CN115739222A - Microfluidic device and control method thereof - Google Patents
Microfluidic device and control method thereof Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 32
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- 239000007788 liquid Substances 0.000 claims abstract description 24
- 239000000758 substrate Substances 0.000 claims description 25
- 230000002209 hydrophobic effect Effects 0.000 claims description 12
- 238000001914 filtration Methods 0.000 claims description 11
- 230000003321 amplification Effects 0.000 claims description 10
- 239000003990 capacitor Substances 0.000 claims description 10
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- 238000012360 testing method Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
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- 230000004927 fusion Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
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Abstract
The invention provides a micro-fluidic device and a control method thereof, wherein the micro-fluidic device determines the functions of a first electrode layer and a driving electrode layer by sending different signals to the first electrode layer and the driving electrode layer based on different working modes of a detection circuit, when the first electrode layer and the driving electrode layer are used as detection electrodes, the variable quantity of capacitance values between each first driving electrode and the first electrode layer is tested through a capacitance detection module, and after the variable quantity of the capacitance values is transmitted to a controller, the controller can detect the position and the size of liquid drops in a micro-fluidic channel based on the detected variable quantity of the capacitance values; when the driving electrode layer is used as a driving electrode, the liquid drop in the microfluidic channel is driven, compared with the traditional microfluidic device, the photoelectric conversion structure does not need to be integrated in the microfluidic device, and under the condition of not increasing any process difficulty, the functions of detecting the position and the size of the liquid drop in the microfluidic channel, driving the liquid drop and the like can be met.
Description
Technical Field
The invention relates to the technical field of microfluidics, in particular to a microfluidic device and a control method thereof.
Background
The Micro-fluidic (Micro Fluidics) technology is a new interdisciplinary subject related to chemistry, fluid physics, microelectronics, new materials, biology and biomedical engineering, can accurately control the movement of liquid drops, realizes the operations of fusion, separation and the like of the liquid drops, completes various biochemical reactions, and is a technology which is mainly characterized by controlling the fluid in a micron-scale space. In recent years, the micro-fluidic chip is widely applied to the fields of biology, chemistry, medicine and the like by virtue of the advantages of small volume, low power consumption, low cost, less required samples and reagents, capability of realizing independent and accurate control of liquid drops, short detection time, high sensitivity, easiness in integration with other devices and the like.
The traditional micro-fluidic device adopts a photoelectric conversion technology, a photoelectric structure is added in a pixel, and an electric signal of each pixel area is obtained through the photoelectric conversion structure, so that related information of liquid drops is obtained; however, the related information of the liquid drop is detected by the photoelectric conversion technology, and there are problems that the chip structure is complex and the like, and the versatility is limited and the like, for example, by integrating a photoelectric structure in the microfluidic device, mask and process are added, and the use of some reagents sensitive to light on the microfluidic device is limited by light irradiation.
Disclosure of Invention
In view of the above, in order to solve the above problems, the present invention provides a microfluidic device and a control method thereof, and the technical scheme is as follows:
a microfluidic device having an operating mode comprising a detection mode and a drive mode, the microfluidic device comprising:
the first substrate and the second substrate are oppositely arranged;
the first electrode layer is positioned on the first substrate and faces one side of the second substrate;
the first hydrophobic layer is positioned on one side, facing the second substrate, of the first electrode layer;
the driving electrode layer is positioned on the second substrate and faces one side of the first substrate, and the driving electrode layer comprises a plurality of driving electrodes;
the second hydrophobic layer is positioned on one side, facing the first substrate, of the driving electrode layer;
a microfluidic channel between the first hydrophobic layer and the second hydrophobic layer for receiving a droplet;
a detection circuit electrically connected to the drive electrode layer and the first electrode layer, the detection circuit comprising: the multi-channel switch comprises a controller, a multi-channel switch selection module, a driving module and a capacitance detection module, wherein the capacitance detection module comprises a first capacitance detection end and a second capacitance detection end;
in the detection mode, the controller is configured to control the multi-channel switch selection module to electrically connect the first electrode layer with the first capacitance detection end and electrically connect the first driving electrode to be detected with the second capacitance detection end, and is further configured to control the driving module to conduct the first driving electrode with the second capacitance detection end, and control the capacitance detection module to perform capacitance detection;
in the driving mode, the controller is configured to control the multi-channel switch selection module to ground the first electrode layer, and the controller is further configured to control the multi-channel switch selection module and the driving module to electrically connect a second driving electrode to be driven with a driving voltage terminal so as to drive the droplet to move.
A method of controlling a microfluidic device, the method being based on the microfluidic device described above, the method comprising:
in a detection mode, the controller controls the multi-channel switch selection module to electrically connect the first electrode layer with the first capacitance detection end and electrically connect the first driving electrode to be detected with the second capacitance detection end, the controller also controls the driving module to conduct the first driving electrode with the second capacitance detection end, and the controller also controls the capacitance detection module to perform capacitance detection;
in a driving mode, the controller controls the multi-channel switch selection module to ground the first electrode layer, and also controls the multi-channel switch selection module and the driving module to electrically connect a second driving electrode to be driven with a driving voltage end so as to drive the liquid drop to move.
Compared with the prior art, the invention has the following beneficial effects:
the invention provides a micro-fluidic device, which is based on the fact that a detection circuit sends different signals to a first electrode layer and a driving electrode layer under different working modes of the micro-fluidic device to determine the functions of the first electrode layer and the driving electrode layer, when the first electrode layer and the driving electrode layer are used as detection electrodes, the variable quantity of capacitance values between each first driving electrode and the first electrode layer can be tested through a capacitance detection module, and after the variable quantity of the capacitance values is transmitted to a controller, the controller can detect the position and the size of liquid drops in a micro-fluidic channel on the basis of the detected variable quantity of the capacitance values; when the driving electrode layer is used as a driving electrode, the liquid drop in the microfluidic channel is driven, compared with the traditional microfluidic device, the photoelectric conversion structure does not need to be integrated in the microfluidic device, and under the condition of not increasing any process difficulty, the functions of detecting the position and the size of the liquid drop in the microfluidic channel, driving the liquid drop and the like can be met.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
Fig. 1 is a schematic cross-sectional structural view of a microfluidic device according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a detection circuit according to an embodiment of the present invention;
fig. 3 is a schematic top view of a driving electrode layer according to an embodiment of the present invention;
fig. 4 is a schematic circuit structure diagram of a first electrode layer control unit in a multi-channel switch selection module according to an embodiment of the present invention;
fig. 5 is a schematic circuit structure diagram of a driving electrode control unit in a multi-channel switch selection module according to an embodiment of the present invention;
fig. 6 is a schematic circuit diagram of a driving electrode control unit in another multi-channel switch selection module according to an embodiment of the present invention;
FIG. 7 is a schematic diagram of another detection circuit according to an embodiment of the present invention;
fig. 8 is a schematic structural diagram of a capacitance detection module according to an embodiment of the present invention;
fig. 9 is a schematic structural diagram of another capacitance detection module according to an embodiment of the present invention;
FIG. 10 is a schematic structural diagram of another detection circuit according to an embodiment of the present invention;
FIG. 11 is a schematic structural diagram of another detection circuit according to an embodiment of the present invention;
FIG. 12 is a schematic structural diagram of another detection circuit according to an embodiment of the present invention;
FIG. 13 is a schematic structural diagram of another detection circuit according to an embodiment of the present invention;
fig. 14 is a schematic flow chart of a control method of a microfluidic device according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
Referring to fig. 1, fig. 1 is a schematic cross-sectional structural diagram of a microfluidic device according to an embodiment of the present invention, where the microfluidic device includes:
a first substrate 11 and a second substrate 12 disposed opposite to each other.
And a first electrode layer 13 located on the first substrate 11 and facing the second substrate 12.
A first hydrophobic layer 14 on a side of the first electrode layer 13 facing the second substrate 12.
And a driving electrode layer 15 located on the second substrate 12 and facing the first substrate 11, wherein the driving electrode layer 15 includes a plurality of driving electrodes 151.
And a second hydrophobic layer 16 on a side of the driving electrode layer 15 facing the first substrate 11.
A microfluidic channel 17 located between the first hydrophobic layer 14 and the second hydrophobic layer 16 and adapted to receive a droplet.
It should be noted that, as shown in fig. 1, the microfluidic device further includes an array layer 18 located between the driving electrode layer 15 and the second substrate 12, the array layer 18 has a plurality of thin film transistors T therein, and the thin film transistors T form a circuit at least for controlling the electrode state of the driving electrodes 151 in the driving electrode layer 15 to achieve a specific function.
The operation mode of the microfluidic device includes a detection mode for detecting the position of the droplet in the microfluidic channel 17 and a driving mode for driving the droplet in the microfluidic channel 17 to move, and the specific principle thereof will be described in detail below.
As shown in fig. 1, the microfluidic device further includes: a detection circuit 19, where the detection circuit 19 is electrically connected to the driving electrode layer 15 and the first electrode layer 13, and referring to fig. 2, fig. 2 is a schematic structural diagram of a detection circuit according to an embodiment of the present invention, where the detection circuit 19 includes: the capacitive touch screen comprises a controller 191, a multi-channel switch selection module 192, a driving module 193 and a capacitance detection module 194, wherein the capacitance detection module comprises a first capacitance detection end C1 and a second capacitance detection end C2.
In the detection mode, the controller 191 is configured to control the multi-channel switch selection module 192 to electrically connect the first electrode layer 13 to the first capacitance detection end C1, and electrically connect the first driving electrode to be detected to the second capacitance detection end C2, the controller 191 is further configured to control the driving module 193 to enable the first driving electrode to be conducted with the second capacitance detection end C2, and the controller 191 is further configured to control the capacitance detection module 194 to perform capacitance detection.
In the driving mode, the controller 191 is configured to control the multi-channel switch selection module 192 to connect the first electrode layer 13 to ground, and the controller 191 is further configured to control the multi-channel switch selection module 192 and the driving module 193 to electrically connect the second driving electrode to be driven to the driving voltage terminal Dsx, so as to drive the liquid droplet to move.
Specifically, in the embodiment of the present invention, in the detection mode, the first electrode layer 13 is electrically connected to the first capacitance detection terminal C1, the first driving electrode to be detected is selected from the plurality of driving electrodes 151 of the driving electrode layer 15 to be electrically connected to the second capacitance detection terminal C2, and the first driving electrode to be detected is electrically connected to the second capacitance detection terminal C2, at this time, both the first electrode layer 13 and the first driving electrode to be detected are used as the detection electrodes, so that the capacitance detection module 194 can test the variation of the capacitance value between each first driving electrode and the first electrode layer 13, and after the variation of the capacitance value is transmitted to the controller 191, the controller 191 can detect the position and the size of the droplet in the microfluidic channel 17 based on the detected variation of the capacitance value.
In the driving mode, the first electrode layer 13 is grounded to serve as a shielding layer, and a second driving electrode to be driven is selected from the plurality of driving electrodes 151 of the driving electrode layer 15 and electrically connected to the driving voltage terminal Dsx, so as to drive the liquid droplet in the microfluidic channel 17.
In the process of the invention creation, the inventor finds that after the structure of the microfluidic device is prepared, the distance and the area between the first electrode layer 13 and each driving electrode 151 are fixed, and then when there is no droplet in the microfluidic channel 17, it indicates that the dielectric constant is different when the medium between the first electrode layer 13 and the driving electrode 151 is different, so that different capacitance values are corresponding; based on this principle, the presence or absence of a droplet in the micro flow channel 17 and the position of the droplet when the droplet is present can be detected by the amount of change in capacitance between the first electrode layer 13 and the drive electrode 151, and the size of the corresponding droplet can also be detected by the amount of change in capacitance accurately.
That is, in the embodiment of the present invention, the functions of the first electrode layer 13 and the driving electrode layer 15 are determined by the detection circuit 19 sending different signals to the first electrode layer 13 and the driving electrode layer 15 in different operation modes of the microfluidic device, when the first electrode layer 13 and the driving electrode layer 15 are used as detection electrodes, the capacitance detection module 194 can test the variation of the capacitance value between each first driving electrode and the first electrode layer 13, and after the variation of the capacitance value is sent to the controller 191, the controller 191 can detect the position and the size of the droplet in the microfluidic channel 17 based on the detected variation of the capacitance value; when the driving electrode layer 15 is used as a driving electrode, the driving of the liquid drop in the microfluidic channel 17 is realized, compared with the traditional microfluidic device, the photoelectric conversion structure does not need to be integrated in the microfluidic device, and the functions of detecting the position and size of the liquid drop in the microfluidic channel, driving the liquid drop and the like can be met under the condition of not increasing any process difficulty.
Optionally, in another embodiment of the present invention, referring to fig. 3, fig. 3 is a schematic top view structure diagram of a driving electrode layer according to an embodiment of the present invention.
The driving electrode layer 15 further includes: a plurality of scanning lines G1-Gn, a plurality of detection lines D1-Dn and a plurality of switches T.
The scanning lines G1-Gn extend along a first direction, and the scanning lines G1-Gn are sequentially arranged at intervals along a second direction.
The detection lines D1-Dn extend along the second direction, and a plurality of the detection lines D1-Dn are sequentially arranged at intervals along the first direction.
The plurality of scanning lines G1-Gn and the plurality of detection lines D1-Dn partition a plurality of electrode areas, and one of the electrode areas is provided with a switch T and a driving electrode 151.
The driving electrode 151 is electrically connected to one end of the switch T, the other end of the switch T is electrically connected to the detection lines D1 to Dn, and the control end of the switch T is electrically connected to the scan lines G1 to Gn.
Specifically, in the embodiment of the present invention, a plurality of electrode regions are exemplified as an array arrangement, where the first direction is parallel to a row direction of the array arrangement, and the second direction is parallel to a column direction of the array arrangement, and in the embodiment of the present invention, the switch T is a TFT (Thin Film Transistor).
In the detection mode, the controller 191 controls the multi-channel switch selection module 192 to electrically connect the first electrode layer 13 with the first capacitance detection terminal C1, and selects a first driving electrode to be detected from the plurality of driving electrodes 151 of the driving electrode layer 15 to electrically connect the first driving electrode with the second capacitance detection terminal C2, i.e., a detection line Dx corresponding to the first driving electrode to be detected is electrically connected with the second capacitance detection terminal C2; and the first driving electrode to be detected is conducted with the second capacitance detecting terminal C2, that is, the switch T corresponding to the first driving electrode to be detected is conducted with the second capacitance detecting terminal C2 by a signal transmitted on the scanning line Gx, that is, the first driving electrode to be detected is conducted with the second capacitance detecting terminal C2, that is, the first electrode layer 13 and the first driving electrode to be detected are both used as detecting electrodes, so that the capacitance detecting module 194 can detect the variation of the capacitance value between each first driving electrode and the first electrode layer 13, and after the variation of the capacitance value is transmitted to the controller 191, the controller 191 can detect the position and the size of the droplet in the microfluidic channel 17 based on the detected variation of the capacitance value.
In the driving mode, the controller 191 controls the multi-channel switch selection module 192 to ground the first electrode layer 13 to serve as a shielding layer, and selects a second driving electrode to be driven from the plurality of driving electrodes 151 of the driving electrode layer 15 to be electrically connected to the driving voltage terminal Dsx, that is, the detection line Dx corresponding to the second driving electrode to be driven is electrically connected to the driving voltage terminal Dsx, so as to drive the liquid drop in the microfluidic channel 17.
Optionally, in another embodiment of the present invention, as shown in fig. 2, the multi-channel switch selecting module includes: a first port, a plurality of second ports, a third port, and a fourth port;
the first port is electrically connected to the first electrode layer 13, the second port is electrically connected to the detection lines D1-Dn, the third port is electrically connected to the first capacitance detection terminal C1, and the fourth port is electrically connected to the second capacitance detection terminal C2.
The driving module includes: a plurality of scanning control terminals; the scanning control terminal is electrically connected with the scanning lines G1-Gn.
Specifically, in the embodiment of the present invention, a signal path for transmitting a driving voltage and a signal path for controlling a signal are further provided between the multi-channel switch selection module 192 and the driving module 193 to implement a specific function.
Optionally, in another embodiment of the present invention, referring to fig. 4, fig. 4 is a schematic circuit structure diagram of a first electrode layer control unit in a multi-channel switch selection module according to an embodiment of the present invention; referring to fig. 5, fig. 5 is a schematic circuit structure diagram of a driving electrode control unit in a multi-channel switch selection module according to an embodiment of the present invention.
The multi-channel switch selection module 192 includes: the first electrode layer control unit 192A.
The first electrode layer control unit 192A includes a first resistor R1, a second resistor R2, a third resistor R3, a first triode Q1, and a first single-pole double-throw switch SPDT1.
The first end of the first resistor R1 receives a first control signal EN _13, the second end of the first resistor R1 is respectively connected with the first end of the second resistor R2 and the base electrode of the first triode Q1, and the second end of the second resistor R2 and the emitter electrode of the first triode Q1 are both grounded.
A first end of the third resistor R3 is electrically connected to the voltage control terminal VCC, and a second end of the third resistor R3 is electrically connected to a collector of the first triode Q1 and the control terminal EN1 of the first single-pole double-throw switch SPDT1, respectively.
The first end S01 of the first SPDT1 is electrically connected to the first electrode layer 13, the second end SA1 of the first SPDT1 is electrically connected to the first capacitance detection end C1, and the third end SB1 of the first SPDT1 is electrically connected to a ground end GND.
The multi-channel switch selection module 192 further comprises: a plurality of driving electrode control units 192B, each of the driving electrode control units 192B corresponding to one of the sensing lines.
The driving electrode control unit 192B includes: the circuit comprises a fourth resistor R4, a fifth resistor R5, a sixth resistor R6, a seventh resistor R7, an eighth resistor R8, a ninth resistor R9, a second triode Q2, a third triode Q3, a second single-pole double-throw switch SPDT2 and a third single-pole double-throw switch SPDT3.
A first end of the fourth resistor R4 receives a second control signal EN _ Dx, a second end of the fourth resistor R4 is electrically connected to a first end of the fifth resistor R5 and a base of the second triode Q2, and a second end of the fifth resistor R5 and an emitter of the second triode Q2 are both grounded.
A first end of the sixth resistor R6 is electrically connected to the voltage control terminal VCC, and a second end of the sixth resistor R6 is electrically connected to the collector of the second triode Q2 and the control terminal EN2 of the second single-pole double-throw switch SPDT2, respectively.
The first end S02 of the second SPDT2 is electrically connected to the detection line Dx, the second end SA2 of the second SPDT2 is electrically connected to the second capacitance detection end C2, and the third end SB2 of the second SPDT2 is electrically connected to the first end S03 of the third SPDT3.
A first end of the seventh resistor R7 receives a third control signal Gsx, a second end of the seventh resistor R7 is electrically connected to the first end of the eighth resistor R8 and the base of the third triode Q3, respectively, and a second end of the eighth resistor R8 and the emitter of the third triode Q3 are both grounded.
A first end of the ninth resistor R9 is electrically connected to the voltage control terminal VCC, and a second end of the ninth resistor R9 is electrically connected to a collector of the third triode Q3 and a control terminal EN3 of the third single-pole double-throw switch SPDT3, respectively.
The second end SA3 of the third SPDT3 is floating, and the third end SB3 of the third SPDT3 is electrically connected to the driving voltage terminal Dsx.
Specifically, in the embodiment of the present invention, the first control signal EN _13, the second control signal EN _ Dx, and the third control signal Gsx are control signals output by the controller 191 and used for controlling the on state of the corresponding single-pole double-throw switch, so as to ensure that the detection line Dx corresponding to the first electrode layer 13 and the driving electrode is connected to different ports in different operating modes, so as to implement different functions, which is described in detail below:
in the detection mode, the controller 191 transmits a first control signal for disabling the first single-pole double-throw switch SPDT1 to the first electrode layer control unit 192A in the multi-channel switch selection module 192, so that the first electrode layer 13 is electrically connected to the first capacitance detection terminal C1; the controller 191 supplies a second control signal for disabling the second SPDT2 to the driving electrode control unit 192B corresponding to the row of the first driving electrode to be detected in the multi-channel switch selection module 192, and electrically connects the detection line Dx corresponding to the first driving electrode to be detected to the second capacitance detection terminal C2.
And then, the switch T corresponding to the first driving electrode to be detected is in a conducting state through a signal transmitted on the scanning line, so that the first driving electrode to be detected is conducted with the corresponding detection line, and further the first driving electrode to be detected is conducted with the second capacitance detection end C2.
That is to say, currently, the first electrode layer 13 and the first driving electrode to be detected are both used as the detecting electrode, so that the capacitance detecting module 194 can detect the variation of the capacitance between each first driving electrode and the first electrode layer 13, and after the variation of the capacitance is transmitted to the controller 191, the controller 191 can detect the position and the size of the droplet in the microfluidic channel 17 based on the detected variation of the capacitance.
In the driving mode, the controller 191 supplies a first control signal for enabling the first single pole double throw switch SPDT1 to the first electrode layer control unit 192A in the multi-channel switch selection module 192, and connects the first electrode layer 13 to the ground GND to serve as a shield layer; the controller 191 supplies a second control signal for enabling the second single pole double throw switch SPDT2 to all the drive electrode control units 192B in the multi-channel switch selection module 192, so that all the drive electrodes 151 in the drive electrode layer 15 are used as drive electrodes for driving the movement of liquid droplets; then, the controller 191 supplies a third control signal for enabling the third SPDT3 to the driving electrode control unit 192B corresponding to the row of the second driving electrode to be driven in the multi-channel switch selection module 192, electrically connects the detection line Dx corresponding to the second driving electrode to be driven to the driving voltage terminal Dsx, and receives the driving voltage for driving the droplet to move, and at this time, the controller 191 supplies the third control signal for disabling the third SPDT3 to the driving electrode control unit 192B corresponding to the row of the second driving electrode not to be driven in the multi-channel switch selection module 192, and the detection line Dx corresponding to the second driving electrode not to be driven is not electrically connected to the driving voltage terminal Dsx.
And then, the switch T corresponding to the second driving electrode to be driven is in a conducting state through a signal transmitted on the scanning line Gx, so that the second driving electrode to be driven is conducted with the corresponding detection line Dx to receive a driving voltage, thereby realizing the driving of the liquid drop in the microfluidic channel 17.
Optionally, in another embodiment of the present invention, referring to fig. 6, fig. 6 is a schematic circuit structure diagram of a driving electrode control unit in another multi-channel switch selection module according to an embodiment of the present invention.
The multi-channel switch selection module 192 further comprises: a plurality of driving electrode control units 192B, each of the driving electrode control units 192B corresponding to one of the detection lines Dx.
The driving electrode control unit 192B includes: the circuit comprises a fourth resistor R4, a fifth resistor R5, a sixth resistor R6, a second triode Q2, a second single-pole double-throw switch SPDT2 and a field effect transistor MOS.
A first end of the fourth resistor R4 receives a second control signal EN _ Dx, a second end of the fourth resistor R4 is electrically connected to a first end of the fifth resistor R5 and a base of the second triode Q2, and a second end of the fifth resistor R5 and an emitter of the second triode Q2 are both grounded.
A first end of the sixth resistor R6 is electrically connected to the voltage control terminal VCC, and a second end of the sixth resistor R6 is electrically connected to the collector of the second triode Q2 and the control terminal EN2 of the second single-pole double-throw switch SPDT2, respectively.
The first end S02 of the second SPDT2 is electrically connected to the detection line Dx, the second end SA2 of the second SPDT2 is electrically connected to the second capacitance detection end C2, and the third end SB2 of the second SPDT2 is electrically connected to the first end of the field effect transistor MOS.
The control end of the field effect transistor MOS receives a third control signal Gsx, and the second end of the field effect transistor MOS is electrically connected to the driving voltage end Dsx.
Specifically, in the embodiment of the present invention, compared with the circuit structure of the driving electrode control unit 192B shown in fig. 5, the circuit structure of the driving electrode control unit 192B shown in fig. 6 greatly simplifies the circuit structure and simplifies the manufacturing process of the microfluidic device under the condition that the same function can be realized.
It should be noted that the principle of the circuit structure of the driving electrode control unit 192B shown in fig. 6 is basically similar to that of the circuit structure of the driving electrode control unit 192B shown in fig. 5, and is not repeated here.
Optionally, in another embodiment of the present invention, referring to fig. 7, fig. 7 is a schematic structural diagram of another detection circuit provided in the embodiment of the present invention, and referring to fig. 8, fig. 8 is a schematic structural diagram of a capacitance detection module provided in the embodiment of the present invention.
The detection circuit 19 further includes: a signal source 195, a control terminal of the signal source 195 being connected to the controller 191 for outputting a signal of a certain frequency and a specific amplitude.
The capacitance detection module 194 includes: a first diode P1, a second diode P2, a feedback capacitance unit 194A, a first comparator B1, and a second comparator B2.
A first end of the signal source 195 is electrically connected to the first capacitance detection terminal C1, and a second end of the signal source 195 is electrically connected to a non-inverting input terminal of the first comparator B1.
An inverting input terminal of the first comparator B1 is electrically connected to the second capacitance detection terminal C2, the cathode of the first diode P1, the anode of the second diode P2, and the first terminal of the feedback capacitance unit 194A, respectively.
The anode of the first diode P1 and the cathode of the second diode P2 are both electrically connected to the non-inverting input terminal of the first comparator B1, and the cathode of the second diode P2 is grounded.
The output end of the first comparator B1 is electrically connected to the second end of the feedback capacitor unit 194A and the non-inverting input end of the second comparator B2, respectively.
An inverting input end of the second comparator B2 is electrically connected to an output end of the second comparator B2, and serves as an output end Vo of the capacitance detection module 194.
Specifically, in the embodiment of the present invention, referring to fig. 9, fig. 9 is a schematic structural diagram of another capacitance detection module provided in the embodiment of the present invention, where the feedback capacitance unit 194A includes a plurality of branches connected in parallel, and the branches are connected in series with a switch and a capacitor, as shown in fig. 9, S1 to S4 are four single-pole single-throw switches, it is obvious that a four-channel single-pole single-throw analog switch may also be designed, cn1 to Cn4 are feedback capacitances of different orders of magnitude or the same order of magnitude of different values, and Cx is a capacitance to be detected; the controller 191 selects the appropriate feedback capacitor Cf by controlling the switch state in the feedback capacitor unit 194A according to the detection requirement, and the controller 191 controls the signal source 195 to output a signal with a certain frequency and a specific amplitude Ui.
Based on the formula of U = q/C and the virtual short break of the ideal operational amplifier, vo = - (Cx/Cf) × Ui is known, that is, the capacitance detection module 194 may convert the detected capacitance into a corresponding voltage value and transmit the voltage value to the controller 191, so as to be logically processed by the controller 191.
It should be noted that, in the embodiment of the present invention, the number of branches of the feedback capacitor unit 194A is only illustrated by taking four as an example, and in other embodiments, the number of branches may be adaptively increased or decreased according to actual requirements.
Optionally, in another embodiment of the present invention, referring to fig. 10, fig. 10 is a schematic structural diagram of another detection circuit provided in the embodiment of the present invention.
The detection circuit 19 further includes: a differential amplification block 196.
The capacitance detection module 194 is configured to convert the detected capacitance into a corresponding voltage value.
The differential amplification module 196 is configured to perform differential amplification processing on the output of the capacitance detection module 194.
Specifically, in the embodiment of the present invention, the differential amplification module 196 is provided to increase the voltage amplification factor of the output voltage of the capacitance detection module 194.
Optionally, in another embodiment of the present invention, as shown in fig. 10, the detection circuit 19 further includes: a filtering module 197.
The filtering module 197 is configured to perform filtering processing on the output of the differential amplifying module 196.
Specifically, in the embodiment of the present invention, the filtering module 197 is arranged to perform filtering processing on the output of the differential amplification module 196, so as to improve the fidelity of the signal, further improve the detection precision of the microfluidic device in the detection stage and the driving precision in the driving stage, and improve the working performance of the microfluidic device as a whole.
Optionally, in another embodiment of the present invention, as shown in fig. 10, the detection circuit 19 further includes: a signal acquisition module 198.
The signal collection module 198 is configured to collect an output of the filtering module 197 and forward the output to the controller 191.
Optionally, in another embodiment of the present invention, referring to fig. 11, fig. 11 is a schematic structural diagram of another detection circuit provided in the embodiment of the present invention.
The detection circuit 19 further includes: a voltage comparison circuit 199.
The capacitance detection module 194 is configured to convert the detected capacitance into a corresponding voltage value.
The voltage comparison circuit 199 is configured to directly output the output of the capacitance detection module 194 to the controller 191 in a high level or a low level.
Specifically, in the embodiment of the present invention, the differential amplification module 196, the filtering module 197, and the signal acquisition module 198 shown in fig. 10 are entirely replaced by the voltage comparison circuit 199, and the voltage signal output by the capacitance detection module 194 is directly output to the controller 191 in a high level or low level manner through the voltage comparison circuit 199, so that the data acquisition and processing procedure can be greatly simplified.
Optionally, in another embodiment of the present invention, referring to fig. 12, fig. 12 is a schematic structural diagram of another detection circuit provided in the embodiment of the present invention; referring to fig. 13, fig. 13 is a schematic structural diagram of another detection circuit according to an embodiment of the present invention.
The detection circuit 19 further includes: a communication module 200; the communication module 200 is connected to the controller 191.
Specifically, in the embodiment of the present invention, the communication module 200 includes, but is not limited to, an SPI communication module, and the communication module 200 is additionally provided to be used for communication among a plurality of circuit boards, so that time sequences are completely consistent, thereby facilitating subsequent synchronous testing of a plurality of microfluidic devices, and facilitating subsequent detection after the number of channels of the microfluidic devices is expanded.
Optionally, based on the above embodiment of the present invention, in another embodiment of the present invention, a control method of a microfluidic device is further provided, referring to fig. 14, and fig. 14 is a schematic flow chart of the control method of the microfluidic device according to the embodiment of the present invention.
The control method is based on the microfluidic device in the embodiment, and comprises the following steps:
s101: in a detection mode, the controller controls the multi-channel switch selection module to electrically connect the first electrode layer with the first capacitance detection end, electrically connect the first driving electrode to be detected with the second capacitance detection end, and further controls the driving module to conduct the first driving electrode with the second capacitance detection end, and further controls the capacitance detection module to perform capacitance detection.
S102: in a driving mode, the controller controls the multi-channel switch selection module to ground the first electrode layer, and also controls the multi-channel switch selection module and the driving module to electrically connect a second driving electrode to be driven with a driving voltage end so as to drive the liquid drop to move.
It should be noted that the principle of the method for controlling the microfluidic device according to the embodiment of the present invention is the same as the working principle of the microfluidic device according to the above-mentioned embodiment of the present invention, and therefore, the details are not repeated herein.
The present invention provides a microfluidic device and a control method thereof, which are described in detail above, and the principle and the implementation of the present invention are explained in the present document by applying specific examples, and the description of the above examples is only used to help understanding the method and the core idea of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present invention.
It should be noted that, in this specification, each embodiment is described in a progressive manner, and each embodiment focuses on differences from other embodiments, and portions that are the same as and similar to each other in each embodiment may be referred to. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.
It is further noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include or include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising a … …" does not exclude the presence of another identical element in a process, method, article, or apparatus that comprises the element.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (15)
1. A microfluidic device, wherein an operating mode of the microfluidic device comprises a detection mode and a drive mode, the microfluidic device comprising:
the first substrate and the second substrate are oppositely arranged;
the first electrode layer is positioned on the first substrate and faces one side of the second substrate;
the first hydrophobic layer is positioned on one side, facing the second substrate, of the first electrode layer;
the driving electrode layer is positioned on the second substrate and faces one side of the first substrate, and the driving electrode layer comprises a plurality of driving electrodes;
the second hydrophobic layer is positioned on one side, facing the first substrate, of the driving electrode layer;
a microfluidic channel between the first hydrophobic layer and the second hydrophobic layer for receiving a droplet;
a detection circuit electrically connected to the drive electrode layer and the first electrode layer, the detection circuit comprising: the multi-channel switch comprises a controller, a multi-channel switch selection module, a driving module and a capacitance detection module, wherein the capacitance detection module comprises a first capacitance detection end and a second capacitance detection end;
in the detection mode, the controller is configured to control the multi-channel switch selection module to electrically connect the first electrode layer with the first capacitance detection end and electrically connect the first driving electrode to be detected with the second capacitance detection end, and is further configured to control the driving module to conduct the first driving electrode with the second capacitance detection end, and control the capacitance detection module to perform capacitance detection;
in the driving mode, the controller is configured to control the multi-channel switch selection module to ground the first electrode layer, and the controller is further configured to control the multi-channel switch selection module and the driving module to electrically connect a second driving electrode to be driven with a driving voltage terminal, so as to drive the droplet to move.
2. The microfluidic device according to claim 1, wherein the driving electrode layer further comprises: a plurality of scan lines, a plurality of detection lines, and a plurality of switches;
the scanning lines extend along a first direction, and the scanning lines are sequentially arranged at intervals along a second direction;
the detection lines extend along the second direction, and the detection lines are sequentially arranged at intervals along the first direction;
a plurality of scanning lines and a plurality of detection lines are used for dividing a plurality of electrode areas, and one electrode area is provided with a switch and a driving electrode;
the driving electrode is electrically connected with one end of the switch, the other end of the switch is electrically connected with the detection line, and the control end of the switch is electrically connected with the scanning line.
3. The microfluidic device according to claim 2, wherein the multi-channel switch selection module comprises: a first port, a plurality of second ports, a third port, and a fourth port;
the first port is electrically connected with the first electrode layer, the second port is electrically connected with the detection line, the third port is electrically connected with the first capacitance detection end, and the fourth port is electrically connected with the second capacitance detection end.
4. The microfluidic device according to claim 2, wherein the driving module comprises: a plurality of scanning control terminals;
the scanning control end is electrically connected with the scanning line.
5. The microfluidic device according to claim 1, wherein the multi-channel switch selection module comprises: a first electrode layer control unit;
the first electrode layer control unit comprises a first resistor, a second resistor, a third resistor, a first triode and a first single-pole double-throw switch;
a first end of the first resistor receives a first control signal, a second end of the first resistor is respectively and electrically connected with a first end of the second resistor and a base electrode of the first triode, and a second end of the second resistor and an emitting electrode of the first triode are both grounded;
the first end of the third resistor is electrically connected with a voltage control end, and the second end of the third resistor is respectively electrically connected with the collector electrode of the first triode and the control end of the first single-pole double-throw switch;
the first end of the first single-pole double-throw switch is electrically connected with the first electrode layer, the second end of the first single-pole double-throw switch is electrically connected with the first capacitance detection end, and the third end of the first single-pole double-throw switch is electrically connected with the grounding end.
6. The microfluidic device according to claim 2, wherein the multi-channel switch selection module further comprises: a plurality of driving electrode control units, each of the driving electrode control units corresponding to one of the detection lines;
the driving electrode control unit includes: the first resistor, the second resistor, the third resistor, the fourth resistor, the fifth resistor, the sixth resistor, the seventh resistor, the eighth resistor, the ninth resistor, the second triode, the third triode, the second single-pole double-throw switch and the third single-pole double-throw switch;
a first end of the fourth resistor receives a second control signal, a second end of the fourth resistor is respectively and electrically connected with a first end of the fifth resistor and a base electrode of the second triode, and a second end of the fifth resistor and an emitting electrode of the second triode are both grounded;
a first end of the sixth resistor is electrically connected with a voltage control end, and a second end of the sixth resistor is respectively electrically connected with a collector of the second triode and a control end of the second single-pole double-throw switch;
a first end of the second single-pole double-throw switch is electrically connected with the detection line, a second end of the second single-pole double-throw switch is electrically connected with the second capacitance detection end, and a third end of the second single-pole double-throw switch is electrically connected with a first end of the third single-pole double-throw switch;
a first end of the seventh resistor receives a third control signal, a second end of the seventh resistor is respectively electrically connected with a first end of the eighth resistor and a base of the third triode, and a second end of the eighth resistor and an emitter of the third triode are both grounded;
a first end of the ninth resistor is electrically connected with the voltage control end, and a second end of the ninth resistor is respectively electrically connected with a collector of the third triode and the control end of the third single-pole double-throw switch;
the second end of the third single-pole double-throw switch is floating, and the third end of the third single-pole double-throw switch is electrically connected with the driving voltage end.
7. The microfluidic device according to claim 2, wherein the multi-channel switch selection module further comprises: a plurality of driving electrode control units, each of which corresponds to one of the detection lines;
the driving electrode control unit includes: the fourth resistor, the fifth resistor, the sixth resistor, the second triode, the second single-pole double-throw switch and the field effect transistor;
a first end of the fourth resistor receives a second control signal, a second end of the fourth resistor is respectively and electrically connected with a first end of the fifth resistor and a base electrode of the second triode, and a second end of the fifth resistor and an emitting electrode of the second triode are both grounded;
a first end of the sixth resistor is electrically connected with a voltage control end, and a second end of the sixth resistor is respectively electrically connected with a collector of the second triode and a control end of the second single-pole double-throw switch;
a first end of the second single-pole double-throw switch is electrically connected with the detection line, a second end of the second single-pole double-throw switch is electrically connected with the second capacitance detection end, and a third end of the second single-pole double-throw switch is electrically connected with a first end of the field effect transistor;
and the control end of the field effect transistor receives a third control signal, and the second end of the field effect transistor is electrically connected with the driving voltage end.
8. The microfluidic device according to claim 1, wherein the detection circuit further comprises: the control end of the signal source is connected with the controller and used for outputting a signal with a certain frequency and a specific amplitude;
the capacitance detection module includes: the circuit comprises a first diode, a second diode, a feedback capacitor unit, a first comparator and a second comparator;
the first end of the signal source is electrically connected with the first capacitance detection end, and the second end of the signal source is electrically connected with the non-inverting input end of the first comparator;
the inverting input end of the first comparator is electrically connected with the second capacitor detection end, the cathode of the first diode, the anode of the second diode and the first end of the feedback capacitor unit respectively;
the anode of the first diode and the cathode of the second diode are both electrically connected with the non-inverting input end of the first comparator, and the cathode of the second diode is grounded;
the output end of the first comparator is electrically connected with the second end of the feedback capacitor unit and the non-inverting input end of the second comparator respectively;
and the inverting input end of the second comparator is electrically connected with the output end of the second comparator and is used as the output end of the capacitance detection module.
9. The microfluidic device according to claim 8, wherein the feedback capacitance unit comprises a plurality of parallel branches, and the branches are connected in series with a switch and a capacitor.
10. The microfluidic device according to claim 1, wherein the detection circuit further comprises: a differential amplification module;
the capacitance detection module is used for converting the detected capacitance into a corresponding voltage value;
and the differential amplification module is used for carrying out differential amplification processing on the output of the capacitance detection module.
11. The microfluidic device according to claim 10, wherein the detection circuit further comprises: a filtering module;
the filtering module is used for filtering the output of the differential amplifying module.
12. The microfluidic device according to claim 11, wherein the detection circuit further comprises: a signal acquisition module;
the signal acquisition module is used for acquiring the output of the filtering module and forwarding the output to the controller.
13. The microfluidic device according to claim 1, wherein the detection circuit further comprises: a voltage comparison circuit;
the capacitance detection module is used for converting the detected capacitance into a corresponding voltage value;
the voltage comparison circuit is used for directly outputting the output of the capacitance detection module to the controller in a high level or low level mode.
14. The microfluidic device according to claim 1, wherein the detection circuit further comprises: a communication module;
the communication module is connected with the controller.
15. A method for controlling a microfluidic device, the method being based on the microfluidic device according to any one of claims 1 to 14, the method comprising:
in a detection mode, the controller controls the multi-channel switch selection module to electrically connect the first electrode layer with the first capacitance detection end and electrically connect the first driving electrode to be detected with the second capacitance detection end, the controller also controls the driving module to conduct the first driving electrode with the second capacitance detection end, and the controller also controls the capacitance detection module to perform capacitance detection;
in a driving mode, the controller controls the multi-channel switch selection module to ground the first electrode layer, and also controls the multi-channel switch selection module and the driving module to electrically connect a second driving electrode to be driven with a driving voltage end so as to drive the liquid drop to move.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108816299A (en) * | 2018-04-20 | 2018-11-16 | 京东方科技集团股份有限公司 | Micro-fluidic substrate and its driving method, micro-total analysis system |
| CN111678423A (en) * | 2020-07-09 | 2020-09-18 | 安图实验仪器(郑州)有限公司 | Liquid drop detection system and detection method based on dielectric wetting digital microfluidics |
| US20210322973A1 (en) * | 2018-08-09 | 2021-10-21 | Beijing Boe Optoelectronics Technology Co., Ltd. | Microfluidic chip, detecting and driving method thereof, and on-chip laboratory system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108816299A (en) * | 2018-04-20 | 2018-11-16 | 京东方科技集团股份有限公司 | Micro-fluidic substrate and its driving method, micro-total analysis system |
| US20210322973A1 (en) * | 2018-08-09 | 2021-10-21 | Beijing Boe Optoelectronics Technology Co., Ltd. | Microfluidic chip, detecting and driving method thereof, and on-chip laboratory system |
| CN111678423A (en) * | 2020-07-09 | 2020-09-18 | 安图实验仪器(郑州)有限公司 | Liquid drop detection system and detection method based on dielectric wetting digital microfluidics |
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