CN115650572B - Quartz ring one-step molding processing equipment for semiconductor - Google Patents
Quartz ring one-step molding processing equipment for semiconductor Download PDFInfo
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- CN115650572B CN115650572B CN202211318154.6A CN202211318154A CN115650572B CN 115650572 B CN115650572 B CN 115650572B CN 202211318154 A CN202211318154 A CN 202211318154A CN 115650572 B CN115650572 B CN 115650572B
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- 239000010453 quartz Substances 0.000 title claims abstract description 52
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 52
- 239000004065 semiconductor Substances 0.000 title claims abstract description 15
- 238000000465 moulding Methods 0.000 title claims description 8
- 238000005520 cutting process Methods 0.000 claims abstract description 34
- 230000007246 mechanism Effects 0.000 claims abstract description 14
- 238000003825 pressing Methods 0.000 claims description 33
- 230000002265 prevention Effects 0.000 claims description 10
- 239000007788 liquid Substances 0.000 claims description 4
- 230000001737 promoting effect Effects 0.000 claims description 2
- 238000001125 extrusion Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 9
- 238000009434 installation Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 239000002173 cutting fluid Substances 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000000407 epitaxy Methods 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000005574 cross-species transmission Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The invention relates to semiconductor equipment and discloses quartz ring one-step forming processing equipment for semiconductors, which comprises a machine case, a lifting head, a rotating main shaft and a ring cutting head, wherein the lifting head is arranged in the machine case in a lifting manner, the rotating main shaft is rotatably arranged on the lifting head, the ring cutting head is fixed on the rotating main shaft, the ring cutting head comprises a connecting section, an outer ring cutter and an inner ring cutter, the connecting section is connected with the rotating main shaft, the outer ring cutter and the inner ring cutter are fixed with the connecting section, and the outer ring cutter and the inner ring cutter are concentrically sleeved and distributed; according to the double-cutter-head type annular cutter head with the inner cutters and the outer cutters concentrically distributed, a quartz ring with good concentricity can be obtained through one-time processing, so that the processing precision of the quartz ring is improved, the processing efficiency of the quartz ring is improved, and the annular cutter head can be conveniently and rapidly disassembled by the locking mechanism in a linkage mode, so that the replacement efficiency of the annular cutter head is improved.
Description
Technical Field
The invention relates to the field of semiconductor equipment, in particular to one-step molding processing equipment and processing technology of a quartz ring for a semiconductor.
Background
In the chip manufacturing process, the epitaxy and diffusion processes are mainly performed, and the epitaxy and diffusion processes require epitaxy equipment and diffusion equipment, among which a large number of quartz components are applied. In semiconductor devices, the accuracy requirements for quartz parts are very high, otherwise the processing accuracy of the chip is greatly affected.
The types of quartz parts comprise a quartz ring, a quartz bracket, a quartz dome, a quartz fin and the like, wherein for the processing of the quartz ring, a quartz cylinder is mainly cut out, then the quartz cylinder is cut out for the second time, the central part of the quartz cylinder is removed to obtain a quartz tubular structure, and then a cutter is possibly cut in the transverse direction, so that the quartz tubular structure is decomposed into a single quartz ring.
Disclosure of Invention
In order to improve the processing efficiency of the quartz ring, a first object of the invention is to provide a one-step molding processing device for the quartz ring for semiconductors.
The invention provides one-step molding processing equipment for a quartz ring for a semiconductor, which adopts the following technical scheme:
the utility model provides a quartz ring one shot forming processing equipment for semiconductor, includes quick-witted case, lift installs in the quick-witted incasement lift head, rotates the rotatory main shaft of installing on the lift head, be fixed in rotatory epaxial ring cutter head, ring cutter head is including being used for the linkage segment that is connected with rotatory main shaft, with linkage segment looks fixed outer ring sword and interior ring sword, be concentric ring cover between outer ring sword and the interior ring sword and establish the distribution.
Through adopting above-mentioned technical scheme, when needing to process quartz ring, lift bandeau movable ring cutter head descends to contact with the quartz block, at the in-process of contact, because the annular cutter head has inner ring sword and the outer ring sword that are concentric ring distribution, consequently in the in-process that annular cutter head descends, can cut out quartz ring's shape on the quartz block, only need follow horizontal one again and cut the sword afterwards, can obtain quartz ring, the annular cutter head of this kind of structure can only carry out clamping once, and only need cut twice just can obtain quartz ring, consequently can reduce quartz ring's processing step, improve quartz ring's machining efficiency. And the device can achieve the purpose of completing processing by adding the transverse cutting blade and clamping only once, so that the processing precision of the quartz ring can be improved.
Optionally, the length of the inner ring cutter is greater than the length of the outer ring cutter.
Through adopting above-mentioned technical scheme, set up the length of interior cutting ring to be greater than outer loop sword for at the in-process of processing, interior cutting ring can contact with the quartz block earlier, and along with the cutting of interior cutting ring is deep, the cutting position of interior cutting ring to the external cutting ring has the positioning action, makes outer cutting ring when cutting the quartz block, can keep the concentricity with interior cutting ring, thereby further improves quartz ring's machining precision.
Optionally, the linkage segment is hollow form, the liquid cutting mouth that switches on linkage segment and inner ring sword is seted up to the junction between linkage segment and the inner ring sword, set up the overflow hole that extends and switches on the inner chamber of inner ring sword and outer ring sword along the axial of inner ring sword on the lateral wall of inner ring sword.
By adopting the technical scheme, the connecting section is hollow, so that cutting fluid can flow in the inner ring cutter head in the process of cutting the quartz block, and the inner ring cutter can be lubricated in the process of cutting the quartz block by the inner ring cutter; meanwhile, the overflow holes on the inner ring cutter can overflow the cutting fluid, so that the outer ring cutter can be lubricated in the process of cutting the quartz block, the probability of cracking of the quartz block in the cutting process is reduced, and the machining precision is further improved.
Optionally, a connecting sleeve is integrally arranged on the rotary main shaft, a plug-in cavity for inserting the connecting section of the annular cutter head is formed in the center of the connecting sleeve, and a locking mechanism for fixing the connecting section is arranged on the connecting sleeve.
Through adopting above-mentioned technical scheme, the adapter sleeve is used for supplying the linkage segment grafting of ring cutter head to carry out guiding and positioning to the installation of ring cutter head, make ring cutter head can install more convenient and fast on the rotating main shaft, and then can fix ring cutter head and rotating main shaft with the help of locking mechanical system, thereby realize the transmission of moment, in order to conveniently cut the quartz block.
Optionally, the locking piece groove has been seted up on the inner wall of adapter sleeve, locking mechanism is including installing in the elastic component in locking piece inslot, installing in the locking piece inslot and forming extruded locking piece to the elastic component, set up the locking groove of position and locking piece groove one-to-one on the lateral wall of linkage segment, the locking piece is at the order of elastic component lower part embedding locking inslot.
Through adopting above-mentioned technical scheme, when the linkage segment of ring cutter head inserts in the adapter sleeve to make shrink piece groove and locking groove align, the locking piece imbeds in the locking groove under the promotion of elastic component, because the flexible direction of locking piece can only follow the diameter direction of adapter sleeve under the restraint of adapter sleeve, consequently the locking piece can restrict ring cutter head and produce axial rotation and axial motion on the adapter sleeve, thereby reaches the purpose that carries out the fixation with ring cutter head and rotatory main shaft.
Optionally, open the piece groove has been seted up on the lateral wall of adapter sleeve, open the piece mouth of opening of piece groove and locking groove intercommunication on the inner wall of opening the piece groove, locking mechanical system is still including rotating the installation in opening the piece, telescopic mounting in opening the pressing block of piece inslot, the locking piece has seted up the opening groove towards the surface of opening piece mouth one side, open the one end of piece and open the inslot and contradict on opening the inner wall that the piece is close to elastic component one side through opening the piece mouth embedding, pressing block supports and presses and be located the one end of opening the piece inslot.
Through adopting above-mentioned technical scheme, because the one end of opening the piece is embedded in opening the inslot on the locking piece and the other end is pressed by the butt of pressing the piece, so the pressing piece and the opening piece both are the switch to the locking piece, also be anti-disengaging structure, namely when the ring cutting tool bit is not installed, the elastic force that the elastic component applyed to the locking piece is passed to the pressing piece through opening the piece, realize the constraint to the locking piece with the help of the pressing piece, prevent that the locking piece from falling from the piece inslot that contracts, on the other hand, when the ring cutting tool bit is connected, through bulldozing the pressing piece, can pry the locking piece towards the piece inslot shrink that contracts by the opening piece as the lever, thereby make the linkage segment can stretch into in the adapter sleeve and realize the alignment between piece inslot and the locking groove, and when needing to demolish the ring cutting tool bit, also with the help of bulldozing the pressing piece, can be very conveniently follow the rotation main shaft with the ring cutting tool bit to install and demolish with the ring cutting tool bit, thereby accelerate ring cutting tool bit's installation and demolish.
Optionally, the locking mechanical system still includes to rotate and installs in opening the piece inslot and lie in pressing the piece and opening the piece groove between the tank bottom in piece groove, be provided with the shrink proof block on the lateral wall of stopping the piece, the piece groove that contracts has been seted up towards opening the surface of piece mouth one side to the locking piece, the cover is equipped with the application of force in shrink proof block and drives to stop the piece and rotate in order to promote shrink proof block through opening the torsion piece that the piece mouth embedded contracted the piece groove on the piece, simultaneously be provided with the linkage structure that is used for promoting shrink proof block to roll out from contracting the piece groove on pressing the piece.
In order to reduce the probability that the locking block is separated from the locking groove due to centrifugal force in the rotating process of the rotating main shaft, by adopting the technical scheme, after the locking block is embedded into the locking groove on the connecting section, the stop column can rotate under the driving of the torsion piece, so that the anti-shrinkage block is enabled to be embedded into the shrinkage block groove on the locking block from the direction perpendicular to the depth of the shrinkage block groove to restrain the movement of the locking block, and therefore the locking block is not easy to separate from the connecting section, and the safety of the annular cutter head during processing is ensured.
Optionally, the linkage structure includes being fixed in on the pressing piece and the corresponding linkage piece of place and shrink-proof block, the one end of linkage piece towards shrink-proof block is provided with the inclined pushing surface, shrink-proof block is provided with the inclined plane that is used for with inclined pushing surface matched with towards one side of linkage piece, inclined pushing surface contacts with inclined plane, just the tip that the linkage piece is furthest apart from the pressing piece is located between shrink-proof block and the locking piece.
Through adopting above-mentioned technical scheme, when needing to install or dismantle the circular cutting tool bit, bulldoze and press the briquetting, because the linkage piece is in contact with shrink-proof piece, so press the briquetting and in the in-process that is pressed, can push out the rotation of stopping the position post, make shrink-proof piece break away from the locking piece, press the briquetting simultaneously can apply pulling force to the locking piece with the help of opening the piece, draw into shrink piece inslot with the locking piece, and then make the linkage segment can insert the adapter sleeve or take out from in the adapter sleeve. Meanwhile, after the annular cutter head is assembled, the pressing block is released, and at the moment, the elastic piece and the torsion piece drive the locking block and the stopping column to reset respectively, so that the locking block is exposed out of the block shrinking groove again, and the anti-shrinking block is embedded into the block shrinking groove on the locking block again, so that the locking block is locked again.
In summary, the double-cutter-head type annular cutter heads with the inner cutters and the outer cutters concentrically distributed can obtain a quartz ring with good concentricity through one-time processing, so that the improvement of the processing precision of the quartz ring is realized, the improvement of the processing efficiency of the quartz ring is realized, and the annular cutter heads can be conveniently and rapidly disassembled by the locking mechanism in the linkage mode, so that the replacement efficiency of the annular cutter heads is improved.
Drawings
FIG. 1 is an overall block diagram of the present invention;
FIG. 2 is a schematic cross-sectional view of a rotary spindle and a cyclocutter head of the present invention;
FIG. 3 is an illustration of the structure of the locking mechanism of the present invention;
FIG. 4 is a schematic view of the structure of the stopper of the present invention.
Reference numerals illustrate:
1. A chassis; 2. a lifting head; 3. rotating the main shaft; 31. connecting sleeves; 311. a locking piece groove; 312. a block opening groove; 313. a block opening; 32. a plug cavity; 4. circular cutting tool bit; 41. a connection section; 411. a locking groove; 42. an outer ring cutter; 43. an inner ring cutter; 44. a liquid cutting port; 45. a spillover hole; 5. a locking mechanism; 51. an elastic member; 52. a locking block; 521. opening the groove; 522. a shrinking block groove; 53. opening the block; 54. pressing the blocks; 541. a screw; 55. a stop post; 551. shrink-proof blocks; 552. a torsion member; 553. an inclined abutting surface; 6. a linkage block; 61. pushing the surface obliquely.
Detailed Description
The invention is described in further detail below with reference to fig. 1 to 4.
The embodiment of the application discloses one-step molding processing equipment for a quartz ring for a semiconductor, which referring to fig. 1, comprises a machine case 1, a lifting head 2, a rotary main shaft 3 and a ring cutter head 4, wherein the lifting head 2 is lifted and installed in the machine case 1 by a screw rod sliding block mechanism, and the rotary main shaft 3 is rotatably installed on the lifting head 2 and can be rotatably driven by a power source such as a motor.
Referring to fig. 2, the annular cutter head 4 includes three parts, namely a connecting section 41, an outer annular cutter 42 and an inner annular cutter 43, the connecting section 41 and the outer annular cutter 42 are integrally and coaxially fixed, the inner annular cutter 43 is positioned inside the outer annular cutter 42, the inner annular cutter 43 and the outer annular cutter 42 are concentrically distributed, the inner annular cutter 43 is integrally fixed with the connecting section 41, and meanwhile, the length of the inner annular cutter 43 is longer than that of the outer annular cutter 42. In order to facilitate the supply of cutting fluid, the connecting section 41 is provided with a hollow structure, a fluid cutting port 44 for conducting the connecting section 41 and the inner ring cutter 43 is formed at the connecting part between the connecting section 41 and the inner ring cutter 43, and a fluid overflow hole 45 which extends along the axial direction of the inner ring cutter 43 and conducts the inner cavities of the inner ring cutter 43 and the outer ring cutter 42 is formed on the side wall of the inner ring cutter 43.
In order to facilitate the installation of the annular cutter head 4, a connecting sleeve 31 is fixed at the lower end of the rotary main shaft 3, a splicing cavity 32 is formed in the center of the connecting sleeve 31, and when in installation, the connecting section 41 of the annular cutter head 4 is aligned with the splicing cavity 32 on the connecting sleeve 31 and is installed, and meanwhile, the connecting sleeve 31 is fixed by means of a locking mechanism 5 arranged on the connecting sleeve 31.
Referring to fig. 2 and 3, the locking mechanism 5 is provided with at least two groups, and is symmetrically disposed on two sides of the connecting sleeve 31, the locking mechanism 5 specifically includes an elastic member 51, a locking block 52, an opening block 53, a pressing block 54 and a stopping post 55, locking block grooves 311 are symmetrically formed on inner walls on two sides of the connecting sleeve 31, the elastic member 51 is a spring, and the elastic member 51 is mounted in the locking block grooves 311. The locking block 52 is also mounted in the locking block groove 311 and presses the elastic member 51, so that the elastic member 51 applies an elastic pushing force to the locking block 52 toward the center of the insertion cavity 32 of the coupling sleeve 31.
In order to facilitate the installation of the opening block 53 and the pressing block 54, an opening block groove 312 is formed in the outer side wall of the connecting sleeve 31, the opening block groove 312 is in a step shape, and meanwhile, the opening block groove 312 and the locking block groove 311 are opened to form an opening block opening 313, the middle part of the opening block 53 is rotatably installed in the opening block opening 313, an opening groove 521 is formed in the surface of the locking block 52, which faces the opening block opening 313, and meanwhile, one end of the opening block 53 is embedded into the opening groove 521 through the opening block opening 313 and is abutted against the inner wall, which is close to the elastic piece 51, of the opening block 521.
The stop post 55 is rotatably installed in the opening block groove 312, an anti-shrinkage block 551 is integrally arranged on the side wall of the stop post 55, a torsion piece 552 is sleeved on the stop post 55, the torsion piece 552 selects a torsion spring, one end of the torsion piece 552 is abutted against the surface of the anti-shrinkage block 551 on the side opposite to the locking block 52, the anti-shrinkage block 551 is further driven to rotate towards the locking block 52, meanwhile, a shrinkage block groove 522 is formed in the surface of the locking block 52 on the side facing the opening block opening 313, and the anti-shrinkage block 551 is embedded into the shrinkage block groove 522 under the driving of the torsion piece 552, so that the movement of the locking block 52 is restrained.
The shape of the pressing block 54 is a step block matched with the block opening groove 312, the pressing block 54 is installed in the block opening groove 312 of the connecting sleeve 31 through two screws 541, and the pressing block 54 is not pressed by the two screws 541, so that the pressing block 54 can stretch in the block opening groove 312. The pressing block 54 is arranged at one end of the opening block 53 in the opening block groove 312 in a abutting mode, at this time, the opening block 53 serves as a lever between the pressing block 54 and the locking block 52, when the pressing block 54 is pressed down, the locking block 52 can be pulled into the locking block groove 311 through the opening block 53, so that the connecting section 41 of the annular cutter head 4 can be inserted into the connecting sleeve 31, and meanwhile, a linkage structure for linking the pressing block 54 with the stop column 55 is arranged on the pressing block 54.
Referring to fig. 3 and 4, the linkage structure specifically includes a linkage block 6, and the linkage block 6 is integrally fixed to a surface of the pressing block 54 facing the side of the stopper post 55 and corresponds to a position where the shrinkage preventing block 551 is located. In order to facilitate the cooperation of the linkage block 6 and the shrink prevention block 551, an inclined pushing surface 61 is arranged at one end of the linkage block 6 facing the shrink prevention block 551, an inclined abutting surface 553 for being matched with the inclined pushing surface 61 is arranged at one side of the shrink prevention block 551 facing the linkage block 6, meanwhile, the inclined pushing surface 61 is contacted with the inclined abutting surface 553, and the end of the linkage block 6 farthest from the pressing block 54 is positioned between the shrink prevention block 551 and the locking block 52, so that when the pressing block 54 is pressed down, the thrust direction of the linkage block 6 applied to the shrink prevention block 551 is opposite to the locking block 52, and the shrink prevention block 551 can unlock the locking block 52.
Referring to fig. 2, in order to fix the locking piece 52 to the annular cutter head 4, locking slots 411 are formed in the connection section 41, the locking piece slots 311 are in one-to-one correspondence with each other, when the annular cutter head is mounted, the compression block 54 is pressed down first to unlock the locking piece 52, the locking piece 52 is retracted into the locking piece slots 311, then the connection section 41 is inserted into the insertion cavity 32 of the connection sleeve 31, at this time, the locking piece slots 311 are aligned with the locking slots 411, after the compression block 54 is released, the locking piece 52 is inserted into the locking slots 411 under the pushing of the elastic piece 51, and the compression block 551 locks the locking piece 52, so that the annular cutter head 4 and the rotary spindle 3 are fixed.
The embodiment of the application provides a quartz ring one-step forming processing device for a semiconductor, which comprises the following implementation principles: during processing, the lifting head 2 drives the annular cutting tool bit 4 to move downwards to cut quartz blocks, and the inner annular cutter 43 and the outer annular cutter 42 are concentrically distributed, so that the inner annular cutter 43 has a positioning and alignment function on the outer annular cutter 42 in the cutting process, and a quartz ring with higher concentricity can be obtained through one-time clamping, so that the processing efficiency and the processing precision are improved.
The above embodiments are not intended to limit the scope of the present invention, so: all equivalent changes in structure, shape and principle of the invention should be covered in the scope of protection of the invention.
Claims (3)
1. The utility model provides a quartz ring one shot forming processing equipment for semiconductor, includes quick-witted case (1), goes up and down to install lift head (2) in quick-witted case (1), rotates rotatory main shaft (3) of installing on lift head (2), is fixed in ring cutter head (4) on rotatory main shaft (3), its characterized in that: the circular cutting tool bit (4) comprises a connecting section (41) connected with a rotating main shaft (3), an outer ring cutter (42) fixed with the connecting section (41) and an inner ring cutter (43), wherein the outer ring cutter (42) and the inner ring cutter (43) are concentrically sleeved and distributed, the rotating main shaft (3) is integrally provided with a connecting sleeve (31), the center of the connecting sleeve (31) is provided with an inserting cavity (32) for the connecting section (41) of the circular cutting tool bit (4), the connecting sleeve (31) is provided with a locking mechanism (5) for fixing the connecting section (41), the inner wall of the connecting sleeve (31) is provided with a locking piece groove (311), the locking mechanism (5) comprises an elastic piece (51) arranged in the locking piece groove (311), locking pieces (52) arranged in the locking piece groove (311) and forming extrusion, the side wall of the connecting section (41) is provided with a locking groove (411) corresponding to the locking piece groove (311), the locking pieces (52) are driven to be embedded into the side wall of the connecting sleeve (312) in one-to-one mode, the inner wall of the opening block groove (312) is provided with an opening block opening (313) which is used for communicating the opening block groove (312) with the locking groove (411), the locking mechanism (5) further comprises an opening block (53) which is rotatably arranged in the opening block opening (313), a pressing block (54) which is telescopically arranged in the opening block groove (312), the surface of the locking block (52) towards one side of the opening block opening (313) is provided with an opening block (521), one end of the opening block (53) is embedded into the opening block (521) through the opening block opening (313) and is abutted against the inner wall of one side of the opening block (521) close to the elastic piece (51), the pressing block (54) is abutted against one end of the opening block (53) which is positioned in the opening block groove (312), the locking mechanism (5) further comprises a stop column (55) which is rotatably arranged in the opening block groove (312) and is positioned between the pressing block (54) and the bottom of the opening block groove (312), the side wall of the stop column (55) is provided with an anti-shrinkage block (551), the locking block (52) is embedded into the opening block (522) through the opening block (55) and the anti-shrinkage block opening block (522) is urged to be contracted towards one side of the opening block (55), simultaneously be provided with on the pressing block (54) and be used for promoting the linkage structure that shrink prevention piece (551) rotated out from shrink piece groove (522), the linkage structure is including being fixed in on pressing block (54) and the corresponding linkage piece (6) of place and shrink prevention piece (551), the one end of linkage piece (6) towards shrink prevention piece (551) is provided with oblique pushing face (61), one side towards linkage piece (551) is provided with the oblique face (553) that is used for with oblique pushing face (61) matched with, oblique pushing face (61) and oblique face (553) contact, just the tip that link piece (6) is located between shrink prevention piece (551) and locking piece (52) that press briquetting (54) are furthest apart from.
2. The apparatus for one-time molding of a quartz ring for a semiconductor according to claim 1, wherein: the length of the inner ring cutter (43) is longer than that of the outer ring cutter (42).
3. The one-time molding processing apparatus for a quartz ring for a semiconductor according to claim 1 or 2, wherein: the connecting section (41) is hollow, a liquid cutting port (44) for conducting the connecting section (41) and the inner ring cutter (43) is formed in the connecting position between the connecting section (41) and the inner ring cutter (43), and a liquid overflow hole (45) which extends along the axial direction of the inner ring cutter (43) and conducts the inner cavities of the inner ring cutter (43) and the outer ring cutter (42) is formed in the side wall of the inner ring cutter (43).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211318154.6A CN115650572B (en) | 2022-10-26 | 2022-10-26 | Quartz ring one-step molding processing equipment for semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211318154.6A CN115650572B (en) | 2022-10-26 | 2022-10-26 | Quartz ring one-step molding processing equipment for semiconductor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115650572A CN115650572A (en) | 2023-01-31 |
| CN115650572B true CN115650572B (en) | 2024-05-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211318154.6A Active CN115650572B (en) | 2022-10-26 | 2022-10-26 | Quartz ring one-step molding processing equipment for semiconductor |
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| Country | Link |
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| CN (1) | CN115650572B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201157922Y (en) * | 2008-04-23 | 2008-12-03 | 浙江升华强磁材料有限公司 | Apparatus for processing Nd-Fe-B big ring-shaped material |
| CN214521168U (en) * | 2020-12-25 | 2021-10-29 | 武汉市金诚瑞达石材有限公司 | Quick tool changing device of bridge cutting machine |
-
2022
- 2022-10-26 CN CN202211318154.6A patent/CN115650572B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201157922Y (en) * | 2008-04-23 | 2008-12-03 | 浙江升华强磁材料有限公司 | Apparatus for processing Nd-Fe-B big ring-shaped material |
| CN214521168U (en) * | 2020-12-25 | 2021-10-29 | 武汉市金诚瑞达石材有限公司 | Quick tool changing device of bridge cutting machine |
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| Publication number | Publication date |
|---|---|
| CN115650572A (en) | 2023-01-31 |
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