CN115652409A - Power-off protection method for crystal growth furnace and crystal growth furnace - Google Patents
Power-off protection method for crystal growth furnace and crystal growth furnace Download PDFInfo
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- CN115652409A CN115652409A CN202211308199.5A CN202211308199A CN115652409A CN 115652409 A CN115652409 A CN 115652409A CN 202211308199 A CN202211308199 A CN 202211308199A CN 115652409 A CN115652409 A CN 115652409A
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Abstract
The invention relates to a power-off protection method for a crystal growth furnace and the crystal growth furnace, wherein the crystal growth furnace comprises a first lifting component and a suction pump which are electrically connected with a standby power supply, a crucible, a crystal bar and a melt liquid which are positioned in the crucible; the power-off protection method of the crystal growth furnace comprises the following steps: starting a standby power supply; driving the first lifting assembly to extend the suction pipe into the crucible, and enabling a suction port of the suction pipe to be positioned below the liquid level of the molten liquid; and starting a suction pump, and sucking the molten liquid in the crucible through a suction pipe to separate the crystal bar from the molten liquid. The invention has the advantages that: run into the outage condition at crystal growth stove after, stand-by power supply is first lifting unit and suction pump power supply, and first lifting unit stretches into the crucible with the straw of suction pump to utilize the suction pump to take away the melt in the crucible, so just realized the separation of crystal bar and melt, avoid crystal bar and melt to condense together after the outage of crystal growth stove, prevent that the crystal bar from scrapping.
Description
Technical Field
The invention relates to the technical field of crystal growth, in particular to a power-off protection method for a crystal growth furnace and the crystal growth furnace.
Background
At present, in the prior art, when a crystal growth furnace is used for growing crystals, a lifting rod is driven to enable seed crystals carried on the lifting rod to be in contact with molten liquid used for growing the crystals in a crucible, and when the temperature of a solid-liquid interface between the seed crystals and the molten liquid is lower than the freezing point of the molten liquid, the crystals grow on the solid-liquid interface between the seed crystals and the molten liquid. However, in the prior art, after the crystal growth furnace is suddenly powered off, the molten liquid in the crystal bar and the molten liquid in the crucible cannot be separated, and when the molten liquid is cooled, the crystal bar and the molten liquid are condensed together, so that the crystal bar is scrapped.
Disclosure of Invention
In view of the above, the present invention provides a power-off protection method for a crystal growth furnace, which can separate a crystal ingot from a melt after the power-off of the crystal growth furnace, thereby preventing the crystal ingot from being discarded.
The invention provides a power-off protection method of a crystal growth furnace, wherein the crystal growth furnace comprises a first lifting component and a suction pump which are electrically connected with a standby power supply, a crucible, a crystal bar and melt liquid which are positioned in the crucible; the power-off protection method of the crystal growth furnace comprises the following steps:
starting a standby power supply;
driving the first lifting assembly to extend the suction pipe into the crucible, and enabling a suction port of the suction pipe to be positioned below the liquid level of the molten liquid;
and starting a suction pump, and sucking the molten liquid in the crucible through a suction pipe to separate the crystal bar from the molten liquid.
In one embodiment, after the step of starting the suction pump to suck the melt in the crucible through the suction pipe to separate the ingot from the melt, the method further comprises the following steps: the first lifting component is driven to drive the suction pipe to rise so as to withdraw the suction pipe out of the crucible.
So set up, after the straw withdrawed from the crucible, the lift stroke of crucible can not receive the restriction of straw.
In one embodiment, after the step of starting the suction pump to suck the melt in the crucible through the suction pipe to separate the ingot from the melt, the method further comprises the following steps: and lifting the crucible until the bottom of the crucible is abutted against the crystal bar.
So set up, can let the crucible bearing crystal bar, avoid the crystal bar to drop and pound the crucible bad.
In one embodiment, the crystal growth furnace further comprises a second lifting assembly electrically connected with the standby power supply, the second lifting assembly is connected with the crucible through a crucible shaft to lift the crucible, a weight sensor is arranged on the crucible shaft, and the step of lifting the crucible until the bottom of the crucible abuts against the crystal bar is further included: when the weight sensor learns the weight change, the second lifting assembly stops lifting the crucible.
So set up, can realize the lifting of crucible through second lifting unit, can judge whether the crucible offsets with the crystal bar through weighing sensor. When the weight detected by the weight sensor is kept unchanged, the crucible can be judged not to abut against the crystal bar, and the second lifting assembly lifts the crucible; when the weight that weight sensor detected changes, can judge that the crucible offsets with the crystal bar at this moment, the second lifting unit stops the lifting crucible to let the crucible be located the position that offsets with the crystal bar bearing, avoid the crystal bar to drop and pound the crucible bad, simultaneously, also can avoid the second lifting unit to continue the lifting crucible and press the crystal bar apart.
In one embodiment, after the step of activating the standby power supply and before the step of driving the first lifting assembly to extend the suction pipe into the crucible and to enable the suction port of the suction pipe to be positioned below the liquid level of the melt, the method further comprises the following steps: and lifting the crucible until the bottom of the crucible abuts against the crystal bar.
By such arrangement, the crucible can support the crystal bar before the suction pipe sucks the melt.
The invention also provides a crystal growing furnace for growing crystal bars, which comprises a standby power supply, a crucible mechanism and a suction mechanism, wherein the crucible mechanism comprises a crucible for accommodating molten liquid, the suction mechanism comprises a suction pipe, a first lifting component and a suction pump communicated with the suction pipe, the suction pump and the first lifting component are electrically connected with the standby power supply, and the first lifting component is used for driving the suction pipe to lift so as to stretch into or withdraw from the crucible.
In one embodiment, the crystal growth furnace further comprises a frame, the standby power supply, the crucible mechanism and the suction mechanism are mounted on the frame, the first lifting assembly comprises a first base and a first connecting plate, the first base is fixedly connected to the frame, one side of the first connecting plate is slidably connected to the first base, and the other side of the first connecting plate is fixedly connected to the suction pipe.
So set up, first connecting plate can drive the straw and slide relatively first base together to the lift straw makes the straw stretch into or withdraw from the crucible.
In one embodiment, the crystal growth furnace further comprises a limit switch electrically connected to the backup power supply, and the limit switch turns on or off the control circuit to stop the upward movement of the first connection plate when the first connection plate collides with the limit switch.
So set up, after the suction pipe all withdrawed from the crucible, can make first connecting plate stop upward movement through limit switch.
In one embodiment, the crucible shaft is arranged at the bottom of the crucible, the crucible mechanism further comprises a second lifting assembly, the second lifting assembly comprises a second base and a second connecting plate, the second base is fixedly connected to the rack, one side of the second connecting plate is slidably connected to the second base, and the other side of the second connecting plate is fixedly connected to the crucible shaft.
So set up, the second connecting plate can drive the relative second base of crucible axle and slide to lift crucible, make the bottom of crucible offset or separate with the crystal bar.
In one embodiment, a weight sensor is arranged on the crucible shaft and used for detecting the weight born by the crucible shaft.
By the arrangement, whether the bottom of the crucible is abutted against the crystal bar or not can be judged through whether the weight born by the crucible shaft changes or not. When the weight of the crucible shaft detected by the weight sensor is kept unchanged, the crucible can be judged not to abut against the crystal bar, and the second lifting assembly lifts the crucible; when the weight that the crucible axle that detects when weighing sensor bore changes, can judge that the crucible offsets with the crystal bar at this moment, the second lifting unit stops the lifting crucible to let the crucible be located the position that offsets with the crystal bar bearing, avoid the crystal bar to drop and pound the crucible bad, simultaneously, also can avoid the second lifting unit to continue the lifting crucible and press the crystal bar apart.
The invention has at least the following beneficial effects:
when the crystal growth furnace is in a power-off condition, the power-off protection method of the crystal growth furnace provided by the invention supplies power to the first lifting assembly and the suction pump through the standby power supply, the suction pipe of the suction pump extends into the crucible by the first lifting assembly, so that the molten liquid in the crucible is pumped away by the suction pump, the separation of the crystal bar and the molten liquid is realized, the crystal bar and the molten liquid are prevented from being condensed together after the power-off of the crystal growth furnace, and the crystal bar is prevented from being scrapped.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments or the conventional technologies of the present application, the drawings used in the descriptions of the embodiments or the conventional technologies will be briefly introduced below, it is obvious that the drawings in the following descriptions are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic structural view showing a part of the structure of a crystal growth furnace according to an embodiment of the present invention;
FIG. 2 is a schematic view of a portion of the structure shown in FIG. 1 from another perspective;
FIG. 3 is a schematic structural view showing a part of the structure of the crystal growth furnace of the embodiment shown in FIG. 1;
FIG. 4 is a schematic flow chart of a power-off protection method for a crystal growth furnace according to an embodiment of the present invention;
FIG. 5 is a schematic flow chart of a power-off protection method for a crystal growth furnace according to another embodiment of the present invention.
Reference numerals are as follows:
10. a standby power supply; 20. a crucible mechanism; 21. a crucible; 211. a crucible shaft; 2111. a weight sensor; 22. a second lifting assembly; 221. a second base; 222. a second connecting plate; 30. a suction mechanism; 31. a straw; 32. a first lifting assembly; 321. a first base; 322. a first connecting plate; 323. a driver; 33. a suction pump; 40. a frame; 50. lifting a pull rod; 60. and (5) crystal bars.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present application more comprehensible, embodiments accompanying the present application are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. This application is capable of embodiment in many different forms than those described herein and those skilled in the art will be able to make similar modifications without departing from the spirit of the application and therefore the application is not limited to the specific embodiments disclosed below.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When a component is referred to as being "connected" to another component, it can be directly connected to the other component or intervening components may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used in the description of the present application are for illustrative purposes only and do not represent the only embodiments.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present application, "plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may mean that the first feature is in direct contact with the second feature, or that the first feature and the second feature are in indirect contact via an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature "under," "beneath," and "under" a second feature may be directly under or obliquely under the second feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
Unless defined otherwise, all technical and scientific terms used in the specification of the present application have the same meaning as commonly understood by one of ordinary skill in the art to which the present application belongs. The terminology used in the description of the present application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used in the description of this application, the term "and/or" includes any and all combinations of one or more of the associated listed items.
The application provides a power-off protection method for a crystal growth furnace. A crystal growth furnace is an apparatus for growing crystals. For example, it can be used for a crystal growth furnace for growing single crystal sapphire. At present, the commonly used method for producing single crystal sapphire is a kyropoulos method, and the specific process for producing the single crystal sapphire by adopting the kyropoulos method comprises the following steps: the crucible is arranged in the furnace chamber, the crucible is filled with molten liquid, the molten liquid is molten aluminum oxide liquid, the sapphire crystal growth furnace is provided with a lifting rod, the lower end of the lifting rod carries seed crystals, and the seed crystals and the lifting rod are coaxial. Moving the lifting rod to make the seed crystal contact with the molten liquid, and when the temperature of the solid-liquid interface of the seed crystal and the molten liquid is lower than the solidifying point of the aluminum oxide, starting to grow crystals on the solid-liquid interface of the seed crystal and the molten liquid.
However, when a crystal is grown using a crystal growth furnace, a case where the crystal growth furnace is suddenly turned off is encountered. Traditional crystal growth stove meets the outage condition after, can not separate crystal bar and melt, and after the melt cooling, the crystal bar can condense integrative with the melt, can't take out from the melt that solidifies and be used for the processing product, can only melt the back with the crystal bar that condenses integrative and the melt that solidifies and recycle, leads to the crystal bar to scrap.
In view of this, the power-off protection method for the crystal growth furnace separates the crystal bar from the melt after the power-off of the crystal growth furnace, so as to prevent the crystal bar from being scrapped. The power-off protection method for the crystal growth furnace is realized based on the crystal growth furnace provided by the application.
Referring to fig. 1 to 3, the present application provides a crystal growth furnace including a backup power supply 10, a crucible mechanism 20, and a suction mechanism 30. The crucible mechanism 20 includes a crucible 21, the crucible 21 contains melt, and when the crystal growth furnace normally grows crystals, the melt in the crucible 21 is in a molten state, and the grown crystal bar 60 contacts with the melt, thereby growing up. The suction mechanism 30 includes a suction pipe 31, a first elevating assembly 32, and a suction pump 33 communicating with the suction pipe 31, and both the suction pump 33 and the first elevating assembly 32 are electrically connected to the backup power source 10. When the crystal growth furnace is powered off, the first lifting component 32 of the suction mechanism 30 drives the suction pipe 31 to descend, so that the suction pipe 31 extends into the crucible 21, and then the suction pump 33 is started to pump away the molten liquid in the crucible 21, so that the crystal bar 60 and the molten liquid are separated after the crystal growth furnace is powered off, and the crystal bar 60 is prevented from being scrapped; after the ingot 60 is separated from the melt, the first lifting assembly 32 drives the suction pipe 31 to lift, so that the suction pipe 31 withdraws from the crucible 21, thereby preventing the suction pipe 31 from limiting the stroke of the crucible 21 and preventing the suction pipe 31 from obstructing the lifting of the crucible 21.
Preferably, the suction pipe 31 may be a quartz suction pipe.
Further, in order to ensure that the melt in the crucible 21 is completely pumped away, the suction port of the suction pipe 31 may have a wave shape or other rugged shape. Thus, the suction port of the suction pipe 31 is inserted into the bottom of the melt and brought into contact with the bottom of the crucible 21, and then the suction pump 33 is started to completely suck the melt from the crucible 21.
Referring to fig. 1 to 3, in some embodiments, the crystal growth furnace further includes a frame 40, the standby power supply 10, the crucible mechanism 20 and the suction mechanism 30 are mounted on the frame 40, the first lifting assembly 32 includes a first base 321 and a first connecting plate 322, the first base 321 is fixedly connected to the frame 40, one side of the first connecting plate 322 is slidably connected to the first base 321, and the other side of the first connecting plate 322 is fixedly connected to the suction pipe 31. Therefore, the first connecting plate 322 can drive the suction pipe 31 to slide together relative to the first base 321, thereby lifting and lowering the suction pipe 31, so that the suction pipe 31 can extend into or withdraw from the crucible 21.
Preferably, in some embodiments, the sliding engagement surface of the first connecting plate 322 and the first base 321 extends along a vertical direction, so that the first connecting plate 322 can slide relative to the first base 321 along the vertical direction, thereby allowing the first connecting plate 322 to drive the suction pipe 31 to extend into or withdraw from the crucible 21 in a shorter stroke.
When the suction pipe 31 is completely withdrawn from the crucible 21, the upward movement of the first connecting plate 322 is stopped. In some embodiments, the crystal growth furnace further comprises a limit switch electrically connected to the standby power supply 10, and after the suction tube 31 is completely withdrawn from the crucible 21, the first connection plate 322 collides with the limit switch, and the limit switch switches on the control circuit to stop the upward movement of the first connection plate 322. Of course, in other embodiments, the limit switch opens the control circuit to stop the upward movement of the first connecting plate 322.
The small size of the narrow neck of the ingot 60 and the seed crystal may break, causing the ingot 60 to fall and shatter the crucible 21. Referring to fig. 1 to 3, in some embodiments, the crucible shaft 211 is disposed at the bottom of the crucible 21, the crucible mechanism 20 further includes a second lifting assembly 22, the second lifting assembly 22 includes a second base 221 and a second connecting plate 222, the second base 221 is fixedly connected to the frame 40, one side of the second connecting plate 222 is slidably connected to the second base 221, and the other side of the second connecting plate 222 is fixedly connected to the crucible shaft 211. Thus, the second connecting plate 222 can drive the crucible shaft 211 to slide relative to the second base 221, thereby lifting the crucible 21 and causing the bottom of the crucible 21 to abut against or separate from the ingot 60. When the bottom of the crucible 21 abuts against the ingot 60, the crucible 21 supports the ingot 60, thereby preventing the ingot 60 from falling off and breaking the crucible 21.
Preferably, in some embodiments, the sliding engagement surface of the second connecting plate 222 and the second base 221 extends along a vertical direction, so that the second connecting plate 222 can slide along the vertical direction relative to the second base 221, and the second connecting plate 222 can drive the crucible 21 to move up and down in a shorter stroke, so that the bottom of the crucible 21 is pressed against or separated from the ingot 60.
Further, in some embodiments, the sliding between the first connection plate 322 and the first base 321 and the sliding between the second connection plate 222 and the second base 221 may be achieved by a ball screw mechanism. For example: the second connecting plate 222 is fixedly connected to a nut of the ball screw mechanism, a screw of the ball screw mechanism is rotatably connected to the second base 221, and the second connecting plate 222 can be slid relative to the second base 221 by rotating the screw.
In some embodiments, the sliding between the first connecting plate 322 and the first base 321 and the sliding between the second connecting plate 222 and the second base 221 may be achieved by a sliding fit of a slider and a sliding rail. For example: the first connecting plate 322 is fixedly connected to the slider, the slide rail is fixed to the first base 321, and the first connecting plate 322 can slide relative to the first base 321 by pushing the first connecting plate 322 or the slider through the driver 323. The actuator 323 may be an electric cylinder or an air cylinder.
Referring to FIG. 3, in some embodiments, to determine whether the bottom of crucible 21 abuts against ingot 60, weight sensor 2111 is disposed on crucible shaft 211, and weight sensor 2111 is used to detect the weight borne by crucible shaft 211. Whether or not the bottom of crucible 21 abuts on ingot 60 can be determined by whether or not the weight received by crucible shaft 211 changes. When the weight of the crucible shaft 211 detected by the weight sensor 2111 is kept unchanged, it can be determined that the crucible 21 is not yet abutted against the ingot 60, and the second lifting assembly 22 lifts the crucible 21; when the weight of the crucible shaft 211 detected by the weight sensor 2111 changes, it can be determined that the crucible 21 abuts against the ingot 60 at this time, and the second lifting assembly 22 stops lifting the crucible 21, so that the crucible 21 is located at a position abutting against the ingot 60 to support the ingot 60, the ingot 60 is prevented from falling off to crush the crucible 21, and meanwhile, the second lifting assembly 22 can be prevented from continuously lifting the crucible 21 to crush the ingot 60.
In some embodiments, in order to ensure that the crucible mechanism 20 and the suction mechanism 30 can obtain sufficient power, the backup power supply 10 employs a 220V UPS power supply or a 48V UPS power supply.
It should be noted that the suction mechanism 30 sucks the melt from the crucible 21 and then stores the melt in a container, which may be installed inside the crystal growth furnace or outside the crystal growth furnace. In some embodiments, the vessel is located on and moves with a moving cart external to the crystal growth furnace. When a certain crystal growth furnace is suddenly powered off, the container is moved to the vicinity of the crystal growth furnace by the movable trolley so as to contain the molten liquid extracted from the crystal growth furnace.
Referring to fig. 4, after the power of the crystal growth furnace is cut off, the step of separating the crystal bar 60 from the melt by using the power-off protection method of the crystal growth furnace provided by the present application is as follows:
a, starting the standby power supply 10;
b, driving the first lifting assembly 32 to extend the suction pipe 31 into the crucible 21, and enabling a suction port of the suction pipe 31 to be positioned below the liquid level of the molten liquid;
c, the suction pump 33 is started to suck the melt in the crucible 21 through the suction pipe 31 to separate the ingot 60 from the melt.
The crystal growing furnace power-off protection method provided by the invention is a method for protecting a crystal bar in the crystal growing furnace when the crystal growing furnace is suddenly powered off. In order to ensure that the ingot 60 continues to grow while the crystal is being grown, it is necessary to place the ingot 60 in the crucible 21 and to keep it in contact with the melt. However, after the crystal growth furnace is suddenly powered off, the melt is gradually cooled, and if the ingot 60 is continuously contacted with the melt, the ingot 60 and the melt are condensed together when the melt is cooled and solidified, so that the ingot 60 cannot be drawn out and discarded. After the crystal growth furnace is suddenly powered off, the driving structure and the transmission structure for driving the lifting rod 50 to lift cannot work any more, so that the crystal bar 60 cannot be lifted and separated from the melt.
In step a, the manner of starting the backup power supply 10 may be operated manually or by a control system for monitoring the power supply state of the crystal growth furnace, and the control system may be electrically connected to the backup power supply to control the backup power supply 10 to start when the power is off, which is not described herein again.
In step b, the suction pipe 31 is extended into the crucible such that the suction port of the suction pipe 31 is located below the surface of the molten liquid, and the suction port of the suction pipe 31 can be extended directly into a position close to the bottom of the crucible 21 to prevent the suction pipe 31 from moving again during the suction process of the suction pipe 31. It is also possible to gradually move the suction port of the suction pipe 31 downward slowly to draw out the melt in the crucible 21 layer by layer.
It is understood that step b and step c may be performed sequentially or simultaneously.
In some embodiments, step b is performed before step c. In these embodiments, the suction pump 33 is activated after the suction port of the suction pipe 31 is located below the melt level. These embodiments can ensure that the suction pump 33 sucks the melt immediately when the suction pump 33 is started, thereby saving energy and cost.
In other embodiments, step b and step c are performed simultaneously. In these embodiments, the suction pump 33 may be started first, and after the start of the suction pump 33 is completed, the first lifting assembly 32 is driven to extend the suction pipe 31 into the crucible 21, and the suction port of the suction pipe 31 is located below the liquid level of the melt. In this process, when the suction port of the suction pipe 31 comes into contact with the melt, the suction pipe 31 starts to suck the melt in the crucible 21. On the one hand, this ensures that the suction pump 33 starts to pump the melt at a high temperature after the start-up is completed, thereby preventing the pump body of the suction pump 33 from thermally deforming to a large extent, and prolonging the practical service life of the suction pump 33. The principle is as follows: the completion of the start-up of the suction pump 33 means that the suction pump 33 is warmed up, and after the warming up, the temperatures of the respective portions of the suction pump 33 are increased to some extent, so that a large temperature difference does not occur between the respective portions of the suction pump 33 in the process of sucking the melt, the difference in the thermal expansion amplitude of the respective portions of the suction pump 33 is small, and the thermal deformation amplitude of the body of the suction pump 33 is small. On the other hand, in these embodiments, when the suction port of the suction pipe 31 is close to the melt surface, the melt will have a wobbling wave, and the CCD image sensor is provided at a suitable position in the crystal growth furnace, so that the wobbling wave can be observed by the CCD image sensor, which can assist in determining the positional relationship of the suction port of the suction pipe 31 with respect to the melt surface.
Of course, in some embodiments, the first lifting assembly 32 may be driven to extend the suction pipe 31 into the crucible 21 after the power switch of the suction pump 33 is turned on and before the start of the suction pump 33 is completed, and the suction port of the suction pipe 31 may be located below the surface of the melt. Namely: the start-up process of the suction pump 33 and the lowering process of the first elevation assembly 32 are performed simultaneously. In other words, the warming-up process of the suction pump 33 is performed simultaneously with the lowering process of the first elevation assembly 32. Therefore, the heat engine operation room of the suction pump 33 can be completed before the suction pipe 31 is inserted into the crucible 21, so that the pump body of the suction pump 33 is prevented from generating large thermal deformation, and the actual service life of the suction pump 33 is prolonged; when the suction port of the suction pipe 31 is close to the liquid surface of the molten liquid, the fluctuation ripple of the molten liquid can be observed through a CCD image sensor, so that the position relation of the suction port of the suction pipe 31 relative to the liquid surface of the molten liquid can be judged in an auxiliary manner; in addition, the total time for executing the steps b and c can be shortened, and the time utilization rate can be improved.
Through the steps, the molten liquid in the crucible 21 can be pumped away and further separated from the crystal bar 60, and the phenomenon that the crystal bar 60 is contacted with the molten liquid and is fixedly connected together after the molten liquid is solidified, so that the crystal bar 60 cannot be used is avoided.
Referring to fig. 4, in some embodiments, after step c, the following step d is further included: the first elevating assembly 32 is driven to lift the suction pipe 31 to withdraw the suction pipe 31 out of the crucible 21. This prevents the suction pipe 31 from restricting the stroke of the crucible 21, and prevents the suction pipe 31 from obstructing the elevation of the crucible 21.
Referring to fig. 4, in some embodiments, after step c, step e is further included: the crucible 21 is raised until the bottom of the crucible 21 abuts the ingot 60. Therefore, the crucible 21 can support the ingot 60, and the ingot 60 can be prevented from falling to break the crucible 21.
When the bottom of the crucible 21 abuts against the ingot 60, the second lifting/lowering unit 22 needs to stop lifting the crucible 21, and the crucible 21 is held in a position abutting against the ingot 60 to support the ingot 60, and the crucible 21 is prevented from continuously rising to crush the ingot 60. To this end, in some embodiments, in step e, the method further comprises the step of: e1, when the weight sensor 2111 recognizes that the weight borne by the crucible shaft 211 changes, the second elevating assembly 22 stops elevating the crucible 21. Thus, when the weight detected by the weight sensor 2111 remains unchanged, it can be determined that the crucible 21 has not abutted against the ingot 60, and the second lifting and lowering assembly 22 can continue to lift the crucible 21; when the weight detected by the weight sensor 2111 changes, it can be determined that the crucible 21 abuts against the ingot 60 at this time, and the second elevating assembly 22 stops elevating the crucible 21.
Of course, referring to fig. 5, in some embodiments, step e may be arranged after step a and before step b, so that crucible 21 may hold ingot 60 before suction pipe 31 sucks the melt, thereby ensuring that ingot 60 does not fall off and crucible 21 is broken during the suction of the melt by suction pipe 31.
In some embodiments, in step b, further comprising the steps of: b1, driving the first lifting assembly 32 to move to the maximum position so as to move the suction port of the suction pipe 31 to the bottom of the melt. Thus, when the suction port of the suction pipe 31 moves to the bottom of the melt, the suction pump 33 is started to completely suck the melt in the crucible 21 through the suction pipe 31, thereby ensuring separation of the ingot 60 from the melt.
All possible combinations of the technical features of the above embodiments may not be described for the sake of brevity, but should be considered as within the scope of the present disclosure as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several implementation modes of the present application, and the description thereof is specific and detailed, but not construed as limiting the scope of the claims. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, and these are all within the scope of protection of the present application. Therefore, the protection scope of the present application shall be subject to the appended claims.
Claims (10)
1. A power-off protection method for a crystal growth furnace comprises a first lifting assembly (32) and a suction pump (33) which are electrically connected with a standby power supply (10), a crucible (21), and a crystal bar and a molten liquid which are positioned in the crucible (21); the method is characterized in that the power-off protection method of the crystal growth furnace comprises the following steps:
activating a backup power supply (10);
driving a first lifting assembly (32) to extend a suction pipe (31) into the crucible (21), and enabling a suction port of the suction pipe (31) to be positioned below the liquid level of the molten liquid;
the suction pump (33) is started to suck the melt in the crucible (21) through the suction pipe (31) to separate the ingot from the melt.
2. The power-off protection method of a crystal growth furnace according to claim 1, characterized by further comprising, after the step of pumping away the melt in the crucible (21) through the suction pipe (31) by activating the suction pump (33) to separate the ingot from the melt, the steps of: the first lifting component (32) is driven to drive the suction pipe (31) to ascend so as to enable the suction pipe (31) to exit the crucible (21).
3. The power-off protection method of a crystal growth furnace according to claim 2, characterized by further comprising, after the step of starting a suction pump (33) to suck the melt in the crucible (21) through a suction pipe (31) to separate the ingot from the melt, the steps of: and lifting the crucible (21) until the bottom of the crucible (21) is abutted against the crystal bar.
4. The power-off protection method of the crystal growth furnace according to claim 3, wherein the crystal growth furnace further comprises a second lifting assembly (22) electrically connected with a standby power supply (10), the second lifting assembly (22) is connected with the crucible (21) through a crucible shaft (211) to lift the crucible (21), a weight sensor (2111) is arranged on the crucible shaft (211), and in the step of lifting the crucible (21) until the bottom of the crucible (21) is abutted against the crystal rod, the method further comprises the steps of: when the weight sensor (2111) learns the weight change, the second lifting assembly (22) stops lifting the crucible (21).
5. The power-off protection method of a crystal growth furnace according to claim 1, characterized by further comprising, after the step of activating the backup power source (10) and before the step of driving the first elevating assembly (32) to extend the suction pipe (31) into the crucible (21) and to position the suction port of the suction pipe (31) below the liquid level of the melt, the steps of: and lifting the crucible (21) until the bottom of the crucible (21) is abutted against the crystal bar.
6. A crystal growing furnace for growing a crystal ingot, comprising:
a backup power supply (10);
a crucible mechanism (20) including a crucible (21) for containing the melt; and
and the suction mechanism (30) comprises a suction pipe (31), a first lifting component (32) and a suction pump (33) communicated with the suction pipe (31), the suction pump (33) is electrically connected with the first lifting component (32) and the standby power supply (10), and the first lifting component (32) is used for driving the suction pipe (31) to lift so as to stretch into or withdraw from the crucible (21).
7. The crystal growth furnace of claim 6, further comprising a frame (40), wherein the backup power source (10), the crucible mechanism (20), and the suction mechanism (30) are mounted to the frame (40), wherein the first lifting assembly (32) comprises a first base (321) and a first connecting plate (322), wherein the first base (321) is fixedly connected to the frame (40), wherein one side of the first connecting plate (322) is slidably connected to the first base (321), and wherein the other side of the first connecting plate (322) is fixedly connected to the suction tube (31).
8. The crystal growth furnace according to claim 7, further comprising a limit switch electrically connected to the backup power source (10), the limit switch turning on or off a control circuit to stop the upward movement of the first connection plate (322) when the first connection plate (322) collides against the limit switch.
9. The crystal growth furnace according to claim 7, characterized in that the bottom of the crucible (21) is provided with a crucible shaft (211), the crucible mechanism (20) further comprises a second lifting assembly (22), the second lifting assembly (22) comprises a second base (221) and a second connecting plate (222), the second base (221) is fixedly connected to the frame (40), one side of the second connecting plate (222) is slidably connected to the second base (221), and the other side of the second connecting plate (222) is fixedly connected to the crucible shaft (211).
10. The crystal growth furnace according to claim 9, characterized in that a weight sensor (2111) is provided on the crucible shaft (211), the weight sensor (2111) being adapted to detect the weight borne by the crucible shaft (211).
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115874269A (en) * | 2023-03-08 | 2023-03-31 | 浙江求是半导体设备有限公司 | Monocrystalline silicon manufacturing apparatus and control method thereof |
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| JPS62283895A (en) * | 1986-06-02 | 1987-12-09 | Mitsubishi Metal Corp | Single crystal pulling up device |
| JPH04362032A (en) * | 1991-06-11 | 1992-12-15 | Nec Corp | Method for removing raw material remaining in crucible |
| KR20170031885A (en) * | 2015-09-14 | 2017-03-22 | 주식회사 엘지실트론 | Ingot grower |
| KR102271455B1 (en) * | 2020-09-24 | 2021-07-01 | 한화솔루션 주식회사 | Pre melter for melting silicon before supplying to main crucible and method for controlling the same |
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| JPS62283895A (en) * | 1986-06-02 | 1987-12-09 | Mitsubishi Metal Corp | Single crystal pulling up device |
| JPH04362032A (en) * | 1991-06-11 | 1992-12-15 | Nec Corp | Method for removing raw material remaining in crucible |
| KR20170031885A (en) * | 2015-09-14 | 2017-03-22 | 주식회사 엘지실트론 | Ingot grower |
| KR102271455B1 (en) * | 2020-09-24 | 2021-07-01 | 한화솔루션 주식회사 | Pre melter for melting silicon before supplying to main crucible and method for controlling the same |
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| CN115874269A (en) * | 2023-03-08 | 2023-03-31 | 浙江求是半导体设备有限公司 | Monocrystalline silicon manufacturing apparatus and control method thereof |
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| CN115652409B (en) | 2023-09-05 |
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