CN115619085A - Automatic scheduling system for machine maintenance project - Google Patents

Automatic scheduling system for machine maintenance project Download PDF

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Publication number
CN115619085A
CN115619085A CN202211151637.1A CN202211151637A CN115619085A CN 115619085 A CN115619085 A CN 115619085A CN 202211151637 A CN202211151637 A CN 202211151637A CN 115619085 A CN115619085 A CN 115619085A
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maintenance
scheduling
machine
module
automatic
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王潘潘
柴利林
吴建璋
何伟
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Warship Chip Manufacturing Suzhou Ltd By Share Ltd
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Warship Chip Manufacturing Suzhou Ltd By Share Ltd
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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
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    • G06Q10/0631—Resource planning, allocation, distributing or scheduling for enterprises or organisations
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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/20—Administration of product repair or maintenance
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/80—Management or planning

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Abstract

The invention discloses an automatic scheduling system for machine maintenance projects, which comprises: the system comprises a data management module, an automatic scheduling module and an execution module, wherein the data management module is configured to store historical information of a machine; the automatic scheduling module is configured to enter scheduling rules, and further performs automatic scheduling based on the machine history information and the scheduling rules to generate a maintenance scheduling table execution module configured to communicate to obtain a maintenance scheduling table and execute machine maintenance according to the item sequence in the maintenance scheduling table. The system automatically controls each machine to carry out maintenance in the appointed time by presetting maintenance project scheduling rules and maintenance time in the system, effectively avoids the conditions that manual scheduling often causes missing scheduling, the scheduling of the machine is unreasonable, the maintenance project accumulation of machines of the same type affects production arrangement and the like, and effectively improves the maintenance efficiency of the machine.

Description

Automatic scheduling system for machine maintenance project
Technical Field
The invention relates to the technical field of semiconductor machine maintenance, in particular to an automatic scheduling system for machine maintenance projects.
Background
The maintenance (PM) of the semiconductor manufacturing equipment is based on the frequency of fixed monthly/seasonal/annual maintenance, etc., and there are corresponding component maintenance and inspection items (PM check list). In practical production applications, engineers need to schedule a plurality of machines, check specified items on a list according to a schedule, and replace components when the components reach a lifetime (life time). However, such maintenance modes often fail to prevent undesirable anomalies from occurring, even near the end of the life, often with the risk of significant product scrap due to component failure. Too many maintenance projects and procedures cause the engineers to spend much time and take up the time for the production of the equipment, and how to maintain the equipment in a targeted and efficient manner is a problem faced by the current factories.
In the prior art, maintenance project scheduling is usually performed manually by engineers, such a method not only has high manpower consumption, but also has the problems that maintenance and repair requirements for machines are continuously changed due to the fact that the capacity bearing capacity of the machines is increased as the number of production machines is continuously increased, and the manual scheduling often has the problems of missing scheduling, unreasonable scheduling of machines, production and maintenance project accumulation of machines of the same type, and the like.
Accordingly, there remains a need in the art for an improved automatic scheduling for machine maintenance projects.
Disclosure of Invention
In view of the above, an object of the embodiments of the present invention is to provide an automatic scheduling system for machine maintenance items, which automatically schedules a plurality of maintenance items of a plurality of machines, effectively prevents missing scheduling and unreasonable scheduling, and improves machine maintenance efficiency.
In view of the above, an aspect of the embodiments of the present invention provides an automatic scheduling system for machine maintenance projects, including:
the data management module is configured to store historical information of the machine;
the automatic scheduling module is configured for inputting scheduling rules and further performs automatic scheduling on the basis of the historical information of the machine and the scheduling rules to generate a maintenance scheduling table;
and the execution module is configured for obtaining the maintenance scheduling list through communication and executing the machine maintenance according to the item sequence in the maintenance scheduling list.
In some embodiments, the system further comprises a data export module, communicatively coupled to the data management module and the automatic scheduling module, configured to export the tool history information and the maintenance schedule.
In some embodiments, the machine history information is single machine history information and/or multiple machine history information.
In some embodiments, the stand-alone bench history information includes bench status information and bench maintenance history.
In some embodiments, the multi-machine history information includes the number of machines, status information of each machine, and a maintenance history of each machine.
In some embodiments, the scheduling rules include maintenance frequency, maintenance date, maintenance content, and multi-station contemporaneous maintenance requirements.
In some embodiments, the multi-stand contemporaneous maintenance requirements include:
machines of different models cannot be maintained simultaneously;
different maintenance items of the same machine and the same gas cannot be maintained at the same time.
In some embodiments, the frequency of maintenance includes weekly maintenance, bi-weekly maintenance, monthly maintenance, seasonal maintenance, and annual maintenance.
In some embodiments, the data management module further has a user management module configured to enter information of maintenance personnel and set up the authority of the maintenance personnel.
In some embodiments, the maintenance schedule is manually modified in the automatic scheduling module by a maintenance person based on actual maintenance of the tool.
The invention has at least the following beneficial technical effects:
the invention provides an automatic scheduling system for machine maintenance projects, which is characterized in that maintenance project scheduling rules and maintenance time are preset in the system, maintenance projects are automatically scheduled by combining a schedule of past maintenance projects of machines, and the system automatically controls each machine to perform maintenance at specified time, so that the situations of discharge omission, unreasonable scheduling of machines, influence on production arrangement due to accumulation of maintenance projects of machines of the same type and the like are effectively avoided, the labor cost is reduced, and the machine maintenance efficiency is effectively improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the prior art descriptions will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other embodiments can be obtained according to the drawings without creative efforts.
FIG. 1 is a diagram illustrating an embodiment of an automatic scheduling system for a machine maintenance project according to the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the following embodiments of the present invention are described in further detail with reference to the accompanying drawings.
It should be noted that all expressions using "first" and "second" in the embodiments of the present invention are used for distinguishing two entities with the same name but different names or different parameters, and it should be noted that "first" and "second" are only used for convenience of expression and should not be construed as a limitation to the embodiments of the present invention, and no description is given in the following embodiments.
The traditional scheduling method for machine maintenance items is generally that technicians manually schedule multiple machines based on previous machine maintenance experience, which not only consumes large manpower, but also causes continuous change of maintenance requirements for the machines due to the fact that the capacity bearing capacity of the machines is increased as the number of the machines is continuously increased, and the conditions of discharge omission, unreasonable scheduling of the machines, production arrangement influenced by accumulation of maintenance items of machines of the same type and the like frequently occur in the manual scheduling. Therefore, the invention provides an automatic scheduling system for machine maintenance projects, which presets maintenance project scheduling rules and maintenance time in the system, automatically schedules the maintenance projects by combining a schedule of past maintenance projects of the machines, and automatically controls each machine to perform maintenance at a specified time through the system.
The system of the invention is jointly developed by IIS server, javaScript, html5, mssql and express 2014.
Fig. 1 is a schematic diagram of an embodiment of an automatic scheduling system for a machine maintenance project according to the present invention, the system including:
the data management module 001, the data management module 001 is configured to store the historical information of the machine;
the automatic scheduling module 002 is configured to enter scheduling rules, and the automatic scheduling module 002 further performs automatic scheduling based on the machine history information and the scheduling rules to generate a maintenance scheduling table;
and the execution module 003 is configured to communicate with the maintenance scheduling table to obtain the maintenance scheduling table, and execute the machine maintenance according to the item sequence in the maintenance scheduling table.
Further, the system further comprises an export module, the data export module is in communication connection with the data management module 001 and the automatic scheduling module 002, and is configured to export the machine history information and the maintenance scheduling table, in some embodiments, the data export module exports the machine history information and/or the maintenance scheduling table in the form of table data, and the automatic scheduling module 002 can implement pre-scheduling of machine maintenance for 3-6 months in the future.
Further, the equipment history information includes single equipment history information and/or multiple equipment history information, and maintenance is performed on a single equipment or multiple equipments based on actual equipment usage, wherein the single equipment history information includes equipment state information and equipment maintenance history records, and the multiple equipment history information includes the number of equipments, the state information of each equipment, and the maintenance history records of each equipment.
Further, the scheduling rule includes maintenance frequency, maintenance date, maintenance content, and multi-station concurrent maintenance requirement, wherein the multi-station concurrent maintenance requirement includes: machines of different models cannot be maintained simultaneously; different maintenance items of the same machine and the same gas can not be maintained simultaneously, and the maintenance frequency comprises weekly maintenance, bi-weekly maintenance, monthly maintenance, seasonal maintenance and annual maintenance. For example, the multiple machines include medium current machines, high energy machines, and high current machines of various types. Wherein, the scheduling rule of above-mentioned board includes: the medium-current machine and the high-energy machine cannot be maintained at the same time, and the high-current machines of various models or machines using the same air source in the same machine cannot be maintained at the same time, so that two days are required to be spaced. It should be understood by those skilled in the art that the above listed scheduling rules are exemplary only, and that the skilled person may make modifications to the scheduling rules based on actual maintenance needs.
Further, data management module 001 still has user management module, and user management module configuration is used for entering maintenance personnel information and sets up the maintenance personnel permission, and specifically, user management module has the following function: the method comprises the steps of adding users, deleting users and editing user permissions, wherein the users are maintenance personnel, maintenance personnel information comprises account names, passwords and permissions, a main user and an auxiliary user can be specified under the condition of multiple users, the main user has the permission of changing scheduling information, and the auxiliary user has the permission of only reading.
Further, based on the actual maintenance condition of the machine, the maintenance personnel manually modifies the maintenance schedule in the automatic scheduling module 002, for example, when the machine encounters an emergency failure or needs to be used in advance, the maintenance personnel can manually adjust the scheduling position of the machine in the automatic scheduling module 002. The automatic scheduling module 002 may further include a holiday data management module, which includes holiday information and attendant information, and adjusts the maintenance scheduling table based on the information, so as to avoid machine maintenance under the condition of no supervision of holidays.
Further, after the execution module 003 obtains the maintenance schedule table, each machine is notified to execute the machine maintenance according to the items of the maintenance schedule table, and the maintenance staff can further download the maintenance schedule table through the data export module and notify each machine maintenance responsible person to supervise the maintenance process.
The automatic scheduling system for the machine maintenance projects developed by the system realizes accurate and reasonable scheduling of a plurality of maintenance projects of a plurality of machines, can schedule projects of one quarter or half a year in advance, effectively avoids the problem of bunching of the same type of machine maintenance projects, reduces labor cost and improves machine maintenance efficiency.
Those of skill would further appreciate that the various illustrative logical blocks, modules, circuits, and algorithm steps described in connection with the disclosure herein may be implemented as electronic hardware, computer software, or combinations of both. To clearly illustrate this interchangeability of hardware and software, various illustrative components, blocks, modules, circuits, and steps have been described above generally in terms of their functionality. Whether such functionality is implemented as software or hardware depends upon the particular application and design constraints imposed on the overall system. Skilled artisans may implement the described functionality in varying ways for each particular application, but such implementation decisions should not be interpreted as causing a departure from the scope of the disclosed embodiments of the present invention.
In one or more exemplary designs, the functions may be implemented in hardware, software, firmware, or any combination thereof. If implemented in software, the functions may be stored on or transmitted over as one or more instructions or code on a computer-readable medium. Computer-readable media includes both computer storage media and communication media including any medium that facilitates transfer of a computer program from one place to another. A storage media may be any available media that can be accessed by a general purpose or special purpose computer. By way of example, and not limitation, such computer-readable media can comprise RAM, ROM, EEPROM, CD-ROM or other optical disk storage, magnetic disk storage or other magnetic storage devices, or any other medium that can be used to carry or store desired program code in the form of instructions or data structures and that can be accessed by a general-purpose or special-purpose computer, or a general-purpose or special-purpose processor. Also, any connection is properly termed a computer-readable medium. For example, if the software is transmitted from a website, server, or other remote source using a coaxial cable, fiber optic cable, twisted pair, digital subscriber line (D0L), or wireless technologies such as infrared, radio, and microwave, then the coaxial cable, fiber optic cable, twisted pair, D0L, or wireless technologies such as infrared, radio, and microwave are included in the definition of medium. Disk and disc, as used herein, includes Compact Disc (CD), laser disc, optical disc, digital Versatile Disc (DVD), floppy disk, blu-ray disc where disks usually reproduce data magnetically, while discs reproduce data optically with lasers. Combinations of the above should also be included within the scope of computer-readable media.
The foregoing are exemplary embodiments of the present disclosure, but it should be noted that various changes and modifications could be made herein without departing from the scope of the present disclosure as defined by the appended claims. The functions, steps and/or actions of the method claims in accordance with the disclosed embodiments described herein need not be performed in any particular order. Furthermore, although elements of the disclosed embodiments of the invention may be described or claimed in the singular, the plural is contemplated unless limitation to the singular is explicitly stated.
It should be understood that, as used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly supports the exception. It should also be understood that "and/or" as used herein is meant to include any and all possible combinations of one or more of the associated listed items.
The numbers of the embodiments disclosed in the embodiments of the present invention are merely for description, and do not represent the merits of the embodiments.
It will be understood by those skilled in the art that all or part of the steps for implementing the above embodiments may be implemented by hardware, or may be implemented by a program instructing relevant hardware, and the program may be stored in a computer-readable storage medium, and the above-mentioned storage medium may be a read-only memory, a magnetic disk or an optical disk, etc.
Those of ordinary skill in the art will understand that: the discussion of any embodiment above is meant to be exemplary only, and is not intended to intimate that the scope of the disclosure, including the claims, of embodiments of the invention is limited to these examples; within the idea of an embodiment of the invention, also combinations between technical features in the above embodiments or in different embodiments are possible, and there are many other variations of the different aspects of the embodiments of the invention as described above, which are not provided in detail for the sake of brevity. Therefore, any omissions, modifications, substitutions, improvements, and the like that may be made without departing from the spirit and principles of the embodiments of the present invention are intended to be included within the scope of the embodiments of the present invention.

Claims (10)

1. An automatic scheduling system for machine maintenance projects, comprising:
the data management module is configured to store historical information of the machine;
the automatic scheduling module is configured to enter scheduling rules, and the automatic scheduling module is further used for automatically scheduling to generate a maintenance scheduling table based on the machine history information and the scheduling rules;
and the execution module is configured to communicate and acquire the maintenance scheduling table and execute the maintenance of the machine according to the project sequence in the maintenance scheduling table.
2. The system of claim 1, further comprising a data export module communicatively coupled to the data management module and the automatic scheduling module, configured to export the historical information of the tool and the maintenance scheduling table.
3. The system of claim 2, wherein the tool history information is a single tool history information and/or a multiple tool history information.
4. The system of claim 3, wherein the single equipment history information comprises equipment status information and equipment maintenance history.
5. The system of claim 3, wherein the multi-machine history information comprises a number of machines, status information of each machine, and a maintenance history of each machine.
6. The system of claim 2, wherein the scheduling rules include maintenance frequency, maintenance date, maintenance content, and multi-machine concurrent maintenance requirements.
7. The system of claim 6, wherein the multi-machine contemporaneous maintenance request comprises:
machines of different models cannot be maintained simultaneously;
different maintenance items of the same machine and the same gas cannot be maintained at the same time.
8. The system of claim 6, wherein the frequency of maintenance includes weekly maintenance, bi-weekly maintenance, monthly maintenance, seasonal maintenance, and yearly maintenance.
9. The system of claim 2, wherein the data management module further comprises a user management module configured to enter information of maintenance personnel and set up the authority of maintenance personnel.
10. The system of claim 2, wherein a maintenance person manually modifies the maintenance schedule in the automatic scheduling module based on actual maintenance of the machine.
CN202211151637.1A 2022-09-21 2022-09-21 Automatic scheduling system for machine maintenance project Pending CN115619085A (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106600003A (en) * 2015-10-16 2017-04-26 中芯国际集成电路制造(上海)有限公司 Machine maintenance system and method
CN114037415A (en) * 2021-11-05 2022-02-11 重庆允成互联网科技有限公司 Maintenance schedule confirmation method and maintenance system for equipment management

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106600003A (en) * 2015-10-16 2017-04-26 中芯国际集成电路制造(上海)有限公司 Machine maintenance system and method
CN114037415A (en) * 2021-11-05 2022-02-11 重庆允成互联网科技有限公司 Maintenance schedule confirmation method and maintenance system for equipment management

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