CN115586640B - Mounting and adjusting method and device for step-by-step calculation of coaxial two-inverse system - Google Patents
Mounting and adjusting method and device for step-by-step calculation of coaxial two-inverse system Download PDFInfo
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Abstract
The application discloses a method and a device for installing and adjusting the step-by-step calculation of a coaxial two-way system, comprising the following steps: detecting wave aberration distribution of a view field on an axis of the coaxial two-inverse system to be assembled, and fitting to obtain a third-order coma coefficient; judging whether the third-order coma coefficients are smaller than a first set threshold value or not; if not, calculating the eccentric adjustment quantity of the secondary mirror and performing compensation adjustment on the system; if yes, fitting to obtain a third-order astigmatism coefficient according to wave aberration distribution; introducing a known quantitative offset by taking the current state of the system to be assembled as a starting point, and fitting again to obtain a new third-order astigmatism coefficient; according to the variation of the third-order astigmatism coefficients before and after the introduction of quantitative detuning, calculating the inclination adjustment quantity of the secondary mirror, and judging whether the inclination adjustment quantity is smaller than a second set threshold value; if not, compensating and adjusting the system; if yes, the system is restored according to the introduced quantitative offset. Thus, the adjustment is completed, the lateral offset of the system can be eliminated, the influence of zero coma free point and surface shape error is overcome, and the applicability is stronger.
Description
Technical Field
The invention relates to the technical field of optical system adjustment, in particular to an adjustment method and device for stepwise calculation of a coaxial two-reflection system.
Background
The coaxial two-reflecting system is a basic reflecting system structure which consists of two reflecting mirrors, namely a primary mirror and a secondary mirror, and the axes of the reflecting mirrors are coincident, is a basic structural unit of an off-axis two-reflecting, off-axis multi-reflecting and coaxial multi-reflecting optical system, has the structural dimension level of which can be large or small and can be small to centimeter or millimeter level, is applied to space remote sensing of a nacelle, a space camera and the like, is up to meter level and ten meter level, is applied to astronomical observation fields of a solar telescope, a foundation space telescope, a space telescope and the like, and is an indispensable component in an imaging detection system. When the coaxial two-reflecting system is assembled, the main mirror volume and the main mirror weight are often used as the assembly and adjustment reference, so that the assembly error (also called offset error and offset amount) of the secondary mirror needs to be calculated, and an assembly and adjustment technician or a machine is guided to carry out assembly and adjustment.
As shown in fig. 1, the coaxial two-reflecting system is composed of a primary mirror 01 and a secondary mirror 02, 03 is an image plane, an optical axis of the coaxial two-reflecting system is a Z axis, and a vertical direction is a Y axis, and a space coordinate system is established, so that the secondary mirror 02 mainly has 6 degrees of freedom adjustment amounts, namely an eccentric adjustment amount and an inclination adjustment amount around an X/Y/Z axis, and are defined as X DE/YDE/ZDE and a DE/BDE/CDE. Wherein, due to the symmetry of the rotation axis of the lens, the inclination adjustment quantity C DE around the Z axis has little influence on the image quality of the system, and is not considered; x DE/YDE and A DE/BDE are referred to as lateral misalignment errors, and Z DE is an axial misalignment error. The axial offset error influence mode is single, and is not a difficult point of adjustment at present; the influence mode of the lateral offset error is complex, and the influence of the coupling of zero coma free point, the surface shape error and each lateral offset error is a serious difficulty in the current adjustment process.
In order to solve the above problems, various assembly error calculation methods such as a sensitivity matrix method, a reverse optimization method, an artificial neural network method, a point spread function method, a vector aberration method, and the like are currently proposed. The essence of these methods is to calculate according to the difference of imaging quality before and after the assembly error of the optical system, and in colloquially, when the assembly error exists in the optical system, the imaging capability (quality) of the system is definitely poor, and the assembly error of the system is calculated and eliminated based on the difference, so that the imaging capability of the system is restored to an ideal (designed) state. However, the existing assembly error calculation method has two problems, namely, the imaging quality is affected by the assembly error and the lens surface shape error and the zero coma free point, so that the assembly error is calculated based on the imaging quality under a plurality of fields, and in the actual engineering adjustment process, the accurate positioning and realization of different fields of view are required to depend on a special auxiliary adjustment tool, so that a great amount of time, manpower and material resources are consumed, and the engineering application of the assembly error calculation method is not facilitated; secondly, the conventional method aims at calculating all assembly errors once, ignores the importance of the assembly and adjustment process and the assembly and adjustment strategy, so that local extremum points tend to be easily trapped in the calculation and solving process, and the calculation result tends to have larger deviation with the actual value due to the measurement errors introduced in the actual wave aberration measurement process.
Disclosure of Invention
In view of the above, the present invention aims to provide a method and a device for adjusting the step-by-step calculation of a coaxial two-way system, which are based on the idea of sequentially eliminating the lateral eccentric error and the lateral tilt error step by step, and calculate the lateral offset of the coaxial two-way system by the state of the wave aberration of the field of view on one axis. The specific scheme is as follows:
a method for installing and adjusting the step-by-step calculation of a coaxial two-inverse system comprises the following steps:
detecting wave aberration distribution of a view field on a coaxial two-inverse system axis to be adjusted, and fitting to obtain a third-order coma coefficient;
judging whether the third-order coma coefficients are smaller than a first set threshold value or not;
If not, calculating the eccentric adjustment quantity of the secondary mirror along the X axis and the eccentric adjustment quantity of the secondary mirror along the Y axis, and compensating and adjusting the coaxial two-reflection system to be adjusted;
if yes, fitting to obtain a third-order astigmatism coefficient according to the wave aberration distribution;
Introducing a known quantitative offset to a secondary mirror by taking the current state of the coaxial two-way system to be adjusted as a starting point;
Detecting wave aberration distribution of a visual field on an axis of the coaxial two-inverse system after introducing quantitative offset, and fitting to obtain a new third-order astigmatism coefficient;
According to the variation of the third-order astigmatism coefficients before and after the introduction of quantitative offset, the inclination adjustment quantity of the secondary mirror around the X axis and the inclination adjustment quantity of the secondary mirror around the Y axis are calculated, and the coaxial two-inverse system after the introduction of quantitative offset is compensated and adjusted.
Preferably, in the adjustment method for step-by-step calculation of the coaxial two-way system provided by the embodiment of the present invention, compensation adjustment is performed on the coaxial two-way system after introducing quantitative offset, and the method specifically includes:
judging whether the calculated inclination adjustment amount of the secondary mirror around the X axis and the calculated inclination adjustment amount of the secondary mirror around the Y axis are smaller than a second set threshold value;
If not, compensating and adjusting the coaxial two-reflection system after introducing quantitative offset according to the calculated inclination adjustment quantity of the secondary mirror around the X axis and the calculated inclination adjustment quantity around the Y axis;
If so, restoring the coaxial two-way system after the introduction of the quantitative offset into the coaxial two-way system before the introduction of the quantitative offset according to the introduced quantitative offset.
Preferably, in the adjustment method for step-by-step calculation of the coaxial two-reflection system provided by the embodiment of the invention, a first formula is adopted to calculate the eccentric adjustment amount of the secondary mirror along the X axis and the eccentric adjustment amount along the Y axis; the first formula is:
Wherein X DE is the decentering adjustment amount of the secondary mirror along the X axis, Y DE is the decentering adjustment amount of the secondary mirror along the Y axis, C 7、C8 is the third-order coma coefficient, and k 1 is the influence factor of the decentering adjustment amount on the third-order coma.
Preferably, in the adjustment method for step-by-step calculation of the coaxial two-way system provided by the embodiment of the present invention, compensation adjustment is performed on the coaxial two-way system to be adjusted, and the method specifically includes:
and compensating and correcting the eccentric error of the coaxial two-way system to be adjusted by using the calculated eccentric adjustment quantity along the X axis and the calculated eccentric adjustment quantity along the Y axis.
Preferably, in the adjustment method for step-by-step calculation of the coaxial two-way system provided by the embodiment of the invention, the quantitative offset is a quantitative eccentric adjustment along the X axis or a quantitative eccentric adjustment along the Y axis.
Preferably, in the adjustment method for step-by-step calculation of the coaxial two-way system provided by the embodiment of the invention, when the quantitative offset is a quantitative eccentric adjustment along the X axis, calculating an inclination adjustment of the secondary mirror around the X axis and an inclination adjustment of the secondary mirror around the Y axis by a second formula; the second formula is:
Wherein A DE is the tilt adjustment amount of the secondary mirror around the X axis, B DE is the tilt adjustment amount of the secondary mirror around the Y axis, All are three-order astigmatism coefficients before introducing quantitative offset,All are third-order astigmatism coefficients after quantitative imbalance is introduced, deltaX DE is a quantitative decentering adjustment quantity along an X axis, k 3 is an influence factor of the decentering adjustment quantity on the third-order astigmatism, and m magic is an influence factor based on a zero coma free point.
Preferably, in the adjustment method for step-by-step calculation of the coaxial two-way system provided by the embodiment of the invention, when the quantitative offset is a quantitative eccentric adjustment along the Y axis, calculating an inclination adjustment of the secondary mirror around the X axis and an inclination adjustment of the secondary mirror around the Y axis by a third formula; the third formula is:
Wherein A DE is the tilt adjustment amount of the secondary mirror around the X axis, B DE is the tilt adjustment amount of the secondary mirror around the Y axis, All are three-order astigmatism coefficients before introducing quantitative offset,The three-order astigmatism coefficients after the quantitative offset is introduced are respectively represented by delta Y DE, the quantitative decentration adjustment quantity along the Y axis, k 3 and m magic, wherein the influence factor of the decentration adjustment quantity on the three-order astigmatism is represented by the influence factor based on the zero coma free point.
The embodiment of the invention also provides a device for installing and adjusting the step-by-step calculation of the coaxial two-reflection system, which comprises the following steps:
The first fitting module is used for detecting wave aberration distribution of a view field on a coaxial two-inverse system axis to be adjusted and fitting to obtain a third-order coma coefficient;
The first adjusting module is used for calculating the eccentric adjustment quantity of the secondary mirror along the X axis and the eccentric adjustment quantity of the secondary mirror along the Y axis and carrying out compensation adjustment on the coaxial two-counter system to be adjusted if the third-order coma coefficient is larger than or equal to a first set threshold value;
the second fitting module is used for fitting to obtain third-order astigmatic coefficients according to the wave aberration distribution if the third-order coma coefficients are smaller than the first set threshold;
The third fitting module is used for introducing a known quantitative offset to the secondary mirror by taking the current state of the coaxial two-way system to be adjusted as a starting point; detecting wave aberration distribution of a visual field on an axis of the coaxial two-inverse system after introducing quantitative offset, and fitting to obtain a new third-order astigmatism coefficient;
And the second adjusting module is used for calculating the inclination adjusting quantity of the secondary mirror around the X axis and the inclination adjusting quantity of the secondary mirror around the Y axis according to the variation quantity of the third-order astigmatism coefficients before and after the introduction of the quantitative offset, and carrying out compensation adjustment on the coaxial two-inverse system after the introduction of the quantitative offset.
Preferably, in the above-mentioned stepwise-computing adjustment device for a coaxial two-reflection system provided by the embodiment of the present invention, the second adjustment module is specifically configured to determine whether the calculated tilt adjustment amount of the secondary mirror around the X axis and the calculated tilt adjustment amount around the Y axis are both smaller than a second set threshold; if not, compensating and adjusting the coaxial two-reflection system after introducing quantitative offset according to the calculated inclination adjustment quantity of the secondary mirror around the X axis and the calculated inclination adjustment quantity around the Y axis; if so, restoring the coaxial two-way system after the introduction of the quantitative offset into the coaxial two-way system before the introduction of the quantitative offset according to the introduced quantitative offset, so as to complete the adjustment.
According to the technical scheme, the method for installing and adjusting the coaxial two-inverse system step-by-step calculation comprises the following steps: detecting wave aberration distribution of a view field on a coaxial two-inverse system axis to be adjusted, and fitting to obtain a third-order coma coefficient; judging whether the third-order coma coefficients are smaller than a first set threshold value or not; if not, calculating the eccentric adjustment quantity of the secondary mirror along the X axis and the eccentric adjustment quantity of the secondary mirror along the Y axis, and compensating and adjusting the coaxial two-reflection system to be assembled and adjusted; if yes, fitting to obtain a third-order astigmatism coefficient according to wave aberration distribution; taking the current state of the coaxial two-way system to be adjusted as a starting point, and introducing a known quantitative offset to the secondary mirror; detecting wave aberration distribution of a visual field on an axis of the coaxial two-inverse system after introducing quantitative offset, and fitting to obtain a new third-order astigmatism coefficient; according to the variation of the third-order astigmatism coefficients before and after the introduction of the quantitative offset, the inclination adjustment quantity of the secondary mirror around the X axis and the inclination adjustment quantity of the secondary mirror around the Y axis are calculated, and the compensation adjustment is carried out on the coaxial two-reflection system after the introduction of the quantitative offset.
According to the method provided by the invention, aiming at the calculation and unfolding research of four lateral offset errors, namely the eccentric adjustment quantity along the X axis, the eccentric adjustment quantity along the Y axis, the inclination adjustment quantity around the X axis and the inclination adjustment quantity around the Y axis, the three-order coma of the visual field on the axis is eliminated by adjusting the eccentric adjustment quantity based on the characteristics of zero coma free points, so that the four lateral offset errors of the secondary mirror are bound together in pairs, the solving problem of the four lateral offset errors is converted into the solving problem of two errors, and further, the effective information of wave aberration under a single visual field is increased by introducing quantitative offset quantity, so that the current lateral offset error of the system can be calculated by only measuring the wave aberration distribution of the visual field on the axis, the current lateral offset error of the coaxial two-back system can be eliminated, the engineering applicability and operability are stronger, the manpower is saved, the double effects of the zero coma free point and the face shape error are overcome, and the method is more scientific, efficient and is beneficial to practical assembly application.
In addition, the invention provides a corresponding device for the adjustment method of the step-by-step calculation of the coaxial two-way system, so that the method has more practicability and has corresponding advantages.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the related art, the drawings that are required to be used in the embodiments or the related technical descriptions will be briefly described, and it is apparent that the drawings in the following description are only embodiments of the present invention, and other drawings may be obtained according to the provided drawings without inventive effort for those skilled in the art.
FIG. 1 is a schematic diagram of a typical coaxial two-way system assembly error;
FIG. 2 is a flowchart of an adjustment method for step-by-step calculation of a coaxial two-inverse system according to an embodiment of the present invention;
fig. 3 is a schematic diagram of zero coma free point in the coaxial two-reflection system according to the embodiment of the present invention;
FIG. 4 is a specific flowchart of an adjustment method for step-by-step calculation of a coaxial two-inverse system according to an embodiment of the present invention;
Fig. 5 is a schematic structural diagram of a lateral misalignment error calculating apparatus of a coaxial two-way system according to an embodiment of the present invention.
Detailed Description
For a coaxial two-reflecting system, the caliber and the weight of the main mirror are far greater than those of the secondary mirror, so that the main mirror is often used as an adjustment reference, and the secondary mirror is adjusted to achieve an ideal position. Therefore, only the secondary mirror has an assembly error, as shown in fig. 1, X DE、YDE、ZDE represents the eccentric adjustment amounts along the X-axis, Y-axis, Z-axis, respectively; a DE、BDE、CDE represents tilt adjustment amounts about the X-axis, Y-axis, and Z-axis, respectively. However, since the lenses of the coaxial two-lens system are rotationally symmetrical about the Z-axis, the amount of tilt adjustment about the Z-axis C DE has no effect on the assembly performance of the system and is therefore not considered. Thus, only five assembly errors of X DE、YDE、ZDE、ADE、BDE remain. Wherein X DE、YDE、ADE、BDE is also known as a lateral (i.e., X/Y direction) misalignment error, and Z DE is also known as an axial (i.e., Z direction) misalignment error.
The invention provides a stepwise calculation adjustment method of a coaxial two-inverse system, which aims at four lateral offset errors X DE、YDE、ADE、BDE only, and is characterized in that: for a coaxial two-reflection system, the axial offset error Z DE is not a difficulty in adjustment at present, and can be eliminated through measuring the focus or spherical aberration of the system; the four lateral misalignment errors X DE、YDE、ADE、BDE are the current difficulties of the coaxial two-phase system, and the root cause is that the four lateral misalignment errors have coupling property on the influence of the imaging quality of the system, so the invention mainly aims at the calculation and development research of the four lateral misalignment errors.
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The invention provides an adjustment method for step-by-step calculation of a coaxial two-inverse system, which is shown in fig. 2, and comprises the following steps:
S201, detecting wave aberration distribution of a view field on a coaxial two-inverse system axis to be adjusted, and fitting to obtain a third-order coma coefficient;
It should be noted that, the field of view is the direction/angle of the optical system looking at the target, taking the coaxial two-reflection system as an example, the field of view can be regarded as the angle of the incident light ray relative to the main mirror; the on-axis field of view refers to the field of view of an incident beam that impinges perpendicularly on the primary mirror, i.e., the angle of incidence is 0 degrees. Specifically, in the coaxial two-reflection system to be adjusted, wave aberration distribution of a field of view on a system axis can be detected and obtained by designing a special wave-front detection light path (the scheme of the wave-front detection light path and the type of a wave-front sensor used are not limited by the invention), so that wave aberration coefficients of the system can be obtained by fitting, namely, the invention only considers the wave aberration coefficients of the field of view on the axis to calculate the current lateral offset errors of the system. The wave aberration coefficients obtained by fitting are generally represented by 36 terms of zernike polynomial coefficients, wherein the 5th to 8 th wave aberration coefficients are mainly related to the lateral misalignment errors, and the 5/6 th wave aberration coefficients are given a special name, namely third-order astigmatism coefficients; the wave aberration coefficient of item 7/8 is also a specific name, namely, a third-order coma coefficient.
S202, judging whether the third-order coma coefficients are smaller than a first set threshold value or not; if not, executing step S203; if yes, go to step S204;
In practical applications, the first set threshold may be set according to the accuracy of the on-axis two-way system to be adjusted, and is generally set to 0.01.
S203, calculating the eccentric adjustment quantity of the secondary mirror along the X axis and the eccentric adjustment quantity of the secondary mirror along the Y axis, and compensating and adjusting the coaxial two-reflection system to be assembled and adjusted.
S204, fitting to obtain a third-order astigmatism coefficient according to wave aberration distribution; after step S204 is performed, steps S205 to S207 are also performed.
S205, introducing a known quantitative offset to the secondary mirror by taking the current state of the coaxial two-way system to be adjusted as a starting point.
S206, detecting wave aberration distribution of the on-axis view field of the coaxial two-inverse system after the quantitative imbalance is introduced, and fitting to obtain a new third-order astigmatism coefficient.
S207, calculating the inclination adjustment quantity of the secondary mirror around the X axis and the inclination adjustment quantity of the secondary mirror around the Y axis according to the change quantity of the third-order astigmatism coefficients before and after the introduction of the quantitative offset, and carrying out compensation adjustment on the coaxial two-reflection system after the introduction of the quantitative offset.
Steps S201 to S203 described above are calibration coma processes; steps S204 to S207 are calibration astigmatism procedures.
It should be understood that, for the coaxial two-way system, there is a special assembly error, that is, there is a "zero coma free point" in the coaxial two-way system, at this time, the four lateral misalignment errors of the secondary mirror satisfy a certain proportional relationship, as shown in fig. 3, when the secondary mirror rotates around the point, no third-order coma and no third-order astigmatism are introduced, so, even if there is an assembly error for the secondary mirror, the assembly error satisfies the condition of "zero coma free point", and the third-order coma and the third-order astigmatism of the field of view on the system axis are the same as those in the case of no assembly error. Because of the existence of the 'zero coma free point', the assembly error of the coaxial two-way system is not enough to be calculated only by the imaging quality (such as wave aberration coefficient) of the on-axis visual field, and a certain error exists. According to the characteristic of 'zero coma free point', the invention firstly eliminates the third-order coma of the on-axis visual field by adjusting the eccentric adjustment quantity, thereby binding four lateral offset errors of the secondary mirror together in pairs, converting the solving problem of the four lateral offset errors into the solving problem of two errors based on the concept of step-by-step calculation, further, increasing the effective information of the wave aberration under the single visual field by introducing the quantitative offset quantity, and providing a method for calculating the lateral offset errors of the coaxial two-inverse system only according to the wave aberration of the on-axis visual field.
In the adjustment method for the step-by-step calculation of the coaxial two-way system provided by the embodiment of the invention, aiming at the calculation and unfolding research of four lateral offset errors, namely the eccentric adjustment quantity along the X axis, the eccentric adjustment quantity along the Y axis, the inclination adjustment quantity around the X axis and the inclination adjustment quantity around the Y axis, the current lateral offset error of the system can be calculated by measuring the wave aberration of the view field on the axis, so that the current lateral offset error of the coaxial two-way system can be eliminated, the engineering applicability and the operability are stronger, the manpower and material resources are saved, the double influence of zero coma free point and the surface shape error is overcome, and the method is more scientific and efficient and is beneficial to practical assembly and application.
In a specific implementation, in the method for adjusting the step-by-step calculation of the coaxial two-way system provided by the embodiment of the present invention, as shown in fig. 4, after performing step S207 to calculate the tilt adjustment amount of the secondary mirror around the X axis and the tilt adjustment amount around the Y axis, compensation adjustment is performed on the coaxial two-way system after introducing quantitative offset, which may specifically include: judging whether the calculated inclination adjustment amount of the secondary mirror around the X axis and the calculated inclination adjustment amount of the secondary mirror around the Y axis are smaller than a second set threshold value; if not, compensating and adjusting the coaxial two-reflection system after introducing quantitative offset according to the calculated inclination adjustment quantity of the secondary mirror around the X axis and the calculated inclination adjustment quantity around the Y axis; if so, the coaxial two-way system after the introduction of the quantitative offset is restored to the coaxial two-way system before the introduction of the quantitative offset according to the introduced quantitative offset, so as to complete the adjustment.
Specifically, after the step S207 is performed to calculate the tilt adjustment amount of the sub-mirror about the X axis and the tilt adjustment amount about the Y axis, it is determined whether or not both of the calculated tilt adjustment amounts about the X axis and the Y axis are smaller than the second set threshold; if yes, performing system recovery according to the introduced quantitative offset; if not, the calculated tilt adjustment amount around the X axis and the calculated tilt adjustment amount around the Y axis are used to compensate and correct the tilt adjustment amount. This procedure is a calibration astigmatism procedure, i.e. a procedure of compensating and calibrating the two-way system based on the calculated tilt adjustment about the X, Y axis and returning to the calibration of coma. The whole adjustment process is divided into two steps of correction coma aberration and correction astigmatism, and the outlet of the jump-out circulation is that the correction astigmatism is successful, and the adjustment method is characterized in that the calculated tilt adjustment quantity around the X axis and the calculated tilt adjustment quantity around the Y axis are judged to be smaller than a second set threshold value.
In practical applications, the second set threshold B may be set according to the tuning accuracy required by the on-axis two-way system, and is generally set to 0.005.
In a specific implementation, in the method for installing and adjusting the coaxial two-inverse system step-by-step calculation provided by the embodiment of the invention, a first formula is adopted to calculate the eccentric adjustment quantity of the secondary mirror along the X axis and the eccentric adjustment quantity along the Y axis; the first formula may be:
Wherein X DE is the decentering adjustment amount of the secondary mirror along the X axis, Y DE is the decentering adjustment amount of the secondary mirror along the Y axis, C 7、C8 is the third-order coma coefficient, and k 1 is the influence factor of the decentering adjustment amount on the third-order coma. For a specific coaxial two-inverse system, the k 1 value is uniquely determined and can be calculated through a theoretical formula or can be calculated through offset sampling experimental data.
In a specific implementation, in the method for adjusting the coaxial two-inverse system step by step calculation provided by the embodiment of the present invention, step S203 performs compensation adjustment on the coaxial two-inverse system to be adjusted, and specifically includes: and compensating and correcting the eccentric error of the coaxial two-way system to be adjusted by using the calculated eccentric adjustment quantity along the X axis and the calculated eccentric adjustment quantity along the Y axis. After compensating and correcting the decentering error, the third-order coma coefficient can be obtained by re-fitting, and the step of judging whether the third-order coma coefficient is smaller than the first set threshold value forms a closed loop, as shown in fig. 2, steps S201-S202-S203-S201 are cyclic processes of correcting coma.
In a specific implementation, in the method for adjusting the step-by-step calculation of the coaxial two-way system provided by the embodiment of the present invention, when step S204 is executed, the quantitative offset may be a quantitative eccentric adjustment along the X axis or a quantitative eccentric adjustment along the Y axis. It should be noted that the quantitative offset may be a quantitative tilt adjustment about the X axis or a quantitative tilt adjustment about the Y axis, which may be specific according to the actual situation, and will not be described herein.
In practical applications, in the case that the lateral offset error existing in the secondary mirror is unknown, a set eccentric adjustment value (for example, 0.5 mm) can be introduced into the eccentric adjustment amount along the X-axis, and this set eccentric error value is the known lateral offset amount. Similarly, the corresponding lateral misalignment amount may be introduced into the amount of eccentric adjustment along the Y axis, the amount of tilt adjustment about the X axis, the amount of tilt adjustment about the Y axis, and the like.
In the method for installing and adjusting the coaxial two-inverse system step by step calculation provided by the embodiment of the invention, when the quantitative offset is quantitative eccentric adjustment along the X axis, the inclination adjustment of the secondary mirror around the X axis and the inclination adjustment of the secondary mirror around the Y axis are calculated through a second formula; the second formula may be:
Wherein A DE is the tilt adjustment amount of the secondary mirror around the X axis, B DE is the tilt adjustment amount of the secondary mirror around the Y axis, All are three-order astigmatism coefficients before introducing quantitative offset,All are third-order astigmatism coefficients after quantitative imbalance is introduced, deltaX DE is a quantitative decentering adjustment quantity along an X axis, k 3 is an influence factor of the decentering adjustment quantity on the third-order astigmatism, and m magic is an influence factor based on a zero coma free point. For a specific coaxial two-inverse system, the k 3 value and the m magic value are uniquely determined and can be calculated through theoretical formulas or can be calculated through offset sampling experimental data.
In the method for installing and adjusting the coaxial two-inverse system step by step calculation provided by the embodiment of the invention, when the quantitative offset is quantitative eccentric adjustment along the Y axis, the inclination adjustment of the secondary mirror around the X axis and the inclination adjustment around the Y axis are calculated through a third formula; the third formula is:
Wherein A DE is the tilt adjustment amount of the secondary mirror around the X axis, B DE is the tilt adjustment amount of the secondary mirror around the Y axis, All are three-order astigmatism coefficients before introducing quantitative offset,The three-order astigmatism coefficients after the quantitative offset is introduced are respectively represented by delta Y DE, the quantitative decentration adjustment quantity along the Y axis, k 3 and m magic, wherein the influence factor of the decentration adjustment quantity on the three-order astigmatism is represented by the influence factor based on the zero coma free point. For a specific coaxial two-inverse system, the k 3 value and the m magic value are uniquely determined and can be calculated through theoretical formulas or can be calculated through offset sampling experimental data.
Taking fig. 4 as an example, the following describes an adjustment method of the step-by-step calculation of the coaxial two-way system according to the embodiment of the present invention by using a specific example:
Step one, measuring wave aberration distribution of a view field on a coaxial two-inverse system axis to be adjusted, and fitting to obtain a third-order coma coefficient C 7/C8.
And step two, judging whether the magnitudes of the third-order coma coefficients C 7 and C 8 are smaller than a first set threshold A (such as 0.01).
And thirdly, if not, calculating the eccentric adjustment quantity X DE/YDE of the secondary mirror according to the first formula (1), compensating and adjusting the coaxial two-reflection system, and returning to the first step.
Step four, if yes, continuing to fit the third-order astigmatism coefficient according to the wave image distributionStep five is then performed.
And fifthly, introducing a known quantitative offset delta X DE to the secondary mirror by taking the current state of the coaxial two-way system as a starting point.
Step six, detecting wave aberration distribution of the on-axis view field of the coaxial two-inverse system after introducing quantitative offset, and fitting to obtain a third-order astigmatism coefficient
Step seven, according to the variation of the third-order astigmatism coefficients before and after the introduction of quantitative offsetAndAnd calculating the inclination adjustment amount A DE/BDE of the secondary mirror according to the second formula (2).
And step eight, judging whether the sizes of the inclination adjustment amounts A DE/BDE are smaller than a second set threshold B (for example, 0.005).
And step nine, if not, carrying out compensation adjustment on the coaxial two-way system according to the inclination adjustment quantity A DE/BDE, and returning to the step one.
And step ten, if so, recovering the coaxial two-way system according to the introduced quantitative offset delta X DE, and thus completing the elimination of the lateral offset error of the coaxial two-way system.
By executing the steps one to ten, the wave aberration distribution under the on-axis visual field is measured, so that the lateral offset error of the coaxial two-reflecting system can be eliminated, and the purpose of adjusting the coaxial two-reflecting system can be realized.
Based on the same inventive concept, the embodiment of the invention also provides a device for installing and adjusting the step-by-step calculation of the coaxial two-way system, and because the principle of solving the problem of the device is similar to that of the above-mentioned method for installing and adjusting the step-by-step calculation of the coaxial two-way system, the implementation of the device can refer to the implementation of the method for installing and adjusting the step-by-step calculation of the coaxial two-way system, and the repetition is omitted.
In a specific implementation, the tuning device for step-by-step calculation of the coaxial two-inverse system provided by the embodiment of the invention, as shown in fig. 5, specifically includes:
The first fitting module 11 is used for detecting wave aberration distribution of a view field on a coaxial two-inverse system axis to be adjusted, and fitting to obtain a third-order coma coefficient;
The first adjustment module 12 is configured to calculate an eccentric adjustment amount of the secondary mirror along the X axis and an eccentric adjustment amount of the secondary mirror along the Y axis, and perform compensation adjustment on the coaxial two-reflection system to be adjusted if the third-order coma coefficient is greater than or equal to a first set threshold;
the second fitting module 13 is configured to fit the third-order astigmatic coefficient according to the wave aberration distribution if the third-order coma coefficients are all smaller than the first set threshold;
A third fitting module 14, configured to introduce a known quantitative offset to the secondary mirror with a current state of the coaxial two-way system to be tuned as a starting point; detecting wave aberration distribution of a visual field on an axis of the coaxial two-inverse system after introducing quantitative offset, and fitting to obtain a new third-order astigmatism coefficient;
The second adjusting module 15 is configured to calculate an inclination adjustment amount of the secondary mirror around the X axis and an inclination adjustment amount of the secondary mirror around the Y axis according to the amounts of change of the third-order astigmatism coefficients before and after the introduction of the quantitative offset, and perform compensation adjustment on the coaxial two-inverse system after the introduction of the quantitative offset.
In the adjustment device for the step-by-step calculation of the coaxial two-way system provided by the embodiment of the invention, through the interaction of the five modules, the current lateral offset error of the system can be calculated only by utilizing the wave aberration coefficient of the view field on the measuring shaft, so that the current lateral offset error of the coaxial two-way system can be eliminated, the engineering applicability and the operability are stronger, the manpower and material resources are saved, the double influences of zero coma free point and the plane shape error are overcome, and the device is more scientific and efficient and is beneficial to practical assembly and application.
Further, in the implementation, in the adjustment device for stepwise calculation of the coaxial two-reflection system provided by the embodiment of the present invention, the second adjustment module 15 may be specifically configured to determine whether the calculated tilt adjustment amount of the secondary mirror around the X axis and the calculated tilt adjustment amount around the Y axis are both smaller than the second set threshold; if not, compensating and adjusting the coaxial two-reflection system after introducing quantitative offset according to the calculated inclination adjustment quantity of the secondary mirror around the X axis and the calculated inclination adjustment quantity around the Y axis; if so, the coaxial two-way system after the quantitative offset is introduced is restored to the coaxial two-way system before the quantitative offset according to the quantitative offset introduced, so as to complete the adjustment.
For more specific working procedures of the above modules, reference may be made to the corresponding contents disclosed in the foregoing embodiments, and no further description is given here.
In this specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, so that the same or similar parts between the embodiments are referred to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant points refer to the description of the method section.
Those of skill would further appreciate that the various illustrative elements and algorithm steps described in connection with the embodiments disclosed herein may be implemented as electronic hardware, computer software, or combinations of both, and that the various illustrative elements and steps are described above generally in terms of functionality in order to clearly illustrate the interchangeability of hardware and software. Whether such functionality is implemented as hardware or software depends upon the particular application and design constraints imposed on the solution. Skilled artisans may implement the described functionality in varying ways for each particular application, but such implementation decisions should not be interpreted as causing a departure from the scope of the present application.
The steps of a method or algorithm described in connection with the embodiments disclosed herein may be embodied directly in hardware, in a software module executed by a processor, or in a combination of the two. The software modules may be disposed in Random Access Memory (RAM), memory, read Only Memory (ROM), electrically programmable ROM, electrically erasable programmable ROM, registers, hard disk, a removable disk, a CD-ROM, or any other form of storage medium known in the art.
In summary, the method for installing and adjusting the step-by-step calculation of the coaxial two-inverse system provided by the embodiment of the invention comprises the following steps: detecting wave aberration distribution of a view field on a coaxial two-inverse system axis to be adjusted, and fitting to obtain a third-order coma coefficient; judging whether the third-order coma coefficients are smaller than a first set threshold value or not; if not, calculating the eccentric adjustment quantity of the secondary mirror along the X axis and the eccentric adjustment quantity of the secondary mirror along the Y axis, and compensating and adjusting the coaxial two-reflection system to be assembled and adjusted; if yes, fitting to obtain a third-order astigmatism coefficient according to wave aberration distribution; taking the current state of the coaxial two-way system to be adjusted as a starting point, and introducing a known quantitative offset to the secondary mirror; detecting wave aberration distribution of a visual field on an axis of the coaxial two-inverse system after introducing quantitative offset, and fitting to obtain a new third-order astigmatism coefficient; according to the variation of the third-order astigmatism coefficients before and after the introduction of the quantitative offset, the inclination adjustment quantity of the secondary mirror around the X axis and the inclination adjustment quantity of the secondary mirror around the Y axis are calculated, and the compensation adjustment is carried out on the coaxial two-reflection system after the introduction of the quantitative offset. According to the method, aiming at the calculation and unfolding research of four lateral offset errors, namely the eccentric error along the X axis, the eccentric error along the Y axis, the inclination adjustment quantity around the X axis and the inclination adjustment quantity around the Y axis, the three-order coma of the visual field on the axis is eliminated by adjusting the eccentric adjustment quantity based on the characteristics of the free point of zero coma, so that the four lateral offset errors of the secondary mirror are bound together in pairs, the solving problem of the four lateral offset errors is converted into the solving problem of the two errors, further, the effective information of wave aberration under a single visual field is increased by introducing the quantitative offset quantity, thus the current lateral offset error of the system can be calculated by measuring the wave aberration coefficient of the visual field on the axis, further, the current lateral offset error of the coaxial two-way system can be eliminated, the engineering applicability and the operability are stronger, the manpower and material resources are saved, the double effects of the free point of zero coma and the face shape error are overcome, and the method is more scientific and efficient and is beneficial to practical assembly application. In addition, the invention provides a corresponding device for the adjustment method of the step-by-step calculation of the coaxial two-way system, so that the method has more practicability and has corresponding advantages.
Finally, it is further noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
The method and device for adjusting the step-by-step calculation of the coaxial two-way system provided by the invention are described in detail, and specific examples are applied to the description of the principle and the implementation mode of the invention, and the description of the examples is only used for helping to understand the method and the core idea of the invention; meanwhile, as those skilled in the art will have variations in the specific embodiments and application scope in accordance with the ideas of the present invention, the present description should not be construed as limiting the present invention in view of the above.
Claims (7)
1. The method for installing and adjusting the step-by-step calculation of the coaxial two-way system is characterized by comprising the following steps of:
detecting wave aberration distribution of a view field on a coaxial two-inverse system axis to be adjusted, and fitting to obtain a third-order coma coefficient;
judging whether the third-order coma coefficients are smaller than a first set threshold value or not;
if not, calculating the eccentric adjustment quantity of the secondary mirror along the X axis and the eccentric adjustment quantity of the secondary mirror along the Y axis by adopting a first formula, and compensating and adjusting the coaxial two-counter system to be adjusted; the first formula is:
Wherein X DE is the decentering adjustment amount of the secondary mirror along the X axis, Y DE is the decentering adjustment amount of the secondary mirror along the Y axis, C 7、C8 is the third-order coma coefficient, and k 1 is the influence factor of the decentering adjustment amount on the third-order coma;
if yes, fitting to obtain a third-order astigmatism coefficient according to the wave aberration distribution;
Introducing a known quantitative offset to a secondary mirror by taking the current state of the coaxial two-way system to be adjusted as a starting point;
Detecting wave aberration distribution of a visual field on an axis of the coaxial two-inverse system after introducing quantitative offset, and fitting to obtain a new third-order astigmatism coefficient;
According to the variation of the third-order astigmatism coefficients before and after the introduction of quantitative offset, calculating the inclination adjustment quantity of the secondary mirror around the X axis and the inclination adjustment quantity around the Y axis, and judging whether the calculated inclination adjustment quantity of the secondary mirror around the X axis and the calculated inclination adjustment quantity around the Y axis are smaller than a second set threshold value or not;
If not, compensating and adjusting the coaxial two-reflection system after introducing quantitative offset according to the calculated inclination adjustment quantity of the secondary mirror around the X axis and the calculated inclination adjustment quantity around the Y axis;
if so, restoring the coaxial two-way system after the introduction of the quantitative offset into the coaxial two-way system before the introduction of the quantitative offset according to the introduced quantitative offset, so as to complete the adjustment.
2. The method for adjusting the coaxial two-way system by step calculation according to claim 1, wherein the method for adjusting the coaxial two-way system to be adjusted by compensation specifically comprises the following steps:
and compensating and correcting the eccentric error of the coaxial two-way system to be adjusted by using the calculated eccentric adjustment quantity along the X axis and the calculated eccentric adjustment quantity along the Y axis.
3. The method for stepwise adjustment of a coaxial two-way system according to claim 1, wherein the quantitative offset is a quantitative eccentric adjustment along the X-axis or a quantitative eccentric adjustment along the Y-axis.
4. The method for installing and adjusting the coaxial two-reflection system step by step according to claim 3, wherein when the quantitative offset is a quantitative eccentric adjustment along the X axis, the tilt adjustment of the secondary mirror around the X axis and the tilt adjustment around the Y axis are calculated by a second formula; the second formula is:
Wherein A DE is the tilt adjustment amount of the secondary mirror around the X axis, B DE is the tilt adjustment amount of the secondary mirror around the Y axis, All are three-order astigmatism coefficients before introducing quantitative offset,All are third-order astigmatism coefficients after quantitative imbalance is introduced, deltaX DE is a quantitative decentering adjustment quantity along an X axis, k 3 is an influence factor of the decentering adjustment quantity on the third-order astigmatism, and m magic is an influence factor based on a zero coma free point.
5. The method for installing and adjusting the coaxial two-reflection system step by step according to claim 3, wherein when the quantitative offset is a quantitative eccentric adjustment along the Y axis, the tilt adjustment of the secondary mirror around the X axis and the tilt adjustment around the Y axis are calculated by a third formula; the third formula is:
Wherein A DE is the tilt adjustment amount of the secondary mirror around the X axis, B DE is the tilt adjustment amount of the secondary mirror around the Y axis, All are three-order astigmatism coefficients before introducing quantitative offset,The three-order astigmatism coefficients after the quantitative offset is introduced are respectively represented by delta Y DE, the quantitative decentration adjustment quantity along the Y axis, k 3 and m magic, wherein the influence factor of the decentration adjustment quantity on the three-order astigmatism is represented by the influence factor based on the zero coma free point.
6. An installation and adjustment device for stepwise calculation of a coaxial two-way system, which is installed and adjusted by adopting the installation and adjustment method for stepwise calculation of the coaxial two-way system according to any one of claims 1 to 5, and is characterized by comprising:
The first fitting module is used for detecting wave aberration distribution of a view field on a coaxial two-inverse system axis to be adjusted and fitting to obtain a third-order coma coefficient;
The first adjusting module is used for calculating the eccentric adjustment quantity of the secondary mirror along the X axis and the eccentric adjustment quantity of the secondary mirror along the Y axis and carrying out compensation adjustment on the coaxial two-counter system to be adjusted if the third-order coma coefficient is larger than or equal to a first set threshold value;
the second fitting module is used for fitting to obtain third-order astigmatic coefficients according to the wave aberration distribution if the third-order coma coefficients are smaller than the first set threshold;
The third fitting module is used for introducing a known quantitative offset to the secondary mirror by taking the current state of the coaxial two-way system to be adjusted as a starting point; detecting wave aberration distribution of a visual field on an axis of the coaxial two-inverse system after introducing quantitative offset, and fitting to obtain a new third-order astigmatism coefficient;
And the second adjusting module is used for calculating the inclination adjusting quantity of the secondary mirror around the X axis and the inclination adjusting quantity of the secondary mirror around the Y axis according to the variation quantity of the third-order astigmatism coefficients before and after the introduction of the quantitative offset, and carrying out compensation adjustment on the coaxial two-inverse system after the introduction of the quantitative offset.
7. The stepwise computing adjustment device of the coaxial two-reflection system according to claim 6, wherein the second adjustment module is specifically configured to determine whether the calculated tilt adjustment amount of the secondary mirror around the X axis and the calculated tilt adjustment amount around the Y axis are both smaller than a second set threshold; if not, compensating and adjusting the coaxial two-reflection system after introducing quantitative offset according to the calculated inclination adjustment quantity of the secondary mirror around the X axis and the calculated inclination adjustment quantity around the Y axis; if so, restoring the coaxial two-way system after the introduction of the quantitative offset into the coaxial two-way system before the introduction of the quantitative offset according to the introduced quantitative offset, so as to complete the adjustment.
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| CN1885097A (en) * | 2005-06-22 | 2006-12-27 | 中国科学院长春光学精密机械与物理研究所 | Method for adjusting aspherical detection optical system by computer |
| CN113031201A (en) * | 2021-03-15 | 2021-06-25 | 中国科学院长春光学精密机械与物理研究所 | Method for adjusting on-orbit compensation primary mirror curvature radius error influence |
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| JP2008084490A (en) * | 2006-09-28 | 2008-04-10 | Sony Corp | Objective lens, optical pickup device, and optical disk device |
| JP2010218668A (en) * | 2009-03-19 | 2010-09-30 | Panasonic Corp | Apparatus for inspecting optical pickup, and apparatus for assembling and adjusting optical pickup |
| DE102011080437A1 (en) * | 2010-09-30 | 2012-04-05 | Carl Zeiss Smt Gmbh | Imaging optical system for microlithography |
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| CN1885097A (en) * | 2005-06-22 | 2006-12-27 | 中国科学院长春光学精密机械与物理研究所 | Method for adjusting aspherical detection optical system by computer |
| CN113031201A (en) * | 2021-03-15 | 2021-06-25 | 中国科学院长春光学精密机械与物理研究所 | Method for adjusting on-orbit compensation primary mirror curvature radius error influence |
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