CN115575847A - Performance index detection system for acceleration power supply of electron beam processing equipment - Google Patents
Performance index detection system for acceleration power supply of electron beam processing equipment Download PDFInfo
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Abstract
An acceleration power supply performance index detection system of electron beam processing equipment comprises a central controller, a power supply simulator and a detection branch circuit; the input end of the power supply simulator is connected with a power grid, the output end of the power supply simulator is connected with the input end of the acceleration power supply to be detected, and the detection branch is connected with the output end of the acceleration power supply; the central controller is respectively electrically connected with the power supply simulator, the detection branch and the control system of the electron beam processing equipment and is used for controlling the power supply simulator to simulate the voltage change condition of a power grid; the electronic beam current change condition instruction is also used for outputting an electronic beam current change condition of an electronic beam processing equipment control system; the performance index calculation module is also used for calculating the performance index according to the detection data of the detection branch and the predefined performance index; the invention can define and set the performance index, realizes the simulation of a typical working condition model by controlling the voltage change condition of the power grid through the power supply simulator, and performs data acquisition and calculation, thereby providing convenience for detecting the diversity performance index under the complex working condition.
Description
Technical Field
The invention belongs to the technical field of electron beam processing equipment, and particularly relates to an acceleration power supply performance index detection system of electron beam processing equipment.
Background
In electron beam processing equipment such as an electron beam welding machine, electron beam additive manufacturing equipment, and an electron beam drilling machine, main components include an electron gun, an acceleration power supply, a control system, and the like, wherein the acceleration power supply is an electron beam processing energy source, and an acceleration voltage directly affects the forming and energy density distribution of an electron beam spot, so the performance of the acceleration power supply is very important for the performance of the electron beam processing equipment. At present, the performance index of the acceleration power supply is mainly measured by steady-state indexes such as stability (stability) and repeatability (reproducibility) of the acceleration voltage, and the steady-state performance index of the acceleration power supply is easier to meet due to the adoption of a closed-loop control system. With the increasing requirements of the production process on electron beam processing equipment, the steady-state performance index of the acceleration power supply cannot completely reflect the quality of processing details, and a dynamic index of the acceleration power supply is necessarily introduced.
The operation condition of an acceleration power supply of the electron beam processing equipment is complex, and the interference is various.
Therefore, how to provide a performance index detection system for an acceleration power supply of electron beam processing equipment to detect multiple performance indexes of the acceleration power supply under different working conditions is a technical problem that needs to be solved urgently by technical personnel in the field.
Disclosure of Invention
In view of this, the invention provides a performance index detection system for an acceleration power supply of electron beam processing equipment, which can define and set performance indexes, realize model simulation of typical working conditions by controlling the voltage change condition of a power grid through a power supply simulator, and perform data acquisition and calculation, thereby providing convenience for detecting various performance indexes under complex working conditions.
In order to achieve the purpose, the invention adopts the following technical scheme:
a performance index detection system of an acceleration power supply of electron beam processing equipment comprises a central controller, a power supply simulator and a detection branch circuit;
the system comprises a central controller, a power supply simulator and a detection branch circuit;
the input end of the power supply simulator is connected with a power grid, the output end of the power supply simulator is connected with the input end of an acceleration power supply to be detected, and the detection branch is connected with the output end of the acceleration power supply;
the central controller is respectively electrically connected with the power supply simulator, the detection branch and the control system of the electron beam processing equipment and is used for controlling the power supply simulator to simulate the voltage change condition of a power grid; the electronic beam processing equipment is also used for coordinating the change condition of the electronic beam current output by the electronic beam processing equipment control system; and the performance index calculation module is also used for calculating the performance index according to the detection data of the detection branch and the predefined performance index.
The power supply simulator is adopted to provide electric energy for the accelerating power supply, and the simulation of the power grid voltage abrupt change transition model can be realized by simulating the condition of power grid voltage change through the central controller in the performance index detection process.
Further, the detection branch comprises a divider resistor and a detection resistor;
one end of the divider resistor is connected with the high-voltage end of the acceleration power supply, the other end of the divider resistor is connected with one end of the detection resistor, and the other end of the detection resistor is connected with the low-voltage end of the acceleration power supply and grounded. On the detection resistorThe output is proportional to the accelerating voltage U a Acceleration voltage signal u' a I.e. by
Accelerating voltage signal u' a And the data is sent to an analog-to-digital conversion unit of the central controller.
Further, the power supply simulator comprises three-phase circuits of U, V and W, wherein each phase circuit comprises an autotransformer and a switch array; the input end of the autotransformer is connected with a power grid and the central controller, and the output end of the autotransformer is connected with the input end of the acceleration power supply through the switch array.
Further, the autotransformer comprises 5-gear output ends, and the output voltage sequentially comprises a first output end, a second output end, a third output end, a fourth output end and a fifth output end from high to low; the third output end is connected with the input end;
the switch array comprises two-phase thyristors U1, U2, U3, U4 and U5;
the first output end is connected with the T1 pole of the biphase thyristor U1,
the second output end is connected with the T1 pole of the biphase thyristor U2,
the third output end is connected with the T1 pole of the biphase thyristor U3,
the fourth output end is connected with the T1 pole of the biphase thyristor U4,
the fifth output end is connected with the T1 pole of the two-phase thyristor U5;
the corresponding T2 poles of the two-phase thyristors U1, U2, U3, U4 and U5 are connected together to serve as the output end of single-phase voltage and are connected to the input end of the acceleration power supply and the central controller; and the G poles corresponding to the two-phase thyristors U1, U2, U3, U4 and U5 are respectively electrically connected with the central controller.
Wherein the output end of the single-phase voltage is the output end U of the U-phase circuit 0 Output end V of the phase-V circuit 0 And W phase circuit output end W 0 (ii) a By U 0 、V 0 And W 0 The three-phase voltage is used as the input voltage of the acceleration power supply; a V phase,The W-phase circuit is respectively the same as the U-phase circuit, the two-phase thyristors in the switch array are all controlled by zero-cross triggering, the same-gear output ends of the U-phase, V-phase and W-phase autotransformers are controlled to be simultaneously connected, namely, the power supply simulator 2 simultaneously outputs the 1 st gear voltage, the 2 nd gear voltage, the 3 rd gear voltage, the 4 th gear voltage or the 5 th gear voltage of the U-phase, V-phase and W-phase autotransformers, and the power supply simulator can complete the switching of the output voltages in one power grid period.
Furthermore, the central controller comprises a central processing unit, a digital input unit, a digital output unit, an analog-to-digital conversion unit and a transmitter;
the central processing unit is used for generating a control signal; is also used for converting the accelerating voltage signal u' a The detected data is converted into an acceleration voltage filtering signal u by a digital filter a Is based on the acceleration voltage signal u' a Detected data and acceleration voltage filtering signal u a Calculating a performance index from the data;
the transmitter is connected with the input end and the output end of the power supply simulator, receives a power grid voltage signal, generates a power grid voltage three-phase zero-crossing signal and a power grid voltage amplitude signal, receives a power supply simulator output voltage signal, and generates a power supply simulator output voltage amplitude signal;
the analog-to-digital conversion unit is electrically connected with the transmitter and used for receiving a power grid voltage amplitude signal and generating an input voltage indication; receiving an output voltage amplitude signal of a power supply simulator, and generating an output voltage indication; the analog-to-digital conversion unit is electrically connected with the detection branch and is used for receiving an acceleration voltage signal u' a Generating detection data;
the digital input unit is electrically connected with the transmitter and used for receiving the three-phase zero-crossing signal of the grid voltage;
and the digital output unit is electrically connected with the power supply simulator and is used for sending a control signal to the power supply simulator.
Furthermore, the central controller further comprises a digital-to-analog conversion unit, wherein the digital-to-analog converter is electrically connected with the control system of the electron beam processing equipment and is used for replacing an electron beam given signal in the control system of the electron beam processing equipment in the test process and simulating to generate an electron beam sudden-fall or sudden-rise control signal so as to realize the simulation of an electron beam sudden-change transition model;
the digital input unit is electrically connected with the control system of the electron beam processing equipment and is used for receiving a detection ready state signal of the control system of the electron beam processing equipment;
the digital output unit is electrically connected with the control system of the electron beam machining equipment and is used for sending a detection starting signal, a detection ending signal and/or a simulation high-voltage discharge signal to the control system of the electron beam machining equipment.
Furthermore, the analog-to-digital conversion unit is electrically connected with the control system of the electron beam processing equipment and is used for receiving electron beam current signals and focusing current parameters of an operation system of the electron beam processing equipment and generating detection data of the corresponding electron beam current signals and focusing current signals; and the central processing unit is also used for calculating a performance index according to the detection data of the electron beam current signal and the focusing current signal.
Further, the central controller also comprises a memory and a display;
the memory is used for storing and calling the detection data;
the display is used for displaying working condition conditions, detection signal-time waveforms and detection signal performance index calculation results during detection; and the display is simultaneously used as a human-computer interface and used for inputting the working instruction of the acceleration power supply performance index detection system of the electron beam processing equipment.
Further, the central controller includes an index definition module for defining a steady-state performance index and/or a dynamic performance index.
Further, the steady state performance index includes one or more of a ripple factor, a stability, and a repeatability;
the ripple factor represents the detection time T (T) at operating condition i 1 ～t 2 ) The percentage of the difference between the peak-to-peak value and the average value of the acceleration voltage and the average value, and the ripple coefficient gamma a Is calculated as：
Wherein, u' aimax 、u′ aimin And u' ai Are acceleration voltage signals u' ai Detecting the maximum value, the minimum value and the average value of the time period T; and during the detection time period t 1 -t 2 In the interior of the container body,
the stability represents the detection time T in the working condition i i (t i1 ～t i2 ) The maximum or minimum of the acceleration voltage as a percentage of the difference from the average, the stability s a The calculation process of (2) comprises:
the stability s a Is s is amax And s amin The larger value of (a);
wherein u is aimax 、u aimin And u ai Respectively, an accelerating voltage filter signal u a At T i A maximum, minimum and average value of the time period, and
and the accelerating voltage filter signal u a Is an acceleration voltage signal u' a Obtaining the product through filtering treatment;
the repeatability is expressed as the acceleration voltage U a And an electron beam current I a The electron beam equipment is shut down and restarted under the working condition i, the electron beam equipment enters the working condition j to operate, and the acceleration voltage of the working condition i and the working condition j is unchangedThe difference of the mean values as a percentage of the mean value of the acceleration voltage of operating condition i, the repeatability r a The calculation formula of (c) is:
wherein u is ai And u aj Steady-state acceleration voltages corresponding to the working condition i and the working condition j respectively; repeatedly shutting down and restarting the electron beam apparatus n times at different time periods to obtain n times of repeatability r a Data, with the maximum as the repeatability r a The value is obtained.
The dynamic performance index comprises an acceleration voltage recovery time and/or an acceleration voltage fluctuation rate; the recovery time of the acceleration voltage is represented as the process of the transition from the working condition i to the working condition j from the acceleration voltage U a Steady state accelerating voltage U beyond working condition i ai Is (d) +/-sigma a % time of Steady State band onset τ i Steady acceleration voltage U to entering working condition j aj Is (d) +/-sigma a % time within steady state band at which no longer exceeds steady state band j For this purpose, defined as the acceleration voltage recovery time t v The acceleration voltage recovery time t v The calculation formula is:
t v ＝τ j -τ i
wherein, tau j At the time of entering the steady-state acceleration voltage steady-state band of the working condition j and no longer exceeding the steady-state band, tau i The starting time of the steady-state acceleration voltage steady-state band for exceeding the working condition i; sigma + -sigma a % of steady-state acceleration voltage U of device pair a A required value of stability;
the acceleration voltage fluctuation ratio is expressed as: the process of the working condition i transiting to the working condition j accelerates the voltage recovery time t v Internal, acceleration voltage U a Extreme value (maximum value U) ajmax Or minimum value U ajmin ) Acceleration voltage U corresponding to working condition j aj Of the acceleration voltage fluctuation rate DeltaU a % calculation includes:
the acceleration voltage fluctuation rate DeltaU a % is Δ U amax % and. DELTA.U amin % greater;
wherein u is ajmax And u ajmin Respectively corresponding to the maximum value and the minimum value of the accelerating voltage in the transition process from the working condition i to the working condition j.
The invention has the beneficial effects that:
the invention discloses a system for detecting performance indexes of an acceleration power supply of electron beam processing equipment, which defines the performance indexes of the acceleration power supply and a transition process model of typical working conditions through a central controller, can realize the simulation of the typical working conditions through a power supply simulator device, and complete the comprehensive detection of the performance indexes of the acceleration power supply.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the prior art descriptions will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a schematic diagram illustrating a dynamic data detection system for an acceleration power supply according to the present invention;
FIG. 2 is a schematic diagram of a U-phase circuit of a power supply simulator provided by the invention;
FIG. 3 is a schematic diagram of a central controller according to the present invention;
FIG. 4 is a diagram illustrating an acceleration voltage signal u' a A waveform schematic diagram;
FIG. 5 shows an acceleration voltage signal u according to the present invention a And (5) a waveform schematic diagram.
Wherein: 1-a central controller, 2-a power supply simulator and 3-a detection branch; 31-voltage dividing resistor, 32-detection resistor; 11-a central processing unit, 12-a memory, 13-a digital input unit, 14-a digital output unit, 15-an analog-to-digital conversion unit, 16-a digital-to-analog conversion unit, 17-a transmitter and 18-a display; 21-autotransformer, 22-switch array.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, an embodiment of the present invention discloses a system for detecting performance indexes of an acceleration power supply of an electron beam processing device, which includes a central controller 1, a power supply simulator 2 and a detection branch 3;
the input end of the power supply simulator 2 is connected with a power grid, the output end of the power supply simulator 2 is connected with the input end of an acceleration power supply to be tested, and the detection branch 3 is connected with the output end of the acceleration power supply;
the central controller 1 is respectively electrically connected with the power supply simulator 2, the detection branch 2 and the control system of the electron beam processing equipment and is used for controlling the power supply simulator 2 to simulate the voltage change condition of a power grid; the system is also used for coordinating the transmission of control information and detection information between the accelerating power supply performance index detection system and the electron beam processing equipment control system; and is further configured to perform performance index calculation according to the detection data of the detection branch 3 and a predefined performance index.
The power supply simulator 2 is used for supplying electric energy to the power supply to be tested, and the simulation of the power grid voltage abrupt change transition model can be realized by simulating the condition of power grid voltage change through the central controller 1 in the performance index detection process.
In one embodiment, the electron beam machining apparatus is an electron beam welder.
In another embodiment, the detection branch 3 includes a voltage dividing resistor 31 and a detection resistor 32;
one end of the voltage dividing resistor 31 is connected with a high-voltage end (negative electrode) of the acceleration power supply, the other end of the voltage dividing resistor 31 is connected with one end of the detection resistor 32, and the other end of the detection resistor 32 is connected with a low-voltage end (positive electrode) of the acceleration power supply 3 to be detected and grounded. The divider resistor 31 and the detection resistor 32 form an acceleration voltage detection branch, and the output of the detection resistor 32 is proportional to the acceleration voltage U with reference to ground a Acceleration voltage signal u' a I.e. by
Accelerating voltage signal u' a To the analog-to-digital conversion unit 15 of the central controller 1.
In another embodiment, as shown in fig. 2, the power supply simulator 2 includes three-phase circuits of U, V and W, and the circuit structure and the component parameters of each phase are the same; wherein each phase circuit comprises an autotransformer 21 and a switch array 22; the autotransformer 21 is connected with the central controller and the acceleration power supply 3 to be measured through the switch array 22.
In another embodiment, the autotransformer 21 includes 5-step output ends, and the output voltage is a first output end, a second output end, a third output end, a fourth output end and a fifth output end in sequence from high to low; the third output end is connected with the input end;
the switch array 22 comprises two-phase thyristors U1, U2, U3, U4 and U5;
the first output end is connected with the T1 pole of the biphase thyristor U1,
the second output end is connected with the T1 pole of the biphase thyristor U2,
the third output end is connected with the T1 pole of the biphase thyristor U3,
the fourth output end is connected with the T1 pole of the biphase thyristor U4,
the fifth output end is connected with the T1 pole of the double-phase thyristor U5;
corresponding T2 poles of the two-phase thyristors U1, U2, U3, U4 and U5 are connected together to serve as the output end of single-phase voltage to be connected to the input end of the acceleration power supply and the central controller 1; and the G poles corresponding to the two-phase thyristors U1, U2, U3, U4 and U5 are respectively electrically connected with the central controller 1.
Wherein the output end of the single-phase voltage is the output end U of the U-phase circuit 0 Output end V of the phase-V circuit 0 And W phase circuit output end W 0 (ii) a By U 0 、V 0 And W 0 The three-phase voltage is used as the input voltage of the acceleration power supply; the V-phase circuit and the W-phase circuit are respectively the same as the U-phase circuit, the two-phase thyristors U1, U2, U3, U4 and U5 in the switch array 22 all adopt zero-cross trigger control to control the same-gear output ends of the U-phase, V-phase and W-phase autotransformers 21 to be simultaneously connected, namely, the power supply simulator 2 simultaneously outputs the 1 st gear voltage or 2 nd gear voltage or 3 rd gear voltage or 4 th gear voltage or 5 th gear voltage of the U-phase, V-phase and W-phase autotransformers 21, and the power supply simulator 2 can complete the switching of the output voltage in one power grid period.
In another embodiment, as shown in fig. 3, the central controller 1 includes a central processing unit 11, a digital input unit 13, a digital output unit 14, an analog-to-digital conversion unit 15, a digital-to-analog conversion unit 16, and a transmitter 17;
the central processing unit 11 is used for generating control signals; is also used for converting the accelerating voltage signal u' a The detected data is converted into an acceleration voltage filtering signal u by a digital filter a Is based on the acceleration voltage signal u' a Detected data and acceleration voltage filtering signal u a Calculating a performance index from the data;
the transmitter 17 is connected with the input end and the output end of the power supply simulator 2, receives a power grid voltage signal, generates a power grid voltage three-phase zero-crossing signal and a power grid voltage amplitude signal, receives an output voltage signal of the power supply simulator 2, and generates an output voltage amplitude signal of the power supply simulator 2;
the analog-to-digital conversion unit 15 is electrically connected with the transmitter 17 and is used for receiving a power grid voltage amplitude signal and generating an input voltage indication; receiving an output voltage amplitude signal of the power supply simulator 2 and generating an output voltage indication; the analog-to-digital conversion unit 15 is electrically connected to the detection branch 3 and receives the acceleration voltage signal u' a Generating an acceleration voltage signal u' a Detecting data；
The digital input unit 13 is electrically connected with the transmitter 17 and is used for receiving a three-phase zero-crossing signal of the grid voltage; the digital input unit 13 is electrically connected with the control system of the electron beam processing equipment and is used for receiving a working ready condition signal of the electron beam processing equipment;
the digital output unit 13 is electrically connected with the power supply simulator 2 and is used for sending a control signal G to the power supply simulator 2 U1 …G U5 、G V1 …G V5 、G W1 …G W5 (ii) a And, the digital output unit 13 is electrically connected to the electron beam machining apparatus control system, and is configured to send a detection start signal, an end signal, and/or an analog high-voltage discharge signal to the electron beam machining apparatus control system.
In another embodiment, the central controller 1 further comprises a digital-to-analog conversion unit 16, wherein the digital-to-analog converter 16 is electrically connected to the control system of the electron beam processing equipment, and is used for replacing an electron beam current given signal in the control system of the electron beam processing equipment in a test process, so as to generate an electron beam current dump and dump control signal;
the digital input unit 13 is electrically connected with the control system of the electron beam processing equipment and is used for receiving a detection ready state signal of the control system of the electron beam processing equipment;
the digital output unit 14 is electrically connected with the control system of the electron beam machining equipment and is used for sending a detection starting signal, a detection ending signal and/or an analog high-voltage discharge signal to the control system of the electron beam machining equipment.
In this embodiment, the analog-to-digital conversion unit 15 is electrically connected to the control system of the electron beam processing apparatus, and is capable of receiving signals of other electrical parameters of the electron beam processing apparatus during operation, including but not limited to electron beam signals and focusing current signals, and generating corresponding detection data of electron beam and focusing current, respectively, and performing extended detection on performance indexes of other electrical parameters of the electron beam processing apparatus during operation with reference to the definition of similar performance indexes of the acceleration power supply; the calculation of the performance index is performed by the central processing unit 11.
In another embodiment, the central controller 1 further comprises a memory 12 and a display 18;
the memory 12 is used for storing and calling the detection data;
the display 18 is used for displaying the working condition, the detection signal-time waveform and the detection signal performance index calculation result during detection; the display is simultaneously used as a human-computer interface for the input of working instructions of operators.
In another embodiment, the central controller 1 comprises an index definition module for defining a steady-state performance index and/or a dynamic performance index.
In another embodiment, the steady state performance indicators include one or more of waviness, stability, and repeatability;
the ripple factor represents the detection time T (T) under the condition i 1 ～t 2 ) Internal, acceleration voltage U a The percentage of the difference between the peak value and the average value of (a), the ripple coefficient gamma a The calculation formula of (A) is as follows:
wherein u' aimax 、u′ aimin And u' ai Accelerating voltage signal u 'respectively' ai Detecting the maximum value, the minimum value and the average value of the time period T; and during the detection time period T,
the stability represents the detection time T in the operating condition i i (t i1 ～t i2 ) Internal, acceleration voltage U a The percentage of the difference between the maximum or minimum value and the mean value of (a) to the mean value of (b), the stability s a Includes the following calculation formula:
stability s a Is s is amax And s amin The larger of (a);
wherein u is aimax 、u aimin And u ai Are respectively an accelerating voltage filter signal u a At T i A maximum, minimum and average value of the time period, and
while the accelerating voltage filter signal u a Is an accelerating voltage signal u' a Obtaining the product through filtering treatment;
the repeatability is expressed as the acceleration voltage U a And an electron beam current I a The electron beam equipment is shut down and restarted under the working condition i, the electron beam equipment enters the working condition j to run, the percentage of the difference between the working condition i and the average value of the acceleration voltage of the working condition j to the average value of the acceleration voltage of the working condition i, and the repeatability r a The calculation formula of (A) is as follows:
wherein u is ai And u aj Steady-state acceleration voltages corresponding to the working condition i and the working condition j respectively; repeatedly shutting down and restarting the electron beam apparatus n times at different time periods to obtain n times of repeatability r a Data with the maximum as the repeatability r a The value is obtained.
The dynamic performance index comprises an acceleration voltage recovery time and/or an acceleration voltage fluctuation rate; the recovery time of the acceleration voltage is represented as the process of the transition from the operating condition i to the operating condition j, from the acceleration voltage U a Steady state accelerating voltage U beyond working condition i ai Is (d) +/-sigma a % time of Steady State band onset τ i Steady state acceleration voltage U to entering working condition j aj Is (d) +/-sigma a Time τ within% steady-state band and no longer exceeding steady-state band j For this purpose, defined as the acceleration voltage recovery time t v Acceleration voltage recovery time t v The calculation formula is:
t v ＝τ j -τ i
wherein, tau j At the time of entering the steady-state acceleration voltage steady-state band of the working condition j and no longer exceeding the steady-state band, tau i Starting time of steady-state acceleration voltage steady-state band for exceeding working condition i; sigma + -sigma a % of steady-state acceleration voltage U of device pair a A required value of stability;
the acceleration voltage fluctuation ratio is expressed as: the process of the working condition i transitioning to the working condition j accelerates the voltage recovery time t v Internal, acceleration voltage U a Extreme value (maximum value U) ajmax Or minimum value U ajmin ) Acceleration voltage U corresponding to working condition j aj Percent of (d), acceleration voltage fluctuation rate Δ U a % calculation includes:
acceleration voltage fluctuation rate DeltaU a % is Δ U amax % and. DELTA.U amin The greater of% >;
wherein u is ajmax And u ajmin Acceleration voltage U in the transition process corresponding to working condition j respectively a Maximum and minimum values of.
The performance index calculation is further explained below with reference to a typical operating condition transition process model:
1. sudden change of the voltage of the power grid:
when the electron beam processing equipment operates in a steady state under the working condition i, the power supply voltage finishes the power supply voltage mutation lambda% in 1 power grid period, and then the electron beam processing equipment transitions to the working condition j to operate, wherein the accelerating voltage U a And an electron beam current I b The set value of (2) is not changed;
2. electron beam current mutation:
when the electron beam processing equipment operates in a steady state under the working condition I, the electron beam current I b At a predetermined time t δ Steady-state electron beam current I internally completing slave working condition I bi Steady state to condition jElectron beam current I bj Wherein the grid voltage is constant; i.e. from the electron beam current I b Steady state electron beam current I beyond working condition I bi Is (d) +/-sigma b The moment of% steady state band begins, and the steady state electron beam current I enters the working condition j bj Is (d) +/-sigma b The time period within the% steady-state band at which the steady-state band is not exceeded is not longer than t δ ，±σ b % is steady electron beam current I of electron beam processing equipment b A required value of stability;
3. accelerating power interruption recovery
When the electron beam machining equipment operates in a steady state under the working condition i, the central controller 1 applies a simulated acceleration power supply discharge fault pulse signal to the electron beam machining equipment control system to enable the acceleration power supply to be cut off suddenly, and the electron beam machining equipment control system automatically recovers the acceleration power supply after a period of intermittent time and enters the working condition j to operate.
According to the definitions of the steady-state index, the dynamic index and the typical working condition transition process model, the display 18 is controlled, and the central controller 1 controls the acceleration voltage signal u 'of the working condition i' a Sampling and storing the sampled data, recording the input voltage U of the working condition i Oi 、V Oi 、W Oi And the value of the electron beam flow I of the operating condition I bi And drawing the acceleration voltage signal u 'of the working condition i off line according to the stored sampling data' a Waveform diagram, as shown in FIG. 4, the voltage signal u 'is calculated and found from FIG. 4' a Maximum value u' aimax U 'minimum value' aimin And mean value u' ai Then calculating the ripple factor gamma a Calculating and finding out the main ripple frequency of the acceleration voltage under the working condition i from the oscillogram
Acceleration voltage signal u 'of working condition i' a Waveform diagram and u' aimax 、u' aimin 、u' ai 、γ a 、f γ1 、I bi 、U Oi 、V Oi 、W Oi Are shown on the display 18.
According to the definitions of the steady-state index, the dynamic index and the typical working condition transition process modelOperating the display 18, the central controller 1 outputs an acceleration voltage signal u 'from condition i to condition j' a Sampling and storing the sampled data, recording the input voltage U of the working condition i Oi 、V Oi 、W Oi And the value of the electron beam flow I of the operating condition I bi Recording the input voltage U of the operating mode j Oj 、V Oj 、W Oj And the beam current value I of condition j bj The stored sampling data is processed by off-line digital filtering and converted into an accelerating voltage filtering signal u a Storing data, filtering the signal u according to the acceleration voltage a Stored data is used for drawing an acceleration voltage filtering signal u from a working condition i to a working condition j a Waveform diagrams, as shown in FIG. 5;
calculating and finding out the working condition i at T from the graph of FIG. 5 i Acceleration voltage filtering signal u in time period a Maximum value u of aimax Minimum value u aimin And the mean value u ai Calculating and finding out the initial time tau for the transition from the working condition i to the working condition j i And end time τ j Calculating and finding out the detection time T of the working condition j j (t j1 ～t j2 ) Internal accelerating voltage filtering signal u a Maximum value u of ajmax Minimum value u ajmin And the mean value u aj ；
Calculating the working condition i at T i Stability in time period s ai And operating condition j is at T j Stability in time period s aj ，s ai 、s aj The value with the larger value is used as the stability s of the accelerating voltage a A value;
if the output voltage of the power supply simulator 2 is not shifted from the working condition i to the working condition j, u ai Set value of (1 = u) aj Set value of (1), I bi Set value of (1) = I bj And the electron beam processing equipment is closed, calculating the repeatability r of the accelerating voltage a ；
If the transition process from the working condition i to the working condition j belongs to a power grid voltage sudden change or electron beam current sudden change model, calculating the accelerated voltage recovery time t v And acceleration voltage fluctuation ratio DeltaU a ％；
If the transition process from the working condition i to the working condition j belongs to an accelerated power interruption recovery model, calculating and addingFast voltage recovery time t v And acceleration voltage fluctuation rate DeltaU a % for
To calculate the acceleration voltage fluctuation rate DeltaU a ％；
Acceleration voltage filter signal u a Oscillograms and u aimax 、u aimin 、u ai 、u ajmax 、u ajmin 、u aj 、s ai 、s aj 、s a 、r a 、t v 、ΔU a ％、I bi 、I bj 、U Oi 、V Oi 、W Oi 、U Oj 、V Oj 、W Oj Are shown on the display 18.
By referring to the definitions of the steady-state index, the dynamic index and the typical working condition transition process model, the central controller 1 controls the display 18 to control the electron beam current signal u from the working condition i to the working condition j b (u b Proportional to the electron beam current I b ) Sampling and storing the sampled data, recording the input voltage U of the working condition i Oi 、V Oi 、W Oi And acceleration voltage value U of working condition i ai Recording the input voltage U of the operating mode j Oj 、V Oj 、W Oj And acceleration voltage value U of working condition j aj According to the electron beam current signal u b Storing data to draw electron beam current signal u from working condition i to working condition j b A waveform diagram;
from electron beam current signal u b Calculating on the waveform to find out the working condition i at T i Electron beam current signal u in time period b Maximum value u of bimax Minimum value u bimin And the mean value u bi Calculating and finding out the initial time tau for the transition from the working condition i to the working condition j i And end time τ j Calculating and finding out the detection time T of the working condition j j (t j1 ～t j2 ) Internal electron beam current signal u b Maximum value u of bjmax Minimum value u bjmin And the mean value u bj ；
Calculating the working condition i at T i Stability in time period s ai And operating condition j isT j Stability in time period s bj ，s bi 、s bj The value with the larger value is taken as the stability s of the electron beam b A value;
if the output voltage of the power supply simulator 2 is not shifted, u is supplied from the working condition i to the working condition j ai Set value of (1 = u) aj Set value of (1), I bi Set value of = I bj And the electron beam machining apparatus is closed, the electron beam flow repeatability r is calculated b ；
If the transition process from the working condition i to the working condition j belongs to the sudden change of the power grid voltage, calculating the accelerated voltage recovery time t v And the electron beam current fluctuation rate DeltaI b ％；
Electron beam current signal u b Oscillograms and u bimax 、u bimin 、u bi 、u bjmax 、u bjmin 、u bj 、s bi 、s bj 、s b 、r b 、t v 、ΔI b ％、U ai 、U aj 、U Oi 、V Oi 、W Oi 、U Oj 、V Oj 、W Oj Are shown on the display 18.
By referring to the steady-state index and the definition of the typical working condition transition process model, the central controller 1 controls the display 18 to focus the current signal u from the working condition i to the working condition j f (u f Proportional to the focusing current I f ) Sampling and storing the sampled data, recording the input voltage U of the working condition i Oi 、V Oi 、W Oi Acceleration voltage value U of working condition i ai And the electron beam current I of the working condition I bi Recording the input voltage U of the operating mode j Oj 、V Oj 、W Oj Acceleration voltage value U of working condition j aj And the electron beam current I of the working condition j bj Based on the focusing current signal u f Storing data to map the focusing current signal u from condition i to condition j f A waveform diagram;
from the focus current signal u f Calculating on the waveform to find out the working condition i at T i Focusing current signal u in time period f Maximum value u of fimax Minimum value u fimin And the mean value u f Calculating and finding out the initial time tau for the transition from the working condition i to the working condition j i And end time τ j Calculating and finding out the detection time T of the working condition j j (t j1 ～t j2 ) Internal focus current signal u f Maximum value u of fjmax Minimum value u fjmin And the mean value u fj ；
Calculating the working condition i at T i Stability in time period s fi And operating condition j is at T j Stability in time s fj ，s fi 、s fj The value with the larger value is used as the stability s of the electron beam f A value;
if the output voltage of the power supply simulator 2 is not shifted from the working condition i to the working condition j, u ai Set value of (1 = u) aj Set value of (1), I bi Set value of = I bj Set value of (1), I fi Set value of = I fj And the electron beam machining apparatus is closed, calculating the focusing current repeatability r f ；
Focusing current signal u f Oscillograms and u fimax 、u fimin 、u f 、u fjmax 、u fjmin 、u fj 、s fj 、s fi 、s fj 、r f 、U ai 、U aj 、U Oi 、V Oi 、W Oi 、U Oj 、V Oj 、W Oj Are shown on the display 18.
In the present specification, the embodiments are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. An acceleration power supply performance index detection system of electron beam processing equipment is characterized by comprising a central controller, a power supply simulator and a detection branch circuit;
the input end of the power supply simulator is connected with a power grid, the output end of the power supply simulator is connected with the input end of an acceleration power supply to be detected, and the detection branch is connected with the output end of the acceleration power supply;
the central controller is respectively electrically connected with the power supply simulator, the detection branch and the control system of the electron beam processing equipment and is used for controlling the power supply simulator to simulate the voltage change condition of a power grid; the electronic beam processing equipment is also used for outputting an instruction of an electronic beam current change condition of the electronic beam processing equipment control system; and the performance index calculation module is also used for calculating the performance index according to the detection data of the detection branch and the predefined performance index.
2. The system according to claim 1, wherein the detection branch comprises a voltage dividing resistor and a detection resistor;
one end of the divider resistor is connected with the high-voltage end of the acceleration power supply, the other end of the divider resistor is connected with one end of the detection resistor, and the other end of the detection resistor is connected with the low-voltage end of the acceleration power supply and grounded.
3. The system of claim 1, wherein the power supply simulator comprises three-phase circuits of U, V and W, wherein each phase circuit comprises an autotransformer and a switch array; the input end of the autotransformer is connected with a power grid and the central controller, and the output end of the autotransformer is connected with the input end of the accelerating power supply through the switch array.
4. The system of claim 3, wherein the autotransformer comprises 5 output terminals, and the output voltage comprises a first output terminal, a second output terminal, a third output terminal, a fourth output terminal and a fifth output terminal in sequence from high to low; the third output end is connected with the input end;
the switch array comprises two-phase thyristors U1, U2, U3, U4 and U5;
the first output end is connected with the T1 pole of the biphase thyristor U1,
the second output end is connected with the T1 pole of the biphase thyristor U2,
the third output end is connected with the T1 pole of the biphase thyristor U3,
the fourth output end is connected with the T1 pole of the biphase thyristor U4,
the fifth output end is connected with the T1 pole of the biphase thyristor U5;
the corresponding T2 poles of the two-phase thyristors U1, U2, U3, U4 and U5 are connected together to serve as the output end of single-phase voltage and are connected to the input end of the acceleration power supply and the central controller; and the G poles corresponding to the two-phase thyristors U1, U2, U3, U4 and U5 are respectively electrically connected with the central controller.
5. The system of claim 1, wherein the central controller comprises a central processing unit, a digital input unit, a digital output unit, an analog-to-digital conversion unit and a transmitter;
the central processing unit is used for generating a control signal; is also used for converting the accelerating voltage signal u' a The detected data is converted into an acceleration voltage filtering signal u by a digital filter a According to the acceleration voltage signal u' a Detected data and acceleration voltage filtering signal u a Calculating a performance index from the data;
the transmitter is connected with the input end and the output end of the power supply simulator, receives a power grid voltage signal, generates a power grid voltage three-phase zero-crossing signal and a power grid voltage amplitude signal, receives a power supply simulator output voltage signal, and generates a power supply simulator output voltage amplitude signal;
the analog-to-digital conversion unit is electrically connected with the transmitter and used for receiving a power grid voltage amplitude signal and generating an input voltage indication; receiving an output voltage amplitude signal of a power supply simulator, and generating an output voltage indication; the analog-to-digital conversion unit is electrically connected with the detection branch and is used for receiving an accelerating voltage signal u' a Generating detection data;
the digital input unit is electrically connected with the transmitter and used for receiving the three-phase zero-crossing signal of the power grid voltage;
and the digital output unit is electrically connected with the power supply simulator and is used for sending a control signal to the power supply simulator.
6. The system of claim 5, wherein the central controller further comprises the DAC unit, the DAC unit is electrically connected to the control system of the electron beam processing device, and is configured to replace an electron beam current setting signal in the control system of the electron beam processing device during a testing process, and generate an electron beam current burst-down or burst-up control signal in an analog manner;
the digital input unit is electrically connected with the control system of the electron beam processing equipment and is used for receiving a detection ready state signal of the control system of the electron beam processing equipment;
the digital output unit is electrically connected with the control system of the electron beam machining equipment and is used for sending a detection starting signal, an end signal and/or a simulation high-voltage discharge signal to the control system of the electron beam machining equipment.
7. The system of claim 6, wherein the analog-to-digital conversion unit is electrically connected to the control system of the electron beam processing apparatus, and is configured to receive an electron beam current signal and a focusing current signal of an operation system of the electron beam processing apparatus, and generate corresponding detection data of the electron beam current signal and the focusing current signal; and the central processing unit is also used for calculating a performance index according to the detection data of the electron beam current signal and the focusing current signal.
8. The system of claim 5, wherein the central controller further comprises a memory and a display;
the memory is used for storing and calling the detection data;
the display is used for displaying working condition conditions, detection signal data conversion time waveforms and detection signal performance index calculation results during detection; the display is simultaneously used as a human-computer interface for inputting work instructions.
9. The system of claim 1, wherein the central controller comprises an index definition module for defining a steady state performance index and/or a dynamic performance index.
10. The system of claim 9, wherein the steady state performance indicator comprises one or more of waviness, stability, and repeatability;
the ripple coefficient γ a The calculation formula of (A) is as follows:
wherein u' aimax 、u' aimin And u' ai Are acceleration voltage signals u' a Detecting the maximum value, the minimum value and the average value of the time period T; and during the detection time period T,
the stability s a The calculation process of (2) includes:
the stability s a Is s is amax And s amin The larger of (a); u. of aimax 、u aimin And u ai Respectively, an accelerating voltage filter signal u a Detecting time period T i Maximum, minimum and mean values of; and during a detection time period T i In the interior of the container body,
the repeatability r a The calculation formula of (c) is:
wherein u is ai And u aj Steady-state acceleration voltages corresponding to the working condition i and the working condition j respectively;
the dynamic performance index comprises an acceleration voltage recovery time and/or an acceleration voltage fluctuation rate;
the acceleration voltage recovery time t v The calculation formula is as follows:
t v ＝τ j -τ i
wherein, tau j At the time of entering the steady-state acceleration voltage steady-state band of the working condition j and no longer exceeding the steady-state band, tau i Starting time of steady-state acceleration voltage steady-state band for exceeding working condition i;
the acceleration voltage fluctuation rate DeltaU a The% calculation process comprises the following steps:
the acceleration voltage fluctuation rate DeltaU a % is Δ U amax % and. DELTA.U amin The greater of% >;
wherein u is ajmax And u ajmin Respectively corresponding to the maximum value and the minimum value of the accelerating voltage in the transition process from the working condition i to the working condition j.
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