CN115718670B - Automatic substitution operating system and method for semiconductor dust-free room - Google Patents

Automatic substitution operating system and method for semiconductor dust-free room Download PDF

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CN115718670B
CN115718670B CN202310016380.7A CN202310016380A CN115718670B CN 115718670 B CN115718670 B CN 115718670B CN 202310016380 A CN202310016380 A CN 202310016380A CN 115718670 B CN115718670 B CN 115718670B
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machine equipment
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CN115718670A (en
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Wuxi Xinheng Information Technology Co ltd
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    • Y02P90/02Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

The invention discloses an automatic substitution operation system and method for a semiconductor dust-free room, wherein the substitution operation system comprises an access layer, a processing layer, a logic layer and a hardware layer; according to the method, the traditional stacked and coded type operation system is changed into a modularized hierarchical system, and the flexibility of deployment is improved, the cost of deployment infrastructure is reduced through a modularized access layer, a processing layer, a logic layer and a hardware layer, so that the profit margin and the competitiveness of projects are improved; meanwhile, the access layer is connected with the machine equipment through the interface, so that display images, mice and keyboard signals of the machine equipment are intercepted, the machine equipment is controlled through driving events of the mice and keyboards in the SDK of the microcomputer equipment in a remote control mode, and then the operation replacing work is completed, and an operating system of an operator on the machine equipment is not required to operate, so that dust-free workshop is ensured; meanwhile, the flexibility of the system architecture of the automatic operation generation is improved, the deployment is convenient and simple, the project implementation cost is reduced, and the implementation efficiency is improved.

Description

Automatic substitution operating system and method for semiconductor dust-free room
Technical Field
The invention relates to the field of substitute operation, in particular to an automatic substitute operation system and method for a semiconductor dust-free room.
Background
Along with the development of social economy, the social production mode has started to develop to digitization and intellectualization, the competition of various electronic consumer products and new energy industries starts to gradually shift from price and quantity competition to quality, and high-end electronic consumer products and luxury new energy automobiles have started to slowly rise in the population above in the current society. The production of the chip of the high-end electronic consumer product and the production of the battery of the luxury new energy automobile are not separated from the dust-free workshop, and the environmental quality of the dust-free workshop is closely related to the quality of the products produced by the chip, so that the environmental quality in the dust-free workshop is pursued, and the pollution probability is reduced, so that the chip is one of the targets of design, construction and maintenance of the dust-free room.
Remote control systems and automated generation operating systems for clean rooms have become standard in the head enterprises of the semiconductor industry, but have not yet become widely used in the new energy industry, but have been tried by the enterprises.
With the continuous improvement of the quality requirements of the luxury new energy automobiles on batteries, the market of the new energy industry will be gradually opened.
The architecture of the current automated generation operating system in the market is basically two ways:
1. a stacking mode is adopted, namely a small computer is added in the remote control equipment, and an editing tool for automatic operation flow is installed in the small computer to replace the operation to be edited one by one;
2. the process coding is carried out on the machine by adopting a hard coding mode, and the mode needs personnel with higher level programming expertise to implement, so that higher labor cost is achieved;
the two ways can increase along with the increase of the implementation quantity, and the cost can increase by times, which is unfavorable for benign development and implementation of the system.
Disclosure of Invention
The invention aims to: an automated semiconductor clean room-oriented operating system and method are provided to solve the above-mentioned problems of the prior art.
The technical scheme is as follows: an automated semiconductor clean room oriented operating system and method comprising:
an access layer comprising a remote control microcomputer device;
the processing layer comprises a management end and an execution end;
a logic layer for controlling the machine equipment based on the driving event of the mouse and the keyboard in the SDK of the remote control microcomputer equipment;
the hardware layer comprises a plurality of interfaces for accessing the machine equipment;
the management end comprises basic data management, user authority management, script modification and script operation mode management;
the execution end runs the script flow which is edited based on the setting of the management end, and throws the running log to the management end for inquiry and tracing.
The hardware layer interface has the forms of VGA, DVI, HDMI and the like;
through multiple interface designs, the microcomputer equipment and the machine equipment can be remotely controlled corresponding to multiple interfaces.
The traditional stacked and coded operating systems are changed into modularized hierarchical systems, and the flexibility of deployment is improved, the cost of deployment infrastructure is reduced through a modularized access layer, a processing layer, a logic layer and a hardware layer, so that the profit margin and the competitiveness of projects are improved;
meanwhile, the access layer is connected with the machine equipment through the interface, so that display images, mice and keyboard signals of the machine equipment are intercepted, the machine equipment is controlled through driving events of the mice and keyboards in the SDK of the microcomputer equipment in a remote control mode, and then the operation replacing work is completed, and an operating system of an operator on the machine equipment is not required to operate, so that dust-free workshop is ensured;
meanwhile, the flexibility of the system architecture of the automatic operation generation is improved, the deployment is convenient and simple, the project implementation cost is reduced, and the implementation efficiency is improved.
The management end and the execution end can be deployed on the same server;
the management end and the execution end can be independently deployed on different servers;
when the execution end runs the execution script, the execution end is firstly connected with a server to check whether the script is updated or not;
if not, executing according to the existing script;
if yes, the latest script is downloaded to the execution end, and then the latest script is executed.
In a further embodiment, the remote control microcomputer device is connected to the machine platform device through a hardware layer interface, and display images, mice and keyboard signals of the machine platform device are intercepted.
In a further embodiment, the script in the management end uses a graphical interface to operate during editing, simulate the processing steps of a flow, manually and accurately configure parameters processed by a mouse and a keyboard, and regenerate an execution script;
and further, the difficulty of programming the flow program is reduced, and related implementation personnel can program a complex flow through simple training.
An automated generation operating method for a semiconductor clean room comprises the following steps:
the access layer sends out an operation instruction;
before the access layer accesses the processing layer, the access layer accesses the machine equipment through the hardware layer, and intercepts display images, mice and keyboard signals of the machine equipment;
the logic layer develops a driving package to control the machine equipment based on a driving event of a mouse and a keyboard in an SDK of the remote control microcomputer equipment in the access layer;
the processing layer receives the operation instruction and controls the machine equipment according to the operation instruction;
setting user permission, updating of script and script running mode by a management end;
the script uses a graphical interface to operate when editing, simulates a flow processing step, manually and accurately configures parameters processed by a mouse and a keyboard, and regenerates an execution script.
The execution end runs the script flow which is edited based on the setting of the management end, and throws the running log to the management end;
when the execution end runs the execution script, the execution end is connected with a server to check whether the script is updated or not;
if yes, downloading the latest script to the execution end, and executing the latest script;
and if not, executing according to the existing script.
The simulation flow processing step is to simulate a manual operation flow based on a driving event of a mouse and a keyboard in the SDK, and specifically comprises the following steps:
1. mouse click simulation: based on the coordinates of a button in a picture of a machine, a program drives a mouse to move to a coordinate position corresponding to the picture, then events such as left click, right click, double click and the like of the mouse are sent, and manual mouse clicking operation is simulated;
2. input simulation: based on the coordinates of the text box in the picture of the machine, the program drives the mouse to move to the corresponding coordinates, sends a clicking event to enable the text box/text field to obtain a focus, and then drives the keyboard event to input a corresponding character string so as to simulate the action of manual input;
3. and (3) substitution simulation: according to different operation flows of each machine, the program is used for combining mouse click simulation and input simulation operation simulation so as to achieve the effect of replacing manual operation.
The beneficial effects are that: the invention discloses an automatic substitution operation system and method for a semiconductor dust-free room, which changes the traditional stacking and coding substitution operation system into a modularized hierarchical system, improves the flexibility of deployment through a modularized access layer, a processing layer, a logic layer and a hardware layer, reduces the cost of deployment infrastructure, and improves the profit margin and the competitiveness of projects;
meanwhile, the access layer is connected with the machine equipment through the interface, so that display images, mice and keyboard signals of the machine equipment are intercepted, the machine equipment is controlled through driving events of the mice and keyboards in the SDK of the microcomputer equipment in a remote control mode, and then the operation replacing work is completed, and an operating system of an operator on the machine equipment is not required to operate, so that dust-free workshop is ensured;
meanwhile, the flexibility of the system architecture of the automatic operation generation is improved, the deployment is convenient and simple, the project implementation cost is reduced, and the implementation efficiency is improved.
Drawings
Fig. 1 is a schematic diagram of the system architecture of the present invention.
Fig. 2 is a process flow diagram of the present invention.
Fig. 3 is a method flow diagram of the present invention.
Detailed Description
The application relates to an automatic substitution operation system and method for a semiconductor dust-free room, which are studied carefully by the applicant, and the traditional substitution operation method is basically two modes:
1. a stacking mode is adopted, namely a small computer is added in the remote control equipment, and an editing tool for automatic operation flow is installed in the small computer to replace the operation to be edited one by one;
2. the process coding is carried out on the machine by adopting a hard coding mode, and the mode needs personnel with higher level programming expertise to implement, so that higher labor cost is achieved;
however, the two ways increase with the increase of the implementation quantity, and the cost is multiplied, which is unfavorable for benign development and implementation of the system.
The traditional stacked and coded operation system is changed into a modularized hierarchical system, and the modularized access layer, the processing layer, the logic layer and the hardware layer are used for improving the flexibility of deployment and reducing the cost of deployment infrastructure, so that the profit margin and the competitiveness of projects are improved;
meanwhile, the access layer is connected with the machine equipment through the interface, so that display images, mice and keyboard signals of the machine equipment are intercepted, the machine equipment is controlled through driving events of the mice and keyboards in the SDK of the microcomputer equipment in a remote control mode, and then the operation replacing work is completed, and an operating system of an operator on the machine equipment is not required to operate, so that dust-free workshop is ensured;
meanwhile, the flexibility of the system architecture of the automatic operation generation is improved, the deployment is convenient and simple, the project implementation cost is reduced, and the implementation efficiency is improved.
The following is a detailed explanation of the embodiments.
An automated semiconductor clean room oriented operating system comprising:
an access layer comprising a remote control microcomputer device;
the processing layer comprises a management end and an execution end;
a logic layer for controlling the machine equipment based on the driving event of the mouse and the keyboard in the SDK of the remote control microcomputer equipment;
the hardware layer comprises a plurality of interfaces for accessing the machine equipment;
the management end comprises basic data management, user authority management, script modification and script running mode management, namely script management;
the user authority management comprises groups, equipment, account numbers and logs;
the method can be respectively carried out on groups, equipment and accounts: operations such as adding, deleting, changing and checking, and establishing group, equipment and membership, and associating with each other.
The log function may look at: log in, control, exception, etc.
Script management presents the created and imported script names in the form of a list, and can copy, delete, bind devices, download, etc. the script names.
Script management contains 2 subfunctions: the newly created script and the imported Json and pictures can be used to create a new script or import an existing Json script.
Newly-built script, including script editor page, be script editor toolbar above the page, the function includes: saving, starting screenshot, modifying Json and exiting;
in the driving event, a series of actions of the mouse are divided into 11 actions: the device can be used selectively according to the needs by moving, clicking left keys, clicking right keys, clicking middle keys and clicking middle keys.
The keyboard simulates and inputs text parameters, including both "manual recording" and "writing process values.
The manual recording includes 3 input modes, namely a normal mode, a shortcut key mode and a deletion mode;
the normal mode is obtained by inputting what content is input by the keyboard and presenting the corresponding content in the popup frame;
the shortcut key mode is key combination input, and the pressing and bouncing can be recorded, and is mainly used for some shortcut combinations, such as Ctrl+A;
the "deletion mode" is to delete the above-described inputted contents, and perform a deletion operation regardless of the keyboard input.
"write process value", i.e. input process value key name (only english digits and underlines are supported) in text box, the process value is used to obtain the content therein, and the obtained content is automatically input.
The process value key name includes:
interface transfer value key name: and inputting the key name of the interface transmission value (only supporting English numbers and underlining) in the text box, wherein the key name is used for acquiring the content in the key name, and comparing the acquired content with the content of the key name of the comparison value.
Comparing the key names of the values: and inputting a key name of the comparison value (only supporting English numbers and underlining) in the text box, wherein the key name is used for acquiring the content in the key name, and comparing the acquired content with the content of the interface value key name.
By comparing whether the contents of the two key values are consistent, the scene verification method is used for verifying whether the record selected by OCR recognition is correct.
The execution end runs the script flow which is edited based on the setting of the management end, and throws the running log to the management end for inquiry and tracing.
The hardware layer interface has the forms of VGA, DVI, HDMI and the like;
through multiple interface designs, the microcomputer equipment and the machine equipment can be remotely controlled corresponding to multiple interfaces.
The management end and the execution end can be deployed on the same server;
the management end and the execution end can be independently deployed on different servers;
when the execution end runs the execution script, the execution end is firstly connected with a server to check whether the script is updated or not;
if not, executing according to the existing script;
if yes, the latest script is downloaded to the execution end, and then the latest script is executed.
The remote control microcomputer equipment is connected to the machine equipment through the hardware layer interface, and display images, mice and keyboard signals of the machine equipment are intercepted.
The script in the management end uses a graphical interface to operate when editing, simulates a flow processing step, manually and accurately configures parameters processed by a mouse and a keyboard, and regenerates an execution script;
and further, the difficulty of programming the flow program is reduced, and related implementation personnel can program a complex flow through simple training.
By matching one management end with a plurality of execution ends, the script of one management end can be updated only in the automatic substitution operation process, so that the corresponding matching of the plurality of execution ends is achieved.
The simulation flow processing step is to simulate a manual operation flow based on a driving event of a mouse and a keyboard in the SDK, and specifically comprises the following steps:
1. mouse click simulation: based on the coordinates of a button in a picture of a machine, a program drives a mouse to move to a coordinate position corresponding to the picture, then events such as left click, right click, double click and the like of the mouse are sent, and manual mouse clicking operation is simulated;
2. input simulation: based on the coordinates of the text box in the picture of the machine, the program drives the mouse to move to the corresponding coordinates, sends a clicking event to enable the text box/text field to obtain a focus, and then drives the keyboard event to input a corresponding character string so as to simulate the action of manual input;
3. and (3) substitution simulation: according to different operation flows of each machine, the program is used for combining mouse click simulation and input simulation operation simulation so as to achieve the effect of replacing manual operation.
Description of working principle:
the access layer sends out an operation instruction;
before the access layer accesses the processing layer, the access layer accesses the machine equipment through the hardware layer, and intercepts display images, mice and keyboard signals of the machine equipment;
the logic layer develops a driving package to control the machine equipment based on a driving event of a mouse and a keyboard in an SDK of the remote control microcomputer equipment in the access layer;
the processing layer receives the operation instruction and controls the machine equipment according to the operation instruction;
setting user permission, updating of script and script running mode by a management end;
the script uses a graphical interface to operate when editing, simulates a flow processing step, manually and accurately configures parameters processed by a mouse and a keyboard, and regenerates an execution script.
The execution end runs the script flow which is edited based on the setting of the management end, and throws the running log to the management end;
when the execution end runs the execution script, the execution end is connected with a server to check whether the script is updated or not;
if yes, downloading the latest script to the execution end, and executing the latest script;
and if not, executing according to the existing script.
The preferred embodiments of the present invention have been described in detail above with reference to the accompanying drawings, but the present invention is not limited to the specific details of the above embodiments, and various equivalent changes can be made to the technical solutions of the present invention within the scope of the technical concept of the present invention, and these equivalent changes all fall within the scope of the present invention.

Claims (1)

1. An automated semiconductor clean room-oriented method of operation based on the following system comprising:
an access layer comprising a remote control microcomputer device;
the processing layer comprises a management end and an execution end;
the device is characterized by further comprising a logic layer, wherein the logic layer is used for controlling the machine equipment based on a driving event of a mouse and a keyboard in an SDK of the remote control microcomputer equipment;
the hardware layer comprises a plurality of interfaces for accessing the machine equipment;
the management end comprises basic data management, user authority management, script modification and script operation mode management;
the execution end runs the script flow which is edited based on the setting of the management end, and throws the running log to the management end; the management end is provided with one group, and the execution end is provided with a plurality of groups;
the remote control microcomputer equipment is connected with the machine equipment through a hardware layer interface, and display pictures, mice and keyboard signals of the machine equipment are intercepted;
the script in the management end uses a graphical interface to operate when editing, simulates a flow processing step, manually and accurately configures parameters processed by a mouse and a keyboard, and regenerates an execution script;
when the execution end runs the execution script, the execution end is firstly connected with a server to check whether the script is updated or not;
if not, executing according to the existing script;
if yes, downloading the latest script to the execution end, and executing the latest script;
the method comprises the following steps:
the access layer sends out an operation instruction;
the processing layer receives the operation instruction and controls the machine equipment according to the operation instruction;
the method is characterized in that a management end sets user permission, script updating and script running modes;
the execution end runs the script flow which is edited based on the setting of the management end, and throws the running log to the management end;
when the execution end runs the execution script, the execution end is connected with a server to check whether the script is updated or not;
if yes, downloading the latest script to the execution end, and executing the latest script;
if not, executing according to the existing script;
before the access layer accesses the processing layer, the access layer accesses the machine equipment through the hardware layer, and intercepts display images, mice and keyboard signals of the machine equipment;
the logic layer develops a driving package to control the machine equipment based on a driving event of a mouse and a keyboard in an SDK of the remote control microcomputer equipment in the access layer;
and the script uses a graphical interface to operate during editing, simulates a flow processing step, manually configures parameters processed by a mouse and a keyboard, and regenerates an execution script.
CN202310016380.7A 2023-01-06 2023-01-06 Automatic substitution operating system and method for semiconductor dust-free room Active CN115718670B (en)

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