CN113358247A - Flexible sensor for simultaneously detecting pressure-strain bimodal signals and preparation method thereof - Google Patents
Flexible sensor for simultaneously detecting pressure-strain bimodal signals and preparation method thereof Download PDFInfo
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- CN113358247A CN113358247A CN202110812835.7A CN202110812835A CN113358247A CN 113358247 A CN113358247 A CN 113358247A CN 202110812835 A CN202110812835 A CN 202110812835A CN 113358247 A CN113358247 A CN 113358247A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
- G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
- G01B7/22—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in capacitance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
- G01L1/2293—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type
Abstract
The invention discloses a flexible sensor for simultaneously detecting pressure-strain bimodal signals and a preparation method thereof. The lower electrode plate and the upper electrode plate are made of low-dimensional nano materials, when the device is prepared, the low-dimensional nano materials of the electrode plates are diffused towards the upper surface of the lower packaging protective layer to form a first diffusion layer, and the low-dimensional nano materials of the upper electrode plate are diffused towards the upper surface of the porous dielectric layer to form a second diffusion layer; the lower electrode plate and the upper electrode plate are used as the electrode plate parts of the capacitor structure for sensing pressure signals, and are used as the strain gauge structure for sensing tensile signals. The sensor is simple in preparation method, and the two ends of the low-dimensional nano material are embedded into the elastic bodies at the upper part and the lower part, so that the upper layer and the lower layer are effectively connected without additional assembly and adhesion at the later stage.
Description
Technical Field
The invention relates to a flexible sensor, in particular to a pressure-strain dual-mode flexible sensor based on a low-dimensional nano material and a preparation method thereof.
Background
Wearable electronic devices have received widespread attention because of their great potential in human motion monitoring, artificial intelligence devices, and bioelectronics. In recent years, with the development of low-dimensional nanomaterials such as metal nanowires, carbon nanotubes, graphene, carbon black, MXene and the like, significant progress has been made in flexible sensors having high sensitivity or high stretchability.
The sensing mechanism of the flexible strain or pressure sensor is based on that when the sensor is under the action of tension/pressure, a flexible substrate of the sensor is subjected to tension/compression deformation, the size of a sensitive layer structure attached to the flexible substrate deforms along with the flexible substrate, so that the electrical output signal of the sensitive layer structure changes along with the strain, and the change quantity of the electrical output signal is related to the size of the deformation. However, most reported wearable sensor systems are generally designed for single mode measurement, i.e. only one ambient parameter can be detected, and multi-mode (multi-parameter) excitation state discrimination from human body motion cannot be achieved. A few flexible sensors with multi-modal monitoring are typically based on a single sensing mechanism. For example, the sensor responds to tangential tension and normal pressure with opposite resistance responses. Normal pressure will result in a decrease in resistance value, while tangential tension will result in an increase in resistance value. By correlating the shape of the resistance time curve with a given stimulus, stimuli such as bending, stretching and compressing can be distinguished. However, when two different excitation signals, such as tangential tension and normal pressure, act simultaneously, such sensors cannot distinguish the excitation signals well. Therefore, how to detect the motion states of different parts of the wearable electronic device during human motion and complete feature analysis and health monitoring of the motion states of the different parts is a research difficulty.
Disclosure of Invention
The purpose of the invention is as follows: aiming at the prior art, a flexible sensor for simultaneously detecting pressure-strain bimodal signals is provided, so that the problem of decoupling of strain and pressure signals at different parts of a human body is solved; meanwhile, the preparation method of the material and the structure of the sensor is simple and easy.
The technical scheme is as follows: a flexible sensor for simultaneously detecting pressure-strain bimodal signals comprises a lower packaging protective layer, a lower electrode plate, a first metal lead layer, a porous dielectric layer, a second metal lead layer, an upper electrode plate and an upper packaging protective layer which are sequentially arranged from bottom to top; the material of the lower electrode plate and the material of the upper electrode plate are low-dimensional nano materials, when a device is prepared, the low-dimensional nano materials of the lower electrode plate are diffused to the upper surface of the lower packaging protective layer to form a first diffusion layer, the low-dimensional nano materials of the upper electrode plate are diffused to the upper surface of the porous dielectric layer to form a second diffusion layer, and the low-dimensional nano materials form a conductive channel inside the first diffusion layer and the second diffusion layer; the lower electrode plate and the upper electrode plate are used as the electrode plate parts of the capacitor structure for sensing pressure signals, and are used as the strain gauge structure for sensing tensile signals.
Furthermore, the lower packaging protection layer and the upper packaging protection layer are made of insulating elastic polymers.
Further, the porous dielectric layer is made of an organic flexible material with a high dielectric constant.
Further, the low-dimensional nano material is a carbon nano tube or a silver nano wire; in the lower electrode plate, the front end of the carbon nano tube or the silver nano wire is embedded into the lower packaging protective layer, the tail end of part of the carbon nano tube or the silver nano wire is embedded into the porous dielectric layer, and the tail end of part of the carbon nano tube or the silver nano wire, which is not embedded into the porous dielectric layer, forms a conductive path on a plane; in the upper electrode plate, the front end of the carbon nano tube or the silver nano wire is embedded into the porous dielectric layer, the tail end of part of the carbon nano tube or the silver nano wire is embedded into the upper packaging protective layer, and the tail end of part of the carbon nano tube or the silver nano wire, which is not embedded into the upper packaging protective layer, forms a conductive path on a plane.
Further, the lower packaging protective layer is prepared by adopting a pouring method, and the lower electrode plate and the first diffusion layer are formed by heating and curing after low-dimensional nano materials are coated on the upper surface of the semi-solidified lower packaging protective layer.
Furthermore, the porous dielectric layer is prepared by adopting a pouring method, and the upper surface of the semi-solidified porous dielectric layer is coated with a low-dimensional nano material and then is heated and solidified to form the upper electrode plate and the second diffusion layer.
A method for preparing a flexible sensor for simultaneously detecting pressure-strain bimodal signals comprises the following steps:
step 1: uniformly stirring the raw materials of the insulating elastic polymer, and pouring the raw materials into a template to prepare a lower packaging protective layer; after the lower packaging protective layer is semi-cured, brushing a low-dimensional nano material on the upper surface of the lower packaging protective layer, diffusing the low-dimensional nano material to the upper surface of the lower packaging protective layer to form a first diffusion layer, and then heating and curing by using an oven to form a lower electrode plate;
step 2: metal lead layers are adhered to two ends of the upper surface of the lower electrode plate and used for leading out electrode leads;
and step 3: uniformly arranging thin copper wires on the lower electrode plate and the metal lead layer, pouring an insulating elastic polymer to serve as a porous dielectric layer, then pasting second metal lead layers at two ends of the upper surface of the semi-solidified porous dielectric layer, brushing a low-dimensional nano material, diffusing the low-dimensional nano material to the upper surface of the porous dielectric layer to form a second diffusion layer, and then heating and solidifying the second diffusion layer by adopting an oven to form an upper electrode plate;
and 4, step 4: pouring an insulating elastic polymer on the surface of the upper electrode plate, and heating and curing to form an upper packaging protective layer;
and 5: and removing the template, and drawing away the fine copper wire used as the mold to form a pore, thereby completing the preparation of the device.
Has the advantages that: compared with the prior art, the invention has the following beneficial effects: firstly, the bimodal integrated flexible sensor adopts two different sensing mechanisms of a capacitance type and a resistance type, is respectively used for sensing the excitation of pressure and tensile strain and does not influence each other, so that the simultaneous detection of strain and pressure signals is met, and the decoupling of pressure stimulation and tensile stimulation at joints in human body movement can be realized. The sensor can perform artificial intelligence algorithm recognition according to resistance and capacitance signals output by the motion characteristics of different parts of a human body at the same time, and realize judgment and detection of the motion of different parts of the human body.
And secondly, the integrated pouring process is provided to realize the preparation of the sensor, the process flow is simple, and the low-dimensional nano material is brushed when semi-solidified, so that the two ends of the sensor can be embedded into the elastomers above and below the sensor, the upper layer and the lower layer are formed to be effectively connected to form an integrated sensor structure, and the later-stage additional assembling and bonding are not needed, so that the mechanical property of the sensor is ensured, and the repeatability and the reliability of the sensor are improved. And thirdly, the thin copper wire is adopted as a mold to be cast and then is pulled away to form a porous structure with controllable size, so that the sensitivity of the capacitive sensor to pressure is improved, the influence of tensile strain on capacitance change is reduced, the hysteresis characteristic of the sensor is optimized, and the integral casting process cannot be influenced. In the prior art, a porous medium layer is prepared in a foaming mode, the size of pores is not controllable, and an adhesive is required to be assembled with an upper electrode plate and a lower electrode plate, so that the service life of a device is influenced.
In addition, the CDC chip and the ADC chip are used for respectively collecting the capacitance and the resistance of the designed dual-mode sensor and converting the capacitance and the resistance into digital signals. The acquired data are transmitted to the MCU for operation processing and are transmitted to the receiving end through the Bluetooth or 5G module, the MCU of the receiving end processes the received data, the corresponding servo motor is controlled, and a remote control scheme can be realized.
Drawings
FIG. 1 is a schematic diagram of a flexible sensor according to the present invention;
FIG. 2 is a flow chart of a first step of a method for manufacturing a flexible sensor according to the present invention;
FIG. 3 is a flow chart of a manufacturing method of a flexible sensor according to a second step of the present invention;
FIG. 4 is an SEM image of a flexible sensor of the present invention with an elastomer embedded in one end of a low dimensional nanomaterial;
FIG. 5 is a flow chart of a manufacturing method of a flexible sensor according to a third step of the present invention;
FIG. 6 is a flow chart of a cross-sectional structure view of step four of the method of manufacturing a flexible sensor according to the present invention;
FIG. 7 is a structural section view preparation flow chart of step five of the flexible sensor preparation method of the present invention;
FIG. 8 is a flow chart illustrating a cross-sectional structure view of step six of the method of manufacturing a flexible sensor according to the present invention;
FIG. 9 is a flow chart of a manufacturing method of a flexible sensor according to a seventh step of the present invention;
FIG. 10 is a block diagram of a remote control scheme in an example of the present invention.
Detailed Description
The invention is further explained below with reference to the drawings.
As shown in fig. 1, a flexible sensor for simultaneously detecting pressure-strain bimodal signals includes a lower package protection layer 1, a lower electrode plate 2, a first metal lead layer 3, a porous dielectric layer 4, a second metal lead layer 6, an upper electrode plate 7, and an upper package protection layer 8, which are sequentially disposed from bottom to top. The lower electrode plate 2 and the upper electrode plate 7 are made of low-dimensional nano materials, when the device is manufactured, the low-dimensional nano materials of the lower electrode plate 2 are diffused towards the upper surface of the lower packaging protection layer 1 to form a first diffusion layer, the low-dimensional nano materials of the upper electrode plate 7 are diffused towards the upper surface of the porous dielectric layer 4 to form a second diffusion layer, and the low-dimensional nano materials form a conductive channel inside the first diffusion layer and the second diffusion layer. The lower electrode plate 2 and the upper electrode plate 7 serve as the plate portions of the capacitor structure for sensing a pressure signal, and serve as the strain gauge structure for sensing a tensile signal.
Wherein, the materials of the lower packaging protective layer 1 and the upper packaging protective layer 8 are insulating elastic polymers; the porous dielectric layer 4 is made of high dielectric constant organic flexible material. The low-dimensional nano material is a carbon nano tube or a silver nano wire; in the lower electrode plate 2, the front end of the carbon nanotube or the silver nanowire is embedded in the lower encapsulation protective layer 1, the tail end of part of the carbon nanotube or the silver nanowire is embedded in the porous dielectric layer 4, and the tail ends of part of the carbon nanotube or the silver nanowire which are not embedded in the porous dielectric layer 4 are overlapped in a plane to form a conductive path, as shown in fig. 4; in the upper electrode plate 7, the front end of the carbon nanotube or the silver nanowire is embedded in the porous dielectric layer 4, the tail end of part of the carbon nanotube or the silver nanowire is embedded in the upper packaging protective layer 8, and the tail end of part of the carbon nanotube or the silver nanowire which is not embedded in the upper packaging protective layer 8 forms a conductive path on a plane.
The preparation method of the flexible sensor for simultaneously detecting the pressure-strain bimodal signals comprises the following steps:
step 1: the insulating elastic polymer raw material is uniformly stirred and poured into a template to prepare a lower packaging protective layer 1, as shown in fig. 2.
Step 2: after the lower encapsulation protection layer 1 is semi-cured, a low dimensional nanomaterial is coated on the upper surface of the lower encapsulation protection layer 1, the low dimensional nanomaterial diffuses towards the upper surface of the lower encapsulation protection layer 1 to form a first diffusion layer, and then the first diffusion layer is heated and cured by an oven to form a lower electrode plate 2, as shown in fig. 3.
And step 3: metal lead layers 3 are adhered to both ends of the upper surface of the lower electrode plate 2 for leading out electrode leads, so as to form a resistance type strain sensor, as shown in fig. 5.
And 4, step 4: thin copper wires 5 are uniformly distributed on the lower electrode plate 2 and the metal lead layer 3, and an insulating elastic polymer is poured to form a porous dielectric layer 4, as shown in fig. 6.
And 5: second metal lead layers 6 are attached to both ends of the upper surface of the semi-cured porous dielectric layer 4, as shown in fig. 7.
Step 6: then, a low-dimensional nanomaterial is coated on the upper surface of the porous dielectric layer 4, the low-dimensional nanomaterial diffuses to the upper surface of the porous dielectric layer to form a second diffusion layer, and then the second diffusion layer is heated and cured by an oven to form an upper electrode plate 7, as shown in fig. 8.
And 7: and pouring an insulating elastic polymer on the surface of the upper electrode plate 7, and heating and curing to form an upper packaging protective layer 8, as shown in fig. 9.
And 8: and removing the template, and drawing away the fine copper wire 5 used as the mold to form a pore, thereby completing the preparation of the device.
When the flexible sensor works and is stimulated by tensile strain, the upper electrode plate 7 and the lower electrode plate 2 based on the low-dimensional nano material and the insulating elastic polymer composite conducting layer can be used for sensing the tensile strain, and electric signals of the resistors are respectively led out from the metal lead layers 6 and 3. The low-dimensional nano material forms a conductive channel on the surface and in the insulating elastic polymer. Under small tensile strain, the low-dimensional nano material network on the surface of the insulating elastic polymer plays a main role in sensing, the low-dimensional nano materials overlapped on the surface are separated along with the tensile action, the number of conductive paths is reduced, and the resistance is changed. Under large tensile strain, the low-dimensional nano material on the surface is pulled away, the low-dimensional nano material network in the insulating elastic polymer plays a main role in sensing, and the large tensile strain causes the low-dimensional nano material channel in the insulating elastic polymer to break, so that the resistance is changed. When the pressure stimulation is applied, the porous dielectric layer 4 based on the elastic polymer, the upper electrode plate 7 and the lower electrode plate 2 form a parallel plate capacitor, and under the action of the pressure, the inter-polar distance of the parallel plate capacitor changes, so that the capacitance value changes, and the pressure sensing is realized.
The bimodal flexible sensor structure integrates two sensing structures of a resistance type and a capacitance type, and realizes simultaneous output of resistance and capacitance signals. The resistance signal change is mainly influenced by strain, and the capacitance signal change is mainly influenced by pressure, so that the simultaneous detection of the strain and the pressure signal is met. And then, algorithm analysis is carried out according to the motion characteristics of different parts of the human body, so that the judgment and detection of the motion of different parts of the human body are realized. Taking human joint motion as an example, the flexible sensor is conformally attached to the skin of a human joint, and when the joint is bent, the flexible sensor is not only subjected to tensile strain generated by bending of the joint, but also extruded by protrusion of joint bones. Under the same bending angle, the pressure generated by different joints due to different degrees of bone bulge can be different, so that the types of the motion joints can be identified. For the same joint, different bending angles can generate different degrees of tensile strain, so that the monitoring of the bending angle is realized. In addition, remote communication monitoring can be carried out through 5G communication, and action control of the remote manipulator is achieved.
Fig. 10 shows a remote control scheme of the pressure-strain bimodal flexible sensor according to the present invention, in which a CDC chip and an ADC chip are used to collect capacitance and resistance data of the designed bimodal sensor respectively. The acquired data are transmitted to the MCU for operation processing and are transmitted to a receiving end through the Bluetooth or 5G module, such as an exoskeleton or a machine, the MCU of the receiving end processes the received data, and controls the corresponding servo motor, so that a remote control scheme is realized.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (7)
1. A flexible sensor for simultaneously detecting pressure-strain bimodal signals is characterized by comprising a lower packaging protective layer (1), a lower electrode plate (2), a first metal lead layer (3), a porous dielectric layer (4), a second metal lead layer (6), an upper electrode plate (7) and an upper packaging protective layer (8) which are sequentially arranged from bottom to top; the materials of the lower electrode plate (2) and the upper electrode plate (7) are low-dimensional nano materials, when a device is prepared, the low-dimensional nano materials of the lower electrode plate (2) are diffused to the upper surface of the lower packaging protective layer (1) to form a first diffusion layer, the low-dimensional nano materials of the upper electrode plate (7) are diffused to the upper surface of the porous dielectric layer (4) to form a second diffusion layer, and the low-dimensional nano materials form a conductive channel in the first diffusion layer and the second diffusion layer; the lower electrode plate (2) and the upper electrode plate (7) are used as the electrode plate parts of the capacitor structure for sensing pressure signals, and are used as the strain gauge structure for sensing tensile signals.
2. Flexible sensor for simultaneous detection of pressure-strain bimodal signals according to claim 1, characterized in that the material of the lower and upper encapsulating protective layers (1, 8) is an insulating elastic polymer.
3. Flexible sensor for simultaneous detection of pressure-strain bimodal signals according to claim 1, characterized in that the porous dielectric layer (4) is made of a high dielectric constant organic flexible material.
4. The flexible sensor for simultaneous detection of pressure-strain bimodal signals according to claim 1, wherein the low dimensional nanomaterials are carbon nanotubes or silver nanowires; in the lower electrode plate (2), the front end of the carbon nano tube or the silver nanowire is embedded into the lower packaging protective layer (1), the tail end of part of the carbon nano tube or the silver nanowire is embedded into the porous dielectric layer (4), and the tail end of part of the carbon nano tube or the silver nanowire which is not embedded into the porous dielectric layer (4) forms a conductive path on a plane; in the upper electrode plate (7), the front end of the carbon nano tube or the silver nano wire is embedded into the porous dielectric layer (4), the tail end of part of the carbon nano tube or the silver nano wire is embedded into the upper packaging protective layer (8), and the tail end of part of the carbon nano tube or the silver nano wire, which is not embedded into the upper packaging protective layer (8), forms a conductive path on a plane.
5. The pressure-strain bimodal signal simultaneous detection flexible sensor according to claim 4, wherein the lower encapsulation protection layer (1) is prepared by a pouring method, and a low-dimensional nano material is coated on the upper surface of the semi-solidified lower encapsulation protection layer (1) and then is heated and cured to form the lower electrode plate (2) and the first diffusion layer.
6. The flexible sensor for simultaneously detecting pressure-strain bimodal signals according to claim 4, wherein the porous dielectric layer (4) is prepared by a pouring method, and a low-dimensional nanomaterial is coated on the upper surface of the semi-solidified porous dielectric layer (4) by brushing and then is heated and cured to form the upper electrode plate (7) and the second diffusion layer.
7. A preparation method of a flexible sensor for simultaneously detecting pressure-strain bimodal signals is characterized by comprising the following steps:
step 1: uniformly stirring the raw materials of the insulating elastic polymer, and pouring the raw materials into a template to prepare a lower packaging protective layer (1); after the lower packaging protection layer (1) is semi-cured, brushing a low-dimensional nano material on the upper surface of the lower packaging protection layer (1), diffusing the low-dimensional nano material to the upper surface of the lower packaging protection layer (1) to form a first diffusion layer, and then heating and curing by adopting an oven to form a lower electrode plate (2);
step 2: metal lead layers (3) are adhered to two ends of the upper surface of the lower electrode plate (2) and used for leading out electrode leads;
and step 3: uniformly arranging thin copper wires (5) on the lower electrode plate (2) and the metal lead layer (3), pouring an insulating elastic polymer to serve as a porous dielectric layer (4), then pasting second metal lead layers (6) at two ends of the upper surface of the semi-solidified porous dielectric layer (4), brushing a low-dimensional nano material, diffusing the low-dimensional nano material to the upper surface of the porous dielectric layer (4) to form a second diffusion layer, and then heating and curing by using an oven to form an upper electrode plate (7);
and 4, step 4: pouring an insulating elastic polymer on the surface of the upper electrode plate (7), and heating and curing to form an upper packaging protective layer (8);
and 5: and removing the template, and drawing away the fine copper wire (5) used as the mold to form a pore, thereby completing the preparation of the device.
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| CN114062168A (en) * | 2021-10-20 | 2022-02-18 | 复旦大学 | Flexible stretchable hardness sensor based on polydimethylsiloxane and preparation method thereof |
| CN114391850A (en) * | 2022-02-24 | 2022-04-26 | 复旦大学 | Electroencephalogram cap capable of adaptively adjusting contact effect through force feedback |
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| JPH08201203A (en) * | 1995-01-31 | 1996-08-09 | Kyowa Electron Instr Co Ltd | Pressure transmitter and assembly method of the same |
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