CN115685497A - Dispersion lens - Google Patents
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- CN115685497A CN115685497A CN202211385137.4A CN202211385137A CN115685497A CN 115685497 A CN115685497 A CN 115685497A CN 202211385137 A CN202211385137 A CN 202211385137A CN 115685497 A CN115685497 A CN 115685497A
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Abstract
Description
技术领域technical field
本申请涉及光学技术领域。更具体地说,本申请涉及一种色散镜头。This application relates to the field of optical technology. More specifically, the present application relates to a dispersive lens.
背景技术Background technique
色散镜头是应用于光谱共焦传感器的一种特殊镜头,其是光谱共焦传感器的核心器件,决定着分辨率、量程、线长等参数。目前色散镜头存在的设计难点在于:传统色散镜头多数是大数值孔径的镜头,存在球差影响,使得每种波长光线在不同数值孔径角中均会在镜头深度方向上出现多个测量光斑(也即聚焦点),如图1所示,图1是波长为460nm和470nm光线的光路图,图1中460nm光线产生A1和A2两个测量光斑,470nm光线产生B1和B2两个测量光斑,其中,B1位于A1和A2之间(也即不同波长的测量光斑存在交叉现象),导致经两种波长测量出的峰值如图2所示,也即两种峰值重合。如此在测量微小厚度的被测物体时,其成像会出现图像混合区域,使得光谱共焦传感器无法测量微小厚度的被测物体。Dispersion lens is a special lens applied to spectral confocal sensor. It is the core device of spectral confocal sensor, which determines the resolution, range, line length and other parameters. The difficulty in the design of the current dispersion lens is that most of the traditional dispersion lenses are lenses with large numerical apertures, which have the influence of spherical aberration, so that each wavelength of light will have multiple measurement spots in the depth direction of the lens at different numerical aperture angles (also That is, the focus point), as shown in Figure 1, Figure 1 is the light path diagram of light with wavelengths of 460nm and 470nm, in Figure 1, the 460nm light produces two measurement spots A1 and A2, and the 470nm light produces two measurement spots B1 and B2, where , B1 is located between A1 and A2 (that is, the measurement spots of different wavelengths have a cross phenomenon), resulting in the peaks measured by the two wavelengths as shown in Figure 2, that is, the two peaks overlap. In this way, when measuring a measured object with a small thickness, an image mixing area will appear in its imaging, making it impossible for the spectral confocal sensor to measure a measured object with a small thickness.
对于上述缺陷,现有技术有通过特殊的物镜,在不缩小量程的情况下提升信噪比,使第二个峰值能够显示出来,但此种方式所产生的两种峰值依旧重合度较高,还是不能达到测量微小厚度的目的。For the above defects, the existing technology uses a special objective lens to improve the signal-to-noise ratio without reducing the range, so that the second peak can be displayed, but the two peaks produced by this method still have a high degree of coincidence. Still can not reach the purpose of measuring tiny thickness.
发明内容Contents of the invention
本申请的一个目的是解决上述问题,并提供相应的有益效果。One purpose of the present application is to solve the above problems and provide corresponding beneficial effects.
本申请的另一个目的是,提供一种色散镜头,解决了如何在不改变量程的情况下,提升测量微小厚度的被测物体的精准度的技术问题。本申请主要通过下述技术方案实现:Another object of the present application is to provide a dispersive lens, which solves the technical problem of how to improve the accuracy of measuring a measured object with a small thickness without changing the measuring range. The application is mainly realized through the following technical solutions:
本申请提供了一种色散镜头,包括:The application provides a dispersion lens, including:
第一透镜组、遮光构件和第二透镜组,其中,所述第一透镜组用于将入射光出射至所述遮光构件,所述遮光构件包括遮光部和透光部,所述遮光部用于遮挡所述入射光的中心光线,所述入射光的边缘光线经所述透光部出射至所述第二透镜组,所述第二透镜组汇聚所述边缘光线,形成与所述边缘光线中每种波长一一对应的测量光斑。The first lens group, the light-shielding member and the second lens group, wherein the first lens group is used to emit incident light to the light-shielding member, the light-shielding member includes a light-shielding part and a light-transmitting part, and the light-shielding part uses In order to block the central ray of the incident light, the marginal ray of the incident light is emitted to the second lens group through the light-transmitting part, and the second lens group converges the marginal ray to form a There is a one-to-one measurement spot for each wavelength.
本申请的有益效果包括:The beneficial effects of the application include:
本申请通过在色散镜头中设置包含遮光部和透光部的遮光构件,使得本申请入射光的中心光线被遮光部遮挡或者拦截,入射光的边缘光线(也即除中心光线以外的光线)可以通过所述透光部入射至第二透镜组,由所述第二透镜组汇聚形成与所述边缘光线中每种波长一一对应的测量光斑。也即,入射光中每种波长的光线,在经本申请提供的色散镜头汇聚后,均只汇聚成一个测量光斑,且相邻两个测量光斑具有一定的距离。与现有技术中每种波长的光线均产生多个测量光斑且相邻两个测量光斑之间存在其他波长的测量光斑相比,本申请在测量微小厚度的被测物体时,其成像不会出现图像混合区域,因此可以有效地避免这种不同波长的多个测量光斑之间存在交叉的现象,进而可以避免由两种波长测量出的峰值重合的情况。因此,本申请可以在不改变量程的情况下,提升测量微小厚度的被测物体的精准度。In the present application, a light shielding member including a light shielding part and a light transmitting part is arranged in the dispersion lens, so that the central ray of the incident light of the present application is blocked or intercepted by the light shielding part, and the marginal light rays of the incident light (that is, light rays other than the central light rays) can be Incident to the second lens group through the light-transmitting part, the second lens group converges to form a measurement spot corresponding to each wavelength of the marginal light rays. That is to say, the rays of each wavelength in the incident light are converged into only one measurement spot after being converged by the dispersion lens provided by the present application, and there is a certain distance between two adjacent measurement spots. Compared with the light of each wavelength in the prior art that produces multiple measurement spots and there are other wavelengths of light spots between two adjacent measurement spots, when the application measures the measured object with a small thickness, its imaging will not An image mixing area appears, so the phenomenon of crossing between the multiple measurement spots of different wavelengths can be effectively avoided, and then the overlapping of the peaks measured by the two wavelengths can be avoided. Therefore, the present application can improve the accuracy of measuring a measured object with a small thickness without changing the measuring range.
由于本申请汇聚的多个测量光斑中,相邻两个测量光斑之间存在一定的距离,使得经本申请色散镜头而成的图像的分辨率比传统色散镜头而成的图像的分辨率更高,成像更清晰。Due to the fact that there is a certain distance between two adjacent measurement spots among the multiple measurement spots gathered by this application, the resolution of the image formed by the dispersion lens of this application is higher than that of the image formed by the traditional dispersion lens , the image is clearer.
附图说明Description of drawings
为了更清楚地说明本申请实施例的技术方案,下面将对本申请实施例的描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本申请的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动性的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the accompanying drawings that need to be used in the description of the embodiments of the present application. Obviously, the accompanying drawings in the following description are only some embodiments of the present application , for those skilled in the art, other drawings can also be obtained according to these drawings without paying creative labor.
图1为传统色散镜头汇聚光线的光路图;Fig. 1 is the optical path diagram of the convergent light of the traditional dispersion lens;
图2为传统光谱共焦传感器测量经传统色散镜头出射的光线的峰值示意图;Figure 2 is a schematic diagram of the peak value of the light emitted by the traditional dispersive lens measured by the traditional spectral confocal sensor;
图3为光谱共焦传感器的工作原理示意图;Figure 3 is a schematic diagram of the working principle of the spectral confocal sensor;
图4为本申请的色散镜头在一些实施例中的光路结构示意图;Fig. 4 is a schematic diagram of the optical path structure of the dispersion lens of the present application in some embodiments;
图5为本申请的色散镜头汇聚光线的光路图;Fig. 5 is the optical path diagram of the dispersive lens convergent light of the present application;
图6为本申请中遮光构件在一些实施例中的结构示意图;Fig. 6 is a schematic structural view of a light-shielding member in some embodiments of the present application;
附图标记说明:1、色散镜头;10、第一透镜组;11、第一透镜;12、第二透镜;20、遮光构件;21、遮光部;22、透光部;30、第二透镜组;31、第三透镜;32、第四透镜。Explanation of Reference Signs: 1. Dispersion lens; 10. First lens group; 11. First lens; 12. Second lens; 20. Light shielding member; 21. Light shielding part; group; 31, the third lens; 32, the fourth lens.
具体实施方式Detailed ways
为了使本申请实施例的目的、技术方案及优点更加清楚明白,下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例是本申请一部分实施例,而不是全部的实施例。基于本申请中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例,都属于本申请保护的范围。In order to make the purpose, technical solutions and advantages of the embodiments of the application clearer, the technical solutions in the embodiments of the application will be clearly and completely described below in conjunction with the drawings in the embodiments of the application. Obviously, the described implementation The examples are some of the embodiments of the present application, not all of them. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of this application.
本申请实施例的说明书中的术语“第一”和“第二”等是用于区别不同的对象,而不是用于描述对象的特定顺序。例如,第一透镜组和第二透镜组是用于区别不同的透镜组,而不是用于描述透镜组的特定顺序。The terms "first" and "second" in the description of the embodiments of the present application are used to distinguish different objects, rather than to describe a specific sequence of objects. For example, the first lens group and the second lens group are used to distinguish different lens groups, not to describe a specific order of the lens groups.
在本申请实施例中,“示例性的”或者“例如”等词用于表示作例子、例证或说明。本申请实施例中被描述为“示例性的”或者“例如”的任何实施例或设计方案不应被解释为比其它实施例或设计方案更优选或更具优势。确切而言,使用“示例性的”或者“例如”等词旨在以具体方式呈现相关概念。In the embodiments of the present application, words such as "exemplary" or "for example" are used as examples, illustrations or illustrations. Any embodiment or design scheme described as "exemplary" or "for example" in the embodiments of the present application shall not be interpreted as being more preferred or more advantageous than other embodiments or design schemes. Rather, the use of words such as "exemplary" or "such as" is intended to present related concepts in a concrete manner.
光谱共焦传感器工作原理解释:Explanation of the working principle of the spectral confocal sensor:
如图3所示,光源从S小孔出射,经过色散物镜聚焦后发生光谱色散,在像面上形成沿着光轴方向不同波长连续分布的单色光焦点,且每个波长的单色光焦点到被测物体的距离都不同。当被测物处于测量范围内某一位置时,只有特定波长的光在被测面上是聚焦状态,该波长的光由于满足共焦条件,可以从被测物表面反射并进入光谱仪,而其他波长的光在被测物面表面处于离焦状态,反射后无法进入光谱仪。通过光谱仪解码得到回波光强最大处的波长值,从而测得被测物对应的距离值。As shown in Figure 3, the light source emerges from the small hole S, and after being focused by the dispersive objective lens, spectral dispersion occurs, forming a monochromatic light focus with different wavelengths continuously distributed along the optical axis direction on the image surface, and the monochromatic light of each wavelength The distance from the focal point to the measured object is different. When the measured object is at a certain position within the measurement range, only the light of a specific wavelength is focused on the measured surface, and the light of this wavelength can be reflected from the surface of the measured object and enter the spectrometer because it meets the confocal condition, while other The light of the wavelength is in a defocused state on the surface of the measured object, and cannot enter the spectrometer after reflection. The wavelength value at the maximum echo light intensity is obtained by decoding the spectrometer, so as to measure the distance value corresponding to the measured object.
以下结合附图对本申请的具体实施方式进行进一步的说明。The specific implementation manners of the present application will be further described below in conjunction with the accompanying drawings.
如图4所示,为本申请实施例提供的色散镜头1。在图4中,所述色散镜头1包括第一透镜组10、遮光构件20和第二透镜组30,其中,所述第一透镜组10用于将入射光出射至所述遮光构件20,所述遮光构件20包括遮光部21和透光部22,如图6所示,所述遮光部21用于遮挡所述入射光的中心光线,所述入射光的边缘光线经所述透光部22出射至所述第二透镜组30,所述第二透镜组30汇聚所述边缘光线,形成与所述边缘光线中每种波长一一对应的测量光斑。As shown in FIG. 4 , it is the
如图5所示,图5为经所述色散镜头1汇聚的波长为460nm和470nm光线的光路图,波长为460nm的光线仅汇聚成一个测量光斑C,波长为470nm的光线同样也是仅汇聚成一个测量光斑D,且两种波长的成像区域存在一定的距离,不会出现重合的现象。由此,本申请可以提升被测物体成像的分辨率,提升测量微小厚度的被测物体的精准度。As shown in Figure 5, Figure 5 is an optical path diagram of light rays with a wavelength of 460nm and 470nm converged by the
应当理解的是,本申请实施例所提供的色散镜头1应用于点光谱共焦传感器。It should be understood that the
所述边缘光线的艾里斑半径的大小并是不会因所述中心光线被所述遮挡部遮挡而变化。The size of the Airy disk radius of the marginal ray does not change due to the blocking of the central ray by the shielding part.
所述第一透镜组10用于使较大角度的光能够全部进入所述遮光构件20;所述第二透镜组30用于将不同的光色散到不同的深度位置,也即用于汇聚不同波长的光线。The
在一些实施方式中,所述第一透镜组10包括第一透镜11和第二透镜12。In some embodiments, the
所述第一透镜11的入射面曲率半径被设置为172.64mm,厚度被设置为2.8mm,材料为H-ZF88,半直径被设置为4.11mm。The radius of curvature of the incident surface of the
所述第一透镜11的出射面曲率半径被设置为-15.66mm,厚度被设置为0.33mm,半直径被设置为4.30mm。The radius of curvature of the exit surface of the
所述第二透镜12的入射面曲率半径被设置为-12.87mm,厚度被设置为2mm,材料为H-ZF88,半直径被设置为4.28mm。The radius of curvature of the incident surface of the
所述第二透镜12的出射面曲率半径被设置为-19.31mm,厚度被设置为0.20mm,半直径被设置为4.54mm。The radius of curvature of the exit surface of the
于本实施例中,所述第一透镜11为双胶合透镜,所述第二透镜12为齐明透镜。所述双胶合透镜和所述齐明透镜可以有效地减小球差,甚至将球差降低为零。In this embodiment, the
在一些实施方式中,所述遮光构件20为光阑。In some embodiments, the
在一些实施方式中,所述遮光部21具有涂黑层。具体的,是所述涂黑层覆盖了整个所述遮光部21。In some embodiments, the
在一些实施方式中,所述第二透镜组30包括第三透镜31和第四透镜32。In some embodiments, the
所述第三透镜31的入射面曲率半径被设置为19.31mm,厚度被设置为2mm,材料为H-ZF88,半直径被设置为4.54mm。The radius of curvature of the incident surface of the
所述第三透镜31的出射面曲率半径被设置为12.87mm,厚度被设置为0.33mm,半直径被设置为4.28mm。The radius of curvature of the exit surface of the
所述第四透镜32的入射面曲率半径被设置为15.66mm,厚度被设置为2.80mm,材料为H-ZF88,半直径被设置为4.30mm。The radius of curvature of the incident surface of the
所述第四透镜32的出射面曲率半径被设置为-172.64mm,厚度被设置为15.15mm,半直径被设置为4.11mm。The radius of curvature of the exit surface of the
所述第三透镜31为齐明透镜,所述第四透镜32为双胶合透镜。The
在一些实施方式中,所述色散镜头1还包括镜筒,用于固定所述第一透镜组10、所述遮光构件20和所述第二透镜组30。In some embodiments, the
以上对本申请及其实施方式进行了描述,这种描述没有限制性,附图中所示的也只是本申请的实施方式之一,实际的结构并不局限于此。总而言之,如果本领域的普通技术人员受其启示,在不脱离本申请实施例创造宗旨的情况下,不经创造性的设计出与该技术方案相似的结构方式及实施例,均应属于本申请实施例的保护范围。The present application and its implementations are described above, and this description is not limiting. What is shown in the drawings is only one of the implementations of the application, and the actual structure is not limited thereto. In a word, if a person of ordinary skill in the art is inspired by it, without departing from the purpose of the invention of the embodiment of the application, without creatively designing a structural method and embodiment similar to the technical solution, it shall belong to the implementation of the application. example of the scope of protection.
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CN113137931A (en) * | 2021-04-27 | 2021-07-20 | 珠海横琴美加澳光电技术有限公司 | Spectrum confocal device and method capable of measuring surface shape or thickness |
CN113447119A (en) * | 2021-06-29 | 2021-09-28 | 熵智科技(深圳)有限公司 | Line spectrum confocal sensor |
CN218481695U (en) * | 2022-11-07 | 2023-02-14 | 深圳市道显技术有限公司 | Dispersion lens |
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CN113137931A (en) * | 2021-04-27 | 2021-07-20 | 珠海横琴美加澳光电技术有限公司 | Spectrum confocal device and method capable of measuring surface shape or thickness |
CN113447119A (en) * | 2021-06-29 | 2021-09-28 | 熵智科技(深圳)有限公司 | Line spectrum confocal sensor |
CN218481695U (en) * | 2022-11-07 | 2023-02-14 | 深圳市道显技术有限公司 | Dispersion lens |
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