CN115708990A - Fluorine-containing gas degradation device and method based on inductive coupling thermal plasma - Google Patents
Fluorine-containing gas degradation device and method based on inductive coupling thermal plasma Download PDFInfo
- Publication number
- CN115708990A CN115708990A CN202211290970.0A CN202211290970A CN115708990A CN 115708990 A CN115708990 A CN 115708990A CN 202211290970 A CN202211290970 A CN 202211290970A CN 115708990 A CN115708990 A CN 115708990A
- Authority
- CN
- China
- Prior art keywords
- gas
- fluorine
- thermal plasma
- containing gas
- inductively coupled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
Landscapes
- Treating Waste Gases (AREA)
Abstract
The invention discloses a fluorine-containing gas degradation device and a method based on inductive coupling thermal plasma.A gas inlet control system respectively controls the flow rates of carrier gas, cooling gas, fluorine-containing gas and active gas in the fluorine-containing gas degradation device based on inductive coupling thermal plasma; the inductively coupled plasma reactor generates and restrains a thermal plasma region, and a cavity vibration generator is fixed on the outer wall of the reaction cavity to prevent solid powder from attaching; the tail gas treatment system treats solid products by a conical powder collector, a spray tower treats acid gas products, the acid gas products are discharged after the detection reaches the standard, the device utilizes a high-frequency alternating current power supply and an induction coil to generate inductive coupling thermal plasma in a reaction cavity, fluorine-containing gas is thoroughly decomposed under the action of local high temperature and reacts with active gas, and therefore the self-recovery characteristic of the fluorine-containing gas is inhibited.
Description
Technical Field
The invention belongs to the technical field of gas degradation, and particularly relates to a fluorine-containing gas degradation device and method based on inductive coupling thermal plasma.
Background
SF 6 And CF 4 The gas containing fluorine is excellent by virtue of stable physical and chemical propertiesThe electric insulation performance is widely applied to the industry of power switches at present, but the fluorine-containing gas has a very strong greenhouse effect and can cause a great influence on the environment, however, no suitable high-performance alternative gas is found at present, and the gas is still widely used in a power system. At the same time, because of SF 6 And the fluorine-containing gas has strong self-recovery property and is difficult to be thoroughly degraded. Therefore, the method for efficiently degrading the fluorine-containing gas is significant.
In recent years, the plasma waste gas treatment technology is widely concerned and researched, and compared with the traditional pyrolysis method, the chemical catalysis method and other methods, the plasma technology has the characteristics of high degradation rate, high energy efficiency and simplicity in operation.
The use of cold plasma technology for the degradation of SF is now known 6 And the like. For example, kabouzi et al investigated SF at different microwave powers in different concentration ranges 6 The change of degradation rate, shih et al, using a radio frequency plasma method, presents a set of low concentration SF for use in a cascade etching apparatus for the semiconductor industry 6 Exhaust gas treatment device, zhang Xiaoxing, et al, studied different pairs of active gases and filling media to SF in dielectric barrier discharge 6 And (4) the influence rule of the degradation rate. Meanwhile, there is a precedent that the thermal plasma is applied to the research related to the degradation of the fluorine-containing gas, such as a sulfur hexafluoride degradation device based on the thermal plasma researched by Sun Hao of the western ann transportation university.
However, these cold plasma and hot plasma devices have many problems. Such as cold plasma method, can only treat SF with low concentration 6 High degradation rate is obtained when the waste gas is treated, and high-concentration SF generated in the actual power industry is treated 6 When waste gas is generated, the waste gas needs to be diluted and then treated; the processing capacity of the cold plasma is low, and the gas flow is usually not higher than 1L/min; and the cold plasma can not completely decompose the fluorine-containing gas because of the lower discharge power. The thermal plasma degradation device solves the problems to a certain extent, but severe electric arcs can seriously ablate the electrodes, the service lives of the electrodes are not long, and the electrodes are not longThe replacement of the electrodes is costly and the equipment is frequently maintained. The present invention aims to solve the above problems.
The above information disclosed in this background section is only for enhancement of understanding of the background of the invention and therefore it may contain information that does not form the prior art that is well known to those of ordinary skill in the art.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a fluorine-containing gas degradation device and method based on inductive coupling thermal plasma, which improve the processing capacity by using the thermal plasma, avoid the adhesion of solid products by using a vibration system to vibrate a cavity wall, and select a cavity material resistant to the corrosion of hydrogen fluoride, thereby having good practical value.
The invention aims to realize the technical scheme that the device for degrading the fluorine-containing gas based on the inductive coupling thermal plasma comprises:
an air intake control system, comprising,
a carrier gas and cooling gas input line which comprises an Ar gas source, a gas valve and two parallel mass flowmeters which are sequentially connected, wherein one mass flowmeter, the gas valve and the Ar gas source form a working state carrier gas input line for providing a working state carrier gas Ar flow Q1, the other mass flowmeter, the gas valve and the Ar gas source form a cooling gas Ar input line for providing a cooling gas Ar flow Q2,
a reaction gas input line which comprises a reaction gas source, a gas valve and a mass flow meter which are connected in sequence to provide active gas flow Q3,
the fluorine-containing gas input line comprises a fluorine-containing gas source, a gas valve and a mass flowmeter which are connected in sequence so as to provide a fluorine-containing gas flow Q4;
an inductively coupled thermal plasma generator, comprising,
a closed shell, which comprises a reaction cavity,
the concentric ceramic tube is arranged in the closed shell, the rotational flow ring is embedded in the concentric ceramic tube and comprises a rotary gas path which enables gas to generate axial and tangential component speeds, an input gas flow field is converged towards the annular center through the rotary gas path, the innermost layer of the concentric ceramic tube is communicated with the working state carrier gas input line to controllably provide working state carrier gas Ar flow Q1, the rotational flow ring at the middle layer is communicated with the reaction gas input line and the fluorine-containing gas input line to controllably provide active gas flow Q3 and fluorine-containing gas flow Q4, the outer layer is communicated with the cooling gas Ar input line to controllably provide cooling gas Ar flow Q2,
a coil arranged in the closed shell, connected with a high-frequency power supply outside the closed shell to generate coupled thermal plasma,
the cavity vibration generator is arranged on the outer wall of the closed shell;
a innocent treatment system, which comprises,
a conical powder collector which is positioned at the lower end of the reaction cavity, solid products are difficult to collect at the bottom of the conical powder collector under the action of the cavity vibration generator,
an alkali liquor spray tower which is communicated with the gas product outlet of the reaction cavity and comprises,
a tower body which contains alkali liquor,
a mortar pump which circularly pumps the alkali liquor at the lower part of the tower body to the upper part,
at least one packing layer which is arranged in the tower body in a stacking way at intervals,
the spray head is communicated with the mortar pump and arranged above the packing layer, acid gas products are adsorbed by the packing layer and react with the alkali fog at the spray opening,
and the waste gas detection device is connected with the sampling ports arranged in the front and the back of the alkali liquor spray tower and is used for sampling and detecting waste gas discharged from the alkali liquor spray tower.
In the fluorine-containing gas degradation device based on the inductive coupling thermal plasma, the flow rate of cooling gas Ar is 50L/min, and the flow rate of carrier gas Ar is 30L/min.
In the fluorine-containing gas degradation device based on the inductive coupling thermal plasma, when the active gas and the fluorine-containing gas are H 2 And SF 6 When the ratio is 4: 1, the active gas and the fluorine-containing gas are H 2 And CF 4 When in use, the ratio is 3: 1.
In the fluorine-containing gas degradation device based on the inductive coupling thermal plasma, the concentric ceramic tubes are three layers of concentric ceramic tubes, and the diameter of the outermost layer of the ceramic tube is 5cm.
In the fluorine-containing gas degradation device based on the inductive coupling thermal plasma, the voltage of the high-frequency power supply is 5kV, the current is 6A, and the working frequency is 3MHz.
In the fluorine-containing gas degradation device based on the inductive coupling thermal plasma, a lead of the coil is a hollow water-cooling lead.
In the fluorine-containing gas degradation device based on the inductive coupling thermal plasma, the coil is provided with an electromagnetic shield for electromagnetic shielding.
In the fluorine-containing gas degradation device based on the inductive coupling thermal plasma, 5 percent of Ca (OH) is used in the alkali liquor spray tower 2 The lye is used to absorb the acid gas products.
In the fluorine-containing gas degradation device based on the inductively coupled thermal plasma, the waste gas detection device comprises an X-ray diffraction analyzer, a chromatographic analyzer and a spectroscopic analyzer.
The degradation method of the fluorine-containing gas degradation device based on the inductive coupling thermal plasma comprises the following steps,
ar is used as carrier gas and cooling gas and is introduced into an inductive coupling thermal plasma generator, and a high-frequency power supply acts on a coil to generate an alternating magnetic field so as to generate thermal plasma;
introducing fluorine-containing gas and reaction gas in a preset proportion, and degrading free radicals generated under the action of thermal plasma into solid products and gas products, wherein the reaction temperature of the thermal plasma is 6000K-15000K;
and introducing the gas product after reaction into an alkali liquor spray tower, absorbing harmful gas and then discharging, and discharging the solid product through a solid product outlet.
Compared with the prior art, the invention has the following advantages: the invention adopts the thermal plasma degradation technology, the reaction temperature is higher, the degradation is more thorough, and the processing capacity is larger; the inductive coupling thermal plasma device is used as a plasma generating source, so that the ablation problem of the solid electrode is effectively solved, and the service life of the generating device is greatly prolonged; the cavity vibration device is added, so that the adhesion of solid powder generated in the reaction process to the inner wall of the reaction wall body is effectively prevented, and the collection and treatment of solid products in the later period are facilitated; the hastelloy lining is added, so that the reaction cavity is more resistant to the corrosion of hydrogen fluoride, and the service life of the cavity is prolonged.
Drawings
Various other advantages and benefits of the present invention will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. It is obvious that the drawings described below are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be derived from them without inventive effort. Also, like parts are designated by like reference numerals throughout the drawings.
In the drawings:
FIG. 1 is a schematic structural diagram of a fluorine-containing gas degradation device based on inductively coupled thermal plasma according to one embodiment of the present invention;
fig. 2 is a schematic structural diagram of an inductively coupled thermal plasma generator of an inductively coupled thermal plasma-based fluorine-containing gas degradation device according to an embodiment of the present invention.
The invention is further explained below with reference to the figures and examples.
Detailed Description
Specific embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. While specific embodiments of the invention are shown in the drawings, it should be understood that the invention may be embodied in various forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
It should be noted that certain terms are used throughout the description and claims to refer to particular components. As one skilled in the art will appreciate, various names may be used to refer to a component. This specification and claims do not intend to distinguish between components that differ in name but not function. In the following description and in the claims, the terms "include" and "comprise" are used in an open-ended fashion, and thus should be interpreted to mean "include, but not limited to. The description which follows is a preferred embodiment of the invention, but is made for the purpose of illustrating the general principles of the invention and not for the purpose of limiting the scope of the invention. The scope of the present invention is defined by the appended claims.
For the purpose of facilitating understanding of the embodiments of the present invention, the following description will be made by taking specific embodiments as examples with reference to the accompanying drawings, and the drawings are not to be construed as limiting the embodiments of the present invention.
For better understanding, as shown in fig. 1 to 2, the apparatus for degrading a fluorine-containing gas based on an inductively coupled thermal plasma includes,
an air intake control system, comprising,
a carrier gas and cooling gas input line which comprises an Ar gas source, an air valve 1 and two parallel mass flowmeters which are sequentially connected, wherein one mass flowmeter, the air valve 1 and the Ar gas source form a working state carrier gas input line for providing a working state carrier gas Ar flow Q1, the other mass flowmeter, the air valve 1 and the Ar gas source form a cooling gas Ar input line for providing a cooling gas Ar flow Q2,
a reaction gas input line which comprises a reaction gas source, a gas valve 1 and a mass flow meter which are connected in sequence to provide active gas flow Q3,
the fluorine-containing gas input line comprises a fluorine-containing gas source, a gas valve 1 and a mass flowmeter which are connected in sequence so as to provide a fluorine-containing gas flow Q4;
an inductively coupled thermal plasma generator 3, which comprises,
a closed shell, which comprises a reaction cavity,
a concentric ceramic tube 3.4 arranged in the closed shell, a rotational flow ring 3.1 embedded in the concentric ceramic tube 3.4, the rotational flow ring 3.1 comprises a rotary gas path which enables gas to generate axial and tangential component speeds, an input gas flow field is converged towards the annular center through the rotary gas path, the innermost layer of the concentric ceramic tube 3.4 is communicated with the working state carrier gas input line to controllably provide working state carrier gas Ar flow Q1, the rotational flow ring 3.1 of the middle layer is communicated with the reaction gas input line and the fluorine-containing gas input line to controllably provide active gas flow Q3 and fluorine-containing gas flow Q4, the outer layer is communicated with the cooling gas Ar input line to controllably provide cooling gas Ar flow Q2,
a coil 3.2 arranged in the closed shell, which is connected out and connected with a high-frequency power supply 4 outside the closed shell to generate coupled thermal plasma,
the cavity vibration generator 5 is arranged on the outer wall of the closed shell;
a innocent treatment system, which comprises,
a conical powder collector which is positioned at the lower end of the reaction cavity, solid products are difficult to collect at the bottom of the conical powder collector under the action of the cavity vibration generator 5,
an alkali liquor spray tower 8 which is communicated with the gas product outlet 7 of the reaction cavity and comprises,
a tower body which contains the alkali liquor,
a mortar pump 8.1 which circularly pumps the alkali liquor at the lower part of the tower body to the upper part,
at least one packing layer 8.3, which is arranged in the tower body in a stacking way at intervals,
a spray head 8.2 which is communicated with the mortar pump 8.1 and is arranged above the packing layer 8.3, acid gas products are absorbed by the packing layer 8.3 and react with the alkali fog at the nozzle,
and the waste gas detection device is connected with the sampling ports arranged in the front and the back of the alkali liquor spray tower 8 and is used for sampling and detecting waste gas discharged from the alkali liquor spray tower 8.
In the preferred embodiment of the fluorine-containing gas degradation device based on the inductively coupled thermal plasma, the flow rate of the cooling gas Ar is 50L/min, and the flow rate of the carrier gas Ar is 30L/min.
The fluorine-containing gas based on the inductively coupled thermal plasmaIn a preferred embodiment of the degradation apparatus, when the reactive gas and the fluorine-containing gas are H 2 And SF 6 When the ratio is 4: 1, the active gas and the fluorine-containing gas are H 2 And CF 4 When in use, the ratio is 3: 1.
In the preferred embodiment of the fluorine-containing gas degradation device based on the inductively coupled thermal plasma, the concentric ceramic tube 3.4 is a three-layer concentric ceramic tube 3.4, and the diameter of the outermost ceramic tube is 5cm.
In a preferred embodiment of the fluorine-containing gas degradation device based on the inductively coupled thermal plasma, the voltage of the high-frequency power supply 4 is 5kV, the current is 6A, and the working frequency is 3MHz.
In a preferred embodiment of the fluorine-containing gas degradation device based on the inductively coupled thermal plasma, the wire of the coil 3.2 is a hollow water-cooled wire.
In a preferred embodiment of the device for degrading a fluorine-containing gas based on inductively coupled thermal plasma, the coil 3.2 is provided with an electromagnetically shielded electromagnetic shield 3.5.
In the preferred embodiment of the fluorine-containing gas degradation device based on the inductively coupled thermal plasma, 5% of Ca (OH) is used in the alkali liquor spray tower 8 2 The lye is used to absorb the acid gas products.
In a preferred embodiment of the fluorine-containing gas degradation device based on inductively coupled thermal plasma, the exhaust gas detection device comprises an X-ray diffraction analyzer, a chromatographic analyzer and a spectroscopic analyzer.
The degradation method of the fluorine-containing gas degradation device based on the inductive coupling thermal plasma comprises the following steps,
ar is used as carrier gas and cooling gas to be introduced into the inductively coupled thermal plasma generator 3, and the high-frequency power supply 4 acts on the coil 3.2 to generate an alternating magnetic field so as to generate thermal plasma;
introducing fluorine-containing gas and reaction gas in a preset proportion, and degrading free radicals generated under the action of thermal plasma into solid products and gas products, wherein the reaction temperature of the thermal plasma is 6000K-15000K;
and introducing the gas product after reaction into an alkali liquor spray tower 8, absorbing harmful gas and then discharging, and discharging the solid product through a solid product outlet 6.
The bottom of the conical powder collector is provided with a solid product outlet 6 for discharging the solid product.
In one embodiment, the fluorine-containing gas degradation device based on inductively coupled thermal plasma comprises:
an air intake control system, which comprises,
the carrier gas and cooling gas input circuit comprises an Ar gas source, a gas valve 1 and two parallel Ar mass flowmeters which are sequentially connected;
a reaction gas input line, wherein the reaction gas can be H 2 Or O 2 Or other active gases, including a reaction gas source, a gas valve 1 and a corresponding mass flowmeter which are connected in sequence;
the fluorine-containing gas input line comprises a fluorine-containing gas source, a gas valve 1 and a fluorine-containing gas mass flowmeter which are connected in sequence;
an inductively coupled thermal plasma generator 3, which comprises,
the closed shell comprises a reaction cavity and a cavity vibration generator 5, wherein the reaction cavity is communicated with the gas inlet control system and receives carrier gas Ar, cooling gas Ar, reaction gas and fluorine-containing gas through three layers of concentric ceramic tubes 3.4 according to a preset proportion; the cavity vibration generator 5 is fixed on the outer surface of the cavity to generate stable vibration;
the high-frequency alternating current power supply provides a high-frequency electromagnetic signal to generate coupled thermal plasma in the ceramic tube;
a coil 3.2 is connected out by a high-frequency power supply 4 and surrounds the outer wall of the concentric ceramic tube, and is used for generating a high-frequency magnetic field under a high-frequency electric signal, and cooling water flows in the hollow part of the coil 3.2 to cool the coil 3.2;
the ceramic air inlet is a three-layer concentric ceramic tube 3.4, one end of the ceramic air inlet is connected with the closed shell, and the other end of the ceramic air inlet is connected with the carrier gas channel, the reaction gas, the fluorine-containing gas channel and the cooling gas channel, and is responsible for providing a generation place of high-frequency inductively coupled plasma and restricting the size of a plasma torch 3.3;
a innocent treatment system, which comprises,
the conical powder collector is used for enabling solid products to be difficult to attach to the wall of the reaction cavity and to be collected at the bottom of the conical cavity under the action of the cavity vibration generator 5;
the alkali liquor spray tower 8 comprises a mortar pump 8.1 for circularly extracting alkali liquor, the mortar pump is communicated with the reaction cavity, an acid gas product is adsorbed by a packing layer 8.3 and reacts with the alkali fog at the nozzle, and the packing at the uppermost layer is used for absorbing redundant alkali fog;
and the waste gas detection device is provided with sampling ports around the alkali liquor spray tower 8 for sampling and detecting waste gas discharged from the alkali liquor spray tower 8.
The working process of the fluorine-containing gas degradation device based on the inductive coupling thermal plasma is as follows: firstly, introducing Ar which is used as a carrier gas and a cooling gas, then generating inductive coupling thermal plasma in a reaction cavity by using a high-frequency power supply 4 and an induction coil, then introducing fluorine-containing gas and active gas to be reacted, and completely decomposing the fluorine-containing gas by using the local high temperature of the thermal plasma. Further, radicals generated after the fluorine-containing gas and the reactive gas are decomposed are combined with each other into degradation products to suppress the self-healing reaction of the fluorine-containing gas. And finally, collecting and treating the obtained solid and gas degradation products, and discharging after the detection reaches the standard.
The fluorine-containing gas and the active gas are respectively SF 6 And H 2 The reaction principle is as follows:
SF 6 +3H 2 →S+6HF。
in the fluorine-containing gas degradation device based on the inductive coupling thermal plasma, the flow rate of cooling gas Ar is 50L/min, and the flow rate of carrier gas Ar is 30L/min. When the active gas and the fluorine-containing gas are H 2 And SF 6 When the ratio is about 4: 1, when the active gas and the fluorine-containing gas are H 2 And CF 4 When this is the case, the ratio is about 3: 1.
In the fluorine-containing gas degradation device based on the inductive coupling thermal plasma, the positive electrode and the negative electrode of a high-frequency alternating current power supply are connected with an induction coil 3.2, and the output frequency and the output power of the induction coil are adjustable.
In the fluorine-containing gas degradation device based on the inductive coupling thermal plasma, the ceramic tube is a three-layer concentric ceramic tube 3.4, and the diameter of the outermost layer ceramic tube is 5cm; the induction coil transmits power to the plasma by 4 turns around the concentric ceramic tube.
In the fluorine-containing gas degradation device based on the inductive coupling thermal plasma, the inner wall of the reaction cavity adopts a 6mm C-276 lining, the melting point is 1325-1370 ℃, the nickel-based degradation device has high nickel-based content, and the device is a preferred material of a high-temperature strong corrosion medium.
In the fluorine-containing gas degradation device based on the inductive coupling thermal plasma, 5 percent of Ca (OH) is used in the alkali liquor spray tower 8 2 Alkali liquor.
In the fluorine-containing gas degradation device based on the inductive coupling thermal plasma, the cavity vibration generator 5 is a pneumatic vibrator and is fixed on the outer wall of the reaction cavity, solid products attached to the inner wall are separated through rapid vibration, and the vibration amplitude and the frequency of the device are adjustable.
In one embodiment, an inductively coupled thermal plasma-based fluorine-containing gas degradation device includes an inlet control system, an inductively coupled thermal plasma generator, and a abatement system. The gas inlet control system comprises input lines of four gases including fluorine-containing gas, reaction gas, carrier gas and cooling gas, wherein the input lines of the gases comprise respective gas sources, a gas valve 1 and a gas mass flow meter 2, the gas flow controlled by the mass flow meter 2 can be adjusted, the Ar flow Q1 of the carrier gas is 30L/min, the Ar flow Q2 of the cooling gas is 50L/min, and the active gas flow Q3 and the fluorine-containing gas flow Q4 are H in a typical working state 2 And SF 6 For example, 40L/min and 10L/min, respectively.
In one embodiment, the inductively coupled thermal plasma generator 3 includes a high frequency ac power source 4. The positive electrode and the negative electrode of the high-frequency alternating current source 4 are respectively connected to two ends of the coil 3.2 to provide high-frequency alternating current signals for the coil, and the typical working state is voltage 5kV, current 6A and working frequency 3MHz. In the inductive coupling thermal plasma generator 3, a rotating gas circuit is arranged in a rotating flow ring 3.1, so that gas can generate axial and tangential component speeds, an input gas flow field is converged towards the center of a ring, an induction coil 3.2 is used for providing a high-frequency magnetic field and providing energy for plasma, an electromagnetic shield 3.5 is used for electromagnetically shielding the coil and preventing the high-frequency magnetic field from influencing the outside, and the three-layer concentric ceramic tube 3.4 is mainly used for dispersing gas inlet and converging a plasma torch 3.3. The inner wall of the reaction cavity adopts a 6mm C-276 lining which is a preferred material of a high-temperature strong corrosion medium.
In one embodiment, the innocent treatment system comprises a cavity vibration generator 5, a solid product outlet 6, a gas product outlet 7, an alkali liquor spray tower 8 and an exhaust gas and waste residue detection device. Wherein the collection of the solid product uses the conical powder collector, the cavity vibration generator 5 makes the cavity produce the rapid vibration, prevent the solid product from adhering to the cavity inner wall, make it gather in the outlet 6 prescription of the solid product and collect under the effects of vibration and gravity, the solid product collected can be further recycled; the gas product outlet 7 can directly sample the gas after reaction, meanwhile, the gas product outlet 7 is connected with an alkali liquor spray tower 8, the waste gas generated by the reaction is treated by the alkali liquor spray tower and then is collected or discharged by a tail gas outlet 8.5, and the alkali liquor spray tower 8 uses 5 percent of Ca (OH) 2 An alkaline solution 8.4 is pumped by a mortar pump 8.1 and sent to a spray head 8.2 of the alkaline mist for spraying, the packing layer 8.3 is mainly made of PE broken block packing, the sprayed alkaline mist and alkaline liquor are fully absorbed by gas products, and CaF of the bottom layer 2 The precipitate can also be recycled; waste gas detection device can use chromatographic analyzer, spectral analyzer to detect, and waste gas can directly be discharged into the atmosphere after up to standard through the inspection, and waste residue detection device can use X-ray diffraction analysis appearance to detect.
In one embodiment, the lead of the coil is a hollow water-cooling lead, the lead under the action of a high-frequency alternating current power supply can emit a large amount of heat, and the current of the lead mainly passes through the outer wall of the lead due to the skin effect. The use of wire is not influenced to inside cavity, and cavity water-cooling makes things convenient for the heat dissipation of wire more simultaneously, has increased its life.
In one embodiment, the diameter of the three-layer concentric ceramic tube is selected within a proper range, and the diameter cannot be too large or too small, the too large diameter can cause non-concentrated magnetic field beam, energy collapse and influence on the energy efficiency of the inductively coupled thermal plasma and the electric arc power and temperature, the too small diameter can cause great reduction of gas flow, and the product treatment rate is slowed down.
In one embodiment, the pneumatic vibrator is fixed on the outer wall of the reaction cavity, the pneumatic vibrator is started before the solid product is collected, the solid product attached to the inner wall of the reaction cavity is collected to the solid product outlet 6 through vibration and gravity, and then the solid product is collected by using a cloth bag.
In one embodiment, ar is used as the carrier gas and the cooling gas, ar is more stable to arc as the carrier gas and requires less power to sustain an arc discharge, and Ar is used as the inert gas without reacting with the fluorine-containing gas to generate other by-products. H 2 The reaction gas reacts with the fluorine-containing gas to only generate HF and a corresponding solid simple substance, and is more convenient for harmless treatment.
Alternatively, N may be used as the cooling gas and the carrier gas 2 Nitrogen is cheaper and easier to obtain, but N and F can be combined with each other to generate NF in the cooling process 3 Which is also a greenhouse gas.
Optionally, the reaction gas may be an oxygen-containing gas, the principle of degrading fluorine-containing gas is slightly different from that of hydrogen, and O free radicals are combined with S or C to generate SO in the process of cooling x F y ，SO x Or CO x F y ，CO x Etc. to thereby suppress SF 6 While the advantage when using oxygen is that no solid product is formed.
In one embodiment, the degradation method of the fluorine-containing gas degradation device based on the inductively coupled thermal plasma comprises the following steps:
ar is used as carrier gas and cooling gas and is introduced into an inductive coupling thermal plasma generator, and a high-frequency power supply acts on a coupling inductor to generate an alternating magnetic field so as to generate and provide energy for the plasma;
introducing fluorine-containing gas and reaction gas in a preset proportion, mutually combining free radicals generated under the action of thermal plasma to inhibit the self-recovery characteristic of the sulfur hexafluoride, and taking the form of a solid or gas according to different final products of the introduced reaction gas, wherein the reaction temperature of an arc plasma area is about 6000K-15000K;
and introducing the reacted gas product into an alkali liquor spray tower, discharging after absorbing harmful gas, directly discharging into the atmosphere after passing inspection, and discharging and inspecting the solid product through a solid product outlet, so that the solid product is convenient to recycle.
The carrier gas and the cooling gas can be Ar or N 2 The active gas may be H 2 Or O 2 Said fluorine-containing gas comprising SF 6 And CF 4 。
Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above-described embodiments and application fields, and the above-described embodiments are illustrative, instructive, and not restrictive. Those skilled in the art, having the benefit of this disclosure, may effect numerous modifications thereto without departing from the scope of the invention as defined by the appended claims.
Claims (10)
1. A fluorine-containing gas degradation device based on inductively coupled thermal plasma, comprising:
an air intake control system, comprising:
the device comprises a carrier gas and cooling gas input line, a cooling gas and a cooling gas output line, wherein the carrier gas and cooling gas input line comprises an Ar gas source, a gas valve and two parallel mass flowmeters which are sequentially connected, one mass flowmeter, the gas valve and the Ar gas source form a working state carrier gas input line for providing a working state carrier gas Ar flow Q1, and the other mass flowmeter, the gas valve and the Ar gas source form a cooling gas Ar input line for providing a cooling gas Ar flow Q2;
the reaction gas input line comprises a reaction gas source, a gas valve and a mass flow meter which are connected in sequence so as to provide active gas flow Q3;
the fluorine-containing gas input line comprises a fluorine-containing gas source, a gas valve and a mass flowmeter which are connected in sequence so as to provide a fluorine-containing gas flow Q4;
an inductively coupled thermal plasma generator, comprising:
a closed housing comprising a reaction chamber;
the concentric ceramic tube is arranged in the closed shell, the rotational flow ring is embedded in the concentric ceramic tube and comprises a rotary gas path which enables gas to generate axial and tangential component speeds, an input gas flow field is converged towards the annular center through the rotary gas path, the innermost layer of the concentric ceramic tube is communicated with the working state carrier gas input line to controllably provide working state carrier gas Ar flow Q1, the rotational flow ring in the middle layer is communicated with the reaction gas input line and the fluorine-containing gas input line to controllably provide active gas flow Q3 and fluorine-containing gas flow Q4, and the outer layer is communicated with the cooling gas Ar input line to controllably provide cooling gas Ar flow Q2;
the coil is arranged in the closed shell, is connected out of the closed shell and is connected with a high-frequency power supply outside the closed shell so as to generate coupled thermal plasma;
the cavity vibration generator is arranged on the outer wall of the closed shell;
a innocent treatment system, comprising:
the conical powder collector is positioned at the lower end of the reaction cavity, and a solid product is difficult to collect at the bottom of the conical powder collector under the action of the cavity vibration generator;
the alkali liquor spray column, its intercommunication the gas product export of reaction chamber, it includes:
a tower body containing a lye;
the mortar pump circularly pumps the alkali liquor at the lower part of the tower body to the upper part;
at least one packing layer which is arranged in the tower body in a stacking mode at intervals;
the spray head is communicated with the mortar pump and arranged above the packing layer, and the acidic gas product is adsorbed by the packing layer and reacts with the alkali fog at the spray opening;
and the waste gas detection device is connected with the sampling ports arranged in the front and the back of the alkali liquor spray tower and is used for sampling and detecting waste gas discharged from the alkali liquor spray tower.
2. The apparatus for degrading fluorine-containing gas based on inductively coupled thermal plasma according to claim 1, wherein the flow rate of the cooling gas Ar is preferably 50L/min and the flow rate of the carrier gas Ar is preferably 30L/min.
3. The inductively coupled thermal plasma-based fluorine-containing gas degradation device according to claim 1, wherein when the reactive gas and the fluorine-containing gas are H 2 And SF 6 When the ratio is 4: 1, the active gas and the fluorine-containing gas are H 2 And CF 4 When in use, the ratio is 3: 1.
4. The inductively coupled thermal plasma-based fluorine-containing gas degradation device according to claim 1, wherein the concentric ceramic tubes are three-layered concentric ceramic tubes, and the outermost ceramic tube has a diameter of 5cm.
5. The inductively coupled thermal plasma-based fluorine-containing gas degradation device according to claim 1, wherein the high frequency power supply has a voltage of 5kV, a current of 6A, and an operating frequency of 3MHz.
6. The inductively coupled thermal plasma-based fluorine-containing gas degradation device according to claim 1, wherein the wire of the coil is a hollow water-cooled wire.
7. The inductively coupled thermal plasma-based fluorine-containing gas degrading apparatus according to claim 1, wherein the coil is provided with an electromagnetically shielded electromagnetic shield.
8. The apparatus for degrading F-containing gas based on inductively coupled thermal plasma of claim 1, wherein the alkali spray tower uses 5% Ca (OH) 2 The lye is used to absorb the acid gas products.
9. The inductively coupled thermal plasma-based fluorine-containing gas degradation device of claim 1, wherein the exhaust gas detection device comprises an X-ray diffraction analyzer, a chromatograph, and a spectrometer.
10. The degradation method of the fluorine-containing gas degradation device based on the inductively coupled thermal plasma according to any one of claims 1 to 9, which comprises the steps of:
ar is used as carrier gas and cooling gas and is introduced into an inductive coupling thermal plasma generator, and a high-frequency power supply acts on a coil to generate an alternating magnetic field so as to generate thermal plasma;
introducing fluorine-containing gas and reaction gas in a preset proportion, and degrading free radicals generated under the action of thermal plasma into solid products and gas products, wherein the reaction temperature of the thermal plasma is 6000K-15000K;
and introducing the reacted gas product into an alkali liquor spray tower, absorbing harmful gas and then discharging, and discharging the solid product through a solid product outlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211290970.0A CN115708990A (en) | 2022-10-20 | 2022-10-20 | Fluorine-containing gas degradation device and method based on inductive coupling thermal plasma |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211290970.0A CN115708990A (en) | 2022-10-20 | 2022-10-20 | Fluorine-containing gas degradation device and method based on inductive coupling thermal plasma |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115708990A true CN115708990A (en) | 2023-02-24 |
Family
ID=85231360
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211290970.0A Pending CN115708990A (en) | 2022-10-20 | 2022-10-20 | Fluorine-containing gas degradation device and method based on inductive coupling thermal plasma |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115708990A (en) |
-
2022
- 2022-10-20 CN CN202211290970.0A patent/CN115708990A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7394041B2 (en) | Apparatus for treating a waste gas using plasma torch | |
| CN109663556A (en) | Disturb the reaction unit and method of enhanced dielectric barrier discharge activation carbon dioxide | |
| RU2005121271A (en) | PLASMA SYNTHESIS OF METAL OXIDE NANOPOWDER AND DEVICE FOR ITS IMPLEMENTATION | |
| CN113082952B (en) | Sulfur hexafluoride degradation treatment device and method based on sliding arc discharge | |
| CN104378901A (en) | Two-stage arc plasma torch | |
| CN205340517U (en) | High -efficient low temperature plasma equipment | |
| CN115708990A (en) | Fluorine-containing gas degradation device and method based on inductive coupling thermal plasma | |
| CN204145869U (en) | A kind of two stage electric arc plasma torch | |
| CN105013301B (en) | Tubular type dielectric barrier discharge plasma emission-control equipment | |
| CN209279170U (en) | Water molecule supply device of plasma torch excitation device | |
| CN115624848B (en) | Double-stage sulfur hexafluoride degradation reactor based on dielectric barrier discharge and treatment method thereof | |
| CN201742637U (en) | Atmospheric pressure medium blocking-air cold plasma fluidizing device | |
| CN104363690B (en) | A kind of plasma torch of two-step nozzle structure | |
| CN105934064A (en) | Single-dielectric barrier low-temperature plasma reactor | |
| CN2604847Y (en) | Atmospheric radio-frequency cylinder injective cold plasma generator | |
| JP4696378B2 (en) | Apparatus for treating waste liquid of organic compound containing metal and its treatment method | |
| CN115554823B (en) | Sulfur hexafluoride degradation device based on thermal plasma | |
| CN206854263U (en) | A kind of synchrotron radiation optical element carbon distribution cleaning device | |
| CN109455705A (en) | A kind of system by purifying and light microwave reduction prepares graphene | |
| CN104902664A (en) | Multi-stage series arc plasma ion spray gun | |
| CN204168586U (en) | A kind of steam activation Sum decomposition spray gun | |
| US12101868B2 (en) | Thermal plasma treatment method for sulfur hexafluoride degradation | |
| JP5952094B2 (en) | Method for producing carbon monoxide from carbon dioxide | |
| CN104378902A (en) | Water vapor activation and decomposition spray gun | |
| JP2000012283A (en) | Plasma generating device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |