CN115733038A - Turbulence-stabilized discharge tube - Google Patents
Turbulence-stabilized discharge tube Download PDFInfo
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- CN115733038A CN115733038A CN202211443479.7A CN202211443479A CN115733038A CN 115733038 A CN115733038 A CN 115733038A CN 202211443479 A CN202211443479 A CN 202211443479A CN 115733038 A CN115733038 A CN 115733038A
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Abstract
The present invention provides a discharge tube with stable turbulence, comprising: the air inlet pipe is connected with the air inlet pipe; the inner diameter of the turning section is circular, and the surface of the inner diameter of the turning section is provided with a turbulence generator which is a spiral protrusion; the air inlet pipe is arranged on the side surface close to the initial end of the turning section, the air inlet pipe is arranged along the spiral direction of the turbulence generator and towards the discharge section, and the arrangement angle of the air inlet pipe is the same as the spiral angle of the turbulence generator; the air inlet pipe is arranged between two adjacent spiral bulges of the turbulence generator; the discharging section is hermetically connected with the turning section, and a discharging electrode is arranged on the outer side of the discharging section. The invention uses the spiral turbulence generator to lead the turbulence of the mixed gas 3 to be more sufficient and the gas to be more evenly mixed, the gas inlet is arranged along the winding direction of the turbulence generator, and the non-vertical incidence mode is adopted, thus effectively reducing the pressure loss and the temperature rise.
Description
Technical Field
The invention relates to the technical field of extreme ultraviolet lithography, and particularly provides a discharge tube with stable turbulence for a radio frequency discharge axial flow laser or amplifier.
Background
Radio frequency axial flow CO 2 The laser or amplifier is widely applied to the fields of laser processing, LPP-EUV photoetching and the like, and radio frequency axial flow CO 2 Laser CO discharge compared to dc 2 The laser has the advantages of high injection power, long service life of devices and the like. Radio frequency axial flow CO 2 The mixed gas of the laser firstly enters the discharge tube through a gas inlet of the discharge tube, the gas has radial velocity and axial velocity, the radio frequency discharge electrode injects energy into the mixed gas of the discharge tube after passing through a power supply and a matching network, the mixed gas forms plasma and free electrons with certain density due to the radio frequency discharge effect, and the free electrons and CO 2 The molecules colliding directly or with N 2 Molecules, etc. collide indirectly to form reversed particles, i.e. CO is generated 2 Gain of laser output. Radio frequency fast axial flow CO 2 The discharge tube structure of laser or amplifier greatly determines the discharge time stability and space stability, and is radio frequency axial flow CO 2 The core component of the laser.
Existing radio frequency fast axial flow CO 2 The laser discharge tube mainly comprises a gas inlet, a turning section, a discharge section, a gas outlet and a discharge electrode, wherein firstly mixed gas enters the turning section through the gas inlet, the gas transmission direction is consistent with the gas flow transmission direction of the discharge tube after turning, the mixed gas enters the discharge section after being transmitted for a certain distance, the discharge electrode is arranged outside the discharge section, and the laser gain area is arranged in the laser gain area. Existing radio frequency fast axial flow CO 2 The laser discharge tube leads to insufficient turbulence because of lacking perfect turbulence generating device, and the turbulence intensity is inhomogeneous, consequently causes gain and beam intensity homogeneity to descend, does not fully utilize discharge capacity, and in addition, current discharge tube air inlet is strict vertical structure with the turn-over section, and the regional pressure that directly blows at the turn-over section is great, and gas temperature rise is more obvious.
Disclosure of Invention
The invention provides a discharge tube with stable turbulent flow, which is mainly characterized in that a spiral turbulent flow generator is added in a turning section to generate disturbance on gas, so that high-uniformity and sufficient turbulent flow airflow is quickly generated, and the discharge tube has a guiding function on the airflow.
The invention provides a discharge tube with stable turbulence, comprising: the air inlet pipe is connected with the air inlet pipe;
the inner diameter of the turning section is circular, and the surface of the inner diameter of the turning section is provided with a turbulence generator which is a spiral protrusion;
the air inlet pipe is arranged on the side surface close to the initial end of the turning section, the air inlet pipe is arranged along the spiral direction of the turbulence generator and towards the discharge section, and the arrangement angle of the air inlet pipe is the same as the spiral angle of the turbulence generator; the air inlet pipe is arranged between two adjacent spiral bulges of the turbulence generator;
the discharging section is hermetically connected with the turning section, and a discharging electrode is arranged on the outer side of the discharging section.
Preferably, the helical projection of the turbulence generator has a helix angle of between 5 and 30 degrees.
Preferably, the number of convex turns of the spiral-shaped protrusion of the turbulence generator is 1.5 or more turns.
Preferably, the spiral inner diameter of the turbulence generator is the same as the inner diameter of the discharge section.
Preferably, a smooth transition structure exists between the turning section and the discharging section.
Preferably, the discharge section is nested in the smooth transition structure, and a rubber ring is arranged at the nesting position to ensure air tightness.
Compared with the prior art, the invention can obtain the following beneficial effects:
compared with the existing discharge tube, the spiral turbulence generator is used in the invention, so that the mixed gas turbulence of the discharge tube is more sufficient, and the gas is more uniformly mixed; the air inlet is arranged along the winding direction of the turbulence generator, and a non-vertical incidence mode is adopted, so that the pressure loss and the temperature rise are effectively reduced.
The invention has short length of the turning section, is beneficial to reducing the size of the whole laser, and has simple structure and low manufacturing cost.
Drawings
FIG. 1 is a schematic diagram of a conventional RF fast axial-flow CO2 laser discharge tube in the prior art;
FIG. 2 is a front view of a turbulence stabilized discharge tube provided in accordance with an embodiment of the invention;
FIG. 3 is a top view of a turbulence stabilized discharge tube provided in accordance with an embodiment of the invention;
FIG. 4 is a schematic illustration of a mixed gas in a turbulence stabilized discharge tube provided in accordance with an embodiment of the invention;
fig. 5 is a schematic diagram of a structure in a turbulence stabilized discharge tube provided in accordance with an embodiment of the invention.
Wherein the reference numerals include:
the device comprises a pipe wall 1 of a turning section, a turbulence generator 2, mixed gas 3, an air inlet pipe 4, a discharge section 5, a discharge electrode 6, a smooth transition structure 7 and an initial end 8 of the turning section.
Detailed Description
Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the following description, like modules are denoted by like reference numerals. In the case of the same reference numerals, their names and functions are also the same. Therefore, detailed description thereof will not be repeated.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not to be construed as limiting the invention.
Fig. 1 shows the structure of a prior art rf fast axial flow CO2 laser discharge tube.
As shown in fig. 1, the conventional rf fast axial flow CO2 laser discharge tube lacks a perfect turbulence generator, so that the turbulence is insufficient, the turbulence intensity is not uniform enough, the gain and beam intensity uniformity is reduced, the discharge capacity is not fully utilized, and the gas inlet and the turning section of the conventional discharge tube are strictly vertical structures, so that the temperature rise of the gas in the area directly blown at the turning section is obvious.
Fig. 2 illustrates a front view of a turbulence stabilized discharge tube provided in accordance with an embodiment of the present invention.
Fig. 3 shows a top view of a turbulence stabilized discharge vessel provided in accordance with an embodiment of the invention.
Fig. 4 illustrates mixed gas in a turbulence stabilized discharge tube provided in accordance with an embodiment of the present invention.
Fig. 5 shows a schematic diagram of a structure in a turbulence stabilized discharge tube provided in accordance with an embodiment of the invention.
As shown in fig. 2, 3, 4, and 5, an embodiment of the present invention provides a turbulence-stabilized discharge tube, including: a turning section, an air inlet pipe 4 and a discharge section 5.
The internal diameter of the section of turning over is circular, and the pipe wall 1 of the section of turning over adopts metal or the higher non-metal processing of intensity to form, and the internal diameter surface of the pipe wall 1 of the section of turning over is provided with turbulence generator 2, and turbulence generator 2 is the heliciform arch, and turbulence generator 2's heliciform arch can be formed by cylindrical or cuboid spiral processing, or is formed by mould processing. The spiral turn number of the spiral bulge of the turbulence generator 2 is not too much or too little, the distance of the turning section is increased too much, the integral volume of the device is increased, certain gas pressure is lost, the turbulence is insufficient when the spiral turn number is too little, and the sufficiency and uniformity of the turbulence of the mixed gas 3 are not up to standard.
The air inlet pipe 4 is arranged on the side surface close to the initial end 8 of the turning section, the air inlet pipe 4 is arranged along the spiral direction of the turbulence generator 2 and faces the discharge section 5, and the arrangement angle of the air inlet pipe 4 is the same as the spiral angle of the turbulence generator 2; the air inlet pipe 4 is arranged between two adjacent helical protrusions of the turbulence generator 2.
The discharge section 5 is hermetically connected with the turning section, electrodes of a gas laser different from direct-current discharge are distributed in an electric tube in the axial direction, a discharge electrode 6 of the radio-frequency discharge laser is arranged on the outer side of the discharge section 5, the discharge section 5 generally adopts a glass tube, and the discharge electrode 6 can adopt discharge electrodes of different shapes, such as spiral discharge electrodes corresponding to a flow field.
In order to ensure the uniformity of the flow rate of the mixed gas 3, the inner diameter of the gas inlet 4, the spiral inner diameter of the turbulence generator and the inner diameter of the discharge section 5 are the same. Because the material of the turning section is different from that of the discharging section, and the inner diameter is different, a smooth transition structure 7 with smooth and round inner wall is arranged between the turning section and the discharging section 5, and the smooth transition structure 7 is generally made of metal material or nonmetal material with higher hardness. In order to ensure the air tightness, the discharging section is nested in the smooth transition structure 7, and a rubber ring is arranged at the nesting position and used for ensuring the air tightness.
The invention can be applied to various gas lasers or amplifiers which need radio frequency discharge, such as HF lasers and the like.
While embodiments of the present invention have been shown and described above, it should be understood that the above embodiments are exemplary and should not be taken as limiting the invention. Variations, modifications, substitutions and alterations of the above-described embodiments may be made by those of ordinary skill in the art without departing from the scope of the present invention.
The above embodiments of the present invention should not be construed as limiting the scope of the present invention. Any other corresponding changes and modifications made according to the technical idea of the present invention should be included in the protection scope of the claims of the present invention.
Claims (6)
1. A turbulence-stabilized discharge tube, comprising: the air inlet pipe is connected with the air inlet pipe;
the inner diameter of the turning section is circular, and the surface of the inner diameter of the turning section is provided with a turbulence generator which is a spiral protrusion;
the air inlet pipe is arranged on the side surface close to the initial end of the turning section, the air inlet pipe is arranged along the spiral direction of the turbulence generator and towards the discharge section, and the arrangement angle of the air inlet pipe is the same as the spiral angle of the turbulence generator; the air inlet pipe is arranged between two adjacent spiral protrusions of the turbulence generator;
the discharging section is hermetically connected with the turning section, and a discharging electrode is arranged on the outer side of the discharging section.
2. The turbulence-stabilized discharge tube of claim 1, wherein a helix angle of the helical projection of the turbulence generator is between 5 degrees and 30 degrees.
3. The turbulence stabilized discharge tube of claim 1, wherein the helical projection of the turbulence generator has a number of raised turns of 1.5 turns or more.
4. The turbulence stabilized discharge tube of claim 1, wherein the helical inner diameter of the turbulence generator is the same as the discharge segment inner diameter.
5. The turbulence stabilized discharge tube of claim 1, wherein a smooth transition structure exists between the folded section and the discharge section.
6. The turbulence stabilized discharge tube of claim 5, wherein the discharge section is nested within the smooth transition structure, the nesting being provided with a rubber ring for ensuring air-tightness.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211443479.7A CN115733038A (en) | 2022-11-18 | 2022-11-18 | Turbulence-stabilized discharge tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211443479.7A CN115733038A (en) | 2022-11-18 | 2022-11-18 | Turbulence-stabilized discharge tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115733038A true CN115733038A (en) | 2023-03-03 |
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ID=85296416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211443479.7A Pending CN115733038A (en) | 2022-11-18 | 2022-11-18 | Turbulence-stabilized discharge tube |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115733038A (en) |
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2022
- 2022-11-18 CN CN202211443479.7A patent/CN115733038A/en active Pending
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