CN115747773B - Real-time adjusting device and method for temperature field of air outlet of tubular chemical vapor deposition furnace - Google Patents
Real-time adjusting device and method for temperature field of air outlet of tubular chemical vapor deposition furnace Download PDFInfo
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- CN115747773B CN115747773B CN202211381308.6A CN202211381308A CN115747773B CN 115747773 B CN115747773 B CN 115747773B CN 202211381308 A CN202211381308 A CN 202211381308A CN 115747773 B CN115747773 B CN 115747773B
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- 238000000034 method Methods 0.000 title claims abstract description 30
- 238000005229 chemical vapour deposition Methods 0.000 title claims abstract description 18
- 230000005540 biological transmission Effects 0.000 claims description 33
- 238000001816 cooling Methods 0.000 claims description 30
- 239000000498 cooling water Substances 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 10
- 238000007789 sealing Methods 0.000 claims description 6
- 238000009423 ventilation Methods 0.000 claims description 6
- 230000000694 effects Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 description 7
- 238000002360 preparation method Methods 0.000 description 6
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000004321 preservation Methods 0.000 description 2
- 238000009991 scouring Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000013049 sediment Substances 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- Chemical Vapour Deposition (AREA)
Abstract
The application discloses a device and a method for adjusting the temperature field of an air outlet of a tubular chemical vapor deposition furnace in real time, wherein the device comprises a furnace body, and the bottom of the furnace body is provided with an air outlet; the air outlet is in a stepped hole shape, a fixed disc is fixedly arranged in a small-diameter hole section of the air outlet, a movable disc is arranged at a step of the air outlet, a plurality of air holes are formed in the fixed disc and the movable disc, and the movable disc comprises a large disc body and a small disc body; the automatic temperature control device comprises a controller, a rotary driving module for driving the movable disc to rotate, a lifting driving module for driving the rotary driving module to lift and a temperature sensor for detecting the temperature of the air outlet, wherein the rotary driving module, the lifting driving module and the temperature sensor are respectively and electrically connected with the controller. By adopting the temperature field real-time adjusting device and method provided by the application, the accurate adjustment and control of the temperature field of the air outlet are realized, and the product quality is improved.
Description
Technical Field
The invention relates to the technical field of chemical vapor deposition, in particular to a device and a method for adjusting the temperature field of an air outlet of a tubular chemical vapor deposition furnace in real time.
Background
In the preparation process of the C/C composite material, the control requirement of a Chemical Vapor Deposition (CVD) preparation process on a process temperature field is strict, the deposition temperature of a deposition furnace is mostly between 900 ℃ and 1200 ℃, the fine control of a temperature field change process is realized due to the temperature hysteresis and the thermal process under the complex atmosphere condition with vapor deposition, the temperature field cannot be effectively controlled in real time by simply controlling the heating quantity of a heat source, the temperature field is gradually changed due to the gas endothermic and exothermic process and the generation and adhesion of deposition accompanied by gas thermal diffusion in the deposition process, and the change can cause great risk on the process executability of the deposition process, thereby influencing the quality performance of products and causing the generation of defective products and the rejection of the products. Therefore, in the field of chemical vapor deposition processes, control of the temperature field is of paramount importance, and effective control of temperature field variation can directly affect material preparation quality or process stability and performability.
For the tubular chemical deposition furnace, the air outlet changes the heat preservation performance of the heat preservation layer due to the scouring of air flow and the thermal diffusion of a large amount of air, so that the temperature change is large, the process is a dynamic process, the stability of the whole temperature field is further influenced, and the material performance is reduced and has great hidden trouble in the process, so that the smooth process and the material performance are seriously influenced.
Disclosure of Invention
Therefore, the invention aims to provide a device and a method for adjusting the temperature field of the air outlet of a tubular chemical vapor deposition furnace in real time so as to control and adjust the temperature of the air outlet of the tubular chemical vapor deposition furnace, thereby improving the adjustment and control of the temperature field in the process execution process, controlling the heat flow of the temperature field more precisely, guaranteeing the safety and stability and fine adjustability of the material preparation process more effectively, and further improving the accuracy of the process preparation and the qualification rate of the product quality.
The invention solves the problems by the following technical means:
The device comprises a furnace body, wherein the bottom of the furnace body is provided with an air outlet; the air outlet is in a stepped hole shape, a fixed disc is fixedly arranged in a small-diameter hole section of the air outlet, a movable disc is arranged at a step of the air outlet, a plurality of air holes are formed in the fixed disc and the movable disc, and the movable disc comprises a large disc body and a small disc body; still include the controller, be used for driving the rotatory rotary drive module of movable disk, be used for driving the lift drive module that rotary drive module goes up and down and be used for the temperature sensor of gas outlet temperature detection, rotary drive module, lift drive module and temperature sensor are connected with the controller electricity respectively, and rotary drive module's output passes big disk body and with big disk body vertical sliding fit, realizes circumference location through key structure between rotary drive module's the output and the big disk body, rotary drive module's output and little disk body fixed connection.
Further, the rotary driving module comprises a rotary motor arranged at the top of the furnace body and a transmission rod vertically extending into the furnace body, the top end of the transmission rod is in transmission connection with an output shaft of the rotary motor, the bottom end of the transmission rod is fixedly connected with the small disc body, the transmission rod penetrates through the large disc body and vertically slides and is matched with the large disc body, and circumferential positioning is achieved between the transmission rod and the large disc body through a key structure.
Further, a gap exists between the large disc body and the large-diameter hole section of the air outlet, and the small disc body is matched with the small-diameter hole section of the air outlet in a sliding fit mode.
Further, the transmission rod comprises a cooling rod body and a connecting rod body, the top end of the cooling rod body is in transmission connection with an output shaft of the rotating motor, and the bottom end of the cooling rod body is connected with the movable disc through the connecting rod body; the cooling rod body is internally provided with a cooling cavity, the side wall of the cooling rod body is provided with a cooling water inlet and a cooling water outlet, and the cooling water inlet and the cooling water outlet are communicated with the cooling cavity.
Further, a sealing piece is arranged at the assembly position of the cooling rod body and the top of the furnace body.
A method for adjusting the temperature field of an air outlet of a tubular chemical vapor deposition furnace in real time comprises the following steps:
S1: measuring the temperature of the air outlet in real time through a temperature sensor, and feeding back a temperature signal to the controller;
S2: comparing the real-time measured temperature with a preset reaction temperature through a controller, and when the real-time temperature is lower than the reaction temperature, sending a signal to a rotary driving module by the controller, driving a movable disc to rotate by the rotary driving module, reducing the coincidence degree of air holes of the movable disc and air holes of a fixed disc, reducing a transmission surface, and heating; when the heating effect still does not meet the requirement, the controller sends a signal to the lifting driving module, and the lifting driving module drives the small tray body of the movable tray to vertically move relative to the large tray body, so that a heat shield type heating is formed between the small tray body and the large tray body; when the real-time temperature is higher than the reaction temperature, the controller sends a signal to the rotary driving module, the rotary driving module drives the movable disc to rotate, the coincidence ratio of the ventilation holes of the movable disc and the ventilation holes of the fixed disc is improved, the transmission surface is increased, and the temperature is reduced.
The invention has the beneficial effects that:
1. The regulating device can dynamically regulate the temperature of the air outlet and the thermal field in real time, and is another control mode independent of the control of the main temperature field; can cope with temperature field changes caused by sediment and temperature changes caused by strong airflow scouring in the chemical vapor process. The process stability of the chemical vapor deposition process is effectively ensured, and the material preparation quality is further ensured;
2. The adjusting control process adopts an automatic closed loop design, so that convenience and effectiveness are realized;
3. The temperature is regulated by adopting a mode of combining the transmission surface and the heat shield, so that the regulation precision and the refinement degree are improved.
4. Experiments show that the temperature regulation range of the device is within the range of 900-1100 ℃ in the high temperature section, and the regulation range is 0-80 ℃. For chemical vapor deposition furnaces, this adjustment method is a great and beneficial compensation for thermal field stability.
Drawings
The invention is further described below with reference to the drawings and examples.
FIG. 1 is a schematic view of the construction of a preferred embodiment of the present invention;
fig. 2 is a top view of the stationary or movable plate.
Detailed Description
The invention is further described in detail below by means of the figures and examples. The features and advantages of the present invention will become more apparent from the description. It will be apparent that the described embodiments are only some, but not all, embodiments of the invention.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
As shown in fig. 1 to 2, the embodiment of the invention discloses a real-time temperature field adjusting device for an air outlet of a tubular chemical vapor deposition furnace, which comprises a furnace body 1, wherein an air outlet 2 is arranged at the bottom of the furnace body; the air outlet is in a stepped hole shape, a fixed disc 3 is fixedly arranged in a small-diameter hole section of the air outlet, a movable disc is arranged at a step of the air outlet, and a plurality of air holes 5 are formed in the fixed disc and the movable disc; in this embodiment, four breather holes are respectively formed in the fixed disk and the movable disk, and the materials of the fixed disk and the movable disk are formed by superposing a low-density CVD felt and graphite paper.
The movable disk comprises a large disk body 401 and a small disk body 402, a gap exists between the large disk body and a large-diameter hole section of the air outlet, and the small disk body is matched with a small-diameter hole section of the air outlet in a sliding fit mode.
The automatic air outlet temperature detection device further comprises a controller 14, a rotary driving module 13 for driving the movable disc to rotate, a lifting driving module 12 for driving the rotary driving module to lift and a temperature sensor 15 for detecting the air outlet temperature, wherein the rotary driving module, the lifting driving module and the temperature sensor are respectively and electrically connected with the controller. Specifically, the rotary driving module comprises a rotary motor arranged at the top of the furnace body and a transmission rod vertically extending into the furnace body, wherein the top end of the transmission rod is in transmission connection with an output shaft of the rotary motor, the bottom end of the transmission rod is fixedly connected with the small disc body, the transmission rod penetrates through the large disc body and is vertically matched with the large disc body in a sliding manner, and the transmission rod and the large disc body are circumferentially positioned through a key structure; by adopting the assembly form, on one hand, the transmission rod can drive the large disc body and the small disc body to synchronously rotate, and on the other hand, the transmission rod can push the small disc body to vertically move relative to the large disc body when lifting.
The transmission rod comprises a cooling rod body 7 and a connecting rod body 6, the top end of the cooling rod body is in transmission connection with the output shaft of the rotating motor, and the bottom end of the cooling rod body is connected with the movable disc through the connecting rod body; the cooling rod body is internally provided with a cooling cavity 10, the side wall of the cooling rod body is provided with a cooling water inlet 9 and a cooling water outlet 11, the cooling water inlet and the cooling water outlet are communicated with the cooling cavity, and the cooling rod body is made of copper material and has good heat conducting performance. In the specific implementation process, the temperature field in the furnace body can be further regulated and controlled by lifting the cooling rod body (adjusting the length of the cooling rod body entering the furnace body); furthermore, the temperature field in the furnace body can be adjusted by adjusting the flow rate of cooling water of the cooling rod body.
The sealing piece 8 is arranged at the assembly position of the cooling rod body and the top of the furnace body, the sealing piece adopts high-temperature-resistant silica gel, grease is smeared on the surface of the sealing piece for lubrication, the sealing piece can enable the cooling rod body and the top of the furnace body to be well sealed, and the requirements of rotation and up-and-down movement of the cooling rod body can be met.
The controller comprises a temperature display module and a control module, wherein the temperature display module is used for receiving and displaying temperature signals of the temperature sensor, and the control module is used for sending control signals to the rotation driving module and the lifting driving module.
The embodiment also discloses a method for adjusting the temperature field of the air outlet of the tubular chemical vapor deposition furnace in real time, which comprises the following steps:
S1: measuring the temperature of the air outlet in real time through a temperature sensor, and feeding back a temperature signal to the controller;
S2: comparing the real-time measured temperature with a preset reaction temperature through a controller, and when the real-time temperature is lower than the reaction temperature, sending a signal to a rotary driving module by the controller, driving a movable disc to rotate by the rotary driving module, reducing the coincidence degree of air holes of the movable disc and air holes of a fixed disc, reducing a transmission surface, and heating; when the heating effect still does not meet the requirement, the controller sends a signal to the lifting driving module, and the lifting driving module drives the small tray body of the movable tray to vertically move relative to the large tray body, so that a heat shield type heating is formed between the small tray body and the large tray body; when the real-time temperature is higher than the reaction temperature, the controller sends a signal to the rotary driving module, the rotary driving module drives the movable disc to rotate, the coincidence ratio of the ventilation holes of the movable disc and the ventilation holes of the fixed disc is improved, the transmission surface is increased, and the temperature is reduced.
Finally, it is noted that the above embodiments are only for illustrating the technical solution of the present invention and not for limiting the same, and although the present invention has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications and equivalents may be made thereto without departing from the spirit and scope of the technical solution of the present invention, which is intended to be covered by the scope of the claims of the present invention.
Claims (3)
1. The device comprises a furnace body, wherein the bottom of the furnace body is provided with an air outlet; the method is characterized in that: the air outlet is in a stepped hole shape, a fixed disc is fixedly arranged in a small-diameter hole section of the air outlet, a movable disc is arranged at a step of the air outlet, a plurality of air holes are formed in the fixed disc and the movable disc, and the movable disc comprises a large disc body and a small disc body; the device comprises a movable disc, a controller, a rotary driving module for driving the movable disc to rotate, a lifting driving module for driving the rotary driving module to lift and a temperature sensor for detecting the temperature of an air outlet, wherein the rotary driving module, the lifting driving module and the temperature sensor are respectively and electrically connected with the controller, the output end of the rotary driving module penetrates through a large disc body and is vertically matched with the large disc body in a sliding manner, the output end of the rotary driving module and the large disc body are circumferentially positioned through a key structure, and the output end of the rotary driving module is fixedly connected with a small disc body;
The rotary driving module comprises a rotary motor arranged at the top of the furnace body and a transmission rod vertically extending into the furnace body, the top end of the transmission rod is in transmission connection with an output shaft of the rotary motor, the bottom end of the transmission rod is fixedly connected with the small disc body, the transmission rod penetrates through the large disc body and is vertically matched with the large disc body in a sliding manner, and the transmission rod and the large disc body are circumferentially positioned through a key structure;
a gap exists between the large disc body and the large-diameter hole section of the air outlet, and the small disc body is matched and matched with the small-diameter hole section of the air outlet in a sliding manner;
The transmission rod comprises a cooling rod body and a connecting rod body, the top end of the cooling rod body is in transmission connection with an output shaft of the rotating motor, and the bottom end of the cooling rod body is connected with the movable disc through the connecting rod body; the cooling rod body is internally provided with a cooling cavity, the side wall of the cooling rod body is provided with a cooling water inlet and a cooling water outlet, and the cooling water inlet and the cooling water outlet are communicated with the cooling cavity.
2. The real-time temperature field adjusting device for an air outlet of a tubular chemical vapor deposition furnace according to claim 1, wherein: and a sealing piece is arranged at the assembly position of the cooling rod body and the top of the furnace body.
3. A method for adjusting the temperature field of an air outlet of a tubular chemical vapor deposition furnace in real time is characterized by comprising the following steps:
S1: measuring the temperature of the air outlet in real time through a temperature sensor, and feeding back a temperature signal to the controller;
S2: comparing the real-time measured temperature with a preset reaction temperature through a controller, and when the real-time temperature is lower than the reaction temperature, sending a signal to a rotary driving module by the controller, driving a movable disc to rotate by the rotary driving module, reducing the coincidence degree of air holes of the movable disc and air holes of a fixed disc, reducing a transmission surface, and heating; when the heating effect still does not meet the requirement, the controller sends a signal to the lifting driving module, and the lifting driving module drives the small tray body of the movable tray to vertically move relative to the large tray body, so that a heat shield type heating is formed between the small tray body and the large tray body; when the real-time temperature is higher than the reaction temperature, the controller sends a signal to the rotary driving module, the rotary driving module drives the movable disc to rotate, the coincidence ratio of the ventilation holes of the movable disc and the ventilation holes of the fixed disc is improved, the transmission surface is increased, and the temperature is reduced.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211381308.6A CN115747773B (en) | 2022-11-07 | 2022-11-07 | Real-time adjusting device and method for temperature field of air outlet of tubular chemical vapor deposition furnace |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211381308.6A CN115747773B (en) | 2022-11-07 | 2022-11-07 | Real-time adjusting device and method for temperature field of air outlet of tubular chemical vapor deposition furnace |
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| CN115747773B true CN115747773B (en) | 2024-07-16 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102732860A (en) * | 2011-04-14 | 2012-10-17 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Reaction chamber and chemical vapor deposition equipment with reaction chamber |
| CN106894001A (en) * | 2015-12-17 | 2017-06-27 | 杨永亮 | The even device of air of combined type |
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| KR102343103B1 (en) * | 2015-07-10 | 2021-12-28 | 주식회사 테스 | Apparatus for mocvd |
| US10714362B2 (en) * | 2018-03-15 | 2020-07-14 | Kokusai Electric Corporation | Substrate processing apparatus and method of manufacturing semiconductor device |
| US10998205B2 (en) * | 2018-09-14 | 2021-05-04 | Kokusai Electric Corporation | Substrate processing apparatus and manufacturing method of semiconductor device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102732860A (en) * | 2011-04-14 | 2012-10-17 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Reaction chamber and chemical vapor deposition equipment with reaction chamber |
| CN106894001A (en) * | 2015-12-17 | 2017-06-27 | 杨永亮 | The even device of air of combined type |
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