CN115728517B - Non-linear measurement tool and device for calibration-free accelerometer - Google Patents
Non-linear measurement tool and device for calibration-free accelerometer Download PDFInfo
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- 238000005259 measurement Methods 0.000 title claims abstract description 35
- 238000012360 testing method Methods 0.000 claims abstract description 167
- 238000012546 transfer Methods 0.000 claims abstract description 12
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 12
- 229910052782 aluminium Inorganic materials 0.000 claims description 12
- 238000002161 passivation Methods 0.000 claims description 3
- 239000011241 protective layer Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 description 13
- 230000008569 process Effects 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000013461 design Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000003068 static effect Effects 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
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Abstract
The invention provides a calibration-free nonlinear measurement tool and device for an accelerometer. This measurement frock includes: a transfer base; the plane axial test mounting plate and the Z-axis test mounting plate are detachably arranged on the switching base and are not simultaneously connected with the switching base, and when the plane axial test is required, the plane axial test mounting plate is connected with the switching base; when Z-axis test is required, the Z-axis test mounting plate is connected with the adapter base; a test circuit mounting board; the test circuit mounting board is fixedly mounted on the adapter base, the test circuit mounting board is provided with a hollowed-out through hole c, a plurality of test circuit board mounting holes are formed in the circumference of the hollowed-out through hole c, and the test circuit board is fixed on the test circuit board through the test circuit board mounting holes. The tool has the characteristics of replaceability and no repeated calibration, so that the test flow is simplified, the test efficiency is greatly improved, and the precision is improved.
Description
Technical Field
The invention relates to the technical field of silicon micro-electromechanical accelerometer nonlinearity measurement, in particular to a calibration-free nonlinear measurement tool for an accelerometer. In particular to a tool for rapidly measuring the nonlinearity of an accelerometer by a detachable modularized gauge outfit in the centrifugal test process of a silicon micro-electromechanical accelerometer.
Background
The development of new generation weapons and the upgrading of active weapons are more urgent in demand for miniaturized and low-power-consumption accelerometers, and silicon micro-electromechanical accelerometers are widely used in navigation systems due to the advantages of high sensitivity, small temperature drift, good damping characteristics, high integration level and the like, so that the silicon micro-electromechanical accelerometers are the optimal choice for realizing miniaturization of the current weapon systems.
Centrifugal testing is a method by which an accelerometer measures scale factor linearity, which typically requires that the silicon microelectromechanical accelerometer be tested centrifugally in order to verify its environmental suitability. In the test of the centrifugal machine, an IEEE model, an IEEE method and an IEEE data processing method are adopted, the accelerometer needs to be installed on the centrifugal machine (the precision is 10-5) through a special fixture, the sensitive axis is parallel to the action axis of centrifugal acceleration, and the accelerometer needs to be installed positively and negatively respectively to measure the scale factor symmetry in two directions. In the testing process, the tool is required to be disassembled to adjust the testing direction, and the static radius of the positive test is inconsistent with the static radius of the negative test due to the influence of the tool structure, so that the static radius of the positive test is required to be measured before the test. The disassembly of the tool not only consumes time, but also can cause the screw thread loss of the test board of the centrifugal machine, the service life of equipment is influenced, and the static radius calibration also greatly influences the test speed.
Disclosure of Invention
The present invention aims to solve at least one of the technical problems existing in the prior art.
Therefore, the invention provides a calibration-free nonlinear measurement tool and device for an accelerometer.
The technical scheme of the invention is as follows:
according to an aspect, there is provided an accelerometer calibration-free nonlinear measurement tool, the measurement tool comprising:
the adapter base is arranged on the centrifugal machine and fixedly connected with the centrifugal machine;
the plane axial test mounting plate and the Z-axis test mounting plate are detachably arranged on the switching base and are not simultaneously connected with the switching base, and when the plane axial test is required, the plane axial test mounting plate is connected with the switching base; when Z-axis test is needed, the Z-axis test mounting plate is connected with the adapter base, wherein,
the middle part of the plane axial test mounting plate is provided with a hollowed-out through hole a, the hollowed-out through hole a is perpendicular to the adapter base, when the accelerometer is connected with the plane axial test mounting plate, the hollowed-out through hole a prevents related elements of the accelerometer from contacting with the plane axial test mounting plate, when positive and negative tests are carried out, the center of a sensitive structure of the accelerometer is always positioned at the same position of the mounting plate, and when the accelerometer is tested, the radius of one direction only needs to be calibrated;
the Z-axis test mounting plate comprises a first connecting plate and a second connecting plate which are integrally formed, wherein the first connecting plate is used for being connected with the transfer base plate, the second connecting plate is fixedly arranged on the first connecting plate, the second connecting plate is also vertically arranged with the transfer base, the second connecting plate is provided with a hollowed-out through hole b, the hollowed-out through hole b is arranged in parallel with the transfer base, a plurality of accelerometer mounting blocks are uniformly arranged on the inner wall of the hollowed-out through hole b at intervals in the circumferential direction, and when the accelerometer is connected with the Z-axis test mounting plate, the acceleration is arranged in the hollowed-out through hole b and is connected with the accelerometer mounting blocks;
the test circuit mounting board, test circuit mounting board fixed mounting is in on the adapter base, test circuit mounting board has fretwork through-hole c, wherein, follows fretwork through-hole c circumference has a plurality of test circuit board mounting holes, and test circuit board passes through test circuit board mounting hole is fixed on the test circuit board, fretwork through-hole c is located test circuit board under.
Further, the measuring tool further comprises a connecting wire fixing plate, and the connecting wire fixing plate is fixedly arranged on the switching base and used for pressing corresponding test wires of the test circuit board.
Further, the adapter base is made of aluminum, and a protective layer is formed on the surface of the adapter base through passivation means so as to insulate the accelerometer.
Further, the test circuit mounting plate is made of aluminum.
Further, a steel wire thread sleeve is arranged in a fixing hole connected with the adapter base through the test circuit mounting plate.
Further, the planar axial test mounting plate is made of aluminum.
Further, the connecting wire fixing plate is made of aluminum.
According to another aspect, a calibration-free nonlinear measurement device of an accelerometer is provided, and the device comprises a centrifugal machine, a test circuit board and the measurement tool, wherein a transfer base in the measurement tool is fixedly arranged on the centrifugal machine, a test cable in the centrifugal machine is connected with a test circuit of the test circuit board, and signals are output to test equipment through a slip ring of the centrifugal machine.
The technical scheme provides a centrifugal tool with replaceable and repeated calibration-free characteristics, a modularized tool design thought is adopted, different centrifugal sub-modules are designed according to the axial requirements of the test accelerometer, meanwhile, for ensuring the matching of the modules and the centrifugal machine, an adapter base for being installed with the centrifugal machine is designed, the adapter base is connected with the centrifugal machine during installation, each sub-module (a planar axial test mounting plate, a Z-axis test mounting plate and a test circuit mounting plate) is connected with the adapter base, the disassembly process of the centrifugal tool is omitted, the loss of centrifugal equipment is reduced, and the accelerometer can be installed on the module through designing specific two different detachable sub-modules (namely the planar axial test mounting plate and the Z-axis test mounting plate) to complete centrifugal tests in different directions, so that the test accuracy is ensured, the non-linear measurement test requirements of the scale factors in three directions of the accelerometer are met, the radius calibration process in one direction is omitted, the test flow is simplified, the test efficiency is greatly improved, and the accuracy is improved.
Drawings
The accompanying drawings, which are included to provide a further understanding of embodiments of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention. It is evident that the drawings in the following description are only some embodiments of the present invention and that other drawings may be obtained from these drawings without inventive effort for a person of ordinary skill in the art.
Fig. 1 is a schematic structural diagram of a measurement tool provided in embodiment 1 of the present invention;
fig. 2 is a schematic structural diagram of a measurement tool provided in embodiment 2 of the present invention;
fig. 3 is a schematic structural diagram of a adaptor base according to an embodiment of the present invention;
FIG. 4 is a schematic view of a planar axial test mounting plate according to an embodiment of the present invention;
FIG. 5 is a schematic structural view of a Z-axis test mounting plate according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of a test circuit mounting board according to an embodiment of the present invention;
the above figures include the following reference numerals:
10. a transfer base; 20. a planar axial test mounting plate; 21. a hollowed hole a; 30. a Z-axis test mounting plate; 31. a first connection plate; 32. a second connecting plate; 33. a hollowed-out hole b; 40. a test circuit mounting board; 41. a hollowed hole c; 50. and connecting the wire fixing plate.
Detailed Description
It should be noted that, in the case of no conflict, the embodiments and features in the embodiments may be combined with each other. The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. The following description of at least one exemplary embodiment is merely exemplary in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments in accordance with the present application. As used herein, the singular is also intended to include the plural unless the context clearly indicates otherwise, and furthermore, it is to be understood that the terms "comprises" and/or "comprising" when used in this specification are taken to specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof.
The relative arrangement of the components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless it is specifically stated otherwise. Meanwhile, it should be understood that the sizes of the respective parts shown in the drawings are not drawn in actual scale for convenience of description. Techniques, methods, and apparatus known to one of ordinary skill in the relevant art may not be discussed in detail, but should be considered part of the specification where appropriate. In all examples shown and discussed herein, any specific values should be construed as merely illustrative, and not a limitation. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further discussion thereof is necessary in subsequent figures.
1-6, in one embodiment of the invention, an accelerometer calibration-free nonlinear measurement tool comprises a transfer base 10, a planar axial test mounting plate 20, a Z-axis test mounting plate 30 and a test circuit mounting plate 40, wherein the transfer base 10 is arranged on a centrifuge and fixedly connected with the centrifuge; the planar axial test mounting plate 20 and the Z-axis test mounting plate 30 are both detachably arranged on the adapter base 10 and are not simultaneously connected with the adapter base 10, and when planar axial test is required, the planar axial test mounting plate 20 is connected with the adapter base 10; when a Z-axis test is required, the Z-axis test mounting plate 30 is connected with the adapter base 10, the middle part of the plane axial test mounting plate 20 is provided with a hollowed-out through hole a, the hollowed-out through hole a is perpendicular to the adapter base 10, when the accelerometer is connected with the plane axial test mounting plate 20, the hollowed-out through hole a is used for preventing relevant elements of the accelerometer from contacting with the plane axial test mounting plate 20, and when a positive and negative test is performed, the center of a sensitive structure of the accelerometer is always positioned at the same position of the mounting plate, and when the test is performed, only the radius of one direction needs to be calibrated; the Z-axis test mounting board 30 comprises a first connecting board 31 and a second connecting board 32 which are integrally formed, the first connecting board 31 is used for being connected with the adapter base 10, the second connecting board 32 is fixedly arranged on the first connecting board 31, the second connecting board 32 is further arranged perpendicular to the adapter base 10, the second connecting board 32 is provided with a hollowed-out through hole b, the hollowed-out through hole b is arranged in parallel with the adapter base 10, a plurality of accelerometer mounting blocks are uniformly arranged on the inner wall of the hollowed-out through hole b at intervals in the circumferential direction, and when the accelerometer is connected with the Z-axis test mounting board 30, the acceleration is arranged in the hollowed-out through hole b and is connected with the accelerometer mounting blocks; the test circuit mounting board 40 is fixedly mounted on the adapter base 10, the test circuit mounting board 40 is provided with a hollowed-out through hole c, a plurality of test circuit board mounting holes are formed in the circumference of the hollowed-out through hole c, the test circuit board is fixed on the test circuit board through the test circuit board mounting holes, and the hollowed-out through hole c is located right below the test circuit board.
That is, in the embodiment of the present invention, when the planar axial test mounting plate 20 is connected to the adaptor base 10, the Z-axis test mounting plate 30 is not connected to the adaptor base 10; when the Z-axis test mounting plate 30 is connected with the adapter base 10, the plane axial test mounting plate 20 is not connected with the adapter base plate, and centrifugal tests of different directions of the accelerometer are realized through the two sub-modules. While the remaining components are always connected to the adapter base 10.
In the embodiment of the invention, the accelerometer can be directly and fixedly installed through the screw in the test process, so that the time for replacing the accelerometer is greatly shortened, and the test efficiency is improved.
Preferably, in the embodiment of the present invention, the accelerometer head is located at the center of the accelerometer, and the planar axial test mounting plate 20, the hollow through hole a, the second connecting plate 32, and the hollow through hole b are all symmetrical structures, wherein, for the planar axial test mounting plate 20, the hollow through hole a of the planar axial test mounting plate 20 is located at the center of the fixture to ensure that the sensitive structures are located at the center when the accelerometer is installed positively and negatively. For the Z-axis test mounting plate 30, the accelerometer is further positioned at the center of the hollowed-out hole b33, and the radius of the sensitive structure relative to the centrifugal machine is unchanged when the accelerometer is installed positively and negatively through the hollowed-out hole b 33. Therefore, the invention designs a symmetrical structure, omits the radius calibration process in one direction, and simplifies the test flow.
Therefore, in the existing scale factor nonlinear measurement method, an accelerometer is fixed on a turntable of a centrifugal machine through a tool, a centrifugal test radius is determined through a radius back calculation mode, and radius measurement is needed when positive and negative directions are tested, so that the test efficiency is affected. The embodiment of the invention provides a centrifugal tool with replaceable and repeated calibration-free characteristics, a modularized tool design thought is adopted, different centrifugal sub-modules are designed according to the axial requirements of a test accelerometer, meanwhile, in order to ensure the matching of the modules and a centrifugal machine, an adapter base for mounting the centrifugal machine is designed, the adapter base is connected with the centrifugal machine in the opposite direction during mounting, each sub-module (a planar axial test mounting plate, a Z-axis test mounting plate and a test circuit mounting plate) is connected with the adapter base, the design thought is modularized, the disassembly process of the centrifugal tool is omitted, the loss of centrifugal equipment is reduced, and the accelerometer can be mounted on the module through designing two specific different detachable sub-modules (namely the planar axial test mounting plate and the Z-axis test mounting plate) to complete centrifugal tests in different directions, so that the test precision is ensured, the non-linear measurement test requirement of the scale factors in three directions of the accelerometer is met, the radius calibration process in one direction is omitted, the test flow is simplified, the test efficiency is greatly improved, and the precision is improved.
Preferably, the measuring tool further comprises a connecting wire fixing plate 50, and the connecting wire fixing plate 50 is fixedly arranged on the adaptor base 10 and used for compressing the test wire of the test circuit board.
Preferably, the adaptor base 10 is made of aluminum, and a passivation layer is formed on the surface of the adaptor base to insulate the accelerometer from the adaptor base.
Preferably, the test circuit mounting board 40 is made of aluminum.
Preferably, the test circuit mounting plate 40 is connected with the adapter base 10, and the threaded hole is protected by a steel wire thread insert arranged in the fixing hole.
Preferably, the planar axial test mounting plate 20 is made of aluminum.
Preferably, the connecting wire fixing plate 50 is made of aluminum.
According to another embodiment, there is further provided an accelerometer calibration-free nonlinear measurement device, which comprises a centrifuge, a test circuit board and the measurement tool, wherein the adapter base 10 in the measurement tool is fixedly arranged on the centrifuge, and a test cable in the centrifuge is connected with a test circuit of the test circuit board and outputs a signal to a test device through a centrifuge slip ring.
In summary, in the existing scale factor measurement method, an accelerometer is fixed on a turntable of a centrifugal machine through a tool, a centrifugal test radius is determined through a radius back calculation mode, and radius measurement is required to be performed during positive and negative testing, so that the testing efficiency is affected. The invention aims to design a centrifugal tool with replaceable and repeated calibration-free characteristics, so as to solve the problems of repeated disassembly and positive and negative calibration in the nonlinear measurement process of a silicon micro-electromechanical accelerometer, provide a test method for rapidly and accurately omitting repeated radius calibration, meet the test requirements of the nonlinear measurement of the scale factors of the accelerometer in three directions, reduce the disassembly times of the tool by the measurement tool, omit the work of one-direction centrifugal precursor, reduce the test steps and greatly improve the test efficiency.
Spatially relative terms, such as "above … …," "above … …," "upper surface at … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial location relative to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "above" or "over" other devices or structures would then be oriented "below" or "beneath" the other devices or structures. Thus, the exemplary term "above … …" may include both orientations of "above … …" and "below … …". The device may also be positioned in other different ways (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
In addition, the terms "first", "second", etc. are used to define the components, and are only for convenience of distinguishing the corresponding components, and the terms have no special meaning unless otherwise stated, and therefore should not be construed as limiting the scope of the present invention.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. Calibration-free nonlinear measurement tool for an accelerometer, which is characterized by comprising:
the adapter base is arranged on the centrifugal machine and fixedly connected with the centrifugal machine;
the plane axial test mounting plate and the Z-axis test mounting plate are detachably arranged on the switching base and are not simultaneously connected with the switching base, and when the plane axial test is required, the plane axial test mounting plate is connected with the switching base; when Z-axis test is needed, the Z-axis test mounting plate is connected with the adapter base, wherein,
the middle part of the plane axial test mounting plate is provided with a hollowed-out through hole a, the normal line of the hollowed-out through hole a is perpendicular to the adapter base, when the accelerometer is connected with the plane axial test mounting plate, the hollowed-out through hole a prevents related elements of the accelerometer from contacting with the plane axial test mounting plate, when positive and negative tests are carried out, the center of a sensitive structure of the accelerometer is always positioned at the same position of the mounting plate, and when the accelerometer is tested, the radius in one direction only needs to be calibrated;
the Z-axis test mounting plate comprises a first connecting plate and a second connecting plate which are integrally formed, wherein the first connecting plate is used for being connected with the transfer base, the second connecting plate is fixedly arranged on the first connecting plate and is also perpendicular to the transfer base, the second connecting plate is provided with a hollowed-out through hole b, the normal line of the hollowed-out through hole b is parallel to the transfer base, a plurality of accelerometer mounting blocks are uniformly arranged on the inner wall of the hollowed-out through hole b at intervals in the circumferential direction, and when the accelerometer is connected with the Z-axis test mounting plate, the accelerometer is arranged in the hollowed-out through hole b and is connected with the accelerometer mounting blocks;
the test circuit mounting board, test circuit mounting board fixed mounting is in on the adapter base, test circuit mounting board has fretwork through-hole c, wherein, follows fretwork through-hole c circumference has a plurality of test circuit board mounting holes, and test circuit board passes through test circuit board mounting hole is fixed on the test circuit mounting board, fretwork through-hole c is located test circuit board under.
2. The calibration-free nonlinear measurement tool for the accelerometer of claim 1, further comprising a connecting wire fixing plate fixedly arranged on the adapter base and used for pressing corresponding test wires of the test circuit board.
3. The calibration-free nonlinear measurement tool for the accelerometer of claim 1, wherein the adapter base is made of aluminum, and a protective layer is formed on the surface of the adapter base through passivation means to insulate the adapter base from the accelerometer.
4. An accelerometer calibration-free nonlinear measurement tool according to any one of claims 1-3 wherein the test circuit mounting plate is aluminum.
5. The calibration-free nonlinear measurement tool for the accelerometer of claim 4, wherein the test circuit mounting plate is connected with the adapter base through a wire thread insert arranged in a fixing hole.
6. An accelerometer calibration-free nonlinear measurement tool according to any one of claims 1-3 wherein the planar axial test mounting plate is aluminum.
7. The calibration-free nonlinear measurement tool for the accelerometer of claim 2, wherein the connecting wire fixing plate is made of aluminum.
8. The calibration-free nonlinear measurement device for the accelerometer is characterized by comprising a centrifugal machine, a test circuit board and the measurement tool according to any one of claims 1-7, wherein a transfer base in the measurement tool is fixedly arranged on the centrifugal machine, a test cable in the centrifugal machine is connected with a test circuit of the test circuit board, and signals are output to test equipment through a slip ring of the centrifugal machine.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211423060.5A CN115728517B (en) | 2022-11-14 | 2022-11-14 | Non-linear measurement tool and device for calibration-free accelerometer |
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| CN202211423060.5A CN115728517B (en) | 2022-11-14 | 2022-11-14 | Non-linear measurement tool and device for calibration-free accelerometer |
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| CN115728517B true CN115728517B (en) | 2024-04-02 |
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| CN115728517A (en) | 2023-03-03 |
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