CN115537735B - Real-time supervision's vacuum evaporation equipment - Google Patents
Real-time supervision's vacuum evaporation equipment Download PDFInfo
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- CN115537735B CN115537735B CN202211086364.7A CN202211086364A CN115537735B CN 115537735 B CN115537735 B CN 115537735B CN 202211086364 A CN202211086364 A CN 202211086364A CN 115537735 B CN115537735 B CN 115537735B
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- fixedly connected
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- evaporation
- turnover
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- 238000007738 vacuum evaporation Methods 0.000 title claims abstract description 14
- 238000001704 evaporation Methods 0.000 claims abstract description 59
- 230000008020 evaporation Effects 0.000 claims abstract description 59
- 238000005485 electric heating Methods 0.000 claims abstract description 26
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 238000000429 assembly Methods 0.000 claims abstract description 10
- 230000000712 assembly Effects 0.000 claims abstract description 10
- 238000012544 monitoring process Methods 0.000 claims abstract description 10
- 238000005086 pumping Methods 0.000 claims abstract description 7
- 230000006835 compression Effects 0.000 claims abstract description 6
- 238000007906 compression Methods 0.000 claims abstract description 6
- 230000007306 turnover Effects 0.000 claims description 33
- 230000007704 transition Effects 0.000 claims description 25
- 238000007789 sealing Methods 0.000 claims description 12
- 230000005540 biological transmission Effects 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 239000002699 waste material Substances 0.000 abstract description 5
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 5
- 235000017491 Bambusa tulda Nutrition 0.000 description 5
- 241001330002 Bambuseae Species 0.000 description 5
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 5
- 239000011425 bamboo Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000007747 plating Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention relates to the technical field of evaporation, and particularly discloses a vacuum evaporation device for real-time monitoring, which comprises a tank body and a tank cover, wherein two compression assemblies are arranged between the tank body and the tank cover, a plurality of electric heating rods are arranged on the inner wall of the tank body in an array manner, an evaporation source placement assembly is movably sleeved outside the electric heating rods, and a substrate placement assembly is arranged on the inner wall of the top of the tank cover; the vacuum pumping assemblies are arranged on two sides of the outer wall of the tank body, and a supporting plate fixedly connected with the outer wall of the tank body is arranged above the vacuum pumping assemblies; and the adjusting driving assembly is arranged on one side of the vacuumizing assembly and is connected with the supporting plate. The invention not only is convenient for monitoring the progress of evaporation in real time, but also ensures the quality of evaporation, and the evaporation source is isolated after the evaporation is finished, thereby reducing the evaporation waste.
Description
Technical Field
The invention relates to the technical field of evaporation, in particular to a vacuum evaporation device for real-time monitoring.
Background
Vacuum evaporation, abbreviated as evaporation, refers to a process method that a certain heating evaporation mode is adopted to evaporate and gasify a coating material (or called a film material) under a vacuum condition, and particles fly to the surface of a substrate to form a film by condensation; vapor deposition is a vapor deposition technology with earlier use and wider application, and has the advantages of simple film forming method, high purity and compactness of the film, unique film structure and performance, and the like.
The existing vacuum evaporation equipment mainly comprises an evaporation source, a substrate and a heating element, the evaporation source is heated by the heating element to evaporate the substrate and then is condensed on the substrate, the heating element is generally arranged at the bottom of the evaporation source, the installation position of the evaporation source is kept unchanged, however, when the evaporation in a cavity is avoided in vacuum, the difference exists between the temperature of the inner wall of the cavity and the temperature of the middle of the cavity, so that the difference exists in molecular thermal motion, and the difference exists in the molecular thermal motion, so that the evaporation source has the deviation in evaporation speed and uniformity, the evaporation quantity of the edge part of the substrate is easily caused to be smaller than the evaporation quantity close to the middle part, and after the evaporation is finished, the evaporation source cannot dissipate heat in time, so that the evaporation source can work for a period of time easily and excessively evaporate to cause waste.
Disclosure of Invention
The invention provides a real-time monitoring vacuum evaporation device, which solves the problems that the existing substrate edge part is uneven in evaporation and the evaporation source continues to evaporate after the evaporation is finished.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
The vacuum evaporation equipment comprises a tank body and a tank cover, wherein two pressing assemblies are arranged between the tank body and the tank cover, a plurality of electric heating rods are arranged on the inner wall array of the tank body, an evaporation source placing assembly is movably sleeved outside the electric heating rods, and a substrate placing assembly is arranged on the inner wall of the top of the tank cover;
The vacuum pumping assemblies are arranged on two sides of the outer wall of the tank body, and a supporting plate fixedly connected with the outer wall of the tank body is arranged above the vacuum pumping assemblies;
And the adjusting driving assembly is arranged on one side of the vacuumizing assembly and is connected with the supporting plate.
Preferably, the compacting component comprises a rotating plate which is arranged on the outer wall of the tank body in a rotating mode, a bolt is sleeved on the rotating plate in a threaded mode, and an extruding plate is arranged at the bottom end of the bolt in a rotating mode.
Preferably, the evaporation source placement component comprises a movable seat movably sleeved outside the electric heating rod, one side of the movable seat is fixedly connected with a movable disc, a turnover disc is arranged in the movable disc in a rotating mode, two electromagnets are fixedly connected to the top and the bottom of the turnover disc, guide rods are fixedly connected to the two sides of the electromagnets, clamping plates are movably sleeved outside the guide rods, springs sleeved outside the guide rods are connected between the clamping plates and the electromagnets, and a second gear is fixedly connected to one side of the turnover disc along the rotation axis.
Preferably, the substrate placement component comprises two vertical rods fixedly connected to the inner wall of the top of the tank cover, the bottom ends of the vertical rods are fixedly connected with a top plate, the top of the top plate is fixedly connected with an electronic balance, the top end of the electronic balance is fixedly connected with a pressing plate, and two sides of the bottom of the pressing plate are fixedly connected with substrate supporting plates; the electronic balance scale can be particularly used, a high-precision laboratory balance can be used for expanding the accuracy to 4-5 decimal places on a display screen of the precision balance, the increment is 0.0001g-0.00001 (0.1 mg-0.01 mg), the electronic precision balance of the Guarson brand is used, the model is FA2204, and the electronic balance scale is arranged in a tank body, so that the air flow interference is reduced under the vacuum condition, is more suitable for precision measurement, and does not directly contact an evaporation source and does not cause interference and influence on the electronic balance scale.
Preferably, the evacuation subassembly includes the movable sleeve establishes the transition section of thick bamboo in jar body both sides, the inside movable sleeve of transition section of thick bamboo is equipped with sealed piston, one side fixedly connected with of sealed piston runs through the piston rod of transition section of thick bamboo, the one end fixedly connected with baffle of sealed piston is kept away from to the piston rod, one side of baffle be equipped with jar outer wall fixed connection's gag lever post, the bottom fixedly connected with of transition section of thick bamboo communicates with it the exhaust tube, the fixed aspiration pump that is equipped with in centre of exhaust tube, the output shaft extension fixedly connected with first bevel gear of aspiration pump, one side that the exhaust tube is close to transition section of thick bamboo is equipped with the solenoid valve.
Preferably, the adjusting drive assembly comprises a push rod motor hinged on a supporting plate, an output shaft of the push rod motor is fixedly connected with a push-pull ring, the push-pull ring is movably sleeved outside the exhaust pipe, two positioning plates are fixedly connected between the supporting plates, a first rotating shaft is sleeved on the inner movable sleeve of each positioning plate, one end of each first rotating shaft is fixedly connected with a second bevel gear, the second bevel gears are meshed with the first bevel gears for transmission, a second rotating shaft is arranged on the tank body in a rotating mode, one end of each second rotating shaft extending into the tank body is fixedly connected with a first gear, each second rotating shaft and each first rotating shaft are fixedly connected with a belt pulley, and the outer sleeves of the belt pulleys are provided with belts.
Preferably, a poking rod is fixedly connected to the inner wall of one side of the transition cylinder, and the sealing piston is movably sleeved outside the poking rod.
Preferably, the movable plate is provided with a turnover hole, the inside of the turnover hole is rotationally provided with a turnover shaft, the turnover plate is movably sleeved outside the turnover shaft, and the second gear is fixedly connected with the turnover shaft.
Preferably, a guide cover fixedly connected with the inner wall of the tank body is arranged above the electric heating rod.
Compared with the prior art, the invention has the beneficial effects that:
1. According to the invention, the tank cover and the tank body are conveniently and rapidly sealed together by installing the compression assembly, so that the subsequent vacuumizing is convenient;
2. According to the invention, the substrate placement component is installed, and the evaporation weight change of the substrate can be monitored in real time through the electronic balance on the substrate placement component, so that a worker can conveniently judge the evaporation process;
3. According to the invention, the evaporation source placement assembly and the electric heating rods are arranged, so that the evaporation source placement assembly can slowly and uniformly slide down along the electric heating rods, and molecules can perform thermal motion on one side close to the inner wall of the tank body when the plurality of electric heating rods arranged on the inner wall of the tank body are used for evaporation conveniently, thereby facilitating uniform evaporation on the edge of a substrate and ensuring the quality of evaporation;
4. According to the invention, the vacuumizing assembly and the evaporation source placing assembly are arranged, and the vacuumizing assembly can drive the evaporation source placing assembly which falls down to turn over, so that the evaporation source is isolated from the upper temperature, and the waste of the evaporation source is reduced;
To sum up, this scheme simple structure, novel in design not only makes things convenient for the progress of real-time supervision evaporation plating, but also guarantees the quality of evaporation plating, keeps apart the evaporation source after the evaporation plating is accomplished moreover, reduces the evaporation extravagant.
Drawings
FIG. 1 is a schematic diagram of a front view of the present invention;
FIG. 2 is a schematic side view of the present invention;
FIG. 3 is a schematic cross-sectional view of the present invention;
FIG. 4 is a schematic top view of the present invention;
FIG. 5 is a schematic perspective view of the present invention;
FIG. 6 is a perspective view of the present invention;
fig. 7 is a schematic view of a partially cut-away perspective structure according to the present invention.
In the figure: the novel electronic balance comprises a tank body 1, a tank cover 2, a rotating plate 3, a bolt 4, a squeezing plate 5, a supporting plate 6, a limiting rod 7, a transition cylinder 8, a piston rod 9, a baffle plate 10, an exhaust pipe 11, an exhaust pump 12, a first bevel gear 13, a push rod motor 14, a push pull ring 15, a positioning plate 16, a first rotating shaft 17, a second bevel gear 18, a second rotating shaft 19, a first gear 20, a belt pulley 21, a belt 22, a vertical rod 23, a top plate 24, an electronic balance 25, a pressing plate 26, a supporting plate 27, an electric heating rod 28, a movable disc 29, a rotating disc 30, an electromagnet 31, a guide rod 32, a clamping plate 34, a spring 35, a second gear 36 and a guide cover.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments.
Referring to fig. 1-7, a vacuum evaporation device for real-time monitoring comprises a tank body 1 and a tank cover 2, wherein two compression assemblies are arranged between the tank body 1 and the tank cover 2, a plurality of electric heating rods 28 are arranged on an inner wall array of the tank body 1, an evaporation source placement assembly is movably sleeved outside the electric heating rods 28, and a substrate placement assembly is arranged on the inner wall of the top of the tank cover 2;
The vacuumizing components are arranged on two sides of the outer wall of the tank body 1, and a supporting plate 6 fixedly connected with the outer wall of the tank body 1 is arranged above the vacuumizing components;
And the adjusting driving assembly is arranged on one side of the vacuumizing assembly and is connected with the supporting plate 6.
As shown in fig. 2, the compressing assembly comprises a rotating plate 3 which is rotatably arranged on the outer wall of the tank body 1, a bolt 4 is sleeved on the rotating plate 3, an extruding plate 5 is rotatably arranged at the bottom end of the bolt 4, and the rotating bolt 4 can drive the extruding plate 5 to compress on the tank cover 2, so that the tank cover 2 and the tank body 1 are fixed together to be kept sealed.
As shown in fig. 7, the evaporation source placement component comprises a movable seat movably sleeved outside the electric heating rod 28, one side of the movable seat is fixedly connected with a movable disc 29, a turnover disc 30 is rotatably arranged inside the movable disc 29, two electromagnets 31 are fixedly connected to the top and the bottom of the turnover disc 30, guide rods 32 are fixedly connected to the two sides of the electromagnets 31, clamping plates 33 are movably sleeved outside the guide rods 32, springs 34 sleeved outside the guide rods 32 are connected between the clamping plates 33 and the electromagnets 31, a second gear 35 is fixedly connected to one side of the turnover disc 30 along a rotation axis, the electromagnets 31 are electrified to generate suction force, so that the two clamping plates 33 are mutually close to the compression spring 34 to clamp and fix the evaporation source, and the evaporation source can slowly slide downwards along the electric heating rod 28 along the movable disc 29 at a uniform speed by means of friction force.
As shown in fig. 3, the substrate placement component comprises two vertical rods 23 fixedly connected to the inner wall of the top of the can cover 2, a top plate 24 is fixedly connected to the bottom end of the vertical rods 23, an electronic balance 25 is fixedly connected to the top of the top plate 24, a pressing plate 26 is fixedly connected to the top end of the electronic balance 25, substrate supporting plates 27 are fixedly connected to two sides of the bottom of the pressing plate 26, the substrates are placed on the substrate supporting plates 27, weight changes of the substrates during vapor deposition are weighed in real time through the electronic balance 25, and accordingly a worker can conveniently judge the vapor deposition process.
As shown in fig. 5, the vacuumizing assembly comprises a transition barrel 8 movably sleeved on two sides of a tank body 1, a sealing piston is movably sleeved in the transition barrel 8, a piston rod 9 penetrating through the transition barrel 8 is fixedly connected to one side of the sealing piston, one end of the piston rod 9 away from the sealing piston is fixedly connected with a baffle 10, one side of the baffle 10 is provided with a limit rod 7 fixedly connected with the outer wall of the tank body 1, the bottom of the transition barrel 8 is fixedly connected with an exhaust pipe 11 communicated with the baffle 10, an exhaust pump 12 is fixedly arranged in the middle of the exhaust pipe 11, the extension end of an output shaft of the exhaust pump 12 is fixedly connected with a first bevel gear 13, an electromagnetic valve is arranged on one side of the exhaust pipe 11 close to the transition barrel 8, the exhaust pump 12 is used for exhausting air through the exhaust pipe 11, so that vacuumizing treatment is performed in the tank body 1 by means of the transition barrel 8, the exhaust pump 12 can also drive the first bevel gear 13 to rotate, and the first bevel gear 13 drives a second bevel gear 18 meshed with the first bevel gear to rotate, and further drives the adjusting driving assembly to work.
As shown in fig. 5, the adjusting driving assembly comprises a push rod motor 14 hinged on a supporting plate 6, an output shaft of the push rod motor 14 is fixedly connected with a push-pull ring 15, the push-pull ring 15 is movably sleeved outside an exhaust tube 11, a positioning plate 16 is fixedly connected between the two supporting plates 6, a first rotating shaft 17 is movably sleeved in the positioning plate 16, one end of the first rotating shaft 17 is fixedly connected with a second bevel gear 18, the second bevel gear 18 is meshed with the first bevel gear 13 for transmission, a second rotating shaft 19 is rotatably arranged on a tank body 1, one end of the second rotating shaft 19 extending into the tank body 1 is fixedly connected with a first gear 20, the second rotating shaft 19 and the first rotating shaft 17 are fixedly connected with belt pulleys 21, a belt 22 is sleeved outside the two belt pulleys 21, the second bevel gear 18 is driven to rotate through the belt pulley 21 and the belt 22, the second rotating shaft 19 is driven to rotate by the second bevel gear 18, the first rotating shaft 20 is driven to rotate by the second rotating shaft 19, after the evaporation source placing assembly slides down, the second gear 35 and the first gear 20 is driven to overturn the evaporation source to reduce the evaporation source 30, and the waste caused by overturn is reduced.
In addition, a poking rod is fixedly connected to the inner wall of one side of the transition barrel 8, the sealing piston is movably sleeved outside the poking rod, and the transition barrel 8 can drive the sealing piston to rotate by means of the poking rod.
The movable disc 29 is provided with a turnover hole, the inside of the turnover hole is rotationally provided with a turnover shaft, the turnover disc 30 is movably sleeved outside the turnover shaft, the second gear 35 is fixedly connected with the turnover shaft, and the turnover disc 30 can rotate and turn in the turnover hole by means of the turnover shaft.
As shown in fig. 3, a guide cover 36 fixedly connected with the inner wall of the tank body 1 is arranged above the electric heating rod 28.
Example 1
As shown in fig. 1-4 and fig. 7, after the tank cover 2 and the tank body 1 are fixed, the evaporation source placement component is located at the highest position of the electric heating rod 28, vacuumizing is firstly performed, the air pump 12 vacuumizes the tank body 1 through the air pump 11 and the transition cylinder 8, after vacuumizing is completed, the electromagnetic valve on the air pump 11 closes the air pump 11, the air pump 12 stops rotating at the moment, the evaporation source placement component slowly slides downwards along the surface of the electric heating rod 28 at a constant speed under the action of friction force, the electric heating rod 28 heats simultaneously, and thus the plurality of electric heating rods 28 arranged in the circumferential direction are heated simultaneously.
Example two
As shown in fig. 1-6, as the movable disk 29 slowly slides down along the electric heating rod 28, when the second gear 35 is meshed with the first gear 20, after evaporation is completed for a period of time, the electric heating rod 28 stops heating, the space temperature of the tank 1 close to the electric heating rod 28 is higher, the air pump 12 rotates at a low speed, so that the air pump 12 drives the first bevel gear 13 to rotate, the first bevel gear 13 drives the second bevel gear 18 meshed with the first bevel gear 13 to rotate, the second bevel gear 18 drives the first rotating shaft 17 to rotate, the first rotating shaft 17 drives the second rotating shaft 19 to rotate through the belt pulley 21 and the belt 22, the second rotating shaft 19 drives the first gear 20 to rotate, the first gear 20 drives the second gear 35 to rotate, the second gear 35 drives the overturning shaft to rotate, the overturning plate 30 is driven to rotate and overturn, so that a heat source is isolated downwards, evaporation waste is reduced, after overturn is completed, the push rod motor 14 drives the push ring 15 to move, the push ring 15 drives the push tube 11 to move, the transition tube 11 rotates, the transition tube 8 drives the evaporation source 10 to rotate, so that the air pump source 10 does not need to rotate, and the negative pressure rod 7 is required to stop the sealing of the two ends of the air pump 11, and sealing is further sealed under the action of limiting the piston 11;
the substrate and the evaporation source are arranged oppositely, so that sputtering deposition can be completed, and after the deposition is completed, the turnover disc 30 finally slowly falls down and then the turnover back is completed.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
The foregoing is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art, who is within the scope of the present invention, should make equivalent substitutions or modifications according to the technical scheme of the present invention and the inventive concept thereof, and should be covered by the scope of the present invention.
Claims (5)
1. The vacuum evaporation equipment for real-time monitoring comprises a tank body (1) and a tank cover (2), and is characterized in that two compression assemblies are arranged between the tank body (1) and the tank cover (2), a plurality of electric heating rods (28) are arranged on an inner wall array of the tank body (1), an evaporation source placement assembly is movably sleeved outside the electric heating rods (28), and a substrate placement assembly is arranged on the inner wall of the top of the tank cover (2);
the vacuum pumping assemblies are arranged on two sides of the outer wall of the tank body (1), and a supporting plate (6) fixedly connected with the outer wall of the tank body (1) is arranged above the vacuum pumping assemblies;
the adjusting driving assembly is arranged on one side of the vacuumizing assembly and is connected with the supporting plate (6);
The evaporation source placement assembly comprises a movable seat movably sleeved outside an electric heating rod (28), one side of the movable seat is fixedly connected with a movable disc (29), a turnover disc (30) is rotatably arranged inside the movable disc (29), two electromagnets (31) are fixedly connected to the top and the bottom of the turnover disc (30), guide rods (32) are fixedly connected to the two sides of the electromagnets (31), clamping plates (33) are movably sleeved outside the guide rods (32), springs (34) sleeved outside the guide rods (32) are connected between the clamping plates (33) and the electromagnets (31), and a second gear (35) is fixedly connected to one side of the turnover disc (30) along a rotation axis;
the substrate placement assembly comprises two vertical rods (23) fixedly connected to the inner wall of the top of the tank cover (2), a top plate (24) is fixedly connected to the bottom end of each vertical rod (23), an electronic balance (25) is fixedly connected to the top of each top plate (24), a pressing plate (26) is fixedly connected to the top end of each electronic balance (25), and substrate supporting plates (27) are fixedly connected to the two sides of the bottom of each pressing plate (26);
The vacuum pumping assembly comprises transition cylinders (8) movably sleeved on two sides of a tank body (1), sealing pistons are movably sleeved in the transition cylinders (8), a piston rod (9) penetrating through the transition cylinders (8) is fixedly connected to one side of each sealing piston, a baffle (10) is fixedly connected to one end, far away from each sealing piston, of each piston rod (9), a limit rod (7) fixedly connected with the outer wall of the tank body (1) is arranged on one side of each baffle (10), an exhaust pipe (11) communicated with the bottom of each transition cylinder (8) is fixedly connected to the bottom of each transition cylinder, an exhaust pump (12) is fixedly arranged in the middle of each exhaust pipe (11), a first bevel gear (13) is fixedly connected to the extension end of an output shaft of each exhaust pump (12), and an electromagnetic valve is arranged on one side, close to the transition cylinders (8), of each exhaust pipe (11);
The utility model provides an adjustable drive subassembly is including articulating push rod motor (14) on backup pad (6), the output shaft fixedly connected with push-and-pull ring (15) of push rod motor (14), and push-and-pull ring (15) movable sleeve establishes in the outside of exhaust tube (11), two fixedly connected with locating plate (16) between backup pad (6), the inside movable sleeve of locating plate (16) is equipped with first pivot (17), the one end fixedly connected with second bevel gear (18) of first pivot (17), and second bevel gear (18) and first bevel gear (13) meshing transmission, rotate on jar body (1) and be equipped with second pivot (19), the one end fixedly connected with first gear (20) that second pivot (19) stretched into jar body (1), all fixedly connected with belt pulley (21) on second pivot (19) and the first pivot (17), two the outside cover of belt pulley (21) is equipped with belt (22).
2. The vacuum evaporation device for real-time monitoring according to claim 1, wherein the compression assembly comprises a rotating plate (3) rotatably arranged on the outer wall of the tank body (1), a bolt (4) is sleeved on the rotating plate (3) in a threaded manner, and an extruding plate (5) is rotatably arranged at the bottom end of the bolt (4).
3. The vacuum evaporation device for real-time monitoring according to claim 1, wherein a toggle rod is fixedly connected to an inner wall of one side of the transition cylinder (8), and the sealing piston is movably sleeved outside the toggle rod.
4. The vacuum evaporation device for real-time monitoring according to claim 1, wherein the movable disc (29) is provided with a turnover hole, a turnover shaft is rotatably arranged in the turnover hole, the turnover disc (30) is movably sleeved outside the turnover shaft, and the second gear (35) is fixedly connected with the turnover shaft.
5. The vacuum evaporation equipment for real-time monitoring according to claim 1, wherein a guide cover (36) fixedly connected with the inner wall of the tank body (1) is arranged above the electric heating rod (28).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211086364.7A CN115537735B (en) | 2022-09-06 | 2022-09-06 | Real-time supervision's vacuum evaporation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211086364.7A CN115537735B (en) | 2022-09-06 | 2022-09-06 | Real-time supervision's vacuum evaporation equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115537735A CN115537735A (en) | 2022-12-30 |
| CN115537735B true CN115537735B (en) | 2024-07-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211086364.7A Active CN115537735B (en) | 2022-09-06 | 2022-09-06 | Real-time supervision's vacuum evaporation equipment |
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| Country | Link |
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| CN (1) | CN115537735B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10265954A (en) * | 1997-03-25 | 1998-10-06 | Asahi Optical Co Ltd | Device for monitoring film thickness, vacuum deposition method and vacuum deposition device |
| CN113355646A (en) * | 2021-06-10 | 2021-09-07 | 西华师范大学 | Film monitoring preparation device and method based on multi-source co-evaporation technology |
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2022
- 2022-09-06 CN CN202211086364.7A patent/CN115537735B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10265954A (en) * | 1997-03-25 | 1998-10-06 | Asahi Optical Co Ltd | Device for monitoring film thickness, vacuum deposition method and vacuum deposition device |
| CN113355646A (en) * | 2021-06-10 | 2021-09-07 | 西华师范大学 | Film monitoring preparation device and method based on multi-source co-evaporation technology |
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| CN115537735A (en) | 2022-12-30 |
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