CN115739222B - Microfluidic device and control method thereof - Google Patents

Microfluidic device and control method thereof Download PDF

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Publication number
CN115739222B
CN115739222B CN202211605195.3A CN202211605195A CN115739222B CN 115739222 B CN115739222 B CN 115739222B CN 202211605195 A CN202211605195 A CN 202211605195A CN 115739222 B CN115739222 B CN 115739222B
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resistor
electrically connected
module
driving
detection
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CN115739222A (en
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蒋慧慧
粟平
席克瑞
章凯迪
陈潇
朱清三
朱逸然
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Shanghai Tianma Microelectronics Co Ltd
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Shanghai Tianma Microelectronics Co Ltd
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Abstract

The invention provides a microfluidic device and a control method thereof, wherein the microfluidic device transmits different signals to a first electrode layer and a driving electrode layer under different working modes based on a detection circuit to determine the functions of the first electrode layer and the driving electrode layer, when the first electrode layer and the driving electrode layer are used as detection electrodes, a capacitance detection module is used for testing the variation of capacitance values between each first driving electrode and each first electrode layer, and after the variation of the capacitance values is transmitted to a controller, the controller can detect the positions and the sizes of liquid drops in a microfluidic channel based on the detected variation of the capacitance values; when the driving electrode layer is used as a driving electrode, the driving of liquid drops in the microfluidic channel is realized, compared with the traditional microfluidic device, the photoelectric conversion structure is not required to be integrated in the microfluidic device, and the functions of detecting the positions and the sizes of the liquid drops in the microfluidic channel, driving the liquid drops and the like can be met under the condition of not increasing any process difficulty.

Description

Microfluidic device and control method thereof
Technical Field
The invention relates to the technical field of microfluidics, in particular to a microfluidic device and a control method thereof.
Background
Microfluidic (Micro Fluidics) technology is an emerging interdisciplinary subject related to chemistry, fluid physics, microelectronics, new materials, biology and biomedical engineering, can precisely control droplet movement, realize operations such as droplet fusion and separation, and complete various biochemical reactions, and is a technology with the main characteristics of controlling the fluid in a micrometer scale space. In recent years, the microfluidic chip has the advantages of small volume, low power consumption, low cost, small required sample and reagent amount, capability of realizing independent and accurate control of liquid drops, short detection time, high sensitivity, easiness in integration with other devices and the like, and is widely applied to the fields of biology, chemistry, medicine and the like.
At present, a traditional microfluidic device adopts a photoelectric conversion technology, a photoelectric structure is added in a pixel, and electric signals of each pixel area are acquired through the photoelectric conversion structure, so that relevant information of liquid drops is obtained; however, the related information of the liquid drop is detected by the photoelectric conversion technology, and the problems of complex chip structure and limited generality exist, for example, mask and process procedure can be added by integrating the photoelectric structure in the microfluidic device, and the use of a few reagents sensitive to light on the microfluidic device can be limited by illumination.
Disclosure of Invention
In view of the above, the present invention provides a microfluidic device and a control method thereof, which have the following technical schemes:
a microfluidic device, the mode of operation of the microfluidic device comprising a detection mode and a drive mode, the microfluidic device comprising:
a first substrate and a second substrate disposed opposite to each other;
The first electrode layer is positioned on one side of the first substrate and faces the second substrate;
the first hydrophobic layer is positioned on one side of the first electrode layer facing the second substrate;
A driving electrode layer located on one side of the second substrate facing the first substrate, the driving electrode layer including a plurality of driving electrodes;
The second hydrophobic layer is positioned on one side of the driving electrode layer facing the first substrate;
a microfluidic channel between the first hydrophobic layer and the second hydrophobic layer for receiving a droplet;
a detection circuit electrically connected to the drive electrode layer and the first electrode layer, the detection circuit comprising: the device comprises a controller, a multichannel switch selection module, a driving module and a capacitance detection module, wherein the capacitance detection module comprises a first capacitance detection end and a second capacitance detection end;
In the detection mode, the controller is used for controlling the multi-channel switch selection module to electrically connect the first electrode layer with the first capacitance detection end, electrically connect a first driving electrode to be detected with the second capacitance detection end, and is also used for controlling the driving module to conduct the first driving electrode with the second capacitance detection end, and controlling the capacitance detection module to perform capacitance detection;
In the driving mode, the controller is used for controlling the multi-channel switch selection module to connect the first electrode layer to the ground, and is also used for controlling the multi-channel switch selection module and the driving module to electrically connect a second driving electrode which needs to be driven with a driving voltage end so as to drive the liquid drops to move.
A control method of a microfluidic device, the control method being based on the microfluidic device described above, the control method comprising:
In a detection mode, the controller controls the multi-channel switch selection module to electrically connect the first electrode layer with the first capacitance detection end, electrically connect the first driving electrode to be detected with the second capacitance detection end, and also controls the driving module to conduct the first driving electrode with the second capacitance detection end, and the controller also controls the capacitance detection module to carry out capacitance detection;
In the driving mode, the controller controls the multi-channel switch selection module to connect the first electrode layer to the ground, and also controls the multi-channel switch selection module and the driving module to electrically connect a second driving electrode required to be driven with a driving voltage end so as to drive the liquid drops to move.
Compared with the prior art, the invention has the following beneficial effects:
According to the microfluidic device, different signals are sent to the first electrode layer and the driving electrode layer based on the detection circuit under different working modes of the microfluidic device to determine the functions of the first electrode layer and the driving electrode layer, when the first electrode layer and the driving electrode layer are used as detection electrodes, the capacitance detection module can be used for testing the variation of capacitance values between each first driving electrode and each first electrode layer, and after the variation of the capacitance values is sent to the controller, the controller can be used for detecting the positions and the sizes of liquid drops in the microfluidic channel based on the detected variation of the capacitance values; when the driving electrode layer is used as a driving electrode, the driving of liquid drops in the microfluidic channel is realized, compared with the traditional microfluidic device, the photoelectric conversion structure is not required to be integrated in the microfluidic device, and the functions of detecting the positions and the sizes of the liquid drops in the microfluidic channel, driving the liquid drops and the like can be met under the condition of not increasing any process difficulty.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only embodiments of the present invention, and that other drawings can be obtained according to the provided drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic cross-sectional structure of a microfluidic device according to an embodiment of the present disclosure;
Fig. 2 is a schematic diagram of a schematic structure of a detection circuit according to an embodiment of the present invention;
fig. 3 is a schematic top view of a driving electrode layer according to an embodiment of the present invention;
fig. 4 is a schematic circuit diagram of a first electrode layer control unit in a multi-channel switch selection module according to an embodiment of the present invention;
fig. 5 is a schematic circuit diagram of a driving electrode control unit in a multi-channel switch selection module according to an embodiment of the present invention;
Fig. 6 is a schematic circuit diagram of a driving electrode control unit in another multi-channel switch selection module according to an embodiment of the present invention;
FIG. 7 is a schematic diagram of another detection circuit according to an embodiment of the present invention;
Fig. 8 is a schematic structural diagram of a capacitive sensing module according to an embodiment of the present invention;
fig. 9 is a schematic structural diagram of another capacitive sensing module according to an embodiment of the present invention;
Fig. 10 is a schematic structural diagram of another detection circuit according to an embodiment of the present invention;
FIG. 11 is a schematic diagram of a schematic structure of another detecting circuit according to an embodiment of the present invention;
Fig. 12 is a schematic diagram of a schematic structure of a detection circuit according to another embodiment of the present invention;
Fig. 13 is a schematic structural diagram of another detection circuit according to an embodiment of the present invention;
Fig. 14 is a schematic flow chart of a control method of a microfluidic device according to an embodiment of the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In order that the above-recited objects, features and advantages of the present invention will become more readily apparent, a more particular description of the invention will be rendered by reference to the appended drawings and appended detailed description.
Referring to fig. 1, fig. 1 is a schematic cross-sectional structure of a microfluidic device according to an embodiment of the present disclosure, where the microfluidic device includes:
a first substrate 11 and a second substrate 12 disposed opposite to each other.
The first electrode layer 13 is located on the first substrate 11 and faces to one side of the second substrate 12.
A first hydrophobic layer 14 is located on a side of the first electrode layer 13 facing the second substrate 12.
And a driving electrode layer 15 disposed on the second substrate 12 and facing the first substrate 11, wherein the driving electrode layer 15 includes a plurality of driving electrodes 151.
And a second hydrophobic layer 16 located on a side of the driving electrode layer 15 facing the first substrate 11.
Microfluidic channels 17 are located between the first hydrophobic layer 14 and the second hydrophobic layer 16 and are adapted to receive droplets.
It should be noted that, as shown in fig. 1, the microfluidic device further includes an array layer 18 located between the driving electrode layer 15 and the second substrate 12, where the array layer 18 has a plurality of thin film transistors T, and a circuit formed by the thin film transistors T is at least used to control an electrode state of the driving electrode 151 in the driving electrode layer 15 to implement a specific function.
The operation modes of the microfluidic device include a detection mode for detecting the position of a droplet in the microfluidic channel 17 and a driving mode for driving the droplet in the microfluidic channel 17 to move, the specific principle of which will be described in detail below.
As shown in fig. 1, the microfluidic device further includes: a detection circuit 19, where the detection circuit 19 is electrically connected to the driving electrode layer 15 and the first electrode layer 13, referring to fig. 2, fig. 2 is a schematic structural diagram of a detection circuit according to an embodiment of the present invention, and the detection circuit 19 includes: a controller 191, a multi-channel switch selection module 192, a drive module 193, and a capacitance detection module 194 including a first capacitance detection terminal C1 and a second capacitance detection terminal C2.
In the detection mode, the controller 191 is configured to control the multi-channel switch selection module 192 to electrically connect the first electrode layer 13 with the first capacitance detection terminal C1, electrically connect a first driving electrode to be detected with the second capacitance detection terminal C2, the controller 191 is further configured to control the driving module 193 to conduct the first driving electrode with the second capacitance detection terminal C2, and the controller 191 is further configured to control the capacitance detection module 194 to perform capacitance detection.
In the driving mode, the controller 191 is configured to control the multi-channel switch selection module 192 to connect the first electrode layer 13 to ground, and the controller 191 is further configured to control the multi-channel switch selection module 192 and the driving module 193 to electrically connect a second driving electrode to be driven with a driving voltage terminal Dsx so as to drive the droplet to move.
Specifically, in the embodiment of the present invention, the first electrode layer 13 is electrically connected to the first capacitance detection end C1 in the detection mode, the first driving electrode to be detected is selected from the plurality of driving electrodes 151 of the driving electrode layer 15 to be electrically connected to the second capacitance detection end C2, and the first driving electrode to be detected is conducted to the second capacitance detection end C2, and at this time, the first electrode layer 13 and the first driving electrode to be detected are both used as detection electrodes, so that the capacitance detection module 194 can test the variation of the capacitance value between each first driving electrode and the first electrode layer 13, and after the variation of the capacitance value is sent to the controller 191, the controller 191 can detect the position and the size of the droplet in the microfluidic channel 17 based on the detected variation of the capacitance value.
In the driving mode, the first electrode layer 13 is grounded and used as a shielding layer, and a second driving electrode which needs to be driven is selected from the plurality of driving electrodes 151 of the driving electrode layer 15 and is electrically connected with the driving voltage end Dsx, so that the driving of the liquid drops in the microfluidic channel 17 is realized.
In the invention creation process of the invention, the inventor finds that after the structure preparation of the microfluidic device is finished, the distance and the area between the first electrode layer 13 and each driving electrode 151 are fixed, so when liquid drops exist in the microfluidic channel 17, the difference of dielectric constants is reflected when the mediums between the first electrode layer 13 and the driving electrodes 151 are different, and the difference of capacitance values corresponds to the difference of the dielectric constants; based on this principle, whether or not a droplet is present in the microchannel 17 and the position of the droplet when a droplet is present can be detected by the amount of change in the capacitance value between the first electrode layer 13 and the driving electrode 151, and the size of the corresponding droplet can also be detected by the accurate amount of change in the capacitance value.
That is, in the embodiment of the present invention, based on the detection circuit 19 sending different signals to the first electrode layer 13 and the driving electrode layer 15 in different operation modes of the microfluidic device, when the first electrode layer 13 and the driving electrode layer 15 are used as detection electrodes, the capacitance detection module 194 may test the variation of the capacitance value between each first driving electrode and the first electrode layer 13, and after the variation of the capacitance value is sent to the controller 191, the controller 191 may detect the position and the size of the droplet in the microfluidic channel 17 based on the detected variation of the capacitance value; when the driving electrode layer 15 is used as a driving electrode, the driving of the liquid drops in the microfluidic channel 17 is realized, compared with the traditional microfluidic device, the photoelectric conversion structure is not required to be integrated in the microfluidic device, and the functions of detecting the positions and the sizes of the liquid drops in the microfluidic channel, driving the liquid drops and the like can be satisfied under the condition of not increasing any process difficulty.
Optionally, in another embodiment of the present invention, referring to fig. 3, fig. 3 is a schematic top view of a driving electrode layer according to an embodiment of the present invention.
The driving electrode layer 15 further includes: a plurality of scan lines G1-Gn, a plurality of detection lines D1-Dn, and a plurality of switches T.
The scanning lines G1-Gn extend along a first direction, and a plurality of the scanning lines G1-Gn are sequentially arranged at intervals along a second direction.
The detection lines D1-Dn extend along the second direction, and a plurality of detection lines D1-Dn are sequentially arranged at intervals along the first direction.
The plurality of scan lines G1-Gn and the plurality of detection lines D1-Dn define a plurality of electrode regions, one of which is provided with one switch T and one driving electrode 151.
The driving electrode 151 is electrically connected to one end of the switch T, the other end of the switch T is electrically connected to the detection lines D1-Dn, and the control end of the switch T is electrically connected to the scan lines G1-Gn.
Specifically, in the embodiment of the present invention, a plurality of electrode areas are illustrated as an array arrangement, where the first direction is parallel to a row direction of the array arrangement, and the second direction is parallel to a column direction of the array arrangement, and in the embodiment of the present invention, the switch T is a TFT (Thin Film Transistor) transistor.
In the detection mode, the controller 191 controls the multi-channel switch selection module 192 to electrically connect the first electrode layer 13 with the first capacitance detection end C1, and selects a first driving electrode to be detected from the plurality of driving electrodes 151 of the driving electrode layer 15 to be electrically connected with the second capacitance detection end C2, that is, a detection line Dx corresponding to the first driving electrode to be detected is electrically connected with the second capacitance detection end C2; and the first driving electrode to be detected is conducted with the second capacitance detection end C2, that is, the switch T corresponding to the first driving electrode to be detected is in a conducting state by a signal transmitted on the scanning line Gx, and at this time, the first driving electrode to be detected is conducted with the second capacitance detection end C2, that is, both the current first electrode layer 13 and the first driving electrode to be detected are used as detection electrodes, then the capacitance detection module 194 can test the variation of the capacitance value between each first driving electrode and the first electrode layer 13, and after the variation of the capacitance value is transmitted to the controller 191, the controller 191 can detect the position and the size of the droplet in the microfluidic channel 17 based on the detected variation of the capacitance value.
In the driving mode, the controller 191 controls the multi-channel switch selection module 192 to use the first electrode layer 13 grounded as a shielding layer, and selects a second driving electrode to be driven from the plurality of driving electrodes 151 of the driving electrode layer 15 to be electrically connected with the driving voltage terminal Dsx, that is, a detection line Dx corresponding to the second driving electrode to be driven is electrically connected with the driving voltage terminal Dsx, so as to realize driving of the liquid drops in the microfluidic channel 17.
Optionally, in another embodiment of the present invention, as shown in fig. 2, the multi-channel switch selecting module includes: a first port, a plurality of second ports, a third port, and a fourth port;
The first port is electrically connected with the first electrode layer 13, the second port is electrically connected with the detection lines D1-Dn, the third port is electrically connected with the first capacitance detection end C1, and the fourth port is electrically connected with the second capacitance detection end C2.
The driving module includes: a plurality of scanning control terminals; the scanning control end is electrically connected with the scanning lines G1-Gn.
Specifically, in the embodiment of the present invention, a signal path for transmitting the driving voltage and a signal path for controlling the signal are further provided between the multi-channel switch selection module 192 and the driving module 193, so as to implement a specific function.
Optionally, in another embodiment of the present invention, referring to fig. 4, fig. 4 is a schematic circuit diagram of a first electrode layer control unit in a multi-channel switch selection module according to an embodiment of the present invention; referring to fig. 5, fig. 5 is a schematic circuit diagram of a driving electrode control unit in a multi-channel switch selection module according to an embodiment of the invention.
The multi-channel switch selection module 192 includes: the first electrode layer control unit 192A.
The first electrode layer control unit 192A includes a first resistor R1, a second resistor R2, a third resistor R3, a first triode Q1, and a first single pole double throw switch SPDT1.
The first end of the first resistor R1 receives a first control signal en_13, the second end of the first resistor R1 is electrically connected with the first end of the second resistor R2 and the base electrode of the first triode Q1, and the second end of the second resistor R2 and the emitter electrode of the first triode Q1 are grounded.
The first end of the third resistor R3 is electrically connected to the voltage control end VCC, and the second end of the third resistor R3 is electrically connected to the collector of the first triode Q1 and the control end EN1 of the first single pole double throw switch SPDT1, respectively.
The first end S01 of the first single-pole double-throw switch SPDT1 is electrically connected to the first electrode layer 13, the second end SA1 of the first single-pole double-throw switch SPDT1 is electrically connected to the first capacitance detection end C1, and the third end SB1 of the first single-pole double-throw switch SPDT1 is electrically connected to the ground end GND.
The multi-channel switch selection module 192 further includes: a plurality of driving electrode control units 192B, each of the driving electrode control units 192B corresponding to one of the detection lines.
The driving electrode control unit 192B includes: fourth resistor R4, fifth resistor R5, sixth resistor R6, seventh resistor R7, eighth resistor R8, ninth resistor R9, second transistor Q2, third transistor Q3, second single pole double throw switch SPDT2 and third single pole double throw switch SPDT3.
The first end of the fourth resistor R4 receives the second control signal en_dx, the second end of the fourth resistor R4 is electrically connected to the first end of the fifth resistor R5 and the base of the second triode Q2, and the second end of the fifth resistor R5 and the emitter of the second triode Q2 are grounded.
The first end of the sixth resistor R6 is electrically connected to the voltage control end VCC, and the second end of the sixth resistor R6 is electrically connected to the collector of the second triode Q2 and the control end EN2 of the second single pole double throw switch SPDT2, respectively.
The first end S02 of the second single-pole double-throw switch SPDT2 is electrically connected to the detection line Dx, the second end SA2 of the second single-pole double-throw switch SPDT2 is electrically connected to the second capacitance detection end C2, and the third end SB2 of the second single-pole double-throw switch SPDT2 is electrically connected to the first end S03 of the third single-pole double-throw switch SPDT 3.
The first end of the seventh resistor R7 receives the third control signal Gsx, the second end of the seventh resistor R7 is electrically connected to the first end of the eighth resistor R8 and the base of the third triode Q3, and the second end of the eighth resistor R8 and the emitter of the third triode Q3 are grounded.
The first end of the ninth resistor R9 is electrically connected to the voltage control end VCC, and the second end of the ninth resistor R9 is electrically connected to the collector of the third triode Q3 and the control end EN3 of the third single pole double throw switch SPDT3, respectively.
The second end SA3 of the third single-pole double-throw switch SPDT3 floats, and the third end SB3 of the third single-pole double-throw switch SPDT3 is electrically connected with the driving voltage end Dsx.
Specifically, in the embodiment of the present invention, the first control signal en_13, the second control signal en_dx, and the third control signal Gsx are control signals output by the controller 191 and used for controlling the on state of the corresponding single pole double throw switch, so as to ensure that the detection lines Dx corresponding to the first electrode layer 13 and the driving electrode are connected to different ports in different working modes, so as to realize different functions, which are described in detail below:
In the detection mode, the controller 191 transmits a first control signal for disabling the first single pole double throw switch SPDT1 to the first electrode layer control unit 192A in the multi-channel switch selection module 192, so that the first electrode layer 13 is electrically connected to the first capacitance detection terminal C1; the controller 191 transmits a second control signal for disabling the second single pole double throw switch SPDT2 to the driving electrode control unit 192B corresponding to the column where the first driving electrode to be detected is located in the multi-channel switch selection module 192, so that the detection line Dx corresponding to the first driving electrode to be detected is electrically connected to the second capacitance detection terminal C2.
And then, the switch T corresponding to the first driving electrode to be detected is in a conducting state through a signal transmitted on the scanning line, so that the first driving electrode to be detected is conducted with the corresponding detection line, and further, the first driving electrode to be detected is conducted with the second capacitance detection end C2.
That is, when the current first electrode layer 13 and the first driving electrode to be detected are used as the detecting electrodes, the capacitance detecting module 194 can test the variation of the capacitance value between each first driving electrode and the first electrode layer 13, and after the variation of the capacitance value is sent to the controller 191, the controller 191 can detect the position and the size of the droplet in the microfluidic channel 17 based on the detected variation of the capacitance value.
In the driving mode, the controller 191 supplies a first control signal for enabling the first single pole double throw switch SPDT1 to the first electrode layer control unit 192A in the multi-channel switch selection module 192, causing the first electrode layer 13 to be connected to the ground GND to serve as a shield layer; the controller 191 supplies a second control signal for enabling the second single pole double throw switch SPDT2 to all the driving electrode control units 192B in the multi-channel switch selection module 192 so that all the driving electrodes 151 in the driving electrode layer 15 serve as driving electrodes for driving the droplet movement; the controller 191 then sends a third control signal for enabling the third single pole double throw switch SPDT3 to the driving electrode control unit 192B corresponding to the column where the second driving electrode is required to be driven in the multi-channel switch selection module 192, electrically connects the detection line Dx corresponding to the second driving electrode required to be driven with the driving voltage terminal Dsx, and receives the driving voltage for driving the droplet to move, and at this time, the controller 191 sends a third control signal for disabling the third single pole double throw switch SPDT3 to the driving electrode control unit 192B corresponding to the column where the second driving electrode is not required to be driven in the multi-channel switch selection module 192, and the detection line Dx corresponding to the second driving electrode not required to be driven is not electrically connected with the driving voltage terminal Dsx.
And then the switch T corresponding to the second driving electrode to be driven is in a conducting state through a signal transmitted on the scanning line Gx, so that the second driving electrode to be driven is conducted with the corresponding detection line Dx, and the driving voltage is received, thereby realizing the driving of the liquid drops in the microfluidic channel 17.
Optionally, in another embodiment of the present invention, referring to fig. 6, fig. 6 is a schematic circuit diagram of a driving electrode control unit in another multi-channel switch selection module according to an embodiment of the present invention.
The multi-channel switch selection module 192 further includes: a plurality of driving electrode control units 192B, each driving electrode control unit 192B corresponds to one of the detection lines Dx.
The driving electrode control unit 192B includes: the resistor comprises a fourth resistor R4, a fifth resistor R5, a sixth resistor R6, a second triode Q2, a second single pole double throw switch SPDT2 and a field effect transistor MOS.
The first end of the fourth resistor R4 receives the second control signal en_dx, the second end of the fourth resistor R4 is electrically connected to the first end of the fifth resistor R5 and the base of the second triode Q2, and the second end of the fifth resistor R5 and the emitter of the second triode Q2 are grounded.
The first end of the sixth resistor R6 is electrically connected to the voltage control end VCC, and the second end of the sixth resistor R6 is electrically connected to the collector of the second triode Q2 and the control end EN2 of the second single pole double throw switch SPDT2, respectively.
The first end S02 of the second single-pole double-throw switch SPDT2 is electrically connected to the detection line Dx, the second end SA2 of the second single-pole double-throw switch SPDT2 is electrically connected to the second capacitance detection end C2, and the third end SB2 of the second single-pole double-throw switch SPDT2 is electrically connected to the first end of the field effect transistor MOS.
The control end of the field effect transistor MOS receives the third control signal Gsx, and the second end of the field effect transistor is electrically connected to the driving voltage end Dsx.
Specifically, in the embodiment of the present invention, compared with the circuit structure of the driving electrode control unit 192B shown in fig. 5, the circuit structure of the driving electrode control unit 192B shown in fig. 6 greatly simplifies the circuit structure and can simplify the manufacturing process of the microfluidic device under the condition that the same functions can be achieved.
It should be noted that the principle of the circuit structure of the driving electrode control unit 192B shown in fig. 6 is substantially similar to that of the circuit structure of the driving electrode control unit 192B shown in fig. 5, and will not be described herein.
Optionally, in another embodiment of the present invention, referring to fig. 7, fig. 7 is a schematic structural diagram of another detection circuit provided in the embodiment of the present invention, referring to fig. 8, and fig. 8 is a schematic structural diagram of a capacitance detection module provided in the embodiment of the present invention.
The detection circuit 19 further includes: the control end of the signal source 195 is connected with the controller 191 and is used for outputting signals with certain frequency and specific amplitude.
The capacitance detection module 194 includes: a first diode P1, a second diode P2, a feedback capacitance unit 194A, a first comparator B1, and a second comparator B2.
A first end of the signal source 195 is electrically connected to the first capacitance detection end C1, and a second end of the signal source 195 is electrically connected to the non-inverting input end of the first comparator B1.
The inverting input terminal of the first comparator B1 is electrically connected to the second capacitance detection terminal C2, the cathode of the first diode P1, the anode of the second diode P2, and the first terminal of the feedback capacitance unit 194A, respectively.
The anode of the first diode P1 and the cathode of the second diode P2 are electrically connected to the non-inverting input terminal of the first comparator B1, and the cathode of the second diode P2 is grounded.
The output end of the first comparator B1 is electrically connected to the second end of the feedback capacitor unit 194A and the non-inverting input end of the second comparator B2, respectively.
The inverting input terminal of the second comparator B2 is electrically connected to the output terminal of the second comparator B2, and is used as the output terminal Vo of the capacitance detection module 194.
Specifically, referring to fig. 9 in the embodiment of the present invention, fig. 9 is a schematic structural diagram of another capacitance detection module provided in the embodiment of the present invention, where the feedback capacitance unit 194A includes a plurality of parallel branches, and the branches are connected in series with a switch and a capacitor, as shown in fig. 9, S1-S4 are four single pole single throw switches, and obviously, a four-channel single pole single throw analog switch may also be designed, cn1-Cn4 are feedback capacitances with different orders of magnitude or different values of the same order of magnitude, and Cx is a capacitance to be measured; the controller 191 selects an appropriate feedback capacitor Cf by controlling the switching state in the feedback capacitor unit 194A according to the detection requirement, and the controller 191 controls the signal source 195 to output a signal with a certain frequency and a specific amplitude Ui.
Based on the formula of u=q/C and the ideal op-amp virtual short break, it can be known that vo= - (Cx/Cf) ×ui, i.e. the capacitance detection module 194 can convert the detected capacitance into a corresponding voltage value and transmit the voltage value to the controller 191 for the controller 191 to perform logic processing.
It should be noted that, in the embodiment of the present invention, the number of branches of the feedback capacitor unit 194A is only four as an example, and in other embodiments, the number of branches may be adaptively increased or decreased according to actual requirements.
Optionally, in another embodiment of the present invention, referring to fig. 10, fig. 10 is a schematic structural diagram of still another detection circuit according to an embodiment of the present invention.
The detection circuit 19 further includes: a differential amplification module 196.
The capacitance detection module 194 is configured to convert the detected capacitance into a corresponding voltage value.
The differential amplification module 196 is configured to perform differential amplification on the output of the capacitance detection module 194.
Specifically, in the embodiment of the present invention, the differential amplifying module 196 is configured to increase the voltage amplification factor of the output voltage of the capacitance detecting module 194.
Optionally, in another embodiment of the present invention, as shown in fig. 10, the detection circuit 19 further includes: a filtering module 197.
The filtering module 197 is configured to filter the output of the differential amplifying module 196.
Specifically, in the embodiment of the present invention, the filtering module 197 is configured to perform filtering processing on the output of the differential amplifying module 196, so as to improve the fidelity of the signal, and further improve the detection precision of the microfluidic device in the detection stage and the driving precision of the microfluidic device in the driving stage, so as to integrally improve the working performance of the microfluidic device.
Optionally, in another embodiment of the present invention, as shown in fig. 10, the detection circuit 19 further includes: a signal acquisition module 198.
The signal acquisition module 198 is configured to acquire the output of the filtering module 197 and forward the acquired output to the controller 191.
Optionally, in another embodiment of the present invention, referring to fig. 11, fig. 11 is a schematic structural diagram of a further detection circuit according to an embodiment of the present invention.
The detection circuit 19 further includes: voltage comparison circuit 199.
The capacitance detection module 194 is configured to convert the detected capacitance into a corresponding voltage value.
The voltage comparing circuit 199 is configured to directly output the output of the capacitance detecting module 194 to the controller 191 in a high level or a low level.
Specifically, in the embodiment of the present invention, the differential amplifying module 196, the filtering module 197 and the signal collecting module 198 shown in fig. 10 are replaced by the voltage comparing circuit 199, and the voltage signal output by the capacitance detecting module 194 is directly output to the controller 191 in a high level or low level manner by the voltage comparing circuit 199, so that the data collecting and processing flow can be greatly simplified.
Optionally, in another embodiment of the present invention, referring to fig. 12, fig. 12 is a schematic structural diagram of still another detection circuit according to an embodiment of the present invention; referring to fig. 13, fig. 13 is a schematic structural diagram of a detection circuit according to another embodiment of the present invention.
The detection circuit 19 further includes: a communication module 200; the communication module 200 is connected to the controller 191.
Specifically, in the embodiment of the present invention, the communication module 200 includes, but is not limited to, an SPI communication module, and by adding the communication module 200, the communication between a plurality of circuit boards can be used, so that the time sequence is ensured to be completely consistent, which is beneficial to synchronous testing of a plurality of subsequent microfluidic devices, and also beneficial to detection after the number of channels of the subsequent microfluidic devices is extended, and the like.
Optionally, based on the foregoing embodiment of the present invention, in another embodiment of the present invention, a control method of a microfluidic device is further provided, and referring to fig. 14, fig. 14 is a schematic flow chart of a control method of a microfluidic device provided in an embodiment of the present invention.
The control method is based on the microfluidic device described in the above embodiment, and the control method includes:
S101: under the detection mode, the controller controls the multichannel switch selection module to electrically connect the first electrode layer with the first capacitance detection end, electrically connect the first driving electrode to be detected with the second capacitance detection end, and further controls the driving module to conduct the first driving electrode with the second capacitance detection end, and further controls the capacitance detection module to conduct capacitance detection.
S102: in the driving mode, the controller controls the multi-channel switch selection module to connect the first electrode layer to the ground, and also controls the multi-channel switch selection module and the driving module to electrically connect a second driving electrode required to be driven with a driving voltage end so as to drive the liquid drops to move.
It should be noted that, the principle of the control method of the microfluidic device provided by the embodiment of the present invention is the same as the working principle of the microfluidic device provided by the foregoing embodiment of the present invention, and will not be described herein.
The above describes a microfluidic device and a control method thereof provided by the present invention in detail, and specific examples are applied herein to illustrate the principles and embodiments of the present invention, and the description of the above examples is only for helping to understand the method and core idea of the present invention; meanwhile, as those skilled in the art will have variations in the specific embodiments and application scope in accordance with the ideas of the present invention, the present description should not be construed as limiting the present invention in view of the above.
It should be noted that, in the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described as different from other embodiments, and identical and similar parts between the embodiments are all enough to be referred to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant points refer to the description of the method section.
It is further noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include, or is intended to include, elements inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (13)

1. A microfluidic device, wherein an operating mode of the microfluidic device comprises a detection mode and a drive mode, the microfluidic device comprising:
a first substrate and a second substrate disposed opposite to each other;
The first electrode layer is positioned on one side of the first substrate and faces the second substrate;
the first hydrophobic layer is positioned on one side of the first electrode layer facing the second substrate;
A driving electrode layer located on one side of the second substrate facing the first substrate, the driving electrode layer including a plurality of driving electrodes;
The second hydrophobic layer is positioned on one side of the driving electrode layer facing the first substrate;
a microfluidic channel between the first hydrophobic layer and the second hydrophobic layer for receiving a droplet;
a detection circuit electrically connected to the drive electrode layer and the first electrode layer, the detection circuit comprising: the device comprises a controller, a multichannel switch selection module, a driving module and a capacitance detection module, wherein the capacitance detection module comprises a first capacitance detection end and a second capacitance detection end;
The detection circuit further includes: the control end of the signal source is connected with the controller and is used for outputting signals with certain frequency and specific amplitude;
The capacitance detection module includes: the first diode, the second diode, the feedback capacitance unit, the first comparator and the second comparator;
The first end of the signal source is electrically connected with the first capacitance detection end, and the second end of the signal source is electrically connected with the non-inverting input end of the first comparator;
The inverting input end of the first comparator is electrically connected with the second capacitance detection end, the cathode of the first diode, the anode of the second diode and the first end of the feedback capacitance unit respectively;
the anode of the first diode and the cathode of the second diode are electrically connected with the non-inverting input end of the first comparator, and the cathode of the second diode is grounded;
the output end of the first comparator is electrically connected with the second end of the feedback capacitance unit and the non-inverting input end of the second comparator respectively;
The inverting input end of the second comparator is electrically connected with the output end of the second comparator and is used as the output end of the capacitance detection module;
The feedback capacitance unit comprises a plurality of parallel branches, and the branches are connected with a switch and a capacitor in series;
In the detection mode, the controller is used for controlling the multi-channel switch selection module to electrically connect the first electrode layer with the first capacitance detection end, electrically connect a first driving electrode to be detected with the second capacitance detection end, and is also used for controlling the driving module to conduct the first driving electrode with the second capacitance detection end, and controlling the capacitance detection module to perform capacitance detection;
In the driving mode, the controller is used for controlling the multi-channel switch selection module to connect the first electrode layer to the ground, and is also used for controlling the multi-channel switch selection module and the driving module to electrically connect a second driving electrode which needs to be driven with a driving voltage end so as to drive the liquid drops to move.
2. The microfluidic device of claim 1, wherein the drive electrode layer further comprises: a plurality of scanning lines, a plurality of detection lines and a plurality of switches;
The scanning lines extend along a first direction, and a plurality of scanning lines are sequentially arranged at intervals along a second direction;
the detection lines extend along the second direction, and a plurality of detection lines are sequentially arranged at intervals along the first direction;
A plurality of scanning lines and a plurality of detection lines are divided into a plurality of electrode areas, and a switch and a driving electrode are arranged in one electrode area;
the driving electrode is electrically connected with one end of the switch, the other end of the switch is electrically connected with the detection line, and the control end of the switch is electrically connected with the scanning line.
3. The microfluidic device of claim 2, wherein the multi-channel switch selection module comprises: a first port, a plurality of second ports, a third port, and a fourth port;
The first port is electrically connected with the first electrode layer, the second port is electrically connected with the detection line, the third port is electrically connected with the first capacitance detection end, and the fourth port is electrically connected with the second capacitance detection end.
4. The microfluidic device of claim 2, wherein the drive module comprises: a plurality of scanning control terminals;
the scanning control end is electrically connected with the scanning line.
5. The microfluidic device of claim 1, wherein the multi-channel switch selection module comprises: a first electrode layer control unit;
the first electrode layer control unit comprises a first resistor, a second resistor, a third resistor, a first triode and a first single-pole double-throw switch;
The first end of the first resistor receives a first control signal, the second end of the first resistor is respectively and electrically connected with the first end of the second resistor and the base electrode of the first triode, and the second end of the second resistor and the emitter electrode of the first triode are grounded;
The first end of the third resistor is electrically connected with the voltage control end, and the second end of the third resistor is electrically connected with the collector electrode of the first triode and the control end of the first single-pole double-throw switch respectively;
The first end of the first single-pole double-throw switch is electrically connected with the first electrode layer, the second end of the first single-pole double-throw switch is electrically connected with the first capacitance detection end, and the third end of the first single-pole double-throw switch is electrically connected with the grounding end.
6. The microfluidic device of claim 2, wherein the multi-channel switch selection module further comprises: the driving electrode control units are respectively corresponding to one detection line;
The driving electrode control unit includes: the third resistor is connected with the first resistor, the second resistor, the third resistor, the fourth resistor, the fifth resistor, the sixth resistor, the seventh resistor, the eighth resistor, the ninth resistor, the second triode, the third triode, the second single-pole double-throw switch and the third single-pole double-throw switch;
The first end of the fourth resistor receives a second control signal, the second end of the fourth resistor is respectively and electrically connected with the first end of the fifth resistor and the base electrode of the second triode, and the second end of the fifth resistor and the emitter electrode of the second triode are grounded;
the first end of the sixth resistor is electrically connected with the voltage control end, and the second end of the sixth resistor is electrically connected with the collector electrode of the second triode and the control end of the second single-pole double-throw switch respectively;
The first end of the second single-pole double-throw switch is electrically connected with the detection line, the second end of the second single-pole double-throw switch is electrically connected with the second capacitance detection end, and the third end of the second single-pole double-throw switch is electrically connected with the first end of the third single-pole double-throw switch;
the first end of the seventh resistor receives a third control signal, the second end of the seventh resistor is electrically connected with the first end of the eighth resistor and the base electrode of the third triode respectively, and the second end of the eighth resistor and the emitter electrode of the third triode are grounded;
the first end of the ninth resistor is electrically connected with the voltage control end, and the second end of the ninth resistor is electrically connected with the collector electrode of the third triode and the control end of the third single-pole double-throw switch respectively;
And the second end of the third single-pole double-throw switch floats, and the third end of the third single-pole double-throw switch is electrically connected with the driving voltage end.
7. The microfluidic device of claim 2, wherein the multi-channel switch selection module further comprises: the driving electrode control units are respectively corresponding to one detection line;
The driving electrode control unit includes: the second resistor, the fifth resistor, the sixth resistor, the second triode, the second single-pole double-throw switch and the field effect transistor;
The first end of the fourth resistor receives a second control signal, the second end of the fourth resistor is respectively and electrically connected with the first end of the fifth resistor and the base electrode of the second triode, and the second end of the fifth resistor and the emitter electrode of the second triode are grounded;
the first end of the sixth resistor is electrically connected with the voltage control end, and the second end of the sixth resistor is electrically connected with the collector electrode of the second triode and the control end of the second single-pole double-throw switch respectively;
The first end of the second single-pole double-throw switch is electrically connected with the detection line, the second end of the second single-pole double-throw switch is electrically connected with the second capacitance detection end, and the third end of the second single-pole double-throw switch is electrically connected with the first end of the field effect transistor;
The control end of the field effect transistor receives a third control signal, and the second end of the field effect transistor is electrically connected with the driving voltage end.
8. The microfluidic device of claim 1, wherein the detection circuit further comprises: a differential amplification module;
The capacitance detection module is used for converting the detected capacitance into a corresponding voltage value;
The differential amplification module is used for carrying out differential amplification processing on the output of the capacitance detection module.
9. The microfluidic device of claim 8, wherein the detection circuit further comprises: a filtering module;
the filtering module is used for filtering the output of the differential amplifying module.
10. The microfluidic device of claim 9, wherein the detection circuit further comprises: a signal acquisition module;
the signal acquisition module is used for acquiring the output of the filtering module and forwarding the output to the controller.
11. The microfluidic device of claim 1, wherein the detection circuit further comprises: a voltage comparison circuit;
The capacitance detection module is used for converting the detected capacitance into a corresponding voltage value;
The voltage comparison circuit is used for directly outputting the output of the capacitance detection module to the controller in a high level or low level mode.
12. The microfluidic device of claim 1, wherein the detection circuit further comprises: a communication module;
the communication module is connected with the controller.
13. A control method of a microfluidic device, characterized in that the control method is based on a microfluidic device according to any one of claims 1-12, the control method comprising:
In a detection mode, the controller controls the multi-channel switch selection module to electrically connect the first electrode layer with the first capacitance detection end, electrically connect the first driving electrode to be detected with the second capacitance detection end, and also controls the driving module to conduct the first driving electrode with the second capacitance detection end, and the controller also controls the capacitance detection module to carry out capacitance detection;
In the driving mode, the controller controls the multi-channel switch selection module to connect the first electrode layer to the ground, and also controls the multi-channel switch selection module and the driving module to electrically connect a second driving electrode required to be driven with a driving voltage end so as to drive the liquid drops to move.
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CN108816299A (en) * 2018-04-20 2018-11-16 京东方科技集团股份有限公司 Micro-fluidic substrate and its driving method, micro-total analysis system
CN111678423A (en) * 2020-07-09 2020-09-18 安图实验仪器(郑州)有限公司 Liquid drop detection system and detection method based on dielectric wetting digital microfluidics

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Publication number Priority date Publication date Assignee Title
CN109078661B (en) * 2018-08-09 2020-06-23 京东方科技集团股份有限公司 Micro-fluidic chip, detection and driving method thereof and lab-on-a-chip system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108816299A (en) * 2018-04-20 2018-11-16 京东方科技集团股份有限公司 Micro-fluidic substrate and its driving method, micro-total analysis system
CN111678423A (en) * 2020-07-09 2020-09-18 安图实验仪器(郑州)有限公司 Liquid drop detection system and detection method based on dielectric wetting digital microfluidics

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