CN115635680A - Light curing apparatus and light curing method - Google Patents
Light curing apparatus and light curing method Download PDFInfo
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Abstract
The application discloses photocuring equipment and photocuring method, wherein the photocuring equipment of one embodiment comprises: the liquid tank is used for accommodating the liquid photopolymerizable material; and a light source, at least one array of optical heads, each array of optical heads including a column of LED light emitting devices, and a driving part for driving relative movement between the light source and the liquid bath to cause the light source to photocure the liquid photopolymerizable material. The light curing equipment provided by the application comprises at least one array light head by arranging the light source, a column of LED light emitting devices is arranged in each array light head, the driving part drives the light source and the liquid tank to move relatively to carry out light curing, so that scanning light curing can be carried out by a one-dimensional line array, the scanning surface is larger, the speed is higher, the cost is lower, and the application prospect is wide.
Description
Technical Field
The present disclosure relates to the field of light curing molding technology, and more particularly, to a light curing apparatus and a light curing method.
Background
Stereolithography (also known as stereolithography, or a photo-curing method, or a photo-liquid phase curing method) is an additive manufacturing method in which a photosensitive resin is subjected to scanning curing of a specific shape to form a specific three-dimensional shape.
At present, liquid photosensitive resin is contained in a liquid tank, and curing is generated under the irradiation of ultraviolet light. The prior art for photo-curing mainly comprises SLA (Stereo Lithography application) technology, LCD (Liquid Crystal Display) technology and DLP (Digital Interface Production) technology, wherein the SLA technology utilizes a point laser light source to emit laser to a Liquid surface through a mechanical rotating reflector for curing, the LCD technology emits UV light to the Liquid surface through an LCD panel with UV backlight, the DLP technology emits UV light or laser through an LED or a surface light source of a laser and needs to be matched with a DMD chip, the first type of panel has overlarge speed and small precision, the cost is high, the second type of panel has low reliability and short service life, and the third type of curing panel is limited by the size of the light source and the limitation cost of the DMD chip is overhigh.
It is therefore desirable to provide a photocuring apparatus and method that can achieve high-precision large-area photocuring at a low cost.
Disclosure of Invention
In order to solve at least one of the above problems, a first aspect of the present application provides a light curing apparatus comprising:
the liquid tank is used for containing the liquid photopolymerizable material; and
a light source, at least one array of light heads, each array of light heads including a column of LED light emitting devices, an
And the driving part is used for driving the relative motion between the light source and the liquid tank so as to enable the light source to carry out photocuring on the liquid photopolymerizable material.
In some alternative embodiments, the drive means drives relative rotation between the light source and the fluid bath,
the light source is arranged on the side surface of the liquid tank, and the LED light-emitting devices in the array optical head extend along the direction parallel to the central axis of the liquid tank.
In some alternative embodiments, the fluid bath is rotated about its central axis.
In some alternative embodiments, the light source is rotated about a central axis of the fluid bath.
In some optional embodiments, the distance between the light emitting surface of the light source and the side wall of the liquid groove is less than or equal to 1mm.
In some alternative embodiments, the driving component comprises a clamping mechanism for driving the light source to move and a lifting platform,
the light source moves along the direction parallel to the liquid level, at least part of the lifting platform is positioned in the liquid groove and used for bearing the curing model,
the light source is arranged above the liquid tank and emits light rays towards the liquid level.
In some alternative embodiments, the driving component comprises a clamping mechanism for driving the light source to move and a lifting platform,
the light source moves along the direction parallel to the liquid level, at least part of the lifting platform is positioned in the liquid groove and used for bearing the curing model,
the light source is arranged below the liquid tank and emits light rays towards the bottom surface of the liquid tank.
In some optional embodiments, wherein the LED light emitting device is selected from one of Mini-LED, micro-LED, and QLED.
In some alternative embodiments, the array head comprises: an LED light emitting device disposed on the substrate, and a microlens array disposed on the LED light emitting device,
the micro-lens array comprises a plurality of micro-lenses, and each LED light-emitting device corresponds to one micro-lens.
A second aspect of the present application provides a light curing apparatus comprising:
a substrate stage for carrying a substrate; and
a light source, at least one array of light heads, each array of light heads including a column of LED light emitting devices, an
And the driving part is used for driving the light source and the substrate platform to move relatively so that the light source can carry out photocuring on the photopolymerizable material coated on the substrate.
A third aspect of the present application provides a curing method using the above-described light curing apparatus, comprising:
the driving part drives the light source and the liquid groove to rotate relatively,
when the device is rotated to an exposure position, the liquid photopolymerizable material with the thickness of a mu m, which is opposite to the light source, is divided into an exposure slice layer, the part of a light-emitting path of the corresponding LED light-emitting device in each exposure slice layer is divided into N rectangular bodies with the side length of a mu m,
the total exposure dose of the nth cuboid after M circles of exposure meets the following conditions:
V n ＝D 11 g 1n +D 12 g 2n +…+D 1K g Kn +D 21 g 1n +D 22 g 2n +…+D 2k g Kn +…+D M1 g 1n +D M2 g 2n +…+D MK g Kn
wherein D is MK Denotes the M Zhou Di K exposure dose, g Kn The exposure coefficient of the K exposure of the nth cuboid is shown, wherein M is a natural number which is larger than or equal to 1, K, N is a natural number which is larger than 1, N is a natural number which is larger than or equal to 1 and smaller than or equal to N, and a is larger than 0.
The beneficial effect of this application is as follows:
aiming at the existing problems at present, the light curing equipment and the light curing method are formulated, the light source is arranged to comprise at least one array light head, a row of LED light emitting devices are arranged in each array light head, the driving part drives the light source and the liquid tank to move relatively to carry out light curing, so that scanning light curing can be carried out by a one-dimensional line array, the scanning area is larger, the speed is higher, the cost is lower, and the application prospect is wide.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 shows a schematic view of a light-curing apparatus according to an embodiment of the present application;
fig. 2 shows a schematic cross-sectional view of an array of optical heads in a light curing device according to an embodiment of the present application;
FIG. 3 is a schematic view showing an exposure principle of the photo-curing apparatus of the embodiment shown in FIG. 1;
FIG. 4 shows a schematic top view of a light-curing apparatus according to another embodiment of the present application;
FIG. 5 shows a schematic diagram of a light-curing apparatus according to another embodiment of the present application;
FIG. 6 shows a schematic top view of a light-curing apparatus according to another embodiment of the present application;
FIG. 7 shows a schematic view of a light-curing apparatus according to another embodiment of the present application;
FIG. 8 shows a schematic view of a light-curing apparatus according to another embodiment of the present application; and
fig. 9 shows a schematic view of a light-curing device according to another embodiment of the present application.
Detailed Description
In order to more clearly illustrate the present application, the present application is further described below in conjunction with the preferred embodiments and the accompanying drawings. Similar parts in the figures are denoted by the same reference numerals. It is to be understood by persons skilled in the art that the following detailed description is illustrative and not restrictive, and is not intended to limit the scope of the present application.
It should be noted that, when the terms "have", "include", "including", etc. are used in the present application, they are open-ended, that is, when the terms "have", "include" or "include" the first step, the second step and/or the third step, it means that the module includes other steps in addition to the first step, the second step and/or the third step.
In order to solve at least one of the above problems, an embodiment of the present application provides a light curing apparatus including:
the liquid tank is used for accommodating the liquid photopolymerizable material; and
a light source, at least one array of light heads, each of said array of light heads comprising a column of LED light emitting devices, an
And the driving part is used for driving the light source and the liquid tank to move relatively so that the light source can carry out photocuring on the liquid photopolymerizable material.
In the embodiment, the light source comprises at least one array light head, each array light head comprises a column of LED light-emitting devices, and the driving part drives the light source and the liquid bath to move relatively to carry out photocuring, so that scanning photocuring can be carried out in a one-dimensional line array, and the scanning surface is larger, the scanning speed is higher, and the cost is lower.
In a specific embodiment, referring to fig. 1, the photo-curing apparatus 1-1 includes a liquid bath 111, a light source 113, and a driving part 115.
The liquid tank 111 is used for accommodating a liquid photopolymerizable material, which may be a photocurable resin, and the photocurable resin is generally sensitive to light in a UVA band, i.e., is cured under exposure of a certain dose of UVA, typically 365nm, 395nm, and 405nm. Of course, the application is not limited to a specific sensitive wavelength range, and the application depends on the specific material of the liquid photopolymerizable material.
In particular, in the embodiment of the present application, the light source 113 employs at least one array of optical heads, each array of optical heads including a column of LED light emitting devices. That is, the array optical head in this application means a one-dimensional array of LED light emitting devices packaged independently.
More preferably, the LED Light Emitting device in the embodiment of the present application is selected from one of Mini-LEDs (Mini Light Emitting Diodes), micro-LEDs (Micro Light Emitting Diodes), and QLEDs (Quantum Dot Light Emitting Diodes).
Unlike conventional LEDs, mini-LEDs, micro-LEDs, and QLEDs allow the distance between each device in an LED array to be reduced to less than 100 μm, with typical values of 10 μm to 100 μm, thereby integrating more light emitting devices with the same package size, improving the fineness of patterns formed by photocuring, facilitating the fabrication of finer components, e.g., enabling 3D printing of finer elements with the photocuring apparatus of the present application, and being suitable for fields with stricter requirements for precision.
Specifically, referring to fig. 2, the array head includes: a plurality of linearly arranged LED light emitting devices 103-2 disposed on a substrate 103-1, and a microlens array 103-3 disposed on the LED light emitting devices 103-2.
The substrate 103-1 may be a glass substrate, and the LED light emitting device 103-2 may be a Mini-LED, a Micro-LED or a QLED using semiconductor light emitting technology such as InGaN, alInGaN, or the like, so as to emit light in the UVA band.
The micro lens array 103-3 comprises a plurality of micro lenses, each LED light-emitting device corresponds to one micro lens, so that light emitted by each LED light-emitting device is converged, the size of an emergent light spot is reduced, the divergence width of a light beam is reduced, and the resolution of emergent light is improved.
A planarization layer 103-4 is also provided over the LED light emitting device 103-2 to planarize and provide protection for the device layer.
The array optical head may be an active light emitting structure driven by TFTs or a light emitting structure driven without TFTs. When the array optical head is an active light emitting structure driven by TFTs, referring to fig. 2, a TFT array circuit 103-5 is further included between the substrate 103-1 and the LED light emitting device 103-2.
In addition, a heat dissipation layer 103-6 may be provided under the substrate 103-1 in order to improve the lifetime of the array head. It should be further noted that, precisely because of the problem of heat dissipation of the light source, in the embodiment of the present application, by providing a one-dimensional LED array packaged independently, the problem of poor heat dissipation of devices integrated in multiple rows can be effectively avoided through independent packaging.
With continued reference to fig. 1, the photo-curing apparatus 1-1 further includes a driving part 115 for driving relative movement between the light source 113 and the liquid bath 111 to cause the light source 113 to photo-cure the liquid photo-polymerizable material.
In particular to the present example, referring to fig. 1, the driving section 115 drives relative rotation between the light source 113 and the liquid bath 111, and the liquid bath 111 rotates about its own central axis.
The light source 113 is disposed at the side of the liquid tank 111, and the LED light emitting devices in the array optical head extend in a direction parallel to the central axis of the liquid tank 111. In this case, the light source 113 is fixedly disposed, and only the liquid tank 111 rotates, so that the light source 113 exposes the liquid photopolymerizable material therein around the liquid tank 111 as the light source 113 emits light toward the liquid tank 111 as the liquid tank 111 rotates. Of course, it will be understood by those skilled in the art that the fluid bath 111 is of a material that is transmissive to UVA, for example, the fluid bath 111 may be of quartz or an organic material that is transmissive to UVA.
In contrast, the light curing apparatus in the present embodiment performs curing in a bulk exposure manner, and the liquid tank 111 employs a cylindrical tank so that the distance of the light source 113 from the side wall of the liquid tank 111 is kept constant. In addition, in order to reduce the beam divergence width, the distance between the light emitting surface of the light source 113 and the liquid tank 111 should be as small as possible, and preferably, the distance d between the light emitting surface of the light source 113 and the side wall of the liquid tank 111 is less than or equal to 1mm.
The principle of photocuring and exposure of the present embodiment is described in detail below with reference to fig. 3.
As shown in fig. 3, the liquid photopolymerizable material accommodated in the cylindrical liquid bath 111 is also cylindrical, and the cylindrical liquid photopolymerizable material is integrally sliced into a plurality of sheets. As shown in fig. 3 in particular, the driving part 115 drives relative rotation between the light source 113 and the liquid bath 111, equivalently, the light source 113 rotates around the liquid bath 111. When the liquid-state photopolymerizable material is rotated to the exposure position, the light source 113 emits light towards the side wall of the liquid tank 111, the liquid-state photopolymerizable material with the thickness of a mu m opposite to the light source 113 is divided into exposure sheet layers, and the value of a larger than 0,a is determined according to the curing precision designed according to specific needs. Then the process of the first step is carried out,if the included angle between each exposure position is θ, the liquid photopolymerizable material is cut into 360/θ = K exposure slices of equal thickness in total, and each exposure slice passes through the central axis of the liquid bath 111. In determining a specific exposure dose, a portion of a light emission path of one LED light emitting device in each exposure sheet layer is divided into N rectangles (e.g., cubes) with a side length of a μm, an nth rectangle of the N rectangles being denoted as V n This cuboid is also called a voxel. The K, N are natural numbers greater than 1, and N is a natural number not less than 1 and not more than N.
The light source 113 performs exposure once at each exposure position, the liquid tank 111 rotates once, the light source 113 is exposed K times, and the exposure dose of each time is represented as D 11 、D 12 、……、D 1K . The rectangles in the portion corresponding to the light emitting path of one LED light emitting device each correspond to one exposure coefficient, for example, the nth rectangle V n The corresponding exposure factor at the k-th exposure position in one revolution is denoted as g kn Exposure coefficient g kn Is a function of a series of parameters, g = f (W, k, n, a, θ, α), where W is the beam width, α is the absorption coefficient of the liquid in the liquid bath 111 at the corresponding wavelength, k represents the kth exposure in a circle, and n represents the nth cuboid in the portion of the exposure slice corresponding to the light emitting path of one LED light emitting device, and this function can be obtained through experimental tests.
More specifically, the total exposure dose after M exposure cycles of the nth cuboid in the portion of the light emitting path of the corresponding LED light emitting device in one exposure slice layer should satisfy:
V n ＝D 11 g 1n +D 12 g 2n +…+D 1K g Kn +D 21 g 1n +D 22 g 2n +…+D 2k g Kn +…+D M1 g 1n +D M2 g 2n +…+D MK g Kn
wherein D is MK Denotes the M Zhou Di K exposure dose, g Kn Showing the exposure coefficient of the K exposure of the nth cuboid, wherein M, K, N is a natural number which is more than or equal to 1, n is more than or equal toAnd a is greater than 0 when the natural number is 1 and less than or equal to N.
For example, D 11 g 1n D in (1) 11 Represents the exposure dose g of the LED light-emitting device at the 1 st exposure in the first circle of the nth cuboid 1n Denotes the exposure coefficient at the 1 st exposure of the nth rectangular volume in the first circle, D 12 g 2n D in (1) 12 Represents the exposure dose g of the LED light-emitting device in the 2 nd exposure in the first circle of the nth cuboid 2n Denotes the exposure factor at the 2 nd exposure in the first turn of the nth cuboid, D 1K g Kn D in (1) 1K Represents the exposure dose g of the LED light-emitting device during the K-th exposure in the first circle of the nth cuboid Kn Representing the exposure coefficient of the nth cuboid in the first circle during the Kth exposure; d 21 g 1n D in (1) 21 Represents the exposure dose g of the LED light-emitting device in the 1 st exposure in the second circle of the nth cuboid 1n Denotes the exposure coefficient at the 1 st exposure of the nth rectangular body in the second circle, D 22 g 2n D in (1) 22 Represents the exposure dose g of the LED light-emitting device in the 2 nd exposure in the second circle of the nth cuboid 2n Denotes the exposure coefficient at the 2 nd exposure in the second circle of the nth rectangular body, D 2K g Kn D in (1) 1K Represents the exposure dose g of the LED light-emitting device in the Kth exposure in the second circle of the nth cuboid Kn And the exposure coefficient of the nth cuboid in the second circle during the Kth exposure is shown, and the description is repeated by analogy.
More specifically, assuming that the curing model to be formed is a cube with a height of 1cm, since the side length of each rectangular block is set to a μm, the cube can be divided into 10 4 A number of lamellae. Thereafter, assuming that the liquid photopolymerizable material in the cylindrical liquid tank 111 is a photopolymerizable resin, since the photo-curing device is set to a volume a per one sheet in each sheet in the cylindrical liquid tank 111 3 Is exposed as a voxel, i.e. the volume V, according to the volume a 3 The exposure dose V required for curing the photopolymerizable resin block n The appropriate number of rotations M is preset, M being for example 100, and further, depending on the array headSpecifically, the flicker frequency of each LED light emitting device is set to the exposure number K of one rotation of the light source, and the included angle θ =360 °/K between each two exposure positions.
It should be noted that, since the total volume of the light-curable resin in the cylindrical liquid bath 111 is larger than the volume of the finally formed cured model, it is known that the portion of the rectangular volume V (voxel) defined in accordance with the cylindrical liquid bath 111 corresponding to the cured model is completely cured; the edge area is a partially cured part, and the uncured total exposure dose is obtained by multiplying the value of the completely cured total dose by the volume ratio of the volume of the completely cured total dose to the rectangular body V; the other rectangles V will not cure with a total exposure dose of 0.
Further, based on the above description, the exposure dose V of each of the N voxels in each exposed slice in each slice in the cylindrical liquid bath 111 n Are all known. The light attenuation parameter of the nth cuboid V in the part of the exposure slice layer corresponding to the light emitting path of one LED light-emitting device, namely the exposure coefficient g, during the k-th exposure in a circle is determined according to the light beam width W of the LED light-emitting devices and the absorption coefficient alpha of the liquid in the liquid tank 111 at the corresponding wavelength. Because of the above formula V n All exposure coefficients in (a) are known.
V is then assumed to be the same for each of the M turns n In each turn of D in the expression of i1 、D i2 、……、D iK (i =1, 2, … …, M) are the same, then all V in one exposure slice will be n And (3) establishing an equation set by the expression, solving all parameters D in the equation set, and performing light curing according to the parameters D to obtain a cubic curing model.
It should be further noted that, when the exposure total dose of each circle in the set M circles is different, the degree of freedom of design may be increased, in this case, the unknown number of the solution equation will be increased, as long as the number of simultaneous equations is correspondingly increased, and details are not described herein again.
By the above expression, since curing occurs when the exposure amount is larger than the preset threshold value for each liquid photopolymerizable material, the total exposure dose for the light emitting layer of each LED light emitting device is known for the 3D model to be formed, and the exposure amount D can be obtained simply by establishing a model of the exposure amount of rectangular bodies (voxels) in the liquid bath 111, and iteratively solving the exposure dose for all the voxels in parallel with the required exposure dose, where the exposure coefficient g is known. The exposure dose and the exposure coefficient may be determined by using an exposure program to enable the controller to issue a corresponding command, and the light source 113 may emit light.
In an alternative embodiment, the light source array may be multiple, such as shown in FIG. 4, and the light source 123 in the light curing device 1-2 includes three array heads 123-1, 123-2 and 123-3. Those skilled in the art will understand that other components are arranged in a manner consistent with the embodiment shown in fig. 1, the liquid bath rotates around its own central axis, only the included angle between each array of optical heads is 120 °, and when the same pattern model is generated in calculating the total exposure dose, the total exposure dose of each array of optical heads is 1/3 of that of the light source in the embodiment shown in fig. 1, and the detailed description is omitted. The service life of each array head can be prolonged by the arrangement.
In an alternative embodiment, the relative rotation between the light source and the fluid bath, as driven by the drive means, may be achieved by the fluid bath being fixedly arranged and the light source being rotated about the central axis of the fluid bath.
Specifically, referring to fig. 5, the light-curing apparatus 1-3 includes a liquid bath 131, a light source 133, and a driving part 135. The driving part 135 drives relative rotation between the light source 133 and the liquid bath 131, and the light source 133 rotates around the central axis of the liquid bath 131.
The light source 133 is disposed on the side of the liquid tank 131, and the LED light emitting devices in the array optical head extend in a direction parallel to the central axis of the liquid tank. In this case, the light source 133 exposes the liquid photopolymerizable material therein around the liquid bath 131 as the light source 133 rotates.
The specific exposure process, curing principle and exposure amount calculation method are similar to those of the above embodiments, and are not described herein again.
In an alternative embodiment, the light source array may be multiple in a curing mode in which the light source is rotated about the central axis of the liquid bath, for example, as shown in FIG. 6, the light source 143 in the light curing apparatus 1-4 includes three array light heads 143-1, 143-2 and 143-3. Those skilled in the art will understand that other components are arranged in a manner consistent with the embodiment shown in fig. 5, the liquid bath rotates around its own central axis, only the included angle between each array of optical heads is 120 °, and when the same pattern model is generated in calculating the total exposure dose, the total exposure dose of each array of optical heads is 1/3 of that of the light source in the embodiment shown in fig. 5, and the detailed process is not repeated. The service life of each array of optical heads can be prolonged by the arrangement.
In another alternative embodiment, the light source can also be arranged above the liquid tank, and the light source moves along the direction parallel to the liquid surface of the liquid tank under the driving of the driving part so as to perform flat scanning on the liquid surface, thereby performing solidification through layer-by-layer exposure.
Specifically, referring to fig. 7, the curing apparatus 1-5 includes a liquid bath 151, a light source 153, and a driving part 155, and the driving part 155 includes a chucking mechanism 155-1 that drives the light source 153 to move, and a lifting platform 155-2. Here, when the specific components are not distinguished, the entire drive component is denoted by 155.
The light source 153 is moved in a direction parallel to the liquid surface, and in particular, the clamping mechanism 155-1 drives the light source 153 in a direction parallel to the liquid surface and perpendicular to the central axis of the array head. According to the example in fig. 7, the clamping mechanism 155-1 drives the light source 153 to move in the direction perpendicular to the paper surface outward at this time, but of course, when a plurality of exposures are required, the light source 153 moves in the direction perpendicular to the paper surface outward to complete one layer of exposure, and then moves in the direction perpendicular to the paper surface inward again to complete the second layer of exposure.
Further, at least a part of the lifting platform 155-2 is located in the liquid bath for carrying the curing mold, in other words, the table surface of the lifting platform 155-2 for carrying the curing mold is located below the liquid level. The light source 153 is disposed above the liquid bath and emits light, such as UVA of a specific wavelength band as described in the above embodiments, toward the liquid surface.
In the light curing equipment 1-5 described in this embodiment, the line array formed by the LED light emitting devices selected from the Mini-LED, the Micro-LED, and the QLED is cured in a scanning manner, a large-format light source does not need to be manufactured, the scanning area is large, the one-dimensional array packaged separately is favorable for heat dissipation, the light source has a long service life, the cost of the light curing equipment is reduced, and the light curing equipment has a wide application prospect.
For the light curing equipment 1-5, a curing model is formed in a layer-by-layer curing mode. Before curing starts, the platform 155-2 is lifted and lowered so that the platform surface is located at a position about 10 μm below the liquid surface, which is a thickness position of the liquid surface layer that can be cured at one time, of course, 10 μm indicates an exemplary position, and may be other values of the thickness of one curing, the clamping mechanism 155-1 drives the light source 153 to scan and expose along a direction parallel to the liquid surface, for example, a direction perpendicular to the paper surface and facing outward (or perpendicular to the paper surface and facing inward, of course), after one exposure, the lifting platform 155-2 is lowered by 10 μm (one layer of curing thickness), and the clamping mechanism 155-1 drives the light source 153 to scan and expose along a direction perpendicular to the paper surface and so on until curing is completed.
In another alternative embodiment, the light source can be arranged below the liquid groove, and the light source moves along the direction parallel to the liquid surface of the liquid groove under the driving of the driving part to sweep the liquid surface to cure through layer-by-layer exposure.
Specifically, referring to FIG. 8, curing apparatus 1-6 includes a liquid bath 161, a light source 163, and a driving part 165, and driving part 165 includes a clamping mechanism 165-1 for driving light source 163 to move, and a lifting platform 165-2. Where no specific component is distinguished, the drive component as a whole is denoted by 165.
The light source 163 is moved in a direction parallel to the liquid surface, and specifically, the clamping mechanism 165-1 drives the light source 163 to move in a direction parallel to the liquid surface and perpendicular to the central axis of the array head. According to the example in fig. 8, the clamping mechanism 165-1 drives the light source 163 to move in the direction perpendicular to the paper surface outward at this time, but of course, when a plurality of exposures are required, the light source 163 moves in the direction perpendicular to the paper surface outward to complete one layer of exposure, and then moves again in the direction perpendicular to the paper surface inward to complete the second layer of exposure.
Further, at least a portion of the lift platform 165-2 is positioned within the fluid bath for carrying the curing molds, in other words, the top of the lift platform 165-2 carrying the curing molds is positioned below the fluid level. The light source 163 is disposed below the liquid bath and emits light, such as UVA of a specific wavelength band described in the above embodiments, toward the bottom surface of the tank body 161. Those skilled in the art will appreciate that at least the bottom surface of the channel 161 should be UVA transmissive.
In the light curing equipment 1-6 described in this embodiment, the line array formed by the LED light emitting devices selected from the Mini-LED, the Micro-LED, and the QLED is cured in a scanning manner, a large-format light source does not need to be manufactured, the scanning area is large, the one-dimensional array packaged separately is favorable for heat dissipation, the light source has a long service life, the cost of the light curing equipment is reduced, and the light curing equipment has a wide application prospect.
For the photo-curing apparatus 1-6, which also forms a curing model by layer-by-layer curing, the only difference with respect to the curing apparatus 1-5 is that before curing starts, the lifting platform 165-2 makes its platform surface be located at about 10 μm in the liquid from the bottom of the tank 161, which is the thickness position of the liquid level that can be cured at one time, of course, 10 μm indicates that the exemplary position is other values of the thickness of one-time curing, the clamping mechanism 165-1 drives the light source 163 to scan and expose along a direction parallel to the liquid level, for example, a direction perpendicular to the paper surface outwards (which may be perpendicular to the paper surface inwards), after one-time exposure is completed, the lifting platform 165-2 is lifted by 10 μm (one-layer curing thickness), and the clamping mechanism 165-1 drives the light source 163 to scan and expose along a direction perpendicular to the paper surface inwards, and so on and off until curing is completed.
In alternative embodiments, the array of heads in the same light source may be provided in a plurality, even for configurations in which the light source is above the liquid surface or below the bottom surface of the liquid bath. Referring to fig. 9, a light curing apparatus 1-7 is shown, which shows both a top view of the light sources 173-1 and 173-2 above the liquid level and a bottom view of the light sources 173-1 and 173-2 below the bottom surface of the tank.
It will be understood by those skilled in the art that when the light source comprises an exemplary 2 array heads, the two array heads are independently packaged and arranged side by side and are driven by the clamping mechanism 175-1 to move together for the flat-scan exposure, and will not be described herein.
Based on the same inventive concept, the second aspect of the present application further provides a light curing method using the light curing apparatus described in fig. 1 to 6 above, including:
the driving part drives the light source and the liquid groove to rotate relatively,
during exposure, the liquid photopolymerizable material facing the light source is divided into a plurality of exposure slice layers with the thickness of a, the part of a light-emitting path of one corresponding LED light-emitting device in each exposure slice layer is divided into N rectangular bodies with the side length of a mu m,
the total exposure dose of the nth cuboid after M circles of exposure meets the following conditions:
V n ＝D 11 g 1n +D 12 g 2n +…+D 1K g Kn +D 21 g 1n +D 22 g 2n +…+D 2k g Kn +…+D M1 g 1n +D M2 g 2n +…+D MK g Kn
wherein D is MK Denotes the M Zhou Di K exposure dose, g Kn And the exposure coefficient of the Kth exposure of the nth cuboid is shown, wherein M, K, N is a natural number which is larger than or equal to 1, N is a natural number which is larger than or equal to 1 and smaller than or equal to N, and a is larger than 0.
It should be noted that the exposure method has been described in detail in the description of the above-mentioned light curing device, and the principle is the same, and is not described herein again.
According to the arrangement, the light source comprises at least one array light head, each array light head comprises a row of LED light-emitting devices, and the driving part drives the light source and the liquid tank to rotate relatively to carry out light curing in a body exposure mode, so that scanning light curing can be carried out by a one-dimensional line array, the scanning area is larger, the speed is higher, the cost is lower, and the application prospect is wide.
In addition, based on the same inventive concept, a third aspect of the present application further provides a light curing apparatus, where the light curing apparatus in this embodiment can specifically implement an exposure apparatus in a lithography machine, including:
a substrate platform for carrying a substrate, which may be any device or circuit intermediate requiring photolithography using photoresist; and
a light source, at least one array of light heads, each array of light heads including a column of LED light emitting devices, an
And the driving part is used for driving the light source and the substrate platform to move relatively so that the light source can carry out photocuring on the photopolymerizable material coated on the substrate.
It should be noted that, since the apparatus is similar in structure to the above apparatus, it is not necessarily shown here.
In this embodiment, the photopolymerizable material may be a photoresist, and the photoresist may be a positive photoresist or a negative photoresist, and the photocuring apparatus according to the embodiment of the present application may control the light source to perform translational scanning in a direction parallel to the substrate surface in a numerical control manner, so that exposure and development may be completed without a mask plate, the photolithography cost is reduced, and the application prospect is broad.
Aiming at the existing problems at present, the light curing equipment and the light curing method are formulated, the light source is arranged to comprise at least one array light head, a row of LED light emitting devices are arranged in each array light head, the driving part drives the light source and the liquid tank to move relatively to carry out light curing, so that scanning light curing can be carried out by a one-dimensional line array, the scanning area is larger, the speed is higher, the cost is lower, and the application prospect is wide.
It should be understood that the above-mentioned examples are given for the purpose of illustrating the present application clearly and not for the purpose of limiting the same, and that various other modifications and variations of the present invention may be made by those skilled in the art in light of the above teachings, and it is not intended to be exhaustive or to limit the invention to the precise form disclosed.
Claims (11)
1. A light-curing apparatus, comprising:
the liquid tank is used for containing the liquid photopolymerizable material; and
a light source, at least one array head, each of said array heads including a column of LED light emitting devices, an
And the driving part is used for driving the light source and the liquid tank to move relatively so that the light source can carry out photocuring on the liquid photopolymerizable material.
2. The light-curing apparatus according to claim 1, wherein the driving section drives relative rotation between the light source and the liquid bath,
the light source is arranged at the side of the liquid tank, and the LED light-emitting devices in the array optical head extend along the direction parallel to the central axis of the liquid tank.
3. A light-curing apparatus according to claim 2, wherein the liquid bath is rotated about its central axis.
4. A light-curing apparatus according to claim 2, wherein the light source is rotated about a central axis of the liquid bath.
5. The light-curing apparatus according to claim 2 or 3, wherein a distance between the light-emitting surface of the light source and the side wall of the liquid tank is 1mm or less.
6. The light curing apparatus of claim 1, wherein said driving means comprises a clamping mechanism for driving said light source to move, and a lifting platform,
the light source moves along the direction parallel to the liquid level, at least part of the lifting platform is positioned in the liquid tank and used for bearing the curing model,
the light source is arranged above the liquid tank and emits light rays towards the liquid surface.
7. The light curing apparatus of claim 1, wherein said driving means comprises a clamping mechanism for driving said light source to move, and a lifting platform,
the light source moves along the direction parallel to the liquid level, at least part of the lifting platform is positioned in the liquid tank and used for bearing the curing model,
the light source is arranged below the liquid tank and emits light rays towards the bottom surface of the liquid tank.
8. A light-curing apparatus according to any one of claims 1-7, wherein the LED light-emitting device is selected from one of Mini-LED, micro-LED, QLED.
9. The curing light device of claim 8, wherein the array head comprises: an LED light emitting device disposed on a substrate, and a microlens array disposed on the LED light emitting device,
the micro-lens array comprises a plurality of micro-lenses, and each LED light-emitting device corresponds to one micro-lens.
10. A light-curing apparatus, comprising:
a substrate stage for carrying a substrate; and
a light source, at least one array of light heads, each of said array of light heads comprising a column of LED light emitting devices, an
And the driving part is used for driving the light source and the substrate platform to move relatively so that the light source can carry out photocuring on the photopolymerizable material coated on the substrate.
11. A photocuring method using the photocuring apparatus of any one of claims 2 to 5, characterized by comprising:
the driving part drives the light source and the liquid groove to rotate relatively,
when the LED light-emitting device rotates to an exposure position, the liquid photopolymerisable material with the thickness of a mu m, which is right opposite to the light source, is divided into an exposure slice layer, the part, corresponding to the light-emitting path of one LED light-emitting device, in each exposure slice layer is divided into N rectangular bodies with the side length of a mu m,
the total exposure dose of the nth cuboid after M circles of exposure meets the following conditions:
V n ＝D 11 g 1n +D 12 g 2n +…+D 1K g Kn +D 21 g 1n +D 22 g 2n +…+D 2k g Kn +…+D M1 g 1n +D M2 g 2n +…+D MK g Kn
wherein D is MK Denotes the M Zhou Di K exposure dose, g Kn The exposure coefficient of the K exposure of the nth cuboid is shown, wherein M is a natural number which is larger than or equal to 1, K, N is a natural number which is larger than 1, N is a natural number which is larger than or equal to 1 and smaller than or equal to N, and a is larger than 0.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211315747.7A CN115635680A (en) | 2022-10-26 | 2022-10-26 | Light curing apparatus and light curing method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211315747.7A CN115635680A (en) | 2022-10-26 | 2022-10-26 | Light curing apparatus and light curing method |
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