CN115683347B - Optical fiber heat radiation probe, vacuum packaging method thereof and heat radiation detection method - Google Patents
Optical fiber heat radiation probe, vacuum packaging method thereof and heat radiation detection method Download PDFInfo
- Publication number
- CN115683347B CN115683347B CN202211261989.2A CN202211261989A CN115683347B CN 115683347 B CN115683347 B CN 115683347B CN 202211261989 A CN202211261989 A CN 202211261989A CN 115683347 B CN115683347 B CN 115683347B
- Authority
- CN
- China
- Prior art keywords
- fiber
- optical
- mode
- face
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Light Guides In General And Applications Therefor (AREA)
Abstract
The invention discloses an optical fiber heat radiation probe which comprises a phase-shift Bragg grating and a vacuum packaging tube, wherein the vacuum packaging tube is sleeved outside the phase-shift Bragg grating, the phase-shift Bragg grating is packaged in a vacuum manner, and one end face of the phase-shift Bragg grating is exposed outside the vacuum packaging tube. The optical fiber heat radiation probe has the advantages of simple structure, high resolution, high bandwidth, high sensitivity, long service life and the like. The invention also discloses a vacuum packaging method and a thermal radiation detection method of the optical fiber thermal radiation probe.
Description
Technical Field
The invention relates to the field of thermal radiation sensing, in particular to an optical fiber thermal radiation probe, a vacuum packaging method and a thermal radiation detection method thereof.
Background
The heat radiation meter is a quantitative detection instrument for heat energy radiation transfer process, and is an important tool for measuring the heat radiation migration quantity in the heat radiation process and evaluating heat radiation performance. Both the magnitude of the thermal radiation characterizes and the extent of the thermal radiation energy transfer. In other words, the heat radiation meter is an instrument that measures the magnitude and direction of heat radiation energy transfer. Thermal radiation meters have a variety of applications in both sensing imaging systems and communication systems.
The existing thermal radiation meter mainly converts thermal radiation signals into electric signals based on the thermoelectric effect of a semiconductor, and the electric signals are measured to further realize the measurement of the thermal radiation signals.
A thermal radiation sensor device is disclosed in chinese patent No. 202210186549.9, and includes, in order from bottom to top: the device comprises a substrate, a bottom connecting circuit, a thermoelectric column, a top connecting circuit and a heat radiation absorbing layer, wherein the thermoelectric column is an ion thermoelectric column made of an ion conductor taking free ions as main carriers.
The main disadvantages of the existing thermal radiation meter are low resolution and narrow bandwidth, the resolution can only reach the micron level, and the difficulty of preparing the thermal radiation sensor covering the wavelength range from 1 μm to 10 μm is great, mainly because the sensitivity speed and sensitivity of the sensitive element of the thermal radiation sensor are opposite to those of the thermistor. The bandwidth and sensitivity of the thermal radiation sensor are key indicators in the field of communications, whereas the common band of communications is a wavelength of 1550 nm. Furthermore, sensitivity is important for imaging applications, and bandwidth is important for high-speed imaging. Therefore, a bolometer having both high sensitivity and high bandwidth is an urgent need in many fields.
Disclosure of Invention
In order to solve the defects in the prior art, the invention provides the optical fiber heat radiation probe which has the advantages of simple structure, high resolution, high bandwidth, high sensitivity, long service life and the like.
The invention also provides a vacuum packaging method and a thermal radiation detection method of the optical fiber thermal radiation probe.
The technical problems to be solved by the invention are realized by the following technical scheme:
the utility model provides an optic fibre heat radiation probe, includes phase shift Bragg grating and vacuum packaging tube, the vacuum packaging tube cover is located phase shift Bragg grating is outside, will phase shift Bragg grating vacuum packaging, phase shift Bragg grating's an end expose in outside the vacuum packaging tube.
The vacuum packaging method of the optical fiber heat radiation probe comprises the following steps:
step 100: taking a section of single-mode fiber, wherein the single-mode fiber comprises a first end face and a second end face, and an optical microcavity is manufactured on the second end face of the single-mode fiber;
step 200: manufacturing a resonant film on the other end of the optical microcavity, wherein the second end face of the single-mode fiber, the optical microcavity and the resonant film together form an optical fiber FPI;
step 300: manufacturing a Bragg grating in the single-mode fiber, wherein the single-mode fiber and the Bragg grating jointly form an optical fiber FBG, and the optical fiber FBG and the optical fiber FPI jointly form a phase-shift Bragg grating;
Step 400: and taking a section of vacuum packaging tube, firstly inserting the phase shift Bragg grating into the vacuum packaging tube, exposing the first end face of the single-mode fiber outside the vacuum packaging tube, then welding one end, which is in the same direction as the first end face of the single-mode fiber, on the vacuum packaging tube onto the single-mode fiber, then vacuumizing the vacuum packaging tube, and then sealing one end, which is in the same direction as the second end face of the single-mode fiber, on the vacuum packaging tube in a fusion mode.
A method of thermal radiation detection comprising the steps of:
s1: coupling an excitation light signal with a first wavelength and a detection light signal with a second wavelength into the optical fiber heat radiation probe together, so that the excitation light signal drives the resonant film to generate resonance;
s2: obtaining a detection light signal reflected by the optical fiber thermal radiation probe to obtain a reflection spectrum of the optical fiber thermal radiation probe;
and S3, calculating the magnitude of the heat radiation signal according to the reflection peak of the reflection spectrum.
The invention has the following beneficial effects: the optical fiber thermal radiation probe 10 detects thermal radiation signals through the phase-shift Bragg grating, when the environmental thermal radiation signals change, peak drift occurs in the reflection spectrum of the phase-shift Bragg grating, and the thermal radiation signals can be measured through the peak drift in the reflection spectrum; and the phase-shift Bragg grating is vacuum packaged by the vacuum packaging tube, the phase-shift Bragg grating is isolated from the external environment by utilizing the vacuum environment in the vacuum packaging tube, so that heat cannot act on the phase-shift Bragg grating in a heat conduction and heat convection mode, and the influence of heat conduction and heat convection on the sensing of a heat radiation signal is avoided.
Drawings
FIG. 1 is a schematic diagram of a fiber optic heat radiation probe according to the present invention;
FIG. 2 is an equivalent schematic diagram of a fiber optic thermal radiation probe according to the present invention forming a phase shift Bragg grating;
FIG. 3 is a schematic plan view of a resonant film in an optical fiber heat radiation probe according to the present invention;
FIG. 4 is a block diagram of steps of a method for vacuum packaging an optical fiber heat radiation probe provided by the invention;
FIG. 5 is a block diagram of the steps 100 in the method for vacuum packaging the fiber optic heat radiation probe shown in FIG. 5;
FIG. 6 is a block diagram of another step 100 in the method of vacuum packaging the fiber optic heat radiation probe of FIG. 5;
FIG. 7 is a block diagram of a further step 100 in the method of vacuum packaging the fiber optic heat radiation probe of FIG. 5;
FIG. 8 is a block diagram of a step 200 in the method of vacuum packaging the fiber optic heat radiation probe of FIG. 5;
FIG. 9 is a block diagram of another step 200 in the vacuum packaging method of the fiber optic heat radiation probe shown in FIG. 5;
FIG. 10 is a schematic diagram of the vacuum packaging method of the optical fiber heat radiation probe shown in FIG. 5, step 400;
FIG. 11 is a block diagram of steps of a thermal radiation sensing method provided by the present invention;
fig. 12 is a schematic diagram of an optical measuring device used in the thermal radiation sensing method shown in fig. 11.
Detailed Description
The present invention is described in detail below with reference to the drawings and the embodiments, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are illustrative and intended to explain the present invention and should not be construed as limiting the invention.
In the description of the present invention, it should be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate describing the present invention and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", or a third "may explicitly or implicitly include one or more such feature. In the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," "disposed," and the like are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, or can be communicated between two elements or the interaction relationship between the two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
Example 1
As shown in fig. 1, an optical fiber heat radiation probe 10 comprises a phase shift bragg grating and a vacuum packaging tube 103, wherein the vacuum packaging tube 103 is sleeved outside the phase shift bragg grating, and the phase shift bragg grating is vacuum packaged; an end face of the phase shift bragg grating is exposed outside the vacuum packaging tube 103.
The optical fiber thermal radiation probe 10 detects thermal radiation signals through the phase-shift Bragg grating, when the environmental thermal radiation signals change, peak drift occurs in the reflection spectrum of the phase-shift Bragg grating, and the thermal radiation signals can be measured through the peak drift in the reflection spectrum; and adopt vacuum packaging tube 103 to the phase shift Bragg grating carries out vacuum packaging, utilizes vacuum packaging tube 103 inside vacuum environment will the phase shift Bragg grating is isolated with external environment for the unable mode of heat conduction and heat convection is acted on the phase shift Bragg grating, avoids heat conduction and heat convection to the sensing of heat radiation signal to produce the influence.
The phase-shift Bragg grating comprises a single-mode fiber 104, a Bragg grating 105, an optical microcavity 106 and a resonant thin film 107, wherein the single-mode fiber 104 comprises a first end face and a second end face; the bragg grating 105 is fabricated in the single-mode fiber 104, and the single-mode fiber 104 and the bragg grating 105 together form an optical fiber FBG 101; the second end face of the single-mode fiber 104 is connected to one end of the optical microcavity 106, the resonant film 107 is fabricated on the other end of the optical microcavity 106, and the second end face of the single-mode fiber 104, the optical microcavity 106 and the resonant film 107 together form an optical fiber FPI 102; the first end surface of the single-mode fiber 104 is exposed outside the vacuum packaging tube 103.
In the optical fiber thermal radiation probe 10, the second end face of the single-mode optical fiber 104 and the resonant film 107 form two reflection surfaces of the optical fiber FPI 102, when the detected optical signal passes through the second end face of the single-mode optical fiber 104, primary reflection occurs, when reaching the resonant film 107, secondary reflection occurs, and the two reflected detected optical signals interfere to form a resonant peak in a reflection spectrum; meanwhile, by the reflection of the resonant thin film 107, the optical signal passes through the bragg grating 105 twice, as shown in fig. 2, equivalent to forming a virtual FBG 101' identical to the optical fiber FBG 101 on the other end of the optical microcavity 106, when the distance between the bragg grating 105 (toward the one end of the optical microcavity 106) and the optical microcavity 106 (toward the one end of the bragg grating 105) is smaller than the grating period of the bragg grating 105, and when the reflection light intensity formed by the bragg grating 105 is identical to the reflection light intensity formed by the resonant thin film 107, the optical fiber FBG 101, the optical microcavity 106 and the virtual FBG 101' are equivalent to a phase shift bragg grating, and the optical microcavity 106 is equivalent to a phase shift point inserted between the bragg grating 105 and the virtual FBG 101', so that the phase shift bragg grating, which is originally uniform, generates a phase mutation twice the cavity length of the optical microcavity 106, forms a spectral phase shift on the reflection peak of the detected optical signal; the reflection wave peak on the reflection spectrum is formed by superposition of the resonance wave peak and the phase shift wave peak.
When the resonant film 107 is subjected to a thermal radiation signal, the change of thermal stress changes the resonant state of the resonant film, so that the modulation degree of the detection optical signal and the phase shift of the phase shift Bragg grating are changed at the same time, and the resonant wave crest and the phase shift wave crest drift at the same time; the drift of the resonance wave peak is overlapped with the drift of the phase shift wave peak, the drift amount of the reflection wave peak on the reflection frequency spectrum is amplified, and the measurement of more precise and weaker signals can be realized.
According to the optical fiber thermal radiation probe 10, the optical fiber FBG 101 and the optical fiber FPI 102 are matched to form the phase shift Bragg grating, so that drift of a resonance wave crest is amplified, more accurate and weaker signal measurement can be realized, meanwhile, the Bragg grating 105 improves the reflectivity of the second end face of the single-mode optical fiber 104, the cavity optical coupling efficiency of the optical fiber FPI 102 is also improved, and the sharpness of a reflection spectrum is improved.
In general, the distance between the Bragg grating 105 and the resonant thin film 107 satisfies pi phase variation to form pi phase shifted fiber gratings, which better enhance the cavity optical coupling efficiency of the fiber FPI 102.
In this embodiment, the vacuum packaging tube 103 is a silicon capillary tube with an inner diameter of 250+ -6 μm (larger than the outer diameter of the single-mode fiber 104), and an internal air pressure of less than 5×10 -4 mbar; the optical microcavity 106 has a cavity length of between 10 and 200 μm.
The single mode optical fiber 104 includes a core 108 and a cladding 109, the cladding 109 surrounding the core 108, the core 108 and the cladding 109 having different refractive indices such that an optical signal is totally reflected at the interface of the core 108 and the cladding 109 for onward transmission within the core 108.
The cladding 109 of the single-mode fiber 104 is connected to the cavity wall 112 of the optical microcavity 106, the core 108 of the single-mode fiber 104 is connected to the optical microcavity 106, but the radial direction of the optical microcavity 106 should be larger than the diameter of the core 108; the Bragg grating 105 is formed within the core 108 of the single-mode optical fiber 104. The Bragg grating 105 may also extend onto the cladding 109 of the single-mode optical fiber 104, depending on the particular needs.
The resonance film 107 includes a graphene film 110 and a nano gold film 111, and the nano gold film 111 is fabricated on the graphene film 110; as shown in fig. 3, the resonant film 107 includes a fixing area 113, a resonant area 114 and a plurality of suspension areas 115, wherein the fixing area 113 is attached and fixed on the cavity wall 112 of the optical microcavity 106, and the resonant area 114 is suspended on the optical microcavity 106 and corresponds to the fiber core 108 of the single-mode fiber 104; each suspension region 115 is connected between the resonance region 114 and the fixed region 113, a hollow region 116 is disposed between adjacent suspension regions 115, and the optical microcavity 106 is exposed from the hollow region 116.
The graphene film 110 is configured to generate resonant motion to modulate and reflect the detected light signal, and the nano gold film 111 is configured to improve the reflectivity of the resonant film 107 to compensate for the defect of insufficient reflectivity of the graphene film 110.
In this embodiment, the thickness of the graphene film 110 is between 0.3 nm and 5.0nm, and a single-layer, double-layer or multi-layer graphene structure may be adopted; the thickness of the nano gold film 111 is between 5 and 200 nm.
The resonant film 107 exposes the optical microcavity 106 through the hollowed-out area 116, so that the optical microcavity 106 and the vacuum packaging tube 103 are at the same air pressure value, and the air pressure difference between the optical microcavity 106 and the vacuum packaging tube 103 is prevented from influencing the resonant movement of the resonant film 107, so that the sensing precision is improved; while reducing the connection stress between the fixed region 113 and the resonance region 114, and improving the sensitivity rate and sensitivity of the resonance region 114 to heat radiation signals.
In this embodiment, the hollowed-out areas 116 are circular, and the number of the hollowed-out areas is four, and the hollowed-out areas are uniformly distributed on the peripheral circumference of the resonance area 114, so that the sensitivity rate and the sensitivity of the resonance film 107 to heat radiation signals can be changed by changing the shape and the size of the resonance film 107.
Example two
As shown in fig. 4, a vacuum packaging method of an optical fiber heat radiation probe 10 is used for manufacturing the optical fiber heat radiation probe 10 according to the first embodiment, and includes the following steps:
step 100: a section of single-mode fiber 104 is taken, the single-mode fiber 104 comprises a first end face and a second end face, and an optical microcavity 106 is manufactured on the second end face of the single-mode fiber 104.
In this step 100, the optical microcavity 106 may be formed by welding a hollow tube with the second end face of the single-mode optical fiber 104, or by manufacturing a hollow tube on the second end face of the single-mode optical fiber 104 by two-photon polymerization, or by etching the second end face of the single-mode optical fiber 104.
In one embodiment, as shown in fig. 5, the steps for fabricating the optical microcavity 106 on the second end face of the single-mode fiber 104 are as follows:
step 110: the second end face of the single-mode optical fiber 104 and one end face of a hollow tube are each cut flat.
In this step 110, the lengths of the single-mode fiber 104 and the hollow tube are not particularly limited, and the second end face of the single-mode fiber 104 and the end face of the hollow tube may be cut flat by an optical fiber cutter so that the end faces can be seamlessly abutted.
The hollow tube may be a quartz capillary or hollow core fiber having an outer diameter that is the same as the outer diameter of the single mode fiber 104.
Step 120: the second end face of the single-mode fiber 104 after being cut flat is welded with the end face of the hollow Guan Qie after being flat.
In this step 120, the second end face of the single-mode fiber 104 after being cut flat and the end face of the hollow Guan Qie after being flat are respectively placed on two ends of an optical fiber fusion splicer, and then the optical fiber fusion splicer is operated to align the second end face of the single-mode fiber 104 with the end face of the hollow tube for electric discharge fusion.
Step 130: the hollow tube on the single-mode fiber 104 is cut to a predetermined length so that the lumen of the hollow tube forms an optical microcavity 106 of a predetermined cavity length on the second end face of the single-mode fiber 104.
In the step 130, the fused single-mode fiber 104 and hollow tube are placed on a two-dimensional moving platform, and the two-dimensional moving platform is controlled to drive the single-mode fiber 104 and the hollow tube to move under the monitoring of the CCD, so as to adjust the relative position between the hollow tube and the optical fiber cutting knife, and further move the predetermined cutting point on the hollow tube to the position under the optical fiber cutting knife for cutting.
The wall of the hollow tube serves as the cavity wall 112 of the optical microcavity 106.
In another specific implementation, as shown in fig. 6, the step of fabricating the optical microcavity 106 on the second end face of the single-mode fiber 104 is as follows:
step 110: the second end face of the single-mode optical fiber 104 and the second end face of another single-mode optical fiber 104 are each cut flat.
In step 110, the lengths of the two single-mode fibers 104 are not particularly limited, and the second end surfaces of the two single-mode fibers 104 may be cut flat by an optical fiber cutter.
Step 120: the flattened second end surfaces of the two single-mode fibers 104 are heated to be arc-shaped.
In this step 120, the flattened second end surfaces of the two single-mode fibers 104 may be placed in two ends of an optical fiber fusion splicer, the flattened second end surfaces of the two single-mode fibers 104 are displaced to the outer edge of the heating center (the end surfaces of the two single-mode fibers 104 are not contacted) by driving a motor in the optical fiber fusion splicer, and then the discharge parameters are adjusted to heat the flattened second end surfaces of the two single-mode fibers 104 into an arc shape (the two single-mode fibers 104 are not fused).
Step 130: and respectively smearing refractive index matching liquid on the second end surfaces of the circular arc shapes of the two single-mode optical fibers 104.
In this step 130, the index matching fluid may eliminate reflection losses associated with the single mode fiber 104-air interface.
Step 140: and heating and welding the second end surfaces of the two single-mode fibers 104 coated with the index matching liquid, and simultaneously vaporizing the index matching liquid to form a bubble cavity at the welding position of the two single-mode fibers 104.
In the step 140, the second end surfaces of the two single-mode fibers 104 coated with the refractive index matching liquid may be respectively placed in two ends of the optical fiber fusion splicer, the second end surfaces of the two single-mode fibers 104 coated with the refractive index matching liquid are moved into a heating center (the end surfaces of the two single-mode fibers 104 are contacted) by driving a motor in the optical fiber fusion splicer, then the discharge parameters are adjusted, and the second end surfaces of the two single-mode fibers 104 coated with the refractive index matching liquid are heated and fused; during the fusion process, the index matching fluid is vaporized by heat, thereby forming the bubble chamber at the fusion of the two single-mode fibers 104.
Step 150: and cutting the two welded single-mode optical fibers 104 from the middle of the bubble cavity to obtain two single-mode optical fibers 104 with the optical microcavity 106 on the second end face.
In this step 150, the two fused single-mode fibers 104 may be placed on a two-dimensional displacement platform and fixed, then the two-dimensional displacement platform is controlled to move under the monitoring of a CCD, the bubble cavity at the fused portion of the two single-mode fibers 104 is positioned under the optical fiber cutter, and then the optical fiber cutter is controlled to cut the two fused single-mode fibers 104 from the middle of the bubble cavity, thereby obtaining two single-mode fibers 104 each having the optical microcavity 106 on the second end face.
The cladding 109 of the single mode fiber 104 serves as the cavity wall 112 of the optical microcavity 106.
In yet another specific implementation, as shown in fig. 7, the step of fabricating the optical microcavity 106 on the second end face of the single-mode fiber 104 is as follows:
step 110: the second end of the single mode fiber 104 is cut flat.
In step 110, the length of the single-mode optical fiber 104 is not particularly limited, and the second end surface of the single-mode optical fiber 104 may be cut flat by an optical fiber cutter.
Step 120: the single mode fiber 104 is horizontally placed and fixed on a glass slide, a supporting part surrounding the single mode fiber 104 is arranged on the glass slide, photoresist is instilled between the single mode fiber 104 and the supporting part, the second end face of the single mode fiber 104 is immersed in the photoresist, and a cover slip is placed on the supporting part to flatten the photoresist above the single mode fiber 104.
In this step 120, the cover slip is used to planarize the surface of the photoresist to avoid the curvature of the photoresist surface from refracting the femtosecond laser to affect the focal position without contacting the single mode fiber 104.
The support may be a rubber ring.
Step 130: and performing local polymerization denaturation on the photoresist by using a femtosecond laser to form a polymer microstructure with the optical microcavity 106 on the second end face of the single-mode fiber 104.
In this step 130, the glass slide with the single-mode fiber 104 and the photoresist is placed on a three-dimensional displacement platform, the femtosecond laser is focused by an objective lens and then acts inside the photoresist, the part of the photoresist irradiated by the focal point of the femtosecond laser generates a two-photon polymerization effect and is polymerized and denatured, the three-dimensional displacement platform moves according to the structure of the required polymer microstructure, so that the photoresist on the second end face of the single-mode fiber 104 is polymerized and denatured in sequence, and the polymer microstructure with the optical microcavity 106 is formed.
Step 140: the unpolymerized photoresist is removed by a developer solution.
In this step 140, the cover slip is removed and the slide, along with the single mode optical fibers 104 and photoresist thereon, is immersed in a developer solution in which the unpolymerized photoresist is dissolved and the polymerized photoresist remains to form the polymeric microstructure.
The polymer microstructures act as the cavity walls 112 of the optical microcavity 106.
Step 200: a resonant film 107 is fabricated on the other end of the optical microcavity 106, and the second end of the single-mode fiber 104, the optical microcavity 106, and the resonant film 107 together form an optical fiber FPI 102.
In this step 200, the resonance film 107 includes a graphene film 110 and a nano gold film 111, and the graphene film 110 and the nano gold film 111 may be sequentially manufactured first, then the resonance film 107 may be etched, or the graphene film 110 may be manufactured first, then the graphene film 110 may be etched, and finally the nano gold film 111 may be manufactured.
In one embodiment, as shown in fig. 8, the steps for fabricating the resonant thin film 107 on the other end of the optical microcavity 106 are as follows:
step 210: a graphene film 110 is fabricated on the other end of the optical microcavity 106.
Step 220: etching the graphene film 110 to form a fixed region 113, a resonant region 114 and a plurality of suspension regions 115 on the resonant film 107, wherein the fixed region 113 is attached and fixed on a cavity wall 112 of the optical microcavity 106, and the resonant region 114 is suspended on the optical microcavity 106 and corresponds to the fiber core 108 of the single-mode fiber 104; each suspension region 115 is connected between the resonance region 114 and the fixed region 113, a hollow region 116 is disposed between adjacent suspension regions 115, and the optical microcavity 106 is exposed from the hollow region 116.
The resonant film 107 may be etched using a femtosecond laser or a plasma beam.
Step 230: a nano-gold film 111 is fabricated on the graphene film 110.
In this step 230, the nano-gold film 111 may be formed by attaching a nano-gold target to the surface of the graphene film 110 by means of magnetron sputtering, vacuum sputtering, or the like. The portion of the nano gold target material may pass through the hollowed-out area 116 and be plated on the second end surface of the single-mode fiber 104, so as to improve the reflectivity of the second end surface of the single-mode fiber 104 and improve the measurement accuracy, but the sputtering or sputtering time of the nano gold target material needs to be controlled, so as to avoid that the reflectivity of the second end surface of the single-mode fiber 104 is too high, and the optical signal cannot enter the optical microcavity 106.
In one embodiment, as shown in fig. 9, in step 200, the step of fabricating the resonant thin film 107 on the other end of the optical microcavity 106 is as follows:
step 210: a graphene film 110 is fabricated on the other end of the optical microcavity 106.
Step 220: a nano-gold film 111 is fabricated on the graphene film 110.
In this step 220, the nano-gold film 111 may be formed by attaching a nano-gold target to the surface of the graphene film 110 by means of magnetron sputtering, vacuum sputtering, or the like.
Step 230: etching the graphene film 110 and the nano gold film 111 to form a fixed region 113, a resonant region 114 and a plurality of hanging regions 115 on the resonant film 107, wherein the fixed region 113 is attached and fixed on a cavity wall 112 of the optical microcavity 106, and the resonant region 114 is suspended on the optical microcavity 106 and corresponds to the fiber core 108 of the single-mode fiber 104; each suspension region 115 is connected between the resonance region 114 and the fixed region 113, a hollow region 116 is disposed between adjacent suspension regions 115, and the optical microcavity 106 is exposed from the hollow region 116.
The resonant film 107 may be etched using a femtosecond laser or a plasma beam.
Specifically, in step 210, the step of fabricating the graphene film 110 on the other end of the optical microcavity 106 is as follows:
step 211: a graphene film 110 is formed on the copper foil by chemical vapor deposition.
Step 212: and dissolving and corroding the copper foil by adopting a ferric trichloride solution, so that the graphene film 110 on the copper foil is transferred into the ferric trichloride solution.
In this step 212, the concentration of the ferric trichloride solution is about 0.08g/ml, and only a small piece of copper foil is cut according to the end face size of the optical microcavity 106, and is placed in the ferric trichloride solution for dissolution and corrosion, and the graphene film 110 on the cut copper foil should be able to cover the (cavity wall 112) end face of the optical microcavity 106.
Step 213: and diluting and filtering the ferric trichloride solution transferred with the graphene film 110 by adopting deionized water, so that the graphene film 110 in the ferric trichloride solution is transferred and floats on the deionized water.
In step 213, the main purpose of diluting and filtering the ferric trichloride solution with deionized water is to clean the graphene film 110, prevent copper foil and ferric trichloride from remaining on the graphene film 110, and reduce the ph of the solution.
Step 214: and slowly approaching the other end of the optical microcavity 106 to the graphene film 110 floating on the deionized water, and slowly pulling away the graphene film 110 after the other end of the optical microcavity 106 contacts the graphene film 110, so that the graphene film 110 is transferred to the other end of the optical microcavity 106.
In this step 214, the other end of the optical microcavity 106 should slowly approach the graphene film 110 floating on the deionized water in parallel to the graphene film 110, so that the other end of the optical microcavity 106 is uniformly in contact with the graphene film 110, and the graphene film 110 is uniformly transferred and attached to the other end of the optical microcavity 106.
Step 215: and drying the graphene film 110 on the optical microcavity 106 to suspend the graphene film 110 on the optical microcavity 106.
In this step 215, the graphene film 110 may be naturally dried at room temperature, and during the drying process, the graphene film 110 may have its peripheral area attached and fixed to the cavity wall 112 of the optical microcavity 106 due to the effect of its own van der waals force, and its central area may be suspended above the optical microcavity 106.
Step 300: a bragg grating 105 is fabricated in the single-mode fiber 104, the single-mode fiber 104 and the bragg grating 105 together form an optical fiber FBG 101, and the optical fiber FBG 101 and the optical fiber FPI 102 together form a phase-shifted bragg grating.
In this step 300, the bragg grating 105 may be formed by performing refractive index modulation on the single-mode fiber 104 using a femtosecond laser method, a CO2 laser method, a phase mask method, or the like.
Step 400: taking a section of vacuum packaging tube 103, as shown in fig. 10, firstly inserting the phase shift bragg grating into the vacuum packaging tube 103, exposing the first end face of the single-mode fiber 104 outside the vacuum packaging tube 103, then welding one end, which is in the same direction as the first end face of the single-mode fiber 104, of the vacuum packaging tube 103 onto the single-mode fiber 104, then vacuumizing the vacuum packaging tube 103, and then fusing and sealing one end, which is in the same direction as the second end face of the single-mode fiber 104, of the vacuum packaging tube 103.
In this step 400, the single-mode fiber 104 and the vacuum packaging tube 103 are respectively placed on a left optical fiber support and a right optical fiber support of a carbon dioxide laser system, then the left optical fiber support and the right optical fiber support are controlled to move relatively under a carbon dioxide laser, so that a bragg grating 105, an optical microcavity 106, a resonant film 107 and the like on the single-mode fiber 104 are inserted into the vacuum packaging tube 103 under the carbon dioxide laser, then the carbon dioxide laser is started, so that the carbon dioxide laser emits carbon dioxide laser and is beaten on one end of the vacuum packaging tube 103 positioned outside the single-mode fiber 104, one end of the vacuum packaging tube 103 is melted and fixed on the single-mode fiber 104, then the other end of the vacuum packaging tube 103 is fixed in a vacuum chamber, the vacuum packaging tube 103 is vacuumized through the vacuum chamber, the single-mode fiber 104 and the vacuum packaging tube 103 are synchronously moved, the other end of the vacuum packaging tube 103 is positioned under the carbon dioxide laser, the vacuum packaging tube 103 is measured by adopting a vacuum gauge, when the inside the vacuum packaging tube 103 emits carbon dioxide laser again, and the carbon dioxide laser reaches the vacuum pressure required to be beaten on the other end of the single-mode fiber 104, and the vacuum packaging tube is sealed at the other end of the vacuum packaging tube.
Example III
As shown in fig. 11, a thermal radiation detection method includes the steps of:
s1: an excitation light signal having a first wavelength and a detection light signal having a second wavelength are coupled together into the optical fiber heat radiation probe 10 according to the first embodiment, so that the excitation light signal drives the resonance film 107 to resonate.
In this step S1, preferably, the second wavelength of the detection optical signal is equal to the phase shift wavelength of the phase shift bragg grating.
Specifically, an optical measurement system is used to measure the reflection spectrum of the optical fiber thermal radiation probe 10, as shown in fig. 12, the optical measurement device includes an excitation laser 1, a signal generator 3, an electro-optical modulator 2, a detection laser 4, an optical fiber coupler 5, an optical fiber circulator 6, a band-pass filter 7, a photodetector 8 and a spectrometer 9, the optical fiber coupler 5 has a first incident end, a second incident end and an exit end, the optical fiber circulator 6 has an incident end, a reflective end and a transmissive end, the excitation laser 1 is connected to the first incident end of the optical fiber coupler 5 through the electro-optical modulator 2, the detection laser 4 is connected to the second incident end of the optical fiber coupler 5, the exit end of the optical fiber coupler 5 is connected to the incident end of the optical fiber circulator 6, the photodetector 8 is connected to the reflective end of the optical fiber circulator 6 through the band-pass filter 7, and the first end face of the single-mode optical fiber 104 of the optical fiber thermal radiation probe 10 is connected to the transmissive end of the optical fiber circulator 6; the signal generator 3 is connected with and controls the electro-optical modulator 2, and the spectrometer 9 is connected with and controls the photoelectric detector 8.
The excitation laser 1 emits an excitation light signal with a first wavelength to the electro-optical modulator 2, the detection laser 4 emits an excitation light signal with a second wavelength to the optical fiber coupler 5, and then the electro-optical modulator 2 modulates the light intensity of the excitation light signal under the periodic signal of the signal generator 3, so that the light intensity of the excitation light signal periodically changes to enter the optical fiber coupler 5, and is coupled with the detection light signal to enter the optical fiber thermal radiation probe 10.
In this embodiment, the optical fiber coupler 5 is a 90:10 coupler, that is, when coupled, the excitation optical signal accounts for 90% of the total optical signal, and the detection optical signal accounts for 10% of the total optical signal.
Preferably, an optical isolator 11 is further connected between the detection laser 4 and the second incident end of the optical fiber coupler 5, and the optical isolator 11 only allows the detection optical signal to be transmitted from the detection laser 4 to the optical fiber coupler 5, but does not allow the detection optical signal to be transmitted from the optical fiber coupler 5 to the detection laser 4, so as to avoid the detection optical signal being reflected and folded back to the detection laser 4 during the transmission process, thereby causing damage to the detection laser 4.
When the excitation light signal coupled into the optical fiber heat radiation probe 10 acts on the resonance film 107, the resonance film 107 is irradiated by the excitation light signal whose light intensity is periodically changed, thereby generating periodically changed thermal expansion or contraction, and being forced to form resonance motion.
After the detection light signal coupled into the optical fiber heat radiation probe 10 is modulated and reflected by the resonance film 107, the detection light signal carries resonance information of the resonance film 107.
S2: and obtaining a detection light signal reflected by the optical fiber thermal radiation probe 10 to obtain a reflection spectrum of the optical fiber thermal radiation probe 10.
In this step S2, the detection light signal reflected by the optical fiber thermal radiation probe 10 re-enters the optical fiber circulator 6, and is then captured by the photodetector 8 through the band-pass filter 7 from the reflection end of the optical fiber circulator 6. The photodetector 8 converts the reflected detection light signal into a corresponding electrical signal and provides the electrical signal to the spectrometer 9, and the spectrometer 9 outputs a corresponding reflection spectrum.
The band-pass filter is used for filtering the doped excitation light signals in the detection light signals.
S3: and calculating the magnitude of the heat radiation signal according to the reflection wave crest in the reflection frequency spectrum.
In this step S3, the reflection spectrum is compared with the initial spectrum of the optical fiber heat radiation probe 10, so that the offset of the reflection peak is obtained, and the offset of the reflection peak is correlated with the magnitude of the heat radiation signal, so that the magnitude of the heat radiation signal can be calculated.
The initial spectrum of the optical fiber heat radiation probe 10 refers to the reflection spectrum of the optical fiber heat radiation probe 10 in the initial state obtained in the steps S1 to S2, and the initial state generally refers to a state in which no heat radiation signal acts, but a state in which a heat radiation signal of a predetermined magnitude acts may be set as the initial state according to the actual situation.
Finally, it should be noted that the foregoing embodiments are merely for illustrating the technical solution of the embodiments of the present invention and are not intended to limit the embodiments of the present invention, and although the embodiments of the present invention have been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the technical solution of the embodiments of the present invention may be modified or replaced with the same, and the modified or replaced technical solution may not deviate from the scope of the technical solution of the embodiments of the present invention.
Claims (13)
1. The optical fiber heat radiation probe is characterized by comprising a phase-shift Bragg grating and a vacuum packaging tube, wherein the vacuum packaging tube is sleeved outside the phase-shift Bragg grating, the phase-shift Bragg grating is packaged in a vacuum manner, and one end face of the phase-shift Bragg grating is exposed outside the vacuum packaging tube; the phase-shift Bragg grating comprises a single-mode fiber, a Bragg grating, an optical microcavity and a resonant film, wherein the single-mode fiber comprises a first end face and a second end face; the Bragg grating is manufactured in the single-mode fiber, and the single-mode fiber and the Bragg grating jointly form an optical fiber FBG; the optical microcavity is manufactured on the second end face of the single-mode optical fiber, the resonance film is manufactured on the other end of the optical microcavity, and the second end face of the single-mode optical fiber, the optical microcavity and the resonance film jointly form an optical fiber FPI; the distance between the Bragg grating and the optical microcavity is smaller than the grating period of the Bragg grating, and the reflection light intensity formed by the Bragg grating is the same as the reflection light intensity formed by the resonance film; the first end face of the single-mode fiber is exposed out of the vacuum packaging tube, one end, which is in the same direction as the first end face of the single-mode fiber, of the vacuum packaging tube is welded on the single-mode fiber, and one end, which is in the same direction as the second end face of the single-mode fiber, of the vacuum packaging tube is sealed in a melting mode.
2. The fiber optic heat radiation probe according to claim 1 wherein the distance between the bragg grating and the resonant film satisfies pi phase variation.
3. The optical fiber heat radiation probe according to claim 1, wherein the resonance film comprises a graphene film and a nano-gold film, and the nano-gold film is fabricated on the graphene film.
4. The optical fiber heat radiation probe according to claim 1, wherein the resonance film comprises a fixing area, a resonance area and a plurality of hanging areas, the fixing area is attached and fixed on the cavity wall of the optical microcavity, and the resonance area is suspended on the optical microcavity and corresponds to the fiber core of the single-mode optical fiber; each suspension area is connected between the resonance area and the fixed area, a hollow area is arranged between the adjacent suspension areas, and the optical microcavity is exposed from the hollow area.
5. The fiber optic heat radiation probe according to claim 1 wherein the vacuum enclosure tube has an internal air pressure of less than 5 x 10 -4 mbar。
6. The vacuum packaging method of the optical fiber heat radiation probe is characterized by comprising the following steps of:
step 100: taking a section of single-mode fiber, wherein the single-mode fiber comprises a first end face and a second end face, and an optical microcavity is manufactured on the second end face of the single-mode fiber;
Step 200: manufacturing a resonant film on the other end of the optical microcavity, wherein the second end face of the single-mode fiber, the optical microcavity and the resonant film together form an optical fiber FPI;
step 300: manufacturing a Bragg grating in the single-mode fiber, wherein the single-mode fiber and the Bragg grating jointly form an optical fiber FBG, the distance between the Bragg grating and the optical microcavity is smaller than the grating period of the Bragg grating, and the reflection light intensity formed by the Bragg grating is the same as the reflection light intensity formed by the resonance film, so that the optical fiber FBG and the optical fiber FPI jointly form a phase shift Bragg grating;
step 400: and taking a section of vacuum packaging tube, firstly inserting the phase shift Bragg grating into the vacuum packaging tube, exposing the first end face of the single-mode fiber outside the vacuum packaging tube, then welding one end, which is in the same direction as the first end face of the single-mode fiber, on the vacuum packaging tube onto the single-mode fiber, then vacuumizing the vacuum packaging tube, and then sealing one end, which is in the same direction as the second end face of the single-mode fiber, on the vacuum packaging tube in a fusion mode.
7. The method of claim 6, wherein in step 100, the step of fabricating the optical microcavity on the second end face of the single-mode fiber is as follows:
Step 110: cutting the second end face of the single-mode optical fiber and one end face of a hollow pipe to be flat;
step 120: welding the second end face of the single-mode optical fiber after being cut flat with the end face of the hollow Guan Qie;
step 130: and cutting the hollow tube on the single-mode fiber to a preset length, so that the tube cavity of the hollow tube forms an optical microcavity with a preset cavity length on the second end face of the single-mode fiber.
8. The method of claim 6, wherein in step 100, the step of fabricating the optical microcavity on the second end face of the single-mode fiber is as follows:
step 110: cutting the second end face of the single-mode optical fiber and the second end face of another single-mode optical fiber into flat parts;
step 120: heating the second end face of the two single-mode optical fibers after being cut flat into an arc shape;
step 130: respectively smearing refractive index matching liquid on the second end surfaces of the two single-mode optical fiber arc shapes;
step 140: heating and welding the second end surfaces of the two single-mode fibers coated with the refractive index matching liquid, and simultaneously vaporizing the refractive index matching liquid to form a bubble cavity at the welding position of the two single-mode fibers;
Step 150: and cutting off the two welded single-mode optical fibers from the middle of the bubble cavity to obtain two single-mode optical fibers with the optical microcavity on the second end face.
9. The method of claim 6, wherein in step 100, the step of fabricating the optical microcavity on the second end face of the single-mode fiber is as follows:
step 110: cutting the second end face of the single-mode optical fiber flat;
step 120: the single mode fiber is horizontally fixed on a glass slide, a supporting part surrounding the single mode fiber is arranged on the glass slide, photoresist is instilled between the single mode fiber and the supporting part, the second end face of the single mode fiber is immersed in the photoresist, and a cover slip is placed on the supporting part to flatten the photoresist above the single mode fiber;
step 130: carrying out local polymerization denaturation on the photoresist by using femtosecond laser to form a polymer microstructure with the optical microcavity on the second end face of the single-mode fiber;
step 140: the unpolymerized photoresist is removed by a developer solution.
10. The method of vacuum packaging an optical fiber heat radiation probe according to claim 6, wherein the resonance film comprises a graphene film and a nano-gold film, and the step of fabricating the resonance film on the other end of the optical microcavity in step 200 is as follows:
Step 210: manufacturing a graphene film on the other end of the optical microcavity;
step 220: etching the graphene film to enable the resonance film to form a fixed area, a resonance area and a plurality of hanging areas, wherein the fixed area is fixedly attached to the cavity wall of the optical microcavity, and the resonance area is suspended on the optical microcavity and corresponds to the fiber core of the single-mode fiber; each suspension area is connected between the resonance area and the fixed area, a hollow area is arranged between adjacent suspension areas, and the optical microcavity is exposed from the hollow area;
step 230: and manufacturing a nano gold film on the graphene film.
11. The method of vacuum packaging an optical fiber heat radiation probe according to claim 6, wherein the resonance film comprises a graphene film and a nano-gold film, and the step of fabricating the resonance film on the other end of the optical microcavity in step 200 is as follows:
step 210: manufacturing a graphene film on the other end of the optical microcavity;
step 220: manufacturing a nano gold film on the graphene film;
step 230: etching the graphene film and the nano gold film to enable the resonance film to form a fixed area, a resonance area and a plurality of hanging areas, wherein the fixed area is fixedly attached to the cavity wall of the optical microcavity, and the resonance area is suspended on the optical microcavity and corresponds to the fiber core of the single-mode fiber; each suspension area is connected between the resonance area and the fixed area, a hollow area is arranged between the adjacent suspension areas, and the optical microcavity is exposed from the hollow area.
12. A method of detecting thermal radiation, comprising the steps of:
s1: coupling together an excitation light signal having a first wavelength and a detection light signal having a second wavelength into the optical fiber heat radiation probe of claim 1, so that the excitation light signal drives the resonant film to resonate;
s2: obtaining a detection light signal reflected by the optical fiber thermal radiation probe to obtain a reflection spectrum of the optical fiber thermal radiation probe;
s3: and calculating the magnitude of the heat radiation signal according to the reflection wave crest in the reflection frequency spectrum.
13. The method of claim 12, wherein the second wavelength of the detection light signal is equal to a phase shift wavelength of the phase-shifted bragg grating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211261989.2A CN115683347B (en) | 2022-10-14 | 2022-10-14 | Optical fiber heat radiation probe, vacuum packaging method thereof and heat radiation detection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211261989.2A CN115683347B (en) | 2022-10-14 | 2022-10-14 | Optical fiber heat radiation probe, vacuum packaging method thereof and heat radiation detection method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115683347A CN115683347A (en) | 2023-02-03 |
| CN115683347B true CN115683347B (en) | 2023-09-26 |
Family
ID=85066881
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211261989.2A Active CN115683347B (en) | 2022-10-14 | 2022-10-14 | Optical fiber heat radiation probe, vacuum packaging method thereof and heat radiation detection method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115683347B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101604053A (en) * | 2009-07-06 | 2009-12-16 | 厦门大学 | Tunable phase shift fiber grating based on Fiber Bragg Grating and catoptron |
| CN104949937A (en) * | 2015-06-24 | 2015-09-30 | 中国计量学院 | Phase-shifted fiber grating hydrogen sensor based on fiber grating microcavity |
| CN106643908A (en) * | 2017-01-16 | 2017-05-10 | 深圳大学 | Method for preparing temperature-pressure sensor, temperature-pressure sensor structure and temperature-pressure measuring system and method |
| CN109459164A (en) * | 2018-12-20 | 2019-03-12 | 深圳大学 | A kind of fibre optic compression sensor and preparation method thereof |
| WO2022121457A1 (en) * | 2020-12-08 | 2022-06-16 | 国网安徽省电力有限公司电力科学研究院 | Optical fiber photoacoustic sensing probe and sensing system resistant to ambient noise interference |
| CN114705657A (en) * | 2022-03-15 | 2022-07-05 | 深圳大学 | Optical fiber hydrogen sensor based on cantilever beam film and preparation method thereof |
-
2022
- 2022-10-14 CN CN202211261989.2A patent/CN115683347B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101604053A (en) * | 2009-07-06 | 2009-12-16 | 厦门大学 | Tunable phase shift fiber grating based on Fiber Bragg Grating and catoptron |
| CN104949937A (en) * | 2015-06-24 | 2015-09-30 | 中国计量学院 | Phase-shifted fiber grating hydrogen sensor based on fiber grating microcavity |
| CN106643908A (en) * | 2017-01-16 | 2017-05-10 | 深圳大学 | Method for preparing temperature-pressure sensor, temperature-pressure sensor structure and temperature-pressure measuring system and method |
| CN109459164A (en) * | 2018-12-20 | 2019-03-12 | 深圳大学 | A kind of fibre optic compression sensor and preparation method thereof |
| WO2022121457A1 (en) * | 2020-12-08 | 2022-06-16 | 国网安徽省电力有限公司电力科学研究院 | Optical fiber photoacoustic sensing probe and sensing system resistant to ambient noise interference |
| CN114705657A (en) * | 2022-03-15 | 2022-07-05 | 深圳大学 | Optical fiber hydrogen sensor based on cantilever beam film and preparation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115683347A (en) | 2023-02-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Zhao et al. | Review of no-core optical fiber sensor and applications | |
| CN106643908B (en) | Preparation method and structure of temperature-pressure sensor, temperature-pressure measurement system and method | |
| US20050201660A1 (en) | Apparatus for single nanoparticle detection | |
| Chen et al. | Review of femtosecond laser machining technologies for optical fiber microstructures fabrication | |
| CN108731841B (en) | Frequency modulation continuous wave laser interference optical fiber temperature sensor | |
| CN106645029A (en) | Weld type open-cavity optical fiber EFPI (extrinsic Farby-Perot interferometric) refractive index sensor | |
| US8174703B2 (en) | Method for fabricating a sensor, a sensor, and a method for sensing | |
| JPWO2017183471A1 (en) | Temperature measurement substrate and temperature measurement system | |
| CN108489475B (en) | Method and device for detecting vibration signal of harmonic oscillator of hemispherical resonator gyroscope | |
| BR112015013346B1 (en) | optical sensor for pressure measurements | |
| CN115683347B (en) | Optical fiber heat radiation probe, vacuum packaging method thereof and heat radiation detection method | |
| CN116559117A (en) | Probe type optical fiber seawater salinity sensor based on FP interference and manufacturing method thereof | |
| CN108663076B (en) | Inclination angle sensor and preparation method thereof | |
| CN206960027U (en) | A kind of fibre optic compression sensor based on micro- ellipsoid air chamber | |
| CN114018432A (en) | All-fiber end face integrated minimum temperature hydraulic sensor and construction method thereof | |
| CN218545998U (en) | Vacuum gauge based on fiber resonator | |
| CN115575026B (en) | Optical fiber resonator, preparation method thereof and vacuum degree detection method | |
| CN113310507A (en) | Optical fiber SPR sensor for measuring displacement and angle, calibration device and method | |
| Zhang et al. | Sensitivity amplification of bubble-based all-silica fiber liquid-pressure sensor by using femtosecond laser exposure | |
| CN109596206B (en) | Vibration sensor based on liquid filled photonic crystal fiber | |
| CN114705657A (en) | Optical fiber hydrogen sensor based on cantilever beam film and preparation method thereof | |
| CN112268636A (en) | Liquid temperature sensing system based on whispering gallery mode spherical optical microcavity | |
| CN218211633U (en) | Optical fiber thermal radiation sensor device | |
| CN217033615U (en) | System for detecting hydrogen concentration through cantilever beam film of optical fiber end face | |
| CN112964181B (en) | Optical fiber Bragg grating position detection device and measurement method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |