CN115650572A

CN115650572A - Quartz ring one-step forming processing equipment for semiconductor

Info

Publication number: CN115650572A
Application number: CN202211318154.6A
Authority: CN
Inventors: 王卫良; 李士昌; 刘超平; 蒋建新; 戴瀚焘
Original assignee: Shengjisheng Precision Manufacturing Shaoxing Co ltd
Current assignee: Shengjisheng Precision Manufacturing Shaoxing Co ltd
Priority date: 2022-10-26
Filing date: 2022-10-26
Publication date: 2023-01-31
Anticipated expiration: 2042-10-26
Also published as: CN115650572B

Abstract

The invention relates to semiconductor equipment and discloses quartz circular ring one-step forming processing equipment for a semiconductor, which comprises a case, a lifting head arranged in the case in a lifting way, a rotating main shaft rotationally arranged on the lifting head and a circular cutter head fixed on the rotating main shaft, wherein the circular cutter head comprises a connecting section connected with the rotating main shaft, an outer circular cutter and an inner circular cutter, wherein the outer circular cutter and the inner circular cutter are sleeved and distributed in a concentric ring manner; the double-cutter-head type circular cutting head with the inner and outer annular cutters concentrically distributed can obtain a quartz circular ring with better concentricity through one-time processing, thereby not only improving the processing precision of the quartz circular ring, but also improving the processing efficiency of the quartz circular ring, and the linkage type locking mechanism can conveniently and quickly disassemble and assemble the circular cutting head, thereby improving the replacement efficiency of the circular cutting head.

Description

Quartz ring one-step forming processing equipment for semiconductor

Technical Field

The invention relates to the field of semiconductor equipment, in particular to quartz circular ring one-step forming processing equipment for a semiconductor and a processing technology thereof.

Background

In the chip manufacturing process, mainly epitaxial and diffusion processes are performed, and the apparatuses required for the epitaxial and diffusion processes are epitaxial apparatuses and diffusion apparatuses, among which a large number of quartz parts are applied. In a semiconductor device, a precision requirement for a quartz member is very high, which otherwise has a great influence on a processing precision of a chip.

The types of quartz parts include quartz rings, quartz supports, quartz domes, quartz fins and the like, wherein for the processing of the quartz rings, a quartz cylinder is cut out firstly, then the quartz cylinder is cut out for the second time, the central part of the quartz cylinder is removed to obtain a quartz tubular structure, and then a cutter is cut along the transverse direction possibly to decompose the quartz tubular structure into a single quartz ring.

Disclosure of Invention

In order to improve the processing efficiency of the quartz circular ring, the invention aims to provide a one-step forming processing device for the quartz circular ring for the semiconductor.

The invention provides a quartz ring one-step forming processing device for a semiconductor, which adopts the following technical scheme:

the utility model provides a quartzy ring one shot forming processing equipment for semiconductor, includes quick-witted case, lift installation in quick-witted incasement lift head, rotate the rotary main shaft who installs on the lift head, be fixed in the epaxial circular cutter head of rotation, the circular cutter head is including being used for the linkage segment that is connected with rotary main shaft, outer loop sword and the interior cutting ring fixed with the linkage segment, it establishes the distribution to be concentric ring cover between outer cutting ring and the interior cutting ring.

Through adopting above-mentioned technical scheme, when needs processing quartz ring, the lift area moves ring cutter head and descends, and contact with the quartz block, at the in-process of contact, because the ring cutter head has interior cutting ring and the outer cutting ring that is concentric ring distribution, consequently at the descending in-process of ring cutter head, can cut out the shape of quartz ring on the quartz block, only need follow horizontal re-cutting sword afterwards, can obtain quartz ring, the ring cutter head of this kind of structure, can only carry out the clamping, and only need twice cutting just can obtain quartz ring, consequently, can reduce quartz ring's processing step, improve quartz ring's machining efficiency. And because the equipment can realize the purpose of finishing the processing only by clamping once by adding the transverse cutting blade, the processing precision of the quartz ring can be improved.

Optionally, the length of the inner cutting ring is greater than that of the outer cutting ring.

Through adopting above-mentioned technical scheme, the length setting with the inner ring sword must be greater than the outer cutting ring for at the in-process of processing, the inner ring sword can contact with quartz piece earlier, and along with the cutting of inner ring sword is deepened, the cutting position of outer cutting ring sword of inner ring sword has the positioning action, makes the outer cutting ring sword when cutting quartz piece, can keep and the inner ring sword between the concentricity, thereby further improves the machining precision of quartz ring.

Optionally, the connecting section is hollow, a liquid cutting opening for communicating the connecting section with the inner ring cutter is formed in a connecting portion between the connecting section and the inner ring cutter, and a liquid overflowing hole which extends along the axial direction of the inner ring cutter and communicates inner cavities of the inner ring cutter and the outer ring cutter is formed in the side wall of the inner ring cutter.

By adopting the technical scheme, the connecting section is hollow, so that the cutting fluid can flow in the ring cutting tool bit firstly in the process of cutting the quartz block, and the inner ring cutter can be lubricated in the process of cutting the quartz block by the inner ring cutter; meanwhile, the overflow hole in the inner cutting ring can allow cutting fluid to overflow, so that the outer cutting ring can be lubricated in the process of cutting the quartz block, the probability of cracking of the quartz block in the cutting process is reduced, and the processing precision is further improved.

Optionally, a connection sleeve is integrally arranged on the rotating main shaft, an insertion cavity for inserting the connection section of the circular cutting head is formed in the center of the connection sleeve, and a locking mechanism for fixing the connection section is arranged on the connection sleeve.

Through adopting above-mentioned technical scheme, the adapter sleeve is used for supplying the linkage segment grafting of circular cutting tool bit to guide the location to the installation of circular cutting tool bit, make the circular cutting tool bit can install on the rotating main shaft more convenient and fast ground, and then can fix circular cutting tool bit and rotating main shaft with the help of locking mechanical system, thereby realize the transmission of moment, in order to conveniently cut the quartz piece.

Optionally, a locking block groove has been seted up on the inner wall of adapter sleeve, locking mechanical system is including installing in the elastic component of locking block inslot, installing in the locking block inslot and to the elastic component formation extruded locking block, set up the locking groove of position and locking block groove one-to-one on the lateral wall of linkage segment, the locking block imbeds locking inslot at the lower part of driving about of elastic component.

Through adopting above-mentioned technical scheme, in the linkage segment inserts in the connecting sleeve when the circular cutting head to make the groove of contracting the piece and locking the inslot relatively punctual, the locking piece imbeds locking inslot under the promotion of elastic component, because the flexible direction of locking piece can only follow the diameter direction of adapter sleeve under the restraint of adapter sleeve, consequently the locking piece can restrict the circular cutting head and produce axial rotation and axial motion on the connecting sleeve, thereby reach and carry out fixed purpose with circular cutting head and rotating main shaft.

It is optional, the opening groove has been seted up on the lateral wall of adapter sleeve, set up the opening mouth with opening groove and locking groove intercommunication on the inner wall in opening groove, locking mechanism still installs in the intraoral piece of opening, the flexible pressing block of installing in opening the groove including rotating, the locking piece has been seted up towards the surface of opening mouth one side and has been opened the groove, the one end of opening the piece is opened the inslot and is contradicted on the inner wall that the groove is close to elastic component one side is being opened in opening the embedding of opening mouth, pressing block supports presses and is served at the piece of opening that is located opening groove.

Through adopting above-mentioned technical scheme, because the one end embedding of opening the piece is in the groove of opening on the locking piece and the other end is pressed according to supporting of pressing the piece, so press the piece and open the piece and not only be the switch to the locking piece this moment, also be anti-disengaging structure, namely, when the circular cutting tool bit is not installed, the elasticity that the elastic component applyed to the locking piece transmits for pressing the piece through opening the piece, realize the restraint to the locking piece with the help of pressing the piece, prevent that the locking piece from dropping from the necking down inslot, on the other hand, when needs connect the circular cutting tool bit, through bulldozing and pressing the piece, with the help of opening the piece as the lever, can pry the locking piece and contract towards necking down inslot, thereby make the linkage segment can stretch into in the connecting sleeve and realize the alignment between necking down groove and the locking groove, and when needs demolish the circular cutting tool bit, also with the help of bulldozing and pressing the piece, can very conveniently pull down the circular cutting tool bit from the rotating spindle, thereby accelerate the installation and the dismantlement process of circular cutting tool bit.

Optionally, locking mechanical system still including rotate install in the groove of starting block and be located the position post that ends between the tank bottom according to the pressure piece and the groove of starting block, it prevents the piece that contracts to end to be provided with on the lateral wall of position post, the locking piece has seted up the piece groove that contracts towards the surface of opening one side of starting block mouth, the cover is equipped with the application of force in preventing contracting the piece and order about the position post rotation in order to impel to prevent contracting the piece through the torsion piece that the piece groove that contracts of starting block mouth embedding, simultaneously be provided with on the pressure piece and be used for impel to prevent contracting the linkage structure that the piece rolled out from the piece groove that contracts.

In order to reduce the probability that the locking block is disengaged from the locking groove due to centrifugal force in the rotating process of the rotating main shaft, by adopting the technical scheme, after the locking block is embedded into the locking groove on the connecting section, the stop column can rotate under the driving of the torsion piece, so that the anti-shrinkage block is enabled to be embedded into the shrinkage block groove on the locking block from the direction perpendicular to the depth of the shrinkage block groove to restrict the movement of the locking block, and therefore the locking block is not easy to disengage from the connecting section, and the safety of the circular cutting tool bit during machining is ensured.

Optionally, the linkage structure is including being fixed in on the pressing block and the position and the corresponding linkage piece of the piece that contracts of preventing, the one end that the linkage piece was prevented contracting towards the piece is provided with the inclined plane of pushing away, one side of the piece that contracts of preventing towards the linkage piece is provided with and is used for and pushes away face matched with inclined to one side to support the face, the inclined plane of pushing away contacts with inclined to one side, just the linkage piece is located between the piece that contracts of preventing and the locking piece apart from the tip that the pressing block is farthest.

Through adopting above-mentioned technical scheme, when needs installation or dismantlement circular cutter head, bulldoze and press the briquetting, because linkage piece is inconsistent with the anti-piece that contracts, consequently press the briquetting and in the in-process of being pressed, can push away and crowd the rotation of stopping the position post, make the anti-piece that contracts break away from the locking piece, press the briquetting simultaneously and can exert pulling force to the locking piece with the help of opening the piece, draw the locking piece into the piece inslot that contracts, and then make the linkage segment can insert the adapter sleeve or take out from the adapter sleeve. Simultaneously after the ring cutter head is assembled, the pressing block is released, the elastic piece and the torsion piece respectively drive the locking block and the stop column to reset at the moment, so that the locking block is exposed out of the shrinkage block groove again, the shrinkage block is embedded into the shrinkage block groove on the locking block again, and the locking block is locked again.

To sum up, the circular cutting tool bit of the concentric double-tool-bit formula that distributes of inside and outside ring sword can both realize the improvement of quartz ring machining precision through the better quartz ring of a processing acquisition concentricity, realizes the promotion of quartz ring machining efficiency again to the locking mechanical system of linkage form can carry out the dismouting to the circular cutting tool bit convenient and fast ground, thereby improves the change efficiency of circular cutting tool bit.

Drawings

FIG. 1 is an overall block diagram of the present invention;

FIG. 2 is a schematic cross-sectional view of the rotary spindle and ring cutter head of the present invention;

FIG. 3 is a structural representation of the locking mechanism of the present invention;

FIG. 4 is a schematic structural diagram of the stop post of the present invention.

Description of the reference numerals:

1. a chassis; 2. a lifting head; 3. rotating the main shaft; 31. connecting sleeves; 311. a lock block slot; 312. a block opening groove; 313. a block opening; 32. an insertion cavity; 4. a circular cutter head; 41. a connecting section; 411. a locking groove; 42. an outer cutting ring; 43. an inner cutting ring; 44. cutting a liquid port; 45. an overflow hole; 5. a locking mechanism; 51. an elastic member; 52. a locking block; 521. opening the groove; 522. a block shrinking groove; 53. an opening block; 54. pressing the block; 541. a screw; 55. a stop post; 551. a shrink-proof block; 552. a torsion member; 553. an inclined butting surface; 6. a linkage block; 61. and (5) obliquely pushing the surface.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings 1 to 4.

The embodiment of the application discloses a quartz ring one shot forming processing equipment for semiconductor, refer to fig. 1, including quick-witted case 1, lifting head 2, rotating spindle 3 and circular cutter head 4, lifting head 2 is installed in quick-witted case 1 with the help of the lift of lead screw slider mechanism, and rotating spindle 3 rotates and installs on lifting head 2 to can carry out rotary drive with the help of power supplies such as motors.

Referring to fig. 2, the circular cutter head 4 includes three parts, namely a connecting section 41, an outer ring cutter 42 and an inner ring cutter 43, the connecting section 41 and the outer ring cutter 42 are integrally and coaxially fixed, the inner ring cutter 43 is located inside the outer ring cutter 42, the inner ring cutter 43 and the outer ring cutter 42 are concentrically distributed, the inner ring cutter 43 is also integrally fixed with the connecting section 41, and the length of the inner ring cutter 43 is greater than that of the outer ring cutter 42. In order to facilitate the supply of the cutting fluid, the connecting section 41 is configured to be a hollow structure, a fluid cutting opening 44 for communicating the connecting section 41 with the inner ring cutter 43 is formed at a connecting portion between the connecting section 41 and the inner ring cutter 43, and a fluid overflowing hole 45 which extends along the axial direction of the inner ring cutter 43 and communicates inner cavities of the inner ring cutter 43 and the outer ring cutter 42 is formed on a side wall of the inner ring cutter 43.

In order to facilitate the installation of the ring-cutting head 4, a connecting sleeve 31 is fixed at the lower end of the rotary spindle 3, a plug-in cavity 32 is formed in the center of the connecting sleeve 31, the connecting section 41 of the ring-cutting head 4 is inserted into the plug-in cavity 32 of the connecting sleeve 31 during installation, and the connecting sleeve 31 is fixed by means of a locking mechanism 5 provided on the connecting sleeve 31.

Referring to fig. 2 and 3, the locking mechanisms 5 are at least provided in two groups, and are symmetrically disposed on two sides of the connection sleeve 31, each locking mechanism 5 specifically includes an elastic member 51, a locking block 52, an opening block 53, a pressing block 54, and a stop column 55, locking block grooves 311 are symmetrically formed on inner walls of two sides of the connection sleeve 31, the elastic members 51 are selected from springs, and the elastic members 51 are mounted in the locking block grooves 311. The locking block 52 is also fitted into the locking block groove 311 and presses the elastic member 51, so that the elastic member 51 applies an elastic pushing force to the locking block 52 toward the center of the insertion cavity 32 of the connection sleeve 31.

In order to facilitate the installation of the opening block 53 and the pressing block 54, an opening block groove 312 is formed in the outer side wall of the connecting sleeve 31, the opening block groove 312 is in a step shape, the opening block groove 312 and the locking block groove 311 are opened to form an opening block opening 313, the middle part of the opening block 53 is rotatably installed in the opening block opening 313, an opening groove 521 is formed in the surface of the locking block 52 facing one side of the opening block opening 313, and meanwhile, one end of the opening block 53 is embedded into the opening groove 521 through the opening block opening 313 and abuts against the inner wall of the opening groove 521 close to one side of the elastic member 51.

The stop column 55 is rotatably installed in the starting block groove 312, the side wall of the stop column 55 is integrally provided with a shrinkage-proof block 551, the stop column 55 is sleeved with a torsion piece 552, the torsion piece 552 selects a torsion spring, one end of the torsion piece 552 abuts against the surface of the shrinkage-proof block 551 opposite to one side of the locking block 52, the shrinkage-proof block 551 is driven to rotate towards the locking block 52, meanwhile, the surface of the locking block 52 opposite to one side of the starting block opening 313 is provided with a shrinkage-proof block groove 522, the shrinkage-proof block 551 is driven by the torsion piece 552 to be embedded into the shrinkage-proof block groove 522, and the movement of the locking block 52 is restrained.

The pressing block 54 is shaped like a stepped block matching with the block opening groove 312, the pressing block 54 is installed in the block opening groove 312 of the connecting sleeve 31 through two screws 541, and the pressing block 54 is not pressed by the two screws 541, so that the pressing block 54 can extend and contract in the block opening groove 312. The pressing block 54 abuts against one end of the opening block 53 positioned in the opening block groove 312 after being assembled, at the moment, the opening block 53 is used as a lever between the pressing block 54 and the locking block 52, so that when the pressing block 54 is pressed downwards, the locking block 52 can be pulled into the locking block groove 311 through the opening block 53, the connecting section 41 of the circular cutting head 4 can be inserted into the connecting sleeve 31, and meanwhile, a linkage structure for linking the pressing block 54 and the stop column 55 is arranged on the pressing block 54.

Referring to fig. 3 and 4, the linkage structure specifically includes a linkage block 6, and the linkage block 6 is integrally fixed on a surface of the pressing block 54 facing the stop column 55 and corresponds to the position of the anti-shrinkage block 551. In order to facilitate the matching of the linkage block 6 and the anti-shrinkage block 551, an inclined pushing surface 61 is arranged at one end of the linkage block 6 facing the anti-shrinkage block 551, an inclined abutting surface 553 used for matching with the inclined pushing surface 61 is arranged at one side of the anti-shrinkage block 551 facing the linkage block 6, meanwhile, the inclined pushing surface 61 is in contact with the inclined abutting surface 553, and the end of the linkage block 6 farthest from the pressing block 54 is positioned between the anti-shrinkage block 551 and the locking block 52, so that when the pressing block 54 is pressed downwards, the direction of the pushing force applied by the linkage block 6 to the anti-shrinkage block 551 is opposite to the locking block 52, and the anti-shrinkage block 551 can unlock the locking block 52.

Referring to fig. 2, in order to fix the circular cutting head 4 by the locking block 52, a locking groove 411 is formed on the connecting section 41, the locking groove 411 is positioned in one-to-one correspondence with the locking block groove 311, when the circular cutting head 4 is installed, the pressing block 54 is firstly pressed down, the anti-shrinkage block 551 unlocks the locking block 52, meanwhile, the locking block 52 is retracted into the locking block groove 311, the connecting section 41 is then inserted into the insertion cavity 32 of the connecting sleeve 31, at this time, the locking block groove 311 is aligned with the locking groove 411, after the pressing block 54 is released, the locking block 52 is inserted into the locking groove 411 under the pushing of the elastic member 51, and the anti-shrinkage block 551 locks the locking block 52, so that the circular cutting head 4 is fixed to the rotary spindle 3.

The implementation principle of the quartz ring one-step forming processing equipment for the semiconductor in the embodiment of the application is as follows: during processing, drive the circular cutting tool bit 4 by the lift head 2 and descend, cut the quartz piece, because interior cutting ring 43 and outer cutting ring 42 distribute with one heart, consequently at the in-process of cutting, interior cutting ring 43 has the location alignment effect to outer cutting ring 42 for through a clamping, just can process and obtain the higher quartzy ring of concentricity, thereby both improve machining efficiency, promote the machining precision again.

The above are all preferred embodiments of the present invention, and the protection scope of the present invention is not limited thereby, so: all equivalent changes made according to the structure, shape and principle of the invention are covered by the protection scope of the invention.

Claims

1. The utility model provides a quartzy ring one shot forming processing equipment for semiconductor, includes that quick-witted case (1), lift install in lift head (2) in quick-witted case (1), rotate and install rotating spindle (3) on lift head (2), be fixed in circular cutter head (4) on rotating spindle (3), its characterized in that: the circular cutting head (4) comprises a connecting section (41) connected with the rotating main shaft (3), an outer annular cutter (42) and an inner annular cutter (43), wherein the outer annular cutter (42) and the inner annular cutter (43) are fixed to the connecting section (41), and the outer annular cutter (42) and the inner annular cutter (43) are arranged in a concentric ring sleeved mode.

2. The one-step forming processing equipment for the quartz ring for the semiconductor according to claim 1, characterized in that: the length of the inner cutting ring (43) is larger than that of the outer cutting ring (42).

3. The one-step forming processing equipment of the quartz ring for the semiconductor according to claim 1 or 2, characterized in that: the connecting section (41) is hollow, a liquid cutting opening (44) for conducting the connecting section (41) and the inner ring cutter (43) is formed in the connecting position between the connecting section (41) and the inner ring cutter (43), and a liquid overflowing hole (45) which extends along the axial direction of the inner ring cutter (43) and conducts the inner cavities of the inner ring cutter (43) and the outer ring cutter (42) is formed in the side wall of the inner ring cutter (43).

4. The one-step forming processing equipment of the quartz ring for the semiconductor according to claim 3, characterized in that: the rotary main shaft (3) is integrally provided with a connecting sleeve (31), the center of the connecting sleeve (31) is provided with a splicing cavity (32) for inserting a connecting section (41) of the circular cutting head (4), and the connecting sleeve (31) is provided with a locking mechanism (5) for fixing the connecting section (41).

5. The one-step forming processing equipment of the quartz ring for the semiconductor according to claim 4, characterized in that: seted up locking piece groove (311) on the inner wall of adapter sleeve (31), locking mechanical system (5) including install in elastic component (51) in locking piece groove (311), install in locking piece groove (311) and to elastic component (51) formation extruded locking piece (52), set up locking groove (411) of position and locking piece groove (311) one-to-one on the lateral wall of linkage segment (41), locking piece (52) are in driving about part embedding locking groove (411) of elastic component (51).

6. The one-step forming processing equipment of the quartz ring for the semiconductor according to claim 5, characterized in that: seted up on the lateral wall of adapter sleeve (31) and opened a groove (312), open on the inner wall of opening a groove (312) and open a mouthful (313) that groove (411) communicate with opening, locking mechanical system (5) are still including rotating open piece (53), the flexible pressing block (54) of installing in opening a groove (312) of opening in opening a groove (313), open groove (521) towards the surface of opening a mouthful (313) one side seted up, open the one end of piece (53) via opening a mouthful (313) embedding open in groove (521) and contradict on opening the inner wall that groove (521) is close to elastic component (51) one side, pressing block (54) are supported and are pressed and are located opening a groove (312) one end at opening a piece (53).

7. The one-step forming processing equipment of the quartz ring for the semiconductor according to claim 6, characterized in that: the locking mechanism (5) further comprises a stopping column (55) which is rotatably installed in the starting block groove (312) and located between the pressing block (54) and the groove bottom of the starting block groove (312), a shrinkage prevention block (551) is arranged on the side wall of the stopping column (55), a shrinkage block groove (522) is formed in the surface, facing one side of the starting block opening (313), of the locking block (52), a force is applied to the shrinkage prevention block (551) and drives the stopping column (55) to rotate so as to enable the shrinkage prevention block (551) to be embedded into the shrinkage block groove (522) through the starting block opening (313), and meanwhile, a torsion piece (552) which is used for enabling the shrinkage prevention block (551) to rotate out of the shrinkage block groove (522) is arranged on the pressing block (54).

8. The one-step forming processing equipment for the quartz ring for the semiconductor according to claim 1, characterized in that: the linkage structure comprises a linkage block (6) which is fixed on a pressing block (54) and corresponds to an anti-shrinkage block (551) in position, an inclined pushing surface (61) is arranged at one end, facing the anti-shrinkage block (551), of the linkage block (6), an inclined abutting surface (553) matched with the inclined pushing surface (61) is arranged at one side, facing the linkage block (6), of the anti-shrinkage block (551), the inclined pushing surface (61) is in contact with the inclined abutting surface (553), and the end, farthest from the pressing block (54), of the linkage block (6) is located between the anti-shrinkage block (551) and a locking block (52).