CN115542670A - Photoresist supply device - Google Patents
Photoresist supply device Download PDFInfo
- Publication number
- CN115542670A CN115542670A CN202211084292.2A CN202211084292A CN115542670A CN 115542670 A CN115542670 A CN 115542670A CN 202211084292 A CN202211084292 A CN 202211084292A CN 115542670 A CN115542670 A CN 115542670A
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- China
- Prior art keywords
- glue
- photoresist
- supply
- bottle
- bottles
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- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 75
- 239000003292 glue Substances 0.000 claims abstract description 72
- 238000006243 chemical reaction Methods 0.000 claims abstract description 19
- 230000009471 action Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 abstract description 8
- 238000000034 method Methods 0.000 abstract description 5
- 238000004026 adhesive bonding Methods 0.000 abstract description 4
- 230000008569 process Effects 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000007480 spreading Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Coating Apparatus (AREA)
Abstract
The invention belongs to the technical field of semiconductor gluing and developing, and particularly relates to a photoresist supply device which comprises at least two groups of glue supply bottles, a glue empty sensor, a front-end cache bottle and a conversion device; the invention is provided with at least two groups of glue supply bottles, and a glue empty sensor and a buffer device are configured for the glue supply bottles; and when the photoresist amount in a certain group of the photoresist supply bottles is detected to be insufficient, the switching of the photoresist supply bottles is carried out, and the normal supply of the photoresist to the wafer is ensured. The invention can prevent the machine from stopping due to the fact that the photoresist is not replaced in time after being empty, prevent wafers from being excessively baked in the machine to influence a batch of wafers when the machine stops for too long time, and improve the process yield.
Description
Technical Field
The invention belongs to the technical field of semiconductor gluing and developing, and particularly relates to a photoresist supply device.
Background
The paste developer mainly includes a paste/develop unit, a cold/hot plate, and the like. The glue spreading unit functions to uniformly coat the photoresist layer on the wafer surface, so that the uninterrupted supply of the photoresist is particularly important.
The conventional photoresist supply technology is that one bottle of photoresist is supplied by one PR (photoresist nozzle), the photoresist is pumped out from a bottle of photoresist and comes to le tank → PR pump → filter → PR (photoresist nozzle), an empty sensor is arranged between the bottle of photoresist and the le tank, after the empty sensor senses that the photoresist is empty, an empty signal is transmitted to a machine station, the machine station generates a PR empty stop alarm, if the photoresist is not replaced in time, the gluing unit stops working, and an ARM (ARM) stays in the gluing unit, so that other wafers are not taken out in time to generate excessive baking, and the process is poor.
Disclosure of Invention
In view of the above, the present invention provides a photoresist supply apparatus, which is provided with at least two sets of supply glue bottles, and a glue empty sensor and a buffer device are configured for the supply glue bottles; and when the photoresist amount in a certain group of the photoresist supply bottles is detected to be insufficient, the switching of the photoresist supply bottles is carried out, and the normal supply of the photoresist to the wafer is ensured. The invention can prevent the machine station from stopping due to the fact that the photoresist is not replaced in time after being empty, prevent wafers from being excessively baked in the machine station to influence a batch of wafers when the machine station stops for too long time, and improve the process yield.
In order to achieve the technical purpose, the invention adopts the following specific technical scheme:
a photoresist supply apparatus comprising:
at least two groups of glue supply bottles;
a glue empty sensor for detecting the filling amount of the photoresist in the supply glue bottle;
at least two groups of front-end buffer bottles which are respectively communicated with the glue supply bottles based on inlets and are used for temporarily storing the photoresist;
and the conversion device is electrically connected with the glue empty sensor, and an inlet is communicated with each front-end cache bottle for selecting at least one front-end cache bottle to supply glue to the photoresist sprayer.
Further, the number of the glue empty sensors is one or more, and each of the glue empty sensors detects the filling amount of the photoresist in each of the supplied glue bottles.
Furthermore, a rear buffer bottle is arranged between the conversion device and the photoresist pump.
Further, the conversion apparatus includes:
the automatic supply panel is connected with each glue empty sensor and generates a switching signal when at least one glue supply bottle is empty;
the switching valve is provided with at least two groups of valve inlets and at least one group of valve outlets, the front-end cache bottles are respectively connected based on the valve inlets, and the outlets are communicated with the rear-end cache bottles
And the electromagnetic valve generates action based on the switching signal to drive the switching valve, so that the valve outlet is communicated with the valve inlet connected with the non-empty glue supply bottle.
Further, a photoresist pump and a filter are arranged between the conversion device and the photoresist nozzle; the filter is disposed downstream of the photoresist pump.
Further, a display part is arranged on the automatic supply panel; the display part is used for displaying the number of the glue supply bottle for supplying glue to the photoresist nozzle.
Further, an indicator lamp is provided on the display portion, and the display portion displays the number of the supply glue bottle supplying the glue to the photoresist nozzle based on the indicator lamp.
By adopting the technical scheme, the invention can also bring the following beneficial effects:
according to the invention, the front-end cache bottle and the rear-end cache bottle are arranged to cache a small amount of photoresist, so that the continuous supply of the photoresist can be further ensured;
the invention sets the electromagnetic valve to drive the switching valve to automatically switch the mode of supplying the photoresist bottle, thereby avoiding the reaction and operation time consumption of workers and further ensuring the continuous supply of the photoresist;
the display panel is arranged to display the number of the glue supply bottle for supplying the photoresist, so that an operator can conveniently and timely replace the glue supply bottle.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic diagram illustrating the operation of a photoresist supply apparatus according to an embodiment of the present invention;
wherein: 1. supplying a glue bottle; 2. a glue empty sensor; 3. a front-end buffer bottle; 4. automatically supplying a panel; 5. an electromagnetic valve; 6. a switching valve; 7. a photoresist pump; 8. a filter; 9. a photoresist nozzle; 10. and a rear buffer bottle.
Detailed Description
Embodiments of the present invention are described in detail below with reference to the accompanying drawings.
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. It is to be understood that the described embodiments are merely exemplary of the invention, and not restrictive of the full scope of the invention. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict. All other embodiments, which can be obtained by a person skilled in the art without inventive step based on the embodiments of the present invention, are within the scope of protection of the present invention.
It is noted that various aspects of the embodiments are described below within the scope of the appended claims. It should be apparent that the aspects described herein may be embodied in a wide variety of forms and that any specific structure and/or function described herein is merely illustrative. Based on the disclosure, one skilled in the art should appreciate that one aspect described herein may be implemented independently of any other aspects and that two or more of these aspects may be combined in various ways. For example, an apparatus may be implemented and/or a method practiced using any number of the aspects set forth herein. In addition, such an apparatus may be implemented and/or such a method may be practiced using other structure and/or functionality in addition to or other than one or more of the aspects set forth herein.
It should be noted that the drawings provided in the following embodiments are only for illustrating the basic idea of the present invention, and the drawings only show the components related to the present invention rather than the number, shape and size of the components in actual implementation, and the type, quantity and proportion of the components in actual implementation may be changed freely, and the layout of the components may be more complicated.
In addition, in the following description, specific details are provided to provide a thorough understanding of the examples. However, it will be understood by those skilled in the art that the aspects may be practiced without these specific details.
In one embodiment of the present invention, there is provided a photoresist supply apparatus, as shown in fig. 1, including:
at least two groups of supply glue bottles 1;
a glue empty sensor 2 for detecting the filling amount of the photoresist in the supply glue bottle 1;
at least two groups of front-end buffer bottles 3 which are respectively communicated with the photoresist supply bottle 1 based on inlets and are used for temporarily storing the photoresist;
and the conversion device is electrically connected with the glue empty sensor 2, and an inlet is communicated with each front-end cache bottle 3 for selecting at least one front-end cache bottle 3 to supply glue to the photoresist sprayer 9.
The number of the supply glue bottles 1 of the present embodiment is determined according to the usage rate of the photoresist and the stock of the supply glue bottles 1, and it is required to ensure that the standby supply glue bottles 1 are not placed too long while avoiding too fast replacement frequency. The glue bottle fixing component, the glue empty sensor 2 and the conversion device can be additionally arranged on the basis of the supply part of the original glue spreading and developing machine.
The empty sensor 2 of the present embodiment employs a photoelectric sensor for detecting the amount of the resist filled in the supply bottle 1, and when it is detected that the amount of the resist in the supply bottle 1 is insufficient or the bottle is empty, the switching device ensures the continuous supply of the resist based on the switching of the supply line.
In some embodiments, in order to reduce the logic difficulty of the automatic switching of the switching device, the glue empty sensors 2 are more than one group, and each glue empty sensor 2 detects the filling amount of the photoresist in each supply glue bottle 1.
The glue empty sensor 2 can be arranged for each glue supply bottle 1, the glue empty sensors 2 are communicated with the conversion device, the conversion device carries out supply conversion decision according to the detection electric signals of each glue empty sensor 2, and the circuit logic is simple.
In one embodiment, as shown in fig. 1, a back buffer bottle 10 is provided between the conversion device and the photoresist pump 7. According to the invention, the front-end cache bottle 3 and the rear-end cache bottle 10 are arranged to cache a small amount of photoresist, so that the continuous supply of the photoresist can be further ensured.
In one embodiment, as shown in fig. 1, the conversion apparatus includes:
an automatic supply panel 4 connected with each glue empty sensor 2 and generating a switching signal when at least one glue supply bottle 1 is empty;
the switching valve 6 is provided with at least two groups of valve inlets and at least one group of valve outlets, the front-end cache bottles 3 are respectively connected based on the valve inlets, and the outlets are communicated with the rear-end cache bottles;
and the electromagnetic valve 5 generates action based on the switching signal to drive the switching valve 6, so that the valve outlet is communicated with the valve inlet connected with the non-empty glue supply bottle 1.
According to the invention, the electromagnetic valve 5 is arranged to drive the switching valve 6 to automatically switch the mode of supplying the photoresist bottle 1, so that the photoresist bottle can automatically run without the reaction of workers and the time consumption of operation, and the continuous supply of the photoresist is further ensured.
In this embodiment, a photoresist pump 7 and a filter 8 are disposed between the conversion device and the photoresist nozzle 9; the filter 8 is disposed downstream of the photoresist pump 7.
In one embodiment, the automatic feeding panel 4 is provided with a display portion; the display unit displays the number of the supply bottle 1 for supplying the resist to the resist head 9.
In the embodiment, the empty glue sensors for detecting different glue bottles 1 are numbered, and the number information is input at the end of the execution logic of the automatic supply panel 4; the automatic supply panel 4 controls the electromagnetic valve 5 to switch the supply pipelines and simultaneously displays the information of the empty glue sensors according to the detection signals of the empty glue sensors with different numbers; display information includes, but is not limited to: the corresponding glue bottle 1 detected by the sensor is empty, and the corresponding glue bottle 1 detected by the sensor is supplying the photoresist to the photoresist nozzle 9.
In some embodiments, in order to more intuitively and simply display the supply condition, an indicator lamp is provided on the display part, and the display part displays the number of the supply glue bottle 1 supplying the glue to the photoresist head 9 based on the indicator lamp.
The above description is only for the specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (7)
1. A photoresist supply apparatus, comprising:
at least two groups of glue supply bottles;
a glue empty sensor for detecting the filling amount of the photoresist in the supply glue bottle;
at least two groups of front-end buffer bottles which are respectively communicated with the glue supply bottles based on inlets and are used for temporarily storing the photoresist;
and the conversion device is electrically connected with the glue empty sensor, and an inlet is communicated with each front-end cache bottle for selecting at least one front-end cache bottle to supply glue to the photoresist sprayer.
2. The apparatus according to claim 1, wherein the plurality of glue empty sensors are provided in a single set, and each of the glue empty sensors detects a filling amount of the resist in each of the glue bottles.
3. The photoresist feeder according to claim 1, wherein a back buffer bottle is disposed between the conversion device and the photoresist pump.
4. The photoresist supply apparatus of claim 3, wherein the conversion means comprises:
the automatic supply panel is connected with each glue empty sensor and generates a switching signal when at least one glue supply bottle is empty;
the switching valve is provided with at least two groups of valve inlets and at least one group of valve outlets, the front-end cache bottles are respectively connected based on the valve inlets, and the outlets are communicated with the rear-end cache bottles;
and the electromagnetic valve generates action based on the switching signal to drive the switching valve, so that the valve outlet is communicated with the valve inlet connected with the non-empty glue supply bottle.
5. The apparatus according to claim 4, wherein a photoresist pump and a filter are disposed between the conversion apparatus and the photoresist nozzle; the filter is disposed downstream of the photoresist pump.
6. The apparatus according to claim 4, wherein a display portion is provided on the auto feed panel; the display part is used for displaying the number of the supplied glue bottle supplying the glue to the photoresist nozzle.
7. The apparatus according to claim 6, wherein an indicator lamp is provided on the display unit, and the display unit displays the number of the supply bottle for supplying the resist to the resist head based on the indicator lamp.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211084292.2A CN115542670A (en) | 2022-09-06 | 2022-09-06 | Photoresist supply device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211084292.2A CN115542670A (en) | 2022-09-06 | 2022-09-06 | Photoresist supply device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115542670A true CN115542670A (en) | 2022-12-30 |
Family
ID=84725982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211084292.2A Pending CN115542670A (en) | 2022-09-06 | 2022-09-06 | Photoresist supply device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115542670A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040002773A1 (en) * | 2002-06-26 | 2004-01-01 | Taiwan Semiconductor Manufacturing Co., Ltd. | Photoresist system |
| US20040159400A1 (en) * | 2003-02-07 | 2004-08-19 | Kwang-Il Kim | Photoresist supply apparatus for preventing photoresist loss through drain line |
| CN213122595U (en) * | 2020-09-08 | 2021-05-04 | 上海众鸿电子科技有限公司 | Chemical liquid feeding system of gluing developing machine |
| CN114273158A (en) * | 2021-12-16 | 2022-04-05 | 沈阳芯源微电子设备股份有限公司 | Glue supplementing device capable of automatically switching double glue bottles and glue supplementing method thereof |
| CN114859660A (en) * | 2021-02-03 | 2022-08-05 | 宁波润华全芯微电子设备有限公司 | Detection method for automatically replacing photoresist |
-
2022
- 2022-09-06 CN CN202211084292.2A patent/CN115542670A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040002773A1 (en) * | 2002-06-26 | 2004-01-01 | Taiwan Semiconductor Manufacturing Co., Ltd. | Photoresist system |
| US20040159400A1 (en) * | 2003-02-07 | 2004-08-19 | Kwang-Il Kim | Photoresist supply apparatus for preventing photoresist loss through drain line |
| CN213122595U (en) * | 2020-09-08 | 2021-05-04 | 上海众鸿电子科技有限公司 | Chemical liquid feeding system of gluing developing machine |
| CN114859660A (en) * | 2021-02-03 | 2022-08-05 | 宁波润华全芯微电子设备有限公司 | Detection method for automatically replacing photoresist |
| CN114273158A (en) * | 2021-12-16 | 2022-04-05 | 沈阳芯源微电子设备股份有限公司 | Glue supplementing device capable of automatically switching double glue bottles and glue supplementing method thereof |
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