CN115683397A - Flexible elastic film sensing array and preparation method thereof - Google Patents
Flexible elastic film sensing array and preparation method thereof Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
- B22F10/20—Direct sintering or melting
- B22F10/22—Direct deposition of molten metal
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/10—Processes of additive manufacturing
- B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y10/00—Processes of additive manufacturing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y80/00—Products made by additive manufacturing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
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Abstract
The invention discloses a flexible elastic film sensing array and a preparation method thereof, wherein the flexible elastic film sensing array comprises: the flexible elastic film sensing layer consists of a first film sensing layer and a second film sensing layer laminated on the surface of the first film sensing layer, and a plurality of first conductive electrodes are arranged in the first film sensing layer and the second film sensing layer; and the second conductive electrodes are respectively connected with the first conductive electrodes in a one-to-one correspondence manner. Wherein the arrangement direction of the first conductive electrodes in the first thin film sensing layer is perpendicular to the arrangement direction of the first conductive electrodes in the second thin film sensing layer. The plurality of first conductive electrodes are gallium-based liquid metal conductive electrodes. By utilizing the coaxial direct-writing 3D printing technology and designing the crossed laminated electrode network structure, the original at least multi-layer sensor structure design is reduced into two layers, the manufacturing process difficulty is reduced, and the production cost is reduced.
Description
Technical Field
The invention relates to the technical field of flexible and elastic sensor preparation, in particular to a flexible and elastic film sensing array and a preparation method thereof.
Background
The sensor is an indispensable functional device in the information acquisition process and is a basic core component of the information technology. Common sensor types include inductive, capacitive, electromagnetic, resistive, triboelectric, and the like. As a novel sensing technology, the friction electric sensor can collect and convert small-scale energy such as mechanical signals and the like into electric signals based on the working principle of the friction electric-induction coupling effect and the static electric induction effect, can analyze detailed information of external force by identifying the electric signals, and is widely applied to the fields of self-driven sensing, implanted medical devices, electronic skins, wearable equipment, medical electronics, environmental monitoring and the like.
At present, sensor manufacturing technologies such as deposition, magnetron sputtering, etching, photoetching and the like are difficult to avoid using high-value equipment and complex manufacturing processes, so that the preparation cost is high.
Disclosure of Invention
In view of the above disadvantages of the prior art, the present invention provides a flexible elastic film sensor array and a method for manufacturing the same, which aims to solve the problems of complex manufacturing process and high manufacturing cost of the conventional flexible elastic sensor.
A flexible, elastic film sensor array, comprising:
the flexible elastic film sensing layer consists of a first film sensing layer and a second film sensing layer laminated on the surface of the first film sensing layer, and a plurality of first conductive electrodes are arranged in the first film sensing layer and the second film sensing layer;
and the second conductive electrodes are respectively connected with the first conductive electrodes in a one-to-one correspondence manner.
Optionally, the flexible elastic thin film sensing array, wherein an arrangement direction of the first conductive electrodes in the first thin film sensing layer is perpendicular to an arrangement direction of the first conductive electrodes in the second thin film sensing layer.
Optionally, the array of flexible elastic film sensors, wherein the thickness of the first conductive electrodes is 0.1-1.8mm.
Optionally, the flexible elastic thin film sensing array, wherein the first conductive electrodes are gallium-based liquid metal conductive electrodes.
Optionally, the flexible elastic film sensing array, wherein the surface of the second film sensing layer has a surface micro-groove-plane composite structure or a plane structure.
A method for preparing the flexible elastic film sensor array comprises the following steps:
providing a substrate layer;
printing a first thin film sensing layer on the surface of the substrate layer and printing a second thin film sensing layer on the surface of the first thin film sensing layer by adopting an ink coaxial direct-writing 3D printing method to obtain a flexible elastic thin film sensing layer; wherein the first thin film sensing layer and the second thin film sensing layer both contain a first conductive electrode,
and separating the substrate layer from the flexible elastic film sensing layer, and connecting a second conductive electrode with the first conductive electrode to obtain the flexible elastic film sensing array.
Optionally, the flexible elastic film sensing array, wherein the printing of the first film sensing layer on the surface of the substrate layer and the printing of the second film sensing layer on the surface of the first film sensing layer by using the ink coaxial direct writing 3D printing method obtain the flexible elastic film sensing layer, specifically includes:
providing outer layer ink and inner layer ink for coaxial direct writing 3D printing;
setting parameters of 3D printing equipment, printing a first thin film sensing layer on the surface of the substrate layer by utilizing the outer layer ink and the inner layer ink along a printing path, and printing a second thin film sensing layer in the vertical direction of the first thin film sensing layer to obtain the flexible elastic thin film sensing layer.
Optionally, the flexible elastic film sensor array, wherein the outer layer of ink comprises: an electronegative elastomer and a viscosity modifier; the inner layer ink comprises liquid metal and a conductive aid.
Optionally, the sensing array of flexible elastic film, wherein the electronegative elastic material comprises: silica gel, polydimethylsiloxane, polyimide; the viscosity modifier comprises silicon dioxide, polytetrafluoroethylene, silk protein and cellulose.
Optionally, in the flexible elastic film sensing array, the conductive assistant includes micro-nano-scale graphene, carbon nanotubes, metal particles, MXene, and the like.
Has the beneficial effects that: compared with the prior art, the flexible elastic film sensing array provided by the invention reduces the structural design of the sensor which originally needs multiple layers into two layers, thereby reducing the production cost.
Drawings
FIG. 1 is a schematic diagram of a flexible elastic film sensor array according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a printing path of a sensing layer of a flexible elastic film;
FIG. 3 is a schematic cross-sectional view of a sensing layer of a flexible elastic membrane according to an embodiment of the present invention;
FIG. 4 is a flow chart of a method for manufacturing a flexible and elastic thin film sensor array according to the present invention.
Detailed Description
The invention provides a flexible and elastic film sensing array and a preparation method thereof, and the invention is further described in detail below in order to make the purpose, technical scheme and effect of the invention clearer and clearer. It should be understood that the specific embodiments described herein are merely illustrative of the invention and do not limit the invention.
As shown in fig. 1, the sensing array of the flexible elastic film provided by the present invention comprises: a flexible elastic film sensing layer 10 and a second conductive electrode 20 connected to the flexible elastic film sensing layer 10. The flexible and elastic film sensing layer 10 is composed of two film sensing layers, namely a first film sensing layer 11 and a second film sensing layer 12, and both the first film sensing layer 11 and the second film sensing layer 12 include a first conductive electrode 13, it is easy to understand that the second conductive electrode 20 is connected to the first conductive electrode 13.
In this embodiment, the first conductive electrode 13 is a liquid metal electrode or a liquid metal electrode doped with a conductive additive, and the liquid metal may be a gallium-based liquid metal. By adopting the liquid metal as the conductive electrode, the collection and transmission of electric signals can be realized when the flexible elastic film sensing layer deforms, and the sensing capacity is still realized.
In the present embodiment, the first conductive electrode 13 is wrapped in the thin film sensing layer, and the thickness thereof may be 0.10mm to 0.80mm, and 0.80mm to 1.8mm. The thickness of the first conductive electrode 13 is controlled within 0.10mm to 1.80mm, so that the thickness of the whole flexible elastic film sensing array can be reduced on the premise of meeting the sensing performance of the sensor.
In this embodiment, the first and second thin film sensing layer main bodies are film layers made of electronegative materials, and the first conductive electrode is arranged between the film layers at intervals. The electronegative elastic material comprises but is not limited to silica gel, polydimethylsiloxane and polyimide, and the sensing array can have the characteristics of flexibility, stretchability and high resolution by selecting an elastic electronegative material as a film material.
In this embodiment, the arrangement of the first conductive electrode in the first thin film sensing layer and the first conductive electrode in the second thin film sensing layer is a cross-laminated arrangement. For example, assuming that the first thin film sensing layer 11 is horizontally disposed, the first conductive electrodes in the first thin film sensing layer 11 are arranged at intervals along the x-axis direction, and the arrangement direction of the first conductive electrodes in the second thin film sensing layer is perpendicular to the arrangement direction of the first conductive electrodes in the first thin film sensing layer. It is easily understood that the first conductive electrode is arranged in a manner that the first thin film sensing layer and the second thin film sensing layer are crossed up and down.
In an implementation manner of this embodiment, the surfaces of the first and second thin film sensing layers are of a planar structure or have a micro-groove-planar composite structure, so that the specific surface area of the thin film sensing layer is effectively expanded, the generation of frictional charges is enhanced, and the response performance of the sensing array is improved.
Based on the same inventive concept, the invention also provides a preparation method of the flexible elastic film sensing array, as shown in fig. 4, the method comprises the following steps:
and S10, providing a substrate layer.
Specifically, the substrate layer may be a metal film such as an aluminum film, a copper film, or the like, or a water-soluble film. It will be readily appreciated that the substrate layer functions as a support.
Step S20 is included after the step S10, an ink coaxial direct writing 3D printing method is adopted, a first thin film sensing layer is printed on the surface of the substrate layer, a second thin film sensing layer is printed on the surface of the first thin film sensing layer, and a flexible elastic thin film sensing layer is obtained; wherein the first thin film sensing layer and the second thin film sensing layer both contain a first conductive electrode.
Specifically, printing ink is prepared in advance, and the printing ink is divided into outer layer ink and inner layer ink, wherein the outer layer ink is used for forming the flexible elastic film main body, and the inner layer ink is used for forming the first conductive electrode. The outer ink layer is made of electronegative elastic materials such as silica gel, PDMS and PI, and can be filled with a proper amount of materials such as silicon dioxide, PTFE, silk protein and cellulose for adjusting the viscosity of the ink and enhancing the charge capture capacity. The inner layer ink is made of gallium-based liquid metal, and proper micro-nano-scale graphene, carbon nano tubes, MXENE, metal particles (such as Fe, cu and Ni) and the like are mixed in the inner layer ink, so that the conductivity can be enhanced while the viscosity is adjusted. The outer layer ink material and the inner layer ink material are respectively and evenly mixed by centrifugal stirring, so that internal bubbles are removed under the action of negative pressure, and the ink is used for printing. And setting printing parameters by using an ink direct-writing 3D printing method, wherein the printing parameters comprise printing parameters such as control of printing speed, nozzle printing height, nozzle outer diameter, nozzle inner diameter, printing distance, printing path and the like, and preparing the flexible elastic film sensing array.
In the printing process, a coaxial nozzle firstly enables a coaxial fiber to be extruded and molded on the substrate layer along a straight line, after the first fiber is printed, a second coaxial fiber is printed in parallel at a fixed interval, the fibers are arranged regularly on the substrate layer in a reciprocating mode in such a way, a bottom flexible elastic film sensing layer is formed, and the designed printing path is as shown in fig. 2. The manufactured flexible elastic film sensing layer is extruded through an interface at a lower printing height, and the surface of the sensing layer is of a complete plane structure or a micro-groove-plane composite structure, so that the contact area between the surface of the flexible elastic film sensing layer and an external object is effectively expanded. And drying and curing the printed flexible elastic film sensing layer, wherein the cross section of the formed structure is shown in fig. 3.
And after the bottom film sensing layer is formed, designing a cross laminated network structure, controlling printing parameters such as printing speed, nozzle printing height, nozzle outer diameter, nozzle inner diameter, printing interval, printing path and the like by using the same coaxial direct-writing 3D printing-interface extrusion composite forming method, and printing again in the vertical direction to form the flexible elastic film sensing array.
And step S30, after the step S20, separating the substrate layer from the flexible elastic film sensing layer, and connecting a second conductive electrode with the first conductive electrode to obtain the flexible elastic film sensing array.
Specifically, the bottom substrate layer is directly separated from the flexible elastic film sensing layer, two ends of the flexible elastic film sensing layer are processed, the electrode array is manufactured by connecting wires, and the flexible elastic film sensor is formed by packaging, as shown in fig. 1. It should be noted that, the technology for separating the substrate layer from the flexible elastic film layer and the packaging technology are all the prior art, and are not limited herein.
The method for manufacturing the flexible and elastic thin film sensor array provided by the present invention is further explained by the following specific manufacturing examples.
Example 1
1. Preparing printing ink
The outer layer ink adopts silica gel and a proper amount of silicon dioxide as raw materials, is fully and uniformly mixed by centrifugal stirring, and removes bubbles in the ink under the action of negative pressure for later use; the inner-layer ink adopts gallium-based liquid metal and proper amount of graphene with micro-nano scale as raw materials, is fully and uniformly mixed by centrifugal stirring, and removes bubbles in the ink under the action of negative pressure for later use;
2. printing
Selecting an aluminum film as a substrate, adding the outer layer ink and the inner layer ink prepared in the step into coaxial direct-writing 3D printing equipment, controlling printing parameters such as printing speed of 20mm/min, nozzle printing height of 0.20mm, nozzle outer diameter of 0.40mm, nozzle inner diameter of 0.10mm, printing distance of 0.45mm, printing path and the like, designing a printing path, printing on the surface of the aluminum film, in the printing process, enabling one coaxial fiber to be extruded and formed on the substrate layer along a straight line by the coaxial nozzle, after the first piece of printing is finished, printing a second coaxial fiber in parallel at a fixed distance, and repeating the steps in such a way to enable the fibers to be regularly arranged on the substrate layer to form a bottom flexible elastic film sensing layer; the manufactured flexible elastic film sensing layer is extruded by an interface at a lower printing height, and the surface of the flexible elastic film sensing layer is of a complete plane structure or a micro-groove-plane composite structure, so that the contact area between the surface of the flexible elastic film sensing layer and an external object is effectively expanded. Drying and curing the printed flexible elastic film sensing layer; after the bottom film sensing layer is formed, a cross laminated network structure is designed, the same coaxial direct-writing 3D printing-interface extrusion composite forming method is utilized, printing parameters such as the printing speed of 20mm/min, the printing height of a nozzle of 0.4mm, the outer diameter of the nozzle of 0.40mm, the inner diameter of the nozzle of 0.10mm, the printing distance of 0.45mm, the printing path and the like are controlled, the printing path is designed, and printing is carried out again in the vertical direction to form the flexible and elastic film sensing array.
3. Package with a metal layer
And removing the substrate layer at the bottom of the flexible elastic film sensing array to directly separate the substrate layer from the bottom surface of the flexible elastic film sensing array. And processing two ends of the flexible elastic film sensing layer, manufacturing an electrode array by connecting wires, and packaging to form the flexible elastic film sensor. Wherein the thickness of the electrode is 0.1mm.
Example 2
1. Preparing printing ink
The outer layer ink adopts polydimethylsiloxane and a proper amount of cellulose as raw materials, is fully and uniformly mixed by centrifugal stirring, and removes bubbles in the ink under the action of negative pressure for later use; the inner-layer ink adopts gallium-based liquid metal and a proper amount of iron particles with micro-nano dimensions as raw materials, is fully and uniformly mixed by centrifugal stirring, and removes bubbles in the ink under the action of negative pressure for later use;
2. printing
Selecting a copper film as a substrate, adding the outer layer ink and the inner layer ink prepared in the step into coaxial direct-writing 3D printing equipment, controlling printing parameters such as printing speed of 120mm/min, nozzle printing height of 2.0mm, nozzle outer diameter of 1.40mm, nozzle inner diameter of 0.80mm, printing distance of 7.0mm, printing path and the like, designing a printing path, printing on the surface of the copper film, in the printing process, enabling one coaxial fiber to be extruded and molded on the substrate layer along a straight line by the coaxial nozzle, after the first piece of printing is finished, printing a second coaxial fiber in parallel at a fixed distance, and repeating the steps in such a way to enable the fibers to be regularly arranged on the substrate layer to form a bottom flexible elastic film sensing layer; the manufactured flexible elastic film sensing layer is extruded by an interface at a lower printing height, and the surface of the flexible elastic film sensing layer is of a complete plane structure or a micro-groove-plane composite structure, so that the contact area between the surface of the flexible elastic film sensing layer and an external object is effectively expanded. Drying and curing the printed flexible elastic film sensing layer; after the bottom film sensing layer is formed, a cross laminated network structure is designed, the same coaxial direct-writing 3D printing-interface extrusion composite forming method is utilized, printing parameters such as the printing speed of 100mm/min, the printing height of a nozzle of 3.60mm, the outer diameter of the nozzle of 1.40mm, the inner diameter of the nozzle of 0.80mm, the printing distance of 6.20mm, the printing path and the like are controlled, the printing path is designed, and printing is carried out again in the vertical direction to form the flexible and elastic film sensing array.
3. Package with a metal layer
And removing the substrate layer at the bottom of the flexible elastic film sensing array to directly separate the substrate layer from the bottom surface of the flexible elastic film sensing array. And processing two ends of the flexible elastic film sensing layer, manufacturing an electrode array by connecting wires, and packaging to form the flexible elastic film sensor. Wherein the thickness of the electrode is 0.60mm.
Example 3
1. Preparing printing ink
The outer layer ink adopts polyimide and a proper amount of silk protein as raw materials, is fully and uniformly mixed by centrifugal stirring, and removes bubbles in the ink under the action of negative pressure for later use; the inner-layer ink adopts gallium-based liquid metal and MXene with a proper amount of micro-nano scale as raw materials, is fully and uniformly mixed by centrifugal stirring, and removes bubbles in the ink under the action of negative pressure for later use;
2. printing
Selecting a water-soluble fiber film as a substrate, adding the outer-layer ink and the inner-layer ink prepared in the above steps into a coaxial direct-writing 3D printing device, controlling printing parameters such as printing speed of 240mm/min, nozzle printing height of 3.0mm, nozzle outer diameter of 3.0mm, nozzle inner diameter of 2.30mm, printing distance of 12mm, printing path and the like, designing a printing path, printing on the surface of the fiber film, in the printing process, extruding and forming a coaxial fiber on the substrate layer along a straight line by using the coaxial nozzle, after the first printing is finished, printing a second coaxial fiber in parallel at a fixed distance, and repeating the steps in such a way to enable the fibers to be regularly arranged on the substrate layer to form a bottom flexible elastic film sensing layer; the manufactured flexible elastic film sensing layer is extruded by an interface at a lower printing height, and the surface of the flexible elastic film sensing layer is of a complete plane structure or a micro-groove-plane composite structure, so that the contact area between the surface of the flexible elastic film sensing layer and an external object is effectively expanded. Drying and curing the printed flexible elastic film sensing layer; after the bottom film sensing layer is formed, a cross laminated network structure is designed, the same coaxial direct-writing 3D printing-interface extrusion composite forming method is utilized, printing parameters such as the printing speed of 20mm/min, the printing height of a nozzle of 5.60mm, the outer diameter of the nozzle of 2.40mm, the inner diameter of the nozzle of 1.80mm, the printing distance of 10mm, the printing path and the like are controlled, the printing path is designed, and printing is carried out again in the vertical direction to form the flexible elastic film sensing array.
3. Package with a metal layer
And removing the substrate layer at the bottom of the flexible elastic film sensing array to directly separate the substrate layer from the bottom surface of the flexible elastic film sensing array. And processing two ends of the flexible elastic film sensing layer, manufacturing an electrode array by connecting wires, and packaging to form the flexible elastic film sensor. Wherein the thickness of the electrode is 1.80mm.
In summary, the present invention provides a flexible elastic film sensor array and a method for fabricating the same, the flexible elastic film sensor array includes: the flexible elastic film sensing layer consists of a first film sensing layer and a second film sensing layer laminated on the surface of the first film sensing layer, and a plurality of first conductive electrodes are arranged in the first film sensing layer and the second film sensing layer; and the second conductive electrodes are respectively connected with the first conductive electrodes in a one-to-one correspondence manner. Wherein the arrangement direction of the first conductive electrodes in the first thin film sensing layer is perpendicular to the arrangement direction of the first conductive electrodes in the second thin film sensing layer. The plurality of first conductive electrodes are gallium-based liquid metal conductive electrodes. The flexible elastic film sensing layer is printed and formed by adopting a coaxial direct-writing 3D printing technology.
The coaxial structure of the thin film sensing layer is formed by utilizing the coaxial direct-writing 3D printing technology, the outer layer is made of electronegative elastic materials, the inner layer is made of liquid metal conductive electrodes, the forming interface is extruded to form a complete plane structure or a micro-groove-plane composite structure by using the low enough printing height, the specific surface area of the thin film sensing layer is effectively expanded, the generation of friction charges is enhanced, and the response performance of a sensing array is improved; the cross laminated electrode network structure is designed, the original at least multi-layer sensor structure is designed into two layers, the manufacturing process difficulty is reduced, and the film-shaped flexible elastic sensor array can be manufactured; the acquisition and transmission of electric signals can be realized by connecting the external lead with the liquid metal conductive electrode, and the sensing array still has sensing capability under the conditions of stretching and bending; the printing path is controlled by using a 3D printing method, so that a flexible elastic, stretchable and high-resolution flexible elastic film friction voltage force sensing array is obtained and can be used for accurately identifying the plane shape of an object.
It is to be understood that the invention is not limited to the examples described above, but that modifications and variations may be effected thereto by those of ordinary skill in the art in light of the foregoing description, and that all such modifications and variations are intended to be within the scope of the invention as defined by the appended claims.
Claims (10)
1. A flexible elastic film sensor array, comprising:
the flexible elastic film sensing layer consists of a first film sensing layer and a second film sensing layer laminated on the surface of the first film sensing layer, and a plurality of first conductive electrodes are arranged in the first film sensing layer and the second film sensing layer;
and the second conductive electrodes are respectively connected with the first conductive electrodes in a one-to-one correspondence manner.
2. A flexible elastic thin film sensing array according to claim 1, wherein the alignment direction of said first conductive electrodes in said first thin film sensing layer is perpendicular to the alignment direction of said first conductive electrodes in said second thin film sensing layer.
3. A flexible elastic film sensor array according to claim 1, wherein said first plurality of conductive electrodes are 0.1-1.8mm thick.
4. A flexible elastic membrane sensor array according to claim 1, wherein said first plurality of conductive electrodes are gallium-based liquid metal conductive electrodes.
5. A flexible elastic film sensor array according to claim 1, wherein the surface of the first and second film sensor layers has a surface micro-groove-plane composite structure or a planar structure.
6. A method of making a flexible, resilient film sensor array according to claim 1, comprising:
providing a substrate layer;
printing a first thin film sensing layer on the surface of the substrate layer and printing a second thin film sensing layer on the surface of the first thin film sensing layer by adopting an ink coaxial direct-writing 3D printing method to obtain a flexible elastic thin film sensing layer; the sensor is characterized in that the first thin film sensing layer and the second thin film sensing layer both contain a first conductive electrode;
and separating the substrate layer from the flexible elastic film sensing layer, and connecting a second conductive electrode with the first conductive electrode to obtain the flexible elastic film sensing array.
7. The method for preparing a flexible elastic film sensing array according to claim 6, wherein the printing a first film sensing layer on the surface of the substrate layer and a second film sensing layer on the surface of the first film sensing layer by using an ink coaxial direct writing 3D printing method to obtain a flexible elastic film sensing layer specifically comprises:
providing outer layer ink and inner layer ink for coaxial direct-writing 3D printing;
setting parameters of 3D printing equipment, printing a first thin film sensing layer on the surface of the substrate layer by utilizing the outer layer ink and the inner layer ink along a printing path, and printing a second thin film sensing layer in the vertical direction of the first thin film sensing layer to obtain the flexible elastic thin film sensing layer.
8. A method of forming a flexible, elastomeric film sensor array according to claim 7, wherein the outer ink comprises: an electronegative elastomer and a viscosity modifier; the inner layer ink comprises liquid metal and a conductive aid.
9. A method of manufacturing a flexible elastic film sensor array according to claim 8, wherein the electronegative elastic material comprises: silica gel, polydimethylsiloxane, polyimide; the viscosity modifier comprises silicon dioxide, polytetrafluoroethylene, silk protein and cellulose.
10. The method for manufacturing a flexible elastic film sensing array according to claim 8, wherein the conductive auxiliary agent comprises nano-scale graphene, carbon nanotubes, metal particles and MXene.
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| CN202211434157.6A CN115683397A (en) | 2022-11-16 | 2022-11-16 | Flexible elastic film sensing array and preparation method thereof |
| PCT/CN2023/108531 WO2024103819A1 (en) | 2022-11-16 | 2023-07-21 | Flexible elastic thin film sensing array and manufacturing method therefor |
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| WO2024103819A1 (en) * | 2022-11-16 | 2024-05-23 | 深圳大学 | Flexible elastic thin film sensing array and manufacturing method therefor |
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| JP5198608B2 (en) * | 2010-03-18 | 2013-05-15 | 韓国標準科学研究院 | Flexible force or pressure sensor array using semiconductor strain gauge, method for manufacturing the flexible force or pressure sensor array, and force or pressure measuring method using the flexible force or pressure sensor array |
| KR101650630B1 (en) * | 2014-11-13 | 2016-08-25 | 순천대학교 산학협력단 | Method for manufacturing bending angle detecting sensor and sensor manufactured thereby |
| WO2021253278A1 (en) * | 2020-06-17 | 2021-12-23 | 中国科学院深圳先进技术研究院 | Touch sensor, manufacturing method, and intelligent device comprising touch sensor |
| CN113252215A (en) * | 2021-05-24 | 2021-08-13 | 深圳大学 | Preparation method of full-printing stretchable triboelectric pressure sensing array |
| CN113465796B (en) * | 2021-07-01 | 2022-07-19 | 西北工业大学 | Flexible integrated array pressure sensor and preparation method thereof |
| CN113588140B (en) * | 2021-07-08 | 2022-12-09 | 上海交通大学 | Pressure sensor, pressure sensing array and preparation method thereof |
| CN218916613U (en) * | 2022-11-16 | 2023-04-25 | 深圳大学 | Flexible elastic film sensing array |
| CN115683397A (en) * | 2022-11-16 | 2023-02-03 | 深圳大学 | Flexible elastic film sensing array and preparation method thereof |
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| WO2024103819A1 (en) * | 2022-11-16 | 2024-05-23 | 深圳大学 | Flexible elastic thin film sensing array and manufacturing method therefor |
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