CN115653966A - Fluid actuator - Google Patents

Abstract

The invention relates to the technical field of fluid control, in particular to a fluid actuator which comprises a plurality of capacity-variable containing cavities, wherein the containing cavities are communicated through communicating cavities, the containing cavities and the communicating cavities jointly form a closed containing cavity, a fluid working medium is filled in the containing cavity, at least one of the containing cavities forms an actuating cavity, the rest containing cavities are execution cavities, actuating units are correspondingly arranged in the actuating cavities, and the actuating units are used for driving the actuating cavities to generate volume change so as to enable the fluid working medium to flow into or flow out of each execution cavity, so that the volume change of the execution cavities is controlled, the volume change of the containing cavities driven by fewer or even a single actuating unit can be realized according to a specific rule or a time sequence, and a preset actuating effect is further provided for fluid or parts outside the containing cavities.

Description

Fluid actuator

Technical Field

The invention relates to the technical field of fluid control, in particular to a fluid actuator.

Background

Along with the development of science and technology, the fluid control technology is increasingly showing a diversified development trend at the application end, the application of the initial industrial production, the biological medical treatment and the medical care products is gradually expanded to electronic heat dissipation, and the body shadow of the fluid control technology can be seen in the field of portable wearable equipment and even in the technical fields of VR, AR and MR at the current leading edge. Fluid actuators play an increasingly important role as key components of fluid control technology. The fluid actuator mostly utilizes the mutual influence and restriction of a plurality of factors such as the historical process of fluid unsteady flow, the phase difference of flow parameters in the time-space distribution and the like to realize flow control and improve flow characteristics.

An array type multi-point control fluid actuator is a typical structure of a fluid actuator or a fluid pump, and generally comprises a plurality of communicated cavities, and each cavity is provided with an actuating unit. For example, in a piezoelectric-driven array-type distributed control fluid actuator, an actuating unit is a piezoelectric vibrator, the vibration deformation of the piezoelectric vibrator causes the volume of a corresponding cavity to change, and in a closed flow control system, the excitation of each piezoelectric vibrator can be controlled according to requirements to control the corresponding cavity to change the volume, so that actuating force and displacement are output outwards; in an open flow control system, such as a peristaltic pump, by matching the timing sequence of the excitation of a plurality of piezoelectric vibrators, the corresponding timing sequence of the volume change of a plurality of pump cavities is caused, so that the continuous unidirectional pumping of fluid is realized. According to the structure form described in U.S. Pat. No. 20020184907A1 MEMS HEAT PUMP FOR INTEGRATED CICUIT HEAT DISSIPATION, cavities and connecting channels between the cavities are constructed on an INTEGRATED CIRCUIT board, each cavity is covered with a piezoelectric vibrator, and a HEAT DISSIPATION medium in a HEAT DISSIPATION flow channel is directly driven to circularly flow through the continuous time sequence vibration of the multi-cavity piezoelectric vibrators; the difference is that the piezoelectric vibrator does not directly drive fluid in the pump cavity, but a medium cavity is arranged between the piezoelectric vibrator and the pump cavity, the medium cavity and the pump cavity are separated by a flexible membrane, the piezoelectric vibrator vibrates to cause the medium in the medium cavity to generate volume flow, further the flexible membrane is deformed, pressure is transmitted simultaneously, the corresponding time sequence of the flexible membrane deformation is caused by matching the time sequence of excitation of the piezoelectric vibrators, the pressure is transmitted simultaneously, the time sequence of the corresponding volume change of the chambers is promoted, and therefore continuous pumping of the liquid is achieved. The structure forms comprise a plurality of cavities and a plurality of actuating units, each actuating unit needs an independent excitation control, firstly, the structure and the actuating process are controlled more complexly, and meanwhile, the size is limited by the plurality of actuating units, and the light, thin and microminiaturization degrees are limited; secondly, the manufacturing cost is high and the power consumption is large.

Disclosure of Invention

The technical problem to be solved by the invention is as follows: in order to solve the problems of complex structure and actuating process control, low light weight, small miniaturization degree, high cost and high power consumption of the array type multi-point control fluid actuator in the prior art, the fluid actuator is provided.

The technical scheme adopted by the invention for solving the technical problem is as follows: a fluid actuator comprises a plurality of capacity-variable cavities, the cavities are communicated through communicating cavities, the cavities and the communicating cavities jointly form a closed quality-containing cavity, fluid working media are filled in the quality-containing cavity, at least one of the cavities forms an actuating cavity, the rest cavities are actuating cavities, the number of the actuating cavities is not less than 1, actuating units are correspondingly arranged in the actuating cavities and used for driving the actuating cavities to generate volume change so as to enable the fluid working media to flow into or out of each actuating cavity, the volume change of the actuating cavities is controlled, the volume of the cavities can be driven by fewer or even a single actuating unit to change according to a specific rule or a specific time sequence, and further a preset actuating effect is provided for fluids or parts outside the cavities.

The outer wall of the execution cavity is partially or completely formed into a soft membrane, and the soft membrane can deform along with the flowing of the fluid working medium into or out of the execution cavity.

The outer wall of the containing cavity is partially or completely formed into a soft membrane, and the soft membrane can deform along with the flowing of the fluid working medium into or out of the containing cavity.

Further comprising the actuation chamber communicating with the actuation chamber through a communication chamber.

The two adjacent execution cavities are communicated through a communication cavity.

It is further included that the actuation unit is a piezoelectric actuator, an electrostatic actuator, an electromagnetic actuator, a shape memory metal actuator, a gas actuator, a thermal actuator, or a mechanical actuator.

The fluid working medium in the mass containing cavity is compressible or incompressible.

The beneficial effects of the invention are: the present invention provides a fluid actuator which comprises a casing,

(1) The volume of a plurality of cavities can be changed at a specific rule or time sequence by fewer or even a single actuating unit, so that a predetermined actuating effect is provided for fluid or components outside the cavities, and the fluid pump can be constructed when a specific time sequence is formed on a single path or multiple paths;

(2) Compared with a multi-cavity multi-actuating unit, the structure is more compact, the light, thin and microminiaturization of higher degree is easy to realize, and the actuating process is simple to control;

(3) By matching the number and arrangement form of the actuating cavities and the executing cavities, the array type multi-point control is easier to realize, and the micro-valve is suitable for the current VR, AR and MR tactile feedback, the current flow control processes of clamping, walking, carrying and the like of a micro-robot, and the construction of a micro-valve containing time sequence action.

Drawings

The invention is further illustrated with reference to the following figures and examples.

FIG. 1 is a schematic diagram of a tandem fluid actuator according to one embodiment of the present invention;

FIG. 2 is a schematic diagram of another tandem fluid actuator according to one embodiment of the present invention;

FIG. 3 is a schematic view of a fluid actuator according to a first embodiment of the present invention in a state (a) during a change in volume of each of the chambers during a cycle of operation;

FIG. 4 is a schematic view of a fluid actuator according to a first embodiment of the present invention in a state (b) during a volume change of each of the chambers during a cycle of operation;

fig. 5 is a schematic view of the fluid actuator according to the first embodiment of the present invention in the state (c) during the volume change of each chamber during the cyclic operation;

FIG. 6 is a schematic view of a fluid actuator according to a first embodiment of the present invention during a change in volume of the chambers during a cycle (d);

fig. 7 is a schematic view of the fluid actuator according to the first embodiment of the present invention in the state (e) during the volume change of each chamber during the cyclic operation;

FIG. 8 is a schematic view of a fluid actuator according to a first embodiment of the present invention during a change in volume of the chambers during a cycle (f);

FIG. 9 is a schematic representation of a fluid actuator according to a first embodiment of the present invention during a volume change of the chambers during a cycle (g);

FIG. 10 is a schematic view of a fluid actuator according to a first embodiment of the present invention during a volume change of each of the chambers (h) during a cycle of operation;

FIG. 11 is a schematic view of a fluid actuator according to a first embodiment of the present invention in a state (i) during volume changes of chambers during cyclic operation;

FIG. 12 is a schematic view of a fluid actuator according to a first embodiment of the present invention during a variation in volume of each of the chambers (j);

fig. 13 is a schematic structural view of a parallel type fluid actuator according to a second embodiment of the present invention;

FIG. 14 is a schematic view of a multi-path fluid actuator according to a third embodiment of the present invention;

fig. 15 is a schematic structural view of an array type multi-point control fluid actuator in the fourth embodiment of the present invention;

FIG. 16 is a schematic structural diagram of a multi-actuation-chamber series fluid actuator according to a fifth embodiment of the present invention;

FIG. 17 is a schematic structural diagram of a multiple-actuator-chamber parallel fluid actuator according to a fifth embodiment of the present invention;

fig. 18 is a schematic structural view of a multi-actuation chamber array type multi-point control fluid actuator according to a fifth embodiment of the present invention;

FIG. 19 is a schematic diagram of a fluid actuator in which the actuation cavity itself provides the actuation effect according to a sixth embodiment of the invention;

fig. 20 is a schematic structural diagram of a fluid actuator capable of implementing bidirectional actuation control according to a seventh embodiment of the present invention.

In the figure: 1. the device comprises a containing cavity, 11, an actuating cavity, 12, an executing cavity, 2, a communicating cavity, 3, a soft membrane, 4 and a quality containing cavity.

Detailed Description

The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic views illustrating only the basic structure of the present invention in a schematic manner, and thus show only the constitution related to the present invention.

As shown in fig. 1, which is a schematic structural diagram of the present invention, a fluid actuator includes multiple capacity-variable capacity chambers 1, the capacity chambers 1 are communicated with each other through a communication chamber 2, the capacity chambers 1 and the communication chamber 2 together form a closed capacity chamber 4, the capacity chamber 4 is filled with a fluid working medium, at least one of the capacity chambers 1 forms an actuation chamber 11, the remaining capacity chambers 1 are execution chambers 12, the number of the execution chambers 12 is not less than 1, the actuation chamber 11 is correspondingly provided with an actuation unit, and the actuation unit is configured to drive the actuation chamber 11 to generate a capacity change so as to cause the fluid working medium to flow into or flow out of each execution chamber 12, so as to control the capacity change of the execution chambers 12, and it is possible to realize that fewer or even a single actuation unit drives the capacity of the multiple capacity chambers to generate a change with a specific rule or a time sequence, thereby providing a predetermined actuation effect on a fluid or a component outside the capacity chambers. Compared with a multi-cavity multi-actuating unit, the multi-cavity multi-actuating unit has a more compact structure, is easy to realize higher-degree light weight, thinness and microminiaturization, is simple to control the actuating process, is easy to realize array type multi-point control by matching the number and arrangement form of actuating cavities and actuating cavities, and is suitable for the current VR, AR and MR tactile feedback, the fluid control processes of clamping, walking, carrying and the like of a micro robot and the construction of a micro valve containing time sequence action;

the fluid actuator can realize that fewer or even a single actuating unit drives the volumes of a plurality of cavities to change according to a specific rule or time sequence, thereby providing a predetermined actuating effect for fluid or components outside the cavities.

The actuating unit drives the volume of the actuating cavity to change under the action of excitation, the volume change of the actuating cavity drives fluid working media in the mass containing cavity to flow and transfer pressure, the volume of the actuating cavity is driven to change, and the volume change of each containing cavity is driven to generate the volume change according to a specific rule or a time sequence by adjusting the excitation of the actuating unit, the flow resistance of the communicating cavity and the size of the containing cavity, so that a preset actuating effect is formed.

The outer wall of the actuating cavity 12 is partially or completely formed into a soft membrane 3, the outer wall of the containing cavity 1 is partially or completely formed into a soft membrane 3, and the soft membrane 3 can deform along with the flowing of the fluid working medium into or out of the containing cavity 1 where the fluid working medium is located.

The actuating cavity 11 is communicated with the executing cavity 12 through the communicating cavity 2, the adjacent two executing cavities 12 are communicated through the communicating cavity 2, and the soft membrane 3 can deform along with the flowing of the fluid working medium into or out of the executing cavity 12.

The actuating unit provides power for the volume change of the actuating chamber 11, that is, the actuating unit causes the volume change of the actuating chamber 11 under the excitation effect, the actuating unit is fixedly connected with the actuating chamber 11, even the actuating unit is formed as a part of the actuating chamber 11, or the actuating unit is arranged near or around the actuating chamber 11, and the actuating unit is a piezoelectric actuator, an electrostatic actuator, an electromagnetic actuator, a shape memory metal actuator, a gas actuator, a thermal actuator or a mechanical actuator.

When the actuating unit is actuated by piezoelectricity, shape memory metal or machinery, the driving force needs to act on the actuating cavity 11 through the direct contact of structural components, at this time, the actuating unit needs to be fixedly connected with the actuating cavity 11, and even the actuating unit can be used as a part enclosing the actuating cavity 11; when the actuating unit is electrostatically actuated, electromagnetically actuated, gas actuated or thermally actuated, it is not necessary to transmit the driving force through direct contact of structural components, and at this time, the actuating unit may be disposed near or around the actuating chamber.

The actuating cavity 11 generates volume change under the action of the driving force of the actuating unit, and can provide actuating effect for external fluid or parts like the actuating cavity 12 communicated with the actuating cavity, and at the moment, the outer wall enclosing the containing cavity 1 (comprising the actuating cavity 11 and the actuating cavity 12) is partially or completely formed into a soft membrane 3; it is also possible that the actuation of the at least one actuation chamber 12 enclosing the receptacle 1 is not itself involved, merely as a condition for causing the actuation effect of the respective actuation chamber 12 communicating therewith on the external fluid or component, in which case the outer wall of the at least one actuation chamber 12 enclosing the receptacle 1 is formed partly or entirely as a flexible membrane 3, in any case at least two of the receptacles 1 need to provide an actuation effect on the external fluid or component to form an effective specific law or timing.

In addition, the material of the soft film 3 may be a metal film, a polymer film, or a composite film composed of metal and polymer, but not limited thereto, and the soft film is characterized in that it is easily deformed under pressure.

In the process that the volume change of the actuating cavity 11 prompts the fluid working medium in the mass containing cavity 4 to flow, the communicating cavity 2 connected between the cavities 1 has flow resistance, the flow resistance of the communicating cavity 2 can be regulated and controlled by adjusting the characteristic parameters such as the section shape and the size of the communicating cavity 2, the length of the communicating cavity 2 and the like, and meanwhile, a flow resistance regulator can be arranged in the communicating cavity 2 to be matched with the flow resistance regulation and control between the cavities 1. And/or the size of each cavity 1 and the volume change difficulty (specifically, the deformation difficulty and the deformation displacement of the soft membrane) are/is reasonably configured, so that the volume change of each cavity 1 is realized according to a specific rule or a specific time sequence, and a preset actuating effect is formed.

The fluid working medium filled in the mass containing cavity 4 can be compressed, weakly compressible or incompressible, can be high-pressure oil, water, air or other materials, and is not limited herein, the fluid working medium in the mass containing cavity 4 flows under the action of the driving force of the actuating unit, and the process is accompanied with pressure transmission, so that the volume of each cavity communicated with the flow channel is changed.

A fluid actuator of the present invention, in which different numbers and connection forms of actuating chambers 11 and actuating chambers 12 are provided according to application scenarios, will be described in detail below with reference to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.

The first embodiment is as follows:

as shown in fig. 1 to 12, in the present embodiment, the containing cavity 1 includes an actuating cavity 11 and three actuating cavities 12 as an example, the actuating cavity 11 and the three actuating cavities 12 are enclosed to form an outer wall of the actuating cavity 12, and are partially or wholly formed into the flexible film 3, the three communicating cavities 2 are a first communicating cavity, a second communicating cavity i and a second communicating cavity ii from left to right in sequence, the actuating cavity 11 is communicated with the adjacent actuating cavity 12 through the first communicating cavity, and the adjacent actuating cavities 12 are communicated with each other through the second communicating cavity i and the second communicating cavity ii in sequence, so as to form a single communicating path, and the working process is as follows:

when the actuating unit is actuated to reduce the volume of the actuating cavity 11, the fluid working medium flows out of the actuating cavity 11 to expand the flexible films 3 of the actuating cavities 12, and the flexible films 3 of the actuating cavities 12 are expanded at different speeds due to the variable volume of the actuating cavities 12 and the preset flow resistance of the communication cavities, specifically, the speed difference is determined by the expansion difficulty of the flexible films 3 of the actuating cavities 12, the deformation displacement and the flow resistance of the fluid working medium flowing through the communication cavities.

In this embodiment, fig. 3 (a) is an initial state, three execution chambers 12 are an execution chamber i, an execution chamber ii and an execution chamber iii in sequence from left to right, when a fluid working medium enters the execution chamber i, because the flexible membrane 3 is designed into a mode that is relatively easy to deform, and the flow resistance of the second communication chamber i is designed into a relatively large mode, the fluid working medium tends to drive the flexible membrane 3 of the execution chamber i to expand, at this time, the fluid working medium flowing through the second communication chamber i is less, and when the flexible membrane 3 of the execution chamber i expands to a certain extent, the difficulty of expansion of the flexible membrane 3 increases, resulting in a continuous increase in pressure in the chambers, so that the fluid working medium flowing through the second communication chamber i increases, i.e., the fluid working medium flowing into the execution chamber ii increases, and the dynamic change of the fluid working medium flow distribution mode results in an objective effect, i.e., the instant flow of the fluid entering the execution chamber i into the execution chamber i is greater than the instant flow of the execution chamber ii, the expansion speed of the execution chamber i.e., the flexible membrane 3 is greater than the expansion speed of the execution chamber ii, and the soft membrane 3, and the expansion speed of the execution chamber ii is greater than the expansion speed of the execution chamber ii in sequence of the execution chamber ii, and the fluid working medium (e., the fluid working medium d, the expansion speed of the execution chamber ii is greater than the expansion speed of the expansion chamber ii, and the three sequential execution chambers in the sequence, and the three sequential execution chambers i, i.e., the fluid working medium (i), and the fluid working medium b, and the expansion speed of the fluid working medium b) is greater than the execution chamber ii, and the expansion speed of the execution chamber ii, and the fluid working medium is greater than the execution chamber ii, and the three sequential observation of the fluid working medium in the three sequential observation of the execution chambers in the sequence as shown in fig. the sequence, and the sequence shown in fig. 4).

When the actuating unit drives the volume of the actuating cavity 11 to increase under the excitation action, the fluid working medium flows back to the actuating cavity 11 to contract the flexible films 3 of the actuating cavities 12, and the contraction speeds of the flexible films 3 of the actuating cavities 12 are different due to the variable volume of the actuating cavities 12 and the preset flow resistance of the communicating cavities. Similar to the expansion process, this speed difference is determined by the ease of contraction of the flexible membrane 3 of the actuation chamber 12, the deformation displacement and the resistance to flow of the fluid medium through the communicating chamber. In this embodiment, the fluid working medium in the execution chamber i closest to the actuation chamber 11 flows back to the actuation chamber 11 first, because the soft membrane 3 is designed into a mode that is relatively easy to deform, and the flow resistance of the second communication chamber i is designed into a relatively large mode, the fluid working medium is more prone to drive the soft membrane 3 of the execution chamber i to contract, at this time, the fluid working medium flowing back through the second communication chamber i is less, when the soft membrane 3 of the execution chamber i contracts to a certain extent, the difficulty of contraction of the soft membrane 3 is increased, and the pressure in the chamber is continuously reduced, so that the fluid working medium flowing through the second communication chamber i is increased, that is, the fluid working medium flowing back from the execution chamber ii is increased, the dynamic change of the fluid working medium in the flow distribution manner has an effect in an objective manner, that the instantaneous flow of the fluid working medium flowing back through the execution chamber i is much greater than the instantaneous flow of the fluid working medium flowing back through the execution chamber ii, and the contraction speed of the soft membrane 3 of the execution chamber i is greater than the contraction speed of the soft membrane 3 of the execution chamber ii, and the soft membrane 3 can be observed sequentially as three soft membranes in a sequence (e, the sequence of the soft membrane 3 g-7).

When the actuating unit is excited by a periodic signal to cause the volume of the actuating cavity to change periodically, the soft films of the actuating cavity I, the actuating cavity II and the actuating cavity III expand and contract periodically and sequentially, as shown in figures 6 (d) -12 (j).

By adjusting the deformation difficulty and deformation displacement of the soft films 3 of the execution cavities 12 and the flow resistance of the fluid working medium flowing through the communicating cavity, the difference between the deformation speed and the displacement of the soft films 3 of the execution cavities 12 can be adjusted, the volume change of the execution cavities 12 in a specific rule or time sequence is realized, and the preset actuating effect is formed.

Example two:

as shown in fig. 13, the present embodiment is basically the same as the first embodiment in terms of the structural principle, except that the actuating chamber 11 is communicated with each actuating chamber 12 through a plurality of first communicating chambers, and the working process is as follows:

when the actuating unit causes the volume of the actuating cavity 11 to change under the excitation action, the fluid working medium flows out of or back to the actuating cavity 11 from the actuating cavity 11 to expand or contract each actuating cavity 12 and the soft membrane 3, and the speed of expansion or contraction of each actuating cavity 12 and the soft membrane 3 is different because the volume of each actuating cavity 12 is variable and each first communication cavity has preset flow resistance. Specifically, the difference in velocity is determined by the ease with which the flexible membrane 3 of the actuation chamber 12 expands, the deformation displacement and the resistance to flow of the fluid working substance through the communicating chamber. By adjusting the deformation difficulty and deformation displacement of the soft film 3 enclosing the execution cavities 12 and the flow resistance of the fluid working medium flowing through the first communication cavities, the difference between the deformation speed and the displacement of the soft film 3 of each execution cavity 12 can be adjusted, the volume change of each execution cavity 12 is realized according to a specific rule or a time sequence, and a preset actuating effect is formed.

Example three:

as shown in fig. 14, the present embodiment is basically the same as the first and second embodiments in terms of the principle of the structure, and is different in that the actuation chamber 11 and the actuation chamber 12 are sequentially communicated through the communication chambers to form a plurality of communication paths, thereby forming a multi-path multi-point actuation control mode.

Example four:

as shown in fig. 15, the present embodiment is basically the same as the first to third embodiments in terms of the structural principle, except that the execution chambers 12 on the plurality of communication paths communicate through the communication chambers, constituting an array type multi-point actuation control form.

Example five:

as shown in fig. 16 to 18, the present embodiment has substantially the same structural principle as the first to fourth embodiments, except that at least two of the receiving chambers 1 are formed as the actuating chambers 11, and when the actuating efficiency of a single actuating chamber 11 is insufficient, the actuating efficiency can be improved by providing a plurality of actuating chambers 11.

Example six:

as shown in fig. 19, the present embodiment has substantially the same structural principle as the first to fifth embodiments, except that the outer wall enclosing the cavity 1 (including the actuation cavity 11 and the actuation cavity 12) is partially or wholly formed as the soft membrane 3, that is, the actuation cavity 11 itself can provide an actuation effect to an external fluid or component.

Example seven:

as shown in fig. 20, the present embodiment is basically the same as the first to sixth embodiments in the structural principle, except that one or more actuation chambers 11 are provided in the vicinity of the actuation chamber iii, and the introduced one or more actuation chambers 11 communicate with the actuation chamber iii through the first communication chamber, whereby the bidirectional actuation can be realized.

In light of the foregoing description of the preferred embodiment of the present invention, many modifications and variations will be apparent to those skilled in the art without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.

Claims (7)

1. A fluid actuator is characterized by comprising a plurality of capacity-variable containing cavities (1), wherein the containing cavities (1) are communicated through communicating cavities (2), the containing cavities (1) and the communicating cavities (2) jointly form a closed containing cavity (4), the containing cavity (4) is filled with fluid working media, at least one of the containing cavities (1) forms an actuating cavity (11), the rest containing cavities (1) are execution cavities (12), the number of the execution cavities (12) is not less than 1, actuating units are correspondingly arranged in the actuating cavities (11), and the actuating units are used for driving the actuating cavities (11) to generate capacity changes so as to enable the fluid working media to flow into or out of the execution cavities (12) to control the capacity changes of the execution cavities (12).

2. The fluid actuator of claim 1, wherein: the outer wall of the actuating chamber (12) is partially or completely designed as a flexible membrane (3), and the flexible membrane (3) can deform as the fluid working medium flows into or out of the actuating chamber (12) in which the flexible membrane is located.

3. The fluid actuator of claim 2, wherein: the outer wall of the cavity (1) is partially or completely formed into a soft membrane (3), and the soft membrane (3) can deform along with the flowing of the fluid working medium into or out of the cavity (1) where the fluid working medium is located.

4. The fluid actuator of claim 1, wherein: the actuating chamber (11) is communicated with the executing chamber (12) through the communicating chamber (2).

5. The fluid actuator of claim 4, wherein: the adjacent execution cavities (12) are communicated through a communication cavity (2).

6. The fluid actuator of claim 1, wherein: the actuation unit is a piezoelectric actuator, an electrostatic actuator, an electromagnetic actuator, a shape memory metal actuator, a gas actuator, a thermal actuator, or a mechanical actuator.

7. The fluid actuator of claim 1, wherein: the fluid working medium in the mass containing cavity (4) is compressible or incompressible.

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