CN115682846B - Electromagnetic folding beam recoverable MEMS safety system for weak environmental force and control method - Google Patents

Electromagnetic folding beam recoverable MEMS safety system for weak environmental force and control method Download PDF

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CN115682846B
CN115682846B CN202211038451.5A CN202211038451A CN115682846B CN 115682846 B CN115682846 B CN 115682846B CN 202211038451 A CN202211038451 A CN 202211038451A CN 115682846 B CN115682846 B CN 115682846B
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explosion
folding
mems
proof
limiting
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CN115682846A (en
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娄文忠
阚文星
冯恒振
吕斯宁
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Beijing Institute of Technology BIT
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Beijing Institute of Technology BIT
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Abstract

The invention discloses an electromagnetic folding beam recoverable MEMS safety system for weak environmental force and a control method. The invention adopts the permanent magnet to provide a magnetic field, generates ampere force by electrifying the left and right limiting folding beams through the micro control chip, controls and releases the position limitation of the flameproof slide block, and controls the position of the flameproof slide block by electrifying and deenergizing the unfolding folding beams, thereby realizing safe unfolding and having a restorable function; the invention has the advantages of simple structure, high reliability and the like, and meanwhile, compared with an MEMS security system driven by an electromagnetic coil, the invention has simpler processing flow and smaller structure size; and the ampere force is completely utilized to release and restore the insurance, so that the safety and reliability of the system operation can be improved through reasonable circuit logic design.

Description

Electromagnetic folding beam recoverable MEMS safety system for weak environmental force and control method
Technical Field
The invention relates to weak-environment-force ammunition safety technology, in particular to an electromagnetic folding beam recoverable MEMS safety system for weak environment force and a control method thereof.
Background
The smartness and intelligence of fuzes have become one of the key development directions of a plurality of research institutions due to the development demands of miniaturization, intelligence and the like of weapon systems. The safety system is an important component of the fuze, which can ensure the safety and reliability of the weapon system in storage, transportation, firing, striking, etc. over the whole life cycle. When the weapon system executes the fight task, the safety system of the fuze is required to have the functions of releasing the insurance for many times and recovering the insurance autonomously under the multi-sensing control due to the complexity and diversity of the battlefield target, and the weapon system can not be detonated after the attack instruction is canceled by the weapon system, so the design of the MEMS safety system with the recoverable function plays an important role in improving the safety and reliability of the weapon system.
At present, a common MEMS micro-actuator of the fuze MEMS safety system is driven in an electromagnetic mode, and has low driving voltage, less heat generation in working and obvious advantages. The electromagnetic micro-driver is mainly realized by adopting an electromagnetic coil, the manufacturing process is mature, but the manufacturing process is complex and time-consuming, and meanwhile, the electromagnetic coil is large in size, so that the structural size of the whole system is increased, and excessive space is occupied.
Disclosure of Invention
In order to not influence the safety of the fuze and the action reliability of the arming control system, increase the restorable function of the safety system and reduce the system volume, the invention provides the electromagnetic folding beam restorable MEMS safety system for weak environmental force and the control method thereof, which not only meet the miniaturization requirement of the fuze safety control system, reduce the volume of the fuze safety system, but also meet the safety and reliability arming requirement of the MEMS fuze, and the ammunition can reliably realize flameproof and stable arming in the environment without backseat overload and centrifugal overload, thereby improving the safety and reliability of the system.
The ammunition comprises a micro-control chip, an MEMS (micro-electromechanical system) initiator and a next-stage charge, wherein the MEMS initiator is aligned to the next-stage charge, and is connected to the micro-control chip.
It is an object of the present invention to propose an electromagnetic folding beam recoverable MEMS security system for weak environmental forces.
The electromagnetic folding beam recoverable MEMS security system for weak environmental forces of the present invention comprises: the explosion-proof device comprises a base plate, an explosion-proof sliding block, an explosion-transmitting hole, a left permanent magnet, a right permanent magnet, a lower permanent magnet, a left limit folding beam, a right limit folding beam, an explosion-proof folding beam, an electrode, an explosion-proof limiting pin, an explosion-transmitting limiting pin, a limiting supporting block and a driving rod; wherein the substrate is a flat plate, and the surface of the substrate is perpendicular to the spring axis direction; the center of the base plate is provided with an explosion-proof slide block mounting hole which penetrates through the upper surface and the lower surface of the base plate; the explosion-proof sliding block is positioned in the explosion-proof sliding block mounting hole, and the distance between the bottom end of the explosion-proof sliding block and the bottom end of the explosion-proof sliding block mounting hole is not smaller than the horizontal projection distance between the explosion-transmitting hole and the MEMS initiator in a safe state; the explosion-proof sliding block is provided with an explosion-propagation hole penetrating through the explosion-proof sliding block, and the explosion-propagation hole is dislocated with the MEMS exploder in a safe state; magnet mounting grooves are respectively formed in the left side, the right side and the lower side of the upper surface of the base plate and are positioned in the explosion-proof slider mounting holes, a left permanent magnet and a right permanent magnet are respectively arranged in the magnet mounting grooves in the left side and the right side, and a lower permanent magnet is arranged in the magnet mounting groove in the lower side; the magnetic induction intensity directions of the left permanent magnet, the right permanent magnet and the lower permanent magnet are parallel to the spring shaft; the lower surface of the base plate corresponds to the magnet mounting grooves on the left side, the right side and the lower side respectively, support beam mounting grooves are respectively formed in the base plate, a left limit folding beam and a right limit folding beam are respectively formed in the support beam mounting grooves on the left side and the right side, and an unfolding folding beam is arranged in the support beam mounting groove on the lower side; electrodes are respectively arranged on the lower surface of the base plate and on the two sides of the support beam mounting grooves on the left side, the right side and the left side of the support beam mounting groove, and the two ends of the left side limiting folding beam, the right side limiting folding beam and the nonconformal folding beam are respectively fixed and electrically connected to the corresponding electrodes and electrically connected to micro control chips of ammunition through the corresponding electrodes to form a closed loop; the left limit folding beam, the right limit folding beam and the nonconformal folding beam are all positioned in the same plane vertical to the spring shaft and are all made of conductive metal, the conducting metal comprises a center platform and bending beams which are respectively connected with the center platform and positioned at two sides, the center platform is in an axisymmetric graph about the spring shaft direction, and the tail ends of the bending beams are connected to corresponding electrodes; the left side edge and the right side edge of the explosion-proof sliding block are respectively provided with an explosion-proof limiting pin and an explosion-propagation limiting pin, and the distance between the explosion-proof limiting pins and the explosion-propagation limiting pins is equal to the horizontal projection distance between the explosion-propagation hole and the MEMS exploder in a safe state; the top ends of the center platforms of the left limiting folding beam and the right limiting folding beam are respectively provided with a limiting supporting block, and the shape of the top ends of the limiting supporting blocks is complementary with the shape of the explosion-proof limiting pin and the explosion-propagation limiting pin; the center platform of the unfolding folding beam is fixedly connected with the bottom of the explosion-proof sliding block through a driving rod; the electromagnetic folding beam can restore the MEMS safety system to have a safety state and a disarming state; in a safe state, the explosion transfer hole is staggered with the MEMS exploder, and the top ends of the limiting support blocks connecting the left limiting folding beam and the right limiting folding beam are respectively positioned in the corresponding explosion-proof limiting pins; after ammunition is launched, after a set time, the micro-control chip electrifies the left and right limit folding beams, the left and right limit folding beams are provided with current, ampere force is generated under the action of a magnetic field, and the directions of the ampere force generated by the left and right limit folding beams are controlled to be respectively directed to the left and right by respectively setting the magnetic induction intensity directions generated by the left and right permanent magnets and the current directions flowing through the left and right limit folding beams, so that corresponding limit supporting blocks are respectively pulled to separate from explosion-proof limiting pins; then the micro control chip is an unfolding folded Liang Tongdian, the unfolding folded beam is provided with current, ampere force is generated under the action of a magnetic field, the direction of the ampere force generated by the unfolding folded beam is controlled to be downward by setting the direction of magnetic induction intensity generated by the lower permanent magnet and the direction of the current passing through the unfolding folded beam, and therefore the explosion-proof sliding block is pulled to move downward by the driving rod, and the explosion-proof hole is aligned with the MEMS exploder; the micro control chip cuts off the power of the left and right limit folding beams, and the left and right limit folding beams are restored to the initial positions under the action of the restoring force of the bending beams, so that the corresponding limit supporting blocks are respectively pushed to be inserted into the corresponding explosion-propagation limiting pins to enter a protection releasing state, and the safety protection releasing is realized; when the ammunition needs to be detonated, the micro-control chip is electrified to the MEMS exploder, the MEMS exploder generates electric explosion, the next-stage charge is detonated, and the ammunition finishes the damage function; when the digestion protection state is needed to be taken, the micro-control chip is electrified for the left and right limiting folding beams, and the left and right limiting folding beams respectively generate ampere force pointing to the left and right, so that the corresponding limiting support blocks are respectively pulled to separate from the explosion transmission limiting pins; then the micro control chip restores the unfolding and folding Liang Duandian and Jie Bao folding beams to the initial positions under the action of the restoring force of the bending beams, and pushes the explosion-proof sliding blocks to move upwards through the driving rods, so that the explosion-proof holes are staggered with the MEMS detonators; the micro-control chip cuts off the power of the left and right limit folding beams, and the left and right limit folding beams recover to the initial positions under the action of the restoring force of the bending beams, so that the corresponding limit supporting blocks are respectively pushed to be inserted into the corresponding explosion-proof limit pins, and the explosion-proof limit pins enter a safe state again, thereby realizing the recoverable function.
The substrate and the flameproof slide block are made of silicon-based materials; the thickness of the base plate is 450-550 mu m, and the thickness of the explosion-proof slide block is 380-420 mu m; the length, width and height of the permanent magnet are 380-420 mu m, 40-60 mu m and 280-320 mu m respectively, and the magnetic induction intensity of the permanent magnet is 0.1-0.4T; the lower layers of the left limit folding beam, the right limit folding beam and the unfolding folding beam are silicon, conductive metal is formed by sputtering on the silicon, the total length is 380-420 mu m, and the width of the center platform is 70-90 mu m.
The bending beam is in the shape of one of rectangular wave, sine wave, triangular wave, trapezoidal wave, sawtooth wave and square wave.
The current passing through the left limit folding beam and the right limit folding beam is 0.2-0.5A, and the current passing through the unstacking folding beam is 1.6-2A.
Another object of the invention is to propose a control method for an electromagnetic folding beam recoverable MEMS safety system for weak environmental forces.
The invention relates to a control method of an electromagnetic folding beam recoverable MEMS safety system with weak environmental force, which comprises the following steps:
1) In a safe state, the explosion transfer hole is staggered with the MEMS exploder, and the top ends of the limiting support blocks connecting the left limiting folding beam and the right limiting folding beam are positioned in the explosion-proof limiting pins;
2) After ammunition is launched, after a set time, the micro-control chip electrifies the left and right limit folding beams, the left and right limit folding beams are provided with current, ampere force is generated under the action of a magnetic field, and the directions of the ampere force generated by the left and right limit folding beams are controlled to be respectively directed to the left and right by setting the directions of magnetic induction intensity generated by the left and right permanent magnets and the directions of the current flowing through the left and right limit folding beams, so that corresponding limit supporting blocks are respectively pulled to separate from explosion-proof limiting pins;
3) The micro control chip is an unfolding folded Liang Tongdian, the unfolding folded beam is provided with current, ampere force is generated under the action of a magnetic field, the direction of the ampere force generated by the unfolding folded beam is controlled to be downward by setting the direction of magnetic induction intensity generated by the lower permanent magnet and the direction of the current passing through the unfolding folded beam, and therefore the explosion-proof sliding block is pulled to move downward by the driving rod, and the explosion-proof hole is aligned with the MEMS exploder;
4) The micro control chip cuts off the power of the left and right limit folding beams, and the left and right limit folding beams are restored to the initial positions under the action of the restoring force of the bending beams, so that the corresponding limit supporting blocks are respectively pushed to be inserted into the corresponding explosion-propagation limiting pins to enter a protection releasing state, and the safety protection releasing is realized;
5) After the safety protection, according to whether the detonation is needed, the method is divided into the following two cases:
a) When the ammunition needs to be detonated, the micro-control chip is used for powering on the MEMS exploder, the MEMS exploder is used for explosion, the next-stage charge is detonated, and the ammunition finishes the damage function;
b) When the digestion protection state is needed to be taken, the micro-control chip is electrified for the left and right limiting folding beams, and the left and right limiting folding beams respectively generate ampere force pointing to the left and right, so that the corresponding limiting support blocks are respectively pulled to separate from the explosion transmission limiting pins; then the micro control chip restores the unfolding and folding Liang Duandian and Jie Bao folding beams to the initial positions under the action of the restoring force of the bending beams, and pushes the explosion-proof sliding blocks to move upwards through the driving rods, so that the explosion-proof holes are staggered with the MEMS detonators; the micro-control chip cuts off the power of the left and right limit folding beams, and the left and right limit folding beams recover to the initial positions under the action of the restoring force of the bending beams, so that the corresponding limit supporting blocks are respectively pushed to be inserted into the corresponding explosion-proof limit pins, and the explosion-proof limit pins enter a safe state again, thereby realizing the recoverable function.
Wherein, in the step 2), after the ammunition is launched for 5-10 seconds, the micro-control chip electrifies the left and right limit folding beams. The magnetic induction intensity of the permanent magnet is 0.1-0.4T; the current passing through the left limit folding beam and the right limit folding beam is 0.2-0.5A.
In step 3), the current through the unstacked folded beam is 1.6-2A.
The invention has the advantages that:
the invention adopts the permanent magnet to provide a magnetic field, generates ampere force by electrifying the left and right limiting folding beams through the micro control chip, controls and releases the position limitation of the flameproof slide block, and controls the position of the flameproof slide block by electrifying and deenergizing the unfolding folding beams, thereby realizing safe unfolding and having a restorable function; the invention has the advantages of simple structure, high reliability and the like, and meanwhile, compared with an MEMS security system driven by an electromagnetic coil, the invention has simpler processing flow and smaller structure size; and secondly, the ampere force is completely utilized to release and restore the insurance, and the safety and the reliability of the system work can be improved through reasonable circuit logic design.
Drawings
FIG. 1 is a schematic view of one embodiment of an electromagnetic folding beam recoverable MEMS security system for weak environmental forces of the present invention, wherein (a) is a schematic view of the upper surface and (b) is a schematic view of the lower surface;
FIG. 2 is a schematic view of one embodiment of the electromagnetic folding beam recoverable MEMS security system for weak environmental forces of the present invention in a secure state, wherein (a) is a schematic view of the upper surface and (b) is a schematic view of the lower surface;
FIG. 3 is a schematic diagram of one embodiment of an electromagnetic folding beam recoverable MEMS security system for weak environmental forces of the present invention during a disallowing process;
FIG. 4 is a schematic diagram of one embodiment of an electromagnetic folding beam recoverable MEMS security system for weak environmental forces of the present invention in an unsecured state;
figure 5 is a schematic diagram of a Jie Bao folded beam of one embodiment of an electromagnetic folded beam recoverable MEMS security system for weak ambient forces of the present invention.
Detailed Description
The invention will be further elucidated by means of specific embodiments in conjunction with the accompanying drawings.
As shown in fig. 1, the electromagnetic folding beam recoverable MEMS security system for weak environmental forces of the present embodiment includes: the explosion-proof device comprises a base plate 1, an explosion-proof slide block 2, an explosion-conducting hole 21, a left permanent magnet 31, a right permanent magnet 32, a lower permanent magnet 33, a left limit folding beam 41, right limit folding beams 42 and Jie Bao folding beams 43, an electrode 5, an explosion-proof limiting pin 61, an explosion-conducting limiting pin 62, a limiting support block 7 and a driving rod 8; wherein the substrate 1 is a flat plate, and the surface of the substrate 1 is perpendicular to the spring axis direction; the center of the base plate 1 is provided with an explosion-proof slide block 2 mounting hole, and the explosion-proof slide block 2 mounting hole penetrates through the upper surface and the lower surface of the base plate 1; the flameproof slider 2 is positioned in the installation hole of the flameproof slider 2, and the distance between the bottom end of the flameproof slider 2 and the bottom end of the installation hole of the flameproof slider 2 is not smaller than the horizontal projection distance between the explosion transmission hole 21 and the MEMS initiator in a safe state; the explosion-proof slide block 2 is provided with an explosion-propagation hole 21 penetrating through the explosion-proof slide block 2, and the explosion-propagation hole 21 is staggered with the MEMS initiator in a safe state; magnet mounting grooves are respectively formed in the left side, the right side and the lower side of the mounting hole of the explosion-proof slider 2 on the upper surface of the substrate 1, a left permanent magnet 31 and a right permanent magnet 32 are respectively arranged in the magnet mounting grooves in the left side and the right side, and a lower permanent magnet 33 is arranged in the magnet mounting groove in the lower side; the magnetic induction intensity directions of the left permanent magnet, the right permanent magnet and the lower permanent magnet are parallel to the spring shaft; support beam mounting grooves are respectively formed in the lower surface of the substrate 1 and correspond to the left and right magnet mounting grooves and the lower magnet mounting grooves, a left limit folding beam 41 and a right limit folding beam 42 are respectively formed in the support beam mounting grooves on the left and right sides, and an unfolding folding beam 43 is formed in the support beam mounting groove on the lower side; electrodes 5 are respectively arranged on the lower surface of the base plate 1 and on the left side, the right side and the two sides of the support beam mounting groove on the lower side, and the two ends of the left side limiting folding beam 41, the right side limiting folding beam 42 and the protecting folding beam 43 are respectively connected to micro-control chips of ammunition through the corresponding electrodes 5 to form a closed loop; the left limit folding beam 41, the right limit folding beam 42 and the unstacking folding beam 43 are all positioned in the same plane vertical to the spring axis and are all made of conductive metal, and the device comprises a center platform and bending beams which are respectively connected with the center platform and positioned at two sides, wherein the center platform is in an axisymmetric graph about the spring axis direction, and the tail ends of the bending beams are connected to corresponding electrodes 5; the left side edge and the right side edge of the flameproof sliding block 2 are respectively provided with a flameproof limiting pin 61 and a flameproof limiting pin 62, and the distance between the flameproof limiting pin 61 and the flameproof limiting pin 62 is equal to the horizontal projection distance between the flameproof hole 21 and the MEMS initiator in a safe state; the top ends of the center platforms of the left limiting folding beam 41 and the right limiting folding beam 42 are respectively provided with a limiting support block 7, and the shape of the top ends of the limiting support blocks 7 is complementary with the shape of the explosion-proof limiting pins 61 and the explosion-conducting limiting pins 62, as shown by the dashed circles in fig. 1; the central platform of the Jie Bao folding beam 43 is fixedly connected with the bottom of the flameproof sliding block 2 through a driving rod 8; an electromagnetically folded beam for weak environmental forces may restore a MEMS security system to a secure state and a disarmed state.
In the embodiment, silicon is adopted as the material of the base plate 1 and the flameproof slider 2; the thickness of the substrate 1 is 500 mu m, the thickness of the flameproof slide block 2 is 400 mu m, the length, the width and the height of the permanent magnet are 400 mu m, 50 mu m and 300 mu m respectively, and the magnetic induction intensity of the permanent magnet is 0.2T; the total length of the left side limit folding beam 41, the right side limit folding beam 42 and the nonconformal folding beam 43 is 400 μm, the width of the center platform is 80 μm, and the shape of the bending beam is rectangular wave. As shown in fig. 5, the left side limit folding beam 41, the right side limit folding beam 42 and the nonconformal folding beam 43 are made of the same material, the lower layer is silicon 44, and conductive metal 45 is formed by sputtering on the silicon.
The control method of the electromagnetic folding beam recoverable MEMS safety system for weak environmental force of the embodiment comprises the following steps:
1) In a safe state, the explosion transfer hole 21 is staggered with the MEMS exploder, and the top end of the limiting support block 7 connecting the left limiting folding beam 41 and the right limiting folding beam 42 is positioned in the explosion-proof limiting pin 61, as shown in fig. 2;
2) After ammunition is launched, after a set time, the micro-control chip electrifies the left and right limit folding beams 41 and 42, the left and right limit folding beams 41 and 42 have current, the current intensity is 0.5A, ampere force is generated under the action of a magnetic field, the direction of the ampere force generated by the left and right permanent magnets and the direction of the current flowing through the left and right limit folding beams 41 and 42 are set, and the directions of the ampere force generated by the left and right limit folding beams 41 and 42 are controlled to be respectively directed to the left and right, so that the corresponding limit supporting blocks 7 are respectively pulled to be separated from the explosion-proof limit pins 61;
3) The micro control chip is used for electrifies the unfolding and folding beam 43, the unfolding and folding beam 43 has current with the current intensity of 2A, ampere force is generated under the action of a magnetic field, the direction of the ampere force generated by the unfolding and folding beam 43 is controlled to be downward by setting the direction of the magnetic induction intensity generated by the lower permanent magnet and the direction of the current passing through the unfolding and folding beam 43, so that the explosion-proof slider 2 is pulled to move downwards by the driving rod 8, and the explosion-transmitting hole 21 is aligned with the MEMS initiator as shown in figure 3;
4) The micro-control chip cuts off the power of the left and right limit folding beams 41 and 42, and the left and right limit folding beams 41 and 42 are restored to the initial positions under the action of the restoring force of the bending beams, so that the corresponding limit supporting blocks 7 are respectively pushed to be inserted into the corresponding explosion-propagation limit pins 62, and the explosion-propagation limit pins enter a releasing state, so that the safety releasing is realized as shown in fig. 4;
5) After the safety protection, according to whether the detonation is needed, the method is divided into the following two cases:
a) When the ammunition needs to be detonated, the micro-control chip is used for powering on the MEMS exploder, the MEMS exploder is used for explosion, the next-stage charge is detonated, and the ammunition finishes the damage function;
b) When the digestion protection state is needed, the micro-control chip is electrified for the left and right limiting folding beams 41 and 42, and the left and right limiting folding beams 41 and 42 respectively generate ampere force pointing to the left and right, so that the corresponding limiting support blocks 7 are respectively pulled to be separated from the explosion transmission limiting pins 62; then the micro control chip cuts off the power of the unfolding folding beam 43, the Jie Baoshe folding beam 43 is restored to the initial position under the action of the restoring force of the bending beam, and the explosion-proof slider 2 is pushed to move upwards by the driving rod 8, so that the explosion-transmitting hole 21 and the MEMS exploder are misplaced; the micro-control chip cuts off the power of the left and right limit folding beams 41 and 42, and the left and right limit folding beams 41 and 42 are restored to the initial positions under the action of the restoring force of the bending beams, so that the corresponding limit supporting blocks 7 are respectively pushed to be inserted into the corresponding explosion-proof limit pins 61, and the safety state is again entered, and the restorable function is realized.
Finally, it should be noted that the examples are disclosed for the purpose of aiding in the further understanding of the present invention, but those skilled in the art will appreciate that: various alternatives and modifications are possible without departing from the spirit and scope of the invention and the appended claims. Therefore, the invention should not be limited to the disclosed embodiments, but rather the scope of the invention is defined by the appended claims.

Claims (10)

1. An electromagnetic folding beam recoverable MEMS safety system for weak environmental forces for recoverable disallowing of ammunition under weak environmental forces, the ammunition comprising a micro-control chip, a MEMS initiator and a next stage charge, the MEMS initiator being aligned with the next stage charge, the MEMS initiator being connected to the micro-control chip, the electromagnetic folding beam recoverable MEMS safety system being located between the MEMS initiator and the next stage charge with a surface perpendicular to an axis direction of the bullet, the electromagnetic folding beam recoverable MEMS safety system comprising: the explosion-proof device comprises a base plate, an explosion-proof sliding block, an explosion-transmitting hole, a left permanent magnet, a right permanent magnet, a lower permanent magnet, a left limit folding beam, a right limit folding beam, an explosion-proof folding beam, an electrode, an explosion-proof limiting pin, an explosion-transmitting limiting pin, a limiting supporting block and a driving rod; wherein the substrate is a flat plate, and the surface of the substrate is perpendicular to the spring axis direction; the center of the base plate is provided with an explosion-proof slide block mounting hole which penetrates through the upper surface and the lower surface of the base plate; the explosion-proof sliding block is positioned in the explosion-proof sliding block mounting hole, and the distance between the bottom end of the explosion-proof sliding block and the bottom end of the explosion-proof sliding block mounting hole is not smaller than the horizontal projection distance between the explosion-transmitting hole and the MEMS initiator in a safe state; the explosion-proof sliding block is provided with an explosion-propagation hole penetrating through the explosion-proof sliding block, and the explosion-propagation hole is dislocated with the MEMS exploder in a safe state; magnet mounting grooves are respectively formed in the left side, the right side and the lower side of the upper surface of the base plate and are positioned in the explosion-proof slider mounting holes, a left permanent magnet and a right permanent magnet are respectively arranged in the magnet mounting grooves in the left side and the right side, and a lower permanent magnet is arranged in the magnet mounting groove in the lower side; the magnetic induction intensity directions of the left permanent magnet, the right permanent magnet and the lower permanent magnet are parallel to the spring shaft; the lower surface of the base plate corresponds to the magnet mounting grooves on the left side, the right side and the lower side respectively, support beam mounting grooves are respectively formed in the base plate, a left limit folding beam and a right limit folding beam are respectively formed in the support beam mounting grooves on the left side and the right side, and an unfolding folding beam is arranged in the support beam mounting groove on the lower side; electrodes are respectively arranged on the lower surface of the base plate and on the two sides of the support beam mounting grooves on the left side, the right side and the left side of the support beam mounting groove, and the two ends of the left side limiting folding beam, the right side limiting folding beam and the nonconformal folding beam are respectively fixed and electrically connected to the corresponding electrodes and electrically connected to micro control chips of ammunition through the corresponding electrodes to form a closed loop; the left limit folding beam, the right limit folding beam and the nonconformal folding beam are all positioned in the same plane vertical to the spring shaft and are all made of conductive metal, the conducting metal comprises a center platform and bending beams which are respectively connected with the center platform and positioned at two sides, the center platform is in an axisymmetric graph about the spring shaft direction, and the tail ends of the bending beams are connected to corresponding electrodes; the left side edge and the right side edge of the explosion-proof sliding block are respectively provided with an explosion-proof limiting pin and an explosion-propagation limiting pin, and the distance between the explosion-proof limiting pins and the explosion-propagation limiting pins is equal to the horizontal projection distance between the explosion-propagation hole and the MEMS exploder in a safe state; the top ends of the center platforms of the left limiting folding beam and the right limiting folding beam are respectively provided with a limiting supporting block, and the shape of the top ends of the limiting supporting blocks is complementary with the shape of the explosion-proof limiting pin and the explosion-propagation limiting pin; the center platform of the unfolding folding beam is fixedly connected with the bottom of the explosion-proof sliding block through a driving rod; the electromagnetic folding beam can restore the MEMS safety system to have a safety state and a disarming state; in a safe state, the explosion transfer hole is staggered with the MEMS exploder, and the top ends of the limiting support blocks connecting the left limiting folding beam and the right limiting folding beam are respectively positioned in the corresponding explosion-proof limiting pins; after ammunition is launched, after a set time, the micro-control chip electrifies the left and right limit folding beams, the left and right limit folding beams are provided with current, ampere force is generated under the action of a magnetic field, and the directions of the ampere force generated by the left and right limit folding beams are controlled to be respectively directed to the left and right by respectively setting the magnetic induction intensity directions generated by the left and right permanent magnets and the current directions flowing through the left and right limit folding beams, so that corresponding limit supporting blocks are respectively pulled to separate from explosion-proof limiting pins; then the micro control chip is an unfolding folded Liang Tongdian, the unfolding folded beam is provided with current, ampere force is generated under the action of a magnetic field, the direction of the ampere force generated by the unfolding folded beam is controlled to be downward by setting the direction of magnetic induction intensity generated by the lower permanent magnet and the direction of the current passing through the unfolding folded beam, and therefore the explosion-proof sliding block is pulled to move downward by the driving rod, and the explosion-proof hole is aligned with the MEMS exploder; the micro control chip cuts off the power of the left and right limit folding beams, and the left and right limit folding beams are restored to the initial positions under the action of the restoring force of the bending beams, so that the corresponding limit supporting blocks are respectively pushed to be inserted into the corresponding explosion-propagation limiting pins to enter a protection releasing state, and the safety protection releasing is realized; when the ammunition needs to be detonated, the micro-control chip is electrified to the MEMS exploder, the MEMS exploder generates electric explosion, the next-stage charge is detonated, and the ammunition finishes the damage function; when the digestion protection state is needed to be taken, the micro-control chip is electrified for the left and right limiting folding beams, and the left and right limiting folding beams respectively generate ampere force pointing to the left and right, so that the corresponding limiting support blocks are respectively pulled to separate from the explosion transmission limiting pins; then the micro control chip restores the unfolding and folding Liang Duandian and Jie Bao folding beams to the initial positions under the action of the restoring force of the bending beams, and pushes the explosion-proof sliding blocks to move upwards through the driving rods, so that the explosion-proof holes are staggered with the MEMS detonators; the micro-control chip cuts off the power of the left and right limit folding beams, and the left and right limit folding beams recover to the initial positions under the action of the restoring force of the bending beams, so that the corresponding limit supporting blocks are respectively pushed to be inserted into the corresponding explosion-proof limit pins, and the explosion-proof limit pins enter a safe state again, thereby realizing the recoverable function.
2. The electromagnetic fold beam recoverable MEMS security system of claim 1, wherein the substrate and flameproof slider are of silicon-based material.
3. The electromagnetic fold beam recoverable MEMS security system of claim 1, wherein the substrate has a thickness of 450 to 550 μm and the flameproof slider has a thickness of 380 to 420 μm.
4. The electromagnetic fold beam recoverable MEMS security system of claim 1, wherein the permanent magnets have a length, width and height of 380 to 420 μm, 40 to 60 μm and 280 to 320 μm, respectively, and a magnetic induction of 0.1 to 0.4T.
5. The electromagnetic fold beam recoverable MEMS security system of claim 1, wherein the lower layers of the left side, right side, and the unfolding beam are silicon, and a conductive metal is sputtered on the silicon.
6. The electromagnetic fold beam recoverable MEMS security system of claim 1, wherein the curved beam is one of rectangular, sine, triangular, trapezoidal, saw tooth, and square wave in shape.
7. A control method for a weak ambient force electromagnetic folding beam recoverable MEMS security system according to claim 1, wherein said control method comprises the steps of:
1) In a safe state, the explosion transfer hole is staggered with the MEMS exploder, and the top ends of the limiting support blocks connecting the left limiting folding beam and the right limiting folding beam are positioned in the explosion-proof limiting pins;
2) After ammunition is launched, after a set time, the micro-control chip electrifies the left and right limit folding beams, the left and right limit folding beams are provided with current, ampere force is generated under the action of a magnetic field, and the directions of the ampere force generated by the left and right limit folding beams are controlled to be respectively directed to the left and right by setting the directions of magnetic induction intensity generated by the left and right permanent magnets and the directions of the current flowing through the left and right limit folding beams, so that corresponding limit supporting blocks are respectively pulled to separate from explosion-proof limiting pins;
3) The micro control chip is an unfolding folded Liang Tongdian, the unfolding folded beam is provided with current, ampere force is generated under the action of a magnetic field, the direction of the ampere force generated by the unfolding folded beam is controlled to be downward by setting the direction of magnetic induction intensity generated by the lower permanent magnet and the direction of the current passing through the unfolding folded beam, and therefore the explosion-proof sliding block is pulled to move downward by the driving rod, and the explosion-proof hole is aligned with the MEMS exploder;
4) The micro control chip cuts off the power of the left and right limit folding beams, and the left and right limit folding beams are restored to the initial positions under the action of the restoring force of the bending beams, so that the corresponding limit supporting blocks are respectively pushed to be inserted into the corresponding explosion-propagation limiting pins to enter a protection releasing state, and the safety protection releasing is realized;
5) After the safety protection, according to whether the detonation is needed, the method is divided into the following two cases:
a) When the ammunition needs to be detonated, the micro-control chip is used for powering on the MEMS exploder, the MEMS exploder is used for explosion, the next-stage charge is detonated, and the ammunition finishes the damage function;
b) When the digestion protection state is needed to be taken, the micro-control chip is electrified for the left and right limiting folding beams, and the left and right limiting folding beams respectively generate ampere force pointing to the left and right, so that the corresponding limiting support blocks are respectively pulled to separate from the explosion transmission limiting pins; then the micro control chip restores the unfolding and folding Liang Duandian and Jie Bao folding beams to the initial positions under the action of the restoring force of the bending beams, and pushes the explosion-proof sliding blocks to move upwards through the driving rods, so that the explosion-proof holes are staggered with the MEMS detonators; the micro-control chip cuts off the power of the left and right limit folding beams, and the left and right limit folding beams recover to the initial positions under the action of the restoring force of the bending beams, so that the corresponding limit supporting blocks are respectively pushed to be inserted into the corresponding explosion-proof limit pins, and the explosion-proof limit pins enter a safe state again, thereby realizing the recoverable function.
8. The control method according to claim 7, wherein in step 2), after a lapse of a set period of 5 to 10 seconds after the ammunition is fired, the micro control chip energizes the left and right side restraining folding beams.
9. The control method according to claim 7, wherein the magnetic induction intensity of the permanent magnet is 0.1 to 0.4T; the current passing through the left limit folding beam and the right limit folding beam is 0.2-0.5A.
10. The control method according to claim 7, wherein in step 3), the current through the unstacked folding beam is 1.6 to 2A.
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