CN115542855A - Method and device for stopping dispatching of designated equipment group in emergency based on MES (manufacturing execution system) - Google Patents
Method and device for stopping dispatching of designated equipment group in emergency based on MES (manufacturing execution system) Download PDFInfo
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- G05B19/4184—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by fault tolerance, reliability of production system
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- G—PHYSICS
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Abstract
The invention provides a method and a device for stopping dispatching of an appointed equipment group in an emergency based on an MES (manufacturing execution system), which are applied to the field of semiconductors. Specifically, starting from the improvement of the handling speed of the emergency abnormal situation, the dispatching stopping device of the machine group in the chip manufacturing process flow and the control method thereof are designed according to the operation experience of the production line, and the state of the machine is controlled in a centralized manner to solve the problem that the traditional distributed operation is low in efficiency, so that the handling efficiency is greatly improved, and the product safety is guaranteed. The dispatching stopping method provided by the invention realizes four management and control functions of full stop, regional stop, accurate stop and intelligent stop, and respectively corresponds to quick management and control of a whole plant, different operation regions, different power sources (water, electricity and gas) and Q-time-related machine groups at upstream and downstream of a production line, finally realizes 5-minute dispatching stop, improves the emergency handling capacity of the plant, and ensures the product safety under emergency conditions.
Description
Technical Field
The invention relates to the technical field of microelectronic semiconductors, in particular to a method and a device for stopping dispatching of a designated equipment group in an emergency situation based on an MES system.
Background
With the continuous and deep application of advanced concepts such as automatic handling, integrated monitoring systems, big data and the like in the field of integrated circuit manufacturing, the number of machines administered by each manufacturing engineer with the help of an advanced intelligent manufacturing system also rises synchronously. Meanwhile, as the processes used for manufacturing chips are more and more complex, the allowable waiting time (Q-time) of products among different process stations in the production process is more and more limited, so that in order to ensure that the quality safety of the products in any state is not over Q-time, higher requirements are put forward for manufacturing engineers when the machine state is switched.
At present, when emergency abnormity occurs in a factory and a large-scale machine in a process used for manufacturing chips needs to be stopped and dispatched, a manufacturing engineer needs to switch equipment states one by one through an MES (manufacturing execution system); the MES system is used as a tool for managing the state of the equipment of the factory, only provides the state switching function of a single equipment, and the states of different equipment at the upstream and the downstream are not related. Therefore, under the above mentioned complicated control of the man-machine ratio and the waiting time (Q-time), it takes a long time for the emergency exception to stop dispatching the affected equipment group, which causes a greater impact on the quality safety of the product and causes additional loss.
Disclosure of Invention
The invention aims to provide a method and a device for stopping dispatching designated equipment groups under emergency conditions based on an MES (manufacturing execution system), which are used for solving the problems that in the existing method for stopping dispatching designated equipment groups under emergency conditions based on the MES, the machine states can be switched one by one only through the MES, the machine states are influenced by high man-machine ratio, complicated upstream and downstream operation relation control among a plurality of machines and the like, the time required for stopping dispatching all the influenced machine groups is long when emergency abnormality occurs, the quality safety of chip products is further influenced, and finally additional loss is caused.
In a first aspect, to solve the above technical problem, the present invention provides a method for stopping dispatching designated equipment group in emergency based on an MES system, which can be specifically applied to a control terminal with a display interface of the MES system, and the method for stopping dispatching specifically includes the following steps:
the method comprises the steps that a machine station control relation database required in a chip manufacturing process flow is established in advance, wherein the machine station control relation database comprises an affiliated relation of all machine stations classified according to a preset region control mechanism and/or a power source dividing mechanism and an incidence relation among a plurality of machine stations;
when the MES system detects an emergency abnormal instruction, determining all machines required to stop dispatching of the emergency abnormal instruction according to the emergency abnormal instruction and the machine management and control relational database, and displaying the determined all machines on a display interface of the control terminal;
and sending a dispatching stopping instruction to the control terminal by using an instruction issuing module of the MES system so as to stop all machines displayed on the display interface from operating through the single dispatching stopping instruction.
Further, the emergency exception instruction may include an area where the emergency exception condition occurs and a process related to the emergency exception condition that occurs; the preset region management and control mechanism may include: and classifying all machines in the chip manufacturing process flow according to the region, the production management group, the equipment management group and the process management group according to different emergency abnormal instructions, the region where the emergency abnormal condition occurs, the process management group to which the process related to the emergency abnormal condition occurs, the production management group determined by the process management group and the equipment management group determined by the production management group, wherein the regions, the production management group, the equipment management group and the process management group belong to different emergency abnormal instructions.
Further, the power source partitioning mechanism may include: and carrying out multistage division on all the machines in the chip manufacturing process flow according to all power sources of an actual production factory.
Further, the association relationship among the machines may include an upstream and downstream operation relationship among the machines belonging to different areas, different production management groups, different equipment management groups, and different process management groups.
Further, the waiting time between every two adjacent machines in the plurality of machines having the upstream and downstream operation relationship needs to be not greater than a preset time threshold.
In a second aspect, based on the same inventive concept, the invention further provides a device for stopping dispatching a designated equipment group in an emergency situation based on an MES system, which can be specifically applied to a control terminal with a display interface of the MES system, and the device comprises the following modules:
the system comprises a database establishing module, a chip manufacturing process control module and a chip management and control module, wherein the database establishing module is used for establishing a machine management and control relation database required in the chip manufacturing process flow in advance, and the machine management and control relation database comprises an affiliation relation of machines classified according to a preset region management and control mechanism and/or a power source dividing mechanism and an incidence relation among a plurality of machines;
the management and control machine management module is used for determining all machines required to stop dispatching of the emergency abnormal instruction according to the emergency abnormal instruction and the machine management and control relational database when the MES system detects the emergency abnormal instruction, and displaying the determined all machines on a display interface of the control terminal;
and the dispatching stopping instruction issuing module is used for sending a dispatching stopping instruction to the control terminal by utilizing the instruction issuing module of the MES system so as to stop all machines displayed on the display interface from operating through the single dispatching stopping instruction.
Further, the emergency exception instruction may include an area where the emergency exception condition occurs and a process related to the emergency exception condition that occurs; the preset region management and control mechanism may include: and classifying all machines in the chip manufacturing process flow according to the region, the production management group, the equipment management group and the process management group according to different emergency abnormal instructions, the region where the emergency abnormal condition occurs, the process management group to which the process related to the emergency abnormal condition occurs, the production management group determined by the process management group and the equipment management group determined by the production management group, wherein the regions, the production management group, the equipment management group and the process management group belong to different emergency abnormal instructions.
Further, the power source partitioning mechanism may include: and carrying out multistage division on all the machines in the chip manufacturing process flow according to all power sources of an actual production factory.
Further, the association relationship among the machines may include an upstream and downstream operation relationship among the machines belonging to different areas, different production management groups, different equipment management groups, and different process management groups.
In a third aspect, based on the same inventive concept, the invention further provides an electronic device, which specifically comprises a processor, a communication interface, a memory and a communication bus, wherein the processor, the communication interface and the memory complete mutual communication through the communication bus;
a memory for storing a computer program;
and a processor for implementing the dispatch stopping method step for designating the equipment group in the emergency based on the MES system when the program stored in the memory is executed.
In a fourth aspect, based on the same inventive concept, the present invention further provides a computer readable storage medium, in which a computer program is stored, and the computer program, when executed by a processor, implements the steps of the method for dispatching stop of a designated equipment group in an emergency situation based on an MES system as described above.
Compared with the prior art, the technical scheme of the invention has at least one of the following beneficial effects:
the invention provides a method for stopping dispatching designated equipment groups in emergency based on an MES system, which takes the improvement of the handling speed of emergency abnormal conditions as a starting point, designs a machine group dispatching stopping device in the designated chip manufacturing process flow and a control method thereof by fitting with the operation experience of a production line, and intensively controls the machine state to solve the problem of low efficiency of traditional distributed operation, thereby greatly improving the handling efficiency and ensuring the product safety. The dispatching stopping method provided by the invention realizes four management and control functions of full stop, regional stop, accurate stop and intelligent stop, and respectively corresponds to a whole plant, different operation regions, different power sources (water, electricity and gas) and Q-time-related machine groups on upstream and downstream of a production line for fast management and control, finally realizes 5-minute dispatching stopping, improves the emergency handling capacity of the plant, and ensures the product safety under emergency conditions.
Drawings
FIG. 1 is a flow chart illustrating a method for stopping dispatching designated equipment in an emergency based on an MES system according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram illustrating an example of a method for stopping dispatching designated equipment in an emergency based on the MES system according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a stop dispatching device for designating an equipment group in an emergency based on the MES system according to an embodiment of the present invention.
Detailed Description
The following describes in more detail embodiments of the present invention with reference to the schematic drawings. The advantages and features of the present invention will become more apparent from the following description. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention.
As described in the background art, currently, when an emergency abnormality occurs in a factory and a large-scale machine in a chip manufacturing process needs to be stopped, a manufacturing engineer needs to switch equipment states one by one through an MES system; the MES system is used as a tool for managing the state of the equipment of the factory, and only provides the state switching function of a single equipment, and the states of different equipment at the upstream and the downstream are not related. Therefore, under the influence of the above-mentioned complicated man-machine ratio and waiting time (Q-time) control, it takes a long time for the emergency exception to stop dispatching the affected equipment group, which has a greater impact on the quality safety of the product and causes additional loss.
Therefore, the invention provides a method and a device for stopping dispatching designated equipment groups under emergency conditions based on an MES system, which are used for solving the problems that in the existing method for stopping dispatching designated equipment groups under emergency conditions based on the MES system, the machine states can be switched one by one only through the MES system, the method is influenced by high man-machine ratio, complex control of upstream and downstream operation relations among a plurality of machines and the like, the time required for stopping dispatching all the machine groups under the emergency abnormality is long, the quality safety of chip products is further influenced greatly, and additional loss is finally caused.
Referring to fig. 1 specifically, fig. 1 is a schematic flow diagram of a method for stopping dispatching designated equipment groups in an emergency based on an MES system, where the method is applied to a terminal device with a display interface of the MES system, and specifically includes the following steps:
step S100, a machine management and control relationship database required in the chip manufacturing process flow is pre-established, where the machine management and control relationship database includes an affiliation of each machine classified according to a preset region management and control mechanism and/or a power source partitioning mechanism, and an association between multiple machines.
In this embodiment, a relational database regarding the grouping relationship of the machines and the association relationship between multiple machines, which is divided according to the affiliated region, the production management group, the equipment management group and the process management group of each machine required by each process in the chip manufacturing process flow, and all power source relationships, may be established according to the emergency abnormal situations that often occur in practical applications, such as abnormal supply of tap water, abnormal power generation of a power plant, and the like. Then, using the relational database, according to the actual emergency exception, all machines (related to) associated with each emergency exception are selected from each group category in the relational database, and then, using one instruction, all the screened machines are stopped, thereby realizing the following functions: 1. one-key full stop, namely, all machines are managed in a centralized way and have a single instruction rapid control function (realized by screening all machines needing to stop dispatching and concentrating on one interface); 2. area management and control: according to different requirements, selecting corresponding machines according to the region, the production management team, the equipment management team and the process management team to perform rapid management and control; 3. accurate management and control: and (4) carrying out three-level division on all power sources of a factory, and specifically carrying out three-level division on the power sources to the machine tables corresponding to each liquid pipeline and each gas cabinet on the production line. Selecting a corresponding machine to perform rapid management and control according to the affected power source under emergency; 4. intelligent management and control: after the rapid management and control measures are taken, the dispatching of the upstream and downstream Q-time associated equipment is automatically stopped according to the specific management and control machine range.
In addition, through the four functions, the dispatching stopping method for the designated equipment group under the emergency condition based on the MES system finally realizes dispatching stopping under different emergency conditions within 5 minutes, improves the emergency handling capacity of a factory, and ensures the product safety under the emergency condition.
Further, the preset region management and control mechanism may specifically include: and classifying all the machines in the chip manufacturing process flow according to the region, the production management group, the equipment management group and the process management group according to different emergency abnormal instructions, wherein the region is included in the emergency abnormal instruction, the process management group to which the process related to the emergency abnormal condition belongs, the production management group determined by the process management group and the equipment management group determined by the production management group.
The power source partitioning mechanism includes: and carrying out multistage division on all the machines in the chip manufacturing process flow according to all power sources of an actual production factory.
The association relationship among the plurality of machines may include an upstream and downstream operation relationship among the plurality of machines belonging to different areas, different production management groups, different equipment management groups, and different process management groups. And the waiting time between every two adjacent machine tables in the plurality of machine tables with the upstream and downstream operation relation is not larger than a preset time threshold. For example, the preset time threshold may be 1 minute, 2 minutes, 3 minutes, and the like, and the preset time threshold may be specifically set according to actual requirements, and the present invention is not limited specifically.
Step S200, when the MES system detects an emergency abnormal instruction, determining all machines required to stop dispatching of the emergency abnormal instruction according to the emergency abnormal instruction and the machine management and control relational database, and displaying the determined all machines on a display interface of the control terminal.
The emergency exception instruction may include an area where the emergency exception condition occurs and a process related to the emergency exception condition that occurs.
In practical applications, the MES system is a control terminal with a display interface, and the control terminal can be any of various existing electronic devices, which will not be specifically illustrated herein. Moreover, the MES system is further configured to receive the emergency exception instruction and send (for example, send in a broadcast manner) other types of instructions to other modules and control various machines (also referred to as equipment), such as a stop dispatch instruction in step S300.
In this embodiment, when the MES system detects an emergency abnormal instruction, according to the current emergency abnormal situation indicated in the emergency abnormal instruction, the MES system may compare the machine management and control relationship database required in the chip manufacturing process flow pre-established in the step S100 with each equipment group to determine which area, which production management team, which equipment management team, and which process management team the current emergency abnormal situation belongs to, so as to screen out all machines related to the current emergency abnormal situation after determining each team, and then add all machines on the display interface of the control terminal.
Step S300, sending a dispatching stopping instruction to the control terminal by using the instruction issuing module of the MES system, so that all machines displayed on the display interface stop working through the single dispatching stopping instruction.
As an example, as shown in fig. 2, the power is received by five plants, i.e., 24 days at 2 months and 5 days at 48 days in 2021, the tap water supply is notified to be abnormal, the dispatching system is rapidly stopped by the equipment group to rapidly manage the production line, all the machines are stopped in a short time, the water consumption is reduced, the product safety of the production line is guaranteed, and the product is zero scrap and zero overhq-time at the event.
Based on the same inventive concept, as shown in fig. 3, fig. 3 is a schematic structural diagram of a dispatch stopping device for a designated equipment group in an emergency based on an MES system according to an embodiment of the present invention. As can be seen from fig. 2, the dispatch stopping device for specifying an equipment group in an emergency based on an MES system, which is further provided by the present invention, can be specifically applied to a control terminal of the MES system, which has a display interface, and specifically includes the following modules:
a database establishing module 210, configured to pre-establish a machine management and control relationship database required in a chip manufacturing process, where the machine management and control relationship database includes an affiliation relationship of each machine after being classified according to a preset region management and control mechanism and/or a power source partitioning mechanism, and an association relationship between multiple machines;
a management and control machine management module 220, configured to, when the MES system detects an emergency abnormal instruction, determine, according to the emergency abnormal instruction and the machine management and control relationship database, all machines to which the emergency abnormal instruction needs to stop dispatching, and display the determined all machines on a display interface of the control terminal;
the dispatch stopping instruction issuing module 230 is configured to send a dispatch stopping instruction to the control terminal by using the instruction issuing module of the MES system, so that all machines displayed on the display interface are stopped by the dispatch stopping instruction.
Wherein the emergency abnormal instruction can comprise an area where the emergency abnormal condition occurs and a process related to the emergency abnormal condition; the preset region management and control mechanism may include: and classifying all the machines in the chip manufacturing process flow according to the region, the production management group, the equipment management group and the process management group according to different emergency abnormal instructions, wherein the region is included in the emergency abnormal instruction, the process management group to which the process related to the emergency abnormal condition belongs, the production management group determined by the process management group and the equipment management group determined by the production management group.
Further, the power source division mechanism may include: and carrying out multistage division on all the machines in the chip manufacturing process flow according to all power sources of an actual production factory.
Furthermore, the association relationship among the machines includes the upstream and downstream operation relationship among the machines belonging to different areas, different production management groups, different equipment management groups and different process management groups.
In summary, the present invention provides a method for stopping dispatching designated equipment group in an emergency based on MES system, which takes improvement of handling speed of emergency abnormal conditions as a starting point, designs a machine group stop dispatching device and a control method thereof in a designated chip manufacturing process flow according to a production line operation experience, and centrally controls machine state to solve the problem of inefficient distributed operation in the prior art, thereby greatly improving handling efficiency and ensuring product safety. The dispatching stopping method provided by the invention realizes four management and control functions of full stop, regional stop, accurate stop and intelligent stop, and respectively corresponds to a whole plant, different operation regions, different power sources (water, electricity and gas) and Q-time-related machine groups on upstream and downstream of a production line for fast management and control, finally realizes 5-minute dispatching stopping, improves the emergency handling capacity of the plant, and ensures the product safety under emergency conditions.
In addition, the embodiment of the invention also provides an electronic device, which comprises a processor, a communication interface, a memory and a communication bus, wherein the processor, the communication interface and the memory complete mutual communication through the communication bus,
a memory for storing a computer program;
the processor is used for realizing the dispatch stopping method for the designated equipment group based on the MES system in the emergency when the processor executes the program stored in the memory, and the dispatch stopping method specifically comprises the following steps:
the method comprises the steps that a machine station control relation database required in a chip manufacturing process flow is established in advance, wherein the machine station control relation database comprises an affiliated relation of all machine stations classified according to a preset region control mechanism and/or a power source dividing mechanism and an incidence relation among a plurality of machine stations;
when the MES system detects an emergency abnormal instruction, determining all machines required to stop dispatching of the emergency abnormal instruction according to the emergency abnormal instruction and the machine management and control relational database, and displaying the determined all machines on a display interface of the control terminal;
and sending a dispatching stopping instruction to the control terminal by using an instruction issuing module of the MES system so as to stop all machines displayed on the display interface from operating through the single dispatching stopping instruction.
In addition, other implementation manners of the method for stopping dispatching of the designated equipment group in an emergency based on the MES system, which are implemented by the processor executing the program stored in the memory, are the same as the implementation manners mentioned in the foregoing method embodiment portion, and are not described herein again.
The communication bus mentioned above for the control terminal may be a Peripheral Component Interconnect (PCI) bus, an Extended Industry Standard Architecture (EISA) bus, or the like. The communication bus may be divided into an address bus, a data bus, a control bus, etc. For ease of illustration, only one thick line is shown, but this does not mean that there is only one bus or one type of bus.
The communication interface is used for communication between the electronic equipment and other equipment.
The memory may include a Random Access Memory (RAM) or a Non-volatile memory (NVM), such as at least one disk memory. Optionally, the memory may also be at least one memory device located remotely from the processor.
The processor may be a general-purpose processor, including a Central Processing Unit (CPU), a Network Processor (NP), and the like; but also Digital Signal Processors (DSPs), application Specific Integrated Circuits (ASICs), field Programmable Gate Arrays (FPGAs) or other programmable logic devices, discrete gates or transistor logic devices, discrete hardware components.
In another embodiment of the present invention, a computer-readable storage medium is further provided, which stores instructions that, when executed on a computer, cause the computer to execute the method for dispatching a designated equipment group in an emergency based on an MES system as described in any of the above embodiments.
In the above embodiments, the implementation may be wholly or partially realized by software, hardware, firmware, or any combination thereof. When implemented in software, it may be implemented in whole or in part in the form of a computer program product. The computer program product includes one or more computer instructions. When loaded and executed on a computer, cause the processes or functions described in accordance with the embodiments of the invention to occur, in whole or in part. The computer may be a general purpose computer, a special purpose computer, a network of computers, or other programmable device. The computer instructions may be stored in a computer readable storage medium or transmitted from one computer readable storage medium to another, for example, from one website site, computer, server, or data center to another website site, computer, server, or data center via wired (e.g., coaxial cable, fiber optic, digital Subscriber Line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.). The computer-readable storage medium can be any available medium that can be accessed by a computer or a data storage device, such as a server, a data center, etc., that includes one or more available media. The usable medium may be a magnetic medium (e.g., floppy disk, hard disk, magnetic tape), an optical medium (e.g., DVD), or a semiconductor medium (e.g., solid State Disk (SSD)), among others.
It should be noted that, in this document, relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrases "comprising a," "8230," "8230," or "comprising" does not exclude the presence of additional like elements in a process, method, article, or apparatus that comprises the element.
All the embodiments in the present specification are described in a related manner, and the same and similar parts among the embodiments may be referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, as for the apparatus, the electronic device, and the computer-readable storage medium embodiments, since they are substantially similar to the method embodiments, the description is relatively simple, and in relation to the description, reference may be made to some portions of the description of the method embodiments.
The above description is only for the preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention shall fall within the protection scope of the present invention.
Claims (10)
1. A method for stopping dispatching of designated equipment group in emergency based on MES system is characterized in that the method is applied to a control terminal with a display interface of the MES system, and comprises the following steps:
the method comprises the steps that a machine station control relation database required in a chip manufacturing process flow is established in advance, wherein the machine station control relation database comprises an affiliated relation of all machine stations classified according to a preset region control mechanism and/or a power source dividing mechanism and an incidence relation among a plurality of machine stations;
when the MES system detects an emergency abnormal instruction, determining all machines required to stop dispatching of the emergency abnormal instruction according to the emergency abnormal instruction and the machine management and control relational database, and displaying the determined all machines on a display interface of the control terminal;
and sending a dispatching stopping instruction to the control terminal by using an instruction issuing module of the MES system so as to stop all machines displayed on the display interface from operating through the single dispatching stopping instruction.
2. The MES system-based emergency dispatch method of claim 1, wherein the emergency exception instruction comprises an area where the emergency exception condition occurs and a process involved in the emergency exception condition; the preset region management and control mechanism comprises: and classifying all machines in the chip manufacturing process flow according to the region, the production management group, the equipment management group and the process management group according to different emergency abnormal instructions, the region where the emergency abnormal condition occurs, the process management group to which the process related to the emergency abnormal condition occurs, the production management group determined by the process management group and the equipment management group determined by the production management group, wherein the regions, the production management group, the equipment management group and the process management group belong to different emergency abnormal instructions.
3. The MES system-based emergency dispatch stop method of claim 2, wherein the power source partitioning mechanism comprises: and carrying out multistage division on all the machines in the chip manufacturing process flow according to all power sources of an actual production factory.
4. The MES-based emergency dispatch stop method of claim 3, wherein the association between the plurality of machines comprises an upstream/downstream operation relationship between the plurality of machines belonging to different regions, different production management groups, different equipment management groups, and different process management groups.
5. The MES system-based emergency dispatch method of claim 4, wherein the waiting time between each two adjacent machines of the plurality of machines in the upstream and downstream operational relationship is not greater than a predetermined time threshold.
6. A stop dispatching device for specifying an equipment group in an emergency based on an MES system, characterized in that the stop dispatching device is applied to a control terminal with a display interface of the MES system, and comprises:
the system comprises a database establishing module, a chip manufacturing process control module and a chip management and control module, wherein the database establishing module is used for establishing a machine management and control relation database required in the chip manufacturing process flow in advance, and the machine management and control relation database comprises an affiliation of each machine after being classified according to a preset region management and control mechanism and/or a power source division mechanism and an association relation among a plurality of machines;
the management and control machine management module is used for determining all machines required to stop dispatching of the emergency abnormal instruction according to the emergency abnormal instruction and the machine management and control relational database when the MES system detects the emergency abnormal instruction, and displaying the determined all machines on a display interface of the control terminal;
and the dispatching stopping instruction issuing module is used for sending a dispatching stopping instruction to the control terminal by utilizing the instruction issuing module of the MES system so as to stop all machines displayed on the display interface through the single dispatching stopping instruction.
7. The MES system-based emergency stop dispatch device of claim 6, wherein the emergency exception instruction comprises an area where an emergency exception condition occurs and a process involved in the occurred emergency exception condition; the preset area management and control mechanism comprises: and classifying all the machines in the chip manufacturing process flow according to the region, the production management group, the equipment management group and the process management group according to different emergency abnormal instructions, wherein the region is included in the emergency abnormal instruction, the process management group to which the process related to the emergency abnormal condition belongs, the production management group determined by the process management group and the equipment management group determined by the production management group.
8. The MES system-based emergency stop dispatch device of claim 7, wherein the power source partitioning mechanism comprises: and carrying out multistage division on all the machines in the chip manufacturing process flow according to all power sources of an actual production factory.
9. The MES system-based emergency stop dispatching apparatus of claim 8, wherein the association between the plurality of tools comprises an upstream and downstream operation relationship between the plurality of tools belonging to different regions, different production management groups, different equipment management groups, and different process management groups.
10. An electronic device is characterized by comprising a processor, a communication interface, a memory and a communication bus, wherein the processor and the communication interface are used for realizing mutual communication by the memory through the communication bus;
a memory for storing a computer program;
a processor for implementing the method steps of any one of claims 1 to 5 when executing a program stored in the memory.
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| CN117236822A (en) * | 2023-11-10 | 2023-12-15 | 合肥晶合集成电路股份有限公司 | Intelligent goods delivery method, device, equipment and medium |
| CN117236822B (en) * | 2023-11-10 | 2024-01-30 | 合肥晶合集成电路股份有限公司 | Intelligent goods delivery method, device, equipment and medium |
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