CN1155947C - Static test device for storage characteristics of optical storage materials - Google Patents

Static test device for storage characteristics of optical storage materials Download PDF

Info

Publication number
CN1155947C
CN1155947C CNB011263598A CN01126359A CN1155947C CN 1155947 C CN1155947 C CN 1155947C CN B011263598 A CNB011263598 A CN B011263598A CN 01126359 A CN01126359 A CN 01126359A CN 1155947 C CN1155947 C CN 1155947C
Authority
CN
China
Prior art keywords
lens
beam splitter
vertical line
light source
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB011263598A
Other languages
Chinese (zh)
Other versions
CN1338730A (en
Inventor
徐文东
干福熹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Institute of Optics and Fine Mechanics of CAS
Original Assignee
Shanghai Institute of Optics and Fine Mechanics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Institute of Optics and Fine Mechanics of CAS filed Critical Shanghai Institute of Optics and Fine Mechanics of CAS
Priority to CNB011263598A priority Critical patent/CN1155947C/en
Publication of CN1338730A publication Critical patent/CN1338730A/en
Application granted granted Critical
Publication of CN1155947C publication Critical patent/CN1155947C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

一种光存储材料存储特征静态测试装置,主要适用各种光盘记录层材料存储特征的测试。包括测试光源部分、测试显示部分、光束写入读出部分、调整被测位置部分、监视显示部分和监视光源。其中光束写入读出部分是置于被测样品的被测记录层表面之上,有高数值孔径物镜与半球形固体浸润透镜结合为更高数值孔径的显微物镜。所以本发明比在先技术的测试装置分辨率高、测量精度高。更换高数值孔径物镜和半球形固体浸润透镜方便,调节被测样品的位置也方便。本发明中有监视显示部分和监视光源。可以直观地监视调焦过程,并直接观察记录光斑和记录点的形貌,使装置测试直观而操作方便,提高了测试效率。

Figure 01126359

A static test device for storage characteristics of optical storage materials is mainly suitable for testing the storage characteristics of various optical disc recording layer materials. It includes a test light source part, a test display part, a light beam writing and reading part, a part for adjusting the measured position, a monitoring display part and a monitoring light source. The light beam writing and reading part is placed on the surface of the measured recording layer of the measured sample, and a high numerical aperture objective lens and a hemispherical solid immersion lens are combined into a microscope objective lens with a higher numerical aperture. Therefore, the present invention has higher resolution and measurement accuracy than the test device of the prior art. It is convenient to replace the high numerical aperture objective lens and the hemispherical solid immersion lens, and it is also convenient to adjust the position of the measured sample. The present invention has a monitoring display part and a monitoring light source. The focusing process can be monitored intuitively, and the morphology of the recording light spot and the recording point can be directly observed, so that the device test is intuitive and easy to operate, thereby improving the test efficiency.

Figure 01126359

Description

光存储材料存储特征静态测试装置Static test device for storage characteristics of optical storage materials

技术领域:Technical field:

本发明是一种光存储材料存储特征静态测试装置。主要适用的光存储材料是指一次写入光盘(CD-R)、可读写光盘(CD-RW)、高密度一次写入光盘(DVD-R)和高密度可读写光盘(DVD-RW)等等光盘的记录层材料,也可用于其他光点逐点记录的可录和可擦写存储材料。The invention is a static test device for storage characteristics of optical storage materials. The main applicable optical storage materials refer to write-once disc (CD-R), read-write disc (CD-RW), high-density write-once disc (DVD-R) and high-density ) and other optical disc recording layer materials can also be used for other recordable and rewritable storage materials that are recorded point by point.

背景技术:Background technique:

对光存储材料存储特征进行静态测试,包括确定其写入波长,写入功率、写入脉宽、擦除波长,擦除功率和擦除脉宽与信号对比度以及擦除率的关系,是光存储材料进入实用化之前首先要做的事情。测试结果反映了材料存储性质、制备工艺和成膜工艺的综合影响。在先技术中对光存储材料存储特征进行静态测试是采用了一种磁光盘静态测试仪(参见“磁光盘静态测试仪”,陈仲裕、甘柏辉、刘海清和干福熹,《光学学报》,第11卷,第12期,1991年12月,第1110~1114页)。该测试仪显著的缺陷是:只能采用一个波长的激光进行写入和擦除测试,更换激光波长后,设备就不能使用,除非大幅度改造或重换一台;更换物镜也很麻烦;由于物镜是在被测样品之下,无法添加半球形固体浸润透镜;更无法添加监视调焦过程以及写入和擦除后记录点形貌的光学系统。Perform static tests on the storage characteristics of optical storage materials, including determining the write wavelength, write power, write pulse width, erase wavelength, the relationship between erase power and erase pulse width, signal contrast and erasure rate. The first thing to do before storage materials are put into practical use. The test results reflect the comprehensive influence of material storage properties, preparation process and film-forming process. In the prior art, a static tester for the storage characteristics of optical storage materials was adopted using a magneto-optical disc static tester (see "Magneto-optical disc static tester", Chen Zhongyu, Gan Baihui, Liu Haiqing and Gan Fuxi, "Acta Optics Sinica", No. 11 Vol. 12, December 1991, pp. 1110-1114). The obvious defect of this tester is: only one wavelength of laser can be used for writing and erasing testing, and after changing the laser wavelength, the device cannot be used unless it is greatly modified or replaced; it is also very troublesome to replace the objective lens; The objective lens is under the sample to be tested, and it is impossible to add a hemispherical solid immersion lens; it is even more impossible to add an optical system for monitoring the focusing process and recording point morphology after writing and erasing.

发明内容:Invention content:

本发明的光存储材料存储特征静态测试装置,包括几大部分,有测试光源部分、测试显示部分、光束写入读出部分、调整被测位置部分、监视显示部分和监视光源。其中测试光源部分:含有激光器6,沿着激光器6发射光束G前进方向的光轴oo上,依次置有声光调制器7,扩束组件8、立方偏光棱镜9、四分之一波片10和分光镜11。分光镜11的分光面与光轴oo成45°角放置。The static test device for storage characteristics of optical storage materials of the present invention includes several parts, including a test light source part, a test display part, a light beam writing and reading part, a part for adjusting the measured position, a monitor display part and a monitor light source. Among them, the test light source part: contains a laser 6, along the optical axis oo along the forward direction of the light beam G emitted by the laser 6, an acousto-optic modulator 7, a beam expander assembly 8, a cubic polarizing prism 9, and a quarter-wave plate 10 are arranged in sequence. and beam splitter 11. The beam splitting surface of the beam splitter 11 is placed at an angle of 45° to the optical axis oo.

其中测试显示部分:含有置于通过立方偏光棱镜9分光面的中心点且垂直于激光器6发射光束G光轴oo的第一条垂直线o1o1上的会聚透镜12和光电探测器14。光电探测器14的输出通过电子控制箱22连接到带有显示器24的计算机23上。Among them, the test display part: contains the converging lens 12 and the photodetector 14 placed on the first vertical line o 1 o 1 passing through the center point of the beam splitting surface of the cubic polarizing prism 9 and perpendicular to the optical axis oo of the laser beam G emitted by the laser 6 . The output of the photodetector 14 is connected via an electronic control box 22 to a computer 23 with a display 24 .

光束写入读出部分,包括在穿过分光镜11中心点Oo的垂直于激光器6发射光束G光轴oo的第二条垂直线o2o2上,分光镜11反射光束G1前进的方向上置有数值孔径>0.8的物镜13和半球形固体浸润透镜15,半球形浸润透镜15的球面向着物镜13,物镜13的焦点落在半球形固体浸润透镜15平面的中心点上。The light beam is written into the readout part, including on the second vertical line o 2 o 2 passing through the central point Oo of the beam splitter 11 and perpendicular to the optical axis oo of the laser beam G emitted by the laser 6, the direction in which the light beam G 1 is reflected by the beam splitter 11 An objective lens 13 with a numerical aperture > 0.8 and a hemispherical solid immersion lens 15 are placed on it, the spherical surface of the hemispherical immersion lens 15 faces the objective lens 13, and the focus of the objective lens 13 falls on the center point of the plane of the hemispherical solid immersion lens 15 .

所说的调整被测位置部分,包括被测样品16放置在内部装有第一限位开关18和第二限位开关20的一维平移台19上,被测样品16的被测记录层表面与半球形浸润透镜15的平面接触,为了减少被测记录层表面与半球形浸润透镜15平面接触处的光损耗,要使两者的表面紧密接触,两者表面之间的最大间距小于150纳米,或者在两表面之间放有折射率油。一维平移台19置于三维平台21上,一维平移台19连接有步进电机17。步进电机17、第一限位开关18和第二限位开关20通过电子控制箱22与计算机23相连。The part of adjusting the measured position includes that the measured sample 16 is placed on the one-dimensional translation platform 19 with the first limit switch 18 and the second limit switch 20 inside, and the measured recording layer surface of the measured sample 16 In contact with the plane of the hemispherical wetting lens 15, in order to reduce the light loss at the plane contact between the surface of the measured recording layer and the hemispherical wetting lens 15, the surfaces of the two should be in close contact, and the maximum distance between the two surfaces should be less than 150 nanometers , or with an index of refraction oil between the two surfaces. The one-dimensional translation platform 19 is placed on the three-dimensional platform 21 , and the one-dimensional translation platform 19 is connected with a stepping motor 17 . The stepper motor 17 , the first limit switch 18 and the second limit switch 20 are connected with the computer 23 through the electronic control box 22 .

所说的监视显示部分,包括在上述激光器6发射光束G光轴oo的第二条垂直线o2o2上,在分光镜11反射光束G1前进方向的反方向上,由分光镜11开始依次置有半反半透分光镜4、镜筒透镜3和带有监视器2的摄像机1。镜筒透镜3的焦点恰好落在摄像机1的接收面101上。半反半透分光镜4的分光面与第二条垂直线o2o2成45°角放置。Said monitor display part includes on the second vertical line o 2 o 2 of the optical axis oo of the light beam G emitted by the above-mentioned laser 6, on the opposite direction of the forward direction of the light beam G 1 reflected by the beam splitter 11, starting from the beam splitter 11 in sequence A semi-reflective beam splitter 4, a tube lens 3 and a video camera 1 with a monitor 2 are provided. The focus of the tube lens 3 falls precisely on the receiving surface 101 of the camera 1 . The light-splitting surface of the semi-reflective beam splitter 4 is placed at an angle of 45° to the second vertical line o 2 o 2 .

所说的监视光源是白光光源5,白光光源5光轴o3o3与穿过半反半透分光镜4中心点垂直于第二条垂直线o2o2的垂直线o3o3重合。它包括自半反半透分光镜4至白炽灯505之间的白光光源5光轴o3o3上,依次置有照明透镜501、孔径光阑502、视场光阑503和聚焦透镜504。Said monitoring light source is a white light source 5, the optical axis o3o3 of the white light source 5 coincides with the vertical line o3o3 passing through the center point of the semi-reflective beam splitter 4 and perpendicular to the second vertical line o2o2 . It includes an illumination lens 501 , an aperture stop 502 , a field stop 503 and a focus lens 504 on the optical axis o 3 o 3 of the white light source 5 from the semi-reflective beam splitter 4 to the incandescent lamp 505 .

所述的分光镜11的分光面上镀有对激光器6发射激光束波长反射率大于95%的分光膜。The beam-splitting surface of the beam-splitter mirror 11 is coated with a beam-splitting film with a reflectivity greater than 95% for the wavelength of the laser beam emitted by the laser 6 .

所述的被测样品16的被测记录层表面与半球形固体浸润透镜15的平面是紧密接触,或者两者之间放有折射率油。The surface of the measured recording layer of the tested sample 16 is in close contact with the plane of the hemispherical solid immersion lens 15, or a refractive index oil is placed between the two.

本发明的光存储材料存储特征静态测试装置如上所述和图1所示的结构。下面结合附图详细描述本发明的结构。所说的测试光源部分有激光器6。在激光器6的发射窗口一边,有声光调制器7,声光调制器7的方位应使激光通过它之后衍射的一级衍射光最强。从声光调制器7输出光束前进方向上,依次置有扩束组件8、立方偏光棱镜9、四分之一波片10和分光镜11。扩束组件8的光轴oo与声光调制器7的一级衍射光重合。立方偏光棱镜9、四分之一波片10的中心位于光轴oo上,且它们的入射面与光轴oo垂直。四分之一波片10的快轴方向与激光器6输出的线偏振光的偏振方向成45°角。分光镜11的分光面与光轴oo成45°角,且其中心点Oo位于光轴oo上。The optical storage material storage feature static testing device of the present invention has the structure as described above and shown in FIG. 1 . The structure of the present invention will be described in detail below in conjunction with the accompanying drawings. Said test light source part has laser 6. On one side of the emission window of the laser 6, there is an acousto-optic modulator 7, and the orientation of the acousto-optic modulator 7 should make the first-order diffracted light after the laser passes through it the strongest. A beam expander assembly 8 , a cubic polarizer 9 , a quarter-wave plate 10 and a beam splitter 11 are sequentially arranged in the forward direction of the light beam output from the acousto-optic modulator 7 . The optical axis oo of the beam expander 8 coincides with the first-order diffracted light of the AOM 7 . The centers of the cubic polarizing prism 9 and the quarter-wave plate 10 are located on the optical axis oo, and their incident planes are perpendicular to the optical axis oo. The direction of the fast axis of the quarter-wave plate 10 forms an angle of 45° with the polarization direction of the linearly polarized light output by the laser 6 . The beam splitting surface of the beam splitter 11 forms an angle of 45° with the optical axis oo, and its center point Oo is located on the optical axis oo.

通过分光镜11的分光面的中心点Oo垂直于光轴oo的第二条垂直线o2o2上有半球形固体浸润透镜15,半球形固体浸润透镜15的平面相当于置于被测样品16表面上,被测样品16放在一维平移台19上,一维平移台19置于三维平台21上。有第一限位开关18和第二限位开关20安装在一维平移台19内,第一限位开关18和第二限位开关20与电子控制箱22连接。一维平移台19由与其连接的步进电机17驱动其位移,步进电机17与电子控制箱22连接。电子控制箱22通过电缆与计算机23连接,计算机23内部的信号发生接口板通过导线与声光调制器7连接,计算机23的输入信息以及结果信息由通过电缆与其连接的显示器24显示。在半球形固体浸润透镜15与分光镜11的分光面的中心点Oo之间的第二条垂直线o2o2上,有光轴与第二条垂直线o2o2重合的物镜13,物镜13的焦点落在半球形固体浸润透镜15的平面上。在第二条垂直线o2o2上,有中心轴线与第二条垂直线o2o2重合的带有监视器2的摄像机1,摄像机1的接收面101隔着分光镜11与半球形固体浸润透镜15相对。在分光镜11与摄像机1的接收面101之间的第二条垂直线o2o2上,有光轴与第二条垂直线o2o2重合的镜筒透镜3,镜筒透镜3的焦点落在摄像机1的接收面101上。在分光镜11与镜筒透镜3之间的第二条垂直线o2o2上,有反射面中心点在第二条垂直线o2o2上的半反半透分光镜4,半反半透分光镜4的反射面向着分光镜11,且与第二条垂直线o2o2成45°角。The center point Oo of the splitting surface of the beam splitter 11 is perpendicular to the second vertical line o 2 o 2 of the optical axis oo. There is a hemispherical solid immersion lens 15, and the plane of the hemispherical solid immersion lens 15 is equivalent to placing the measured sample 16 , the tested sample 16 is placed on a one-dimensional translation platform 19 , and the one-dimensional translation platform 19 is placed on a three-dimensional platform 21 . A first limit switch 18 and a second limit switch 20 are installed in the one-dimensional translation platform 19 , and the first limit switch 18 and the second limit switch 20 are connected with an electronic control box 22 . The displacement of the one-dimensional translation stage 19 is driven by a stepper motor 17 connected thereto, and the stepper motor 17 is connected with an electronic control box 22 . The electronic control box 22 is connected with the computer 23 through a cable, and the signal generation interface board inside the computer 23 is connected with the acousto-optic modulator 7 through wires, and the input information and result information of the computer 23 are displayed by the display 24 connected with the cable. On the second vertical line o 2 o 2 between the hemispherical solid immersion lens 15 and the center point Oo of the beam splitting surface of the beam splitter 11, there is an objective lens 13 whose optical axis coincides with the second vertical line o 2 o 2 , The focal point of the objective lens 13 falls on the plane of the hemispherical solid immersion lens 15 . On the second vertical line o 2 o 2 , there is a camera 1 with a monitor 2 whose central axis coincides with the second vertical line o 2 o 2 . The solid immersion lens 15 is opposite. On the second vertical line o 2 o 2 between the beam splitter 11 and the receiving surface 101 of the camera 1, there is a lens tube lens 3 whose optical axis coincides with the second vertical line o 2 o 2 , and the lens tube lens 3 The focal point falls on the receiving surface 101 of the camera 1 . On the second vertical line o 2 o 2 between the beam splitter 11 and the barrel lens 3, there is a semi-reflective and semi-transparent beam splitter 4 whose center point of the reflective surface is on the second vertical line o 2 o 2 . The reflective surface of the semi-transparent beam splitter 4 faces the beam splitter 11 and forms an angle of 45° with the second vertical line o 2 o 2 .

通过半反半透分光镜4的反射面的中心点有与第二条垂直线o2o2垂直的垂直线o3o3。此垂直线o3o3是白光光源5的光轴。There is a vertical line o 3 o 3 perpendicular to the second vertical line o 2 o 2 passing through the center point of the reflective surface of the half-reflective beam splitter 4 . This vertical line o 3 o 3 is the optical axis of the white light source 5 .

通过立方偏光棱镜9的分光面的中心点垂直于光轴oo的第一条垂直线o1o1上置有光电探测器14,其中心轴线与穿过立方偏光棱镜9的中心点的第一条垂直线o1o1重合,与第二条垂直线o2o2平行。同时,激光器6的方位应使输出的线偏振光的偏振方向与第一条垂直线o1o1和光轴oo决定的平面平行。光电探测器14的输出与电子控制箱22连接。在光电探测器14与立方偏光棱镜9之间的第一条垂直线o1o1上,有光轴与第一条垂直线o1o1重合的会聚透镜12,会聚透镜12的焦点落在光电探测器14的接收面上。A photodetector 14 is placed on the first vertical line o 1 o 1 perpendicular to the optical axis oo by the central point of the beam splitting surface of the cubic polarizing prism 9, and its central axis is the same as the first vertical line passing through the central point of the cubic polarizing prism 9. The first vertical line o 1 o 1 coincides with the second vertical line o 2 o 2 . At the same time, the orientation of the laser 6 should make the polarization direction of the output linearly polarized light parallel to the plane determined by the first vertical line o 1 o 1 and the optical axis oo. The output of the photodetector 14 is connected to an electronic control box 22 . On the first vertical line o 1 o 1 between the photodetector 14 and the cubic polarizing prism 9, there is a converging lens 12 whose optical axis coincides with the first vertical line o 1 o 1 , and the focus of the converging lens 12 falls on on the receiving surface of the photodetector 14.

所说的扩束组件8,包括光轴与光轴oo重合的发散凹透镜801和准直凸透镜802,两个透镜的焦点重合。发散凹透镜801将光束发散,准直凸透镜802再将发散的光束变成平行光束G,此出射的平行光束G的口径要比入射时的口径大,即比声光调制器7出射的一级衍射光束口径大。The beam expander assembly 8 includes a diverging concave lens 801 and a collimating convex lens 802 whose optical axes coincide with the optical axis oo, and the focal points of the two lenses coincide. The divergent concave lens 801 diverges the beam, and the collimating convex lens 802 turns the diverged beam into a parallel beam G. The diameter of the outgoing parallel beam G is larger than that of the incident beam, that is, it is larger than the first-order diffraction beam emitted by the acousto-optic modulator 7. The beam aperture is large.

所说的分光镜11分光面上镀有对激光器6的发射激光束波长λ反射率大于95%的分光膜,说所的分光镜11的分光面就是镀有分光膜的表面。Said beam splitter 11 is coated on the beam splitting surface to the emitting laser beam wavelength λ reflectivity of laser 6 and is greater than 95% beam splitting film, said that the beam splitting surface of said beam splitting mirror 11 is exactly the surface that is coated with beam splitting film.

所说的半反半透分光镜4是一个表面上镀有对白光反射50%,透过50%的半反半透膜层的玻璃平行平板,说所的半反半透分光镜4的反射面就是镀有对白光半反半透膜层的表面。Said semi-reflective and semi-transparent beam splitter 4 is coated with 50% to white light reflection on the surface, passes through the glass parallel plate of 50% semi-reflective and semi-transparent film layer, says the reflection of said semi-reflective and semi-transparent beam splitter 4 The surface is the surface coated with a semi-reflective and semi-transparent film layer for white light.

所说的物镜的数值孔径>0.8。The numerical aperture of said objective lens is >0.8.

所说的半球形固体浸润透镜的半球的半径小于1毫米。The radius of the hemisphere of said hemispherical solid wetted lens is less than 1 mm.

所说的立方偏光棱镜9由两个等边直角棱镜胶合而成,胶合面上镀有偏振分光膜,对偏振方向垂直于光轴oo与第一条垂直线o1o1所构成平面的光(S)透射,对偏振方向平行于光轴oo与第一条垂直线o1o1所构成平面的光(P)反射,所说的立方偏光棱镜9的分光面就是镀有偏振分光膜的胶合面。The said cubic polarizing prism 9 is formed by glueing two equilateral rectangular prisms, and the glued surface is coated with a polarizing beam splitting film, for the light whose polarization direction is perpendicular to the plane formed by the optical axis oo and the first vertical line o 1 o 1 (S) transmits, and reflects the light (P) whose polarization direction is parallel to the plane formed by the optical axis oo and the first vertical line o 1 o 1 . glued surface.

本发明的测试仪如上所述的结构,激光器6发射的单色(波长为λ)线偏振平行光束通过声光调制器7后将发生衍射。声光调制器7一级衍射光通过扩束组件8后形成宽的光束G。光束G通过立方偏光棱镜9的偏振分光膜,对S光透射,对P光反射,也就是说,立方偏光棱镜9的分光面对激光器6输出的偏振方向为线偏振光是透过的。透过立方偏光棱镜9的线偏振光束穿过四分之一波片10,因为四分之一波片10的快轴方向与入射线偏振光的偏振方向成45°角,所以通过四分之一波片10后线偏振光束变成园偏振光。再通过分光镜11,因为分光镜11的分光面是一个表面上镀有对激光器6的输出激光波长λ的反射率大于95%的分光膜,所以光束经分光镜11有95%的光束被反射后成为平行光束G1,平行光束G1通过物镜13,将光束会聚在被测样品16的表面上,因半球形固体浸润透镜15的平面是置于被测样品16的表面上,即半球形固体浸润透镜15的平面与被测样品16表面是紧密接触。而且被测样品16与半球形固体浸润透镜15接触的一面就是镀有记录层的被测表面。通过物镜13的会聚光束通过半球形固体浸润透镜15的球面后最终会聚到物镜13的焦点处,也是半球形固体浸润透镜15的平面的中心点处,也就是光束通过半球形固体浸润透镜15平面后会聚到被测样品16上有记录层的表面上。被测样品16是放在一维平移台19上。一维平移台19又固定在三维平台21上。三维平台21和一维平移台19用于调节被测样品16的平移及上下左右前后的位置。一维平移台19由与其连接的步进电机17驱动位移。步进电机17与电子控制箱22连接。电子控制箱22控制步进电机17工作。第一限位开关18和第二限位开关20装在一维平移台19内,与电子控制箱22连接。当一维平移台19移动到一定位置时,第一限位开关18和第二限位开关20之一将发送信号给电子控制箱22。因电子控制箱22与计算机23连接,计算机23通过电子控制箱22、步进电机17、第一限位开关18和第二限位开关20控制一维平移台19的移动。计算机23内部的信号发生接口板与声光调制器7连接,从而控制声光调制器7一级衍射光的强弱和通断时间。计算机23的输入信息以及结果信息由通过电缆与其连接的显示器24显示。With the structure of the tester of the present invention as described above, the monochromatic (wavelength λ) linearly polarized parallel beam emitted by the laser 6 will be diffracted after passing through the acousto-optic modulator 7 . The first-order diffracted light of the acousto-optic modulator 7 forms a wide beam G after passing through the beam expander 8 . The light beam G passes through the polarizing beam splitting film of the cubic polarizing prism 9, transmits the S light, and reflects the P light. The linearly polarized light beam passing through the cubic polarizing prism 9 passes through the quarter-wave plate 10, because the fast axis direction of the quarter-wave plate 10 forms an angle of 45° with the polarization direction of the incident line polarized light, so passing through the quarter-wave plate 10 After a wave plate 10, the linearly polarized light beam becomes circularly polarized light. Pass through the beam splitter 11 again, because the beam splitting surface of the beam splitter 11 is a spectroscopic film coated with a reflectivity greater than 95% to the output laser wavelength λ of the laser device 6 on the surface, so the light beam has 95% of the light beam to be reflected through the beam splitter 11 After that, it becomes a parallel beam G 1 , which passes through the objective lens 13 and converges the beam on the surface of the tested sample 16, because the plane of the hemispherical solid immersion lens 15 is placed on the surface of the tested sample 16, that is, hemispherical The plane of the solid immersion lens 15 is in close contact with the surface of the tested sample 16 . Moreover, the side of the tested sample 16 in contact with the hemispherical solid immersion lens 15 is the tested surface coated with a recording layer. The converging light beam passing through the objective lens 13 finally converges to the focal point of the objective lens 13 after passing through the spherical surface of the hemispherical solid wetting lens 15, which is also the center point of the plane of the hemispherical solid wetting lens 15, that is, the light beam passes through the plane of the hemispherical solid wetting lens 15 Then converge on the surface of the test sample 16 with the recording layer. The tested sample 16 is placed on a one-dimensional translation stage 19 . The one-dimensional translation stage 19 is fixed on the three-dimensional platform 21 again. The three-dimensional platform 21 and the one-dimensional translation stage 19 are used to adjust the translation and the position of the sample 16 to be measured 16 up, down, left, right, front, back, and back. The one-dimensional translation stage 19 is driven and displaced by a stepper motor 17 connected thereto. The stepper motor 17 is connected with the electronic control box 22 . The electronic control box 22 controls the stepper motor 17 to work. The first limit switch 18 and the second limit switch 20 are installed in the one-dimensional translation platform 19 and connected with the electronic control box 22 . When the one-dimensional translation platform 19 moves to a certain position, one of the first limit switch 18 and the second limit switch 20 will send a signal to the electronic control box 22 . Because the electronic control box 22 is connected with the computer 23, the computer 23 controls the movement of the one-dimensional translation platform 19 through the electronic control box 22, the stepping motor 17, the first limit switch 18 and the second limit switch 20. The signal generation interface board inside the computer 23 is connected to the acousto-optic modulator 7 to control the intensity and on-off time of the first-order diffracted light of the acousto-optic modulator 7 . Input information and result information of the computer 23 are displayed by a display 24 connected thereto through a cable.

会聚于物镜13的焦点处的光束由置于物镜13的焦点处的被测样品16上的记录层反射,沿原路返回,经过半球形固体浸润透镜15的透射、物镜13的折射、分光镜11的反射后,入射到四分之一波片10上,经过四分之一波片10后,园偏振光变为线偏振光,且偏振方向与激光器6输出的线偏振光的偏振方向成90°角,再入射到立方偏光棱镜9时,将由立方偏光棱镜9内的分光面反射后经过会聚透镜12将光束会聚,会聚点在光电探测器14的接收面上,光电探测器14将光信号转化为电信号送到电子控制箱22内,电子控制箱22再将此电信号送入计算机23内,由计算机23对电信号进行A/D变换和数据采集。其结果由显示器24显示出。The light beam converging at the focal point of the objective lens 13 is reflected by the recording layer on the test sample 16 placed at the focal point of the objective lens 13, returns along the original path, and passes through the transmission of the hemispherical solid immersion lens 15, the refraction of the objective lens 13, and the beam splitter. After the reflection of 11, it is incident on the quarter-wave plate 10. After passing through the quarter-wave plate 10, the circularly polarized light becomes linearly polarized light, and the polarization direction is proportional to the polarization direction of the linearly polarized light output by the laser 6. 90 ° angle, when it is incident on the cubic polarizing prism 9 again, the light beam will be converged through the converging lens 12 after being reflected by the dichroic surface in the cubic polarizing prism 9, and the converging point is on the receiving surface of the photodetector 14, and the photodetector 14 will light The signal is converted into an electrical signal and sent to the electronic control box 22, and the electronic control box 22 sends the electrical signal to the computer 23, and the computer 23 performs A/D conversion and data acquisition on the electrical signal. The result is displayed on the display 24 .

白光光源5发射的白光光束G2经半反半透分光镜4反射后的光束,透过分光镜11、物镜13和半球形固体浸润透镜15会聚到被测样品16有记录层的表面上。由被测样品16有记录层的表面反射的白光光束再通过半球形固体浸润透镜15后由物镜13收集、经分光镜11和半反半透分光镜4,透射后的光形成光束G3,经镜筒透镜3后,在镜筒透镜3的像方焦面上形成被测样品16有记录层的表面的像。恰好摄像机1的接受面101是在镜筒透镜3的像方焦面上,所以摄像机1就将接受到的被测样品16有记录层的表面的像送到监视器2上显示,以此不断地监视着被测样品16的状态。如图1所示。The white light beam G2 emitted by the white light source 5 is reflected by the semi-reflective and semi-transparent beam splitter 4, passes through the beam splitter 11, the objective lens 13 and the hemispherical solid immersion lens 15 and converges to the surface of the test sample 16 with a recording layer. The white light beam reflected by the surface of the measured sample 16 with a recording layer passes through the hemispherical solid infiltration lens 15, is collected by the objective lens 13, passes through the beam splitter 11 and the semi-reflective beam splitter 4, and the transmitted light forms a beam G3, which passes through the After the lens tube lens 3 , an image of the surface of the test sample 16 with the recording layer is formed on the image side focal plane of the lens tube lens 3 . Just the receiving surface 101 of the camera 1 is on the focal plane of the image side of the lens barrel lens 3, so the camera 1 will send the received image of the surface of the tested sample 16 having a recording layer to the monitor 2 for display, thus continuously The state of the sample 16 to be tested is closely monitored. As shown in Figure 1.

本发明的测试仪首先是光束写入读出部分是置于被测样品16的被测记录层表面之上,调整方便,其中有数值孔径>0.8的物镜13与半球形固体浸润透镜15结合为更高数值孔径的显微镜物镜。为此本发明的测试装置比在先技术的测量装置分辨率高、测量精度高。而且更换物镜13和半球形固体浸润透镜15方便。本发明的测试装置光源部分是将与激光器6波长有关的部件和与激光器6波长无关的部件分离开来,更换激光器6后,只需微调扩束组件8,更换立方偏光棱镜9、四分之一波片10和分光镜11,其它部件或元件无需全部调整和更换,扩展了装置的使用范围;因为物镜13可像显微镜物镜那样更换;当然半球形固体浸润透镜15可以加上去,也可以不加上去,加上后可进行近场光存储研究,测量高密度的光盘读与写,不加上去,就是普通的静态测试装置。本发明含有监视显示部分和监视光源部分,可直观地监视调焦过程,并直接观察记录光斑和记录点(初次写入的点或擦出后的点)的形貌,使本发明的测试仪的测试直观而操作方便,提高了测试的效率。In the tester of the present invention, at first the beam writing and reading part is placed on the surface of the measured recording layer of the measured sample 16, which is convenient to adjust, wherein the objective lens 13 with a numerical aperture>0.8 is combined with a hemispherical solid immersion lens 15 to form a Higher numerical aperture microscope objectives. For this reason, the test device of the present invention has higher resolution and higher measurement precision than the measuring device of the prior art. Moreover, it is convenient to replace the objective lens 13 and the hemispherical solid immersion lens 15. The light source part of the test device of the present invention is to separate the parts related to the wavelength of the laser 6 from the parts irrelevant to the wavelength of the laser 6. After replacing the laser 6, only need to fine-tune the beam expander assembly 8, and replace the cubic polarizing prism 9, a quarter A wave plate 10 and beam splitter 11, other parts or elements do not need to be fully adjusted and replaced, which expands the range of use of the device; because the objective lens 13 can be replaced like a microscope objective lens; certainly the hemispherical solid immersion lens 15 can be added or not Add it, after adding it, you can conduct near-field optical storage research, and measure high-density optical disc reading and writing. If you don’t add it, it is an ordinary static test device. The present invention contains a monitoring display part and a monitoring light source part, which can visually monitor the focusing process, and directly observe the morphology of the recording spot and the recording point (the point written for the first time or the point after erasing), so that the tester of the present invention The test is intuitive and easy to operate, which improves the efficiency of the test.

附图说明:Description of drawings:

图1是本发明的光存储材料存储特征静态测试装置的结构示意图。Fig. 1 is a schematic structural view of a static test device for storage characteristics of an optical storage material according to the present invention.

具体实施方式:Detailed ways:

装置如图1所示。激光器6采用氩离子气体激光器(波长514.5nm),光束直径1mm左右,发散度为1毫弧度,最高功率大于100mW。声光调制器7的载频为100MHz,调制频率0~10MHz,衍射效率大于85%。物镜13的数值孔径为0.9,工作距离2mm。扩束组件8的扩束倍率为10倍。半球形固体浸润透镜15的折射率大于1.8,半径为0.714mm。镜筒透镜3焦距200mm。摄像机1为1/4″彩色电荷耦合器(CCD)摄像头。监视器2为十四英寸彩色监视器。测试过程中,如上述图1的结构,将被测样品16放在一维平移台19上,调整一维平移台19和三维平台21使被测样品16的被测表面与半球形固体浸润透镜15的平面紧密接触,或者在两者之间加一层折射率油以提高近场耦合的效率。打开所有电源,包括激光器6的电源、声光调制器7的电源、电子控制箱22的电源、计算机23的电源、显示器24的电源、白炽灯505的电源、摄像机1的电源和监视器2的电源。激光器6有激光输出。由计算机23向声光调制器7发送一个直流信号,激光器6通过声光调制器7后产生恒定的一级衍射光,调整声光调制器7的方位,使一级衍射光最强。由计算机23控制,给声光调制器7输出一个零信号,使一级衍射光消失,激光器6的输出激光就不能入射到扩束组件8上及其后的光学元件上。The device is shown in Figure 1. The laser 6 is an argon ion gas laser (wavelength 514.5nm), with a beam diameter of about 1mm, a divergence of 1 milliradian, and a maximum power greater than 100mW. The carrier frequency of the acousto-optic modulator 7 is 100MHz, the modulation frequency is 0-10MHz, and the diffraction efficiency is greater than 85%. The numerical aperture of the objective lens 13 is 0.9, and the working distance is 2mm. The beam expansion magnification of the beam expander assembly 8 is 10 times. The hemispherical solid immersion lens 15 has a refractive index greater than 1.8 and a radius of 0.714 mm. Tube lens 3 focal length 200mm. Video camera 1 is a 1/4 " color charge-coupled device (CCD) camera. Monitor 2 is a fourteen-inch color monitor. In the test process, as the structure of above-mentioned Fig. 1, tested sample 16 is placed on one-dimensional translation stage 19 First, adjust the one-dimensional translation stage 19 and the three-dimensional platform 21 so that the measured surface of the measured sample 16 is in close contact with the plane of the hemispherical solid immersion lens 15, or add a layer of refractive index oil between the two to improve the near-field coupling efficiency. Turn on all power supplies, including the power supply of the laser 6, the power supply of the acousto-optic modulator 7, the power supply of the electronic control box 22, the power supply of the computer 23, the power supply of the display 24, the power supply of the incandescent lamp 505, the power supply of the video camera 1 and the monitoring The power supply of the device 2. The laser device 6 has a laser output. A DC signal is sent to the AOM 7 by the computer 23, and the laser device 6 passes through the AOM 7 to produce a constant first-order diffracted light to adjust the orientation of the AOM 7 , make the first-order diffracted light the strongest. Controlled by computer 23, a zero signal is output to the acousto-optic modulator 7, so that the first-order diffracted light disappears, and the output laser light of laser device 6 just cannot be incident on beam expander assembly 8 and subsequent on the optical element.

与此同时,由白光光源5发射的白光光束G2入射到半反半透分光镜4上,由其反射后入射到分光镜11上;透过分光镜11的光束入射到物镜13上后再入射到半球形固体浸润透镜15上。此时,物镜13和半球形固体浸润透镜15结合相当于一个更高数值孔径的显微镜物镜,它将入射到它们上的光束会聚到被测样品16有记录层的表面上。由被测样品16被测的有记录层的表面散射的光再由半球形固体浸润透镜15和物镜13收集,沿原路返回,透过分光镜11和半反半透分光镜4后,由镜筒透镜3将被测样品16有记录层的表面成像在摄像机1接受面101上。监视器2将被测样品16有记录层的表面像显示出来。开始时半球形固体浸润透镜15的位置可能不合适,监视器2上没有像显示出来,此时,左右、前后和上下调节三维平台21,使像在监视器2上显示出来。At the same time, the white light beam G2 emitted by the white light source 5 is incident on the semi-reflective and semi-transparent beam splitter 4, and is incident on the beam splitter 11 after being reflected by it; incident on the hemispherical solid immersion lens 15. At this time, the objective lens 13 and the hemispherical solid immersion lens 15 are combined with a microscope objective lens with a higher numerical aperture, which converges the light beams incident on them to the surface of the measured sample 16 having a recording layer. The light scattered by the surface of the recording layer measured by the measured sample 16 is collected by the hemispherical solid immersion lens 15 and the objective lens 13, returns along the original path, and passes through the beam splitter 11 and the half-reflection beam splitter 4. The barrel lens 3 images the surface of the sample 16 with the recording layer on the receiving surface 101 of the camera 1 . The monitor 2 displays the surface image of the test sample 16 with the recording layer. At the beginning, the position of the hemispherical solid infiltration lens 15 may be inappropriate, and there is no image displayed on the monitor 2. At this time, the three-dimensional platform 21 is adjusted left and right, front and rear, and up and down, so that the image is displayed on the monitor 2.

然后由计算机23控制,使步进电机17向某个方向旋转一步,一维平移台19随之向某个方向位移一步,计算机23向声光调制器7发出一个电脉冲信号,通过声光调制器7后的一级衍射光就成为一个光脉冲,通过扩束组件8的扩束后成为光束G,入射到立方偏光棱镜9上,透过立方偏光棱镜9的光束再经过四分之一波片10后变成园偏振光。园偏振光打在分光镜11上反射后成为平行光束G1。平行光束G1通过物镜13和半球形固体浸润透镜15后会聚于物镜13在被测样品16的记录层上的焦点处,与此同时记录出一个点(用于写入测试),在监视器2上可以观察该点的形貌。Then controlled by the computer 23, the stepping motor 17 is rotated one step in a certain direction, and the one-dimensional translation table 19 is displaced one step in a certain direction thereupon, and the computer 23 sends an electric pulse signal to the acousto-optic modulator 7, and the acousto-optic modulation The first-order diffracted light behind the device 7 becomes a light pulse, which becomes a light beam G after being expanded by the beam expander assembly 8, and is incident on the cubic polarizing prism 9, and the light beam passing through the cubic polarizing prism 9 passes through a quarter wave After the plate 10, it becomes circularly polarized light. The circularly polarized light is reflected on the beam splitter 11 and becomes a parallel light beam G 1 . Parallel light beam G 1 converges on the focal point of the objective lens 13 on the recording layer of the tested sample 16 after passing through the objective lens 13 and the hemispherical solid immersion lens 15, and at the same time records a point (for writing test), on the monitor 2 to observe the shape of the point.

计算机23再向声光调制器7发出一个幅度较小的电脉冲信号,通过声光调制器7后的一级衍射光就成为一个功率较小光脉冲,光束同样经过上述过程会聚于物镜13的焦点处,也就是被测样品16的记录层上同一点,由于光脉冲功率低,它不能记录一个点只能用于读出此记录点的反射率变化,由记录点散射的光沿原路返回,经过半球形固体浸润透镜15和物镜13以及分光镜11的反射后,入射到四分之一波片10上,经过四分之一波片10后,园偏振光变为线偏振光,且偏振方向与激光器6输出的线偏振光的偏振方向成90°角,所以再入射到立方偏光棱镜9时,立方偏光棱镜9将此光束反射。反射到会聚透镜12上后会聚到光电探测器14的接收面上,光电探测器14将光信号转化为电信号,并送到电子控制箱22,由计算机23来读取。上面所述是一次写入过程和一次读取过程。当测试材料的信号对比度时,是先进行一次读的过程,记录此时的光电探测器14输出信号,写入一次,再同样读取一次,记录此时的光电探测器14输出信号,两个信号的差异就代表了信号对比度。擦除率的测试过程是这样的:先进行一次读的过程,记录此时的光电探测器14输出信号,写入一次,擦除一次(由计算机23输出到声光调制器7的电脉冲信号幅度介于写入和读取幅度之间,其他与写入和读取过程相同),再同样读取一次,记录此时的光电探测器14输出信号,两个信号的差异就代表了擦除率。写入、读取和擦除的电脉冲信号的长短和幅度是可变的,一维平移台19向某个方向位移一步,改变写入、读取或擦除的电脉冲信号的长短或幅度,重复一次,然后再步进一步,再改变写入、读取或擦除的电脉冲信号的长短或幅度,再重复一次,如此反复几次或几十次,就可给出信号对比度或擦除率随某个条件变化的曲线。The computer 23 sends an electrical pulse signal with a smaller amplitude to the AOM 7, and the first-order diffracted light after passing through the AOM 7 becomes a light pulse with a smaller power, and the light beam is also converged at the end of the objective lens 13 through the above-mentioned process. At the focal point, that is, the same point on the recording layer of the tested sample 16, due to the low power of the light pulse, it cannot record a point and can only be used to read the reflectivity change of this recording point, and the light scattered by the recording point travels along the original path. Return, after being reflected by the hemispherical solid immersion lens 15, the objective lens 13 and the beam splitter 11, it is incident on the quarter-wave plate 10, and after passing through the quarter-wave plate 10, the circularly polarized light becomes linearly polarized light, And the polarization direction is at an angle of 90° to the polarization direction of the linearly polarized light output by the laser 6, so when it is incident on the cubic polarizing prism 9, the cubic polarizing prism 9 will reflect the light beam. After being reflected on the converging lens 12, it converges on the receiving surface of the photodetector 14. The photodetector 14 converts the optical signal into an electrical signal, and sends it to the electronic control box 22 for reading by the computer 23. The above is a writing process and a reading process. When testing the signal contrast of the material, it is a process of reading first, recording the output signal of the photodetector 14 at this time, writing it once, and reading it again, recording the output signal of the photodetector 14 at this time, two The difference in signal represents the signal contrast. The test process of erasing rate is like this: carry out the process of reading first, record the photodetector 14 output signals of this moment, write once, erase once (by the electric pulse signal that computer 23 outputs to AOM 7 The amplitude is between the writing and reading amplitude, and the others are the same as the writing and reading process), and then read again, and record the output signal of the photodetector 14 at this time, and the difference between the two signals represents the erasing Rate. The length and amplitude of the electrical pulse signals for writing, reading and erasing are variable, and the one-dimensional translation stage 19 moves one step in a certain direction to change the length or amplitude of the electrical pulse signals for writing, reading or erasing , repeat once, and then take a step further, and then change the length or amplitude of the electrical pulse signal for writing, reading or erasing, and repeat it again, so that it can be repeated several times or dozens of times to give a signal contrast or erasure A curve in which the rate varies with a certain condition.

按上述步骤测量光存储材料静态特征,最高写入功率为25mW,最低读取功率0.2mW,从最高功率到最低功率分256档。脉宽从50纳秒到5微秒,分256档。总的噪声信号比在1%以下。计算机23实现了测试的自动化。Measure the static characteristics of the optical storage material according to the above steps, the highest write power is 25mW, the lowest read power is 0.2mW, and there are 256 levels from the highest power to the lowest power. The pulse width is from 50 nanoseconds to 5 microseconds, divided into 256 steps. The total noise-to-signal ratio is below 1%. The computer 23 realizes the automation of the test.

Claims (3)

1.一种光存储材料存储特征静态测试装置,包括1. A static test device for storage characteristics of optical storage materials, comprising <1>测试光源部分:含有沿着激光器(6)发射光束(G)前进方向的光轴(oo)上依次置有声光调制器(7)、扩束组件(8)、立方偏光棱镜(9)、四分之一波片(10)和分光镜(11),分光镜(11)的分光面与光轴(oo)成45°角放置;<1> Test light source part: including an acousto-optic modulator (7), a beam expander (8), and a cubic polarizing prism ( 9), a quarter wave plate (10) and a beam splitter (11), the beam splitting surface of the beam splitter (11) is placed at an angle of 45° with the optical axis (oo); <2>测试显示部分:含有置于通过立方偏光棱镜(9)分光面的中心点且垂直于激光器(6)发射光束(G)光轴(oo)的第一条垂直线(o1o1)上的会聚透镜(12)和光电探测器(14),光电探测器(14)的输出通过电子控制箱(22)连接到带有显示器(24)的计算机(23)上;<2> Test display part: Contains the first vertical line (o 1 o 1 ) placed at the center point of the beam splitting surface of the cubic polarizing prism (9) and perpendicular to the optical axis (oo) of the beam (G) emitted by the laser (6) ) on the convergent lens (12) and photodetector (14), the output of photodetector (14) is connected to the computer (23) with display (24) by electronic control box (22); 其特征是:Its characteristics are: <3>光束写入读出部分:包括在穿过分光镜(11)中心点(Oo)的垂直于激光器(6)发射光束(G)光轴(oo)的第二条垂直线(o2o2)上,分光镜(11)反射光束(G1)前进的方向上置有数值孔径>0.8的物镜(13)和半球形固体浸润透镜(15),半球形固体浸润透镜(15)的球面向着所述物镜(13),所述物镜(13)的焦点落在半球形固体浸润透镜(15)平面的中心点上;<3> Beam writing and reading part: include the second vertical line ( o2 ) perpendicular to the optical axis (oo) of the laser (6) emitting beam (G) passing through the center point (Oo) of the beam splitter (11) o 2 ), the beam splitter (11) reflects the light beam (G 1 ) in the forward direction and is equipped with an objective lens (13) with a numerical aperture > 0.8 and a hemispherical solid immersion lens (15), the hemispherical solid immersion lens (15) The spherical surface faces the objective lens (13), and the focal point of the objective lens (13) falls on the center point of the plane of the hemispherical solid immersion lens (15); <4>调整被测位置部分:包括被测样品(16)放置在内部装有第一限位开关(18)和第二限位开关(20)的一维平移台(19)上,被测样品(16)的被测记录层表面与半球形浸润透镜(15)的平面接触,一维平移台(19)置于三维平台(21)上,一维平移台(19)连接有步进电机(17),步进电机(17)、第一限位开关(18)和第二限位开关(20)通过电子控制箱(22)与计算机(23)相连;<4> Adjusting the measured position part: including the measured sample (16) placed on the one-dimensional translation platform (19) with the first limit switch (18) and the second limit switch (20) inside, the measured The surface of the measured recording layer of the sample (16) is in contact with the plane of the hemispherical infiltration lens (15), the one-dimensional translation stage (19) is placed on the three-dimensional platform (21), and the one-dimensional translation stage (19) is connected with a stepping motor (17), stepper motor (17), the first limit switch (18) and the second limit switch (20) link to each other with computer (23) by electronic control box (22); <5>有监视显示部分:包括在上述激光器(6)发射光束(G)光轴(oo)的第二条垂直线(o2o2)上,在分光镜(11)反射光束(G1)前进方向的反方向上,由分光镜(11)开始依次置有半反半透分光镜(4)、镜筒透镜(3)和带有监视器(2)的摄像机(1),镜筒透镜(3)的焦点恰好落在摄像机(1)的接收面(101)上,半反半透分光镜(4)的分光面与第二条垂直线(o2o2)成45°角放置;<5> There is a monitoring and display part: including on the second vertical line (o 2 o 2 ) of the optical axis (oo) of the beam (G) emitted by the above-mentioned laser (6), reflected beam (G 1 ) by the beam splitter (11) ) on the opposite direction of the forward direction, starting from the beam splitter (11), a semi-reflective and semi-transparent beam splitter (4), a lens tube lens (3) and a video camera (1) with a monitor (2) are arranged successively, and the lens tube lens The focus of (3) just falls on the receiving surface (101) of the camera (1), and the light-splitting surface of the semi-reflective and semi-transparent beam splitter (4) is placed at an angle of 45° with the second vertical line (o 2 o 2 ); <6>有监视光源是白光光源(5),白光光源(5)光轴(o3o3)与穿过半反半透分光镜(4)中心点垂直于第二条垂直线(o2o2)的垂直线(o3o3)重合,它包括自半反半透分光镜(4)至白炽灯(505)之间的白光光源(5)光轴(o3o3)上依次置有照明透镜(501)、孔径光阑(502)、视场光阑(503)和聚焦透镜(504)。<6>The monitoring light source is a white light source (5), the optical axis (o 3 o 3 ) of the white light source (5) is perpendicular to the second vertical line (o 2 o 2 ) coincides with the vertical line (o3o 3 ), which includes lighting on the optical axis (o 3 o 3 ) of the white light source (5) between the semi-reflective and semi-transparent beam splitter (4) and the incandescent lamp (505). Lens (501), aperture stop (502), field stop (503) and focusing lens (504). 2.根据权利要求1所述的光存储材料存储特征静态测试装置,其特征在于所说的分光镜(11)的分光面上镀有对激光器(6)发射激光束波长反射率大于95%的分光膜。2. The optical storage material storage characteristic static testing device according to claim 1, characterized in that the beam splitting surface of said beam splitter (11) is coated with a laser beam (6) emitting laser beam wavelength reflectivity greater than 95%. Spectral film. 3.根据权利要求1所述的光存储材料存储特征静态测试装置,其特征在于所说的被测样品(16)的被测记录层表面与半球形固体浸润透镜(15)的平面是紧密接触,或者两者之间放有折射率油。3. optical storage material storage characteristic static test device according to claim 1, it is characterized in that the measured recording layer surface of said measured sample (16) and the plane of hemispherical solid wetting lens (15) are close contact , or put refractive index oil in between.
CNB011263598A 2001-07-27 2001-07-27 Static test device for storage characteristics of optical storage materials Expired - Fee Related CN1155947C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNB011263598A CN1155947C (en) 2001-07-27 2001-07-27 Static test device for storage characteristics of optical storage materials

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNB011263598A CN1155947C (en) 2001-07-27 2001-07-27 Static test device for storage characteristics of optical storage materials

Publications (2)

Publication Number Publication Date
CN1338730A CN1338730A (en) 2002-03-06
CN1155947C true CN1155947C (en) 2004-06-30

Family

ID=4666379

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB011263598A Expired - Fee Related CN1155947C (en) 2001-07-27 2001-07-27 Static test device for storage characteristics of optical storage materials

Country Status (1)

Country Link
CN (1) CN1155947C (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1313879C (en) * 2003-08-22 2007-05-02 中国科学院上海光学精密机械研究所 Adjustable camera lighting device
CN103000190B (en) * 2012-12-05 2016-03-23 沈阳理工大学 A kind of four digital-code laser Card read/write methods

Also Published As

Publication number Publication date
CN1338730A (en) 2002-03-06

Similar Documents

Publication Publication Date Title
CN111044260B (en) Microscope objective lens distortion test device and test method
US5796487A (en) Dark field, photon tunneling imaging systems and methods for optical recording and retrieval
JP2002512697A (en) Scanning probe optical microscope using a solid immersion lens.
CN102121818A (en) Method and device for measurement of nanometer resolution total reflection differential micrometric displacement
CN116297486A (en) Dark-field confocal microscopy measurement device and method based on helical spectrum extraction
CN109283674A (en) A kind of fluorescence differential microscope optical path device
CN1155947C (en) Static test device for storage characteristics of optical storage materials
CN2497394Y (en) Measuring instrument of storage characteristics of light storage material
US7046360B2 (en) Image pickup device
CN1649001A (en) Dynamic testing system for optical spot scanning type optical disc storage material
CN1286090C (en) Optical storage characteristic static test system
CN1295242A (en) Device for detecting small light spot of objective lens of optical disc
CN2397505Y (en) Optical fiber confocal scanning microscope
JP3441670B2 (en) Lens inspection system and lens inspection device
CN1184247A (en) Optical Head Objective Lens Inclination Measuring Device
CN114152569A (en) An Imaging Optical System Based on SPR Angular Spectrum
CN1259560C (en) Modular blue light optical storage performance testing device
CN2864904Y (en) Dynamic testing device for modularized optical-magnetic mixed storage medium
KR100517296B1 (en) Apparatus for inspecting optical element
CN112857262A (en) Improved oblique illumination type color confocal measurement system and detection method
CN2577274Y (en) Observation device of scanning probe microscope
CN218823920U (en) A High Spatiotemporal Resolution Magneto-Optic Polarization Imaging Measurement System
CN218646268U (en) Color confocal measuring device and system based on multi-point spectrum detection
JPH0540225A (en) Scanning microscope
CN112964197B (en) Micro-sphere surface morphology detection device based on negative feedback phase-locked vibration suppression

Legal Events

Date Code Title Description
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C06 Publication
PB01 Publication
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20040630

Termination date: 20100727