CN115541628A - Large-view-field ultrahigh-spatial-resolution X-ray sub-microscopic imaging device and imaging method - Google Patents
Large-view-field ultrahigh-spatial-resolution X-ray sub-microscopic imaging device and imaging method Download PDFInfo
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Abstract
The invention discloses a large-view-field ultrahigh-spatial-resolution X-ray sub-microscopic imaging device, which mainly comprises: the device comprises a square-hole microchannel plate, an X-ray imaging detector, an optical theodolite and a half-reflecting and half-transmitting mirror. The X-ray micro focus to be detected is placed on the inner side of the spherical square hole array structure of the square hole micro channel plate, the X-ray detector is placed on the outer side of the spherical square hole array structure of the square hole micro channel plate, and the centers of the X-ray micro focus to be detected, the X-ray detector and the square hole array structure are located on the same X-ray optical axis. The optical theodolite and the half-reflecting and half-transmitting mirror are positioned on one side of an X-ray optical axis and used for measuring an object distance S and an image distance F. The sub-microscopic imaging method comprises the following steps: equipment assembly, object distance and image distance adjustment and X-ray microscopic imaging. The device and the method of the invention combine the micro-channel X-ray optics and the geometric spherical imaging optics to realize the micro-amplification of the micro-focus signals and images of the X-ray to be detected, can accurately obtain the high-definition sub-microscopic imaging precision information and results of the object, and have wide application prospect in the X-ray sub-microscopic imaging.
Description
Technical Field
The invention belongs to the field of X-ray imaging, and particularly relates to a large-field ultrahigh-spatial-resolution X-ray sub-microscopic imaging device and a large-field ultrahigh-spatial-resolution X-ray sub-microscopic imaging method based on the device.
Background
Over the years, a variety of X-ray imaging techniques have been developed. For example, an X-ray contact imaging technique, an X-ray scanning imaging technique, an X-ray grating imaging technique, an X-ray-like coaxial imaging technique (X-ray holography), an X-ray diffraction enhancement technique, an X-ray interferometry imaging technique, an X-ray CT technique, and the like. Spatial resolution is the most important indicator in determining the sharpness of an image. However, the spatial resolution of these imaging techniques is low, typically up to microns depending on the resolution of the detector or recording medium. Since the discovery of X-rays for over 100 years, improving the resolution of X-ray sub-microscopes has been an important goal pursued by X-ray sub-microscopy researchers.
However, due to the lack of high-resolution imaging optical elements with excellent performance, the potential of high-resolution imaging of X-rays cannot be exerted for a long time, and accurate X-ray imaging cannot be realized in the aspects of nuclear fission, nuclear fusion simulation experiments and other super-resolution requirements. At present, the mainstream microscopic imaging system is high-resolution X-ray sub-microscopy based on a zone plate, but the problems exist in two aspects, on one hand, the diffraction efficiency of X-rays is low, and an X-ray tube with low brightness is not enough to generate a strong enough large-angle diffraction signal carrying high-resolution information; on the other hand, accurate radiation focusing cannot be experimentally achieved in the absence of appropriate optical elements.
Therefore, it is highly desirable to design an X-ray sub-microscopic imaging apparatus with a large field of view and an ultra-high spatial resolution to realize X-ray sub-microscopic imaging.
Disclosure of Invention
In order to achieve the purpose, the invention provides a high-resolution X-ray sub-microscopic imaging device based on a square-hole microchannel plate, which combines microchannel X-ray optics and spherical geometric optics to realize the amplification of a microfocus and improve the spatial resolution, and provides a new technical means for an X-ray sub-microscopic imaging system.
A large-field-of-view ultrahigh-spatial-resolution X-ray sub-microscopic imaging device comprises: a square-hole microchannel plate and an X-ray imaging detector; the square-hole micro-channel plate is of a spherical square-hole array structure, and the X-ray imaging detector is coaxial with the center of the spherical square-hole array structure and is located on the outer side of the sphere.
Optionally, the spherical curvature radius of the square-hole micro-channel is 100 mm-2000 mm, the size of the square hole is 1 μm-10 μm, and the thickness of the hole wall is 0.1 μm-2 μm.
Optionally, the X-ray imaging detector may be a CCD type X-ray imaging detector, and the size of a single pixel is 1 μm to 5 μm, so as to improve the imaging resolution of the imaging apparatus.
Optionally, the large-field ultrahigh-spatial-resolution X-ray sub-microscopic imaging device further includes an optical theodolite and a half-reflecting half-transmitting mirror; the half-reflecting and half-transmitting mirror and the optical theodolite are placed at the center of the square-hole distance microchannel plate and on one side of a connecting line of the X-ray imaging detector together and are used for measuring the image distance and the object distance of the large-field ultrahigh-spatial-resolution X-ray sub-microscopic imaging device.
An X-ray sub-microscopic imaging method with large field of view and ultrahigh spatial resolution is based on an X-ray sub-microscopic imaging device with large field of view and ultrahigh spatial resolution; the imaging steps are as follows:
s10, sequentially arranging an X-ray microfocus to be detected, the center of a square-hole microchannel plate and an X-ray imaging detector on the same straight line, constructing an X-ray optical axis, and requiring that the X-ray imaging detector is positioned on the outer side of the spherical surface of the square-hole microchannel plate; arranging an optical theodolite and a half-reflecting and half-transmitting mirror on one side of an X-ray optical axis, wherein a visible optical axis in the half-reflecting and half-transmitting mirror is required to be vertical to the X-ray optical axis;
s20, adjusting an object distance S and an image distance F according to an imaging condition, wherein the object distance S is the distance between an X-ray microfocus point to be detected and a square-hole microchannel plate, and the image distance F is the distance between the square-hole microchannel plate and an X-ray imaging detector;
and S30, after the object distance S and the image distance F are adjusted, the X-ray imaging detector completes imaging of the X-ray microfocus to be measured, and measurement is completed.
Optionally, the diameter of a focal spot of a light source of the X-ray microfocus to be detected is smaller than 10 μm, and the energy range of the X-ray is 1keV to 20keV.
Optionally, the object distance S should satisfy that the transmission of the X-ray emitted from the X-ray microfocus to be measured on the inner wall of the square hole satisfies total reflection.
Optionally, the object distance S is: s is more than 0 and less than R/2, and the image distance F is; f = RS/(R-2S), wherein R is the spherical curvature radius of the square-hole microchannel plate.
Optionally, the magnification MF of the large-field ultrahigh-spatial-resolution X-ray sub-microscopic imaging method is: F/S.
The sub-microscopic imaging device and the imaging method have the following beneficial effects: (1) By combining micro-channel X-ray optics and geometric spherical imaging optics, X-ray sub-microscopic imaging can be realized; (2) The device has strong anti-interference performance, large dynamic range, simple equipment structure and clear image imaging of high resolution at submicron level, is beneficial to image analysis and can quickly realize measurement of a signal to be measured.
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The drawings are not intended to be drawn to scale. In the drawings, each identical or nearly identical component that is illustrated in various figures may be represented by a like numeral. For purposes of clarity, not every component may be labeled in every drawing. Embodiments of various aspects of the present invention will now be described, by way of example, with reference to the accompanying drawings, in which:
FIG. 1 is a schematic diagram of a large-field ultrahigh-spatial-resolution X-ray sub-microscopic imaging device according to the present invention;
FIG. 2 is a schematic view of a square-hole microchannel plate according to the present invention;
FIG. 3 is a schematic diagram of the total reflection of X-rays in a microchannel plate 1 according to the present invention;
FIG. 4 is a schematic diagram of the total reflection of X-rays in a microchannel plate 2 according to the present invention;
FIG. 5 is an image of a micro-focus of X-rays to be measured according to the present invention;
FIG. 6 is a magnified image collected by the X-ray detector of the present invention;
in the figure: 1. the X-ray detection device comprises an X-ray microfocus to be detected, 2 a square-hole microchannel plate, 3.X-ray detectors, 4 an optical theodolite, 5 a half-reflecting and half-transmitting mirror, 6X-rays emitted by the X-ray microfocus to be detected, 7.X-rays collected by the X-ray detectors, 8 a visible optical axis and 9.X-ray optical axes.
Detailed Description
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creating any labor.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the following detailed description and fig. 1 to 6.
Example 1
In order to better understand the technical content of the present invention, specific embodiments are described below with reference to the accompanying drawings.
In this disclosure, aspects of the present invention are described with reference to the accompanying drawings, in which a number of illustrative embodiments are shown. Embodiments of the present disclosure are not necessarily intended to include all aspects of the invention. It should be appreciated that the various concepts and embodiments described above, as well as those described in greater detail below, may be implemented in any of numerous ways, as the disclosed concepts and embodiments are not limited to any one implementation. In addition, some aspects of the present disclosure may be used alone, or in any suitable combination with other aspects of the present disclosure.
Fig. 1 is a schematic diagram of a large-field ultrahigh-spatial-resolution X-ray sub-microscopic imaging device according to the present invention. The invention discloses a large-view-field ultrahigh-spatial-resolution X-ray sub-microscopic imaging device which mainly comprises: square-hole microchannel plate 2 and X-ray imaging detector 3. The square-hole micro-channel plate is designed into a spherical square-hole array structure, and imaging without aberration can be realized. The radius of curvature of the spherical surface is 100mm to 2000mm, and the radius of curvature in this embodiment is 600mm. The whole spherical square hole array structure is shown in fig. 2 and comprises n × n square holes. The size of each square hole is 1-10 μm, the thickness of the hole wall is 0.1-2 μm, the size of the square hole is 2 μm, the thickness of the hole wall is 1 μm, and the overall size of the square-hole microchannel plate 2 is 42.5mm × 42.5mm. In order to improve the imaging resolution of the imaging device, the size of a single pixel of the X-ray imaging detector 3 is 1 μm to 5 μm, in this embodiment, the X-ray imaging detector 3 is a CCD type X-ray imaging detector CCD imaging detector, the size of the pixel is 1 μm, and the size of the pixel of the detector is 3000 × 3000.
Wherein the X-ray microfocus 1 to be detected is positioned at the inner side of the spherical structure of the square-hole microchannel plate 2, and the X-ray microfocus 1 to be detected, the center of the square-hole microchannel plate 2 and the X-ray imaging detector 3 are arranged on the same straight line to form an X-ray optical axis 9.
In order to conveniently adjust the object distance S and the image distance F in the imaging process, the large-view-field ultrahigh-spatial-resolution X-ray sub-microscopic imaging device further comprises an optical theodolite 4 and a half-reflecting and half-transmitting mirror 5; the optical theodolite 4 and the half-reflecting and half-transmitting mirror 5 are placed at the center of the square-hole distance microchannel plate and on the side of a connecting line of the X-ray imaging detector, namely on the side of an X-ray optical axis 9.
The steps for performing sub-microscopic imaging are as follows:
s10, sequentially arranging an X-ray microfocus 1 to be detected, the center of a square-hole microchannel plate 2 and an X-ray imaging detector 3 on the same straight line to construct an X-ray optical axis, wherein the X-ray imaging detector 3 is required to be positioned on the outer side of the spherical surface of the square-hole microchannel plate 2; arranging the optical theodolite 4 and the half-reflecting and half-transmitting mirror 5 on one side of an X-ray optical axis, wherein a visible optical axis in the half-reflecting and half-transmitting mirror 5 is required to be vertical to the X-ray optical axis;
s20, adjusting an object distance S and an image distance F according to an imaging condition, wherein the object distance S is the distance between an X-ray microfocus 1 to be detected and a square-hole microchannel plate 2, and the image distance F is the distance between the square-hole microchannel plate 2 and an X-ray imaging detector 3;
and S30, after the object distance S and the image distance F are adjusted, the X-ray imaging detector 3 completes imaging of the X-ray microfocus 1 to be measured, and measurement is completed.
The whole measurement process comprises the following steps: x-ray rays 6 emitted by a light source of the X-ray microfocus 1 to be detected pass through the spherical array structure in the microchannel plate 2, as shown in figures 3 and 4, grazing total reflection of the X-ray rays 6 in square holes in the spherical array structure is realized, and X-ray rays 7 after reflection are collected by the X-ray detector 3, so that X-ray imaging is realized. That is, the object distance S should satisfy the requirement that the transmission of the X-ray emitted from the X-ray microfocus 1 to be measured on the inner wall of the square hole satisfies the total reflection. The range of the object distance S is as follows: s is more than 0 and less than R/2, the image distance F is; f = RS/(R-2S), wherein R is the spherical curvature radius of the square-hole microchannel plate. The magnification MF of the large-field ultrahigh-spatial-resolution X-ray sub-microscopic imaging device or the imaging method is as follows: F/S.
In order to show the microscopic imaging effect of the device and facilitate the identification and comparison of subsequent image amplification, an irregular X-ray microfocus 1 to be detected is adopted, and as shown in figure 5, the minimum size of the X-ray microfocus 1 to be detected is 1pixel and 300nm. The half-reflecting and half-transmitting mirror 5 is placed 300mm away from the square-hole micro-channel plate and 500mm below the X-ray optical axis. The optical theodolite is placed at a distance of 200mm from the semi-reflecting and semi-transmitting mirror and used for testing the object distance and the image distance. The X-ray microfocus 1 to be detected is placed at a distance of 273.5mm from the square-hole microchannel plate 2 and used for emitting X-rays, wherein 273.5mm is an object distance S, and the X-rays are X-rays 6 emitted by the X-ray microfocus to be detected. The X-ray detector 3 is placed at the position 3343mm outside the spherical surface of the square-hole microchannel plate 2 and used for collecting X-rays, wherein 3343mm is the image distance 3343mm, and the collected X-rays are the X-rays 7 collected by the X-ray detector. Fig. 6 is the result of microscopic imaging. As can be seen from the figure, the X-ray signal of the X-ray microfocus 1 to be detected is clear in imaging of the minimum size 1pixel and 300nm, pixel resolution superior to 500nm is achieved, and the X-ray microfocus device has wide application prospect in the field of future X-ray microscopic imaging.
In order to exert the advantages of the device, the diameter of a light source focal spot of the X-ray microfocus 1 to be detected is smaller than 10 mu m, the energy range of the X-ray is 1 keV-20 keV, and the phenomenon that the X-ray penetrates through a square-hole microchannel material due to overlarge energy is avoided; too small will produce higher order reflections and microscopic imaging will produce imaging blur.
Although the invention has been described with reference to preferred embodiments, it is not intended to be limited thereto. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the protection scope of the present invention should be determined by the appended claims.
Claims (9)
1. The large-field-of-view ultrahigh-spatial-resolution X-ray sub-microscopic imaging device is characterized by comprising: a square-hole microchannel plate and an X-ray imaging detector; the square-hole micro-channel plate is of a spherical square-hole array structure, and the X-ray imaging detector is coaxial with the center of the spherical square-hole array structure and is positioned on the outer side of the sphere.
2. The large-field ultrahigh-spatial-resolution X-ray sub-microscopic imaging device according to claim 1, wherein the spherical curvature radius of the square-hole microchannel is 100mm to 2000mm, the size of the square hole is 1 μm to 10 μm, and the thickness of the hole wall is 0.1 μm to 2 μm.
3. The large-field ultrahigh-spatial-resolution X-ray sub-microscopic imaging device according to claim 1, wherein the X-ray imaging detector can be a CCD type X-ray imaging detector, and the size of a single pixel is 1 μm to 5 μm for improving the imaging resolution of the imaging device.
4. The large-field ultrahigh-spatial-resolution X-ray sub-microscopic imaging device according to claim 1, wherein the large-field ultrahigh-spatial-resolution X-ray sub-microscopic imaging device further comprises an optical theodolite and a semi-reflecting and semi-transmitting mirror; the half-reflecting and half-transmitting mirror and the optical theodolite are placed at the center of the square-hole distance microchannel plate and on one side of a connecting line of the X-ray imaging detector together and are used for measuring the image distance and the object distance of the large-field ultrahigh-spatial-resolution X-ray sub-microscopic imaging device.
5. The large-field ultrahigh-spatial-resolution X-ray sub-microscopic imaging method based on the large-field ultrahigh-spatial-resolution X-ray sub-microscopic imaging device of claim 1, 2, 3 or 4 comprises the following steps:
s10, sequentially arranging an X-ray microfocus to be detected, the center of a square-hole microchannel plate and an X-ray imaging detector on the same straight line, constructing an X-ray optical axis, and requiring that the X-ray imaging detector is positioned on the outer side of the spherical surface of the square-hole microchannel plate; arranging an optical theodolite and a half-reflecting and half-transmitting mirror on one side of an X-ray optical axis, wherein a visible optical axis in the half-reflecting and half-transmitting mirror is required to be vertical to the X-ray optical axis;
s20, adjusting an object distance S and an image distance F according to an imaging condition, wherein the object distance S is the distance between an X-ray microfocus point to be detected and a square-hole microchannel plate, and the image distance F is the distance between the square-hole microchannel plate and an X-ray imaging detector;
and S30, after the object distance S and the image distance F are adjusted, the X-ray imaging detector completes imaging of the X-ray microfocus to be measured, and measurement is completed.
6. The large-field ultrahigh-spatial-resolution X-ray sub-microscopic imaging method according to claim 5, wherein a light source focal spot diameter of the X-ray microfocus to be measured is less than 10 μm, and an X-ray energy range is 1keV to 20keV.
7. The large-field ultrahigh-spatial-resolution X-ray sub-microscopic imaging method according to claim 5, wherein the object distance S is such that transmission of X-rays emitted from the X-ray microfocus to be measured on the inner wall of the square hole satisfies total reflection.
8. The large-field ultrahigh-spatial-resolution X-ray sub-microscopic imaging method according to claim 5, wherein the object distance S is: s is more than 0 and less than R/2, and the image distance F is; f = RS/(R-2S), wherein R is the spherical curvature radius of the square-hole microchannel plate.
9. The large-field ultrahigh-spatial-resolution X-ray sub-microscopic imaging method according to claim 5, wherein the magnification MF of the large-field ultrahigh-spatial-resolution X-ray sub-microscopic imaging method is: F/S.
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| CN106970094A (en) * | 2016-09-28 | 2017-07-21 | 北方夜视技术股份有限公司 | X-ray back scattering imaging safety check apparatus based on micropore optical element |
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| CN106970094A (en) * | 2016-09-28 | 2017-07-21 | 北方夜视技术股份有限公司 | X-ray back scattering imaging safety check apparatus based on micropore optical element |
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| Title |
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| 金戈 等: "Angel型龙虾眼X射线光学器件的研制及性能测试", 光学学报, vol. 41, no. 06, 25 March 2021 (2021-03-25), pages 220 - 226 * |
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