to a circulating operation type ultrasonic scanning detection system. The device sealing box is driven to circularly operate along a device feeding and discharging area above a scanning detection platform, a sealing box liquid-removing area in the scanning detection liquid tank and above the scanning detection platform and a platform inner operating area in the scanning detection platform. The invention can effectively realize the ultrasonic scanning detection of the power semiconductor device, improve the stability and reliability of the ultrasonic scanning detection, reduce the cost of the ultrasonic scanning detection and has high automation degree.

Description

Circulating operation type ultrasonic scanning detection system

Technical Field

The invention relates to an ultrasonic scanning detection system, in particular to a circulating operation type ultrasonic scanning detection system.

Background

Ultrasonic scanning detection is an important means for detecting defects such as solder delamination, voids, cracks and the like in the power semiconductor device. When the power semiconductor device is subjected to ultrasonic scanning detection, the power semiconductor device to be detected needs to be in a state of being soaked in a coupling medium or being drenched in the coupling medium. However, the power semiconductor device does not allow the coupling medium to enter the interior of the power semiconductor device, and therefore, the device needs to be subjected to sealing and waterproof treatment, and only the part of the device used for ultrasonic scanning is exposed. The coupling medium is typically absolute alcohol or deionized water.

At present, when ultrasonic scanning detection is performed on a power semiconductor device, the feeding and discharging modes of the power semiconductor device during scanning detection mainly comprise: manual feeding and discharging and robot feeding and discharging. The following is a detailed description of the manual and manual loading and unloading and the robotic loading and unloading.

When adopting artifical manual unloading of going up, the process of going up unloading includes:

1) Placing the power semiconductor device to be tested in a sealing box and locking; 2) Manually placing the sealing box on a detection station of the ultrasonic scanning microscope, and starting to scan and detect the whole sealing box; 3) After the detection is finished, the water absorption tool is used for treating the residual water on the surface of the sealing box, and the corresponding post-treatment (such as drying operation and the like) needs to be finished on separate equipment; 4) And opening the sealing box and taking the device out of the sealing box.

The process of manual feeding and discharging is known, and the following defects mainly exist:

1) The device has the advantages of high labor intensity, and large labor intensity for the operation personnel to arrange the sealing box provided with the power semiconductor device to be tested in the detection station of the ultrasonic scanning microscope through the slide bar device or directly.

2) After the detection of the ultrasonic scanning microscope is completed, the sealing box provided with the detection completion device needs to be taken out manually, drying is carried out, and then a new power semiconductor device to be detected is placed in the sealing box and placed at the detection position of the ultrasonic scanning microscope. In the whole process, the ultrasonic scanning microscope is in an undetected state.

3) The sealing box with the power semiconductor device to be detected has no automation and integration functions, and after ultrasonic scanning detection is finished, a water absorption tool is required to be used for processing residual coupling medium on the surface of the sealing box, and then corresponding subsequent processing (such as drying) is carried out by independent equipment.

When adopting the robot to go up unloading, the process of going up unloading includes:

1) Grabbing the power semiconductor device to be detected by the robot and placing the power semiconductor device in a jig carrying disc at the detection position of the ultrasonic scanning microscope; 2) And after the sample detection is finished, the power semiconductor device is taken out from the jig carrying disc at the detection position by the robot.

As can be seen from the process of loading and unloading by the robot, the loading and unloading by the robot mainly have the following defects:

1) And the detection variety is limited, and the robot cannot clamp the sealing box provided with the power semiconductor device to be detected, so that the equipment can only detect the power semiconductor device with waterproof performance.

2) The model changing difficulty is high, and the fixture carrying disc at the detection position of the ultrasonic scanning microscope, the fixture of the robot clamping device, the corresponding operation control program and the like all need long time switching, so that the equipment is only suitable for detecting a large batch of single-variety power semiconductor devices.

3) The production beat is low, and due to the size difference of the power semiconductor devices, the ultrasonic scanning microscope can simultaneously detect a plurality of devices in an effective detection range. The robot can only be respectively arranged in the jig carrying disc at the detection position of the ultrasonic scanning microscope for the power semiconductor device to be detected.

4) The effective operation time is wasted, after the ultrasonic scanning microscope finishes detection, the robot needs to wait for taking out the detected device, and then a new tested device is placed in the jig carrying disc. In the whole process, the ultrasonic scanning microscope is in a state of stopping working.

In summary, the ultrasonic scanning detection of the power semiconductor device at present is difficult to meet the actual test requirements.

Disclosure of Invention

The invention aims to overcome the defects in the prior art and provide a circulating operation type ultrasonic scanning detection system which can effectively realize ultrasonic scanning detection of a power semiconductor device, improve the stability and reliability of the ultrasonic scanning detection, reduce the cost of the ultrasonic scanning detection and has high automation degree.

According to the technical scheme provided by the invention, the circularly operating ultrasonic scanning detection system comprises:

the scanning detection liquid tank is supported on the scanning detection platform and used for containing a coupling medium so as to form a coupling medium liquid pool for carrying out liquid immersion type ultrasonic scanning detection on the power semiconductor device by utilizing the contained coupling medium;

the ultrasonic scanning microscopic detection device is arranged on the scanning detection platform and is used for carrying out required ultrasonic scanning detection on the power semiconductor device which is carried by the device sealing box and is immersed in the coupling medium liquid pool;

a sealing box circulating operation mechanism used for the operation of ultrasonic scanning detection of at least one device sealing box, wherein,

driving the device sealing box to circularly operate along a device loading and unloading area above the scanning detection platform, a scanning detection liquid tank, a sealing box liquid-removing area above the scanning detection platform and an in-platform operation area in the scanning detection platform for any device sealing box which is in adaptive connection with the sealing box circulating operation mechanism;

when the device sealing box runs through the device loading and unloading area, the required loading and unloading are carried out on the device sealing box;

when the device sealing box runs through the scanning detection liquid tank, the power semiconductor device in the device sealing box is subjected to liquid immersion type ultrasonic scanning by using an ultrasonic scanning microscopic detection device;

when the device sealing box runs through the liquid removing area of the sealing box, the coupling medium carried on the surface of the device sealing box is removed.

The sealing box circulating operation mechanism comprises a sealing box circulating conveying track matched with the scanning detection platform and a sealing box transmission mechanism used for driving the device sealing box to operate along the sealing box circulating conveying track, wherein,

the sealing box circulating conveying track comprises conveying track bodies which are symmetrically distributed, the conveying track bodies are annular, and the length direction of the conveying track bodies is consistent with the length direction of the scanning detection liquid tank;

and the conveying track body corresponds to the scanning detection liquid tank and is positioned above the scanning detection platform, and the conveying track body is fixed on the corresponding inner side wall of the scanning detection liquid tank.

The sealing box transmission mechanism comprises a transmission connecting body which is detachably connected with the device sealing box and a transmission driving unit which is used for driving the transmission connecting body to rotate in the conveying track body, wherein,

the transmission connecting bodies correspond to the conveying track bodies one by one;

when the transmission connecting body is in adaptive connection with the corresponding outer edge of the device sealing box, the transmission connecting body is utilized to drive the device sealing box to circularly operate along the circular conveying track of the sealing box;

when the transmission connecting body is separated from the device sealing box, the device sealing box is loaded and unloaded or required ultrasonic scanning detection is carried out on the power semiconductor device in the device sealing box.

The transmission connecting body comprises a transmission chain;

when the transmission connecting body adopts a transmission chain, the transmission driving unit comprises transmission chain wheels which are respectively arranged at two ends of the conveying track body, and the transmission chain wheels at two ends of the same conveying track body are in adaptive connection through the transmission chains which are just corresponding;

the transmission chain wheels at the same ends of the two conveying track bodies are in adaptive connection through transmission chain wheel shafts.

A hasp is arranged on the transmission chain, and a hasp open slot is arranged on the hasp;

a plurality of sealing box hanging pins are arranged on the device sealing box and can be embedded in the hasp opening groove, wherein,

the sealing box hanging pins correspond to hasp open slots on the hasps one by one, and when the sealing box hanging pins are embedded in the hasp open slots, the device sealing box is in adaptive connection with the transmission connecting body;

when the device sealing box is lifted and the sealing box hanging pin is separated from the hasp opening slot, the device sealing box is separated from the transmission connecting body.

Also comprises a plurality of follow-up guide cams which are in adaptive connection with the device sealing box, wherein,

the follow-up guide cam can be embedded in a guide groove of the rail body in the corresponding conveying rail body, and when the device sealing box is driven by the transmission connecting body to operate, the follow-up guide cam is in rolling contact with the guide groove of the rail body.

A track body limiting mechanism used for limiting the device sealing box is arranged on the conveying track body, wherein,

the track body limiting mechanism comprises a track ascending limiting body which is arranged on the conveying track body and corresponds to the track limiting groove;

when the device sealing box is jacked up, the follow-up guide cam can enter the track limiting groove, the track limiting groove is matched with the follow-up guide cam to limit the operation of the device sealing box, and the track lifting limiting body is used for limiting the jacking of the device sealing box.

Also comprises an infiltration impact spraying mechanism for injecting coupling medium into the scanning detection liquid groove, wherein,

the infiltration impact spraying mechanism is positioned in a combination area of the device feeding area and the scanning detection liquid tank, and can also carry out infiltration spraying and impact spraying on the coupling medium on the device sealing box entering the coupling medium liquid tank by utilizing the infiltration impact spraying mechanism so as to remove bubbles on the surface of the device sealing box when entering the coupling medium liquid tank.

The infiltrating impact spraying mechanism comprises:

the wetting unit is used for spraying the coupling medium on the surface of the power semiconductor device before the power semiconductor device enters the coupling medium liquid pool so as to wet the upper surface of the device sealing box by using the sprayed coupling medium;

the bubble impact unit is used for spraying the coupling medium on the surface of the device sealing box after entering the coupling medium liquid pool so as to impact bubbles attached to the surface of the power semiconductor device, wherein,

the flow velocity of the coupling medium sprayed by the bubble impact unit is greater than that of the coupling medium sprayed by the infiltration unit.

The infiltration unit comprises an infiltration shunt pipe and a plurality of infiltration nozzles arranged on the infiltration shunt pipe, wherein,

the plurality of infiltration spray heads are uniformly distributed on the infiltration shunt pipes along the length direction of the infiltration shunt pipes, and the infiltration spray heads are communicated with the infiltration shunt pipes;

the nozzle of the infiltration nozzle is flat, wherein the length direction of the nozzle of the infiltration nozzle is vertical to the running direction of the device sealing box.

Also comprises a liquid storage and collection box for providing the coupling medium required by ultrasonic scanning detection, wherein,

the liquid storage and collection box is positioned in the scanning detection platform, and the coupling medium in the liquid storage and collection box is extracted and enters a scanning detection liquid tank through the infiltration impact spraying mechanism;

and the coupling medium in the scanning detection liquid tank flows back into the liquid storage and collection tank through the liquid tank liquid discharge proportion regulating valve, the opening degree of the liquid tank liquid discharge proportion regulating valve is regulated based on the liquid level of the coupling medium in the scanning detection liquid tank, and the liquid tank liquid discharge proportion regulating valve is used for regulating the state that the coupling medium in the scanning detection liquid tank flows back into the liquid storage and collection tank.

Sealing a cartridge to any device, comprising:

the sealing box body is used for containing a power semiconductor device and comprises a box main body supported on a sealing box chain plate and a box cover hinged to the box main body, wherein the box main body can move on the sealing box chain plate;

the box body opening and locking mechanism is used for controlling the opening and locking of the device sealing box, is at least distributed on one side of the device sealing box and is in adaptive connection with the box body and the box cover of the device sealing box, wherein,

when the box body opening and locking mechanism drives the box main body to move towards the first direction on the sealing box chain plate, the sealing and locking state between the box cover and the box main body is released, so that the device sealing box is in an openable state;

when the device sealing box is closed, the box body opening and locking mechanism drives the box main body to move towards the second direction on the sealing box chain plate so as to lock the box cover on the box main body in a sealing manner;

the second direction of movement of the box main body on the sealing box chain plate is opposite to the first direction of movement of the box main body on the sealing box chain plate.

The box body opening and locking mechanism comprises a chute fixing plate fixed on a chain plate of the sealing box, a slider body fixedly connected with the box main body, a box body power mechanism used for driving the slider body to move in the chute fixing plate and a box cover connecting mechanism used for controlling the position state of the box cover,

the sliding chute fixing plate is positioned at the outer side of one end of the box main body, and the box cover is in adaptive connection with the sliding chute fixing plate through a box cover connecting mechanism;

when the box body power mechanism drives the box main body to move towards the first direction through the sliding block body, the contact matching state of the box cover and the sliding groove fixing plate through the box cover connecting mechanism is gradually released;

when the device sealing box is closed, the box cover is connected with the sliding groove fixing plate in an adaptive mode through the box cover connecting mechanism, and when the box body power mechanism drives the box main body to move towards the second direction through the sliding block body, the box cover is matched with the sliding groove fixing plate in a contact mode through the box cover connecting mechanism, so that the box cover is locked on the box main body.

The box cover connecting mechanism comprises a box cover connecting rod distributed on the box cover and a box cover connecting rod groove arranged on the sliding groove fixing plate, wherein,

the box cover connecting rod groove comprises a connecting rod inlet and outlet channel and a connecting rod locking channel communicated with the connecting rod inlet and outlet channel, and the connecting rod inlet and outlet channel and the connecting rod locking channel are matched with the box cover connecting rod;

when the box main body moves towards a first direction on the sealing box chain plate, the box cover connecting rod enters the connecting rod in-out channel from the connecting rod locking channel so as to release the locking state between the box cover and the box main body;

when the box body moves to the second direction on the sealing box chain plate, the box cover connecting rod enters the connecting rod locking channel from the connecting rod inlet and outlet channel so as to lock the box cover on the box body.

The sealing box liquid removing area and the device loading and unloading area respectively correspond to two ends of the scanning detection liquid tank;

a plurality of air knife sets used for blowing air and removing liquid from the device sealing box are arranged in the liquid removing area of the sealing box, wherein,

the air knife set comprises at least one air knife for blowing air to the upper surface of the device sealing box and at least one air knife capable of blowing air to the lower surface of the device sealing box simultaneously, so that the coupling medium carried by the surface of the device sealing box is blown away by the air blown by the air knives.

The invention has the advantages that: driving the device sealing box to circularly operate along a device loading and unloading area above the scanning detection platform, a scanning detection liquid tank, a sealing box liquid removing area above the scanning detection platform and an in-platform operation area in the scanning detection platform; when the device sealing box runs through the device loading and unloading area, the required loading and unloading are carried out on the device sealing box; when the device sealing box runs through the scanning detection liquid tank, the power semiconductor device in the device sealing box is subjected to liquid immersion type ultrasonic scanning by using an ultrasonic scanning microscopic detection device; when the device sealing box runs through the liquid-removing area of the sealing box, the coupling medium carried on the surface of the device sealing box is removed, so that the ultrasonic scanning detection of the power semiconductor device can be effectively realized, the stability and the reliability of the ultrasonic scanning detection are improved, the cost of the ultrasonic scanning detection is reduced, and the degree of automation is high.

Drawings

FIG. 1 is a schematic diagram of an embodiment of the present invention.

FIG. 2 is a schematic view of an embodiment of the present invention in which a scanning detection liquid tank is engaged with a circular conveying track of a seal box.

Fig. 3 is a schematic view showing an embodiment of the present invention in a direction of circulating the device sealing case.

Fig. 4 is a schematic view of an embodiment of the cooperation of the seal box and the seal box circulating conveying track.

Fig. 5 is a schematic view of one embodiment of the device capsule of the present invention.

Fig. 6 is a schematic view of an embodiment of the cooperation of the seal box and the seal box circulating conveying track and the transmission chain of the device.

FIG. 7 is a schematic view of one embodiment of the buckle of the present invention engaged with a drive chain.

Fig. 8 is a schematic view of an embodiment of the device sealing box and the shifting rod power unit which are matched to realize opening and locking.

Fig. 9 is a schematic view of an embodiment of the device sealed case in fig. 8 in an opened state.

Fig. 10 is a schematic view of an embodiment of the case opening locking mechanism of fig. 8.

FIG. 11 is a schematic view of one embodiment of an immersion impingement spray mechanism of the present invention.

Fig. 12 is a side view of the immersion impingement spray mechanism of fig. 11.

FIG. 13 is a schematic view of an embodiment of the bubble jet of FIG. 12.

Description of the reference numerals: 1-scanning detection platform, 2-sealing box circular conveying track, 3-feeding area track support, 4-driven chain wheel, 5-device sealing box, 6-infiltration impact spraying mechanism, 7-ultrasonic scanning microscopic detection seat, 8-ultrasonic scanning detection head, 9-servo motor, 10-air knife, 11-liquid removal area track support, 12-liquid tank liquid discharge proportion regulating valve, 13-overflow liquid return pipe, 14-liquid storage liquid collection tank, 15-filter, 16-coupling medium pump, 17-scanning detection platform pad foot, 18-scanning detection liquid tank, 19-overflow tank, 20-deflector rod power unit, 21-driving chain wheel, 22-driving chain, 23-intermediate chain wheel, 24-track ascending limit body 25-track limiting groove, 26-conveying track body, 27-track body guide groove, 28-follow-up guide cam, 29-sealing box chain plate, 30-sealing box body, 31-transmission chain wheel shaft, 32-follow-up cam rack, 33-sealing box hanging pin, 34-buckle, 35-buckle open groove, 36-box body, 37-box cover, 38-box cover hole, 39-box cover connecting rod hole, 40-sliding block deflector rod, 41-sliding groove fixing plate, 42-box cover connecting rod groove, 43-power semiconductor device, 44-elastic body, 45-elastic fixed seat, 46-guide groove, 47-box body guide rod, 48-main body end block, 49-sliding block body groove, 50-box cover connecting rod, 51-sliding block body, 52-box body connecting column, 53-connecting rod locking groove, 54-bubble impact unit, 55-infiltration unit, 56-infiltration liquid inlet joint pipe, 57-impact liquid inlet joint pipe, 58-bubble impact spray head, 59-connecting rod inlet and outlet groove, 60-infiltration shunt pipe, 61-bubble impact shunt pipe, 62-infiltration spray head, 63-joint threaded pipe, 64-flat part and 65-spraying bracket.

Detailed Description

The invention is further illustrated by the following specific figures and examples.

In order to effectively implement the ultrasonic scanning detection of the power semiconductor device 43, improve the stability and reliability of the ultrasonic scanning detection, and reduce the cost of the ultrasonic scanning detection, an embodiment of the present invention includes:

a scanning detection liquid tank 18 supported on the scanning detection platform 1 for accommodating a coupling medium to form a coupling medium liquid pool for performing liquid immersion type ultrasonic scanning detection on the power semiconductor device 43 by using the accommodated coupling medium;

the ultrasonic scanning microscopic detection device is arranged on the scanning detection platform 1 and is used for carrying out required ultrasonic scanning detection on the power semiconductor device 43 which is carried by the device sealing box 5 and is immersed in the coupling medium liquid pool;

a sealing box circulation operation mechanism used for the operation of ultrasonic scanning detection of at least one device sealing box 5, wherein,

driving the device sealing box 5 to circularly operate along a device loading and unloading area above the scanning detection platform 1, a scanning detection liquid groove 18, a sealing box liquid-removing area above the scanning detection platform 1 and an in-platform operation area in the scanning detection platform 1 for any device sealing box 5 which is in adaptive connection with the sealing box circulating operation mechanism;

when the device sealing box 5 runs through the device loading and unloading area, the device sealing box 5 is loaded and unloaded as required;

when the device sealing box 5 runs through the scanning detection liquid tank 18, the power semiconductor device in the device sealing box 5 is subjected to liquid immersion type ultrasonic scanning by using an ultrasonic scanning microscopic detection device;

when the device sealing box 5 runs through the sealing box liquid removing area, the coupling medium carried on the surface of the device sealing box 5 is removed.

The scanning detection platform 1 is utilized to support the scanning detection liquid tank 18, and the scanning detection platform 1 can adopt the existing common platform form so as to meet the requirements of supporting the scanning detection liquid tank 18 and ultrasonic scanning detection. The bottom of the scanning and detecting platform 1 is provided with a plurality of uniformly distributed scanning and detecting platform pad feet 17 and a scanning and detecting platform Ma Fu wheel, as shown in fig. 1, wherein the scanning and detecting platform pad feet 17 can support the scanning and detecting platform 1, that is, the scanning and detecting platform 1 can be stably placed at a required position, and the scanning and detecting platform Ma Fulun can be used for conveniently moving the scanning and detecting platform 1 to the required position.

The scanning detection liquid tank 18 is generally rectangular, and the scanning detection liquid tank 18 can store the coupling medium, so as to form a coupling medium liquid pool in the scanning detection liquid tank 18, that is, the coupling medium liquid pool in the scanning detection liquid tank 18 is utilized to realize liquid immersion type ultrasonic scanning detection on the power semiconductor device 43, that is, the power semiconductor device 43 can be subjected to ultrasonic scanning detection.

The power semiconductor device 43 may be a conventional power device, such as a MOSFET device, an IGBT device, or other power device, and the form of the power semiconductor device 43 may be selected as needed to meet the requirements for ultrasonic scanning detection. In order to improve the efficiency of ultrasonic scanning detection of the power semiconductor device 43, the power semiconductor device 43 is hermetically accommodated by the device sealing case 5, and generally, the device sealing case 5 can accommodate a plurality of power semiconductor devices 43 at a time. When a plurality of power semiconductor devices 43 are accommodated in the device sealing box 5 in a sealing manner, specifically, the power semiconductor devices 43 are located in the device sealing box 5, and during ultrasonic scanning detection, the sealing requirement can be met, the parts of the power semiconductor devices 43, which need ultrasonic scanning detection, can be exposed, and at the moment, the liquid inlet condition in the power semiconductor devices 43 cannot occur. The liquid inlet means that a coupling medium enters the power semiconductor device 43, and the coupling medium is the above-mentioned absolute alcohol or deionized water.

In order to improve the stability of ultrasonic scanning detection, an ultrasonic scanning micro-detection device is arranged on the scanning detection platform 1, the ultrasonic scanning micro-detection device is fixedly assembled on the scanning detection platform 1, and the required ultrasonic scanning detection can be carried out on the power semiconductor device 43 which is carried by the device sealing box 5 and is immersed in the coupling medium liquid pool by using the ultrasonic scanning micro-detection device.

In fig. 1 and fig. 3, an embodiment of an ultrasonic scanning micro-inspection apparatus is shown, wherein the ultrasonic scanning micro-inspection apparatus comprises an ultrasonic scanning micro-inspection seat 7 and an ultrasonic scanning inspection head 8 arranged on the ultrasonic scanning micro-inspection seat 7, and the ultrasonic scanning micro-inspection seat 7 is fixed on the scanning inspection platform 1 and spans across a scanning inspection liquid tank 18.

In fig. 1 and 3, two ultrasonic scanning detection heads 8 are arranged on the ultrasonic scanning microscopic detection seat 7, and each ultrasonic scanning detection head 8 is positioned right above a scanning detection liquid groove 18. In the scanning detection liquid tank 18, an area corresponding to an ultrasonic scanning detection head 8 forms a scanning detection station. When the device sealing box 5 is positioned right below an ultrasonic scanning detection head 8, the ultrasonic scanning detection head 8 can be used for carrying out ultrasonic scanning detection on the power semiconductor device 43 in the device sealing box 5. The mode and process of using the ultrasonic scanning detection head 8 to perform ultrasonic scanning detection on the power semiconductor device 43 can be consistent with the existing mode, so as to meet the requirement of ultrasonic scanning detection. Of course, in the specific implementation, the number and the distribution state of the ultrasonic scanning detection heads 8 on the ultrasonic scanning micro-detection seat 7 can be selected according to actual needs, so as to meet the requirement of ultrasonic scanning detection of the power semiconductor device 43.

In order to improve the efficiency and automation degree of ultrasonic scanning detection, in one embodiment of the present invention, the sealing box circulation operation mechanism is used to circulate at least one device sealing box 5, and in operation, the sealing box circulation operation mechanism generally circulates a plurality of device sealing boxes 5 at the same time. Certainly, when the device sealing box 5 is circularly operated, the device sealing box 5 needs to be in adaptive connection with the sealing box circulating operation mechanism, and the adaptive connection specifically means that the device sealing box 5 can be circularly operated.

According to the process of performing ultrasonic scanning inspection on the power semiconductor device 43, the regions where the device sealing box 5 operates in a circulating manner may generally include a device loading/unloading region, a region inside the scanning inspection liquid tank 18, a region where the sealing box is removed from liquid, and a region inside the scanning inspection platform 1. Generally, the device loading/unloading area and the capsule liquid-removing area correspond to two ends of the scanning detection liquid bath 18, respectively.

When the device sealing box 5 is operated to the device loading and unloading area, the required loading and unloading can be carried out, wherein the loading refers to the step of placing the power semiconductor device 43 into the device sealing box 5, and the unloading refers to the step of taking out the power semiconductor device 43 in the device sealing box 5. And (4) operating the device sealing box 5 into the scanning detection liquid groove 18, specifically operating the device sealing box 5 to a scanning detection station. The device sealing box 5 is operated to a sealing box liquid removing area, in particular to the removal of the coupling medium which is operated out of the device sealing box 5 from the scanning detection liquid groove 18, so that the environment of ultrasonic scanning detection is prevented from being polluted by the carried coupling medium.

It can be known from the above description that the feeding and discharging area of the device, the scanning detection liquid tank 18 and the liquid removing area of the seal box are all located on the scanning detection platform 1, and in order to realize the circular operation, the in-platform operation area is arranged in the scanning detection platform 1, and corresponds to the feeding and discharging area of the device, the scanning detection liquid tank 18 and the liquid removing area of the seal box, specifically, the circular operation is satisfied. Fig. 3 shows an example of a direction of circulation of the device sealing case 5.

When a plurality of device seal boxes 5 are operated circularly, when one device seal box 5 is positioned in the device loading and unloading area, the other device seal box 5 can be positioned in a scanning detection station, a seal box liquid-removing area or a platform operation area in the scanning detection liquid groove 18, and the efficiency of ultrasonic scanning detection can be effectively improved.

In one embodiment of the invention, the sealing box circulating operation mechanism comprises a sealing box circulating conveying track 2 matched with the scanning detection platform 1 and a sealing box transmission mechanism for driving the device sealing box 5 to operate along the sealing box circulating conveying track 2, wherein,

the sealing box circulating conveying track 2 comprises symmetrically distributed conveying track bodies 26, the conveying track bodies 26 are annular, and the length direction of the conveying track bodies 26 is consistent with that of the scanning detection liquid groove 18;

and for the conveying track body 26 which corresponds to the scanning detection liquid tank 18 and is positioned above the scanning detection platform 1, the conveying track body 26 is fixed on the corresponding inner side wall of the scanning detection liquid tank 18.

In order to satisfy the circulation operation of a plurality of device sealing boxes 5, a sealing box circulation conveying track 2 is generally required, and fig. 1, 2, 3 and 4 show an embodiment of the sealing box circulation conveying track 2, namely, the sealing box circulation conveying track 2 comprises symmetrically distributed conveying track bodies 26, and the two conveying track bodies 26 are parallel to each other and correspond to two sides of the scanning detection liquid groove 18.

In order to enable the circulation, the conveying rail body 26 is annular, and in the embodiment of fig. 1 to 4, the section of the conveying rail body 26 is oval. In order to immerse the device sealing box 5 in the coupling medium liquid pool during the circulation operation, the area of the conveying rail body 26 corresponding to the scanning detection liquid tank 18 is fixed with the inner side wall of the scanning detection liquid tank 18.

For the conveying track body 26 corresponding to the device loading and unloading area and the seal box liquid-removing area, a part of the conveying track body protrudes out of the scanning detection platform 1, and a part of the conveying track body is positioned in the scanning detection platform 1. In fig. 1, the feeding area rail support 3 and the liquid removal area rail support 11 are used for respectively supporting and fixing the conveying rail body 26 corresponding to the feeding area and the discharging area of the device and the liquid removal area of the seal box, and the supporting and fixing specifically means that the whole seal box circulating conveying rail 2 can be assembled and fixed, namely, the circulating operation of the device seal box 5 can be met.

In specific implementation, the ultrasonic scanning micro-detection seat 7 is located between the device loading area and the sealing box liquid-removing area, and generally, the height of the device sealing box 5 in the device loading area and the sealing box liquid-removing area is higher than the height of the device sealing box 5 in the coupling medium liquid pool. Therefore, the conveying rail body 26 is inclined in the combination area corresponding to the device loading/unloading area, the seal box liquid-removing area and the scanning detection liquid tank 18.

In one embodiment of the invention, a plurality of air knife sets for blowing air and removing liquid from the device sealing box 5 are arranged in the liquid removing area of the sealing box, wherein,

the air knife set comprises at least one air knife 10 for blowing air to the upper surface of the device sealing box 5 and at least one air knife 10 capable of blowing air to the lower surface of the device sealing box 5 simultaneously, so that the coupling medium carried by the surface of the device sealing box 5 is blown away by the air blown by the air knives 10.

Fig. 1 shows an embodiment in which a knife set is provided in the liquid removal area of the seal box, and the knife set is fixedly connected with the conveying track body 26 or the liquid removal area track support 11 in a matching manner. The air knife set comprises a plurality of air knives 10, and the outer surface of the device sealing box 5 can be removed from the scanning detection liquid groove 18 carrying the coupling medium by the aid of the air knives 10, and at the moment, the coupling medium is blown away.

In order to blow off the coupling medium on the device sealing box 5, an external high-pressure gas source is generally required, that is, the high-pressure gas source provides high-pressure gas to be blown off by the air knife 10, and the blown-off high-pressure gas can be used to blow off the coupling medium. The air knife 10 can adopt the existing common form, specifically, the air knife can blow out high-pressure air and blow off the coupling medium on the device sealing box 5.

In specific implementation, the coupling medium blown away by the air knife group needs to be collected by a coupling medium collecting box, and the collected coupling medium can finally flow back to the liquid storage and collection box 14, so that circulation of the coupling medium is realized, and the pollution to the field environment can be avoided. The specific conditions of the coupling medium collection tank can be selected as required so as to meet the requirements of collection of the blown-off coupling medium and backflow to the liquid storage and collection tank 14.

In one embodiment of the present invention, the sealing box driving mechanism comprises a driving connection body detachably connected to the device sealing box 5, and a driving unit for driving the driving connection body to rotate in the conveying track body 26, wherein,

the transmission connecting bodies are in one-to-one correspondence with the conveying track bodies 26;

when the transmission connecting body is in adaptive connection with the corresponding outer edge of the device sealing box 5, the transmission connecting body is utilized to drive the device sealing box 5 to circularly operate along the sealing box circulating conveying track 2;

when the transmission connecting body is separated from the device sealing box 5, the device sealing box 5 is loaded and unloaded, or the power semiconductor device 43 in the device sealing box 5 is subjected to required ultrasonic scanning detection.

During specific implementation, the device sealing box 5 is driven by the sealing box transmission mechanism to circularly operate along the sealing box circular conveying track 2, wherein the sealing box transmission mechanism is in adaptive connection with the device sealing box 5 through a transmission connecting body, and the transmission driving unit drives the transmission connecting body to move.

The transmission connecting bodies are in one-to-one correspondence with the conveying track bodies 26, and as can be seen from the above description, there are two transmission connecting bodies for the sealed box circulating conveying track 2 composed of two conveying track bodies 26. The two transmission connecting bodies are detachably connected with the device sealing box 5, and the positions where the transmission connecting bodies are connected and matched with the device sealing box 5 are generally positioned at the outer edge of the device sealing box 5.

As can be seen from the above description, when a plurality of device sealing cases 5 are cyclically operated, different device sealing cases 5 generally need to be in different areas or states, and therefore, when one device sealing case 5 needs to maintain the cyclic operation state, it is necessary to maintain the adaptive connection state between the device sealing case 5 and the transmission connection body. When the loading and unloading or ultrasonic scanning detection is needed, the device sealing box 5 needs to be in a relatively static state at the moment, namely, needs to be separated from the transmission connecting body, and after separation, the circulating operation state of other device sealing boxes 5 cannot be influenced, so that the detection efficiency and the detection automation degree are improved.

In one embodiment of the invention, the drive connection comprises a drive chain 22;

when the transmission connecting body adopts the transmission chain 22, the transmission driving unit comprises transmission chain wheels respectively arranged at two ends of the conveying track body 26, and the transmission chain wheels at two ends of the same conveying track body 26 are in adaptive connection through the transmission chain 22 which is right corresponding;

the transmission chain wheels at the same ends of the two conveying track bodies 26 are connected in a matching way through a transmission chain wheel shaft 31.

In fig. 1-4, an embodiment of a driving chain 22 is shown as the driving connection body, but the driving connection body may also take other forms, such as a belt or other driving forms, and the driving form can be selected according to the requirement. The two transmission chains 22 correspond to the two conveying track bodies 26, and the transmission chains 22 are generally located in the conveying track bodies 26.

When the transmission connecting body adopts the transmission chain 22, the transmission driving unit comprises a transmission chain wheel, a transmission chain wheel is arranged at both ends of each conveying track body 26, and the transmission chain wheels at both ends of the conveying track bodies 26 are connected in a matching way through the transmission chain 22 which just corresponds to each other. In order to drive the rotation of the transmission chain wheel, in fig. 1, a servo motor 9 for providing power is arranged on the scanning detection platform 1, the servo motor 9 corresponds to the transmission chain wheel of the sealing box liquid-removing area, at this time, the transmission chain wheel of the sealing box liquid-removing area forms a driving chain wheel 21, and the transmission chain wheel of the device loading and unloading area forms a driven chain wheel 4.

Two driving sprocket 21 and two driven sprocket 4 are connected through a transmission sprocket axle 31 respectively to can drive driving sprocket 21 and driven sprocket 4 simultaneously through a servo motor 9 and rotate, in order to drive the motion of drive chain 22 after rotating, the drive chain 22 moves the back, can realize the circulation operation of drive adaptation connecting device seal box 5. In fig. 2, when the transmission chain 22 is long, the transition can be performed through the intermediate chain wheel 23, so as to improve the stability and reliability of the device sealing box 5 driven by the transmission chain 22 in the circulating operation.

In order to realize the separable connection between the device sealing box 5 and the transmission chain 22, in one embodiment of the invention, a buckle 34 is arranged on the transmission chain 22, and a buckle opening groove 35 is arranged on the buckle 34;

a plurality of seal box hanging pins 33 are arranged on the device seal box 5, the seal box hanging pins 33 can be embedded in a hasp opening groove 35, wherein,

the sealing box hanging pins 33 correspond to the hasp opening grooves 35 on the hasps 34 one by one, and when the sealing box hanging pins 33 are embedded in the hasp opening grooves 35, the device sealing box 5 is in adaptive connection with the transmission connecting body;

when the device sealing box 5 is lifted and the sealing box hanging pin 33 is separated from the hasp opening groove 35, the device sealing box 5 is separated from the transmission connecting body.

In fig. 5, 6 and 7, a buckle 34 is arranged on one side of the transmission chain 22, the buckle 34 is connected with the transmission chain 22, and the buckle 34 is arranged on the transmission chain 22, so that the movement of the transmission chain 22 is not influenced and the buckle can be adaptively connected with the device sealing box 5.

Generally, the device sealing box 5 is rectangular, four sealing box hanging pins 33 are arranged on the device sealing box 5, the four sealing box hanging pins 33 are distributed uniformly and symmetrically, and one sealing box hanging pin 33 corresponds to one buckle 34, so when the device sealing box 5 is in adaptive connection with the transmission chain 22, two buckles 34 need to be arranged on the transmission chain 22, and the two buckles 34 on the same transmission chain 22 correspond to the sealing box hanging pins 33 at the same end of the device sealing box 5 respectively. Generally, the seal box hooking pin 33 has a longitudinal direction perpendicular to the longitudinal direction of the drive chain 22.

A hasp opening groove 35 is formed in the hasp 34, and the opening direction of the hasp opening groove 35 is determined according to the requirements that the sealing box hanging pin 33 can be conveniently embedded and the groove bottom of the hasp opening groove 35 is utilized to support the sealing box hanging pin 33. In specific implementation, when the sealing box hanging pin 33 is positioned in the hasp opening groove 35, the device sealing box 5 is connected with the transmission chain 22 in a matching manner. When the sealing box hanging pin 33 is withdrawn or separated from the hasp opening groove 35, the separation of the device sealing box 5 and the transmission chain 22 is realized.

In one embodiment of the present invention, the device sealing box further comprises a plurality of follow-up guide cams 28 adapted to be connected with the device sealing box 5, wherein,

the follow-up guide cam 28 can be embedded in the guide groove 27 of the corresponding conveying track body 26, and when the device sealing box 5 is driven by the transmission connecting body to operate, the follow-up guide cam 28 is in rolling contact with the guide groove 27 of the corresponding track body.

In order to ensure the device sealing box 5 to circularly run along the sealing box circulating conveying track 2, a track body guide groove 27 is arranged in each conveying track body 26, and the track body guide grooves 27 are distributed along the conveying track bodies 26. The device sealing box 5 is provided with follow-up guide cams 28, generally, four end corners of the device sealing box 5 are provided with one corresponding follow-up guide cam 28, the follow-up guide cams 28 are connected with the device sealing box 5 in an adaptive mode through a follow-up cam frame 32, and the follow-up guide cams 28 can rotate relative to the follow-up cam frame 32. Of course, in the embodiment, the seal box hooking pin 33 may be provided on the follower cam carrier 32.

When the device sealing box 5 is circularly operated, the follow-up guide cam 28 is positioned in the track body guide groove 27 and is in rolling contact with the track body guide groove 27, that is, by means of the matching of the follow-up guide cam 28 and the track body guide groove 27, the circular operation of the device sealing box 5 can be guided, so as to ensure that the device sealing box 5 circularly operates along the sealing box circular conveying track 2, as shown in fig. 6.

In one embodiment of the present invention, a rail body limiting mechanism for limiting the component sealing box 5 is provided on the conveying rail body 26, wherein,

the track body limiting mechanism comprises a track ascending limiting body 24 which is arranged on a conveying track body 26 and corresponds to a track limiting groove 25;

when the device sealing box 5 is jacked, the follow-up guide cam 28 can enter the track limiting groove 25, the track limiting groove 25 is matched with the follow-up guide cam 28 to limit the operation of the device sealing box 5, and the track lifting limiting body 24 is used for limiting the jacking of the device sealing box 5.

As can be seen from the above description, when the circularly operated device sealing box 5 needs to be separated from the transmission chain 22, the device sealing box 5 generally needs to be lifted, so that the sealing box hanging pin 33 is withdrawn or separated from the hasp opening groove 35 after lifting.

In order to ensure the reliability of jacking the device seal box 5, it is necessary to utilize the track body limiting mechanism to carry out limitation, the limitation comprises the limitation of the jacking and the limitation of the movement of the device seal box 5 after jacking, and the movement after jacking is limited, specifically, the device seal box 5 is prevented from moving along with the transmission chain 22 in the jacking state.

In fig. 1, 2 and 4, an embodiment of a rail body limiting mechanism is shown, specifically, a rail limiting groove 25 and a rail ascending limiting body 24 corresponding to the rail limiting groove 25 are provided on a conveying rail body 26, and generally, the rail limiting groove 25 is provided in a position area where the device sealing box 5 needs to be lifted and separated from the transmission chain 22, such as the device loading and unloading area and the scanning detection station mentioned above.

As is apparent from the above description, two follower guide cams 28 are provided at each end of the device sealing case 5, and therefore, two rail stopper grooves 25 are provided in a transfer rail body 26 in the corresponding region. When the device sealing box 5 is jacked up, the follow-up guide cam 28 on the device sealing box 5 is aligned with the track limiting groove 25, the follow-up guide cam 28 can enter the track limiting groove 25, at the moment, the track lifting limiting body 24 can be used for jacking and limiting the follow-up guide cam 28, and separation between the device sealing box 5 and the transmission chain 22 can be guaranteed. By means of the matching of the track limiting groove 25 and the follow-up guide cam 28, the misoperation caused by the contact between the device sealing box 5 and the transmission chain 22 can be avoided.

When jacking 5 device seal boxes, can adopt the form of jacking such as cylinder, can select as required the mode of 5 jacking device seal boxes to can satisfy the jacking to 5 device seal boxes and be accurate. When the device sealing box 5 needs to be operated, the jacking of the device sealing box 5 is removed, and at the moment, the follow-up guide cam 28 can retreat from the track limiting groove 25 and restore the rolling contact with the track body guide groove 27.

In one embodiment, the movement of the driving chain 22 is configured to control the device sealing box 5 to be adapted to the driving chain 22 again, i.e. the sealing box hanging pin 33 is inserted into the hasp opening slot 35 of the hasp 34 again. The above processes are repeated in a circulating way, so that the device sealing box 5 can be circularly operated, and the device sealing box and the transmission chain 22 are separated in the circulating operation process, so that the requirements of feeding, blanking and ultrasonic scanning detection are met.

In one embodiment of the present invention, the device further comprises an immersion impact spraying mechanism 6 for injecting a coupling medium into the scanning detection liquid tank 18, wherein,

the infiltrating impact spraying mechanism 6 is positioned in a combination area of the device feeding area and the scanning detection liquid tank 18, and the infiltrating impact spraying mechanism 6 can also be used for infiltrating spraying and impact spraying of the coupling medium on the device sealing box 5 entering the coupling medium liquid tank so as to remove bubbles on the surface of the device sealing box 5 when entering the coupling medium liquid tank.

During the ultrasonic scanning, the coupling medium in the scanning liquid tank 18 will be in a dynamic change process. In order to improve the reliability of the ultrasonic scanning detection, the device sealing box 5 entering the coupling medium liquid pool needs to ensure that the ultrasonic scanning part of the power semiconductor device 43 has no bubbles, i.e. the existence of bubbles needs to be avoided to influence the effect of the ultrasonic scanning detection. In order to achieve the required purpose, an immersion impact spraying mechanism 6 is arranged at the first end of the scanning detection liquid tank 18, and the immersion impact spraying mechanism 6 is used for performing immersion and impact on the surface of the power semiconductor device 43 entering the coupling medium liquid tank so as to reduce or avoid bubbles existing on the power semiconductor device 43 after entering the coupling medium liquid tank. In practice, the coupling medium in the scanning and detecting liquid tank 18 is also injected through the wetting impact spraying mechanism 6.

In order to realize circulation of the coupling medium, in an embodiment of the present invention, the liquid storage and receiving tank 14 is further included for providing the coupling medium required for ultrasonic scanning detection, wherein,

the liquid storage and collection box 14 is positioned in the scanning detection platform 1, and the coupling medium in the liquid storage and collection box 14 is extracted and enters the scanning detection liquid tank 18 through the infiltration impact spraying mechanism 6;

the coupling medium in the scanning detection liquid tank 18 flows back into the liquid storage and collection tank 14 through the liquid tank discharge ratio adjusting valve 12, and the opening degree of the liquid tank discharge ratio adjusting valve 12 is adjusted based on the liquid level of the coupling medium in the scanning detection liquid tank 18, so that the liquid tank discharge ratio adjusting valve 12 adjusts the state that the coupling medium in the scanning detection liquid tank 18 flows back into the liquid storage and collection tank 14.

In order to make the coupling medium liquid pool in the scanning detection liquid tank 18 meet the requirement of ultrasonic scanning detection, a liquid storage and receiving tank 14 is arranged in the scanning detection platform 1, and at this time, the liquid storage and receiving tank 14 is located below the scanning detection liquid tank 18. The liquid storage and collection tank 14 is used for storing coupling media, and the stored coupling media include externally injected coupling media and coupling media circulated and returned in the scanning detection process.

After the coupling medium is sprayed on the device sealing box 5, the coupling medium sprayed by the wetting impact spraying mechanism 6 enters the scanning detection liquid tank 18, and at the moment, the liquid level of the coupling medium liquid tank in the scanning detection liquid tank 18 changes. In order to improve the stability of the liquid level of the coupling medium liquid pool in the scanning detection liquid tank 18, the liquid tank discharge ratio adjusting valve 12 can release the coupling medium in the scanning detection liquid tank 18 to flow back into the liquid storage and recovery tank 14, and at this time, the liquid level of the coupling medium liquid pool in the scanning detection liquid tank 18 can reach dynamic balance, as shown in fig. 1.

In specific implementation, the liquid tank liquid discharge proportion regulating valve 12 may adopt an existing commonly-used proportion regulating solenoid valve, the opening of the liquid tank liquid discharge proportion regulating valve 12 is related to the liquid level of the coupling medium in the scanning detection liquid tank 18, if a reference liquid level may be set for the coupling medium liquid tank in the scanning detection liquid tank 18, when the liquid level of the coupling medium liquid tank is higher than the reference liquid level, the opening of the liquid tank liquid discharge proportion regulating valve 12 is increased, otherwise, the opening of the liquid tank liquid discharge proportion regulating valve 12 is maintained or reduced, so that the liquid level of the coupling medium liquid tank in the scanning detection liquid tank 18 can be maintained stable, and the requirement that the power semiconductor device 43 is located in the coupling medium liquid tank to perform required ultrasonic scanning detection is met.

The liquid level in the scanning detection liquid tank 18 can be detected by a scanning detection liquid tank level meter, the scanning detection liquid tank level meter can adopt the existing common form, for example, the scanning detection liquid tank level meter can be used for detecting the lowest liquid level, the highest liquid level or the real-time liquid level in the scanning detection liquid tank 18, and the condition of the liquid level in the scanning detection liquid tank 18 detected by the scanning detection liquid tank level meter can be selected according to the requirement, so that the aim of dynamically controlling the liquid level dynamic balance of the coupling medium liquid tank in the scanning detection liquid tank 18 by utilizing the liquid tank liquid discharge proportion regulating valve 12 can be fulfilled.

In fig. 1, 2 and 3, the apparatus further includes a overflow tank 19 corresponding to the scanning detection tank 18, the overflow tank 19 can be used to store overflowed coupling medium, and the coupling medium stored in the overflow tank 19 can flow back into the liquid storage tank 14 through the overflow return pipe 13.

In specific implementation, the coupling medium sprayed by the immersion impact spraying mechanism 6 is provided by the liquid storage and collection tank 14, the coupling medium pump 16 is arranged in the scanning and detecting platform 1, the coupling medium in the liquid storage and collection tank 14 is extracted by the coupling medium pump 16, and the extracted coupling medium is sent to the immersion impact spraying mechanism 6 to be sprayed out. In order to improve the reliability of the ultrasonic scanning detection, the coupling medium is pumped by the coupling medium pump 16, and then filtered by the filter 15 to prevent impurities from entering the scanning detection liquid tank 18.

As shown in fig. 11, in one embodiment of the present invention, the immersion impingement spray mechanism 6 comprises:

the wetting unit 55 is used for spraying the coupling medium on the surface of the power semiconductor device before entering the coupling medium liquid pool so as to wet the upper surface of the device sealing box 5 by using the sprayed coupling medium;

and a bubble impact unit 54 for spraying the coupling medium on the surface of the device sealing box 5 after entering the coupling medium liquid pool to impact the bubbles attached to the surface of the power semiconductor device, wherein,

the flow velocity of the coupling medium sprayed by the bubble impact unit 54 is larger than that of the coupling medium sprayed by the soaking unit 55.

During ultrasonic scanning detection, the power semiconductor device 43 needs to be located in the coupling medium liquid pool through the device sealing box 5, that is, the ultrasonic scanning portion of the power semiconductor device 43 is located below the liquid level of the coupling medium liquid pool. In order to avoid the influence of bubbles attached to the surface of the power semiconductor device 43 on ultrasonic scanning detection, before the power semiconductor device 43 enters the coupling medium liquid pool, the wetting unit 55 is used for spraying the coupling medium on the upper surface of the device sealing box 5, at this time, the sprayed coupling medium covers the surface of the power semiconductor device 43, and the type of the sprayed coupling medium and the type of the coupling medium liquid pool can be the same.

The wetting unit 55 is configured to spray the coupling medium on the surface of the power semiconductor device 43, so as to wet the surface of the power semiconductor device 43, so as to smooth and uniform the surface of the power semiconductor device 43, and prevent the power semiconductor device 43 from entering the coupling medium liquid pool through a dry surface, thereby preventing the surface of the power semiconductor device 43 from drying and entering the coupling medium liquid pool, that is, when entering the coupling medium liquid pool, bubbles attached to the surface of the power semiconductor device 43 can be reduced.

After the power semiconductor device 43 enters the coupling medium liquid pool, a small amount of air bubbles may be adsorbed on the surface of the power semiconductor device 43, at this time, the air bubble impact unit 54 is used for spraying the surface of the power semiconductor device 43, the sprayed coupling medium is used for impacting the air bubbles attached to the surface of the power semiconductor device 43, the air bubbles attached to the surface of the power semiconductor device 43 are further eliminated, and the reliability of the power semiconductor device 43 in ultrasonic scanning detection is improved.

In specific implementation, the coupling medium sprayed by the bubble impact unit 54 is generally the same as the coupling medium sprayed by the infiltration unit 55 and the coupling medium in the coupling medium liquid pool, and the flow rate and the flow velocity of the coupling medium sprayed by the bubble impact unit 54 are both greater than the corresponding flow rate and the corresponding flow velocity of the coupling medium sprayed by the infiltration unit 55. The flow and flow rate of the coupling medium sprayed by the soaking unit 55 and the bubble impact unit 54 are specifically related to the speed of the power semiconductor device entering the coupling medium liquid pool, and the specific flow and flow rate are set so as to meet the requirement of effectively removing bubbles attached to the surface of the power semiconductor device 43. Specifically, the respective flow rates and flow rates of the coupling medium sprayed by the wetting unit 55 and the bubble impact unit 54 can be controlled by adopting a form of a proportional valve and the like.

In one embodiment of the present invention, the immersion unit 55 and the bubble impingement unit 54 are mounted on a spray frame 65, wherein,

the spraying bracket 65 spans the end part of the scanning detection liquid groove 18 so as to fixedly assemble the infiltration impact spraying mechanism 6 at the end part of the scanning detection liquid groove 18;

the soaking unit 55 and the bubble impact unit 54 are distributed on two sides of the spraying bracket 65, and the soaking unit 55 and the bubble impact unit 54 are parallel to each other;

when the coupling medium is sprayed, the soaking unit 55 sprays the coupling medium above the liquid level of the coupling medium liquid pool in the scanning detection liquid tank 18, and the bubble impact unit 54 sprays the coupling medium below the liquid level of the coupling medium liquid pool in the scanning detection liquid tank 18.

In fig. 11 and 12, it is shown that the immersion unit 55 and the bubble impact unit 54 are matched with the spray bracket 65, the immersion unit 55 and the bubble impact unit 54 are distributed on both sides of the spray bracket 65, the length directions of the immersion unit 55 and the bubble impact unit 54 are consistent with the length direction of the spray bracket 65, and the immersion unit 55 and the bubble impact unit 54 are parallel to each other. When the immersion unit 55 and the bubble impact unit 54 are fixed to the spray holder 65, the spray holder 65 can be connected to the scanning liquid tank 18.

To improve the reliability of the spray, the immersion unit 55 sprays the coupling medium above the liquid level of the coupling medium bath, and the bubble impingement unit 54 sprays the coupling medium below the liquid level of the coupling medium bath. When the bubble impact unit 54 is disposed below the liquid level of the coupling medium liquid pool for spraying, air can be prevented from being taken into the coupling medium liquid pool.

In one embodiment of the present invention, the bubble impact unit 54 includes a bubble impact manifold 61 and a plurality of bubble impact sprinklers 58 disposed on the bubble impact manifold 61, wherein,

the plurality of bubble impact spray heads 58 are uniformly distributed on the bubble impact shunt pipe 61 along the length direction of the bubble impact shunt pipe 61, and the bubble impact spray heads 58 are communicated with the bubble impact shunt pipe 61.

In fig. 11 and 12, the main body of the shower holder 65 is in a cylindrical shape, the bubble impact unit 54 includes a bubble impact shunt 61 and a plurality of bubble impact nozzles 58, the bubble impact shunt 61 is in a tubular shape, for example, a cylindrical pipe similar to the shower holder 65 can be used, and the specific shape of the bubble impact shunt 61 can be selected as required. The air bubble impact shunt pipe 61 is fixedly attached to one side of the spraying bracket 65, and the length direction of the air bubble impact shunt pipe 61 is consistent with the length direction of the spraying bracket 65.

The plurality of bubble impact spray heads 58 are uniformly distributed along the length direction of the bubble impact shunt pipe 61, so that the plurality of bubble impact spray heads 58 can spray a plurality of power semiconductor devices at one time. Of course, the distribution of the bubble jet impingement nozzles 58 on the bubble jet impingement manifold 61 can be selected as desired to meet the desired spray requirements. The bubble impact spray head 58 is communicated with the bubble impact shunt pipe 61, so that the coupling medium to be sprayed needs to enter the bubble impact shunt pipe 61 first and then be sprayed out from the bubble impact spray head 58.

In order to improve the efficiency of installing and replacing the bubble impact sprayer 58, the joint threaded pipe 63 is arranged on the bubble impact shunt pipe 61, and the bubble impact sprayer 58 is in threaded connection with the joint threaded pipe 63 in a threaded mode so as to be communicated with the bubble impact shunt pipe 61 after being connected and matched with the joint threaded pipe 63. Certainly, the bubble impact sprayer 58 can also adopt other forms of connecting and matching with the bubble impact shunt pipe 61, and can be specifically selected as required so as to meet the requirement of quick and convenient connection and matching of the bubble impact sprayer 58 and the bubble impact shunt pipe 61.

In order to improve the spraying effect, the nozzle of the bubble impact sprayer 58 is flat, wherein the length direction of the nozzle of the bubble impact sprayer 58 is perpendicular to the movement direction of the device sealing box 5 gradually entering the coupling medium liquid pool.

In one embodiment of the present invention, bubble jet 58 has a flat portion 64, and the flat portion 64 is located at the head of bubble jet 58 so that the nozzle of bubble jet 58 is flat. When the nozzle of the bubble impact sprayer 58 is flat, the length direction of the nozzle of the bubble impact sprayer 58 is perpendicular to the moving direction of the power semiconductor device gradually entering the coupling medium liquid pool. For the embodiment of fig. 13, the length of the nozzle of bubble impact jet 58 is aligned with the length of bubble impact manifold 61.

In one embodiment of the present invention, the wetting unit 55 includes a wetting shunt 60 and a plurality of wetting nozzles 62 disposed on the wetting shunt 60, wherein,

the plurality of wetting nozzles 62 are uniformly distributed on the wetting shunt pipe 60 along the length direction of the wetting shunt pipe 60, and the wetting nozzles 62 are communicated with the wetting shunt pipe 60.

In specific implementation, the nozzle of the wetting nozzle 62 is flat, wherein the length direction of the nozzle of the wetting nozzle 62 is perpendicular to the movement direction of the device sealing box 5 gradually entering the coupling medium liquid pool. For the specific situations of the wetting shunt tube 60 and the wetting spray head 62, reference may be made to the corresponding descriptions of the bubble impact shunt tube 61 and the bubble impact spray head 58, which may be the same as the matching form of the bubble impact unit 54, and further description thereof is omitted here.

In fig. 12, a height diagram of the wetting nozzle 62 and the bubble impact nozzle 58 on both sides of the spraying bracket 65 is shown, and the height difference between the wetting nozzle 62 and the bubble impact nozzle 58 is utilized to satisfy the above-mentioned coupling medium spraying. The height difference H in fig. 12 can be selected according to actual needs, so as to satisfy the requirement of spraying the coupling medium onto the surface of the power semiconductor device.

In fig. 11, a wetting liquid inlet joint pipe 56 is arranged on a wetting shunt pipe 60, an impact liquid inlet joint pipe 57 is arranged on a bubble impact shunt pipe 61, and the wetting liquid inlet joint pipe 56 and the impact liquid inlet joint pipe 57 are used for receiving and pumping the coupling medium.

In one embodiment of the present invention, the sealing case 5 for any device includes:

the sealed box body 30 is used for accommodating the power semiconductor device 43 and comprises a box main body 36 supported on the sealed box chain plate 29 and a box cover 37 hinged on the box main body 36, wherein the box main body 36 can move on the sealed box chain plate 29;

the box body opening and locking mechanism is used for controlling the opening and locking of the device sealing box 5, is at least distributed on one side of the device sealing box 5, and is in adaptive connection with the box body 36 and the box cover 37 of the device sealing box 5, wherein,

when the box body opening and locking mechanism drives the box body 36 to move towards the first direction on the sealing box chain plate 29, the sealing and locking state between the box cover 37 and the box body 36 is released, so that the device sealing box 5 is in an openable state;

when the device sealing box 5 is closed, the box body opening and locking mechanism drives the box main body 36 to move on the sealing box chain plate 29 to the second direction so as to lock the box cover 37 on the box main body 36 in a sealing way;

the second direction of movement of the cartridge body 36 on the seal cartridge link plate 29 is opposite to the first direction of movement of the cartridge body 36 on the seal cartridge link plate 29.

In the device sealing box 5 shown in fig. 8 to 10, the following guide cam 28, the sealing box hanging pin 33, etc. are hidden, that is, only the power semiconductor device 43 is sealed by the device sealing box 5, and the locking and unlocking of the device sealing box 5 during operation, specifically the cooperation with the following guide cam 28, the sealing box hanging pin 33, etc. is shown, and reference may be made to the above description, which is not repeated here.

In specific implementation, the sealing case body 30 of the device sealing case 5 includes a case body 36 and a case cover 37, the case cover 37 is hinged to the case body 36, when the case cover 37 is pressed on the case body 36, the sealing case is in a closed state, and when the case cover 37 is pulled away from the case body 36, the device sealing case 5 is in an open state. In one embodiment of the present invention, the box body 36 is provided on the box link plate 29, and the box link plate 29 has a flat plate shape, and the box body 30 is supported by the box link plate 29.

In order to achieve the automatic opening and locking of the device sealing case 5, the case body 36 is movable on the sealing case link plate 29, and the movement of the case body 36 on the sealing case link plate 29 is a movement in the first direction or a movement in the second direction, that is, the case body 36 can reciprocate on the sealing case link plate 29.

As can be seen from the above description, in the process of ultrasonic scanning and detecting the power semiconductor device 43 in the sealed box, the device sealed box 5 needs to be in a locked state; when the power semiconductor device 43 is mounted in the device sealing case 5 or taken out from the device sealing case 5, the locked state of the device sealing case 5 needs to be released. In order to meet the adjustment and control of the opening or locking state of the device sealing box 5, the box body opening and locking mechanism is required to be matched with the sealing box chain plate 29 and the device sealing box 5, namely the box body opening and locking mechanism is used for realizing the opening or locking of the device sealing box 5. Here, the opening or locking of the device sealing case 5, specifically, the opening or locking of the sealing case body 30, is the same as described below.

In an embodiment of the present invention, the opening of the device sealing box 5 at least includes releasing the locking state of the sealing box, and certainly, after the locking state is released, the separation state between the box cover 37 and the box main body 36 may also be driven, which may be specifically selected according to actual needs so as to meet the requirement of controlling the working state of the device sealing box 5.

As can be seen from the above description, the reciprocating movement of the box main body 36 on the seal box link plate 29 is the movement in the first direction or the movement in the second direction after the movement in the first direction. The box body 36 reciprocates on the sealed box chain plate 29 and is powered by the box opening and locking mechanism. In specific implementation, the box body 36 moves on the sealing box chain plate 29 along a first direction, namely a moving direction for releasing the locking state of the box cover 37 and the box body 36, and the box body 36 moves on the sealing box chain plate 29 along a second direction, namely a moving direction for locking the box cover 37 on the box body 36. Through the motion of box main part 36 on sealed box link joint 29 to and the cooperation of box main part 36 and lid 37, can effectively realize controlling the operating condition of sealed box to satisfy the ultrasonic scanning detection demand of power semiconductor device 43, improve ultrasonic scanning detection efficiency and degree of automation.

In one embodiment of the present invention, the box opening and locking mechanism comprises a chute fixing plate 41 fixed on the chain plate 29 of the sealed box, a slider fixedly connected with the box main body 36, a box actuating mechanism for driving the slider to move in the chute fixing plate 41, and a box cover connecting mechanism for controlling the position of the box cover 37,

the chute fixing plate 41 is positioned at the outer side of one end of the box body 36, and the box cover 37 is in adaptive connection with the chute fixing plate 41 through a box cover connecting mechanism;

when the box body power mechanism drives the box main body 36 to move towards the first direction through the sliding block body, the contact matching state of the box cover 37 and the sliding groove fixing plate 41 through the box cover connecting mechanism is gradually released;

when the device sealing box 5 is closed, the box cover 37 is in adaptive connection with the sliding groove fixing plate 41 through the box cover connecting mechanism, and when the box body power mechanism drives the box main body 36 to move towards the second direction through the sliding block body, the box cover 37 is in contact fit with the sliding groove fixing plate 41 through the box cover connecting mechanism, so that the box cover 37 is locked on the box main body 36.

In the embodiment shown in fig. 8 and 9, the case body 36 and the case cover 37 are rectangular, but the case body 36 and the case cover 37 are shaped to accommodate the power semiconductor device 43 in a sealed manner. In fig. 8 and 9, a plurality of lid holes 38 are provided in the lid 37, and the ultrasonic scanning portion of the power semiconductor device 43 hermetically housed in the sealed case is exposed through the lid holes 38. During specific implementation, the box cover holes 38 penetrate through the box cover 37, and the number and distribution of the box cover holes 38 on the box cover 37 meet the requirements of containing the power semiconductor devices 43 and performing ultrasonic scanning on the power semiconductor devices 43 during ultrasonic scanning detection.

Certainly, in the specific implementation, when the ultrasonic scanning portion corresponding to the power semiconductor device 43 is exposed through the cover hole 38, the sealing state still needs to be maintained, that is, liquid such as water and the like is prevented from entering the box main body 36 through the cover hole 38, and the method for maintaining the sealing state can adopt the existing common technical means, for example, a sealing form such as a sealing ring is arranged at an inner ring of the cover hole 38, and the sealing storage is specifically required to be satisfied.

In fig. 8 and 9, the case where the box opening/locking mechanisms are provided at both ends of the sealed box 30 is shown, and when the box opening/locking mechanisms are provided at both ends of the sealed box 30, the stability and reliability of the sealed box when being opened or locked can be improved. Generally, the cassette opening and locking mechanisms that seal the two ends of the cassette 30 may take the same form.

In one embodiment of the present invention, the chute fixing plate 41 is fixed to the seal box link plate 29 and is located outside the corresponding end of the seal box body 30. The slider body is fixed to the case main body 36 and is connected to the chute fixing plate 41 in an adaptive manner. The box body power mechanism can provide power for the slider body to move in the chute fixing plate 41, namely, also provide power for the box main body 36 to move on the sealing box chain plate 29.

The box cover 37 is connected with the sliding groove fixing plate 41 at one end of the sealing box in an adaptive mode through the box cover connecting mechanism, and when the locking mechanism is opened by two box bodies, the box cover 37 is connected with the sliding groove fixing plates 41 at two ends of the sealing box in an adaptive mode through the two box cover connecting mechanisms. The contact connection state of the cover connection mechanism and the chute fixing plate 41 is used to realize the locking between the cover 37 and the box body 36 or to release the locking state between the cover 37 and the box body 36.

In one embodiment of the present invention, the lid connecting mechanism includes a lid connecting rod 50 disposed on the lid 37 and a lid connecting rod slot 42 disposed on the slot fixing plate 41, wherein,

the box cover link groove 42 comprises a link in-out channel 59 and a link locking channel 53 communicated with the link in-out channel 59, and the link in-out channel 59 and the link locking channel 53 are matched with the box cover link 50;

when the box main body 36 moves in the first direction on the sealing box link plate 29, the box cover link 50 enters the link entrance and exit channel 59 from the link locking channel 53 to release the locked state between the box cover 37 and the box main body 36;

when the box body 36 moves in the second direction on the seal box link plate 29, the box cover link 50 enters the link locking channel 53 from the link entry and exit channel 59 to lock the box cover 37 to the box body 36.

Fig. 10 shows an embodiment of using the matching between the lid connection mechanism and the chute fixing plate 41, a lid connection rod groove 42 is formed on the chute fixing plate 41, a lid connection rod 50 corresponding to the lid connection rod groove 42 is formed on the lid 37, when the chute fixing plates 41 are formed on both sides of the lid 37, two lid connection rods 50 are formed on the lid 37, and the lid connection rods 50 are fixedly assembled on the lid 37 through the lid connection rod holes 39 formed on the lid 37. Typically, the two lid links 50 on the lid 37 are coaxially disposed. The axis direction of the box cover link rod 50 is perpendicular to the direction in which the box main body 36 reciprocates on the seal box link plate 29.

In one embodiment of the present invention, the lid link groove 42 includes a link entry and exit channel 59 and a link locking channel 53, the link entry and exit channel 59 and the link locking channel 53 communicate with each other, and the lid link groove 42 formed by the link entry and exit channel 59 and the link locking channel 53 is L-shaped in the chute fixing plate 41. The connecting rod access slot 59 and the connecting rod locking slot 53 are matched with the box cover connecting rod 50, in particular to the box cover connecting rod 50 which can be embedded in the connecting rod access slot 59 and the connecting rod locking slot 53 and can move along the connecting rod access slot 59 and the connecting rod locking slot 53.

In fig. 10, the link inlet and outlet channels 59 are obliquely distributed on the chute fixing plate 41, and the openings of the link inlet and outlet channels 59 are on the end surface of the chute fixing plate 41 away from the seal box link plate 29. The notch of the connecting rod inlet and outlet channel 59 is positioned on the upper side surface of the sliding chute fixing plate 41, and when the box cover 37 is required to be locked on the box main body 36, the box cover connecting rod 50 enters the connecting rod locking channel 53 through the connecting rod inlet and outlet channel 59; when the locking state of the box cover 37 and the box main body 36 is released and the box cover 37 is opened, the box cover link 50 enters the link inlet and outlet channel 59 through the link locking channel 53 and is separated from the chute fixing plate 41 through the link inlet and outlet channel 59.

As is clear from the above description, the locked state of the box cover 37 and the box main body 36 is released, and preparation is made for opening the sealed box. When the sealing box is opened, the box cover 37 can be pulled manually so that the box cover 37 is separated from the box main body 36, or other opening modes for separating the box cover 37 from the box main body 36 are realized, and the mode for opening the sealing box can be selected according to actual needs so as to meet the requirement of opening the sealing box. The lid 37 is provided with a lid handle groove, and when the sealing case is opened manually, the lid 37 can be pulled conveniently by using the lid handle groove.

In one embodiment of the present invention, the slider body comprises a slider body 51 and a body end block 48 provided on the slider body 51, wherein,

the slider main body 51 is embedded in the slider body groove 49 in the sliding chute fixing plate 41, the slider main body 51 is fixedly connected with the end part adjacent to the box main body 36, and the slider main body 51 can move in the slider body groove 49;

the cartridge power mechanism is coupled through the body end block 48 and drives the slider body 51 through the body end block 48 to move within the slider body slot 49 to drive the cartridge body 36 through the slider body 51 to move in the first direction or to move in the second direction.

One embodiment of a slider body is shown in FIG. 10, wherein the slider body includes a slider body 51 and a body end block 48, the width of the body end block 48 being less than the width of the slider body 51. The slider body 51 is embedded in the slider body slot 49 and the body end block 48 is located outside the slot securing plate 41. The direction of movement of the slider body 51 within the slider body slot 49 is the first or second direction of movement of the cartridge body 36 on the seal cartridge link plate 29.

The box main body 36 is fixedly connected with the slider body, specifically, the box main body 36 is fixedly connected with the slider body 51, and fig. 10 shows a form that the end of the box main body 36 is fixedly connected with the slider body 51 by using a box body connecting column 52. The box body connecting column 52 can be in the form of a common bolt and the like, and when the box main body 36 is fixedly connected with the slider main body 51 through the box body connecting column 52, the movement of the slider main body 51 in the slider groove 49 is not influenced; it is ensured that the movement of the slider body 51 moves the box body 36 on the seal box chain plate 29.

The box body power mechanism is connected with the sliding block body, in particular to the box body power mechanism which is fixedly connected with the end block 48 of the main body. Fig. 8 to 10 show an embodiment of a box power mechanism, specifically, the box power mechanism includes a slider shifter 40 and a shifter power unit 20 for providing power, wherein,

the slider deflector rod 40 is fixedly connected with the slider body, and the deflector rod power unit 20 drives the slider body to move through the slider deflector rod 40.

In the embodiment of the present invention, the toggle power unit 20 may adopt the existing commonly used air cylinder, oil cylinder, etc. to provide the linear motion, and the specific form of the toggle power unit 20 may be selected according to the requirement, so as to meet the requirement of the reciprocating motion of the driving box main body 36 on the sealing box chain plate 29. The deflector rod power unit 20 is contacted with the main body end block 48 through the slide block deflector rod 40, in fig. 1, an embodiment of the deflector rod power unit 20 is shown as being arranged on the sealing box circular conveying track 2 of the device loading and unloading area, and the deflector rod power unit 20 can be used for providing opening or locking power for all the device sealing boxes 5 positioned in the device loading and unloading area.

In one embodiment of the present invention, the movement of the box main body 36 is guided by the box body movement guide mechanism when the box main body 36 moves on the seal box chain plate 29.

Specifically, the box body movement guiding mechanism includes a box body movement guiding groove 46 provided on the chute fixing plate 41 and a box body guiding rod 47 fixedly connected with the end of the box main body 36, wherein,

the length direction of the cartridge body movement guide groove 46 coincides with the first direction or the second direction of movement of the cartridge body 36, and the cartridge body guide lever 47 is embedded in the cartridge body movement guide groove 46 and can move in the length direction of the cartridge body movement guide groove 46. In specific implementation, the box body motion guide mechanism can guide the motion of the box main body 36 on the sealing box chain plate 29, so that the stability and reliability of the motion of the box main body 36 are improved.

In fig. 10, showing an embodiment of the cartridge movement guide mechanism, two cartridge movement guide grooves 46 are provided in a chute fixing plate 41, the cartridge movement guide grooves 46 are provided at both ends of the chute fixing plate 41 adjacent to one side of the cartridge main body 36, and the slider main body 51 is provided between the two cartridge movement guide grooves 46. The cartridge movement guide groove 46 has an oval shape. In each of the cartridge movement guide grooves 46, a cartridge guide rod 47 corresponding to the end of the cartridge body 36 is allowed to be fitted, and the cartridge guide rod 47 can move in the cartridge movement guide groove 46. That is, the cartridge body 36 moves on the seal cartridge link plate 29, the movement guide of the cartridge body 36 is realized by the movement of the cartridge body guide lever 47 in the cartridge body movement guide groove 46.

In one embodiment of the invention, a box body elastic mechanism is provided on the sealing box chain plate 29, wherein,

the box body elastic mechanism comprises an elastic fixed seat 45 arranged on the sealing box chain plate 29 and an elastic body 44 arranged on the elastic fixed seat 45, one end of the elastic body 44 is connected with the elastic fixed seat 45, and the other end of the elastic body 44 is fixedly connected with the box main body 36;

when the cartridge body 36 moves in the first direction, the cartridge body 36 places the elastic body 44 in a compressed state;

the force for moving the cartridge body 36 in the second direction is provided by the elastic body 44 in a compressed state.

Fig. 8 and 9 show an embodiment of providing the box body elastic mechanism on the seal box chain plate 29, wherein the box body elastic mechanism is symmetrically distributed on the seal box chain plate 29 and corresponds to two ends of the box main body 36. The elastic fixing seats 45 in the box body elastic mechanism are fixed on the sealing box chain plate 29 and positioned outside the box main body 36, two elastic bodies 44 are arranged on each elastic fixing seat 45, the elastic bodies 44 can be common elastic components such as springs, and the forms of the elastic bodies 44 can be selected according to actual requirements.

In specific implementation, when the main body 36 moves in the first direction, that is, the main body 36 moves in a direction approaching the elastic fixing seat 45, the main body 36 compresses the elastic body 44. When the main body 36 moves in the second direction, the main body 36 moves in a direction away from the elastic fixing seat 45, and at this time, the main body 36 can be pushed to move by the elastic acting force of the elastic body 44 in a compressed state, so that the efficiency of sealing the cartridge is improved.

Claims (15)

1. A circulation operation formula ultrasonic wave scanning detecting system, characterized by includes:

the scanning detection liquid tank (18) is supported on the scanning detection platform (1) and is used for containing a coupling medium so as to form a coupling medium liquid pool for carrying out liquid immersion type ultrasonic scanning detection on the power semiconductor device (43) by utilizing the contained coupling medium;

the ultrasonic scanning microscopic detection device is arranged on the scanning detection platform (1) and is used for carrying out required ultrasonic scanning detection on the power semiconductor device (43) which is carried by the device sealing box (5) and is immersed in the coupling medium liquid pool;

a sealing box circulating operation mechanism used for the operation of ultrasonic scanning detection of at least one device sealing box (5),

driving any device sealing box (5) which is in adaptive connection with the sealing box circulating operation mechanism to circularly operate along a device loading and unloading area above the scanning detection platform (1), a device unloading and loading area in the scanning detection liquid groove (18), a sealing box liquid-removing area above the scanning detection platform (1) and a platform internal operation area in the scanning detection platform (1);

when the device sealing box (5) runs through the device loading and unloading area, the device sealing box (5) is loaded and unloaded as required;

when the device sealing box (5) runs through the scanning detection liquid tank (18), the power semiconductor device in the device sealing box (5) is subjected to liquid immersion type ultrasonic scanning by using an ultrasonic scanning microscopic detection device;

when the device sealing box (5) runs through the sealing box liquid removing area, the coupling medium carried on the surface of the device sealing box (5) is removed.

2. The cyclically-operative ultrasound scanning inspection system of claim 1, wherein: the sealing box circulating operation mechanism comprises a sealing box circulating conveying track (2) matched with the scanning detection platform (1) and a sealing box transmission mechanism used for driving the device sealing box (5) to operate along the sealing box circulating conveying track (2),

the sealing box circulating conveying track (2) comprises conveying track bodies (26) which are symmetrically distributed, the conveying track bodies (26) are annular, and the length direction of the conveying track bodies (26) is consistent with that of the scanning detection liquid groove (18);

and the conveying track body (26) corresponds to the scanning detection liquid tank (18) and is positioned above the scanning detection platform (1), and the conveying track body (26) is fixed on the corresponding inner side wall of the scanning detection liquid tank (18).

3. The cyclically-operative ultrasonic scan testing system of claim 2, wherein: the sealing box transmission mechanism comprises a transmission connecting body which is detachably connected with the device sealing box (5) and a transmission driving unit which is used for driving the transmission connecting body to rotate in the conveying track body (26),

the transmission connecting bodies correspond to the conveying track bodies (26) one by one;

when the transmission connecting body is in adaptive connection with the corresponding outer edge of the device sealing box (5), the transmission connecting body is utilized to drive the device sealing box (5) to circularly operate along the sealing box circular conveying track (2);

when the transmission connecting body is separated from the device sealing box (5), the device sealing box (5) is loaded and unloaded, or the power semiconductor device (43) in the device sealing box (5) is subjected to required ultrasonic scanning detection.

4. The cyclically-operative ultrasonic scan testing system of claim 3, wherein: the drive connection comprises a drive chain (22);

when the transmission connecting body adopts the transmission chain (22), the transmission driving unit comprises transmission chain wheels which are respectively arranged at two ends of the conveying track body (26), and the transmission chain wheels at two ends of the same conveying track body (26) are in adaptive connection through the transmission chain (22) which is just corresponding;

the transmission chain wheels at the same ends of the two conveying track bodies (26) are in adaptive connection through transmission chain wheel shafts.

5. The cyclically-operative ultrasonic scan testing system of claim 4, wherein: a hasp (34) is arranged on the transmission chain (22), and a hasp opening groove (35) is arranged on the hasp (34);

a plurality of sealing box hanging pins (33) are arranged on the device sealing box (5), the sealing box hanging pins (33) can be embedded in a hasp opening groove (35), wherein,

the sealing box hanging pins (33) correspond to hasp opening grooves (35) on the hasps (34) one by one, and when the sealing box hanging pins (33) are embedded in the hasp opening grooves (35), the device sealing box (5) is in adaptive connection with the transmission connecting body;

when the device sealing box (5) is lifted and the sealing box hanging pin (33) is separated from the hasp opening groove (35), the device sealing box (5) is separated from the transmission connecting body.

6. The cyclically-operative ultrasound scanning inspection system of claim 5, wherein: also comprises a plurality of follow-up guide cams (28) which are matched and connected with the device sealing box (5),

the follow-up guide cam (28) can be embedded in a guide groove (27) of the corresponding conveying track body (26), and when the device sealing box (5) is driven by the transmission connecting body to operate, the follow-up guide cam (28) is in rolling contact with the guide groove (27) of the corresponding track body.

7. The cyclically-operative ultrasound scanning inspection system of claim 6, wherein: a track body limiting mechanism used for limiting the device sealing box (5) is arranged on the conveying track body (26),

the track body limiting mechanism comprises a track ascending limiting body (24) which is arranged on a conveying track body (26) and corresponds to a track limiting groove (25);

when the device sealing box (5) is jacked up, the follow-up guide cam (28) can enter the track limiting groove (25), the track limiting groove (25) is matched with the follow-up guide cam (28) to limit the operation of the device sealing box (5), and the track lifting limiting body (24) is used for limiting the jacking of the device sealing box (5).

8. The cyclically-operative ultrasound scanning inspection system of any one of claims 1 to 7, wherein: also comprises an infiltration impact spraying mechanism (6) used for injecting coupling medium into the scanning detection liquid groove (18), wherein,

the infiltrating impact spraying mechanism (6) is positioned in a combination area of the device feeding area and the scanning detection liquid tank (18), and the infiltrating impact spraying mechanism (6) can also be used for infiltrating spraying and impact spraying of the coupling medium on the device sealing box (5) entering the coupling medium liquid tank so as to remove bubbles on the surface of the device sealing box (5) when entering the coupling medium liquid tank.

9. The cyclically-operative ultrasound scanning inspection system of claim 8, wherein: the infiltrating impact spraying mechanism (6) comprises:

the wetting unit (55) is used for spraying a coupling medium on the surface of the power semiconductor device before the power semiconductor device enters the coupling medium liquid pool so as to wet the upper surface of the device sealing box (5) by using the sprayed coupling medium;

a bubble impact unit (54) for spraying the coupling medium on the surface of the device sealing box (5) after entering the coupling medium liquid pool to impact the bubbles attached to the surface of the power semiconductor device,

the flow velocity of the coupling medium sprayed by the bubble impact unit (54) is larger than that of the coupling medium sprayed by the soaking unit (55).

10. The cyclically-operative ultrasound scanning inspection system of claim 9, wherein: the infiltration unit (55) comprises an infiltration shunt pipe (60) and a plurality of infiltration spray heads (62) arranged on the infiltration shunt pipe (60), wherein,

the plurality of infiltration spray heads (62) are uniformly distributed on the infiltration shunt pipe (60) along the length direction of the infiltration shunt pipe (60), and the infiltration spray heads (62) are communicated with the infiltration shunt pipe (60);

the nozzle of the wetting spray head (62) is flat, wherein the length direction of the nozzle of the wetting spray head (62) is vertical to the running direction of the device sealing box (5).

11. The cyclically-operative ultrasonic scan testing system of claim 9, wherein: also comprises a liquid storage and collection box (14) for providing a coupling medium required by ultrasonic scanning detection, wherein,

the liquid storage and collection box (14) is positioned in the scanning detection platform (1), and a coupling medium in the liquid storage and collection box (14) is extracted and enters the scanning detection liquid tank (18) through the infiltration impact spraying mechanism (6);

coupling medium in the scanning detection liquid tank (18) flows back into the liquid storage and collection tank (14) through the liquid tank liquid discharge proportion adjusting valve (12), the opening degree of the liquid tank liquid discharge proportion adjusting valve (12) is adjusted based on the liquid level of the coupling medium in the scanning detection liquid tank (18), and the liquid tank liquid discharge proportion adjusting valve (12) is used for adjusting the state that the coupling medium in the scanning detection liquid tank (18) flows back into the liquid storage and collection tank (9).

12. The cyclically-operative ultrasound scanning inspection system of any one of claims 1 to 7, wherein: -sealing the cartridge (5) to any device, comprising:

the sealed box body (30) is used for accommodating the power semiconductor device (43), and comprises a box main body (36) supported on the sealed box chain plate (29) and a box cover (37) hinged on the box main body (36), wherein the box main body (36) can move on the sealed box chain plate (29);

the box body opening and locking mechanism is used for controlling the opening and locking of the device sealing box (5), is at least distributed on one side of the device sealing box (5), and is in adaptive connection with a box body (36) and a box cover (37) of the device sealing box (5), wherein,

when the box body opening and locking mechanism drives the box main body (36) to move towards the first direction on the sealing box chain plate (29), the sealing and locking state between the box cover (37) and the box main body (36) is released, so that the device sealing box (5) is in an openable state;

when the device sealing box (5) is closed, the box body opening and locking mechanism drives the box main body (36) to move towards the second direction on the sealing box chain plate (29) so as to lock the box cover (37) on the box main body (36) in a sealing way;

the second direction of movement of the box main body (36) on the seal box link plate (29) is opposite to the first direction of movement of the box main body (36) on the seal box link plate (29).

13. The cyclically-operative ultrasound scanning inspection system of claim 12, wherein: the box body opening and locking mechanism comprises a sliding chute fixing plate (41) fixed on a chain plate (29) of the sealing box, a slider body fixedly connected with the box main body (36), a box body power mechanism used for driving the slider body to move in the sliding chute fixing plate (41), and a box cover connecting mechanism used for controlling the position state of the box cover (37),

the sliding chute fixing plate (41) is positioned at the outer side of one end of the box main body (36), and the box cover (37) is in adaptive connection with the sliding chute fixing plate (41) through a box cover connecting mechanism;

when the box body power mechanism drives the box main body (36) to move towards the first direction through the sliding block body, the contact matching state of the box cover (37) and the sliding groove fixing plate (41) through the box cover connecting mechanism is gradually released;

when the device sealing box (5) is closed, the box cover (37) is in adaptive connection with the sliding groove fixing plate (41) through the box cover connecting mechanism, and when the box body power mechanism drives the box main body (36) to move towards the second direction through the sliding block body, the box cover (37) is in contact fit with the sliding groove fixing plate (41) through the box cover connecting mechanism, so that the box cover (37) is locked on the box main body (36).

14. The cyclically-operative ultrasound scanning inspection system of claim 13, wherein: the box cover connecting mechanism comprises a box cover connecting rod (50) distributed on the box cover (37) and a box cover connecting rod groove (42) arranged on the sliding groove fixing plate (41), wherein,

the box cover connecting rod groove (42) comprises a connecting rod inlet and outlet channel (53) and a connecting rod locking channel (53) communicated with the connecting rod inlet and outlet channel (59), and the connecting rod inlet and outlet channel (59) and the connecting rod locking channel (53) are matched with the box cover connecting rod (50);

when the box main body (36) moves to the first direction on the sealed box chain plate (29), the box cover connecting rod (50) enters the connecting rod in-out channel (59) from the connecting rod locking channel (53) so as to release the locking state between the box cover (37) and the box main body (36);

when the box main body (36) moves in the second direction on the sealed box link plate (29), the box cover link (50) enters the link locking channel (53) from the link access channel (59) to lock the box cover (37) to the box main body (36).

15. The cyclically-operative ultrasonic scan-detecting system according to any one of claims 1 to 7, wherein: the sealing box liquid removing area and the device loading and unloading area respectively correspond to two ends of a scanning detection liquid groove (18);

a plurality of air knife sets used for blowing air and removing liquid from the device sealing box (5) are arranged in the liquid removing area of the sealing box, wherein,

the air knife set comprises at least one air knife (10) for blowing air to the upper surface of the device sealing box (5) and at least one air knife (10) capable of blowing air to the lower surface of the device sealing box (5) simultaneously, so that the coupling medium carried by the surface of the device sealing box (5) is blown away by the air blown by the air knife (10).

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