CN212902624U - Semiconductor heating furnace - Google Patents

Semiconductor heating furnace Download PDF

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Publication number
CN212902624U
CN212902624U CN202021038501.6U CN202021038501U CN212902624U CN 212902624 U CN212902624 U CN 212902624U CN 202021038501 U CN202021038501 U CN 202021038501U CN 212902624 U CN212902624 U CN 212902624U
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China
Prior art keywords
groove
temperature measuring
hole
circular
inner shell
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CN202021038501.6U
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Chinese (zh)
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王晓伟
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Foshan Fangchuan Electrical Appliance Co ltd
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Foshan Fangchuan Electrical Appliance Co ltd
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Abstract

The utility model discloses a semiconductor heating furnace belongs to heating furnace technical field, which comprises a housin, be equipped with first inner shell in the casing be equipped with the second inner shell in the first inner shell, first inner shell with one end between the second inner shell is equipped with the air inlet, and the other end is equipped with the gas outlet, the casing with be equipped with semiconductor annular heating ring between the first inner shell, the casing outside is equipped with detachable installation piece, be equipped with the thermoscope on the installation piece, the thermoscope include the temperature measurement main part and with the temperature measurement body that the temperature measurement main part is connected, the installation piece be equipped with the spacing groove and the confession of temperature measurement main part gomphosis the mounting groove that the temperature measurement body penetrated, the mounting groove with the inside intercommunication of casing, the utility model has the advantages of accurate installation targets in place.

Description

Semiconductor heating furnace
Technical Field
The utility model relates to a heating furnace technical field specifically is a semiconductor heating furnace.
Background
The heating furnace is a device for heating materials or workpieces to a certain temperature, is applied to various industries such as petroleum, chemical engineering, metallurgy, machinery, heat treatment, surface treatment, building materials, electronics, materials, light industry, daily chemicals, pharmacy and the like, can be divided into a vertical heating furnace and a horizontal heating furnace, and develops a semiconductor heating furnace along with the development of semiconductors.
At present, a temperature detector is one of the most important parts in a heating furnace, the temperature detector is one of the most vulnerable parts in the heating furnace, the temperatures measured when the temperature detector extends into different positions of the heating furnace are different, the temperature measured by the temperature detector directly influences the length of the working time of a heater in the heating furnace, and when some products have higher requirements on the temperature value of the furnace temperature, the required error of the temperature values measured by a plurality of temperature detectors is smaller, so that the mounting structure of the temperature detector is still required to be improved.
Based on this, the utility model designs a semiconductor heating furnace to solve above-mentioned problem.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a semiconductor heating furnace to solve above-mentioned technical problem.
In order to achieve the above object, the utility model provides a following technical scheme: a semiconductor heating furnace comprises a shell, wherein a first inner shell is arranged in the shell, a second inner shell is arranged in the first inner shell, an air inlet is formed in one end between the first inner shell and the second inner shell, an air outlet is formed in the other end of the first inner shell, a semiconductor annular heating ring is arranged between the shell and the first inner shell, a detachable installation block is arranged on the outer side of the shell, a temperature measurer is arranged on the installation block and comprises a temperature measurement main body and a temperature measurement body connected with the temperature measurement main body, the installation block is provided with a limiting groove embedded with the temperature measurement main body and a mounting groove for the temperature measurement body to penetrate into, and the mounting groove is communicated with the inside of the shell.
Preferably, a circular groove is formed in one end, far away from the shell, of the mounting block, a circular through hole is formed in the circular groove, the diameter of the circular groove is the same as that of the temperature measuring main body, the diameter of the circular through hole is the same as that of the temperature measuring body, the limiting groove is formed at the joint of the circular groove and the circular through hole, and the mounting groove is formed by the circular groove and the circular through hole.
Preferably, the side wall of the mounting block is provided with a first through hole, the first through hole is communicated with the circular groove, the first through hole is provided with a positioning column in a penetrating manner, and one end of the positioning column is abutted to the temperature measuring main body.
Preferably, the inner wall of the circular groove is provided with a groove, the center line of the groove is collinear with the center line of the first through hole, an expansion spring is arranged in the groove, one end of the expansion spring is provided with a clamping block, and the temperature measuring main body is provided with a clamping groove matched with the clamping block.
Preferably, the inner wall of the circular groove is provided with four guide posts along the circumferential direction, and the temperature measuring main body is provided with four guide grooves matched with the four guide posts along the circumferential direction.
Compared with the prior art, the beneficial effects of the utility model are that: the temperature measuring device is characterized in that a detachable installation block is arranged, a limit groove and an installation groove are formed in the installation block, and the depth of the temperature measuring device penetrating into the installation groove is limited by the limit groove, so that the temperature measuring device is accurately installed at the appointed position of the heating furnace, and the aim of accurately measuring the temperature of the furnace is fulfilled.
The utility model has the advantages that the diameter of the circular groove is the same as that of the temperature measuring main body, and the diameter of the circular through hole is the same as that of the temperature measuring body, so that the temperature measuring device is tightly matched with the mounting block; arranging a positioning column and a first through hole to fix the temperature detector on a certain position of the mounting block; the temperature measurer is characterized in that a telescopic spring and a clamping block are arranged, the central line of the groove is collinear with the central line of the first through hole, and the temperature measurer is more firmly fixed on a certain position of the mounting block under the combined action of the positioning column and the clamping block; and the guide post and the guide groove are arranged, so that the temperature detector is convenient and accurate to mount on the mounting block.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a sectional view showing the overall structure of the present embodiment;
FIG. 2 is an enlarged structural view A in the present embodiment;
FIG. 3 is an exploded view of the mounting block and the temperature detector in this embodiment;
FIG. 4 is a schematic view of the assembly structure of the mounting block and the temperature detector in this embodiment;
FIG. 5 is an exploded view of the highlighted mounting block and the temperature detector in this embodiment;
FIG. 6 is a sectional view showing the guide post and the guide groove in the embodiment.
In the drawings, the components represented by the respective reference numerals are listed below:
1. a housing; 11. a first inner case; 12. a second inner case; 13. an air inlet; 14. an air outlet; 2. a semiconductor annular heating ring; 3. mounting blocks; 31. a circular groove; 311. a groove; 312. a guide post; 32. a circular through hole; 33. a first through hole; 4. a temperature detector; 41. a temperature measuring main body; 411. a clamping groove; 412. a guide groove; 42. a temperature measuring body; 5. a positioning column; 6. a tension spring; 7. a clamping block; 8. a containing frame.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.
Referring to fig. 1-6, the present invention provides a technical solution: the utility model provides a semiconductor heating furnace, which comprises a housin 1, be equipped with first inner shell 11 in the casing 1, be equipped with second inner shell 12 in the first inner shell 11, one end between first inner shell 11 and the second inner shell 12 is equipped with air inlet 13, the other end is equipped with gas outlet 14, be equipped with semiconductor annular heating ring 2 between casing 1 and the first inner shell 11, the casing 1 outside is equipped with detachable installation piece 3, be equipped with thermoscope 4 on the installation piece 3, thermoscope 4 includes temperature measurement main part 41 and the thermoscope 42 of being connected with temperature measurement main part 41, installation piece 3 is equipped with the mounting groove that penetrates with the spacing groove of temperature measurement main part 41 gomphosis and supply thermoscope 42, mounting groove and the inside intercommunication of casing 1, in this embodiment, still be equipped with in the second inner shell 12 and hold frame 8, hold frame 8 is.
Preferably, a circular groove 31 is formed in one end, away from the housing 1, of the mounting block 3, a circular through hole 32 is formed in the circular groove 31, the diameter of the circular groove 31 is the same as that of the temperature measuring main body 41, the diameter of the circular through hole 32 is the same as that of the temperature measuring body 42, a limiting groove is formed at the joint of the circular groove 31 and the circular through hole 32, the circular groove 31 and the circular through hole 32 form a mounting groove, the diameter of the circular groove 31 is the same as that of the temperature measuring main body 41, and the diameter of the circular through hole 32 is the same as that of the temperature measuring body 42, so that the temperature measuring device 4 is tightly matched with the.
Preferably, the side wall of the mounting block 3 is provided with a first through hole 33, the first through hole 33 is communicated with the circular groove 31, the first through hole 33 is penetrated with the positioning column 5, one end of the positioning column 5 is abutted against the temperature measuring main body 41, and the positioning column 5 and the first through hole 33 are arranged, so that the temperature measuring device 4 is fixed on a certain position of the mounting block 3.
Preferably, the inner wall of the circular groove 31 is provided with a groove 311, the center line of the groove 311 is collinear with the center line of the first through hole 33, an expansion spring 6 is arranged in the groove 311, one end of the expansion spring 6 is provided with a clamping block 7, the temperature measuring main body 41 is provided with a clamping groove 411 matched with the clamping block 7, the expansion spring 6 and the clamping block 7 are arranged, the center line of the groove 311 is collinear with the center line of the first through hole 33, and under the combined action of the positioning column 5 and the clamping block 7, the temperature measuring device 4 is more firmly fixed on a certain position of the mounting block 3.
Preferably, four guide posts 312 are arranged on the inner wall of the circular groove 31 along the circumferential direction thereof, four guide grooves 412 matched with the four guide posts 312 are arranged on the temperature measuring main body 41 along the circumferential direction thereof, and the guide posts 312 and the guide grooves 412 are arranged, so that the temperature measuring device 4 can be conveniently and accurately mounted on the mounting block 3.
One specific application of this embodiment is: when the temperature detector 4 needs to be replaced, the positioning column 5 is detached, the temperature detector 4 is pulled out from the mounting block 3, the guide groove 412 of the temperature detector 4 to be replaced is inserted along the guide column 312, the temperature detector 4 cannot be inserted any more after the temperature measuring main body 41 is embedded into the limiting groove, meanwhile, the clamping block 7 is clamped into the clamping groove 411, the positioning column 5 is inserted into the first through hole 33 to be abutted against the temperature measuring main body 41, and replacement of the temperature detector 4 is completed.
To sum up, set up detachable installation piece 3, be equipped with spacing groove and mounting groove in the installation piece 3, thermoscope 4 penetrates the restriction in the spacing groove of the degree of depth of mounting groove, makes thermoscope 4 accurate installation in the appointed position of heating furnace, reaches the purpose of accurate measurement furnace temperature.
In the description of the present invention, it is to be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "other end", "upper", "one side", "top", "inner", "front", "center", "both ends", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "disposed," "connected," "fixed," "screwed" and the like are to be construed broadly, e.g., as meaning fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through an intermediate medium, and may be connected through the inside of two elements or in an interaction relationship between two elements, unless otherwise specifically defined, and the specific meaning of the above terms in the present invention will be understood by those skilled in the art according to specific situations.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (5)

1. A semiconductor heating furnace is characterized by comprising a shell (1), wherein a first inner shell (11) is arranged in the shell (1), a second inner shell (12) is arranged in the first inner shell (11), an air inlet (13) is arranged at one end between the first inner shell (11) and the second inner shell (12), an air outlet (14) is arranged at the other end, a semiconductor annular heating ring (2) is arranged between the shell (1) and the first inner shell (11), a detachable mounting block (3) is arranged on the outer side of the shell (1), a temperature detector (4) is arranged on the mounting block (3), the temperature detector (4) comprises a temperature measuring main body (41) and a temperature measuring body (42) connected with the temperature measuring main body (41), a limiting groove embedded with the temperature measuring main body (41) and a mounting groove for the temperature measuring body (42) to penetrate into are arranged on the mounting block (3), the mounting groove is communicated with the interior of the shell (1).
2. The semiconductor heater according to claim 1, wherein: one end, far away from the shell (1), of the mounting block (3) is provided with a circular groove (31), a circular through hole (32) is formed in the circular groove (31), the diameter of the circular groove (31) is the same as that of the temperature measuring main body (41), the diameter of the circular through hole (32) is the same as that of the temperature measuring body (42), the joint of the circular groove (31) and the circular through hole (32) forms the limiting groove, and the mounting groove is formed by the circular groove (31) and the circular through hole (32).
3. A semiconductor heater according to claim 2, wherein: the side wall of the mounting block (3) is provided with a first through hole (33), the first through hole (33) is communicated with the circular groove (31), the first through hole (33) is provided with a positioning column (5) in a penetrating mode, and one end of the positioning column (5) is abutted to the temperature measuring main body (41).
4. A semiconductor heater according to claim 3, wherein: circular recess (31) inner wall is equipped with recess (311), just the central line of recess (311) with the central line collineation of first through-hole (33), be equipped with expanding spring (6) in recess (311), the one end of expanding spring (6) is equipped with joint piece (7), temperature measurement main part (41) be equipped with joint piece (7) assorted joint groove (411).
5. A semiconductor heater according to claim 2, wherein: the inner wall of the circular groove (31) is provided with four guide posts (312) along the circumferential direction, and the temperature measuring main body (41) is provided with four guide grooves (412) matched with the four guide posts (312) along the circumferential direction.
CN202021038501.6U 2020-06-09 2020-06-09 Semiconductor heating furnace Active CN212902624U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202021038501.6U CN212902624U (en) 2020-06-09 2020-06-09 Semiconductor heating furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202021038501.6U CN212902624U (en) 2020-06-09 2020-06-09 Semiconductor heating furnace

Publications (1)

Publication Number Publication Date
CN212902624U true CN212902624U (en) 2021-04-06

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ID=75276113

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202021038501.6U Active CN212902624U (en) 2020-06-09 2020-06-09 Semiconductor heating furnace

Country Status (1)

Country Link
CN (1) CN212902624U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113327875A (en) * 2021-06-22 2021-08-31 北京北方华创微电子装备有限公司 Vertical heat treatment equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113327875A (en) * 2021-06-22 2021-08-31 北京北方华创微电子装备有限公司 Vertical heat treatment equipment
CN113327875B (en) * 2021-06-22 2024-07-23 北京北方华创微电子装备有限公司 Vertical heat treatment equipment

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