CN115726037A - Charging barrel, charger and crystal growth equipment - Google Patents

Abstract

The invention discloses a feeding cylinder, a feeder and crystal growth equipment, wherein the feeding cylinder is used for the crystal growth equipment and comprises: a barrel extending in a vertical direction; the connecting rod extends along the vertical direction and is arranged in the cylinder body; the bottom cover is connected with the connecting rod; protective case, protective case cover is located on the connecting rod, protective case includes: the high-temperature-resistant pipeline comprises a first pipeline section and a second pipeline section, wherein the first pipeline section is connected to the upper end of the second pipeline section in the vertical direction, and the high-temperature-resistant coefficient of the first pipeline section is different from that of the second pipeline section. According to the feeding cylinder disclosed by the invention, the structure of the protective sleeve is simplified, the replacement difficulty is reduced, only the damaged pipe section needs to be replaced, the maintenance cost is reduced, the defects caused by the use of a single component are well avoided, the high temperature resistance of the protective sleeve is improved, the production cost of the feeding cylinder is reduced, and the service life is prolonged.

Description

Charging barrel, charger and crystal growth equipment

Technical Field

The invention relates to the technical field of photovoltaics, in particular to a feeding cylinder, a feeder and crystal growth equipment.

Background

The single crystal furnace is one of important devices in the production process of a crystalline silicon solar panel, and during the process of drawing a single crystal silicon rod by adopting a Czochralski method, a quartz feeding cylinder is required to feed polycrystalline silicon materials into the furnace in batches for multiple times.

The feeding cylinder main body is a quartz cylinder body with two open ends, a metal connecting rod extending along the axial direction of the feeding cylinder is arranged in the quartz cylinder body, the upper end of the metal connecting rod extends out of the quartz cylinder body, the lower end of the metal connecting rod is connected with a quartz conical head serving as a bottom cover, and the lower part of the quartz conical head extends out of the lower port of the quartz cylinder body. When feeding, the connecting rod descends to enable the quartz conical head to leave the quartz cylinder body, and silicon materials contained in the quartz cylinder can fall into a quartz crucible in a main chamber of the single crystal furnace from a gap between the quartz cylinder body and the quartz conical head.

In order to avoid the direct contact between the metal connecting rod and the silicon material in the feeding cylinder to influence the quality of the single crystal silicon rod, a protective sleeve is sleeved outside the metal connecting rod.

In the related technology, the protective sleeve of the charging barrel is a quartz tube, because the hardness of the quartz tubule is lower than that of the silicon material, especially when the size of the silicon material is larger, when the silicon material is loaded into the quartz barrel, the quartz tubule is easy to collide with the silicon material to cause slag falling and gap generation, and the efficiency of pulling the single crystal silicon rod can be influenced when the quartz slag finally enters the silicon liquid; and the opening that appears can be along with the used repeatedly of a quartz section of thick bamboo grow gradually, when reaching a uniform size, tiny silicon material gets into from opening department easily, not only leads to silicon material and metal pull rod direct contact to pollute the silicon material, influence single crystal silicon rod quality, still can lead to being died by the silicon material card between quartz capsule and the metal connecting rod, lead to the metal connecting rod can not freely descend in the quartz capsule, thereby lead to the quartz conical head can't leave the quartz cylinder, in the silicon material can't fall to quartz crucible, add a material section of thick bamboo and lost reinforced function.

Disclosure of Invention

The present invention is directed to solving at least one of the problems of the prior art. Therefore, the invention provides a feeding cylinder which is simple in structure and ingenious in design.

The invention also provides a feeder with the feeding cylinder.

The invention also provides crystal growth equipment with the feeder.

The charging cartridge according to the first aspect of the present invention, which is used for a crystal growth apparatus, comprises: a barrel extending in a vertical direction; the connecting rod extends along the vertical direction and is arranged in the cylinder body; the bottom cover is connected with the connecting rod; protective case, protective case cover is located on the connecting rod, protective case includes: the high-temperature-resistant pipeline comprises a first pipeline section and a second pipeline section, wherein the first pipeline section is connected to the upper end of the second pipeline section in the vertical direction, and the high-temperature-resistant coefficient of the first pipeline section is different from that of the second pipeline section.

According to the feeding cylinder, the first pipe section and the second pipe section which are connected are arranged on the protective sleeve, so that the structure of the protective sleeve is simplified, the replacement difficulty is reduced, only the damaged pipe section needs to be replaced, the maintenance cost is reduced, the defects caused by single-component use are well avoided, the high temperature resistance coefficient of the first pipe section is different from that of the second pipe section, the high temperature resistance performance of the protective sleeve is improved, the production cost of the feeding cylinder is reduced, and the service life is prolonged.

In some embodiments, the first tube segment is formed as a tetrafluoroethylene member or a polyurethane material, and/or the second tube segment is formed as a silicon base member.

In some embodiments, the ratio of the length of the first tube segment to the length of the connecting rod is greater than 1/2.

Further, the ratio of the length of the second pipe section to the length of the connecting rod is less than 1/2.

Further, the first tube section is integrally formed, and/or the second tube section is integrally formed.

Further, the second pipe section comprises a plurality of sub pipe sections, and the total length of the second pipe section is not less than 20mm.

Furthermore, a gasket is arranged between every two adjacent sub-pipe sections, and the thickness of the gasket is not more than 20mm.

Still further, the gasket is formed as a piece of tetrafluoroethylene.

The feeder according to the second aspect of the invention comprises a feeder cartridge according to the above first aspect of the invention.

According to the feeder, the feeding cylinder is arranged, so that the maintenance difficulty of the feeder is reduced, the maintenance cost of the feeder is reduced, and the service life of the feeder is prolonged.

A crystal growth apparatus according to a third aspect of the present invention comprises a feeder according to the above second aspect of the present invention.

According to the crystal growth equipment, the feeder in the second aspect is arranged, so that the overall performance of the crystal growth equipment is improved, the maintenance operation of the crystal growth equipment is simplified, and the crystal growth equipment is safe and reliable.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

FIG. 1 is a schematic view of a cartridge according to an embodiment of the first aspect of the present invention;

fig. 2 is a schematic view of a feeder according to an embodiment of the second aspect of the invention.

Reference numerals are as follows:

100. a charging cylinder;

1. a cylinder body; 2. a connecting rod; 3. a bottom cover;

4. protecting the sleeve; 5. a cross beam; 6. a flange;

1000. a feeder; 200. a storage bin; 300. an air exhaust assembly.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.

A cartridge 100 according to an embodiment of the first aspect of the invention is described below with reference to fig. 1.

As shown in fig. 1, a cartridge 100 according to an embodiment of the first aspect of the present invention includes: barrel 1, connecting rod 2, bottom 3 and protective sleeve 4.

Specifically, add feed cylinder 100 and be used for crystal growth equipment, barrel 1 extends along vertical direction, and connecting rod 2 extends along vertical direction, and in barrel 1 was located to connecting rod 2, bottom 3 linked to each other with connecting rod 2, on connecting rod 2 was located to protective case 4 covers, protective case 4 included: the high-temperature-resistant pipeline comprises a first pipeline section and a second pipeline section, wherein the first pipeline section is connected to the upper end of the second pipeline section in the vertical direction, and the high-temperature-resistant coefficient of the first pipeline section is different from that of the second pipeline section. That is to say, the connecting rod 2 is sleeved with the protective sleeve 4, the protective sleeve 4 comprises a first pipe section and a second pipe section, and the high temperature resistance coefficient of the first pipe section is lower than that of the second pipe section. Thus, the disadvantages of using a single component for the protective sleeve 4 are avoided.

According to the feeding cylinder 100 provided by the embodiment of the invention, the first pipe section and the second pipe section which are connected are arranged on the protective sleeve 4, so that the structure of the protective sleeve 4 is simplified, the replacement difficulty is reduced, only the damaged pipe section needs to be replaced, the maintenance cost is reduced, the defects caused by single-component use are well avoided, and the high temperature resistance coefficient of the first pipe section is different from that of the second pipe section, so that the high temperature resistance of the protective sleeve 4 is improved, the production cost of the feeding cylinder 100 is reduced, and the service life is prolonged.

In some embodiments of the invention, the first tube section is formed as a tetrafluoroethylene member or a polyurethane material, and/or the second tube section is formed as a silicon base member. Specifically, the tetrafluoroethylene or polyurethane material is not resistant to high temperature, but has long service life, silicon-based is resistant to high temperature and can reach 1420 ℃, but silicon-based is fragile and easy to damage, has short service life and needs to be replaced frequently. If protective sleeve 4 only used the tetrafluoroethylene material, then protective sleeve 4's bottom softens easily and damages, if protective sleeve 4 only used silicon-based material, then protective sleeve 4 whole fragility is big fragile easily, and needs frequent change. Consequently, the upper end at the second pipeline section is connected to the first pipeline section of design, and first pipeline section adopts tetrafluoroethylene material or polyurethane material, and the second pipeline section adopts silicon-based material, and the high temperature resistant performance of the lower part of protective case 4 is high like this, and is not fragile, and protective case 4's upper portion long service life, and low in production cost.

In some embodiments of the invention, the ratio of the length of the first tube section to the length of the connecting rod 2 is greater than 1/2 and the ratio of the length of the second tube section to the length of the connecting rod 2 is less than 1/2. It will be appreciated that the length of the first tube section is greater than the length of the second tube section, thereby reducing the cost of manufacturing the protective sleeve 4 while ensuring the high temperature resistance of the protective sleeve 4.

In some embodiments of the invention, the first tube section is integrally formed, and/or the second tube section is integrally formed. From this, increased protective sleeve 4's structural strength, improved protective sleeve 4's manufacturing efficiency, simplified protective sleeve 4's assembling process.

Optionally, the length of the protective sleeve 4 is 1.5-2.4 meters. Specifically, the length of the protection sleeve 4 may be smaller than the length of the link 2. Therefore, the protective sleeve 4 can effectively protect the part of the connecting rod 2 extending into the cylinder body 1, and the manufacturing difficulty of the protective sleeve 4 can be conveniently controlled.

For example, the length of the protection sleeve 4 may be: 1.5m, 1.6m, 1.7m, 1.8m, 1.9m, 2.0m, 2.1m, 2.2m, 2.3m, 2.4m, and the like.

In other embodiments of the present invention, the second tube segment may comprise a plurality of tube segments, the total length of the second tube segment being no less than 20mm. Therefore, only the damaged sub-pipe section can be replaced, the second pipe section is prevented from being integrally replaced, and the maintenance cost is further reduced.

For example, the length of the second pipe section may be: 20mm, 25mm, 30mm, 35mm, 40mm, 45mm, 50mm, 55mm, 60mm, and the like.

In particular, the number of sub-segments may be 2-8.

In some embodiments of the invention, a spacer is provided between each adjacent two of the sub-pipe sections, the thickness of the spacer being no greater than 20mm. Therefore, the damage caused by mutual friction between two adjacent sub-pipe sections can be avoided, and the service life of the charging barrel 100 is prolonged.

For example, the thickness of the shim may be: 20mm, 19mm, 18mm, 17mm, 16mm, 15mm, 14mm, 13mm, 12mm, 11mm, 10mm, 9mm, 8mm, and so forth. In this way, the distance between two adjacent sub-pipe sections can be conveniently controlled under the condition that the structural strength of the gasket is ensured.

Preferably, the tetrafluoroethylene member has good wear resistance and heat resistance, and therefore, the gasket is formed as a tetrafluoroethylene member.

In one embodiment, the first and second pipe segments may also be coupled using gaskets to reduce the degree of friction between the first and second pipe segments.

Referring now to fig. 1, a cartridge 100 according to one embodiment of the invention will be described.

Referring to fig. 1, the cartridge 100 includes: barrel 1, connecting rod 2, bottom 3 and protective sleeve 4.

Specifically, the connecting rod 2 is sleeved with the protective sleeve 4, the protective sleeve 4 comprises a first pipe section and a second pipe section, the high temperature resistance coefficient of the first pipe section is lower than that of the second pipe section, the first pipe section is formed into a tetrafluoroethylene piece, and the second pipe section is formed into a silicon base piece. The ratio of the length of the first pipe section to the length of the connecting rod 2 is greater than 1/2, and the ratio of the length of the second pipe section to the length of the connecting rod 2 is less than 1/2. The cylinder 1 may be a quartz member, and the bottom cover 3 may be a conical quartz member. The barrel 1 is provided with a beam 5, a through hole is formed in the center of the beam 5 and is suitable for the connecting rod 2 to penetrate in and out, so that the connecting rod 2 is positioned and guided, the lower end of the connecting rod 2 is connected with the bottom cover 3, and the peripheral wall of the barrel 1 is provided with a flange 6.

In the feeding process, the feeding cylinder 100 integrally moves downwards, when the flange 6 is supported, the cylinder body 1 stops descending, the connecting rod 2 continues descending, the bottom cover 3 leaves the cylinder body 1, and silicon materials contained in the cylinder body 1 can fall into a quartz crucible in a main chamber of the single crystal furnace from a gap between the cylinder body 1 and the bottom cover 3.

The applicator 1000 according to the embodiment of the second aspect of the present invention comprises the cartridge 100 according to the embodiment of the first aspect of the present invention described above.

Specifically, as shown in fig. 2, the charger 1000 includes a storage bin 200 and an air-extracting assembly 300, the upper end of the charging cylinder 100 is communicated with the storage bin 200, and the air-extracting assembly 300 is connected with the storage bin 200 and is used for sucking air in the charging cylinder 100 and the storage bin 200, so that air in the charging cylinder 100 and the storage bin 200 flows.

According to the feeder 1000 of the embodiment of the present invention, by providing the feeding cylinder 100 of the first aspect embodiment, the maintenance difficulty of the feeder 1000 is reduced, the maintenance cost of the feeder 1000 is reduced, and the service life of the feeder 1000 is prolonged.

A crystal growth apparatus according to an embodiment of the third aspect of the invention comprises a feeder 1000 according to an embodiment of the second aspect of the invention described above.

According to the crystal growth equipment provided by the embodiment of the invention, the feeder 1000 in the embodiment of the second aspect is arranged, so that the overall performance of the crystal growth equipment is improved, the maintenance operation of the crystal growth equipment is simplified, and the crystal growth equipment is safe and reliable.

In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; the connection can be mechanical connection, electrical connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.

While embodiments of the invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims (10)

1. A feed cartridge for a crystal growth apparatus, the feed cartridge comprising:

a cylinder extending in a vertical direction,

a connecting rod extending in a vertical direction, the connecting rod being disposed in the cylinder,

a bottom cover connected with the connecting rod,

protective case, protective case cover is located on the connecting rod, protective case includes: the heat exchanger comprises a first pipe section and a second pipe section, wherein the first pipe section is connected to the upper end of the second pipe section in the vertical direction, and the high temperature resistance coefficient of the first pipe section is different from that of the second pipe section.

2. The charging cartridge of claim 1, wherein said first tube is formed as a tetrafluoroethylene member or a polyurethane material, and/or said second tube is formed as a silicon-based member.

3. The charging cartridge of claim 2, wherein a ratio of a length of the first tube segment to a length of the connecting rod is greater than 1/2.

4. The charging cartridge of claim 2, wherein a ratio of a length of the second tube segment to a length of the connecting rod is less than 1/2.

5. The cartridge of any one of claims 1 to 4, wherein the first tube segment is integrally formed, and/or the second tube segment is integrally formed.

6. The cartridge of claim 2, wherein the second tube segment comprises a plurality of sub-segments, the second tube segment having an overall length of no less than 20mm.

7. The charging cylinder according to claim 6, wherein a gasket is disposed between each two adjacent sub-pipe sections, and the thickness of the gasket is not greater than 20mm.

8. The cartridge of claim 7, wherein the gasket is formed as a piece of tetrafluoroethylene.

9. A feeder comprising a cartridge according to any one of claims 1 to 8.

10. A crystal growth apparatus comprising the feeder according to claim 9.

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