CN115568249A - Display substrate, preparation method, display panel, repair method and display device - Google Patents
Display substrate, preparation method, display panel, repair method and display device Download PDFInfo
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- CN115568249A CN115568249A CN202211310366.XA CN202211310366A CN115568249A CN 115568249 A CN115568249 A CN 115568249A CN 202211310366 A CN202211310366 A CN 202211310366A CN 115568249 A CN115568249 A CN 115568249A
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/22—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
- G09G3/30—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels
- G09G3/32—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED]
- G09G3/3208—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED]
- G09G3/3225—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED] using an active matrix
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/22—Connection or disconnection of sub-entities or redundant parts of a device in response to a measurement
Abstract
The invention provides a display substrate, which comprises a substrate, a pixel driving circuit, a first insulating layer and a first electrode, wherein the substrate is provided with a first electrode and a second electrode; the pixel driving circuit, the first insulating layer and the first electrode are sequentially arranged on the substrate; the pixel driving circuit includes a transistor including a first electrode; the first electrode comprises a first sublayer and a second sublayer, the second sublayer is positioned on one side, away from the substrate, of the first sublayer, and the first sublayer further extends to be connected with the first pole through a first through hole formed in the first insulating layer; the pattern of the first electrode is not overlapped with the orthographic projection of the first via hole on the substrate; the display substrate further comprises a first graph, the first graph and the second sublayer are located on the same film layer, and the first graph at least covers the inner wall of the first through hole. The display substrate can protect the first sub-layer at the position of the first via hole from being damaged by subsequent etching, so that poor cluster of thin and dark points of a display panel adopting the display substrate is avoided.
Description
Technical Field
The invention belongs to the technical field of display, and particularly relates to a display substrate, a preparation method of the display substrate, a display panel, a repair method of the display panel and a display device.
Background
At present, OLED (Organic Light-Emitting Diode) display screens are widely used and are favored by people.
A pixel driving circuit in the OLED display screen is connected with the anode of an OLED light-emitting element through a via hole formed in an insulating layer, so that a driving signal is provided for the anode; the through hole and the anode are staggered in position; the anode electrode typically includes a plurality of conductive film layers, with one of the film layers (e.g., ITO) closest to the pixel driving circuitry extending to the via and making a connection to the pixel driving circuitry through the via.
As shown in fig. 1, since the plurality of conductive film layers of the anode need to be prepared and formed by a plurality of etching processes, the plurality of etching processes can cause etching damage to the ITO film layer of the via hole 15 where the anode is connected to the pixel driving circuit, so that the climbing position in the via hole 15 is eroded by the etching liquid to cause fracture, and thus the conductive film layer (such as Cu, copper) of the pixel driving circuit connected to the via hole 15 is corroded, which causes an increase in contact resistance between the ITO film layer connected in contact with the via hole 15 and the conductive film layer of the pixel driving circuit, and a leakage current phenomenon occurs, and an anode driving signal cannot be loaded on the anode, which causes a thin and dark cluster to occur after the OLED display screen is lighted.
Disclosure of Invention
In view of the above problems, the present invention provides a display substrate, which includes a substrate, a pixel driving circuit, a first insulating layer, and a first electrode;
the pixel driving circuit, the first insulating layer and the first electrode are sequentially arranged on the substrate;
the pixel driving circuit includes a transistor including a first electrode;
the first electrode comprises a first sub-layer and a second sub-layer, the second sub-layer is positioned on one side of the first sub-layer, which is far away from the substrate, and the first sub-layer further extends to be connected with the first electrode through a first through hole formed in the first insulating layer;
the pattern of the first electrode and the orthographic projection of the first via hole on the substrate do not overlap;
the display substrate further comprises a first graph, the first graph and the second sublayer are located on the same film layer, and the first graph at least covers the inner wall of the first through hole.
Optionally, the first electrode further comprises a third sub-layer, the third sub-layer being located on a side of the second sub-layer facing away from the substrate,
the display substrate further comprises a second graph, the second graph and the third sublayer are located on the same film layer, and the second graph at least covers the inner wall of the first through hole.
Optionally, the number of the first electrodes is multiple, and the multiple first electrodes are arranged in an array;
the number of the first via holes is multiple, and the first via holes correspond to the first electrodes one to one;
each first electrode comprises at least two sub-electrodes which are arranged at intervals along a first direction; the first direction is a row direction or a column direction of the array;
the first sub-layers of the sub-electrodes respectively extend to be connected with the first pole through the first via holes.
Optionally, the repair device further comprises an auxiliary repair line extending along the first direction;
the auxiliary repairing wire is positioned on one side of the first pole, which is far away from the first electrode, or is positioned between the first pole and the film layer where the first electrode is positioned;
the auxiliary repair line at least partially overlaps with the orthographic projection of each sub-electrode in one row or one column on the substrate;
the auxiliary repairing line and the orthographic projection of the first via hole on the substrate do not overlap;
the auxiliary repair line does not overlap with an orthographic projection of the first sub-layer connected between the first via hole and the sub-electrode on the substrate.
Optionally, one row or one column of the first electrodes corresponds to a plurality of auxiliary repair lines;
the number of the auxiliary repair lines corresponding to the first electrodes in one row or one column is the same as the number of display colors of the sub-pixels correspondingly driven by the first electrodes in one row or one column.
Optionally, the pixel driving circuit is located in an orthographic projection area of the first electrode on the substrate;
the transistor further includes an active layer, a gate insulating layer, and a gate electrode; the gate insulating layer is positioned between the active layer and the gate electrode; the active layer and the orthographic projection of the grid electrode on the substrate at least partially overlap;
the display substrate further comprises a shading conducting layer which is positioned on one side of the pixel driving circuit close to the substrate; the orthographic projection of the light-shielding conducting layer on the substrate covers the orthographic projection overlapping area of the active layer and the grid electrode on the substrate;
the light shading conducting layer also extends to overlap with the orthographic projection of the first through hole on the substrate;
a second insulating layer is further arranged between the shading conductive layer and the first pole at the position of the first via hole;
the first pole at the position of the first via hole is connected with the shading conducting layer through a second via hole formed in the second insulating layer.
Optionally, the auxiliary repair line and the gate are located on the same film layer and made of the same material.
Optionally, the first sublayer, the third sublayer and the second pattern are made of transparent conductive materials;
the second sub-layer and the first pattern are made of reflective metal materials.
The invention also provides a display panel, which comprises the display substrate;
the display substrate further comprises a light-emitting functional layer and a second electrode, the light-emitting functional layer and the second electrode are sequentially arranged on one side, away from the substrate, of the first electrode in the display substrate, and the light-emitting functional layer and the second electrode are overlapped with the orthographic projection of the first electrode on the substrate.
Optionally, in the display substrate, a third insulating layer is disposed between the sub-electrode and the auxiliary repair line, which are orthographically overlapped on the substrate;
the first sub-layer connected between at least one sub-electrode and the first via hole is disconnected, and the sub-electrode is connected with the auxiliary repair line through a third via hole formed in the third insulating layer;
and the other sub-electrode which is closest to the sub-electrode along the first direction and has the same display color with the sub-pixel driven by the sub-electrode is connected with the auxiliary repair line through a fourth through hole formed in the third insulating layer.
The invention also provides a display device comprising the display panel.
The invention also provides a method for repairing the display panel, which comprises the following steps: detecting a dark spot on the display panel;
cutting off a first sub-layer connected between one sub-electrode and a first via hole in the area where the dark spot is located;
if the dark spot is detected to exist again, a third through hole is formed in a third insulating layer, and the sub-electrode is connected with an auxiliary repairing line through the third through hole;
and simultaneously, a fourth through hole is formed in the third insulating layer, so that the other sub-electrode which is closest to the sub-electrode along the first direction and has the same display color as the sub-pixel driven by the sub-electrode is connected with the auxiliary repair line through the fourth through hole.
The invention also provides a preparation method of the display substrate, which comprises the following steps: preparing a pixel driving circuit, a first insulating layer and a first electrode on a substrate in sequence;
preparing the pixel driving circuit comprises preparing a transistor, wherein preparing the transistor comprises preparing a first electrode;
preparing the first electrode comprises sequentially preparing patterns of a first sub-layer and a second sub-layer, wherein the first sub-layer also extends to be connected with the first electrode through a first via hole formed in the first insulating layer;
the method further comprises the step of preparing a first graph, wherein the first graph and the graph of the second sublayer are prepared through a one-time composition process, and the first graph at least covers the inner wall of the first through hole.
The invention has the beneficial effects that: according to the display substrate provided by the invention, the first graph is arranged on the side, away from the substrate, of the first sublayer at the first via hole position, so that the first sublayer at the first via hole position can be prevented from being corroded by the etching liquid to cause fracture in the subsequent etching process of the second sublayer, the first sublayer at the first via hole position is protected from being damaged by subsequent etching, and therefore, the display panel adopting the display substrate is prevented from having poor thin and dark point clusters.
According to the display panel provided by the invention, by adopting the display substrate in the embodiment, on one hand, the poor clustering of thin and dark points on the display panel can be avoided; on the other hand, at least one sub-electrode which is cut off by mistake during the dark spot repair of the display panel is connected by the repair of the auxiliary repair line, so that the sub-pixel corresponding to the sub-electrode which is cut off by mistake is lightened again, and the yield and the quality of the display panel are improved.
The display device provided by the invention can improve the yield and the quality of the display device by adopting the display panel.
Drawings
FIG. 1 is a schematic diagram of poor clustering of thin and dark spots caused by corrosion and fracture of an ITO film layer at a via hole for connecting an anode and a pixel driving circuit by etching liquid;
FIG. 2 is a schematic diagram of a first zone and a second zone being sequentially cut off during a dark spot repair process in the related art;
FIG. 3 is a schematic cross-sectional view of a display substrate according to an embodiment of the invention;
FIG. 4 is a cross-sectional view of a portion of another display substrate in an embodiment of the invention;
FIG. 5 is a schematic top view of a portion of a display substrate according to an embodiment of the present invention;
FIG. 6 is a schematic top view of a portion of a display substrate of a display panel according to an embodiment of the present invention;
FIG. 7 is a schematic cross-sectional view of the structure of FIG. 6 along the cutting line AA'.
Wherein the reference numerals are:
1. a substrate; 2. a pixel drive circuit; 21. a transistor; 211. a first pole; 212. an active layer; 213. a gate insulating layer; 214. a gate electrode; 215. a second pole; 3. a first insulating layer; 4. a first electrode; 41. a first sublayer; 42. a second sublayer; 420. a first graphic; 43. a third sublayer; 430. a second graphic; 401. a sub-electrode; 5. a first via hole; 6. auxiliary repair lines; 7. a light-shielding conductive layer; 8. a second insulating layer; 9. a second via hole; 10. a third insulating layer; 11. a third via hole; 12. a fourth via hole; 13. a sub-pixel; 14. an anode; 15. and (6) a via hole.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, a display substrate, a manufacturing method thereof, a display panel, a repairing method thereof, and a display device according to the present invention will be described in detail with reference to the accompanying drawings and the detailed description.
In the related art, referring to fig. 2, in the process of repairing a dark spot of an OLED display screen, a large proportion of defects cannot be found, and the position of an area where the dark spot is generated cannot be accurately determined, and for convenience of repairing the dark spot, a sub-pixel 13 in the OLED display screen is generally designed into two areas, namely, an area one and an area two; when a dark spot appears in the display process of the OLED display screen, firstly cutting off the area I of the sub-pixel 13 at the position of the dark spot, namely cutting off the connection between the anode 14 of the area I and the pixel driving circuit, namely cutting off the connection between the anode 14 of the area I and the through hole 15; and observing whether the dark spot still exists, and if the dark spot still exists, cutting off the second area of the sub-pixel 13 at the position of the dark spot, namely cutting off the connection between the anode 14 of the second area and the pixel driving circuit, namely cutting off the connection between the anode 14 of the second area and the through hole 15.
If the dark spot still exists after the area is cut off, the dark spot is not caused by the area I, but the area I is cut off and cannot be repaired. The success rate (50%) of the method for modifying the dark spot in the blind-cut sub-pixel area in the related art is not high, and the product quality is seriously influenced.
In order to solve the above problems of the current display screen, an embodiment of the invention provides a display substrate, as shown in fig. 3, including a substrate 1, a pixel driving circuit 2, a first insulating layer 3, and a first electrode 4; the pixel driving circuit 2, the first insulating layer 3 and the first electrode 4 are sequentially arranged on the substrate 1; the pixel driving circuit 2 includes a transistor 21, and the transistor 21 includes a first electrode 211; the first electrode 4 comprises a first sublayer 41 and a second sublayer 42, the second sublayer 42 is located on the side of the first sublayer 41 facing away from the substrate 1, and the first sublayer 41 further extends to be connected to the first pole 211 through a first via 5 opened in the first insulating layer 3; the pattern of the first electrode 4 is not overlapped with the orthographic projection of the first via hole 5 on the substrate 1; the display substrate further includes a first pattern 420, the first pattern 420 and the second sub-layer 42 are located on the same film layer, and the first pattern 420 at least covers an inner wall of the first via hole 5.
Wherein the first electrode 4 may be the anode of the OLED element. The pixel driving circuit 2 may be any one of 3T1C, 7T1C, 9T1C, and the like, and the pixel driving circuit 2 is not particularly limited as long as it can drive the OLED element to emit light. The transistor 21 is a driving transistor for driving the OLED element to emit light in the pixel driving circuit 2. The first pole 211 of the transistor 21 is connected to the first sub-layer 41 of the first electrode 4 via the first via 5 for providing a drive signal to the anode of the OLED element via the pixel drive circuit 2. The first pattern 420 and the second sublayer 42 are located on the same film layer, and the first pattern 420 and the second sublayer 42 can be prepared through a one-time composition process, so that the preparation process is simplified, and the preparation cost is reduced.
Alternatively, the second sublayer 42 of the first electrode 4 and the first pattern 420 covering the inner wall of the first via 5 may be disconnected from each other. I.e. the second sub-layer 42 may comprise two mutually independent patterns, one of which serves as the first electrode 4 and the other of which covers the inner wall of the first via 5. Optionally, the second sublayer 42 of the first electrode 4 and the first pattern 420 covering the inner wall of the first via 5 may also be interconnected.
Alternatively, the first sub-layer 41 is made of a transparent conductive material, such as an ITO (indium tin oxide) material; the second sub-layer 42 and the first pattern 420 use a reflective metal material such as copper or aluminum. The first electrode 4 in this embodiment reflects light to realize display, and can realize a top emission type OLED light emitting element.
In this embodiment, the pattern of the first electrode 4 and the orthographic projection of the first via hole 5 on the substrate 1 do not overlap, which can facilitate the maintenance of the OLED element with a dark spot. By arranging the first pattern 420 on the side, away from the substrate 1, of the first sublayer 41 at the position of the first via hole 5, the first sublayer 41 at the position of the first via hole 5 can be prevented from being corroded by the etching solution in the etching process of the subsequent second sublayer 42 to cause fracture, the first sublayer 41 at the position of the first via hole 5 is protected from being damaged by subsequent etching, and therefore the display panel adopting the display substrate is prevented from having poor thin and dark point clusters.
Optionally, as shown in fig. 4, the first electrode 4 further includes a third sub-layer 43, the third sub-layer 43 is located on a side of the second sub-layer 42 facing away from the substrate 1, the display substrate further includes a second pattern 430, the second pattern 430 and the third sub-layer 43 are located on the same film layer, and the second pattern 430 at least covers an inner wall of the first via hole 5.
The second pattern 430 and the third sub-layer 43 are located on the same film layer, and the second pattern 430 and the third sub-layer 43 can be prepared through a one-time composition process, so that the preparation process is simplified, and the preparation cost is reduced. By arranging the second pattern 430 on the side, away from the substrate 1, of the second sublayer 42 at the position of the first via hole 5, the first sublayer 41 at the position of the first via hole 5 can be further prevented from being eroded by the etching liquid to cause fracture in the etching process of the subsequent second sublayer 42 and the subsequent third sublayer 43, and the first sublayer 41 and the second sublayer 42 can be further prevented from being eroded by the etching liquid to cause fracture in the etching process of the subsequent third sublayer 43, so that the first sublayer 41 and the second sublayer 42 at the position of the first via hole 5 are protected from being damaged by subsequent etching, and thus the display panel adopting the display substrate is prevented from having poor thin and dark point clusters.
Alternatively, the third sublayer 43 of the first electrode 4 and the second pattern 430 covering the inner wall of the first via 5 may be disconnected from each other. I.e. the third sublayer 43 may comprise two mutually independent patterns, one of which serves as the first electrode 4 and the other of which covers the inner wall of the first via 5. Alternatively, the third sublayer 43 of the first electrode 4 and the second pattern 430 covering the inner wall of the first via 5 may also be connected to each other.
Optionally, a transparent conductive material, such as ITO (indium tin oxide) material, is used for the third sub-layer 43 and the second pattern 430. Of course, opaque conductive material may be used for the third sub-layer 43 and the second pattern 430.
Optionally, as shown in fig. 5, the number of the first electrodes 4 is multiple, and the multiple first electrodes 4 are arranged in an array; the number of the first via holes 5 is multiple, and the multiple first via holes 5 correspond to the multiple first electrodes 4 one by one; the first electrode 4 includes at least two sub-electrodes 401, and the at least two sub-electrodes 401 are arranged at intervals along the first direction L; the first direction L is the row direction or the column direction of the array; the first sub-layers 41 of the respective sub-electrodes 401 respectively extend to connect the first poles 211 through the first vias 5.
Wherein, one first electrode 4 is correspondingly driven by one pixel driving circuit 2; one first electrode 4 comprises at least two sub-electrodes 401, each sub-electrode 401 is connected with the pixel driving circuit 2 corresponding to the first electrode 4, when one sub-electrode 401 fails, the connection between the sub-electrode 401 and the pixel driving circuit 2 can be cut off, and the lighting display of the sub-pixel corresponding to the first electrode 4 is realized through the other sub-electrode 401, that is, the first electrode 4 is provided with at least two sub-electrodes 401, so that the sub-pixel corresponding to the first electrode 4 can be conveniently maintained in a failure mode.
Optionally, the display substrate further includes an auxiliary repair line 6, the auxiliary repair line 6 extending along the first direction L; the auxiliary repair line 6 is positioned on one side of the first pole 211, which is far away from the first electrode 4, or positioned between the first pole 211 and the film layer where the first electrode 4 is positioned; and the auxiliary repair line 6 is insulated from the first pole 211 and the first electrode 4; the auxiliary repair line 6 at least partially overlaps with the orthographic projection of each sub-electrode 401 in one row or one column on the substrate 1; the auxiliary repair line 6 and the orthographic projection of the first via hole 5 on the substrate 1 do not overlap; the auxiliary repair line 6 does not overlap with an orthogonal projection of the first sub-layer 41 connected between the first via 5 and the sub-electrode 401 on the substrate 1.
When a dark spot appears in the display panel adopting the display substrate, the first sub-layer 41 connected between the first via hole 5 and the sub-electrode 401 is cut off to realize the connection between the sub-electrode 401 and the first electrode 211 of the pixel driving circuit 2, so that the dark spot is blindly repaired; if a dark spot still exists after the connection between a certain sub-electrode 401 and the pixel driving circuit 2 is cut off, it indicates that the sub-electrode 401 does not cause a dark spot, that is, the sub-electrode 401 is good, at this time, the sub-electrode 401 is repaired by the auxiliary repairing line 6, that is, the sub-electrode 401 is connected with the auxiliary repairing line 6, and the sub-electrodes 401 of other sub-pixels adjacent to the sub-electrode 401 are also connected with the auxiliary repairing line 6, so that the repair of the blind repair sub-electrode 401 is realized, and the blind repair sub-electrode 401 is restored to a normally driven state.
Optionally, one row or one column of the first electrodes 4 corresponds to a plurality of auxiliary repair lines 6; the number of the auxiliary repair lines 6 corresponding to the first electrodes 4 in one row or column is the same as the number of the display colors of the sub-pixels driven by the first electrodes 4 in one row or column. That is, the first electrodes 401 in one row or one column correspond to a plurality of sub-pixels with different colors, when the sub-electrode 401 in one of the first electrodes 4 is cut off to be repaired, the sub-electrode 401 is connected to the auxiliary repair line 6, and the first electrode 4 corresponding to the sub-pixel with the same color closest to the sub-electrode 401 is connected to the same auxiliary repair line 6, so that the repair of the sub-electrode 401 to be repaired is realized.
Alternatively, as shown in fig. 3 and 5, the pixel driving circuit 2 is located in the orthographic projection area of the first electrode 4 on the substrate 1; the transistor 21 further includes an active layer 212, a gate insulating layer 213, and a gate electrode 214; the gate insulating layer 213 is positioned between the active layer 212 and the gate electrode 214; the orthographic projection of the active layer 212 and the grid electrode 214 on the substrate 1 at least partially overlaps; the display substrate further comprises a shading conductive layer 7 positioned on one side of the pixel driving circuit 2 close to the substrate 1; the orthographic projection of the light-shielding conducting layer 7 on the substrate 1 covers the orthographic projection overlapped area of the active layer 212 and the grid electrode 214 on the substrate 1; the light-shielding conductive layer 7 also extends to overlap with the orthographic projection of the first via hole 5 on the substrate 1; a second insulating layer 8 is further arranged between the light-shielding conductive layer 7 and the first pole 211 at the position of the first via hole 5; the first pole 211 at the location of the first via 5 is connected to the light-shielding conductive layer 7 by a second via 9 opened in the second insulating layer 8.
Wherein the first insulating layer 3 comprises a passivation layer and/or a planarization layer; the passivation layer and the planarization layer are stacked in sequence away from the substrate 1. The passivation layer is made of inorganic insulating materials such as silicon nitride, silicon oxide or silicon oxynitride; the planarization layer is made of an organic insulating material such as polyimide. The planarization layer is mainly used for planarizing the surface of the side of the pixel driving circuit 2 facing away from the substrate 1, so as to form the OLED light-emitting element on the relatively flat surface. The second insulating layer 8 includes a buffer layer and an intermediate dielectric layer. By overlapping the orthographic projection of the light-shielding conductive layer 7 on the substrate 1 with the orthographic projection of the coverage layer 212 and the grid electrode 214 on the substrate 1, the threshold voltage shift of the transistor 21 under the illumination can be improved, and the leakage current of the transistor 21 under the illumination is improved. By connecting the first pole 211 at the position of the first via hole 5 to the light-shielding conductive layer 7 through the second via hole 9 opened in the second insulating layer 8, the repair of the sub-electrode 401 in the first electrode 4 after the miscut is facilitated.
Optionally, the transistor 21 further comprises a second pole 215; the second pole 215 is on the same layer as the first pole 211. Optionally, the active layer 212, the gate insulating layer 213, the gate electrode 214, and the second pole 215 are sequentially disposed away from the substrate 1, with an intermediate dielectric layer interposed between the gate electrode 214 and the second and first poles 215 and 211. I.e. the transistor 21 is of the top-gate type. Of course, the transistor 21 may be a bottom gate type. And will not be described in detail herein.
Optionally, the auxiliary repair line 6 is located on the same film layer and is made of the same material as the gate 214. By the arrangement, the auxiliary repair line 6 and the gate 214 can be prepared and formed by the same sequential composition process, so that the process steps and the cost are simplified.
Based on the above structure of the display substrate, this embodiment further provides a method for manufacturing the display substrate, including: sequentially preparing a pixel driving circuit, a first insulating layer and a first electrode on a substrate; preparing the pixel driving circuit includes preparing a transistor including preparing a first electrode; the preparation of the first electrode comprises the steps of sequentially preparing patterns of a first sublayer and a second sublayer, wherein the first sublayer further extends to be connected with the first electrode through a first through hole formed in the first insulating layer; the method further comprises the step of preparing a first graph, wherein the first graph and the graph of the second sublayer are prepared through a one-time composition process, and the first graph at least covers the inner wall of the first through hole.
In this embodiment, the preparation of the display substrate specifically includes:
1) Depositing a shading conductive layer film on a white glass substrate, and carrying out processes such as exposure, etching and the like by using a mask plate to form a pattern of the shading conductive layer; the shading conductive layer is used as a light blocking layer in the orthographic projection overlapping area of the grid electrode and the active layer; and the light-shielding conductive layer can form a capacitor in the pixel driving circuit together with the active layer and the first electrode.
2) Firstly, depositing a buffer layer; then, forming a pattern of the active layer by adopting a composition process (comprising the steps of film forming, exposure, etching and the like); then, a gate insulating layer film is deposited.
3) Depositing a gate metal film layer, wherein the metal film layer can be made of copper or aluminum; modifying the mask pattern on the original mask plate for forming the grid pattern to increase the pattern for forming the auxiliary repairing line; forming patterns of a grid electrode and an auxiliary repairing line through processes of exposure, etching and the like; etching (dry etching) the gate insulating layer film, and stripping the gate insulating layer film in a region outside the orthographic projection overlapping region of the gate and the active layer; the active layer (e.g., using IGZO material) is conducted.
4) And depositing an intermediate dielectric layer film, and carrying out processes such as exposure, etching and the like on the intermediate dielectric layer film by adopting a mask plate to form a pattern of the intermediate dielectric layer.
5) Depositing a metal film layer for forming a first pole and a second pole, wherein the metal film layer can be made of copper or aluminum and the like, and forming the patterns of the first pole and the second pole through processes of gluing, exposing, etching, stripping and the like.
6) Depositing a passivation layer film with the thickness of 3000-5000A, and carrying out processes such as exposure, etching and the like on the passivation layer film by adopting a mask plate to form a pattern of the passivation layer. Coating and exposing the organic film layer to form a pattern of the flat layer;
7) Depositing a first sub-layer film, and forming a pattern of the first sub-layer by adopting a mask plate through processes of exposure, etching and the like; depositing a second sub-layer film, modifying the original mask pattern on the mask plate for forming the second sub-layer pattern, and increasing the pattern for forming the first pattern; then, forming a second sublayer and a first graph by adopting the modified mask plate through processes of exposure, etching and the like; finally, depositing a third sub-layer film, modifying the original mask pattern on the mask plate for forming the third sub-layer pattern, and adding the pattern for forming the second pattern; and then, forming patterns of a third sublayer and a second pattern by adopting the modified mask plate through processes of exposure, etching and the like.
In the display substrate provided in this embodiment, the first pattern and/or the second pattern are/is arranged on the side, away from the substrate, of the first sublayer at the first via hole position, so that the first sublayer at the first via hole position can be prevented from being corroded by the etching solution to cause fracture in the subsequent etching process of the second sublayer, the first sublayer at the first via hole position is protected from being damaged by the subsequent etching, and thus, poor clustering of thin and dark points of a display panel adopting the display substrate is avoided.
The embodiment also provides a display panel, which comprises the display substrate in the embodiment; the display substrate further comprises a light-emitting functional layer and a second electrode, the light-emitting functional layer and the second electrode are sequentially arranged on one side, away from the substrate, of the first electrode in the display substrate, and the light-emitting functional layer, the second electrode and the orthographic projection of the first electrode on the substrate are overlapped.
Optionally, the display panel further includes a pixel defining layer located on a side of the first electrode facing away from the substrate, the pixel defining layer has a plurality of openings therein, and an orthogonal projection overlapping area of the second electrode, the light-emitting functional layer, and the first electrode on the substrate is located in the openings. The second electrode may be a cathode of the OLED element.
Optionally, the display panel further includes an encapsulation layer on a side of the second electrode facing away from the substrate; the OLED device is used for packaging the OLED light-emitting element formed by overlapping the second electrode, the light-emitting function layer and the first electrode.
Alternatively, as shown in fig. 6 and 7, in the display substrate, a third insulating layer 10 is disposed between the sub-electrode 401 orthographically overlapped on the substrate 1 and the auxiliary repair line 6; the first sub-layer 41 connected between at least one of the sub-electrodes 401 and the first via 5 is disconnected, and the sub-electrode 401 is connected with the auxiliary repair line 6 through a third via 11 opened in the third insulating layer 10; another sub-electrode 401, which is closest to the sub-electrode 401 in the first direction L and has the same display color as the sub-pixel driven by the sub-electrode 401, is connected to the auxiliary repair line 6 through a fourth via 12 opened in the third insulating layer 10.
Wherein, the display substrate is a display substrate in which at least one sub-electrode 401 is cut off during the dark spot repair of the display panel and repaired by the auxiliary repair line 6. The sub-electrode 401 repaired by the auxiliary repair line 6 and the other sub-electrode 401 connected with the auxiliary repair line 6 are driven and lightened by the same pixel driving circuit, so that the yield and the quality of the display panel are improved.
Optionally, the third insulating layer 10 comprises an intermediate dielectric layer, a passivation layer, a planarization layer.
Based on the above structure of the display panel, this embodiment further provides a method for repairing the display panel, including: detecting dark spots on the display panel;
cutting off a first sub-layer connected between one of the sub-electrodes and the first via hole in the area where the dark spot is located;
if the dark spot is detected to exist again, a third through hole is formed in the third insulating layer, and the sub-electrode is connected with the auxiliary repairing line through the third through hole;
and simultaneously, a fourth through hole is formed in the third insulating layer, so that the other sub-electrode which is closest to the sub-electrode along the first direction and has the same display color as the sub-pixel driven by the sub-electrode is connected with the auxiliary repair line through the fourth through hole.
By adopting the display substrate in the embodiment, on one hand, the display panel provided in the embodiment can avoid the poor appearance of thin and dark dot clusters; on the other hand, at least one sub-electrode which is cut off by mistake during the dark spot repair of the display panel is connected by the repair of the auxiliary repair line, so that the sub-pixel corresponding to the sub-electrode which is cut off by mistake is lightened again, and the yield and the quality of the display panel are improved.
The embodiment of the invention also provides a display device which comprises the display panel in the embodiment.
By adopting the display panel in the embodiment, the yield and the quality of the display device can be improved.
The display device provided by the invention can be any product or component with a display function, such as an OLED panel, an OLED television, an OLED billboard, a display, a mobile phone, a navigator and the like.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and scope of the invention, and such modifications and improvements are also considered to be within the scope of the invention.
Claims (13)
1. A display substrate comprises a substrate, a pixel driving circuit, a first insulating layer and a first electrode;
the pixel driving circuit, the first insulating layer and the first electrode are sequentially arranged on the substrate;
the pixel driving circuit includes a transistor including a first electrode;
the first electrode comprises a first sub-layer and a second sub-layer, the second sub-layer is positioned on one side, away from the substrate, of the first sub-layer, and the first sub-layer further extends to be connected with the first electrode through a first through hole formed in the first insulating layer;
the pattern of the first electrode and the orthographic projection of the first via hole on the substrate do not overlap;
the display substrate is characterized by further comprising a first graph, wherein the first graph and the second sublayer are located on the same film layer, and the first graph at least covers the inner wall of the first through hole.
2. A display substrate according to claim 1, wherein the first electrode further comprises a third sub-layer on a side of the second sub-layer facing away from the substrate;
the display substrate further comprises a second graph, the second graph and the third sublayer are located on the same film layer, and the second graph at least covers the inner wall of the first through hole.
3. The display substrate according to claim 1 or 2, wherein the number of the first electrodes is plural, and the plural first electrodes are arranged in an array;
the number of the first via holes is multiple, and the first via holes correspond to the first electrodes one to one;
each first electrode comprises at least two sub-electrodes which are arranged at intervals along a first direction; the first direction is a row direction or a column direction of the array;
the first sub-layers of the sub-electrodes respectively extend to be connected with the first pole through the first via holes.
4. The display substrate according to claim 3, further comprising an auxiliary repair line extending in the first direction;
the auxiliary repairing wire is positioned on one side of the first pole, which is far away from the first electrode, or positioned between the first pole and the film layer where the first electrode is positioned;
the auxiliary repair line at least partially overlaps with the orthographic projection of each sub-electrode in one row or one column on the substrate;
the auxiliary repairing line and the orthographic projection of the first via hole on the substrate do not overlap;
the auxiliary repairing line is not overlapped with the orthographic projection of the first sub-layer connected between the first via hole and the sub-electrode on the substrate.
5. The display substrate according to claim 4, wherein one row or one column of the first electrodes corresponds to a plurality of auxiliary repair lines;
the number of the auxiliary repair lines corresponding to the first electrodes in one row or one column is the same as the number of display colors of the sub-pixels correspondingly driven by the first electrodes in one row or one column.
6. The display substrate according to claim 4, wherein the pixel driving circuit is located in an orthographic projection area of the first electrode on the substrate;
the transistor further includes an active layer, a gate insulating layer, and a gate electrode; the gate insulating layer is positioned between the active layer and the gate electrode; the orthographic projection of the active layer and the grid electrode on the substrate at least partially overlaps;
the display substrate further comprises a shading conducting layer which is positioned on one side, close to the substrate, of the pixel driving circuit; the orthographic projection of the light-shielding conducting layer on the substrate covers the orthographic projection overlapped area of the active layer and the grid electrode on the substrate;
the shading conductive layer also extends to overlap with the orthographic projection of the first via hole on the substrate;
a second insulating layer is further arranged between the shading conductive layer and the first pole at the position of the first via hole;
and the first pole at the position of the first via hole is connected with the shading conducting layer through a second via hole formed in the second insulating layer.
7. The display substrate of claim 6, wherein the auxiliary repair line and the gate electrode are located on the same film layer and are made of the same material.
8. The display substrate according to claim 2, wherein the first sub-layer, the third sub-layer and the second pattern are made of transparent conductive materials;
the second sub-layer and the first pattern are made of reflective metal materials.
9. A display panel comprising the display substrate according to any one of claims 1 to 8;
the display substrate further comprises a light-emitting functional layer and a second electrode, the light-emitting functional layer and the second electrode are sequentially arranged on one side, away from the substrate, of the first electrode in the display substrate, and the light-emitting functional layer and the second electrode are overlapped with the orthographic projection of the first electrode on the substrate.
10. The display panel according to claim 9, wherein a third insulating layer is provided in the display substrate between the sub-electrode and the auxiliary repair line which are orthographically overlapped on the substrate;
the first sub-layer connected between at least one sub-electrode and the first via hole is disconnected, and the sub-electrode is connected with the auxiliary repair line through a third via hole formed in the third insulating layer;
and the other sub-electrode which is closest to the sub-electrode along the first direction and has the same display color with the sub-pixel driven by the sub-electrode is connected with the auxiliary repair line through a fourth through hole formed in the third insulating layer.
11. A display device characterized by comprising the display panel according to any one of claims 9 to 10.
12. A method for repairing a display panel according to any one of claims 9 to 10, comprising: detecting a dark spot on the display panel;
cutting off a first sub-layer connected between one sub-electrode and a first via hole in the area where the dark spot is located;
if the dark spot is detected to exist again, a third through hole is formed in a third insulating layer, and the sub-electrode is connected with an auxiliary repairing line through the third through hole;
and simultaneously, a fourth through hole is formed in the third insulating layer, so that the other sub-electrode which is closest to the sub-electrode along the first direction and has the same display color as the sub-pixel driven by the sub-electrode is connected with the auxiliary repair line through the fourth through hole.
13. A method of manufacturing a display substrate according to any one of claims 1 to 8, comprising: sequentially preparing a pixel driving circuit, a first insulating layer and a first electrode on a substrate;
preparing the pixel driving circuit comprises preparing a transistor, wherein preparing the transistor comprises preparing a first electrode;
preparing the first electrode comprises sequentially preparing patterns of a first sub-layer and a second sub-layer, wherein the first sub-layer also extends to be connected with the first electrode through a first via hole formed in the first insulating layer;
the method is characterized by further comprising the step of preparing a first graph, wherein the first graph and the graph of the second sublayer are prepared through a one-time composition process, and the first graph at least covers the inner wall of the first through hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211310366.XA CN115568249A (en) | 2022-10-25 | 2022-10-25 | Display substrate, preparation method, display panel, repair method and display device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211310366.XA CN115568249A (en) | 2022-10-25 | 2022-10-25 | Display substrate, preparation method, display panel, repair method and display device |
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| CN115568249A true CN115568249A (en) | 2023-01-03 |
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| CN202211310366.XA Pending CN115568249A (en) | 2022-10-25 | 2022-10-25 | Display substrate, preparation method, display panel, repair method and display device |
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| CN (1) | CN115568249A (en) |
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