CN115714245A - Filter, antenna, base station and manufacturing method of filter - Google Patents

Abstract

The embodiment of the present application discloses a filter, an antenna, a base station, and a filter manufacturing method, which are used to avoid separate assembly of multiple resonators and reduce the matching accuracy between the resonators. In this application, the pass filter includes a first inner conductor, an outer conductor, a first insulating dielectric layer, a second insulating dielectric layer and a resonator conductor, the first inner conductor is embedded in the first insulating dielectric layer, and the resonance The device conductor is arranged on the surface of the first insulating medium layer, and the first insulating medium layer is embedded in the second insulating medium layer, and the outer conductor is arranged on the surface of the second insulating medium layer. Compared with the prior art, in realizing While the filter is miniaturized, multiple resonators do not need to be individually assembled, which reduces the matching accuracy between the resonators.

Description

A filter, antenna, base station and filter manufacturing method

technical field

The present application relates to the technical field of communications, and in particular to a filter, an antenna, a base station and a filter manufacturing method.

Background technique

The filter types commonly used in wireless base stations mainly include metal coaxial cavity filters. However, as the integration of wireless devices becomes higher and higher, the requirements for miniaturization and light weight of filters are also higher and higher, and the three-dimensional outline of metal coaxial cavity filters occupies a large space.

For this reason, an in-line filter as shown in FIG. 1 is currently on the market. The in-line filter is a tubular metal housing with a single lumen extending along the longitudinal axis, and a plurality of resonators (250-1, 250-2, 250-3) spaced along the longitudinal axis within the single lumen, each The resonators have a rod (252), and the rods of a first resonator and a second resonator adjacent to each other among the resonators are rotated to have different angular orientations. The in-line filter can realize the miniaturization and weight reduction of the filter.

However, such a structural part requires the assembly and combination of multiple parts, the processing technology is relatively complicated, and the coupling angle needs to be controlled between the resonators, which requires high consistency.

Contents of the invention

Embodiments of the present application provide a filter, an antenna, a base station, and a filter manufacturing method, which are used to avoid separate assembly of multiple resonators, so as to reduce the matching accuracy between the resonators.

The first aspect of the present application provides a filter, the first inner conductor, the outer conductor, the first insulating dielectric layer, the second insulating dielectric layer and the resonator conductor are embedded in the first insulating dielectric layer through the first inner conductor , the resonator conductor is laid on the surface of the first insulating medium layer, and the first insulating medium layer is embedded in the second insulating medium layer, and the outer conductor is laid on the surface of the second insulating medium layer, compared with the prior art , while realizing the miniaturization of the filter, there is no need to assemble multiple resonators separately, which reduces the matching accuracy between the resonators.

In some feasible implementation manners, the resonator conductors are strip-shaped and can be conveniently arranged on the surface of the first insulating medium layer.

In some feasible implementation manners, the length of the resonator conductor is 1/2 of the target wavelength, so the target wavelength to be filtered can be controlled by controlling the length of the resonator conductor.

In some feasible implementation manners, the resonator conductor is arranged on the surface of the first insulating medium layer in a spiral manner, so that the length of the resonator conductor is not limited by the cross-section of the first insulating medium perimeter.

In some feasible implementation manners, the resonator conductor is a metal layer on the surface of the second insulating medium layer, and slots are provided in the metal layer, and the slots are strip-shaped, providing a Layout method.

In some feasible implementation manners, the resonator conductor is a flexible film-coated metal layer, and the resonator conductor is arranged more conveniently.

In some feasible implementation manners, the resonator conductor is a metal conductor plated, which is highly feasible in technology.

In some feasible implementation manners, the second inner conductor and the third insulating medium layer, the second inner conductor is embedded in the third insulating medium layer; the radius of the third insulating medium layer is smaller than that of the first insulating medium layer A radius of the inner conductor, the third insulating medium layer is embedded in the first inner conductor, so that a high-pass filter can be realized.

The second aspect of the present application provides an antenna, including the filter described in various implementation manners in the first aspect.

A third aspect of the present application provides a base station, including the antenna described in the second aspect above.

The fourth aspect of the present application provides a method for manufacturing a filter, including:

embedding the first inner conductor in the first insulating medium layer;

disposing a resonator conductor on the surface of the first insulating dielectric layer;

embedding the first insulating medium layer on which the resonator conductor is arranged in the second insulating medium layer;

The outer conductor is arranged on the surface of the second insulating medium layer.

In some feasible implementation manners, the resonator conductors are strip-shaped.

In some feasible implementation manners, the length of the resonator conductor is 1/2 of the target wavelength.

In some feasible implementation manners, arranging the resonator conductor on the surface of the first insulating medium layer includes: arranging the resonator conductor on the surface of the first insulating medium layer in a spiral manner .

In some feasible implementation manners, the resonator conductor is a metal layer on the surface of the second insulating medium layer, and slots are provided in the metal layer, and the slots are strip-shaped.

In some feasible implementation manners, the resonator conductor is a flexible film metal layer.

In some feasible implementation manners, the resonator conductor is metal conductor plating.

In some feasible implementations, the second inner conductor and the third insulating medium layer; embedding the second inner conductor in the third insulating medium layer; embedding the third insulating medium layer in the first inner conductor In the conductor, the radius of the third insulating medium layer is smaller than the radius of the first inner conductor.

It can be seen from the above technical solutions that the embodiments of the present application have the following advantages:

In this application, the pass filter includes a first inner conductor, an outer conductor, a first insulating dielectric layer, a second insulating dielectric layer and a resonator conductor, the first inner conductor is embedded in the first insulating dielectric layer, and the resonance The device conductor is arranged on the surface of the first insulating medium layer, and the first insulating medium layer is embedded in the second insulating medium layer, and the outer conductor is arranged on the surface of the second insulating medium layer. Compared with the prior art, in realizing While the filter is miniaturized, multiple resonators do not need to be individually assembled, which reduces the matching accuracy between the resonators.

Description of drawings

Fig. 1 is the embodiment schematic diagram of in-line filter;

Figure 2-1 is a schematic diagram of an embodiment of the antenna feeder system in the embodiment of the present application;

FIG. 2-2 is a schematic diagram of the internal structure of the antenna in the embodiment of the present application;

FIG. 3-1 is a schematic cross-sectional view of a filter in an embodiment of the present application;

Figure 3-2 is a schematic diagram of the strip-shaped resonator conductor in the embodiment of the present application;

Fig. 3-3 is another schematic diagram in which the conductor of the resonator in the embodiment of the present application is strip-shaped;

3-4 is a schematic diagram of a C-shaped resonator conductor in the embodiment of the present application;

3-5 is another schematic diagram of the C-shaped resonator conductor in the embodiment of the present application;

3-6 is a schematic diagram of an embodiment of a high-pass filter when the resonator conductor is strip-shaped in the embodiment of the present application;

3-7 is a schematic diagram of an embodiment of a high-pass filter when the resonator conductor is C-shaped in the embodiment of the present application;

FIG. 4 is a schematic diagram of an embodiment of a method for manufacturing a filter in an embodiment of the present application.

Detailed ways

Embodiments of the present application provide a filter, an antenna, a base station, and a filter manufacturing method, which are used to avoid separate assembly of multiple resonators, so as to reduce the matching accuracy between the resonators.

Embodiments of the present application are described below in conjunction with the accompanying drawings.

The terms "first", "second" and the like in the specification and claims of the present application and the above drawings are used to distinguish similar objects, and are not necessarily used to describe a specific sequence or sequence. It should be understood that the terms used in this way can be interchanged under appropriate circumstances, and this is merely a description of the manner in which objects with the same attribute are described in the embodiments of the present application. Furthermore, the terms "comprising" and "having", as well as any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, product, or apparatus comprising a series of elements is not necessarily limited to those elements, but may include elements not expressly included. Other elements listed explicitly or inherent to the process, method, product, or apparatus.

The technical solutions of the embodiments of the present application can be applied to filters in communication systems for various data processing, such as code division multiple access (code division multiple access, CDMA), time division multiple access (time division multiple access, TDMA), frequency division multiple access frequency division multiple access (FDMA), orthogonal frequency-division multiple access (OFDMA), single carrier FDMA (SC-FDMA) and long term evolution (LTE) Filtering in systems such as new radio (NR) systems in the fifth generation (5thgeneration, 5G) mobile communication systems and massive multiple-input multiple-output (massive multiple-input multiple-output, Massive MIMO) systems device.

The term "system" can be used interchangeably with "network". The CDMA system may implement radio technologies such as universal terrestrial radio access (UTRA), CDMA2000, and the like. UTRA may include wideband CDMA (wideband CDMA, WCDMA) technology and other CDMA variant technologies. CDMA2000 may cover interim standard (interim standard, IS) 2000 (IS-2000), IS-95 and IS-856 standards. A TDMA system may implement a radio technology such as global system for mobile communication (GSM). The OFDMA system can realize such as evolved universal wireless terrestrial access (evolved UTRA, E-UTRA), ultra mobile broadband (ultramobile broadband, UMB), IEEE 802.11 (Wi-Fi), IEEE 802.16 (WiMAX), IEEE 802.20, Flash OFDMA, etc. wireless technology. UTRA and E-UTRA are UMTS and UMTS evolutions. Various releases of 3GPP in long term evolution (LTE) and LTE-based evolution are new releases of UMTS using E-UTRA.

In addition, the communication system may also be applicable to future-oriented communication technologies, all of which are applicable to the technical solutions provided in the embodiments of the present application. The system architecture and business scenarios described in the embodiments of the present application are for more clearly illustrating the technical solutions of the embodiments of the present application, and do not constitute limitations on the technical solutions provided by the embodiments of the present application. For the evolution of architecture and the emergence of new business scenarios, the technical solutions provided by the embodiments of this application are also applicable to similar technical problems.

The filter of the embodiment of the present application can be applied to the antenna feeder system of the wireless base station. As shown in FIG. 250 (including insulating sealing tape, polyvinyl chloride insulating tape, etc.) and the like.

Exemplarily, as shown in FIG. 2-2 , it is a schematic diagram of the internal structure of the antenna 210 , the antenna 210 may be located in a radome, and the antenna 210 may specifically include: at least one independent array 211 and an antenna connector 212 .

Wherein, the independent array 211 includes a radiation unit 211-1 and a metal reflection plate 211-2, wherein the radiation unit 211-1 is usually placed above the metal reflection plate 211-2, and the frequencies of different radiation units 211-1 can be the same or different . The independent arrays 211 receive or transmit radio frequency signals through their respective feed networks, which are usually composed of controlled impedance transmission lines, and the feed networks may also include phase shifters 213, combiners 214, filters 215 and drive or calibration The network 216 and the like are modules used to expand performance. The feeding network can implement different radiation beam directions through the transmission or calibration network 216, or obtain calibration signals required by the system.

Wherein, the radiating unit 211-1 is a unit constituting the basic structure of the antenna array, and is used for radiating or receiving radio waves. The metal reflector 211-2 is used to improve the receiving sensitivity of the antenna signal, and gathers the reflection of the antenna signal on the receiving point, which greatly enhances the receiving/transmitting capability of the antenna 210, and also plays a role in blocking and shielding from the back (reverse direction) The interference effect of other radio waves on the received signal. The feeding network is used to feed the signal to the radiation unit 211-1 according to a certain amplitude and phase or send the received wireless signal to the signal processing unit of the wireless base station according to a certain amplitude and phase. The radome is a structural component used to protect the antenna feeder system 200 from the influence of the external environment, has good electromagnetic wave penetration characteristics in terms of electrical performance, and can withstand the effects of harsh external environments in terms of mechanical performance.

The transceiver system of the wireless base station is mainly composed of high-frequency filter, oscillator, power amplifier, modem and power supply. As a basic radio frequency unit, a filter can filter signals of certain specific frequencies to obtain target signals. The filter is composed of resonators through energy coupling, so the miniaturization of the resonator is an important way to miniaturize the filter.

The filter types commonly used in wireless base stations mainly include metal coaxial cavity filters. However, as the integration of wireless devices becomes higher and higher, the requirements for miniaturization and light weight of filters are also higher and higher, and the three-dimensional outline of metal coaxial cavity filters occupies a large space.

For this reason, an in-line filter as shown in FIG. 1 is currently on the market. The in-line filter is a tubular metal housing with a single lumen extending along the longitudinal axis, and a plurality of resonators (250-1, 250-2, 250-3) spaced along the longitudinal axis within the single lumen, each The resonators have a rod (252), and the rods of a first resonator and a second resonator adjacent to each other among the resonators are rotated to have different angular orientations. The in-line filter can realize the miniaturization and weight reduction of the filter.

However, such a structural part requires the assembly and combination of multiple parts, the processing technology is relatively complicated, and the coupling angle needs to be controlled between the resonators, which requires high consistency.

To this end, please refer to Fig. 3-1, the present application proposes a cross-section of a filter 300, including a first inner conductor 310, an outer conductor 320, a first insulating dielectric layer 330, a second insulating dielectric layer 340 and a resonator The conductor 350 is embedded in the first insulating medium layer 330 through the first inner conductor 310, the resonator conductor 350 is arranged on the surface of the first insulating medium layer 330, and the first insulating medium layer 330 is embedded in the second insulating medium In the layer 340, the outer conductor 320 is arranged on the surface of the second insulating medium layer 340. Compared with the prior art, while realizing the miniaturization of the filter, there is no need for multiple resonators to be assembled separately, which reduces the distance between the resonators. Matching precision.

It should be noted that the first inner conductor 310 , the outer conductor 320 , the first insulating medium layer 330 and the second insulating medium layer 340 form a coaxial transmission line. It should be noted that the coaxial transmission line is a guiding system composed of two coaxial cylindrical conductors, and a wide-band microwave transmission line filled with air or high-frequency medium between the inner conductor and the outer conductor. In the embodiment of the present application, the first inner conductor 310 is embedded in the first insulating dielectric layer 330, the first insulating dielectric layer 330 is embedded in the second insulating dielectric layer 340, and the outer conductor 320 is arranged on the second insulating dielectric layer 340 on the surface. In the embodiment of the present application, by arranging the resonator conductor 350 on the surface of the first insulating dielectric layer 330, compared with the prior art, while realizing the miniaturization of the filter, there is no need to assemble multiple resonators separately, reducing The matching accuracy between the resonators is improved.

Next, each of the above-mentioned components will be described in detail.

1. The first inner conductor 310 .

In some feasible implementation manners, the material of the first inner conductor 310 may be conductive metal, such as copper or silver, or other conductive metal, or other conductive substance, which is not limited here. In some feasible implementation manners, the first inner conductor 310 may be an inner conductor in a coaxial transmission line, which is in the shape of a long strip with a circular cut surface. In the embodiment of the present application, the first inner conductor 310 may be used to transmit electrical signals.

2. The first insulating dielectric layer 330 .

In some feasible implementation manners, the material of the first insulating medium layer 330 may be an insulating medium. It should be noted that a substance that is not good at conducting electric current is called an insulating medium, and its resistivity is extremely high. There are many types of insulating media, solid ones such as plastic, rubber, glass, ceramics, etc., liquid ones such as various natural mineral oils, silicone oils, trichlorobiphenyls, etc., and gaseous ones such as air, carbon dioxide, sulfur hexafluoride, etc., here No limit.

In the embodiment of the present application, the first insulating medium layer 330 wraps the first inner conductor 310 , and the first inner conductor 310 is embedded in the first insulating medium layer 330 . Wherein, the cut surface of the first inner conductor 310 is a hollow circle. The first insulating medium layer 330 wraps the first inner conductor 310 to prevent the leakage of the first inner conductor 310 from causing signal distortion.

It should be noted that under the influence of certain external conditions, such as heating and high voltage, the insulating medium will be "broken down" and transformed into a conductor. Before being broken down, the insulating medium is not an absolutely non-conductive object. If a voltage is applied across an insulating medium, a small current will flow through the material. To this end, in some feasible implementation manners, an insulating medium with a corresponding resistivity can be selected as required.

3. Resonator conductor 350 .

Layout method 1.

In some possible implementations, the resonator conductor 350 is strip-shaped. Exemplarily, as shown in FIG. 3-2 , when the resonator conductor 350 is laid flat, it may be in the shape of a rectangle, a long strip, or other strip shapes, which are not limited here. As shown in FIG. 3-3 , the strip-shaped resonator conductor 350 can be arranged on the surface of the first insulating medium layer 330 in a spiral manner to realize the function of a band-stop filter.

In some feasible implementation manners, the material of the resonator conductor 350 may be conductive metal, such as copper or silver, or other conductive metal, or other conductive substance, which is not limited here.

In some feasible implementation manners, a flexible film metal layer may be pasted on the surface of the first insulating medium layer 330 . For another example, a metal conductor plating layer is electroplated on the surface of the first insulating medium layer 330 by means of electroplating. In some feasible implementation manners, the arrangement of the resonator conductor 350 on the surface of the first insulating dielectric layer 330 may also be implemented in other ways, which is not limited here.

It should be noted that the length of the resonator conductor 350 is related to the target wavelength to be filtered, and in some feasible implementation manners, the length of the resonator conductor 350 is 1/2 of the target wavelength. For example, if the target wavelength is 0.01 mm, then the length of the resonator conductor 350 is 0.005 mm.

Layout method 2.

In some feasible implementation manners, as shown in FIGS. 3-4 , the resonator conductor 350 is a metal layer on the surface of the second insulating medium layer 340 , and grooves are provided in the metal layer, and the grooves are strip-shaped. Exemplarily, when the resonator conductor 350 is laid flat, its slots may be rectangular, long strips, or other strips, which is not limited here. In some feasible implementation manners, as shown in FIGS. 3-5 , the slots may be arranged in a C shape on the surface of the first insulating dielectric layer 330 , which is not limited here.

In some feasible implementation manners, the material of the resonator conductor 350 may be conductive metal, such as copper or silver, or other conductive metal, or other conductive substance, which is not limited here.

In some feasible implementation manners, a flexible film metal layer may be pasted on the surface of the first insulating dielectric layer 330 to realize the function of a band-stop filter. For another example, a metal conductor plating layer is electroplated on the surface of the first insulating medium layer 330 by means of electroplating. In some feasible implementation manners, the arrangement of the resonator conductor 350 on the surface of the first insulating dielectric layer 330 may also be implemented in other ways, which is not limited here.

It should be noted that the length of the slot of the resonator conductor 350 is related to the target wavelength to be filtered, and in some feasible implementation manners, the length of the resonator conductor 350 is 1/2 of the target wavelength. For example, if the target wavelength is 0.01 mm, then the length of the resonator conductor 350 is 0.005 mm.

Fourth, the second insulating dielectric layer 340 .

In some feasible implementation manners, the material of the second insulating medium layer 340 may be an insulating medium. It should be noted that a substance that is not good at conducting electric current is called an insulating medium, and its resistivity is extremely high. There are many types of insulating media, solid ones such as plastic, rubber, glass, ceramics, etc., liquid ones such as various natural mineral oils, silicone oils, trichlorobiphenyls, etc., and gaseous ones such as air, carbon dioxide, sulfur hexafluoride, etc., here No limit. In some feasible implementation manners, an insulating medium with a corresponding resistivity can be selected as required.

In the embodiment of the present application, the second insulating dielectric layer 340 wraps the first inner conductor 310 with the resonator conductor 350 , that is, the second insulating dielectric layer 340 wraps the first inner conductor 310 with the resonator conductor 350 , thereby avoiding The leakage of the first inner conductor 310 causes signal distortion.

Five, the outer conductor 320.

In some feasible implementation manners, the material of the outer conductor 320 may be conductive metal, such as copper or silver, or other conductive metal, or other conductive substance, which is not limited here. In some feasible implementation manners, the outer conductor 320 may be an outer conductor in a coaxial transmission line, which is in the shape of a long strip with a circular cut surface. In the embodiment of the present application, the outer conductor 320 is arranged on the surface of the second insulating medium layer 340 for shielding signals and avoiding signal leakage.

In the embodiment of the present application, in the filter 300 of the above form, multiple metal resonator structures are plated or filmed at one time on the insulating layer of the inner and outer conductors, which reduces the need for additional external filter components and does not require multiple resonators to be assembled separately. The coordination precision between the resonators is reduced, and can be independently embedded in the coaxial transmission line.

6. The second inner conductor 360 and the third insulating medium layer 370 .

In some feasible implementation manners, as shown in FIG. 3-6 or FIG. 3-7, the filter 300 can also have a second inner conductor 360 and a third insulating medium layer 370, wherein the second inner conductor 360 is embedded in the first Among the three insulating dielectric layers 370 , the radius of the third insulating dielectric layer 370 is smaller than that of the first inner conductor 310 , and the third insulating dielectric layer 370 is embedded in the first inner conductor 310 to realize the function of a high-pass filter.

In the embodiment of the present application, in the filter 300 of the above form, multiple metal resonator structures are plated or filmed at one time on the insulating layer of the inner and outer conductors, which reduces the need for additional external filter components and does not require multiple resonators to be assembled separately. Reduce the matching accuracy between the resonators, and can be independently embedded in the coaxial transmission line.

The present application also provides an antenna, including the above-mentioned filter.

The present application also provides a base station, including the above-mentioned antenna.

Please refer to FIG. 4, the present application also provides a method for manufacturing a filter, including:

401. Embed a first inner conductor in a first insulating medium layer.

402. Arrange the resonator conductor on the surface of the first insulating medium layer.

In some possible implementations, the resonator conductors are strip-shaped.

In some possible implementations, the length of the resonator conductor is 1/2 of the target wavelength.

In some feasible implementation manners, the resonator conductors are spirally arranged on the surface of the first insulating medium layer.

In some possible implementations, the resonator conductors are flexible foil metal layers.

In some possible implementations, the resonator conductors are metal conductor plating.

In some feasible implementation manners, the resonator conductor is a metal layer on the surface of the second insulating medium layer, and slots are provided in the metal layer, and the slots are strip-shaped.

403. Embed the first insulating medium layer in the second insulating medium layer.

404. Lay the outer conductor on the surface of the second insulating medium layer.

In some feasible implementation manners, for the second inner conductor and the third insulating medium layer, the second inner conductor is embedded in the third insulating medium layer, the third insulating medium layer is embedded in the first inner conductor, and the second inner conductor is embedded in the third insulating medium layer. The radius of the third insulating medium layer is smaller than the radius of the first inner conductor.

It should be noted that for the foregoing method embodiments, for the sake of simple description, they are expressed as a series of action combinations, but those skilled in the art should know that the present application is not limited by the described action sequence. Depending on the application, certain steps may be performed in other orders or simultaneously. Secondly, those skilled in the art should also know that the embodiments described in the specification belong to preferred embodiments, and the actions and modules involved are not necessarily required by this application.

It should be noted that the information interaction and execution process between the modules/units of the above-mentioned device are based on the same idea as the method embodiment of the present application, and the technical effect it brings is the same as that of the method embodiment of the present application. The specific content can be Refer to the descriptions in the foregoing method embodiments of the present application, and details are not repeated here.

Claims (18)

1. A filter, characterized in that, comprising: a first inner conductor, an outer conductor, a first insulating dielectric layer, a second insulating dielectric layer and a resonator conductor; The first inner conductor is embedded in the first insulating medium layer, and the resonator conductor is arranged on the surface of the first insulating medium layer; The first insulating medium layer on which the resonator conductor is arranged is embedded in the second insulating medium layer, and the outer conductor is arranged on the surface of the second insulating medium layer. 2. The filter according to claim 1, wherein the resonator conductors are strip-shaped. 3. The filter according to claim 2, wherein the length of the resonator conductor is 1/2 of the target wavelength. 4. The filter according to claim 2 or 3, wherein the arrangement of the resonator conductor on the surface of the first insulating medium layer comprises: The resonator conductor is spirally arranged on the surface of the first insulating medium layer. 5. The filter according to claim 1, wherein the resonator conductor is a metal layer on the surface of the second insulating medium layer, and a groove is set in the metal layer, and the groove is strips. 6. The filter according to any one of claims 1-5, wherein the resonator conductor is a flexible film metal layer. 7. The filter according to any one of claims 1-5, characterized in that, the resonator conductor is a metal conductor plating. 8. The filter according to any one of claims 1-7, further comprising: a second inner conductor and a third insulating medium layer, the second inner conductor is embedded in the third insulating medium layer; A radius of the third insulating medium layer is smaller than a radius of the first inner conductor, and the third insulating medium layer is embedded in the first inner conductor. 9. An antenna, characterized by comprising the filter according to any one of claims 1-8. 10. A base station, comprising the antenna according to claim 9. 11. A method for manufacturing a filter, comprising: embedding the first inner conductor in the first insulating medium layer; disposing a resonator conductor on the surface of the first insulating dielectric layer; embedding the first insulating medium layer on which the resonator conductor is arranged in the second insulating medium layer; The outer conductor is arranged on the surface of the second insulating medium layer. 12. The method according to claim 11, wherein the resonator conductor is strip-shaped. 13. The method according to claim 12, wherein the length of the resonator conductor is 1/2 of the target wavelength. 14. The method according to claim 12 or 13, wherein arranging the resonator conductor on the surface of the first insulating medium layer comprises: The resonator conductor is spirally arranged on the surface of the first insulating medium layer. 15. The method according to claim 11, wherein the resonator conductor is a metal layer on the surface of the second insulating medium layer, and slots are set in the metal layer, and the slots are strips shape. 16. The method according to any one of claims 11-15, wherein the resonator conductor is a flexible film metal layer. 17. The method according to any one of claims 11-15, wherein the resonator conductor is a metal conductor plating. 18. The method according to any one of claims 11-17, further comprising: the second inner conductor and the third insulating medium layer; embedding the second inner conductor in the third insulating medium layer; The third insulating medium layer is embedded in the first inner conductor, and the radius of the third insulating medium layer is smaller than the radius of the first inner conductor.

Images