CN115560807A - Environment detection system - Google Patents
Environment detection system Download PDFInfo
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- CN115560807A CN115560807A CN202211552689.XA CN202211552689A CN115560807A CN 115560807 A CN115560807 A CN 115560807A CN 202211552689 A CN202211552689 A CN 202211552689A CN 115560807 A CN115560807 A CN 115560807A
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- 238000001514 detection method Methods 0.000 title claims abstract description 87
- 230000007613 environmental effect Effects 0.000 claims abstract description 51
- 239000002245 particle Substances 0.000 claims description 26
- 230000002159 abnormal effect Effects 0.000 claims description 19
- 230000005856 abnormality Effects 0.000 claims description 13
- 238000013480 data collection Methods 0.000 claims description 10
- 238000005286 illumination Methods 0.000 claims description 9
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 6
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 claims description 6
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 3
- 239000001569 carbon dioxide Substances 0.000 claims description 3
- 239000003344 environmental pollutant Substances 0.000 claims description 3
- 231100000719 pollutant Toxicity 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 2
- 238000000825 ultraviolet detection Methods 0.000 claims description 2
- 238000004806 packaging method and process Methods 0.000 claims 5
- 238000000034 method Methods 0.000 description 21
- 238000004519 manufacturing process Methods 0.000 description 11
- 238000005538 encapsulation Methods 0.000 description 10
- 230000003749 cleanliness Effects 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 5
- 230000032258 transport Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
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- G—PHYSICS
- G08—SIGNALLING
- G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
- G08B25/00—Alarm systems in which the location of the alarm condition is signalled to a central station, e.g. fire or police telegraphic systems
- G08B25/01—Alarm systems in which the location of the alarm condition is signalled to a central station, e.g. fire or police telegraphic systems characterised by the transmission medium
- G08B25/08—Alarm systems in which the location of the alarm condition is signalled to a central station, e.g. fire or police telegraphic systems characterised by the transmission medium using communication transmission lines
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04Q—SELECTING
- H04Q9/00—Arrangements in telecontrol or telemetry systems for selectively calling a substation from a main station, in which substation desired apparatus is selected for applying a control signal thereto or for obtaining measured values therefrom
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- General Physics & Mathematics (AREA)
- Business, Economics & Management (AREA)
- Emergency Management (AREA)
- Engineering & Computer Science (AREA)
- Computer Networks & Wireless Communication (AREA)
- Arrangements For Transmission Of Measured Signals (AREA)
Abstract
The application discloses environment detection system, this environment detection system includes data acquisition device, wireless connection device, central control device and unusual warning device, data acquisition device and unusual warning device are connected with central control device through wireless connection device respectively, data acquisition device is used for gathering current environmental data, and send environmental data to central control device through wireless connection device, central control device is used for judging whether environmental data is unusual, and when environmental data is unusual, send unusual signal to unusual warning device through wireless connection device, unusual warning device is used for when receiving unusual signal, send warning information. This scheme can improve environment measuring efficiency.
Description
Technical Field
The application relates to the technical field of environment detection, in particular to an environment detection system.
Background
With the development of semiconductor manufacturing processes, semiconductor manufacturing processes have entered the nanometer scale, and the cleanliness requirements of products for production environments are gradually increasing. If the chip cannot be produced according to the specified cleanliness requirement in the production process, the performance of the chip can be seriously affected. Therefore, the cleanliness of the production environment needs to be managed in real time.
Because the cleanliness class requirements of different process sections are inconsistent, the different process sections are generally separated by partition boards (partition walls). Because the environment is complicated, the cleanliness detection can be carried out in each process interval only by depending on a manual handheld Particle detector (Particle Counter), and then collected data are manually sorted, summarized and recorded, so that daily management and control are carried out.
However, the manpower management and control of the production environment is time-consuming and labor-consuming, and the accuracy of the detection result is also poor.
Disclosure of Invention
The application provides an environment detection system, which can improve the environment detection efficiency.
The application provides an environment detection system, including data acquisition device, wireless connection device, central control device and unusual warning device, data acquisition device with unusual warning device passes through respectively wireless connection device with central control device connects, data acquisition device is used for gathering current environmental data, and passes through wireless connection device will environmental data send to central control device, central control device is used for judging whether environmental data is unusual, and when environmental data is unusual, pass through wireless connection device sends abnormal signal extremely unusual warning device, unusual warning device is used for receiving during the abnormal signal, send warning information.
In the environment detection system that this application provided, data acquisition device includes environmental data acquisition module, positional information acquisition module and data encapsulation module, data encapsulation module respectively with environmental data acquisition module positional information acquisition module connects, environmental data acquisition module is used for gathering current environmental data, and will environmental data send to data encapsulation module, positional information acquisition module is used for gathering current positional information, and will positional information send to data encapsulation module, data encapsulation module is used for right environmental data with positional information encapsulates to encapsulate data send to central control device.
In the environment detecting system that this application provided, environmental data collection module includes that the particle detects module, air quality detection module, illumination and detects at least one among module, wind speed detection module, temperature sensor and the humidity transducer.
In the environmental detection system that this application provided, the air quality detection module includes at least one in PM2.5 data detection unit, carbon dioxide concentration detecting element, nitric oxide concentration detecting element and pollutant gas concentration detecting element.
In the environment detecting system that this application provided, illumination detection module includes at least one in illumination intensity detecting element, visibility detecting element and the ultraviolet detecting element.
In the environment detection system that this application provided, the wind speed detection module includes wind speed detecting element and/or wind direction detecting element.
In the environment detecting system provided by the application, the particle detecting module comprises an unmanned transport vehicle and a particle detector, the particle detector is placed on the unmanned transport vehicle, and the unmanned transport vehicle and the particle detector are respectively connected with the central control device through the wireless connecting device.
In the environment detection system provided by the application, the environment detection system further comprises a mobile terminal, the mobile terminal passes through the wireless connection device and the abnormal warning device are connected, and the mobile terminal is used for receiving the warning information and displaying the warning information.
In the environment detecting system provided by the application, the wireless connection device comprises at least one of a wireless local area network, wiFi and 4G/5G signals.
In the environment detection system provided by the application, the abnormity warning device comprises an abnormity sending module and a warning lamp.
To sum up, the environmental detection system that this application provided includes data acquisition device, wireless connection device, central control device and unusual warning device, data acquisition device with unusual warning device passes through respectively wireless connection device with central control device connects, data acquisition device is used for gathering current environmental data, and passes through wireless connection device will environmental data send to central control device, central control device is used for judging whether environmental data is unusual, and when environmental data is unusual, pass through wireless connection device sends abnormal signal extremely unusual warning device, unusual warning device is used for receiving during the abnormal signal, send warning information. The scheme can realize the automation of environment detection, thereby improving the environment detection efficiency.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an environment detection system according to an embodiment of the present application.
Fig. 2 is another schematic structural diagram of an environment detection system according to an embodiment of the present application.
FIG. 3 is a schematic structural diagram of an environmental detection system for a semiconductor manufacturing plant according to an embodiment of the present disclosure.
Detailed Description
Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. The following description refers to the accompanying drawings in which the same numbers in different drawings represent the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present application. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the application, as detailed in the appended claims.
It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, a reference to an element identified by the phrase "comprising one of 82308230a of 82303030, or an element defined by the phrase" comprising another identical element does not exclude the presence of the same element in a process, method, article, or apparatus comprising the element, and elements having the same designation may or may not have the same meaning in different embodiments of the application, the particular meaning being determined by its interpretation in the particular embodiment or by further reference to the context of the particular embodiment.
It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
In the following description, suffixes such as "module", "component", or "unit" used to denote elements are used only for the convenience of description of the present application, and have no specific meaning in themselves. Thus, "module", "component" or "unit" may be used mixedly.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the embodiments of the present application, "a plurality" or "a plurality" means two or more unless specifically defined otherwise.
It should be noted that the description sequence of each embodiment below does not limit the specific implementation sequence.
In the production process of chips, different process intervals are generally separated by partition boards because the requirements on cleanliness levels of the different process intervals are inconsistent. Because the environment is complicated, can only rely on the handheld particle detector of manpower to carry out the cleanliness factor at each process interval and detect, then arrange the data manual work that will collect in order, gather and the record, carry out daily management and control from this. However, it is not only time-consuming and labor-consuming to rely on manpower to manage and control the production environment, and the stability of the detection result is also poor.
Based on this, the present application provides an environment detection System, as shown in fig. 1, the environment detection System may include a data acquisition device 101, a wireless connection device 102, a central control device 103, and an abnormality warning device 104 (AMS).
The data acquisition device 101 and the abnormality warning device 104 are respectively connected with the central control device 103 through the wireless connection device 102; the data acquisition device 101 is used for acquiring current environmental data and sending the environmental data to the central control device 103 through the wireless connection device 102; the central control device 103 is used for judging whether the environmental data is abnormal or not, and sending an abnormal signal to the abnormal warning device 104 through the wireless connection device 102 when the environmental data is abnormal; the abnormality warning device 104 is configured to send warning information when receiving the abnormality signal.
In some embodiments, as may be seen in fig. 2, the data acquisition device 101 may include an environmental data acquisition module, a location information acquisition module, and a data encapsulation module. The data encapsulation module is respectively connected with the environmental data acquisition module and the position information acquisition module.
The environment data acquisition module is used for acquiring current environment data and sending the environment data to the data encapsulation module; the position information acquisition module is used for acquiring current position information and sending the position information to the data encapsulation module; the data encapsulation module is configured to encapsulate the environmental data and the location information, and send the encapsulated data to the central control device 103.
In some embodiments, the environmental data collection module may include at least one of a particulate detection module, an air quality detection module, an illumination detection module, a wind speed detection module, a temperature sensor, and a humidity sensor.
Wherein, the air quality detection module includes at least one among PM2.5 data detection unit, carbon dioxide concentration detecting element, nitric oxide concentration detecting element and pollutant gas concentration detecting element. The illumination detection module comprises at least one of an illumination intensity detection unit, a visibility detection unit and an ultraviolet detection unit. The wind speed detection module comprises a wind speed detection unit and/or a wind direction detection unit.
In a specific implementation process, a threshold value of the data to be detected may be set in the central control device 103, and then the central control device 103 may compare the environmental data with the threshold value, so as to determine whether the environmental data is abnormal according to a comparison result. It is to be understood that the threshold may include one or more, and may be determined according to the function module of the environment data acquisition module. For example, when the environmental data collection module is a temperature sensor, the environmental data collection module is configured to collect a current temperature value, and at this time, a temperature value may be set as a threshold in the central control device 103. For another example, when the environmental data collection module includes a temperature sensor and a humidity sensor, the environmental data collection module is configured to collect a current temperature value and a current humidity value, and at this time, a temperature value and a humidity value may be set as threshold values respectively.
It should be noted that, the functional module of the environmental data acquisition module can be set according to actual requirements.
In some embodiments, the wireless connection means 102 may comprise at least one of a wireless local area network, wiFi, and 4G/5G signal.
As shown in fig. 2, the environment detection system may further include a mobile terminal 105, where the mobile terminal 105 is connected to the abnormality warning device 104 through the wireless connection device 102, and the mobile terminal 105 is configured to receive the warning information and display the warning information.
In a specific implementation process, the abnormality warning device 104 may determine a responsible person corresponding to the position information according to the position information acquired by the data acquisition device 101, so as to send warning information to the mobile terminal 105 of the corresponding responsible person.
In some embodiments, the abnormality warning device 104 may include an abnormality transmission module and a warning light. The exception sending module may be configured to send the warning information to the corresponding mobile terminal 105; the warning lamp can be used for giving out warning sound.
It should be noted that the warning information may include information such as an environmental data detection result and a detection position, so that a responsible person can process an environment of a corresponding position in time according to the warning information. In some embodiments, the alert message may be a mail, an instant messenger message, and/or an Artificial intelligent telephone (AI), among others.
To better illustrate the above-described environment detection system, embodiments of the present application further provide an environment detection system for a semiconductor manufacturing factory floor. It should be noted that, in this embodiment, a detailed description is given when the data acquisition device 101 is a particle detection module, the wireless connection device 102 is a wireless lan, and the central control device 103 is a Robot Controller (MRC). Wherein the terms have the same meanings as those in the above-mentioned environment detection system, and the details of the implementation can be referred to the description in the above-mentioned embodiments.
As shown in fig. 3, the environment detection system may include a particle detection module, a wireless lan, a robot controller, and an abnormality warning device.
The Particle detection module may include an Automated Guided Vehicle (AGV) and a Particle detector (Particle Counter), the Particle detector is disposed on the AGV, and the AGV and the Particle detector are respectively connected to the robot controller through a wireless lan. The particle detection module and the abnormality warning device are respectively connected with the robot control device through a wireless local area network.
In the specific implementation process, a special electronic shelf (Erack) and a Frame Case (CST) compatible with a particle detector can be arranged, and the particle detector compatible with the CST can detect the current particle parameters and position information in real time in the CST carrying process of the unmanned carrying vehicle. When the robot control device judges that the current particle parameters are abnormal, an abnormal signal can be sent to the abnormal warning device through the wireless local area network. The abnormity warning device can determine the corresponding responsible person according to the position information, so that the warning information is sent to the mobile terminal of the corresponding responsible person.
It is understood that, in the implementation process, the transportation task of the automated guided vehicle is generally set in advance by the robot control device, so that the automated guided vehicle transports the CST at fixed time and fixed point. In the CST conveying process of the unmanned transport vehicle, the particle detector compatible with the CST can detect the current particle parameters in real time, so that the automation of the environment detection of the semiconductor manufacturing plant area is realized.
In summary, the environment detection system provided by the embodiment of the present application includes a data collection device 101, a wireless connection device 102, a central control device 103 and an anomaly warning device 104, the data collection device 101 and the anomaly warning device 104 are respectively connected with the central control device 103 through the wireless connection device 102, the data collection device 101 is used for collecting current environment data, and sends the environment data to the central control device 103 through the wireless connection device 102, the central control device 103 is used for judging whether the environment data is abnormal, and when the environment data is abnormal, an abnormal signal is sent to the anomaly warning device 104 through the wireless connection device 102, and the anomaly warning device 104 is used for sending warning information when receiving the abnormal signal. The scheme can realize the automation of environment detection, thereby improving the environment detection efficiency. Moreover, errors caused by manual detection can be avoided, and therefore the accuracy of the detection result is improved.
The environment detection system provided by the embodiment of the present application is introduced in detail above, and a specific example is applied in the present application to explain the principle and the implementation of the present application, and the description of the above embodiment is only used to help understanding the method and the core idea of the present application; meanwhile, for those skilled in the art, according to the idea of the present application, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present application.
Claims (10)
1. The utility model provides an environment detection system, its characterized in that, includes data acquisition device, wireless connection device, central controlling means and unusual warning device, data acquisition device with unusual warning device passes through respectively wireless connection device with central controlling means connects, data acquisition device is used for gathering current environmental data, and passes through wireless connection device will environmental data send to central controlling means, central controlling means is used for judging whether environmental data is unusual, and when environmental data is unusual, pass through wireless connection device sends abnormal signal extremely unusual warning device, unusual warning device is used for receiving during the abnormal signal, send warning information.
2. The environment detecting system according to claim 1, wherein the data collecting device includes an environment data collecting module, a position information collecting module and a data packaging module, the data packaging module is respectively connected to the environment data collecting module and the position information collecting module, the environment data collecting module is configured to collect current environment data and send the environment data to the data packaging module, the position information collecting module is configured to collect current position information and send the position information to the data packaging module, and the data packaging module is configured to package the environment data and the position information and send the packaged data to the central control device.
3. The environmental detection system of claim 2, wherein the environmental data collection module includes at least one of a particulate detection module, an air quality detection module, an illumination detection module, a wind speed detection module, a temperature sensor, and a humidity sensor.
4. The environmental detection system of claim 3, wherein the air quality detection module includes at least one of a PM2.5 data detection unit, a carbon dioxide concentration detection unit, a nitric oxide concentration detection unit, and a pollutant gas concentration detection unit.
5. The environmental detection system of claim 3, wherein the illumination detection module comprises at least one of an illumination intensity detection unit, a visibility detection unit, and an ultraviolet detection unit.
6. The environmental detection system of claim 3, wherein the wind speed detection module comprises a wind speed detection unit and/or a wind direction detection unit.
7. The environmental detection system of claim 3, wherein the particle detection module includes an automated guided vehicle and a particle detector, the particle detector being disposed on the automated guided vehicle, the automated guided vehicle and the particle detector being respectively connected to the central control device via the wireless connection device.
8. The environmental detection system according to any one of claims 1 to 7, further comprising a mobile terminal, wherein the mobile terminal is connected to the abnormality warning device through the wireless connection device, and the mobile terminal is configured to receive the warning information and display the warning information.
9. The environmental detection system according to any one of claims 1-7, wherein said wireless connection means includes at least one of wireless local area network, wiFi and 4G/5G signals.
10. The environmental detection system according to any one of claims 1 to 7, wherein the abnormality warning device includes an abnormality transmission module and a warning lamp.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211552689.XA CN115560807A (en) | 2022-12-06 | 2022-12-06 | Environment detection system |
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| CN202211552689.XA CN115560807A (en) | 2022-12-06 | 2022-12-06 | Environment detection system |
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Application publication date: 20230103 |