CN115672850B - Cleaning device of gas injector for semiconductor etching equipment - Google Patents
Cleaning device of gas injector for semiconductor etching equipment Download PDFInfo
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- CN115672850B CN115672850B CN202310010381.0A CN202310010381A CN115672850B CN 115672850 B CN115672850 B CN 115672850B CN 202310010381 A CN202310010381 A CN 202310010381A CN 115672850 B CN115672850 B CN 115672850B
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Abstract
The invention discloses a cleaning device of a gas ejector for semiconductor etching equipment, which comprises a liquid storage tank, a flushing tank positioned above the liquid storage tank, a leakage tank positioned below the liquid storage tank and the flushing tank, a liquid outlet tank positioned in the flushing tank, a flow dividing pipe, a ball valve, a clamp, a water pump positioned in the leakage tank and a filter, wherein the ball valve is arranged on the flushing tank; the inlet end of the liquid storage tank is communicated with the inlet end of the water pump, the outlet end of the water pump is communicated with the inlet end of the filter, the outlet end of the filter is communicated with the inlet end of the liquid outlet tank, the inlet end of the flow dividing pipe is communicated with one side of the liquid outlet tank, which is far away from the inlet end of the liquid outlet tank, the outlet end of the flow dividing pipe is fixedly provided with a ball valve, a gas ejector is fixedly arranged inside the clamp, the clamp is fixedly positioned at the outlet end of the ball valve, and the outlet end of the flushing tank is communicated with the liquid storage tank. The invention has the advantages of convenient installation, control of the cleaning water flow speed, simultaneous cleaning of a plurality of gas ejectors, low energy consumption and flushing of the first hole and the second hole of the gas ejectors.
Description
Technical Field
The invention relates to the field of cleaning of precision parts, in particular to a gas ejector cleaning device for semiconductor etching equipment.
Background
Currently, chinese patent with the granted publication number "CN1207761C" discloses a gas injector comprising: a block of ceramic material having a first cylindrical portion and a second cylindrical portion extending from the first cylindrical portion, the second cylindrical portion having an outer diameter less than the outer diameter of the first cylindrical portion, the second cylindrical portion having a length less than the length of the first cylindrical portion; and a gas injection section including a plurality of first holes extending through the first cylindrical portion of the block of ceramic material and a plurality of second holes extending through the second cylindrical portion of the block of ceramic material, the second holes having a diameter smaller than the diameter of the first holes and an axial length smaller than the axial length of the first holes, each of the second holes protruding from a corresponding one of the first holes and being concentric with the first hole, wherein the gas injector is one of a plurality of gas injectors disposed at an upper portion of the process chamber, the plurality of gas injectors being spaced apart from each other for injecting an etching gas into the process chamber to etch a film on the substrate, the first holes and the second holes extending parallel to the axial directions of the first cylindrical portion and the second cylindrical portion.
When the ceramic material block is processed, partial broken slag is contained in the first hole and the second hole of the ceramic material block, and the inner walls of the first hole and the second hole are not smooth, so that before the semiconductor etching equipment is used, a processed gas ejector is firstly washed with the chemical, the purpose of removing the broken slag and enabling the inner walls of the first hole and the second hole to be smooth is achieved, the pollution of tiny particles to a wafer manufacturing process is reduced, and the effect of accurately controlling the gas flow of the semiconductor etching equipment is achieved.
The cleaning of the existing gas ejector is to put the gas ejector into the cleaning pool for soaking, the gas ejector is cleaned by utilizing the liquid medicine in the cleaning pool to match with the ultrasonic cleaner, then, the liquid medicine in the cleaning pool is subjected to circulating filtration, but when the gas ejector is placed in the cleaning pool, the fragments in the first hole and the second hole can only be removed by soaking and the ultrasonic cleaner, the first hole and the second hole cannot be washed, moreover, the gas ejector is cleaned while the liquid medicine is subjected to circulating filtration, further, the inner wall of the first hole and the inner wall of the second hole cannot be ensured to be smooth, and the using effect of the gas ejector is finally influenced.
Disclosure of Invention
The invention aims to provide a gas ejector cleaning device for semiconductor etching equipment, which has the advantages of convenience in installation, control of cleaning water flow speed, simultaneous cleaning of a plurality of gas ejectors, low energy consumption, and capability of scouring of a first hole and a second hole of each gas ejector to reach the particle number of more than 0.2 micrometer and less than 1000 particles per square centimeter, so that the gas ejectors meet the particle control requirement of a 5nm chip process.
The technical purpose of the invention is realized by the following technical scheme:
the cleaning device for the gas ejector for the semiconductor etching equipment comprises a liquid storage tank, a flushing tank positioned above the liquid storage tank, a leakage tank positioned below the liquid storage tank and the flushing tank, a liquid outlet tank positioned in the flushing tank, a flow dividing pipe, a ball valve, a clamp, a water pump positioned in the leakage tank and a filter;
the liquid storage tank is communicated with an inlet end of a water pump, an outlet end of the water pump is communicated with an inlet end of a filter, an outlet end of the filter is communicated with an inlet end of a liquid outlet tank, an inlet end of a flow dividing pipe is communicated with one side of the liquid outlet tank, which is far away from the inlet end of the liquid outlet tank, a ball valve is fixedly arranged at an outlet end of the flow dividing pipe, a gas ejector is fixedly arranged in the clamp, the clamp is fixedly positioned at the outlet end of the ball valve, and an outlet end of the flushing tank is communicated with the liquid storage tank;
anchor clamps are including being cylindric first mounting, second mounting and third mounting, the external diameter of second mounting is unanimous with the external diameter of third mounting, the exit end fixed connection of third mounting one end and ball valve, the gas injector is fixed to be located inside the second mounting, the inside of the first mounting that the second mounting is located, first mounting and third mounting fixed connection, the third mounting is kept away from the one end and the second mounting counterbalance of ball valve exit end.
The preferred scheme is as follows:
preferably: and a connecting pipe is fixedly arranged at the outlet end of the ball valve and is fixedly connected with the third fixing piece.
Through adopting above-mentioned technical scheme, anchor clamps and ball valve direct contact can be avoided to the connecting pipe, and then make things convenient for the dismantlement and the change of anchor clamps.
Preferably: the third fixing piece is provided with a first threaded through hole along the axial direction, the outlet end of the connecting pipe is provided with a first external thread, and the third fixing piece is in threaded connection with the outlet end of the connecting pipe.
Through adopting above-mentioned technical scheme, carry out threaded connection through the first screw thread perforation of third mounting and the first external screw thread of connecting pipe, can conveniently dismantle the third mounting.
Preferably, the following components: the first fixing piece is provided with a first circular through hole along the axial direction, one end, close to the connecting pipe, of the first fixing piece is provided with a first circular placing groove, the first circular placing groove and the first circular through hole are concentric, the first circular placing groove and the first circular through hole form a ladder, the second fixing piece is in clearance fit insertion connection with the first circular placing groove, a first internal thread is formed inside the first circular placing groove, the outer side wall of the third fixing piece is provided with a second external thread, and the first fixing piece is in threaded connection with the third fixing piece.
Through adopting above-mentioned technical scheme, place the second mounting in the first circular standing groove of first mounting, through first mounting and third mounting threaded connection, the one end that the third mounting is close to the second mounting offsets with the second mounting, and then fixes the second mounting.
Preferably, the following components: the second fixing piece is provided with a second circular through hole along the axial direction, one end, close to the third fixing piece, of the second fixing piece is provided with a second circular placing groove, and the gas ejector is inserted into the second circular placing groove in a clearance fit mode.
Through adopting above-mentioned technical scheme, place the gas sprayer with the circular standing groove of second mounting in, when the third mounting offseted with the second mounting, the gas sprayer is supported equally to the third mounting, reaches fixed gas sprayer's effect.
Preferably, the following components: the fixed cover in one side that third mounting was kept away from to first mounting lateral wall is equipped with three cyclic annular stopper, the lateral wall joint of first mounting has three limiting plate, and is three limiting plate and flushing tank fixed connection, every the semi-circular draw-in groove unanimous with the external diameter of first mounting is all seted up to the limiting plate.
Through adopting above-mentioned technical scheme, through three limiting plate and three cyclic annular stopper fixed connection, can conveniently carry on spacingly to anchor clamps, and then prevent at the during operation that anchor clamps produce because of rivers and rock.
Preferably: and a hexagonal rotating block is fixedly sleeved on one side, far away from the first fixing part, of the outer side wall of the third fixing part.
Through adopting above-mentioned technical scheme, through the rotatory piece of hexagon, can conveniently rotate the third mounting reach with first mounting threaded connection, through the rotatory piece of hexagon afterwards, can conveniently rotate the third mounting reach with connecting pipe threaded connection's effect.
In conclusion, the invention has the following beneficial effects:
1. through the arrangement of the liquid outlet box, the flow dividing pipes, the ball valves and the clamps which are positioned in the flushing box, a plurality of flow dividing pipes can be arranged on the liquid storage box, each flow dividing pipe can be provided with a ball valve, each ball valve can be fixedly connected with one clamp, a plurality of gas ejectors can work together, and the effects of saving time and cost are achieved;
2. through the arrangement of the liquid storage tank, the flushing tank, the water pump and the filter, the water pump pumps out the liquid medicine in the liquid storage tank, the liquid medicine passes through the filter and enters the flushing tank, the flushing tank is positioned above the liquid storage tank, and the liquid medicine in the flushing tank flows into the liquid storage tank through gravity, so that the effects of long working time and low energy consumption can be achieved;
3. through the setting of leakage case, can play and catch the liquid medicine that drips from liquid reserve tank, flush tank, prevent the effect on liquid medicine corruption ground.
Drawings
FIG. 1 is a front side view of the overall structural configuration of the embodiment;
FIG. 2 is a partial sectional view of a front side view of the overall structural shape of the embodiment;
FIG. 3 is a partial cross-sectional view of a clamp of an embodiment;
fig. 4 is a schematic structural view of the square moving block according to the embodiment.
In the figure, 1, a liquid storage tank; 2. a flushing tank; 3. a leakage box; 4. a liquid outlet box; 5. a shunt tube; 6. a ball valve; 7. a clamp; 8. a water pump; 9. a filter; 10. a gas injector; 11. a first fixing member; 12. a second fixing member; 13. a third fixing member; 14. a connecting pipe; 15. an annular stop block; 16. a limiting plate; 17. a hexagonal rotating block; 18. a support; 19. a first conduit; 20. a second conduit; 21. a third pipeline; 22. a fourth conduit; 23. a fifth pipeline; 24. a sixth pipeline; 25. a valve; 26. braking the universal wheel; 27. a square moving block; 28. a support block; 29. a U-shaped block.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
In which like parts are designated by like reference numerals. It should be noted that the words "front", "rear", "left", "right", "upper" and "lower" used in the following description refer to directions in the drawings.
A cleaning device of a gas injector for semiconductor etching equipment is disclosed, as shown in figure 1, figure 2 and figure 3, and comprises a support 18 with an L-shaped vertical section, wherein a liquid storage tank 1, a flushing tank 2 positioned above the left side of the liquid storage tank 1, a leakage tank 3 positioned below the liquid storage tank 1 and the flushing tank 2, a liquid outlet tank 4 positioned inside the flushing tank 2, a flow dividing pipe 5, a ball valve 6, a clamp 7, a water pump 8 positioned inside the leakage tank 3 and a filter 9 are respectively fixedly arranged on the support 18.
The inlet ends of the liquid storage tank 1 and the water pump 8 are communicated through a first pipeline 19, the outlet end of the water pump 8 is communicated with the inlet end of the filter 9 through a second pipeline 20, the outlet end of the filter 9 is communicated with the left inlet end of the liquid outlet tank 4 through a third pipeline 21, the liquid outlet tank 4 is fixedly arranged on the left side of the interior of the flushing tank 2, the inlet end of the shunt pipe 5 is communicated with one side, away from the inlet end of the liquid outlet tank 4, namely the inlet end of the shunt pipe 5 is fixedly arranged on the right side of the liquid storage tank 1, the outlet end of the shunt pipe 5 is fixedly provided with the ball valve 6, the clamp 7 is fixedly provided with the gas injector 10, the clamp 7 is fixedly arranged on the outlet end of the ball valve 6, in order to facilitate the disassembly and replacement of the clamp 7, a connecting pipe 14 is fixedly arranged at the outlet end of the ball valve 6, the connecting pipe 14 is fixedly connected with the clamp 7, and the outlet end of the flushing tank 2 is communicated with the liquid storage tank 1 through a fourth pipeline 22.
Be equipped with the leakage fluid dram in 1 bottom of liquid reserve tank, in order to prevent leakage, this leakage fluid dram is located leakage tank 3's top, this drainage port department is equipped with that fifth pipeline 23 communicates the external world, fifth pipeline 23 runs through the lateral wall of leakage tank 3's one side, can guarantee that liquid medicine drips in leakage tank 3, it is external to be equipped with sixth pipeline 24 intercommunication in leakage tank 3 bottom, a liquid medicine for discharging in the leakage tank 3, all fixed valve 25 that is equipped with on fifth pipeline 23 and sixth pipeline 24, prevent that liquid medicine from flowing out.
Because the washing quantity that needs increase gas sprayer 10, consequently be equipped with four shunt tubes 5 in the vertical array of one side of liquid tank 4 keeping away from the entrance point, the exit end of every shunt tube 5 all is fixed and is equipped with ball valve 6, and the exit end department of every ball valve 6 all is fixed and is equipped with connecting pipe 14, as required, is equipped with the anchor clamps 7 that are equipped with gas sprayer 10 in the fixed exit of four connecting pipes 14, opens ball valve 6, can wash gas sprayer 10 in anchor clamps 7.
The four corners of the bottom of the bracket 18 are fixedly provided with brake universal wheels 26 for moving the cleaning device, so that the liquid medicine needing to be replaced can be conveniently treated.
As shown in fig. 3, the fixture 7 includes a first fixing member 11, a second fixing member 12 and a third fixing member 13, which are cylindrical, an outer diameter of the second fixing member 12 is identical to an outer diameter of the third fixing member 13, one end of the third fixing member 13 is fixedly connected to an outlet end of the connecting pipe 14, the second fixing member 12 is located inside the first fixing member 11, the first fixing member 11 is fixedly connected to an outer sidewall of the third fixing member 13, and an end of the third fixing member 13, which is far away from the outlet end of the connecting pipe 14, abuts against the second fixing member 12.
The second circular perforation has been seted up along axial direction to second mounting 12, and the circular standing groove of second has been seted up to the one end that second mounting 12 is close to third mounting 13, and gas injector 10 clearance fit is pegged graft in the circular standing groove of second, in order to prevent to crush gas injector 10 and prevent that gas injector 10 from removing in the circular standing groove of second, gas injector 10 and the circular standing groove opening part of second looks parallel and level, and not parallel and level then this gas injector 10 need do over again.
First threaded through holes are formed in the third fixing piece 13 in the axial direction, the outlet end of the connecting pipe 14 is provided with first external threads, the third fixing piece 13 is in threaded connection with the outlet end of the connecting pipe 14, one side, close to the second fixing piece 12, of the third fixing piece 13 is provided with a yielding circular groove, the diameter of the yielding circular groove is 2mm smaller than that of the gas injector 10, it can be guaranteed that one side, close to the second fixing piece 12, of the third fixing piece 13 can support the gas injector 10, the threaded length of the first threaded through holes is consistent with that of the first external threads, it can be guaranteed that the third fixing piece 13 cannot rotate after rotating to a certain position, a gap formed by the yielding circular groove is formed between the connecting pipe 14 and the gas injector 10, and liquid medicine can conveniently pass through all first holes and all second holes of the gas injector 10.
First circular perforation has been seted up along the axial to first mounting 11, first circular perforated diameter is unanimous with the internal diameter of connecting pipe 14, can make things convenient for liquid medicine to discharge, wherein the circular perforated diameter of second mounting 12 is two-thirds of the first circular perforated diameter of first mounting 11, when can't take out after wasing, usable instrument passes first circular perforation and promotes second mounting 12, first circular standing groove has been seted up to one end that first mounting 11 is close to connecting pipe 14, first circular standing groove and first circular perforation are concentric, first circular standing groove and first circular perforation form the ladder, second mounting 12 clearance fit is pegged graft in first circular standing groove, second mounting 12 accounts for two fifths of first circular standing groove, first internal thread has been seted up to first circular standing groove inside, first internal thread accounts for two-thirds of first circular standing groove, third external screw thread 13 is equipped with the second external screw thread, the thread length of second external screw thread is 1.3 times of first internal thread length, first mounting 11 and third mounting 13 threaded connection mounting, can make things convenient for third external screw thread 12 withstands.
The fixed cover of one side that first mounting 11 was kept away from to the lateral wall of third mounting 13 is equipped with the rotatory piece 17 of hexagon, through the rotatory piece 17 of hexagon, can conveniently rotate third mounting 13 and reach with first mounting 11 threaded connection, through the rotatory piece 17 of hexagon, can conveniently rotate third mounting 13 afterwards and reach the effect with connecting pipe 14 threaded connection.
As shown in fig. 3 and 4, one side of the outer side wall of the first fixing member 11, which is far away from the third fixing member 13, is fixedly sleeved with three annular limiting blocks 15, three limiting plates 16 are clamped to the side walls of the four first fixing members 11, the three limiting plates 16 are all fixedly located at the bottoms of the four first fixing members 11, the three limiting plates 16 are respectively clamped to the three annular limiting blocks 15, each limiting plate 16 is provided with a semicircular clamping groove having the same outer diameter as that of the first fixing member 11, the three limiting plates 16 are fixedly connected to the flushing tank 2, in order to facilitate fixing of the three limiting plates 16 to the flushing tank 2, a square moving block 27 is slidably arranged at the bottom of the three limiting plates 16, a plurality of third circular through holes are formed in the top of the square moving block 27, supporting blocks 28 are arranged at four corners of the bottom of the square moving block 27, a U-shaped block 29 having an opening facing the fixture 7 is arranged at the top of the square moving block 27, after the three limiting plates 16 are clamped to the four first fixing members 11, the square moving block 27 is pushed, so that the three limiting plates 16 are clamped to the square through the circular through holes, and the bottom of the square moving block 27 abuts against the top of the fixture 7, so that liquid medicine can not enter the fixture 7 when the fixture 7, and the fixture can flow into the circular through hole, and the fixture 2.
Wherein the liquid medicine used by the cleaning device is HNO with the concentration of 68 percent 3 It is mixed with water according to the proportion of 3:7 for use, wherein the filter 9 is a 1 μm filter 9, and the filter 9 is cleaned and replaced every two months.
The specific implementation process comprises the following steps:
the method comprises the following steps: liquid medicine is put into the liquid storage tank 1, and the water pump 8 is not in a working state at the moment;
step two: respectively placing the four gas injectors 10 into second circular placing grooves of the four second fixing pieces 12, wherein the gas injectors 10 and the second fixing pieces 12 are coaxially placed, and the gas injectors 10 are flush with openings of the second circular placing grooves;
step three: placing four second fixing pieces 12 in the first circular placing grooves of the four first fixing pieces 11, wherein the second fixing pieces 12 are placed coaxially with the first fixing pieces 11;
step four: the four third fixing pieces 13 are respectively in threaded connection with the four first fixing pieces 11, the hexagonal rotating block 17 of the third fixing piece 13 is rotated, one side, far away from the hexagonal rotating block 17, of the third fixing piece 13 is abutted against the gas injector 10 and the opening of the second circular placement groove, and the effect of fixing the gas injector 10 and the second fixing piece 12 is achieved;
step five: one sides of the four third fixing pieces 13 close to the hexagonal rotating blocks 17 are respectively in threaded connection with the four connecting pipes 14, the hexagonal rotating blocks 17 of the third fixing pieces 13 are rotated, and when the third fixing pieces 13 cannot rotate, the fixture 7 and the connecting pipes 14 are installed;
step six: the three limiting plates 16 are respectively inserted into the bottoms of the four clamps 7, the square moving block 27 is movably clamped into the bottoms of the three limiting plates 16 at the bottom of the washing box 2, the three limiting plates 16 are clamped in the U-shaped block 29, and the bottoms of the three limiting plates 16 are abutted against the top of the square moving block 27;
step seven: the water pump 8 starts to work, liquid medicine in the liquid storage tank 1 is pumped, passes through the filter 9 and is sent into the liquid outlet tank 4;
step eight: opening the ball valve 6, enabling the liquid medicine to flow into the four clamps 7 through the four shunt pipes 5 respectively, cleaning the four gas injectors 10 respectively, enabling the liquid medicine to flow into the flushing tank 2 through the first circular through hole, and enabling the flushing tank 2 to flow the liquid medicine into the liquid storage tank 1 through the fourth pipeline 22;
step nine: the ball valve 6 is in a normally open state, the step six and the step seven are circulated, the ball valve 6 and the water pump 8 are closed after cleaning for two hours;
step ten: sliding to take out the square moving block 27, pulling out the three limiting plates 16, respectively rotating the hexagonal rotating blocks 17 of the four third fixing pieces 13, taking out the clamp 7, respectively rotating out the third fixing pieces 13, taking out the second fixing pieces 12, and then taking out the gas injector 10;
step eleven: and circulating the step two to the step ten.
The present embodiment is only for explaining the present invention, and it is not limited to the present invention, and those skilled in the art can make modifications without inventive contribution to the present embodiment as required after reading the present specification, but all of them are protected by patent law within the scope of the present invention.
Claims (7)
1. Cleaning device of gas injector for semiconductor etching equipment, its characterized in that: comprises a liquid storage tank (1), a flushing tank (2) positioned above the liquid storage tank (1), a leakage tank (3) positioned below the liquid storage tank (1) and the flushing tank (2), a liquid outlet tank (4) positioned inside the flushing tank (2), a flow dividing pipe (5), a ball valve (6), a clamp (7), a water pump (8) positioned inside the leakage tank (3) and a filter (9);
the liquid storage tank (1) is communicated with an inlet end of a water pump (8), an outlet end of the water pump (8) is communicated with an inlet end of a filter (9), an outlet end of the filter (9) is communicated with an inlet end of a liquid outlet tank (4), an inlet end of a shunt pipe (5) is communicated with one side, away from the inlet end of the liquid outlet tank (4), a ball valve (6) is fixedly arranged at the outlet end of the shunt pipe (5), a gas ejector (10) is fixedly arranged inside a clamp (7), the clamp (7) is fixedly positioned at the outlet end of the ball valve (6), and an outlet end of a flushing tank (2) is communicated with the liquid storage tank (1);
anchor clamps (7) are including being cylindric first mounting (11), second mounting (12) and third mounting (13), the external diameter of second mounting (12) is unanimous with the external diameter of third mounting (13), the exit end fixed connection of third mounting (13) one end and ball valve (6), gas injector (10) is fixed to be located inside second mounting (12), the inside of first mounting (11) that second mounting (12) are located, first mounting (11) and third mounting (13) fixed connection, the one end that ball valve (6) exit end was kept away from in third mounting (13) offsets with second mounting (12).
2. The cleaning apparatus for a gas injector for semiconductor etching equipment as recited in claim 1, wherein: and a connecting pipe (14) is fixedly arranged at the outlet end of the ball valve (6), and the connecting pipe (14) is fixedly connected with a third fixing piece (13).
3. The cleaning apparatus for a gas ejector for a semiconductor etching apparatus as recited in claim 2, wherein: a first threaded through hole is formed in the third fixing piece (13) in the axial direction, a first external thread is arranged at the outlet end of the connecting pipe (14), and the third fixing piece (13) is in threaded connection with the outlet end of the connecting pipe (14).
4. The cleaning apparatus for a gas injector for semiconductor etching equipment as recited in claim 3, wherein: the connecting pipe is characterized in that a first circular through hole is formed in the first fixing piece (11) in the axial direction, a first circular placing groove is formed in one end, close to the connecting pipe (14), of the first fixing piece (11), the first circular placing groove and the first circular through hole are concentric, the first circular placing groove and the first circular through hole form a ladder, the second fixing piece (12) is inserted into the first circular placing groove in a clearance fit mode, a first internal thread is formed in the first circular placing groove, a second external thread is arranged on the outer side wall of the third fixing piece (13), and the first fixing piece (11) is in threaded connection with the third fixing piece (13).
5. The cleaning apparatus for a gas ejector for a semiconductor etching apparatus as recited in claim 4, wherein: the second fixing piece (12) is provided with a second circular through hole along the axial direction, one end, close to the third fixing piece (13), of the second fixing piece (12) is provided with a second circular placing groove, and the gas ejector (10) is inserted into the second circular placing groove in a clearance fit mode.
6. The cleaning apparatus for a gas ejector for a semiconductor etching apparatus as recited in claim 5, wherein: the fixed cover in one side that third mounting (13) was kept away from to first mounting (11) lateral wall is equipped with three cyclic annular stopper (15), the lateral wall joint of first mounting (11) has three limiting plate (16), and is three limiting plate (16) and flushing tank (2) fixed connection, every semicircular clamping groove unanimous with the external diameter of first mounting (11) is all seted up in limiting plate (16).
7. The cleaning apparatus for a gas ejector for a semiconductor etching apparatus as recited in claim 6, wherein: and a hexagonal rotating block (17) is fixedly sleeved on one side, far away from the first fixing part (11), of the outer side wall of the third fixing part (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310010381.0A CN115672850B (en) | 2023-01-05 | 2023-01-05 | Cleaning device of gas injector for semiconductor etching equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310010381.0A CN115672850B (en) | 2023-01-05 | 2023-01-05 | Cleaning device of gas injector for semiconductor etching equipment |
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| Publication Number | Publication Date |
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| CN115672850A CN115672850A (en) | 2023-02-03 |
| CN115672850B true CN115672850B (en) | 2023-03-10 |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101100131A (en) * | 2006-07-06 | 2008-01-09 | 启道田心股份有限公司 | Ink-jetting printing machine blow head cleaning machine |
| CN113663965A (en) * | 2021-07-13 | 2021-11-19 | 特科能(株洲)科技有限公司 | Method for cleaning deep blind hole nozzle workpieces in batches |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6622941B2 (en) * | 2001-11-08 | 2003-09-23 | General Electric Company | Method and apparatus for cleaning jet pump nozzles |
| CN203370761U (en) * | 2013-07-12 | 2014-01-01 | 西安航空动力股份有限公司 | Nozzle cleaning device of aero-engine |
| CN217069939U (en) * | 2022-02-24 | 2022-07-29 | 中汽研汽车检验中心（天津）有限公司 | Device for cleaning carbon deposition of engine nozzle |
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- 2023-01-05 CN CN202310010381.0A patent/CN115672850B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101100131A (en) * | 2006-07-06 | 2008-01-09 | 启道田心股份有限公司 | Ink-jetting printing machine blow head cleaning machine |
| CN113663965A (en) * | 2021-07-13 | 2021-11-19 | 特科能(株洲)科技有限公司 | Method for cleaning deep blind hole nozzle workpieces in batches |
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| CN115672850A (en) | 2023-02-03 |
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