CN115592139B - Electron beam additive manufacturing equipment and method - Google Patents

Electron beam additive manufacturing equipment and method Download PDF

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Publication number
CN115592139B
CN115592139B CN202211523951.8A CN202211523951A CN115592139B CN 115592139 B CN115592139 B CN 115592139B CN 202211523951 A CN202211523951 A CN 202211523951A CN 115592139 B CN115592139 B CN 115592139B
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electron beam
deflection
additive manufacturing
forming
powder
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CN115592139A (en
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杜琨
阚文斌
刘利
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Beijing Qingyan Zhishu Technology Co ltd
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Beijing Qingyan Zhishu Technology Co ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00—Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/40—Radiation means
    • B22F12/41—Radiation means characterised by the type, e.g. laser or electron beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/20—Direct sintering or melting
    • B22F10/28—Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00—Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/50—Means for feeding of material, e.g. heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00—Processes of additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/25—Process efficiency

Abstract

The invention relates to the technical field of additive manufacturing, in particular to electron beam additive manufacturing equipment and a method. The invention provides electron beam additive manufacturing equipment which comprises a vacuum forming chamber, a forming table device, a powder supply device, an electron beam emission device and a multi-stage deflection device, wherein the forming table device and the powder supply device are both positioned in the vacuum forming chamber, the powder supply device is used for paving powder into a forming area of the forming table device, and the multi-stage deflection device is used for sequentially deflecting and distributing electron beams emitted by the electron beam emission device onto all subareas of the forming area so as to form solid parts on the forming area. The electron beam additive manufacturing method provided by the invention is applied to the electron beam additive manufacturing equipment, the range of a forming area is obviously improved on the premise of not losing the electron beam quality, and the requirement on manufacturing large-size solid parts is met by only one electron beam emitting device.

Description

Electron beam additive manufacturing equipment and method
Technical Field
The invention relates to the technical field of additive manufacturing, in particular to electron beam additive manufacturing equipment and a method.
Background
Electron beam selective melting is a typical additive manufacturing process with great advantages in terms of complex structures and three-dimensional shaping of special materials. The electron beam selective melting process adopts high-energy electron beams as heat sources, and the powder is sintered or melted layer by layer, so that the powder is stacked layer by layer for forming.
Currently, electron beam additive manufacturing equipment that performs forming manufacturing by an electron beam selective melting process typically achieves coverage of a forming area by an electron beam by way of electromagnetic deflection. The larger the angle of deflection angle upon electromagnetic deflection, the larger the area covered by the electron beam to the forming region. However, electron optics theory shows that when electromagnetic deflection is adopted, the larger the deflection angle is, the larger the deflection aberration of the beam spot is, and secondly, the larger the deflection angle is, the more serious geometric distortion can occur to the electron beam section at the edge position, so that the quality of the electron beam is reduced, and the quality of the formed solid part is affected. The above phenomenon limits the further expansion of the forming web of the electron beam selective melting apparatus.
Therefore, there is a need to provide an electron beam additive manufacturing apparatus and method to solve the above problems.
Disclosure of Invention
The invention aims to provide electron beam additive manufacturing equipment and a method thereof, so as to improve the range of a forming area on the premise of not losing the quality of electron beams and meet the requirements for manufacturing large-size solid parts.
To achieve the purpose, the invention adopts the following technical scheme:
an electron beam additive manufacturing apparatus comprising a vacuum forming chamber, a forming table device and a powder supply device, both located within the vacuum forming chamber, the powder supply device configured to lay powder into a forming region of the forming table device, the electron beam additive manufacturing apparatus further comprising:
the multi-stage deflection device is configured to sequentially deflect and distribute the electron beams emitted by the electron beam emitting device to each partition of the forming area so as to form a solid part on the forming area.
Preferably, the multi-stage deflection device comprises a primary deflection assembly and a secondary deflection assembly, the primary deflection assembly is opposite to the electron beam emission device, one secondary deflection assembly is correspondingly arranged above each partition center area, and the primary deflection assembly is configured to deflect and irradiate the electron beam emitted by the electron beam emission device onto each secondary deflection assembly in sequence, so that the secondary deflection assembly scans the electron beam deflected and irradiated by the primary deflection assembly onto the corresponding partition.
Preferably, the secondary deflection assembly comprises an adjusting deflection piece and a scanning deflection piece, wherein the adjusting deflection piece is arranged opposite to the adjusting deflection piece, the adjusting deflection piece is configured to vertically irradiate the electron beam deflected and irradiated by the primary deflection assembly onto the scanning deflection piece, and the scanning deflection piece is configured to sweep the electron beam irradiated by the adjusting deflection piece onto the corresponding subarea.
Preferably, the primary deflection assembly and/or the secondary deflection assembly is a deflection coil.
Preferably, the adjacent two secondary deflecting assemblies overlap with the corresponding scanned subareas.
Preferably, the powder supply device includes:
a hopper disposed above the forming table device and configured to supply the powder contained on an upper surface of the forming table device; and
a spreading assembly reciprocally movable relative to an upper surface of the forming table apparatus to spread the powder material of the upper surface of the forming table apparatus within the forming area of the forming table apparatus.
An electron beam additive manufacturing method applied to the electron beam additive manufacturing equipment comprises the following steps:
the electron beam emission device emits a large beam of scattered coke electron beams, and scans each subarea sequentially through the multi-stage deflection device so as to sinter powder in each subarea;
the electron beam emission device emits focused electron beams, and the sectional profiles of the subareas are scanned through the multi-stage deflection device in sequence so as to melt powder on the sectional profiles of the subareas;
and the focused electron beam emitted by the electron beam emission device sequentially performs filling scanning on the inner part of the section of each subarea through the multi-stage deflection device so as to melt powder in the inner part of the section of each subarea.
Preferably, the multi-stage deflection device sequentially performs filling scanning on the inner part of the section along each parallel scanning line of the inner part of the section.
Preferably, when the multi-stage deflection device sequentially performs filling scanning on the inner parts of the sections of the partitions, filling scanning lines in each partition are parallel to each other and are staggered.
Preferably, when the multistage deflection device sequentially performs filling scanning on the inner parts of the sections, filling scanning lines in two adjacent sections are mutually vertically arranged.
The invention has the beneficial effects that:
according to the electron beam additive manufacturing equipment provided by the invention, the multi-stage deflection device is arranged, and the multi-stage deflection device is used for sequentially deflecting and distributing the electron beams emitted by the electron beam emission device to each partition of the forming area, so that the range of the forming area is obviously improved on the premise of not losing the quality of the electron beams, and the requirement on manufacturing large-size solid parts is met by only one electron beam emission device on the premise of guaranteeing the quality of the formed solid parts.
The electron beam additive manufacturing method provided by the invention is applied to the electron beam additive manufacturing equipment, the range of a forming area is obviously improved on the premise of not losing the electron beam quality, and the requirement on manufacturing large-size solid parts is met by only one electron beam emitting device on the premise of guaranteeing the quality of the formed solid parts.
Drawings
FIG. 1 is a schematic diagram of an electron beam additive manufacturing apparatus according to a first embodiment of the present invention;
FIG. 2 is a schematic view of a forming area according to a first embodiment of the present invention;
fig. 3 is a schematic structural diagram of an electron beam additive manufacturing apparatus according to a second embodiment of the present invention;
FIG. 4 is a schematic view of a forming area according to a second embodiment of the present invention;
FIG. 5 is a flow chart of a method of electron beam additive manufacturing according to a third embodiment of the present invention;
FIG. 6 is a schematic structural view of a forming region filling scan line according to a third embodiment of the present invention;
FIG. 7 is a schematic structural diagram of a forming region filling scan line according to a fourth embodiment of the present invention;
fig. 8 is a schematic structural diagram of a forming region filling scan line according to a fifth embodiment of the present invention.
In the figure:
100. electron beam additive manufacturing equipment; 200. solid parts;
1. a vacuum forming chamber; 2. a forming table device; 21. a working platform; 22. a forming cylinder; 221. a powder bed; 23. a lifting assembly; 3. a powder supply device; 31. a feed box; 32. a paving assembly; 4. an electron beam emitting device; 5. a multi-stage deflection device; 51. a primary deflection assembly; 52. a secondary deflection assembly; 521. adjusting the deflector; 522. scanning the deflector.
Detailed Description
In order to make the technical problems solved, the technical scheme adopted and the technical effects achieved by the invention more clear, the technical scheme of the invention is further described below by a specific embodiment in combination with the attached drawings.
In the description of the present invention, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication inside two components or interaction relation of the two components. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In the present invention, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.
In the description of the present embodiment, the terms "upper", "lower", "left", "right", and the like are orientation or positional relationships based on those shown in the drawings, merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or component in question must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the invention. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.
Example 1
As shown in fig. 1, the present embodiment provides an electron beam additive manufacturing apparatus 100 for forming a solid part 200 using an electron beam selective melting process. Specifically, the electron beam additive manufacturing apparatus 100 mainly includes a vacuum forming chamber 1, a forming table device 2, a powder supply device 3, an electron beam emitting device 4, and a multi-stage deflection device 5, wherein the forming table device 2 and the powder supply device 3 are both located in the vacuum forming chamber 1, the powder supply device 3 is used for laying powder into a forming region of the forming table device 2, the electron beam emitting device 4 is used for emitting electron beams, and the multi-stage deflection device 5 is used for sequentially deflecting and distributing the electron beams emitted by the electron beam emitting device 4 onto respective partitions of the forming region to form a solid part 200 on the forming region. By providing the multi-stage deflection device 5, and the multi-stage deflection device 5 can sequentially deflect and distribute the electron beams emitted by the electron beam emitting device 4 to each partition of the forming area, the deflection angle of the electron beams does not need to be increased in order to ensure the range of the whole forming area, so that the quality of the electron beams is ensured, the range of the forming area is obviously improved on the premise of not losing the quality of the electron beams, and the manufacturing requirement of the large-size solid part 200 is met by only one electron beam emitting device 4 on the premise of ensuring the quality of the formed solid part 200.
Preferably, as shown in fig. 1, the multi-stage deflection device 5 includes a primary deflection assembly 51 and a secondary deflection assembly 52, where the primary deflection assembly 51 is disposed opposite to the electron beam emitting device 4, and a secondary deflection assembly 52 is correspondingly disposed above a central area of each partition, and the primary deflection assembly 51 can deflect and irradiate the electron beam emitted by the electron beam emitting device 4 onto each secondary deflection assembly 52 in sequence, so that the secondary deflection assembly 52 scans the electron beam deflected and irradiated by the primary deflection assembly 51 onto the corresponding partition, thereby improving the irradiation range of the electron beam over the whole forming area.
Specifically, in this embodiment, the plurality of primary deflection assemblies 51 are arranged at intervals along the horizontal direction, the lower part of each primary deflection assembly 51 is opposite to one of the secondary deflection assemblies 52, and the electron beam emission device 4 is also opposite to the primary deflection assemblies 51 along the direction in which the plurality of primary deflection assemblies 51 are horizontally arranged, so that the electron beam emitted by the electron beam emission device 4 can horizontally irradiate onto the primary deflection assemblies 51, then the primary deflection assemblies 51 rotate the electron beam emitted by the electron beam emission device 4 by 90 degrees and vertically irradiate into the corresponding secondary deflection assemblies 52, and the secondary deflection assemblies 52 scan the received electron beam onto the corresponding subareas. As shown in fig. 2, the forming area of the solid part 200 in the forming table device 2 is divided into two partitions, and accordingly, two sets of primary deflection assemblies 51 and secondary deflection assemblies 52 are required, wherein the electron beam emitted by the electron beam emitting device 4 sequentially passes through the two primary deflection assemblies 51, and then each primary deflection assembly 51 deflects the electron beam by 90 ° and irradiates the electron beam to the oppositely arranged secondary deflection assembly 52, and the two secondary deflection assemblies 52 deflect and irradiate the electron beam to the partition a and the partition B respectively, and the partition a and the partition B overlap to ensure the quality of the formed solid part 200 at the edge of the partition. In other embodiments, the number of zones may be increased by increasing the number of primary deflection assemblies 51, thereby increasing the extent of the forming zone. The electron beam emitted by the electron beam emitting device 4 cannot be irradiated onto the plurality of primary deflection units 51 simultaneously, and therefore, it is necessary to sequentially irradiate each primary deflection unit 51, and thus, the sequential irradiation sequence of each partition is not particularly limited in this embodiment.
Preferably, in this embodiment, adjacent two secondary deflector assemblies 52 overlap at the edge portions corresponding to the swept zones, thereby ensuring the quality of the formed solid part 200 at the edges of the zones.
Specifically, in this embodiment, the primary deflection assembly 51 and the secondary deflection assembly 52 are both deflection coils, and the principle of deflecting the electron beam after the deflection coils are energized belongs to the prior art, and will not be described herein.
Describing the specific structure of the powder supply device 3 with reference to fig. 1, the powder supply device 3 includes a hopper 31 and a spreading assembly 32, as shown in fig. 1, wherein the hopper 31 is disposed above the forming table device 2, the hopper 31 is used for holding powder, and the hopper 31 is also capable of supplying the held powder to the upper surface of the forming table device 2, and the spreading assembly 32 is capable of reciprocally moving relative to the upper surface of the forming table device 2 to spread the powder on the upper surface of the forming table device 2 in the forming area of the forming table device 2. Specifically, the paving component 32 may be a push plate, and the driving member for pushing the push plate to reciprocate may be a linear cylinder or a linear motor, and the specific device for pushing the push plate to reciprocate is not specifically limited in this embodiment. Preferably, in the present embodiment, a plurality of the bins 31 are provided at intervals, which improves the efficiency of feeding the upper surface of the forming table device 2.
In the present embodiment, the forming table device 2 includes a work table 21 and a forming cylinder 22, wherein the forming cylinder 22 is disposed below the work table 21, a powder bed 221 is disposed inside the forming cylinder 22, a forming region is formed in the powder bed 221, a hopper 31 supplies the powder contained therein to the upper surface of the work table 21, and a spreading assembly 32 reciprocates relative to the upper surface of the work table 21 to spread the powder on the upper surface of the work table 21 in the forming region of the powder bed 221.
Preferably, as shown in fig. 1, the forming table device 2 further comprises a lifting assembly 23, the lifting assembly 23 being arranged in the forming cylinder 22, the lifting assembly 23 being adapted to drive the powder bed 221 in the forming cylinder 22 to lift relative to the working platform 21. Specifically, the lifting assembly 23 may be a linear cylinder, which has the advantages of reliable operation and convenient installation. Specifically, after a previous layer of powder in the powder bed 221 is formed, the lifting assembly 23 drives the powder bed 221 to descend by a height of a powder layer thickness relative to the forming cylinder 22, so that a height difference of a powder layer thickness is formed between the upper surface of the powder bed 221 and the surface of the working platform 21, then the bin 31 outputs a certain amount of powder and falls on the surface of the working platform 21, and then the spreading assembly 32 pushes the powder onto the powder bed 221 to form a new powder layer. The process is repeated to build up new layers of deposition on the powder bed 221 layer by layer until the final shape of the solid part 200 is obtained.
Example two
The electron beam additive manufacturing apparatus 100 provided in this embodiment is substantially the same as the first embodiment, and the electron beam additive manufacturing apparatus 100 provided in this embodiment is different from the first embodiment in that:
as shown in fig. 3, in the electron beam additive manufacturing apparatus 100 provided in this embodiment, the secondary deflecting member 52 includes an adjusting deflecting member 521 and a scanning deflecting member 522 that are disposed opposite to each other, where the adjusting deflecting member 521 is disposed below the primary deflecting member 51, the scanning deflecting member 522 is disposed below the adjusting deflecting member 521, the adjusting deflecting member 521 is capable of vertically irradiating the electron beam deflected and irradiated by the primary deflecting member 51 onto the scanning deflecting member 522, and the scanning deflecting member 522 is used for scanning the electron beam irradiated by the adjusting deflecting member 521 onto a corresponding partition. By arranging the adjusting deflection piece 521, the electron beam irradiated by the primary deflection component 51 is firstly vertically irradiated on the scanning deflection piece 522, so that the quantity of the electron beams received by the scanning deflection piece 522 is ensured, and the scanning irradiation effect of the scanning deflection piece 522 on the corresponding subarea is improved. In the present embodiment, the adjustment deflector 521 and the scan deflector 522 are both deflection coils.
Specifically, in this embodiment, the primary deflecting member 51 is provided with one, the primary deflecting member 51 is located at the center position of the entire forming area, the adjustment deflecting member 521 and the scanning deflecting member 522 are located at the center positions of the corresponding partitions, the electron beam emitting device 4 is provided above the primary deflecting member 51 and is disposed opposite to the primary deflecting member 51 so that the electron beam emitted from the electron beam emitting device 4 can be irradiated vertically onto the primary deflecting member 51, and then the primary deflecting member 51 deflects and emits the electron beam emitted from the electron beam emitting device 4 onto each of the adjustment deflecting members 521 in sequence. In the present embodiment, as shown in fig. 4, four secondary deflecting members 52 are arranged at intervals, the four secondary deflecting members 52 are arranged in a square shape, and the forming area is divided into a division, a B division, a C division and a D division which are arranged in a square shape. Note that, since the primary deflecting unit 51 cannot deflect and irradiate onto each of the adjustment deflecting members 521 simultaneously, the primary deflecting unit 51 needs to irradiate onto each of the adjustment deflecting members 521 sequentially, and thus irradiates onto each of the subareas sequentially, and the sequential irradiation sequence of each of the subareas is not particularly limited in this embodiment. In other embodiments, the electron beam emitting device 4 may be incident on the multi-stage deflection device 5 from any angle. The horizontal incidence in the first embodiment and the vertical incidence in the second embodiment are not limited.
In this embodiment, adjacent scan deflection 522 overlap at the edge portion corresponding to the scanned zone, thereby ensuring the quality of the formed solid part 200 at the edge of the zone. In general, the maximum range of the shaping area irradiated by one electron beam emitting device 4 is a generally 350mm×350mm square area, and this embodiment exemplifies that when the irradiation range of each scanning deflector 522 is 310mm×310mm square area, and the overlapping width of the adjacent two scanning deflector 522 corresponding to the scanned zone at the edge portion is defined to be 20mm, it is possible to ensure that the irradiation range of the entire apparatus is 600mm×600mm.
Example III
As shown in fig. 5, the present embodiment further provides an electron beam additive manufacturing method applied to the electron beam additive manufacturing apparatus 100, including the following steps:
the electron beam emission device 4 emits a large beam of scattered coke electron beams, and scans each subarea sequentially through the multi-stage deflection device 5 so as to sinter powder in each subarea;
the electron beam emission device 4 emits focused electron beams, and scans the sectional profiles of all the subareas in sequence through the multi-stage deflection device 5 so as to melt the powder on the sectional profiles of all the subareas;
the focused electron beam emitted from the electron beam emitting device 4 sequentially performs filling scanning on the inside of the cross section of each partition by the multi-stage deflection device 5 to melt the powder inside the cross section of each partition.
The electron beam additive manufacturing method provided by the embodiment obviously improves the range of the forming area on the premise of not losing the electron beam quality, and meets the manufacturing requirement of the large-size solid part 200 by only one electron beam emission device 4 on the premise of guaranteeing the quality of the formed solid part 200. In the electron beam additive manufacturing method, only one layer of powder is formed, and the newly deposited layer may be stacked on the powder bed 221 one by one until the final shape of the solid part 200 is obtained.
In the process of sintering the powder material in each partition by the electron beam emitting device 4 through the multi-stage deflection device 5, the multi-stage deflection device 5 sequentially scans each partition by the electron beam, scans each partition for a fixed time, and then repeats the sequential rescanning of each partition. Preferably, in order to ensure the uniformity of sintering, the scanning order of each partition may be changed after a certain period, or the scanning direction and pattern of each partition may be set randomly, for example, horizontal raster lines are scanned in partition a and vertical raster lines are scanned in partition B. The filling scanning of the inside of the cross section may be performed in the above-described manner. And during the contour scanning and melting process of the forming area, each partition can be scanned for a fixed time, and then the sequential rescanning of the partitions is repeated.
In other embodiments, the electron beam may be first distributed to one partition, after the shaping of the solid part 200 of the current partition is completed, and then the scanning of that partition is performed after being distributed to another partition.
As shown in fig. 6, in the present embodiment, when the multistage deflection device 5 performs a fill scan of the inside of the cross section of each division, the multistage deflection device 5 sequentially performs a fill scan of the inside of the cross section along each parallel scanning line of the inside of the cross section. I.e. the filling scan lines inside the whole cross section are parallel to each other. Specifically, the multi-stage deflection device 5 scans from the a-partition to the C-partition, and after the filling scanning of the a-partition and the C-partition is completed, it scans from the B-partition to the D-partition.
Example IV
The electron beam additive manufacturing method provided in this embodiment is substantially the same as that in the third embodiment, and the difference between the electron beam additive manufacturing method provided in this embodiment and that in the third embodiment is that:
as shown in fig. 7, in this embodiment, when the multi-stage deflecting device 5 sequentially performs the filling scanning on the inside of the cross section of each partition, the filling scanning lines inside each partition are arranged parallel to each other and staggered, so as to ensure good overlapping quality between the partitions. It should be noted that, the multi-stage deflection device 5 may sequentially irradiate in the order of the a-partition, the B-partition, the C-partition, and the D-partition, or sequentially irradiate in the order of the a-partition, the C-partition, the B-partition, and the D-partition, and the arrangement order of each partition is not particularly limited in this embodiment.
Example five
The electron beam additive manufacturing method provided in this embodiment is substantially the same as that in the third embodiment, and the difference between the electron beam additive manufacturing method provided in this embodiment and that in the third embodiment is that:
in this embodiment, the filling lines in different subareas have different filling directions, as shown in fig. 8, when the multi-stage deflection device 5 sequentially performs filling scanning on the inner parts of the sections of the subareas, the filling scanning lines in two adjacent subareas are arranged vertically to each other, so that the overlapping quality between the subareas is further improved.
It is to be understood that the above examples of the present invention are provided for clarity of illustration only and are not limiting of the embodiments of the present invention. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the invention are desired to be protected by the following claims.

Claims (9)

1. Electron beam additive manufacturing apparatus comprising a vacuum forming chamber (1), a forming table device (2) and a powder supply device (3), the forming table device (2) and the powder supply device (3) being both located within the vacuum forming chamber (1), the powder supply device (3) being configured to lay powder into a forming area of the forming table device (2), characterized in that the electron beam additive manufacturing apparatus further comprises:
an electron beam emitting device (4) and a multi-stage deflection device (5), the multi-stage deflection device (5) being configured to sequentially deflect and distribute electron beams emitted by the electron beam emitting device (4) onto respective partitions of the forming area to form a solid part (200) on the forming area;
the multi-stage deflection device (5) comprises a primary deflection assembly (51) and a secondary deflection assembly (52), the primary deflection assembly (51) is opposite to the electron beam emission device (4), one secondary deflection assembly (52) is correspondingly arranged above each partition center area, and the primary deflection assembly (51) is configured to deflect and irradiate electron beams emitted by the electron beam emission device (4) onto the secondary deflection assemblies (52) in sequence, so that the secondary deflection assemblies (52) deflect and irradiate the primary deflection assembly (51) onto the corresponding partition.
2. The electron beam additive manufacturing apparatus according to claim 1, wherein the secondary deflection assembly (52) includes an adjustment deflection member (521) and a scanning deflection member (522) that are disposed opposite to each other, the adjustment deflection member (521) being configured to vertically irradiate the electron beam deflected irradiated by the primary deflection assembly (51) onto the scanning deflection member (522), the scanning deflection member (522) being configured to sweep the electron beam irradiated by the adjustment deflection member (521) onto the corresponding division.
3. Electron beam additive manufacturing apparatus according to claim 1, characterized in that the primary deflection assembly (51) and/or the secondary deflection assembly (52) are deflection coils.
4. An electron beam additive manufacturing apparatus according to any of claims 1-3, wherein the sections of the respective sweeps of adjacent two of the secondary deflection assemblies (52) partially overlap.
5. An electron beam additive manufacturing apparatus according to any of claims 1-3, wherein the powder supply device (3) comprises:
a bin (31) disposed above the forming table device (2) and configured to supply the powder contained on an upper surface of the forming table device (2); and
-a spreading assembly (32), said spreading assembly (32) being reciprocally movable with respect to the upper surface of said forming table means (2) to spread said powder material of the upper surface of said forming table means (2) within said forming area of said forming table means (2).
6. An electron beam additive manufacturing method, characterized by being applied to the electron beam additive manufacturing apparatus according to any one of claims 1 to 5, comprising the steps of:
the electron beam emission device (4) emits a large beam of scattered coke electron beams, and scans each subarea sequentially through the multi-stage deflection device (5) so as to sinter powder in each subarea;
the electron beam emission device (4) emits a focused electron beam, and scans the sectional profile of each subarea through the multi-stage deflection device (5) in sequence so as to melt powder on the sectional profile of each subarea;
and the focused electron beam emitted by the electron beam emission device (4) sequentially performs filling scanning on the inner part of the section of each subarea through the multi-stage deflection device (5) so as to melt powder in the inner part of the section of each subarea.
7. The electron beam additive manufacturing method according to claim 6, wherein the multi-stage deflection device (5) performs a fill scan of the cross-sectional interior along each parallel scan line of the cross-sectional interior in sequence.
8. The electron beam additive manufacturing method according to claim 6, wherein when the multi-stage deflection device (5) sequentially performs a filling scan on the inside of the cross section of each of the partitions, filling scan lines inside each of the partitions are arranged parallel to each other and staggered.
9. The electron beam additive manufacturing method according to claim 6, wherein when the multi-stage deflection device (5) sequentially performs the filling scanning on the inside of the cross section of each of the partitions, filling scanning lines inside two adjacent partitions are arranged perpendicular to each other.
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