CN115753604A

CN115753604A - Micro-heating table

Info

Publication number: CN115753604A
Application number: CN202211287354.XA
Authority: CN
Inventors: 符泰然; 杨志康; 黄杨; 吴宇颂; 黄冠尧; 张达
Original assignee: Tsinghua University
Current assignee: Tsinghua University
Priority date: 2022-10-20
Filing date: 2022-10-20
Publication date: 2023-03-07

Abstract

The invention provides a microscopic heating table, comprising: a base station defining a heating cavity therein; a heating assembly, comprising: the heating seat is arranged in the middle of the heating cavity and is suspended above the bottom of the base station, a sample groove for placing a sample is arranged in the middle of the top surface of the heating seat, and a plurality of through holes which are communicated along the axial direction of the heating seat are uniformly arranged in an annular area of the heating seat between the inner edge and the outer edge of the sample groove at intervals along the circumferential direction; the heating wires sequentially penetrate through the through holes in an S shape, so that the depth direction of the sample groove is coated by the heat source; and an upper cover assembly including: the upper cover body, detachably install on the base station, are applicable to and heat the chamber sealedly, the upper cover body with the vertical ascending orthographic projection position in side of sample groove be provided with be used for allowing the exciting light and collect the light through logical unthreaded hole that the light passes through, lead to and install the light trap in the unthreaded hole.

Description

Micro-heating table

Technical Field

The invention relates to the technical field of electrochemical and optical analysis equipment, in particular to a microscopic hot table for high-temperature Raman or fluorescence spectrum measurement.

Background

The high-temperature microscopic heating table is widely applied to the fields of ceramics, metallurgy, geology, high-temperature materials and the like. When the high-temperature spectrum of the material is researched, high temperature is accompanied by stronger heat radiation background signals, and particularly, the heat radiation intensity is sharply increased along with the temperature rise after the temperature is higher than 1000 ℃. Therefore, in the high-temperature raman/fluorescence spectrum measurement, a microscope is required to focus and reduce laser spots, improve laser energy density, and generate stronger raman/fluorescence signals to overcome a thermal radiation background signal, so that the ratio of a spectrum signal to the radiation background signal is improved.

At present, the temperature of a high-temperature microscopic heating table is mostly below 800 ℃, and the temperature of the microscopic heating table reaching above 1200 ℃ is less. Further, a high temperature of 1500 ℃ that can achieve high power density in the microscopic region, and achieving a uniformly heated heat block is a difficult point of design.

Disclosure of Invention

In order to solve at least one technical problem in the prior art and other aspects, the invention provides a micro heating platform, wherein a heating seat is suspended above a base platform, so that the heat loss of the heating seat is reduced, and the safety of the micro heating platform is improved; the heater strip passes every through-hole that the heating seat set up in order, is favorable to concentrating the heat of heat source, still is favorable to promoting the heating temperature of micro-hot platform and makes the heating process comparatively even.

Embodiments of the present disclosure provide a microscopic thermal stage, comprising: a base station defining a heating cavity therein; a heating assembly, comprising: the heating seat is arranged in the heating cavity and is suspended above the bottom of the base station, a sample groove for placing a sample is formed in the top of the heating seat, and a plurality of through holes which are communicated along the axial direction of the heating seat are formed in the heating seat at intervals in the circumferential direction and surround the annular area of the sample groove; the heating wire sequentially penetrates through each through hole, so that the depth direction of the sample groove is coated by the heat source; and an upper cover assembly including: the upper cover body, detachably install in on the base station, be applicable to with it is sealed that the heating chamber, the upper cover body with the orthographic projection position in the vertical direction of sample groove is provided with and is used for allowing the exciting light and collects the logical unthreaded hole that the light passes through, it installs the light trap in the unthreaded hole to lead to.

According to the embodiment of the disclosure, a heat insulation groove is formed in the bottom of the base platform, and a gap is formed between the lower end of the heating seat and the bottom of the heat insulation groove.

According to the embodiment of the disclosure, the outer wall of the heating seat is provided with a limiting groove along the circumferential direction.

According to the embodiment of the present disclosure, the heat insulation groove comprises a plurality of fixing pieces, wherein the fixing pieces are arranged along the circumferential direction of the heat insulation groove at even intervals, one end of each fixing piece is embedded into the limiting groove of the heating seat, and the other end of each fixing piece is installed at the bottom of the base platform so as to limit the axial position of the heating seat relative to the heat insulation groove.

According to an embodiment of the present disclosure, the upper cover assembly further includes: the plate-shaped part is arranged at the lower end of the upper cover body, a through hole is formed in the position, corresponding to the light-transmitting window, of the plate-shaped part, and a gas flow channel is defined between the plate-shaped part and the upper cover body; and the gas outlet end of the scavenging mechanism is communicated with the gas flow channel and is suitable for forming a gas curtain layer below the light-transmitting window along the gas flow channel so as to draw at least one part of substances generated in the heating process out of the space between the light-transmitting window and the sample groove.

According to the embodiment of the present disclosure, the scavenging mechanism includes a scavenging air nozzle, and the scavenging air nozzle is installed on the upper cover body.

According to this disclosed embodiment, still include the cover plate, detachably install in the notch of sample cell, the middle part of cover plate with the corresponding position of light-permeable window is provided with the through-hole, is applicable to and blocks at least partly air curtain layer to the disturbance of the notch of sample cell to prevent partly heat loss in the sample cell.

According to the embodiment of the disclosure, a first cooling flow channel is arranged in the upper cover body; the upper cover assembly further comprises a first cooling water nozzle which is installed on the upper cover body and communicated with the first cooling flow channel, and the first cooling water nozzle is suitable for injecting or discharging a cooling medium into or from the first cooling flow channel so as to exchange heat with the upper cover body.

According to an embodiment of the present disclosure, the first cooling flow passage is configured as an annular structure surrounding the light passing hole.

According to the embodiment of the disclosure, the light through hole comprises a groove-shaped section and a cylindrical section which are sequentially arranged from top to bottom, the diameter of the upper end of the cylindrical section is smaller than or equal to that of the groove bottom of the groove-shaped section, the light transmission window is embedded in the groove bottom of the groove-shaped section, and the diameter of the notch of the groove-shaped section is larger than that of the groove bottom, so that the groove-shaped section forms an inverted circular truncated cone-shaped space for accommodating an objective lens of a microscope.

According to the embodiment of the disclosure, the temperature measuring device further comprises a first temperature measuring piece arranged at the bottom of the sample groove and suitable for detecting the temperature of the sample.

According to the embodiment of the disclosure, the middle part of the sample groove is provided with a through hole which is through along the axial direction of the heating seat, the temperature measuring end of the first temperature measuring part is arranged at the end part of the through hole which is positioned in the sample groove, and the sample covers the temperature measuring end of the first temperature measuring component in the state of placing the sample.

According to the embodiment of the disclosure, a second cooling flow passage is arranged in the base platform; the micro-heating platform also comprises a second cooling water nozzle communicated with the second cooling flow channel and suitable for injecting or discharging a cooling medium into or from the second cooling flow channel so as to adjust the temperature of the base platform.

According to the embodiment of this disclosure, still including install in on the base station and with the vacuum air cock of heating chamber intercommunication is applicable to the extraction the gas in the heating chamber makes form vacuum environment in the heating chamber.

According to the embodiment of the disclosure, the heating device further comprises at least one heat insulation plate, wherein the heat insulation plate is sleeved outside the heating seat and is configured to cover at least one part of the axial direction of the heating seat so as to prevent a part of heat of the heating seat from losing.

According to the embodiment of the disclosure, the heat insulation plate is configured into a tubular structure, the axis of the heat insulation plate coincides with the extending direction of the axis of the heating base, and the inner diameter of the heat insulation plate is larger than the outer diameter of the heating base, so that a gap is formed between the inner wall of the heat insulation plate and the outer wall of the heating base.

According to the micro-heating platform provided by the invention, the heating seat is suspended above the base platform, so that heat radiation is formed between the heating seat and the base platform, the heat loss of the heating seat is reduced, and the safety of the micro-heating platform is improved; the heater strip is every through-hole that the S-shaped passed the heating seat in order and sets up for the cladding that the depth direction of sample groove was encircleed by the heat source exposes to and forms heat radiation between the heater strip of the top surface of heating seat and the sample, and the heater strip that is located the heating seat forms heat conduction through the heating seat, makes like this to comparatively concentrate and even the heating of sample, is favorable to promoting the heating temperature of micro-heating platform and makes the heating process comparatively even.

Drawings

FIG. 1 is a top view of a micro thermal stage according to an exemplary embodiment of the present invention;

FIG. 2 isbase:Sub>A partial cross-sectional view taken along A-A of the micro thermal stage of the illustrative embodiment shown in FIG. 1;

FIG. 3 is an enlarged partial view of a portion C of the micro thermal stage of the illustrative embodiment shown in FIG. 2;

FIG. 4 is a top view of the fixture and heating block portion of the exemplary embodiment of the micro thermal stage shown in FIG. 2; and

FIG. 5 is a partial sectional view in the direction B-B of the micro thermal stage of the illustrative embodiment shown in FIG. 1.

In the drawings, the reference numerals are as follows:

1. an upper cover body;

2. a light-transmitting window;

3. a vacuum nozzle;

4. a second cooling water nozzle;

5. a thermocouple rod;

6. sealing the aviation plug;

7. a first cooling water nozzle;

8. a scavenging air nozzle;

9. a base station;

10. a plate-shaped member;

11. a heat insulation plate;

12. a heating base;

13. a dual-core ceramic tube;

14. a sample;

15. a cover sheet;

16. a heating wire;

17. a second cooling flow channel;

18. a first cooling flow passage;

19. a heating cavity;

20. a fixing member; and

21. and (4) a sample groove.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail with reference to the accompanying drawings in combination with the embodiments.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The terms "comprises," "comprising," and the like, as used herein, specify the presence of stated features, steps, operations, and/or components, but do not preclude the presence or addition of one or more other features, steps, operations, or components.

All terms, including technical and scientific terms, used herein have the same meaning as commonly understood by one of ordinary skill in the art unless otherwise defined. It is noted that the terms used herein should be interpreted as having a meaning that is consistent with the context of this specification and should not be interpreted in an idealized or overly formal sense.

Where a convention analogous to "A, B and at least one of C, etc." is used, in general such a construction should be interpreted in the sense one having ordinary skill in the art would understand the convention, e.g., "a system having at least one of A, B and C" would include, but not be limited to, systems having a alone, B alone, C alone, a and B together, a and C together, B and C together, and/or A, B, C together, etc. Where a convention analogous to "A, B or at least one of C, etc." is used, in general such a construction should be interpreted in the sense one having skill in the art would understand the convention, e.g., "a system having at least one of A, B or C" would include, but not be limited to, systems having a alone, B alone, C alone, a and B together, a and C together, B and C together, and/or A, B, C together, etc.

FIG. 1 is a top view of a micro thermal stage according to one illustrative embodiment of the invention. FIG. 2 isbase:Sub>A partial sectional view taken in the direction A-A of the micro thermal stage of the illustrative embodiment shown in FIG. 1. Fig. 3 is a partial enlarged view of a portion C of the micro thermal stage of the exemplary embodiment shown in fig. 2.

The invention provides a microscope thermal stage, as shown in fig. 1 to 3, comprising a base 9, a heating assembly and an upper cover assembly. A heating cavity 19 is defined in the base table 9. The heating seat 12 is arranged in the heating cavity 19 and suspended above the bottom of the base station 9, a sample groove 21 for placing a sample 14 is arranged at the top of the heating seat 12, and a plurality of through holes which are communicated along the axial direction of the heating seat 12 are arranged at intervals along the circumferential direction in an annular area of the sample groove 21 surrounded by the heating seat 12. The heating wire 16 passes through each of the through holes in sequence so that the depth direction of the sample well 21 is covered by the heat source. The upper cover subassembly includes upper cover body 1, and upper cover body 1 detachably installs on base station 9, is applicable to and seals heating chamber 19, and upper cover body 1 and the orthographic projection position of sample groove 21 in the vertical direction are provided with the light hole that lets the exciting light and collect the light and pass through, install light-permeable window 2 in the light hole.

In an exemplary embodiment, the heating base 12 is disposed in the middle of the heating cavity 19.

In detail, the heating seat includes, but is not limited to, being constructed in a cylindrical structure.

Further, the heating base includes, but is not limited to, ceramic material (including, but not limited to, alumina ceramic).

In an exemplary embodiment, the number of the through holes formed in the annular region is greater than or equal to 20, and the distance between the centers of two adjacent through holes is less than or equal to 1.5 mm.

In detail, the number of the through holes is configured to be even.

Further, as shown in fig. 1, the heating wire passes through each of the through holes in an S-shape in sequence.

Such an embodiment facilitates the threading of both ends of the heating wire 16 out of the same axial end of the heating socket 12 for the purpose of wiring.

In an exemplary embodiment, the length and the wide portion of the upper cover body 1 are adapted to the dimensions of the abutment 9.

In detail, the heating cavity 19 of the base 9 is preferably sealed.

Further, as shown in fig. 1, a sealing member (including, but not limited to, a packing) is attached to an opening position of the heating chamber 19 formed in the base 9 so that the heating chamber 19 can be sealed in a state where the upper lid body 1 is fitted to the opening position.

In an exemplary embodiment, a sealing aircraft plug 6 is surface mounted to one side of the abutment 9.

In detail, one end of the hermetic aviation plug 6 protrudes into the heating chamber 19 for electrical connection with the heating wire 16 to supply power to the heating wire 16.

In an exemplary embodiment, the length (not shown) and the width (not shown) of the base 9 are each configured to be 10 mm. The thickness of the base 9 is configured to be 20 mm (a distance between both ends facing the paper surface direction as shown in fig. 1).

Further, the length (the distance between both ends in the lateral direction as shown in fig. 1) and the width (the distance between both ends in the longitudinal direction as shown in fig. 1) of the upper cap body 1 are each configured to be 10 mm. The thickness of the upper cap body 1 is configured to be 4 mm.

In one exemplary embodiment, the heating wire 16 includes, but is not limited to, a platinum material.

In detail, the diameter of the heating wire 16 includes, but is not limited to, being configured to be 0.3 mm, and the resistance is greater than or equal to 6 ohms.

In an exemplary embodiment, the sample cell 21 includes, but is not limited to, a cell structure configured in a cylindrical shape.

In detail, the ratio of the depth of the sample groove 21 to the inner diameter of the sample groove 21 is greater than 1:2.

In an exemplary embodiment, the heating base is configured to have an outer diameter of 12 mm and a height of 10 mm.

Further, the number of through holes is configured to include, but not limited to, 24, and the diameter of the through hole is configured to be 0.5 mm.

Further, the diameter of the sample groove 21 is configured to be 7 mm, and the depth of the sample groove 21 is configured to be 7 mm.

Still further, the heater wire 16 is configured to be 0.2 millimeters with resistance values including, but not limited to, 7 ohms.

In an exemplary embodiment, the light transmissive window 2 includes, but is not limited to, a quartz glass material.

In detail, the light-transmitting window 2 includes but is not limited to being fixed in the light-transmitting hole by using bonding, embedding, interference fit and other connection methods.

In such an embodiment, the heating base 12 is suspended above the base platform 9, so that heat radiation is formed between the heating base 12 and the base platform 9, which is beneficial to reducing heat loss of the heating base 12, and because the heat of the heating base 12 is not directly conducted to the base platform 9, local high temperature at the bottom of the base platform 9 can be prevented, which is beneficial to improving the safety of the micro-heating platform. The heating wire 16 sequentially penetrates through each through hole arranged on the heating base 12 in an S shape, so that the depth direction (the upper direction and the lower direction shown in figure 2) of the sample groove 21 is coated by the heat source in a surrounding way, heat radiation is formed between the heating wire 16 exposed on the top surface of the heating base 12 and the sample 14, and the heating wire 16 positioned in the heating base 12 forms heat conduction through the heating base 12, so that the sample 14 is heated more intensively and uniformly, the heating temperature of the micro-heating platform is favorably improved, the heating process is more uniform, and the requirements of high-temperature micro-Raman and spectral measurement are met.

Fig. 4 is a top view of the fixture 20 and heating block 12 portions of the exemplary embodiment of the micro thermal platform shown in fig. 2.

According to the embodiment of the present disclosure, as shown in fig. 4, the bottom of the base 9 is provided with a heat insulation groove, and a gap is formed between the lower end of the heating base 12 and the bottom of the heat insulation groove.

According to the embodiment of the present disclosure, as shown in fig. 4, the outer wall of the heating base 12 is provided with a limit groove along the circumferential direction.

According to the embodiment of the present disclosure, as shown in fig. 4, the heat insulation groove further includes a plurality of fixing pieces 20, the plurality of fixing pieces 20 are uniformly arranged along the circumferential direction of the heat insulation groove at intervals, one end of each fixing piece 20 is embedded into the limiting groove of the heating base 12, and the other end of each fixing piece 20 is mounted at the bottom of the base platform 9 to limit the axial position of the heating base 12 relative to the heat insulation groove.

In an exemplary embodiment, the outer wall of the heating base 12 is provided with an annular limiting groove along the circumferential direction.

In detail, the width of the spacing groove includes but is not limited to being configured to be 1 mm, and the depth includes but is not limited to being configured to be 0.5 mm.

Further, the end portions of the retainer 20 facing the stopper groove (the right end of the left retainer 20 and the left end of the right retainer 20 as shown in fig. 4) are formed in arc-shaped portions having substantially the same arc as the stopper groove.

Further, the end portions of the fixing pieces 20 facing away from the arc-shaped portions (the left end of the left fixing piece 20 and the right end of the right fixing piece 20 as shown in fig. 4) form ear portions for fixing to the bottom of the base 9 (the connection of the ear portions to the base 9 includes, but is not limited to, riveting, welding, screwing and other connection methods).

In one illustrative embodiment, the fastener 20 is configured to include, but is not limited to, a sheet-form construction.

In detail, the fixing member 20 includes, but is not limited to, a material (e.g., a metal material) having a different thermal expansion coefficient from that of the heating base 12.

In such an embodiment, one end of the fixing member 20 is inserted into a limiting groove formed on the outer wall of the heating base 12, and holds the heating base 12 in the radial direction, so that the position of the heating base 12 in the axial direction with respect to the bottom of the base 9 is limited, and the heating base is suspended above the bottom of the base 9. Moreover, due to the difference between the thermal expansion coefficients of the fixing member 20 and the heating base 12, when the temperature rises, the fixing frame can further hold the heating base 12 tightly so as to limit the radial position of the heating base 12, which is beneficial to more accurately positioning the view field.

In an exemplary embodiment, a heat insulating gasket is disposed within the heat insulating slot.

In detail, the heat insulation pad is laid on the bottom of the heat insulation groove, and forms a gap with the bottom of the heating base 12.

Further, the heat insulating spacer includes, but is not limited to, a ceramic material. Thus, the heat insulation effect of the heat insulation groove is improved.

According to the embodiment of the present disclosure, as shown in fig. 2, 3 and 5, the upper cover assembly further includes a plate member 10 and a scavenging mechanism. The plate-shaped member 10 is mounted at the lower end of the upper cover body 1, a through hole is provided at a position of the plate-shaped member 10 corresponding to the light transmission window 2, and a gas flow passage is defined between the plate-shaped member 10 and the upper cover body 1. The air outlet end of the scavenging mechanism is communicated with the gas flow channel and is suitable for forming a gas curtain layer below the light-transmitting window 2 along the gas flow channel so as to extract at least one part of substances generated in the heating process from the space between the light-transmitting window 2 and the sample groove 21.

According to the embodiment of the present disclosure, as shown in fig. 2, 3, and 5, the scavenging mechanism includes the scavenging air nozzle 8, and the scavenging air nozzle 8 is mounted on the upper cover body 1.

In an exemplary embodiment, the bottom surface of the upper cap body 1 (as shown in fig. 2 and 5) is provided with a flange.

In detail, the plate 10 is fitted between the flange and the bottom surface of the upper lid body 1.

Further, the flange includes, but is not limited to, being integrally formed with the upper lid body 1.

Further, the plate 10 includes, but is not limited to, an alloy material.

In such an embodiment, the plate 10 is fixed between the bottom surface of the upper lid body 1 and the sample well 21, a gas flow path is formed between the plate 10 and the bottom surface of the upper lid body 1, the scavenging air nozzle 8 communicates with an external pump mechanism and is adapted to draw gas to form, and the gas flow path is adapted to guide the gas flow to form a gas curtain layer flowing in substantially the same direction in the radial direction of the heating chamber 19. Thus, on the basis of extracting substances and/or gases generated in heating, the gas curtain layer can cause less disturbance to heat above the heating tank, which is beneficial to uniformity of heating the sample 14.

According to the embodiment of the present disclosure, as shown in fig. 2, fig. 3 and fig. 5, the micro thermal platform further includes a cover plate 15 detachably mounted on the notch of the sample groove 21, and a through hole is provided in the middle of the cover plate 15 corresponding to the light-transmitting window 2, and is adapted to block disturbance of at least a portion of the gas curtain layer on the notch of the sample groove 21, so as to prevent a portion of heat in the sample groove 21 from being lost.

In an exemplary embodiment, the cover plate 15 includes, but is not limited to, a ceramic material.

Specifically, the outer edge of the lid plate 15 is formed downward into an annular flange having an inner diameter substantially equal to the outer diameter of the heating base 12 so as to be fitted into the notch of the sample well 21.

In an exemplary embodiment, the through-hole formed in the middle of the cover plate 15 includes, but is not limited to, a through-hole configured in a tapered shape.

In detail, the angle of the oblique cone is configured to substantially correspond to the field angle of the objective lens of the microscope.

In one illustrative embodiment, the diameter of the cover 15 includes, but is not limited to, being configured to be 14 millimeters and the thickness configured to be 0.6 millimeters.

Further, the angle of the tapered through hole includes, but is not limited to, being configured to be 23.6 °.

Further, the diameter of the bottom of the inclined tapered through hole is configured to be 3 mm.

In such an embodiment, the cover plate 15 has a heat preservation function, so that the heat loss from the sample groove 21 can be reduced, and the disturbance of at least a part of the air curtain layer to the notch of the sample groove 21 can be blocked, which is beneficial to improving the uniformity and stability of the temperature of the sample groove 21.

According to the embodiment of the present disclosure, as shown in fig. 5, a first cooling flow passage 18 is provided in the upper cover body 1. The upper cover assembly further comprises a first cooling water nozzle 7 which is arranged on the upper cover body 1 and communicated with the first cooling flow channel 18, and is suitable for injecting or discharging a cooling medium into or from the first cooling flow channel 18 so as to exchange heat with the upper cover body 1.

According to an embodiment of the present disclosure, as shown in fig. 2 and 5, the first cooling flow passage 18 is configured as an annular structure surrounding the light passing hole.

In an exemplary embodiment, the first cooling flow passage 18 is configured such that the center of the first cooling flow passage 18 substantially coincides with the center of the light passing hole.

Further, two first cooling water nozzles 7 are included for water intake and water discharge, respectively, so as to circulate the cooling medium in the first cooling flow passage 18.

Further, the diameter of the first cooling flow passage 18 is preferably adapted to meet the shape and size of the cover body 1 (for example, the diameter of the first cooling flow passage 18 located beside the mounting scavenging air nozzle 8 can be adaptively reduced to avoid the mounting of other mechanisms and components).

According to the embodiment of the disclosure, as shown in fig. 1, fig. 2 and fig. 5, the light-passing hole comprises a groove-shaped section and a cylindrical section which are sequentially arranged from top to bottom, the diameter of the upper end of the cylindrical section is smaller than or equal to the diameter of the bottom of the groove-shaped section, the light-transmitting window 2 is embedded in the bottom of the groove-shaped section, and the diameter of the notch of the groove-shaped section is larger than the diameter of the bottom of the groove, so that the groove-shaped section forms an inverted frustum-shaped space for accommodating the object lens of the microscope to extend into.

In an exemplary embodiment, a slope is formed between the groove bottom and the notch of the groove-shaped section of the light through hole.

In detail, the slope includes, but is not limited to, being configured to be 25 ° (matching the field angle) to meet the objective lens penetration of the microscope.

In such an embodiment, the truncated-cone shaped space can accommodate the extension of the microscope's objective lens, facilitating the guiding of the excitation light and the collection light through the light transmissive window 2.

According to the embodiment of the present disclosure, as shown in fig. 2 and 3, the micro thermal stage further includes a temperature measuring member disposed at the bottom of the sample tank 21 and adapted to detect the temperature of the sample 14.

According to the embodiment of the present disclosure, as shown in fig. 2 and 3, a through hole penetrating in the axial direction of the heating base 12 is provided in the middle of the sample tank 21, the temperature measuring end of the temperature measuring member is mounted on the end portion of the through hole located in the sample tank 21, and the sample 14 covers the temperature measuring end of the first temperature measuring assembly in the state where the sample 14 is placed.

In an exemplary embodiment, the micro thermal stage further comprises a dual core ceramic tube 13.

In detail, the temperature measuring part includes thermocouples, which penetrate one core of the two-core ceramic tube 13 from the bottom of the heating holder 12, respectively, and form a thermocouple node (temperature measuring end) in the sample well 21.

Further, the thermocouple junction is flush with the bottom of the sample well 21 and pressed against the lower surface of the sample 14.

In an exemplary embodiment, as shown in fig. 1, two thermocouple rods 5 are mounted on the side wall of the base 9, and the ends of the thermocouple rods 5 located in the base 9 are respectively disposed in one core of the two-core ceramic tube 13.

In such an embodiment, the thermocouple is adapted to collect the temperature of the sample 14 and feed the temperature back to the exterior of the microscopy thermal stage.

According to the embodiment of the present disclosure, as shown in fig. 2 and 5, the second cooling flow passage 17 is provided in the base 9. The micro-heating platform also comprises a second cooling water nozzle 4 communicated with the second cooling flow passage 17 and suitable for injecting or discharging a cooling medium into or from the second cooling flow passage 17 so as to adjust the temperature of the base platform 9.

In an exemplary embodiment, the second cooling flow path 17 is arranged around the heating cavity 19.

Further, two second cooling water nozzles 4 are included for water intake and water discharge, respectively, so that the cooling medium circulates in the second cooling flow passage 17.

In an exemplary embodiment, the cooling medium includes, but is not limited to, pure water.

In such an embodiment, the second cooling flow passage 17 and the second cooling water nozzle 4 are suitable for exchanging heat with the base platform 9 other than the heating cavity 19, so as to improve the safety of the heating process.

According to the embodiment of the present disclosure, as shown in fig. 2 and 5, the micro heating stage further includes a vacuum nozzle 3 mounted on the base platform 9 and communicating with the heating cavity 19, and adapted to extract the gas in the heating cavity 19, so that a vacuum environment is formed in the heating cavity 19.

In such an embodiment, the heating cavity 19 of the micro heating stage can form an oxidation environment and a vacuum environment, respectively, so as to improve the adaptability of the micro heating stage.

According to the embodiment of the present disclosure, as shown in fig. 2, 3 and 5, the micro-heating stage further includes at least one heat insulation plate 11 sleeved outside the heating base 12 and configured to cover at least a portion of the heating base 12 in the axial direction so as to prevent a portion of heat of the heating base 12 from being lost.

According to the embodiment of the present disclosure, as shown in fig. 2, 3 and 5, the heat insulation plate 11 is configured in a tubular structure, an axis of the heat insulation plate 11 coincides with an extension direction of an axis of the heating base 12, and an inner diameter of the heat insulation plate 11 is larger than an outer diameter of the heating base 12 such that a gap is formed between an inner wall of the heat insulation plate 11 and an outer wall of the heating base 12.

In an exemplary embodiment, as shown in FIG. 3, two heat shield panels 11 are included.

In detail, the two heat insulation plates 11 are concentrically sleeved outside the heating base 12.

Furthermore, an annular limiting block is arranged between two adjacent heat insulation plates 11 to limit the relative position between the adjacent heat insulation plates 11 and the heating base 12.

In such an embodiment, heat radiation is formed between the heating seat and the heat insulation plate 11, and between adjacent heat insulation plates 11, which is beneficial to reducing the loss of heat of the heating seat along the circumferential direction.

In an exemplary embodiment, the micro thermal stage further includes a bottom surface assembly (not shown) disposed on the base 9.

In detail, the fitting includes, but is not limited to, being fixed on the bottom surface of the micro-heating stage by riveting, welding, and screw fitting.

Furthermore, the assembly part is provided with a joint (such as a threaded joint or a clamping joint) which is suitable for being connected with an external three-shaft (pitch shaft, roll shaft and translation shaft) adjustable displacement platform.

Further, the adjustable range of horizontal (x-axis and y-axis) displacement of the outer adjustable displacement platform includes, but is not limited to ± 8 mm, and the adjustable range of vertical (z-axis) displacement includes, but is not limited to ± 5 mm. After the micro heating platform is assembled with the three-axis adjustable displacement platform, the displacement precision of the micro heating platform comprises but is not limited to 5 microns.

It should be noted here that any three-axis adjustable displacement platform capable of being connected with the microscope thermal stage in the field can be selected and applied, and no specific expansion is performed.

It should also be noted that directional terms, such as "upper", "lower", "front", "rear", "left", "right", etc., used in the embodiments are only directions referring to the drawings, and are not intended to limit the scope of the present invention. Throughout the drawings, like elements are represented by like or similar reference numerals. Conventional structures or constructions will be omitted when they may obscure the understanding of the present invention.

The embodiments of the present invention have been described above. However, these examples are for illustrative purposes only and are not intended to limit the scope of the present invention. Although the embodiments are described separately above, this does not mean that the measures in the embodiments cannot be used in advantageous combination. The scope of the invention is defined by the appended claims and equivalents thereof. Various alternatives and modifications can be devised by those skilled in the art without departing from the scope of the invention, and these alternatives and modifications are intended to fall within the scope of the invention.

Claims

1. A microscopy thermal table, comprising:

a base station (9), said base station (9) defining a heating cavity (19) therein;

a heating assembly, comprising:

the heating seat (12) is arranged in the heating cavity (19) and is suspended above the bottom of the base platform (9), a sample groove (21) for placing a sample (14) is formed in the top of the heating seat (12), and a plurality of through holes which are communicated along the axial direction of the heating seat (12) are formed in the annular area of the heating seat (12) surrounding the sample groove (21) at intervals in the circumferential direction; and

a heating wire (16) sequentially passing through each of the through holes such that the depth direction of the sample well (21) is covered by a heat source; and

an upper cover assembly comprising:

upper cover body (1), detachably install in on base station (9), be applicable to with heating chamber (19) are sealed, upper cover body (1) with the orthographic projection position in the vertical direction of sample groove (21) is provided with the logical unthreaded hole that is used for allowing the exciting light and collects the light and passes through, it installs light-permeable window (2) to lead to the unthreaded hole.

2. A microscope thermal stage according to claim 1, characterized in that the base platform (9) is provided at its bottom with a heat insulation slot, a gap being formed between the lower end of the heating base (12) and the bottom of the heat insulation slot.

3. The microscope thermal stage according to claim 2, characterized in that the outer wall of the heating base (12) is provided with a limiting groove along the circumferential direction.

4. The microscope thermal stage according to claim 3, further comprising a plurality of fixing members (20), wherein the plurality of fixing members (20) are uniformly arranged at intervals along the circumferential direction of the heat insulation groove, one end of each fixing member (20) is embedded in the limiting groove of the heating base (12), and the other end of each fixing member is mounted at the bottom of the base platform (9) so as to limit the axial position of the heating base (12) relative to the heat insulation groove.

5. The microscopy thermal table of any one of claims 1 to 4, wherein the upper cover assembly further comprises:

the plate-shaped part (10) is arranged at the lower end of the upper cover body (1), a through hole is formed in the position, corresponding to the light-transmitting window (2), of the plate-shaped part (10), and a gas flow channel is defined between the plate-shaped part (10) and the upper cover body (1); and

the gas outlet end of the scavenging mechanism is communicated with the gas flow channel and is suitable for forming a gas curtain layer below the light-transmitting window (2) along the gas flow channel so as to draw at least one part of substances generated in the heating process out of the space between the light-transmitting window (2) and the sample groove (21).

6. Microscope thermal stage according to claim 5, characterized in that the scavenging mechanism comprises a scavenging air tap (8), the scavenging air tap (8) being mounted on the upper cover body (1).

7. The microscope thermal stage according to claim 5, further comprising a cover plate (15) detachably mounted on the notch of the sample groove (21), wherein a through hole is provided in the middle of the cover plate (15) corresponding to the light-transmitting window (2) and adapted to block at least a portion of the gas curtain layer from disturbing the notch of the sample groove (21) so as to prevent a portion of heat in the sample groove (21) from being lost.

8. The microscopy thermal table according to any one of claims 1 to 4, characterized in that a first cooling flow channel (18) is provided in the upper cover body (1);

the upper cover assembly further comprises a first cooling water nozzle (7) which is installed on the upper cover body (1) and communicated with the first cooling flow channel (18), and the first cooling water nozzle is suitable for injecting or discharging a cooling medium into or from the first cooling flow channel (18) so as to exchange heat with the upper cover body (1).

9. The microscopy thermal stage according to claim 8, characterized in that the first cooling flow channel (18) is configured as an annular structure surrounding the light aperture.

10. The microscope thermal stage according to any one of claims 1 to 4, characterized in that the light-passing hole comprises a groove-shaped section and a cylindrical section which are arranged in sequence from top to bottom, the diameter of the upper end of the cylindrical section is smaller than or equal to the diameter of the bottom of the groove-shaped section, the light-transmitting window (2) is embedded in the bottom of the groove-shaped section, and the diameter of the notch of the groove-shaped section is larger than the diameter of the bottom of the groove, so that the groove-shaped section forms an inverted circular truncated cone-shaped space for accommodating an objective lens of a microscope to extend into.

11. The microscopy thermal table according to any one of claims 1 to 4, further comprising a thermometry element arranged at the bottom of the sample well (21) adapted to detect the temperature of the sample (14).

12. The microscope thermal stage according to claim 11, wherein a through hole is formed in the middle of the sample holder (21) and penetrates through the sample holder (12) in the axial direction, the temperature measuring end of the temperature measuring member is mounted on the end portion of the through hole located in the sample holder (21), and the sample (14) covers the temperature measuring end of the first temperature measuring component in a state where the sample (14) is placed.

13. A microscope thermal stage according to any one of claims 1 to 4 characterised in that a second cooling flow channel (17) is provided in the abutment (9);

the microscopic heating platform also comprises a second cooling water nozzle (4) communicated with the second cooling flow channel (17) and suitable for injecting or discharging a cooling medium into or from the second cooling flow channel (17) so as to adjust the temperature of the base platform (9).

14. A microscopic thermal platform according to any one of claims 1 to 4, characterized by further comprising a vacuum nozzle (3) mounted on said base station (9) and communicating with said heating cavity (19) and adapted to draw gas from within said heating cavity (19) so as to create a vacuum environment within said heating cavity (19).

15. The microscope thermal stage according to any one of claims 1 to 4, further comprising at least one heat shield (11) provided outside the heating base (12) and configured to cover at least a part of the axial direction of the heating base (12) to prevent a part of heat loss of the heating base (12).

16. Microscopic hot stage according to claim 15, characterized in that the heat insulation board (11) is configured as a tubular structure, the axis of the heat insulation board (11) coincides with the extension direction of the axis of the heating base (12), the inner diameter of the heat insulation board (11) is larger than the outer diameter of the heating base (12) such that a gap is formed between the inner wall of the heat insulation board (11) and the outer wall of the heating base (12).