CN115639663A - Double telecentric lens - Google Patents
Double telecentric lens Download PDFInfo
- Publication number
- CN115639663A CN115639663A CN202211546451.6A CN202211546451A CN115639663A CN 115639663 A CN115639663 A CN 115639663A CN 202211546451 A CN202211546451 A CN 202211546451A CN 115639663 A CN115639663 A CN 115639663A
- Authority
- CN
- China
- Prior art keywords
- lens
- lens group
- double telecentric
- double
- focal length
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Lenses (AREA)
Abstract
The invention provides a double telecentric lens, which comprises an objective lens, a barrel lens and a spectroscope arranged between the objective lens and the barrel lens, wherein the objective lens comprises a first front lens group and a first rear lens group which are sequentially arranged from an object side surface to an imaging surface along an optical axis direction, the first front lens group has positive focal power, the first rear lens group has negative focal power, the barrel lens comprises a second front lens group and a second rear lens group which are sequentially arranged from the object side surface to the imaging surface along the optical axis direction, the second front lens group has negative focal power, the second rear lens group has positive focal power, and the double telecentric lens satisfies the following relational expression: 6.6<f obj /f tube <8 wherein, f obj Is the focal length of the objective lens, f tube Is the focal length of the cylindrical lens. The double telecentric lens can clearly form images, has a large field angle and meets the shooting requirements.
Description
Technical Field
The invention relates to the technical field of lens imaging, in particular to a double telecentric lens.
Background
Wafers are wafers used for manufacturing silicon semiconductor circuits, and the manufacturing process of wafers involves many steps, such as pulling a single crystal, slicing, lapping, polishing, layer-building, photolithography, doping, heat treatment, and dicing, which may cause defects on the surface of the wafer. Therefore, in order to prevent the defective wafers from flowing into the packaging process, it is necessary to identify the defects on the wafer surface by the wafer inspection equipment, classify and mark the defects, and assist in sorting the wafers.
Wherein, prior art is for more comprehensive detecting the wafer, and most all need detect the wafer through wafer detection equipment. Compared with a common lens, the double-telecentric lens has the advantages of large depth of field, low distortion, high telecentricity and the like, and is widely applied to the field of wafer measurement. The existing double telecentric lens mainly comprises an objective lens, a spectroscope and a cylindrical lens, wherein the objective lens and the cylindrical lens are a lens group formed by combining dry lenses.
The detection, capture, tracking and measurement of a detection target are required to meet the test within a large visual field range of the target, while the current double telecentric lens cannot meet the requirement of a large visual field.
Disclosure of Invention
Based on the above, the invention aims to provide a double telecentric lens with a large field angle so as to meet the detection requirement of the large field angle.
The invention provides a double telecentric lens, which comprises an objective lens, a barrel lens and a spectroscope arranged between the objective lens and the barrel lens, wherein the objective lens comprises a first front lens group and a first rear lens group which are sequentially arranged from an object side surface to an imaging surface along an optical axis direction, the first front lens group has positive focal power, the first rear lens group has negative focal power, the barrel lens comprises a second front lens group and a second rear lens group which are sequentially arranged from the object side surface to the imaging surface along the optical axis direction, the second front lens group has negative focal power, the second rear lens group has positive focal power, and the double telecentric lens satisfies the following relational expression:
6.6<f obj /f tube <8，
wherein, f obj Is the focal length of the objective lens, f tube Is the focal length of the cylindrical lens.
Specifically, the objective lens adopts a combination mode of a positive lens group and a negative lens group, so that the length of the objective lens can be reduced, and the lens is more compact. The cylindrical lens adopts a combination mode of a negative lens group and a positive lens group, so that the length of the cylindrical lens can be reduced, and the lens is more compact.
And by limiting the focal length relation between the double telecentric lens objective and the barrel lens, the double telecentric lens can be ensured to have a larger shooting field of view, and a sample of 4 inches can be shot at a time.
Further, the double telecentric lens satisfies the following relation:
8<TTL/FFL<14，
wherein, TTL is the total length of the double telecentric lens, and FFL is the optical front focal length.
In particular, the ratio range of the total length of the double telecentric lens and the optical front focal length is limited so as to meet the requirements of bright field detection and dark field detection.
Further, the double telecentric lens satisfies the following relation:
0.6<f front1 / f obj <1，
wherein f is front1 Is the focal length of the first front lens group, f obj Is the objective focal length.
Further, the double telecentric lens satisfies the following relation:
1<f back2 /f tube <1.4，
wherein f is back2 Is the focal length of the second rear lens group, f tube Is the focal length of the cylindrical lens.
Specifically, when the ratio of the focal length of the first front lens group to the focal length of the objective lens is too small, the curvature radius of the surface of the first front lens group is too large, light enters the surface with too large curvature, and the spherical aberration is large; when the ratio of the focal length of the first front lens group to the focal length of the objective lens is too large, the curvature radius of the rear group negative lens is too small, and the achromatic effect is affected. Therefore, by defining the range of the ratio of the focal length of the first front lens group to the focal length of the objective lens in the objective lens and defining the range of the ratio of the focal length of the second rear lens group to the focal length of the barrel lens, aberrations such as spherical aberration and chromatic aberration can be reduced.
Further, the double telecentric lens satisfies the following relation:
Ra In ≤6°；
|Ra In -Ra out |≤3°；
wherein, ra In Is the angle of incidence of the light path to the first rear lens group, ra out Is the angle of the light path when the light path is emitted from the first rear lens group.
Specifically, the distortion and the curvature of field of the double telecentric lens can be further reduced through the limitation of the angles of the incident light rays and the emergent light rays on the first rear lens group.
Further, in the double telecentric lens system, the first front lens group is one of a double cemented lens, a double separated lens and a single lens.
Further, in the double telecentric lens system, the second rear lens group is a single lens or a double cemented lens.
Further, in the double telecentric lens system, the first rear lens group includes a meniscus lens.
Further, in the double telecentric lens system, the second front lens and the second rear lens each include two lenses.
Further, the double telecentric lens satisfies the following relation:
5<f tube /EPD<14；
wherein f is tube For tube focal length, EPD is exit pupil diameter.
The double telecentric lens comprises an objective lens and a barrel lens, wherein the objective lens adopts a first front lens group with positive focal power and a first rear lens group with negative focal power, the barrel lens adopts a second front lens group with negative focal power and a second rear lens group with positive focal power, and through reasonable focal power distribution, the aberrations such as spherical aberration and chromatic aberration are reduced while high pixels are met. In the double telecentric lens, the ratio of the focal lengths of the objective lens and the tube lens needs to meet a certain range, so that the double telecentric lens can clearly image, has a larger field angle and meets the shooting requirement.
Drawings
Fig. 1 is a schematic structural diagram of a double telecentric lens in a first embodiment of the invention;
FIG. 2 is a field curvature graph of a double telecentric lens in a first embodiment of the invention;
FIG. 3 is a distortion graph of a double telecentric lens in a first embodiment of the invention;
fig. 4 is an MTF graph of a double telecentric lens in the first embodiment of the invention;
FIG. 5 is a diagram of RMS dot alignment for a double telecentric lens in a first embodiment of the invention;
FIG. 6 is a diagram of the diffraction energies of a double telecentric lens according to the first embodiment of the invention;
fig. 7 is a schematic structural diagram of a double telecentric lens in a second embodiment of the invention;
fig. 8 is a field curvature diagram of a double telecentric lens in a second embodiment of the invention;
FIG. 9 is a diagram of distortion curves of a double telecentric lens according to a second embodiment of the invention;
fig. 10 is an MTF graph of a double telecentric lens in a second embodiment of the invention;
FIG. 11 is a diagram of RMS dot alignment for a double telecentric lens in a second embodiment of the invention;
FIG. 12 is a diagram of the diffraction energy of a double telecentric lens in a second embodiment of the invention;
fig. 13 is a schematic structural diagram of a double telecentric lens in the third embodiment of the invention;
fig. 14 is a field curvature diagram of a double telecentric lens according to the third embodiment of the invention;
FIG. 15 is a distortion plot of a double telecentric lens in a third embodiment of the invention;
fig. 16 is an MTF graph of a double telecentric lens in the third embodiment of the invention;
fig. 17 is a root mean square dot arrangement diagram of a double telecentric lens in a third embodiment of the invention;
fig. 18 is a diffraction energy chart of a double telecentric lens in the third embodiment of the invention.
The following detailed description will further illustrate the invention in conjunction with the above-described figures.
Detailed Description
For a better understanding of the present invention, reference will now be made to the following more complete description thereof taken in conjunction with the accompanying drawings. Several embodiments of the invention are presented in the drawings. The invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. These embodiments are provided so that this disclosure will be thorough and complete.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
First embodiment
Fig. 1 is a schematic structural diagram of a double telecentric lens according to a first embodiment of the invention, which includes an objective lens, a tube lens, and a beam splitter B1 disposed between the objective lens and the tube lens. The primary optical axes of the objective lens and the tube lens coincide. The objective lens includes two lens groups, i.e., a first front lens group and a first rear lens group, which are arranged in order from an object side surface to an imaging surface in an optical axis direction. The first front lens group has positive focal power, and can use a double cemented lens, a double separated lens or a single lens. The second lens group has negative power and takes the form of a meniscus lens. The objective lens adopts a mode of combining the positive lens and the negative lens, so that the length of the objective lens of the lens can be reduced, and the lens is more compact.
Specifically, in the present embodiment, the objective lens includes a first lens L1, a second lens L2, and a third lens L3, which are arranged in order from the object side surface to the image formation surface in the optical axis direction. The first lens L1 and the second lens L2 constitute a first front lens group, and two separate lenses are used. The third lens L3 alone forms the first rear lens group, and the third lens is meniscus shaped.
Furthermore, in the double telecentric lens, the light path is incident to the angle Ra of the third lens L3 In At 4.202 deg., the light path is emitted from the third lens L3Angle of departure Ra out And was 3.541 deg.. Namely Ra In Less than 6 DEG, and, ra In And Ra out The difference of (a) is less than 3 °. The distortion and the curvature of field can be well reduced by limiting the angle of the light path entering and exiting the third lens L3.
This section of thick bamboo mirror design adopts symmetrical formula structure, includes two battery of lens, the battery of lens and second rear lens group before the second that sets gradually from the object side to the imaging surface along the optical axis direction promptly. The second front lens group has negative focal power, and the second rear lens group has positive focal power. The cylindrical lens adopts a negative lens group and a positive lens group, so that the length of the cylindrical lens can be reduced, and the lens is more compact.
Specifically, in the present embodiment, the barrel mirror includes a fourth lens L4, a fifth lens L5, a sixth lens L6, and a seventh lens L7, which are arranged in this order from the object side surface to the image forming surface in the optical axis direction. The fourth lens L4 and the fifth lens L6 form a second front lens group, and the sixth lens sixteenth and the seventh lens L7 form a second rear lens group.
According to the double telecentric lens, the positive lens group, the negative lens group and the positive lens group are adopted in the objective lens and the cylindrical lens, so that aberrations such as spherical aberration and chromatic aberration can be reduced.
The object-side surface S1 of the first lens element L1 is convex at a paraxial region, and the image-side surface S2 of the first lens element L1 is convex at a paraxial region;
the object-side surface S3 of the second lens element L2 is concave at the paraxial region, and the image-side surface S4 of the second lens element L2 is planar at the paraxial region;
the object-side surface S5 of the third lens element L3 is convex at the paraxial region, and the image-side surface S6 of the third lens element L3 is concave at the paraxial region;
the object-side surface S11 of the fourth lens L4 is planar at the paraxial region, and the image-side surface S12 of the fourth lens L4 is concave at the paraxial region;
the object-side surface S13 of the fifth lens element L5 is concave at the paraxial region, and the image-side surface S14 of the fifth lens element L5 is convex at the paraxial region;
the object-side surface S15 of the sixth lens element L6 is convex at the paraxial region, and the image-side surface S16 of the sixth lens element L6 is planar at the paraxial region;
the seventh lens element L7 has an object-side surface S17 convex at a paraxial region and an image-side surface S18 concave at a paraxial region of the seventh lens element L7.
In some embodiments, the first lens element L1, the second lens element L2, the third lens element L3, the fourth lens element L4, the fifth lens element L5, the sixth lens element L6, and the seventh lens element L7 may be all plastic lenses or glass lenses, or may be a combination of plastic lenses and glass lenses.
The parameters of each lens in the double telecentric lens provided by the embodiment are shown in table 1, wherein R represents the curvature radius, D represents the optical surface distance, and D represents the diameter.
TABLE 1
In the present embodiment, the field curvature, distortion, MTF curve, root mean square point diagram and diffraction energy diagram of the double telecentric lens are shown in fig. 2, fig. 3, fig. 4, fig. 5 and fig. 6, respectively, wherein in the field curvature diagram, T and S represent the meridional field curvature and the sagittal field curvature, respectively. As can be seen from fig. 2 to fig. 6, the field curvature is <0.5mm, the distortion of the double telecentric lens is <0.4%, the MTF is >0.1@90lp/mm, i.e. the MTF is >0.1 when the resolution is 90lp/mm, and the image quality of the optical system of the double telecentric lens is relatively good, the Diffraction circling Energy (Enclosed Energy Diffraction) is >0.8@11um, i.e. the Diffraction circling Energy is >0.8 when the radius is 11um, and the Energy method of the Enclosed Energy Diffraction graph determines whether the spot is focused, the concentration degree of the spot Energy of the lens in this embodiment is good, and the spot focusing effect is good. The design has a larger field angle, the distortion is better optimized, and the imaging quality of the system is high.
Second embodiment
Fig. 7 is a schematic structural diagram of a double telecentric lens according to a second embodiment of the invention, which includes an objective lens, a tube lens, and a beam splitter B1 disposed between the objective lens and the tube lens.
The objective lens includes a first lens L1, a second lens L2, and a third lens L3 arranged in this order from the object side surface to the image formation surface in the optical axis direction. The first lens L1 and the second lens L2 form a first front lens group, and a double-cemented lens is adopted. The third lens L3 alone forms the first rear lens group, and the third lens L3 is meniscus-shaped.
This section of thick bamboo mirror design adopts symmetrical formula structure, includes two battery of lens, the battery of lens and second rear lens group before the second that sets gradually from the object side to the imaging surface along the optical axis direction promptly. The second front lens group has negative focal power, and the second rear lens group has positive focal power.
Specifically, in the present embodiment, the barrel mirror includes a fourth lens L4, a fifth lens L5, a sixth lens L6, a seventh lens L7, and an eighth lens L8, which are respectively disposed in this order from the object side surface to the image formation surface in the optical axis direction. The fourth lens L4 and the fifth lens L5 form a second front lens group, and the sixth lens L6 to the eighth lens L8 form a second rear lens group.
The object-side surface S1 of the first lens element L1 is convex at a paraxial region, and the image-side surface of the first lens element L1 is attached to the object-side surface S2 of the second lens element L2;
the object-side surface S2 of the second lens element L2 is concave at the paraxial region, and the image-side surface S3 of the second lens element L2 is convex at the paraxial region;
the object-side surface S4 of the third lens element L3 is convex at the paraxial region, and the image-side surface S5 of the third lens element L3 is concave at the paraxial region;
the object-side surface S10 of the fourth lens L4 is planar at the paraxial region, and the image-side surface S11 of the fourth lens L4 is concave at the paraxial region;
the object-side surface S12 of the fifth lens element L5 is concave at the paraxial region, and the image-side surface S13 of the fifth lens element L5 is convex at the paraxial region;
the object-side surface S14 of the sixth lens element L6 is convex at the paraxial region, and the image-side surface S15 of the sixth lens element L6 is planar at the paraxial region;
the seventh lens element L7 and the eighth lens element L8 are cemented doublet, the object-side surface S16 of the seventh lens element L7 is convex at a paraxial region, and the image-side surface of the seventh lens element L7 is cemented with the object-side surface S17 of the eighth lens element;
the object-side surface S17 of the eighth lens element L8 is convex at a paraxial region, and the image-side surface S18 of the eighth lens element L8 is planar at the paraxial region.
The relevant parameters of each lens in the double telecentric lens provided by the embodiment are shown in table 2.
TABLE 2
In the embodiment, the field curvature, distortion, MTF curve, root mean square point diagram and diffraction energy diagram of the double telecentric lens are respectively shown in fig. 8, fig. 9, fig. 10, fig. 11 and fig. 12, and as can be seen from fig. 8 to fig. 12, the design has a larger field angle, and the distortion is better optimized, and the imaging quality of the system is high.
Third embodiment
Referring to fig. 13, a schematic diagram of a double telecentric lens according to a third embodiment of the invention is shown, wherein the double telecentric lens comprises an objective lens and a tube lens, and a beam splitter disposed between the objective lens and the tube lens.
The objective lens includes a first lens L1, a second lens L2, and a third lens L3 arranged in this order from the object side surface to the image formation surface in the optical axis direction. The first lens L1 and the second lens L2 form a first front lens group, and a double-cemented lens is adopted. The third lens L3 alone forms the first rear lens group, and the third lens L3 is meniscus-shaped.
This section of thick bamboo mirror design adopts symmetrical formula structure, includes two battery of lens, the battery of lens and second rear lens group before the second that sets gradually from the object side to the imaging surface along the optical axis direction promptly. The second front lens group has negative focal power, and the second rear lens group has positive focal power.
Specifically, in the present embodiment, the barrel mirror includes a fourth lens L4, a fifth lens L5, a sixth lens L6, a seventh lens L7, and an eighth lens L8, which are arranged in order from the object side surface to the image forming surface in the optical axis direction. The fourth lens L and the fifth lens L5 form a second front lens group, and the sixth lens L6 to the eighth lens L8 form a second rear lens group.
The object-side surface S1 of the first lens element L1 is convex at a paraxial region, and the image-side surface of the first lens element L1 is attached to the object-side surface S2 of the second lens element L2;
the object-side surface S2 of the second lens L2 is concave at the paraxial region, and the image-side surface S3 of the second lens L2 is planar at the paraxial region;
the object-side surface S4 of the third lens element L3 is convex at the paraxial region, and the image-side surface S5 of the third lens element L3 is concave at the paraxial region;
the object-side surface S10 of the fourth lens element L4 is planar at the paraxial region, and the image-side surface S11 of the fourth lens element L4 is concave at the paraxial region;
the object-side surface S12 of the fifth lens element L5 is concave at the paraxial region, and the image-side surface S13 of the fifth lens element L5 is convex at the paraxial region;
the object-side surface S14 of the sixth lens element L6 is convex at the paraxial region, and the image-side surface S15 of the sixth lens element L6 is planar at the paraxial region;
the seventh lens element L7 and the eighth lens element L8 are dual-cemented lens elements, the object-side surface S16 of the seventh lens element L7 is convex at a paraxial region, and the image-side surface of the seventh lens element L7 is cemented with the object-side surface S17 of the eighth lens element L8;
the object-side surface S17 of the eighth lens element L8 is convex at a paraxial region, and the image-side surface S18 of the eighth lens element L8 is planar at the paraxial region.
The relevant parameters of each lens in the double telecentric lens provided by the embodiment are shown in table 3.
TABLE 3
In the present embodiment, the field curvature, distortion, MTF curve, root mean square point diagram and diffraction energy diagram of the double telecentric lens are shown in fig. 14, fig. 15, fig. 16, fig. 17 and fig. 18, respectively, and as can be seen from fig. 14 to fig. 18, the design has a larger field angle, and the distortion is better optimized, and at the same time, the imaging quality of the system is high.
Table 4 shows the corresponding optical characteristics of the three embodiments, mainly including total length TTL, front optical focal length FFL and objective focal length f of the double telecentric lens obj Focal length f of cylindrical mirror tube Focal length f of the first front lens group front1 Focal length f of the second rear lens group back2 Angle Ra of light path incident to third lens In And the angle Ra of the light path emitted from the third lens out 。
TABLE 4
Wherein, according to the above table, the double telecentric lens satisfies 6.6<f obj /f tube <8, to ensure that the double telecentric lens has a larger shooting field of view. By defining the ratio of the total length of the double telecentric lens to the optical front focal length to be 8<TTL/FFL<14, the requirements of bright field detection and dark field detection can be met. When the ratio of the focal length of the first front lens group to the focal length of the objective lens is too small, the curvature radius of the surface of the first front lens group is too large, light enters the surface with too large curvature, and the spherical aberration is large; when the ratio of the focal length of the first front lens group to the focal length of the objective lens is too large, the curvature radius of the rear group negative lens is too small, and the achromatic effect is affected. Therefore, 0.6 is defined<f front1 / f obj <1，1<f back2 /f tube <1.4, through limiting the ratio range of the focal length of the first front lens group in the objective lens and the focal length of the objective lens and limiting the ratio range of the focal length of the second rear lens group in the cylindrical lens and the focal length of the cylindrical lens, the aberration such as spherical aberration and chromatic aberration can be reduced. The double telecentric lens simultaneously satisfies Ra In ≤6°，|Ra In -Ra out And | is less than or equal to 3 degrees, and the distortion and the field curvature of the double telecentric lens can be further reduced by limiting the angles of the light incidence and the light emergence on the first rear lens group.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the present invention. It should be noted that various changes and modifications can be made by those skilled in the art without departing from the spirit of the invention, and these changes and modifications are all within the scope of the invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. The utility model provides a two telecentric mirror, includes objective and section of thick bamboo mirror, and arranges in objective with spectroscope between the section of thick bamboo mirror, its characterized in that, objective includes along optical axis direction from the object side to the imaging surface first preceding lens group and the first back lens group that sets gradually, first preceding lens group has positive focal power, first back lens group has negative focal power, the section of thick bamboo mirror includes along optical axis direction from the object side to the imaging surface before second lens group and the second back lens group that set gradually, lens group has negative focal power before the second, the second back lens group has positive focal power, two telecentric mirror satisfy following relational expression:
6.6<f obj /f tube <8，
wherein, f obj Is the focal length of the objective lens, f tube Is the focal length of the cylindrical lens.
2. A double telecentric lens according to claim 1, wherein said double telecentric lens satisfies the following relationship:
8<TTL/FFL<14，
wherein, TTL is the total length of the double telecentric lens, and FFL is the optical front focal length.
3. A double telecentric lens according to claim 1, wherein the double telecentric lens satisfies the following relationship:
0.6<f front1 / f obj <1，
wherein f is front1 Is the focal length of the first front lens group, f obj Is the objective focal length.
4. A double telecentric lens according to claim 1, wherein the double telecentric lens satisfies the following relationship:
1<f back2 /f tube <1.4，
wherein, f back2 Is the focal length of the second rear lens group, f tube Is the focal length of the cylindrical lens.
5. A double telecentric lens according to claim 1, wherein the double telecentric lens satisfies the following relationship:
Ra In ≤6°；
|Ra In -Ra out |≤3°；
wherein, ra In Angle of incidence of light path to said first rear lens group, ra out Is the angle of the light path when the light path is emitted from the first rear lens group.
6. A double telecentric lens system as in claim 1, wherein said first front lens group is one of a double cemented lens, a double split lens and a single lens.
7. A double telecentric lens system according to claim 1, wherein the second rear lens group is a single lens or a double cemented lens.
8. A double telecentric lens system according to claim 1, wherein the first rear lens group comprises a meniscus lens.
9. The double telecentric lens of claim 1, wherein the second front lens and the second rear lens each comprise two lenses.
10. A double telecentric lens according to claim 1, wherein the double telecentric lens satisfies the following relationship:
5<f tube /EPD<14；
wherein f is tube At tube focal length, EPD is exit pupil diameter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211546451.6A CN115639663B (en) | 2022-12-05 | 2022-12-05 | Double telecentric lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211546451.6A CN115639663B (en) | 2022-12-05 | 2022-12-05 | Double telecentric lens |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115639663A true CN115639663A (en) | 2023-01-24 |
| CN115639663B CN115639663B (en) | 2023-03-10 |
Family
ID=84948916
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211546451.6A Active CN115639663B (en) | 2022-12-05 | 2022-12-05 | Double telecentric lens |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115639663B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003005068A (en) * | 2001-06-19 | 2003-01-08 | Mitsutoyo Corp | Bitelecentric objective lens |
| CN209858836U (en) * | 2019-06-19 | 2019-12-27 | 广东奥普特科技股份有限公司 | Double-telecentric lens |
| CN211653287U (en) * | 2020-04-06 | 2020-10-09 | 苏州大学 | Double-magnification double-telecentric optical system for detecting lens defects |
| US20220019062A1 (en) * | 2019-04-01 | 2022-01-20 | Iview Displays (Shenzhen) Company Ltd. | Double telecentric projection lens and projection system |
| CN216351480U (en) * | 2021-10-22 | 2022-04-19 | 广东奥普特科技股份有限公司 | Double-telecentric industrial lens |
-
2022
- 2022-12-05 CN CN202211546451.6A patent/CN115639663B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003005068A (en) * | 2001-06-19 | 2003-01-08 | Mitsutoyo Corp | Bitelecentric objective lens |
| US20220019062A1 (en) * | 2019-04-01 | 2022-01-20 | Iview Displays (Shenzhen) Company Ltd. | Double telecentric projection lens and projection system |
| CN209858836U (en) * | 2019-06-19 | 2019-12-27 | 广东奥普特科技股份有限公司 | Double-telecentric lens |
| CN211653287U (en) * | 2020-04-06 | 2020-10-09 | 苏州大学 | Double-magnification double-telecentric optical system for detecting lens defects |
| CN216351480U (en) * | 2021-10-22 | 2022-04-19 | 广东奥普特科技股份有限公司 | Double-telecentric industrial lens |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115639663B (en) | 2023-03-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11644642B2 (en) | Optical imaging system | |
| CN109343199A (en) | A kind of big multiplying power object space telecentricity micro optical system of long reach | |
| TWI751805B (en) | Large field of view imaging objective lens | |
| CN114488479B (en) | Industrial lens with large view field and high resolution front diaphragm | |
| US11347028B2 (en) | Optical imaging system | |
| CN113589478B (en) | Lens | |
| EP4246201A1 (en) | Lens assembly, imaging device, detection device, and detection system | |
| CN112179628B (en) | Image space telecentric lens for optical measurement | |
| CN115639663B (en) | Double telecentric lens | |
| CN109239892B (en) | Fixed-magnification optical image detection system and imaging method thereof | |
| CN208937793U (en) | A kind of big multiplying power object space telecentricity micro optical system of long reach | |
| CN108363190B (en) | Lens system and lens | |
| CN211603694U (en) | Optical imaging lens of wide angle high definition | |
| CN104122647A (en) | Optical lens | |
| CN114879340A (en) | Large-view-field image space telecentric conoscopic optical system for industrial chromaticity and brightness detection | |
| CN114185151A (en) | Two-waveband image space telecentric scanning objective lens with long entrance pupil distance | |
| CN112394486A (en) | Large-target-surface five-million-pixel optical lens and imaging method thereof | |
| RU2415451C1 (en) | Reflector lens | |
| CN111367053A (en) | Optical imaging lens of wide angle high definition | |
| CN110531493B (en) | Lens system and line scanning machine vision lens | |
| CN114779441B (en) | Taper lens | |
| CN114326063B (en) | High-magnification telecentric lens | |
| CN115061265B (en) | Compact logistics scanning detection lens | |
| CN216526492U (en) | Optical imaging lens is swept to large aperture line | |
| CN115097611B (en) | Large-aperture lens with circular view and panoramic camera system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |