CN115683988A - Radiation effect research test device and method - Google Patents
Radiation effect research test device and method Download PDFInfo
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- CN115683988A CN115683988A CN202211201901.8A CN202211201901A CN115683988A CN 115683988 A CN115683988 A CN 115683988A CN 202211201901 A CN202211201901 A CN 202211201901A CN 115683988 A CN115683988 A CN 115683988A
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- heating
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- 238000012360 testing method Methods 0.000 title claims abstract description 32
- 230000000191 radiation effect Effects 0.000 title claims abstract description 26
- 238000011160 research Methods 0.000 title claims abstract description 24
- 238000000034 method Methods 0.000 title abstract description 17
- 238000010438 heat treatment Methods 0.000 claims abstract description 99
- 238000012806 monitoring device Methods 0.000 claims abstract description 10
- 238000010998 test method Methods 0.000 claims abstract description 9
- 238000005259 measurement Methods 0.000 claims abstract description 6
- 238000001514 detection method Methods 0.000 claims abstract description 3
- 239000000523 sample Substances 0.000 claims description 56
- 238000002474 experimental method Methods 0.000 claims description 11
- 230000005855 radiation Effects 0.000 claims description 7
- 239000011521 glass Substances 0.000 claims description 6
- 229910010293 ceramic material Inorganic materials 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 11
- 238000000137 annealing Methods 0.000 abstract description 5
- 230000017525 heat dissipation Effects 0.000 abstract description 5
- 230000007547 defect Effects 0.000 abstract description 4
- 239000002699 waste material Substances 0.000 abstract description 3
- 239000006101 laboratory sample Substances 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/30—Nuclear fission reactors
Abstract
The invention provides a radiation effect research test device and a radiation effect research test method, which solve the problems that in the existing high-temperature irradiation test process, a heating chuck is too large to cause heat waste, and the heat dissipation time is too long due to the too large area of the heating chuck, so that annealing occurs to part of defects in the heat dissipation process of the heating chuck, the accurate measurement of an effect rule is finally seriously influenced, and the analysis of a total dose effect rule is hindered. The invention comprises a base, a heating plate, a thermocouple, a fixing clamp, a temperature monitoring device, a power supply and a plurality of supporting columns; one end of each of the plurality of pillars is connected with the fixed base, and the other end of each of the plurality of pillars is fixedly connected with the heating sheet; the fixing clamp is positioned on the heating sheet; the input end of the thermocouple is connected with the heating sheet, and the output end of the thermocouple is connected with the temperature detection device; the power supply is connected with the heating plate.
Description
Technical Field
The invention relates to the research of radiation effect of electronic devices, in particular to a radiation effect research test device and a radiation effect research test method.
Background
In the research process of the radiation effect, the temperature is one of important influencing factors, and the generation and evolution processes of radiation-induced defects of the device can be changed by adjusting the temperature, so that the radiation effect mechanism can be deeply known; meanwhile, the application of high temperature in the irradiation process is also an effective accelerated test method, which has important significance for the evaluation of the radiation resistance of the device; in addition, temperature is an important means for studying device reliability, for example, in MOS technology, the device needs to be applied with high temperature.
However, when a total dose effect experiment or a post-irradiation annealing effect study is performed by using 10keV-X rays, a chuck heating method is often adopted to heat the device. Although this method can ensure a constant temperature, it has the following problems:
1. the heating chuck of the probe station for the ray source has larger size (8 inches), while the size of a bare chip for a total dose irradiation test is often in the mm magnitude, and the full chuck heating causes large heat waste;
2. the heating chuck has overlarge area, too long time for heat dissipation and too long cooling process, annealing can occur in the cooling process due to partial defects, the accurate measurement of effect rules is seriously influenced, and the analysis of the total dose effect rules is hindered.
Therefore, a safe and feasible heating method is urgently needed to solve the problem of applying high temperature to the device when a total dose effect irradiation experiment is carried out by using 10keV-X rays, so that the requirement of the radiation effect research of the electronic device is met.
Disclosure of Invention
The invention provides a radiation effect research test device and a radiation effect research test method, which are used for solving the technical problems that in the existing high-temperature irradiation test process, a heating chuck is too large to cause heat waste, and the heat dissipation time is too long due to the too large area of the heating chuck, so that annealing occurs to part of defects in the heat dissipation process of the heating chuck, the accurate measurement of an effect rule is finally seriously influenced, and the analysis of a total dose effect rule is hindered.
In order to realize the purpose, the technical scheme of the invention is as follows:
the utility model provides a radiation effect research test device, includes radiation experiment device, radiation experiment device includes probe chuck and ray tube, its characterized in that: the device also comprises a heating experimental device;
the heating experiment device comprises a base, a heating plate, a thermocouple, a fixing clamp, a temperature monitoring device, a power supply and a support;
one end of the strut is connected with the fixed base, and the other end of the strut is fixedly connected with the heating sheet;
the fixing clamp is positioned on the heating sheet and used for fixing the experimental sample to be heated;
the input end of the thermocouple is connected with the heating sheet, and the output end of the thermocouple is electrically connected with the temperature detection device;
the power supply is electrically connected with the heating plate;
the base is coaxially arranged on the probe chuck, and the ray tube is positioned right above the heating plate;
the probe chuck has a surface area that is at least 100 times the surface area of the heat patch.
Further, the fixing clamp comprises an elastic fixing end and a right-angle fixing end;
the right-angle fixed end is a baffle arranged on the heating sheet, and a groove is formed in the baffle and is used for connecting one end of an experimental sample; the elastic fixed end and the right-angle fixed end are arranged correspondingly, and an experimental sample to be heated is positioned between the elastic fixed end and the right-angle fixed end; the elasticity stiff end is fixed the spring on the rotation axis including the rotation axis of fixing on the heating plate and one end, and the other end of spring is used for the other end of the experimental sample of extrusion awaiting heating.
Furthermore, the output end of the thermocouple is electrically connected with a temperature monitoring device through a signal wire, and the power supply is electrically connected with the heating plate through a cable.
Furthermore, the number of the supporting columns is four, and the four supporting columns are uniformly fixed on the edge of the bottom surface of the heating sheet.
Further, the base and the support are made of glass materials, and the heating plate is made of ceramic materials.
The radiation effect research test method is characterized in that the radiation effect research test device based on the radiation effect research test method comprises the following steps:
step 4, turning on a ray tube and starting irradiation;
and 6, after the temperatures of the heating sheet and the experimental sample are reduced to room temperature, performing parameter test on the experimental sample.
Further, the fixing clamp comprises an elastic fixing end and a right-angle fixing end;
the right-angle fixed end is a baffle arranged on the heating sheet, and a groove is formed in the baffle and is used for connecting one end of an experimental sample; the elastic fixed end and the right-angle fixed end are arranged correspondingly, and an experimental sample to be heated is positioned between the elastic fixed end and the right-angle fixed end; the elastic fixed end comprises a rotating shaft fixed on the heating sheet and a spring with one end fixed on the rotating shaft, and the other end of the spring is used for extruding the other end of the experimental sample to be heated;
in the step 1, one end of an experimental sample is fixed on the groove on the baffle, and the other end of the experimental sample is extruded towards the baffle by using a spring.
Compared with the prior art, the invention has the following beneficial effects:
(1) According to the heating experimental device provided by the invention, because the surface area of the heating sheet is small relative to that of the probe chuck, the heating and cooling rates are high, the heating and cooling rates in the high-temperature irradiation test process are effectively improved, the high-temperature irradiation test efficiency is greatly improved, the effectiveness of test data is increased, and meanwhile, the total dose effect test cost is effectively reduced.
(2) The heating experimental device provided by the invention can effectively realize the fixation and heating of an experimental sample, the heating area is small, and the heating sheet is far away from the ray tube, so that the influence of high-temperature conduction on the ray tube is effectively reduced, and the safety of an irradiation test is greatly improved. Therefore, the invention has good application prospect.
(3) In the invention, the support and the base are made of glass, so that the heat conduction of the heating sheet can be prevented. The heating plate is made of ceramic, so that the heating plate has good temperature stability and a wide heating range, and the experimental range of the heating device is larger.
(4) The method for carrying out the total dose effect test based on the heating device design can effectively heat an experimental sample when the total dose test is carried out by using the ray tube, has simple and feasible structure and easy operation, and has important application value for high-temperature irradiation test and annealing test after irradiation because the heating sheet made of ceramics has better temperature stability and wider heating temperature range.
Drawings
FIG. 1 is a schematic structural diagram of a micro heating device according to an embodiment of the present invention;
FIG. 2 is a schematic view of a die attach structure according to an embodiment of the present invention.
Wherein the reference numbers are as follows:
1-base, 2-support, 3-heating plate, 4-thermocouple, 5-fixing clamp, 51-elastic fixing end, 52-right-angle fixing end, 6-temperature monitoring device, 7-power supply, 8-cable, 9-experimental sample, 10-ray tube and 11-probe chuck.
Detailed Description
The invention is further explained below with reference to the drawings and the detailed description.
A radiation effect research test device is shown in figure 1 and comprises a heating test device and a radiation test device. The heating experimental device comprises a base 1, a support column 2, a heating plate 3, a thermocouple 4, a fixing clamp 5, a temperature monitoring device 6 and a power supply 7, and the radiation experimental device comprises a probe chuck 11 and a ray tube 10. The base 1 is made of smooth glass with the thickness of 2-5mm, the base 1 made of the smooth glass is placed on the upper surface of the probe chuck 11, when a vacuum pump of the probe chuck is opened, the base 1 can be well adsorbed on the probe chuck 11, and the ray tube 10 is located right above the heating plate 3.
One end of four equal-length glass-made pillars 2 in the heating experimental device is fixedly bonded on the upper surface of the base 1, and the other end of the pillars is used for fixing the heating sheet 3 made of ceramic, so that heat conduction between the heating sheet 3 and the base 1 can be prevented to the greatest extent. The fixing clamp 5 is positioned on the heating plate 3 and used for fixing the experimental sample 9, and the experimental sample 9 is positioned under the ray tube 10, so that the irradiation experiment is convenient to carry out, and the irradiation experiment is more perfect. The base 1 is made of glass. The surface area of the heating plate 3 is much smaller than that of the probe chuck 11, and at present, the size of the probe chuck 11 is 4 inches at minimum, and the size of the heating plate is 0.7 × 0.7mm or 7 × 7mm or 10 × 10mm in millimeter scale, and the areas of the two are greatly different, and the ratio of the surface areas is 106 at minimum.
The power supply 7 is connected to the heater chip 3, and applies an operating voltage to the heater chip 3 so that the heater chip 3 can be heated.
As shown in fig. 2, the fixing jig 5 includes an elastic force fixing end 51 and a right angle fixing end 52. The right-angle fixed end 52 is a baffle arranged on the heating plate 3, a groove is arranged on the baffle, and one end of the experimental sample 9 is fixed in the groove; elasticity stiff end 51 is corresponding with right angle stiff end 52, including fixing rotation axis and the spring on heating plate 3, the one end of spring is fixed on the rotation axis, and the other end and the fixed experimental sample 9 of right angle stiff end 52 cooperation, the spring passes through the rotation axis rotation for the spring is just to experimental sample 9, and then extrudees fixed experimental sample 9, and the spring passes through the rotation axis rotation, makes the skew experimental sample 9 of spring, and experimental sample 9 is loosened this moment.
When placing the laboratory sample on hot plate 3, laboratory sample 9's one end is fixed in the recess of right angle stiff end, and laboratory sample 9's the other end passes through the spring and extrudees laboratory sample to the right angle stiff end, consequently, fixes laboratory sample 9 on hot plate 3 through elasticity stiff end 51 and right angle stiff end 52.
The lower surface of heating plate 3 is provided with thermocouple 4, and thermocouple 4's input and heating plate 3 contact, and thermocouple 4's output is connected with temperature monitoring devices 6 through the signal line for real time monitoring heating plate 3 temperature, and adjust the voltage and the electric current that power 7 applyed for heating plate 3 through the value that temperature monitoring devices 6 monitored, and then adjust heating plate 3's temperature.
A radiation effect research test method based on the device specifically comprises the following steps:
And 2, pricking the bare chip, and giving the bare chip a test environment for irradiation biasing or electrical parameter measurement.
And 3, connecting the heating sheet 3 with a power supply, setting the power supply to a specified voltage value, starting the temperature monitoring equipment, and setting a target temperature value of the heating sheet 3, so that the heating sheet 3 maintains the target temperature value under the specified voltage value until the experiment is finished.
Step 4, the tube 10 is turned on and irradiation is started.
And 5, accumulating the total dose on the bare chip, turning off the ray tube 10, stopping irradiation, turning off the power supply 7 and stopping heating.
And 6, after the temperatures of the heating sheet 3 and the bare chip are reduced to room temperature, carrying out parameter test on the bare chip.
Claims (7)
1. A radiation effect research test apparatus comprising a radiation experiment apparatus including a probe chuck (11) and a tube (10), characterized in that: the device also comprises a heating experimental device;
the heating experimental device comprises a base (1), a heating plate (3), a thermocouple (4), a fixing clamp (5), a temperature monitoring device (6), a power supply (7) and a support column (2);
one end of the strut (2) is connected with the fixed base (1), and the other end is fixedly connected with the heating sheet (3);
the fixing clamp (5) is positioned on the heating sheet (3) and used for fixing an experimental sample (9) to be heated;
the input end of the thermocouple (4) is connected with the heating sheet (3), and the output end of the thermocouple (4) is electrically connected with the temperature detection device (6);
the power supply (7) is electrically connected with the heating sheet (3);
the base (1) is coaxially arranged on a probe chuck (11), and the ray tube (10) is positioned right above the heating plate (3);
the surface area of the probe chuck (11) is at least 100 times of the surface area of the heating sheet (3).
2. A radiation effect research test device according to claim 1, wherein: the fixing clamp (5) comprises an elastic fixing end (51) and a right-angle fixing end (52);
the right-angle fixed end (52) is a baffle arranged on the heating sheet (3), a groove is formed in the baffle, and the groove is used for connecting one end of an experimental sample (9); the elastic fixed end (51) and the right-angle fixed end (52) are arranged correspondingly, and the experimental sample (9) to be heated is positioned between the elastic fixed end (51) and the right-angle fixed end (52); the elastic fixed end (51) comprises a rotating shaft fixed on the heating sheet (3) and a spring with one end fixed on the rotating shaft, and the other end of the spring is used for extruding the other end of the experimental sample (9) to be heated.
3. A radiation effect research test device according to claim 2, wherein: the output end of the thermocouple (4) is electrically connected with the temperature monitoring device (6) through a signal wire, and the power supply (7) is electrically connected with the heating plate (3) through a cable (8).
4. A radiation effect research test device according to claim 3, wherein: the number of the support columns (2) is four, and the four support columns (2) are uniformly fixed on the edge of the bottom surface of the heating sheet (3).
5. A radiation effect research test device according to claim 4, characterized in that: the base (1) and the support (2) are made of glass materials, and the heating sheet (3) is made of ceramic materials.
6. A radiation effect research test method, based on claim 1, wherein the radiation effect research test device comprises the following steps:
step 1, fixing an experimental sample on the upper surface of a heating plate (3) through a fixing clamp (5);
step 2, pricking a needle of the experimental sample to finish irradiation biasing or electrical parameter measurement;
step 3, setting a power supply (7) to a specified voltage value, starting a temperature monitoring device (6), and setting a target temperature value of the heating sheet (3) so that the heating sheet (3) maintains the target temperature value under the specified voltage value until the experiment is finished;
step 4, turning on the ray tube (10) and starting irradiation;
step 5, accumulating the total dose on the experimental sample to the specified total dose, closing the ray tube (10), stopping irradiation, closing the power supply (7) and stopping heating;
and 6, after the temperatures of the heating sheet (3) and the experimental sample are reduced to room temperature, performing parameter test on the experimental sample.
7. The test method for researching radiation effect according to claim 6, characterized in that: the fixing clamp (5) comprises an elastic fixing end (51) and a right-angle fixing end (52);
the right-angle fixed end (52) is a baffle arranged on the heating sheet (3), a groove is formed in the baffle, and the groove is used for connecting one end of an experimental sample (9); the elastic fixed end (51) and the right-angle fixed end (52) are arranged correspondingly, and the experimental sample (9) to be heated is positioned between the elastic fixed end (51) and the right-angle fixed end (52); the elastic fixing end (51) comprises a rotating shaft fixed on the heating sheet (3) and a spring with one end fixed on the rotating shaft, and the other end of the spring is used for extruding the other end of the experimental sample (9) to be heated;
in the step 1, one end of an experimental sample is fixed on the groove on the baffle, and the other end of the experimental sample is extruded towards the baffle by using a spring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211201901.8A CN115683988A (en) | 2022-09-29 | 2022-09-29 | Radiation effect research test device and method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211201901.8A CN115683988A (en) | 2022-09-29 | 2022-09-29 | Radiation effect research test device and method |
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| CN115683988A true CN115683988A (en) | 2023-02-03 |
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| CN202211201901.8A Pending CN115683988A (en) | 2022-09-29 | 2022-09-29 | Radiation effect research test device and method |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101050056A (en) * | 2006-04-05 | 2007-10-10 | 罗建超 | New method and equipment for preparing vacuum glass faceplate |
| CN205991950U (en) * | 2016-07-22 | 2017-03-01 | 中国科学院上海应用物理研究所 | A kind of in situ X-ray diffraction diffraction test sample platform |
| RU203691U1 (en) * | 2020-12-25 | 2021-04-15 | федеральное государственное автономное образовательное учреждение высшего образования "Санкт-Петербургский политехнический университет Петра Великого" (ФГАОУ ВО "СПбПУ") | Sample holder for carrying out X-ray structural measurements in a wide temperature range, with the possibility of simultaneous application of uniaxial tensile strain and an electric field to the sample |
| CN113834767A (en) * | 2021-09-01 | 2021-12-24 | 合肥晶弘电器有限公司 | Ultraviolet testing device |
| US20220128492A1 (en) * | 2018-11-23 | 2022-04-28 | Rigaku Corporation | Single-crystal x-ray structure analysis apparatus and sample holder |
| CN217385152U (en) * | 2022-01-20 | 2022-09-06 | 中国科学院兰州化学物理研究所 | Polycrystal X-ray diffraction-material corrosion in-situ characterization analysis system |
-
2022
- 2022-09-29 CN CN202211201901.8A patent/CN115683988A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101050056A (en) * | 2006-04-05 | 2007-10-10 | 罗建超 | New method and equipment for preparing vacuum glass faceplate |
| CN205991950U (en) * | 2016-07-22 | 2017-03-01 | 中国科学院上海应用物理研究所 | A kind of in situ X-ray diffraction diffraction test sample platform |
| US20220128492A1 (en) * | 2018-11-23 | 2022-04-28 | Rigaku Corporation | Single-crystal x-ray structure analysis apparatus and sample holder |
| RU203691U1 (en) * | 2020-12-25 | 2021-04-15 | федеральное государственное автономное образовательное учреждение высшего образования "Санкт-Петербургский политехнический университет Петра Великого" (ФГАОУ ВО "СПбПУ") | Sample holder for carrying out X-ray structural measurements in a wide temperature range, with the possibility of simultaneous application of uniaxial tensile strain and an electric field to the sample |
| CN113834767A (en) * | 2021-09-01 | 2021-12-24 | 合肥晶弘电器有限公司 | Ultraviolet testing device |
| CN217385152U (en) * | 2022-01-20 | 2022-09-06 | 中国科学院兰州化学物理研究所 | Polycrystal X-ray diffraction-material corrosion in-situ characterization analysis system |
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