CN115598932A

CN115598932A - Marble precision workbench air-flotation jacking mechanism

Info

Publication number: CN115598932A
Application number: CN202211193129.XA
Authority: CN
Inventors: 周建军; 吴杰; 刘威; 周琦
Original assignee: Sanhe Jianhua Hi Tech Co ltd
Current assignee: Sanhe Jianhua Hi Tech Co ltd
Priority date: 2022-09-28
Filing date: 2022-09-28
Publication date: 2023-01-13

Abstract

The invention discloses an air floatation jacking mechanism of a marble precision workbench, which comprises a cylinder body, wherein the upper end of the cylinder body is fixedly connected with a top cover, the side wall of the top cover is fixedly connected with a first connecting port, the first connecting port is positioned inside the top cover, the lower surface of the top cover is provided with a first air outlet, and the first air outlet is communicated with the first connecting port; the piston and the top cover form a first air chamber, a second air chamber is formed between the piston and the cylinder body, and the first air chamber is communicated with the first air outlet; the second connector is located on the side wall of the cylinder body, a second air outlet is fixedly connected to the upper surface of the cylinder body, and the second air outlet is communicated with the second connector and the second air chamber. Through above part, first air chamber and second air chamber make the marble platform rise, and first air outlet and second air outlet make everywhere rise unanimously go on, and make the speed that rises comparatively steady through steady structure, can not produce vibrations.

Description

Marble precision workbench air-flotation jacking mechanism

Technical Field

The invention relates to the technical field of jacking mechanisms, in particular to an air floatation jacking mechanism of a marble precision workbench.

Background

The workbench part is the core part of the photoetching machine, and the workpiece table of the photoetching machine mainly carries a silicon wafer or a glass substrate and the like to keep synchronous motion with the mask table under the objective lens and finish accurate exposure work. The motion stability of the workbench has certain influence on the positioning accuracy of optical components, precision sensors and other components arranged on the workbench; therefore, the research and development of a precise jacking air floating mechanism to ensure that the workbench does not contact and move in a vibration mode during maintenance is the basic guarantee for researching and developing a high-precision photoetching machine.

The existing working platform for the photoetching machine does not have a working platform which can be lifted up although the working platform moves on a horizontal plane. When the working platform is overhauled and tested, the precision influence of the working platform caused during overhauling and testing can not be ensured.

Disclosure of Invention

The invention aims to solve at least one of the technical problems in the prior art and provides an air-floating jacking mechanism of a marble precision workbench.

The invention also provides an air-floating jacking mechanism with the marble precision workbench, which comprises: the air conditioner comprises a cylinder body, wherein the upper end of the cylinder body is fixedly connected with a top cover, the side wall of the top cover is fixedly connected with a first connecting port, the first connecting port is positioned inside the top cover, the lower surface of the top cover is provided with a first air outlet, and the first air outlet is communicated with the first connecting port; the piston and the top cover form a first air chamber, a second air chamber is formed between the piston and the cylinder body, and the first air chamber is communicated with the first air outlet; the second connecting port is positioned on the side wall of the cylinder body, the upper surface of the cylinder body is fixedly connected with a second air outlet, and the second air outlet is communicated with the second connecting port and the second air chamber; the stable structure comprises a belt wheel, a friction wheel and a drawstring, wherein the drawstring is fixedly connected with the surface of the belt wheel, one end of the belt wheel is far away from the drawstring and is fixedly connected with the cylinder body, and the side surface of the friction wheel is rotatably connected with a movable block. Through above part, first air chamber and second air chamber make the marble platform rise, and first air outlet and second air outlet make everywhere rise unanimously go on, and make the speed that rises comparatively steady through steady structure, can not produce vibrations.

According to the air floatation jacking mechanism of the marble precision workbench, an air floatation cushion is fixedly connected below the piston, and the stable structure is positioned inside the air floatation cushion. Through the components, a corresponding friction structure can be formed between the stable structure and the air floatation cushion, so that the stable structure can resist movement.

According to the air-floating jacking mechanism of the marble precision workbench, provided by the invention, the inner wall of the cylinder body is sequentially and fixedly connected with a first sealing ring and a second sealing ring, the first sealing ring is contacted with the side wall of the lower section of the piston, and the second sealing ring is contacted with the side wall of the middle section of the piston. By means of the above components, the sliding components can be sealed and pneumatically supported.

According to the air floatation jacking mechanism of the marble precision workbench, the side wall of the upper section of the piston is fixedly connected with a third sealing ring, and the third sealing ring is in contact with the inner wall of the top cover. By the above components, the connection of the pistons can be sealed, thereby completing the separation of the two air chambers.

According to the air floatation jacking mechanism of the marble precision workbench, provided by the invention, the piston is in a three-section stepped cylindrical shape, and the first air outlet and the second air outlet are vertically arranged. Through the parts, the first air outlet and the second air outlet form drooping power, and fine adjustment is performed on rising in the rising process, so that the rising stability is kept.

According to the air-floatation jacking mechanism of the precise marble workbench, the top cover is fixedly connected with the support rings, and the number of the support rings is three. Through the above components, the position of the marble platform can be improved through the support ring.

According to the air floatation jacking mechanism of the marble precision workbench, the edge of the top cover is provided with first through holes at equal angles, the first through holes are provided with first bolts, and the top cover is fixedly connected with a marble platform through the first bolts. Through above part, make marble platform and top cap be connected, the position of fixed marble platform.

According to the air-floatation jacking mechanism of the marble precision workbench, the edge of the top cover is provided with second through holes at equal angles, the second through holes penetrate downwards, second bolts are arranged at the second through holes, and the top cover is fixedly connected with a cylinder body through the second bolts. Through the above components, the cylinder body and the top cover are fixedly connected, so that the position of the cylinder body and the top cover is fixed.

According to the air floatation jacking mechanism of the marble precision workbench, provided by the invention, the lower end of the air floatation cushion is provided with the third bolt, and the air floatation cushion is fixedly connected with the piston through the third bolt. Through the components, the position of the piston is fixed, so that the cylinder body is convenient to move.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

The invention is further described below with reference to the accompanying drawings and examples;

fig. 1 is an overall structure diagram of an air-floatation jacking mechanism of a marble precision workbench;

fig. 2 is a front view of an air-floating jacking mechanism of the marble precision workbench of the invention;

fig. 3 is a cross-sectional view of an air-bearing jacking mechanism of a marble precision workbench of the invention;

fig. 4 is a structural view of a portion a of the air floatation jacking mechanism of the marble precision workbench of the present invention;

fig. 5 is a bottom view of a top cover of the air-floating jacking mechanism of the marble precision workbench.

Illustration of the drawings:

1. a cylinder body; 2. a top cover; 3. a first connection port; 4. a first air outlet; 5. a piston; 6. a first air chamber; 7. a second air chamber; 8. a second connection port; 9. a second air outlet; 10. a stable structure; 11. a first seal ring; 12. a second seal ring; 13. a third seal ring; 14. an air-bearing cushion; 15. a support ring; 16. a first through hole; 17. a first bolt; 18. a marble platform; 19. a second through hole; 20. a second bolt; 21. a third bolt;

101. a pulley; 102. a friction wheel; 103. pulling a belt; 104. a movable block.

Detailed Description

Reference will now be made in detail to the present embodiments of the present invention, preferred embodiments of which are illustrated in the accompanying drawings, wherein the drawings are provided for the purpose of visually supplementing the description in the specification and so forth, and which are not intended to limit the scope of the invention.

The pressure in the chambers on both sides of the piston and the speed of movement of the piston vary throughout the movement of the piston. This is because the chamber is vented, but the volume is decreasing and the pressure is decreasing. The downward trend becomes gentle. If the exhaust is not smooth, the pressure may also rise. The pressure difference force in the two side cavities of the piston changes, which affects the change of the effective output force and the movement speed of the piston. If the external load force and the frictional force are also unstable, the pressure in the two chambers of the cylinder and the movement speed of the piston are more complicated to change, and vibration is easily generated.

Referring to fig. 1 to 5, the air-floating jacking mechanism of the precise marble worktable in the embodiment of the invention comprises: the cylinder body 1 is a cylinder, the upper end of the cylinder body 1 is fixedly connected with a top cover 2, the section of the corresponding top cover 2 is circular, the side wall of the top cover 2 is fixedly connected with a first connecting port 3, the first connecting port 3 is positioned inside the top cover 2, the lower surface of the top cover 2 is provided with a first air outlet 4, and the first air outlet 4 is communicated with the first connecting port 3; the piston 5, the piston 5 and the top cover 2 form a first air chamber 6, a second air chamber 7 is formed between the piston 5 and the cylinder body 1, and the first air chamber 6 is communicated with the first air outlet 4; when the second connecting port 8 pumps gas, the first connecting port 3 is in an open state and discharges the gas in the first air chamber 6, when the gas is pumped into the first connecting port 3, the corresponding second connecting port 8 is in an open state and discharges the gas in the second air chamber 7, meanwhile, the air pressure in the first air chamber 6 is increased, the piston 5 is pushed downwards to slide, namely, the air floating cushion 14 is pushed out, so that the supporting height of the marble platform 14 is adjusted, the second connecting port 8 is positioned on the side wall of the cylinder body 1, the upper surface of the cylinder body 1 is fixedly connected with a second air outlet 9, and the second air outlet 9 is communicated with the second connecting port 8 and the second air chamber 7; gas is pumped into to second connector 8, the inside atmospheric pressure increase of second air chamber 7 to promote piston 5 upwards to slide, realize piston 12 quick action, stable structure 10 guarantees marble platform 14 steady, stable structure 10 includes band pulley 101, friction pulley 102, stretching strap 103, the fixed surface of stretching strap 103 and band pulley 101 is connected, the one end and the cylinder body 1 fixed connection of band pulley 101 are kept away from to stretching strap 103, the side surface rotation of friction pulley 102 is connected with movable block 104. The first air chamber 6 and the second air chamber 7 enable the marble platform to ascend, the first air outlet 4 and the second air outlet 9 enable the marble platform to ascend everywhere consistently, ascending speed is stable through the stable structure 10, and vibration cannot be generated.

An air floating cushion 14 is fixedly connected below the piston 5, the lower end face of the air floating cushion 14 is contacted with a supporting component, and the stabilizing structure 10 is positioned inside the air floating cushion 14.

The inner wall of cylinder body 1 is the first sealing washer 11 of fixedly connected with and second sealing washer 12 in proper order, the lower section lateral wall contact of first sealing washer 11 and piston 5, the middle section lateral wall contact of second sealing washer 12 and piston 5, the upper segment lateral wall fixedly connected with third sealing washer 13 of piston 5, the inner wall contact of third sealing washer 13 and top cap 2, at the gliding in-process of piston 5, first sealing washer 11, second sealing washer 12 and third sealing washer 13 are piston 5 and provide sealed processing, and adopt rubber or silica gel material, when second connector 8 pump income is gaseous, first sealing washer 11 and second sealing washer 12 are that second air chamber 7 is sealed, third sealing washer 13 provides sealedly for first air chamber 6.

Piston 5 is the cascaded cylinder of three-section, and inside is the cavity setting, can reduce piston 5's whole quality, conveniently transports the use, and first air outlet 4 all arranges perpendicularly with second air outlet 9.

The inside fixedly connected with support ring 15 of top cap 2, the quantity of support ring 15 is three, realizes carrying out support treatment to top cap 2 and above-mentioned part.

The edge of the top cover 2 is provided with first through holes 16 at equal angles, first bolts 17 are arranged at the first through holes 16, the top cover 2 is fixedly connected with marble platforms 18 through the first bolts 17, for convenience of display, the marble platforms 18 are cylinders, and in actual use, the air floatation jacking mechanism can be installed on the marble platforms 18 in different shapes, and meanwhile, the installation number can be set according to actual requirements.

The edge of the top cover 2 is provided with a second through hole 19 at an equal angle, the second through hole 19 penetrates downwards, a second bolt 20 is arranged at the position of the second through hole 19, the top cover 2 is fixedly connected with the cylinder body 1 through the second bolt 20, a third bolt 21 is arranged at the lower end of the air floating cushion 14, and the air floating cushion 14 is fixedly connected with the piston 5 through the third bolt 21. First bolt 4, second bolt 5 and third bolt 11 all adopt hexagon socket head cap screw, and when installing, the fixed connection between top cap 2 and the marble platform 6 carries out earlier simultaneously, perhaps piston 12 places behind the inside of cylinder body 1, carries out fixed connection with air cushion 3 again, uses second bolt 5 to realize the fixed connection between top cap 2 and the cylinder body 1 at last.

The working principle is as follows: when the lifting device is used, air is pumped into the second air outlet 9 through the second connecting port 8, then enters the second air chamber 7 through the second air outlet 9, the top cover 2 above is lifted, the marble platform 18 above is lifted, in the lifting process, the cylinder body 1 is lifted, the pull belt 103 is pulled to move, the friction wheel 102 is rotated, the movable block 104 inside the friction wheel 102 extends out along with the rotation of the friction wheel 102, the friction is higher when the speed is higher, the speed is reduced, the stable speed is kept, the overspeed is avoided, in the descending process, air is pumped into the first connecting port 3, the first air chamber 6 is filled with air through the first air outlet 4, and the top cover 2 slowly descends to complete height adjustment.

The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the gist of the present invention.

Claims

1. Marble precision workbench air supporting climbing mechanism, its characterized in that includes: the cylinder body (1), a top cover (2) is fixedly connected to the upper end of the cylinder body (1), a first connecting port (3) is fixedly connected to the side wall of the top cover (2), the first connecting port (3) is located inside the top cover (2), a first air outlet (4) is formed in the lower surface of the top cover (2), and the first air outlet (4) is communicated with the first connecting port (3);

the piston (5) and the top cover (2) form a first air chamber (6), a second air chamber (7) is formed between the piston (5) and the cylinder body (1), and the first air chamber (6) is communicated with the first air outlet (4);

the second connecting port (8) is positioned on the side wall of the cylinder body (1), a second air outlet (9) is fixedly connected to the upper surface of the cylinder body (1), and the second air outlet (9) is communicated with the second connecting port (8) and the second air chamber (7);

the stable structure (10) comprises a belt wheel (101), a friction wheel (102) and a pull belt (103), wherein the pull belt (103) is fixedly connected with the surface of the belt wheel (101), one end, far away from the belt wheel (101), of the pull belt (103) is fixedly connected with a cylinder body (1), and the side surface of the friction wheel (102) is rotatably connected with a movable block (104).

2. Marble precision bench air flotation jacking mechanism according to claim 1, characterized in that an air flotation cushion (14) is fixedly connected below the piston (5), and the stabilizing structure (10) is located inside the air flotation cushion (14).

3. The air-floating jacking mechanism for the marble precision workbench according to claim 1, wherein a first sealing ring (11) and a second sealing ring (12) are fixedly connected to the inner wall of the cylinder body (1) in sequence, the first sealing ring (11) is in contact with the lower section side wall of the piston (5), and the second sealing ring (12) is in contact with the middle section side wall of the piston (5).

4. Marble precision workbench air-float jacking mechanism according to claim 1, characterized in that the upper section side wall of the piston (5) is fixedly connected with a third sealing ring (13), the third sealing ring (13) is in contact with the inner wall of the top cover (2).

5. Marble precision workbench air flotation jacking mechanism according to claim 1, characterized in that the piston (5) is a three-stage stepped cylinder, the first air outlet (4) and the second air outlet (9 () are both arranged vertically.

6. Marble precision workbench air flotation jacking mechanism according to claim 1, characterized in that the inside of the top cover (2) is fixedly connected with support rings (15), the number of support rings (15) being three.

7. The air-floating jacking mechanism for the marble precision workbench according to claim 1, wherein the edge of the top cover (2) is provided with first through holes (16) at equal angles, first bolts (17) are arranged at the first through holes (16), and the top cover (2) is fixedly connected with a marble platform (18) through the first bolts (17).

8. The air-floating jacking mechanism for the marble precision workbench according to claim 1, characterized in that the edge of the top cover (2) is provided with a second through hole (19) at an equal angle, the second through hole (19) penetrates downwards, a second bolt (20) is arranged at the second through hole (19), and the top cover (2) is fixedly connected with the cylinder body (1) through the second bolt (20).

9. Marble precision workbench air-float jacking mechanism according to claim 1, characterized in that the lower end of the air-float pad (14) is provided with a third bolt (21), the air-float pad (14) is fixedly connected with the piston (5) through the third bolt (21).