CN115537735A - Real-time monitoring vacuum evaporation equipment - Google Patents
Real-time monitoring vacuum evaporation equipment Download PDFInfo
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- CN115537735A CN115537735A CN202211086364.7A CN202211086364A CN115537735A CN 115537735 A CN115537735 A CN 115537735A CN 202211086364 A CN202211086364 A CN 202211086364A CN 115537735 A CN115537735 A CN 115537735A
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- 238000007738 vacuum evaporation Methods 0.000 title claims abstract description 18
- 238000012544 monitoring process Methods 0.000 title claims abstract description 17
- 238000001704 evaporation Methods 0.000 claims abstract description 53
- 230000008020 evaporation Effects 0.000 claims abstract description 52
- 238000000429 assembly Methods 0.000 claims abstract description 6
- 230000000712 assembly Effects 0.000 claims abstract description 6
- 230000007704 transition Effects 0.000 claims description 27
- 239000000758 substrate Substances 0.000 claims description 26
- 238000005485 electric heating Methods 0.000 claims description 24
- 238000007789 sealing Methods 0.000 claims description 17
- 230000007306 turnover Effects 0.000 claims description 16
- 240000007643 Phytolacca americana Species 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 239000002699 waste material Substances 0.000 abstract description 5
- 238000005086 pumping Methods 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000009834 vaporization Methods 0.000 description 3
- 230000008016 vaporization Effects 0.000 description 3
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 2
- 235000017491 Bambusa tulda Nutrition 0.000 description 2
- 241001330002 Bambuseae Species 0.000 description 2
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 2
- 239000011425 bamboo Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000001125 extrusion Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention relates to the technical field of evaporation, and particularly discloses vacuum evaporation equipment with real-time monitoring, which comprises a tank body and a tank cover, wherein two pressing assemblies are arranged between the tank body and the tank cover; the vacuumizing assembly is arranged on two sides of the outer wall of the tank body, and a supporting plate fixedly connected with the outer wall of the tank body is arranged above the vacuumizing assembly; and the adjusting driving assembly is arranged on one side of the vacuumizing assembly and is connected with the supporting plate. The invention not only facilitates the real-time monitoring of the evaporation progress, but also ensures the evaporation quality, and isolates the evaporation source after the evaporation is finished, thereby reducing the evaporation waste.
Description
Technical Field
The invention relates to the technical field of evaporation, in particular to vacuum evaporation equipment with real-time monitoring.
Background
Vacuum evaporation, which is simply referred to as evaporation, refers to a process method of evaporating a coating material (or called a coating material) in a certain heating evaporation manner and gasifying the coating material under a vacuum condition, and flying particles to the surface of a substrate for condensation and film formation; the vapor deposition is a vapor deposition technology which is used earlier and has wider application, and has the advantages of simple film forming method, high film purity and compactness, unique film structure and performance and the like.
The existing vacuum evaporation equipment mainly comprises an evaporation source, a substrate and a heating element, wherein the evaporation source is heated by the heating element to be evaporated and then condensed on the substrate, the heating element is generally arranged at the bottom of the evaporation source, and the installation position of the evaporation source is kept unchanged.
Disclosure of Invention
The invention provides a vacuum evaporation device capable of monitoring in real time, which solves the problems that the evaporation is uneven at the edge of the existing substrate, and the evaporation source continues to evaporate after the evaporation is finished, so that waste is caused.
In order to achieve the purpose, the invention adopts the following technical scheme:
a vacuum evaporation device capable of realizing real-time monitoring comprises a tank body and a tank cover, wherein two pressing assemblies are arranged between the tank body and the tank cover, a plurality of electric heating rods are arranged on the inner wall array of the tank body, an evaporation source placing assembly is movably sleeved outside the electric heating rods, and a substrate placing assembly is arranged on the inner wall of the top of the tank cover;
the vacuumizing assembly is arranged on two sides of the outer wall of the tank body, and a supporting plate fixedly connected with the outer wall of the tank body is arranged above the vacuumizing assembly;
and the adjusting driving assembly is arranged on one side of the vacuumizing assembly and is connected with the supporting plate.
Preferably, the compressing assembly comprises a rotating plate which is rotatably arranged on the outer wall of the tank body, a bolt is sleeved on the rotating plate in a threaded manner, and an extrusion plate is rotatably arranged at the bottom end of the bolt.
Preferably, the evaporation source placing assembly comprises a movable seat which is movably sleeved on the outer portion of the electric heating rod, one side of the movable seat is fixedly connected with a movable disc, the inner portion of the movable disc rotates to be provided with a turning disc, two electromagnets are fixedly connected to the top portion and the bottom portion of the turning disc, guide rods are fixedly connected to the two sides of each electromagnet, a clamping plate is sleeved on the outer portion of each guide rod, a spring which is sleeved on the outer portion of each guide rod is connected between the clamping plate and the corresponding electromagnet, and a second gear is fixedly connected to one side of the turning disc along the rotation axis.
Preferably, the substrate placing assembly comprises two vertical rods fixedly connected to the inner wall of the top of the tank cover, the bottom ends of the vertical rods are fixedly connected with a top plate, the top of the top plate is fixedly connected with an electronic balance scale, the top end of the electronic balance scale is fixedly connected with a pressing plate, and two sides of the bottom of the pressing plate are fixedly connected with substrate supporting plates; the electronic balance scale can be specifically used for a high-precision laboratory balance, the accuracy can be expanded to 4-5 decimal places on a display screen of the precision balance, the used increment is 0.0001g-0.00001 (0.1 mg-0.01 mg), the electronic precision balance of the Guansen brand is used, the model is FA2204, the electronic balance is arranged in the tank body, the interference of airflow is reduced when the electronic balance is used under the vacuum condition, the electronic balance is more suitable for precision measurement, and the electronic balance is not directly contacted with an evaporation source to cause the interference and the influence on the electronic balance.
Preferably, the vacuumizing assembly comprises a transition cylinder which is movably sleeved on two sides of the tank body, a sealing piston is sleeved in the transition cylinder, a piston rod which penetrates through the transition cylinder is fixedly connected to one side of the sealing piston, a baffle is fixedly connected to one end, far away from the sealing piston, of the piston rod, a limiting rod which is fixedly connected with the outer wall of the tank body is arranged on one side of the baffle, an exhaust pipe which is communicated with the bottom of the transition cylinder is fixedly connected to the bottom of the transition cylinder, an exhaust pump is fixedly arranged in the middle of the exhaust pipe, a first bevel gear is fixedly connected to the output shaft of the exhaust pump, and an electromagnetic valve is arranged on one side, close to the transition cylinder, of the exhaust pipe.
Preferably, the adjusting and driving assembly comprises a push rod motor hinged to the supporting plate, an output shaft of the push rod motor is fixedly connected with a push pull ring, the push pull ring is movably sleeved outside the exhaust pipe, the push pull ring is fixedly connected with a positioning plate between the supporting plates, a first rotating shaft is movably sleeved inside the positioning plate, one end of the first rotating shaft is fixedly connected with a second bevel gear, the second bevel gear is in meshing transmission with the first bevel gear, a second rotating shaft is arranged on the tank body in a rotating mode, the second rotating shaft extends into a first gear fixedly connected with one end of the tank body inside, belt pulleys are fixedly connected to the second rotating shaft and the first rotating shaft, and belts are sleeved outside the belt pulleys.
Preferably, the inner wall of one side of the transition cylinder is fixedly connected with a poke rod, and the sealing piston is movably sleeved outside the poke rod.
Preferably, the movable disc is provided with a turning hole, a turning shaft is rotatably arranged in the turning hole, the turning disc is movably sleeved outside the turning shaft, and the second gear is fixedly connected with the turning shaft.
Preferably, a flow guide cover fixedly connected with the inner wall of the tank body is arranged above the electric heating rod.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, the pressing assembly is arranged, so that the tank cover and the tank body can be conveniently and rapidly sealed together, and subsequent vacuumizing is facilitated;
2. according to the invention, the substrate placing assembly is mounted, and the change of the evaporation weight of the substrate can be monitored in real time through the electronic balance scale on the substrate placing assembly, so that workers can conveniently judge the evaporation process;
3. according to the invention, the evaporation source placing assembly and the electric heating rods are arranged, the evaporation source placing assembly can slowly slide down along the electric heating rods at a constant speed, and the plurality of electric heating rods arranged on the inner wall of the tank body facilitate molecules to perform thermal motion at one side close to the inner wall of the tank body during evaporation, so that the edges of the substrate can be conveniently and uniformly evaporated, and the evaporation quality is ensured;
4. according to the invention, the vacuumizing assembly and the evaporation source placing assembly are arranged, and the vacuumizing assembly can drive the falling evaporation source placing assembly to turn over, so that the temperature above the evaporation source is isolated, and the waste of the evaporation source is reduced;
to sum up, this scheme simple structure, the modern design not only makes things convenient for the progress of real-time supervision coating by vaporization, but also guarantees the quality of coating by vaporization, keeps apart the evaporation source moreover after the coating by vaporization is accomplished, and it is extravagant to reduce the evaporation.
Drawings
FIG. 1 is a schematic front view of the structure of the present invention;
FIG. 2 is a schematic side view of the present invention;
FIG. 3 is a schematic cross-sectional view of the present invention;
FIG. 4 is a schematic top view of the present invention;
FIG. 5 is a schematic perspective view of the present invention;
FIG. 6 is a schematic perspective view of the present invention;
fig. 7 is a partially cut-away perspective structure schematic diagram provided by the invention.
In the figure: 1 tank body, 2 tank covers, 3 rotating plates, 4 bolts, 5 extrusion plates, 6 supporting plates, 7 limiting rods, 8 transition cylinders, 9 piston rods, 10 baffle plates, 11 air suction pipes, 12 air suction pumps, 13 first bevel gears, 14 push rod motors, 15 push pull rings, 16 positioning plates, 17 first rotating shafts, 18 second rotating shafts, 19 second rotating shafts, 20 first gears, 21 belt wheels, 22 belts, 23 vertical rods, 24 top plates, 25 electronic balance scales, 26 pressing plates, 27 substrate supporting plates, 28 electric heating rods, 29 movable plates, 30 turnover plates, 31 electromagnets, 32 guide rods, 33 clamping plates, 34 springs, 35 second gears and 36 guide covers.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Referring to fig. 1-7, a vacuum evaporation device with real-time monitoring comprises a tank body 1 and a tank cover 2, two pressing assemblies are arranged between the tank body 1 and the tank cover 2, a plurality of electric heating rods 28 are arranged on the inner wall array of the tank body 1, an evaporation source placing assembly is movably sleeved outside the electric heating rods 28, and a substrate placing assembly is arranged on the inner wall of the top of the tank cover 2;
the vacuumizing assembly is arranged on two sides of the outer wall of the tank body 1, and a supporting plate 6 fixedly connected with the outer wall of the tank body 1 is arranged above the vacuumizing assembly;
and the adjusting driving component is arranged on one side of the vacuumizing component and is connected with the supporting plate 6.
As shown in fig. 2, the pressing component comprises a rotating plate 3 rotatably arranged on the outer wall of the tank body 1, a bolt 4 is sleeved on the rotating plate 3 in a threaded manner, a pressing plate 5 is rotatably arranged at the bottom end of the bolt 4, and the rotating bolt 4 can drive the pressing plate 5 to press the tank cover 2, so that the tank cover 2 and the tank body 1 are fixed together to be sealed.
As shown in fig. 7, the evaporation source placing assembly includes a movable seat movably sleeved outside the electric heating rod 28, a movable plate 29 fixedly connected to one side of the movable seat, a turnover plate 30 is rotatably arranged inside the movable plate 29, two electromagnets 31 are fixedly connected to the top and the bottom of the turnover plate 30, guide rods 32 are fixedly connected to two sides of each electromagnet 31, a clamping plate 33 is movably sleeved outside the guide rods 32, a spring 34 sleeved outside the guide rods 32 is connected between the clamping plate 33 and the electromagnets 31, a second gear 35 is fixedly connected to one side of the turnover plate 30 along the rotation axis, the electromagnets 31 are powered on to generate suction, so that the two clamping plates 33 are close to the compression spring 34 to clamp and fix the evaporation source, and the evaporation source can slowly slide downwards along the electric heating rod 28 along with the movable plate 29 by means of friction force at a uniform speed.
As shown in fig. 3, the substrate placing assembly includes two vertical rods 23 fixedly connected to the inner wall of the top of the tank cover 2, a bottom end fixedly connected with top plate 24 of the vertical rods 23, a top fixedly connected with electronic balance scale 25 of the top plate 24, a top fixedly connected with pressing plate 26 of the electronic balance scale 25, bottom two sides fixedly connected with substrate supporting plate 27 of the pressing plate 26, the substrate is placed on the substrate supporting plate 27, the weight change of the substrate when the substrate is subjected to evaporation is weighed in real time by the electronic balance scale 25, and therefore the worker can conveniently judge the evaporation process.
As shown in fig. 5, the vacuumizing assembly includes a transition cylinder 8 movably sleeved on two sides of the tank body 1, a sealing piston is movably sleeved inside the transition cylinder 8, one side of the sealing piston is fixedly connected with a piston rod 9 penetrating through the transition cylinder 8, one end of the piston rod 9 far away from the sealing piston is fixedly connected with a baffle 10, one side of the baffle 10 is provided with a limiting rod 11 fixedly connected with the outer wall of the tank body 1, the bottom of the transition cylinder 8 is fixedly connected with an exhaust tube 11 communicated with the bottom of the transition cylinder 8, an exhaust pump 12 is fixedly arranged in the middle of the exhaust tube 11, an output shaft extension end of the exhaust pump 12 is fixedly connected with a first bevel gear 13, one side of the exhaust tube 11 close to the transition cylinder 8 is provided with an electromagnetic valve, the exhaust pump 12 exhausts through the exhaust tube 11, so as to vacuumize the tank body 1 by means of the transition cylinder 8, and the exhaust pump 12 can also drive the first bevel gear 13 to rotate, the first bevel gear 13 drives a second bevel gear 18 engaged with the first bevel gear to rotate, and further drives the adjusting drive assembly to work.
As shown in fig. 5, the adjusting driving assembly includes a push rod motor 14 hinged on the supporting plates 6, an output shaft of the push rod motor 14 is fixedly connected with a push pull ring 15, the push pull ring 15 is movably sleeved outside the exhaust pipe 11, a positioning plate 16 is fixedly connected between the two supporting plates 6, an inner movable sleeve of the positioning plate 16 is provided with a first rotating shaft 17, one end of the first rotating shaft 17 is fixedly connected with a second bevel gear 18, the second bevel gear 18 is in meshing transmission with the first bevel gear 13, a second rotating shaft 19 is rotatably arranged on the tank 1, one end of the second rotating shaft 19 extending into the tank 1 is fixedly connected with a first gear 20, both the second rotating shaft 19 and the first rotating shaft 17 are fixedly connected with belt pulleys 21, an outer sleeve of the two belt pulleys 21 is provided with a belt 22, the second gear 35 is meshed with the first gear 20 to drive the second rotating shaft 18 to rotate through the air pump 12, the first rotating shaft 17 drives the first rotating shaft 17 to rotate through the belt pulleys 21 and the belt 22, the second rotating shaft 19 drives the first rotating shaft 20 to rotate, when the evaporation source placing assembly slides down, the evaporation source placing assembly is turned over, thereby reducing waste of evaporation source and evaporation source.
In addition, one side inner wall fixedly connected with poker rod of transition section of thick bamboo 8, sealing piston movable sleeve establishes the outside at poker rod, and transition section of thick bamboo 8 can drive sealing piston with the help of poker rod and rotate.
The movable disc 29 is provided with a turning hole, a turning shaft is arranged in the turning hole in a rotating mode, the turning disc 30 is movably sleeved outside the turning shaft, the second gear 35 is fixedly connected with the turning shaft, and the turning disc 30 can be turned in the turning hole in a rotating mode through the turning shaft.
As shown in fig. 3, a diversion cover 36 fixedly connected with the inner wall of the tank body 1 is arranged above the electric heating bar 28.
Example one
As shown in fig. 1-4 and fig. 7, after the can cover 2 is fixed to the can body 1, the evaporation source placement assembly is located at the highest position of the electric heating rods 28, vacuum pumping is performed first, the air pump 12 performs vacuum pumping into the can body 1 through the air pumping tube 11 and the transition cylinder 8, after the vacuum pumping is completed, the air pumping tube 11 is closed by the electromagnetic valve on the air pumping tube 11, the air pumping pump 12 stops rotating at this time, the evaporation source placement assembly slowly slides down along the surface of the electric heating rods 28 at a constant speed under the action of friction force, the electric heating rods 28 perform heating simultaneously, and thus the plurality of electric heating rods 28 arranged circumferentially heat simultaneously, and as the heat source is distributed on the side wall, the temperature of the side wall is higher than the temperature of the middle part of the can body 1, when molecules perform thermal motion in the can body 1, the thermal motion of molecules on one side close to the inner wall of the can body 1 is faster, so that the evaporation molecules concentrate to the middle part of the can body 1, and the flow guide of the guide cover 36 prevents the edge of the substrate from being less in evaporation scale, the substrate is placed on the substrate 27, and the weight change of the evaporation carrier plate can be weighed by the electronic balance 25 in real time, thereby facilitating the judgment of the evaporation staff.
Example two
As shown in fig. 1-6, as the movable plate 29 slowly slides down along the electric heating rod 28, when the second gear 35 is engaged with the first gear 20, after the evaporation operation is completed after a period of time, the electric heating rod 28 stops heating, and the temperature of the space in the tank 1 near the electric heating rod 28 is higher, at this time, the air pump 12 rotates at a low speed, so that the air pump 12 drives the first bevel gear 13 to rotate, the first bevel gear 13 drives the second bevel gear 18 engaged therewith to rotate, the second bevel gear 18 drives the first rotating shaft 17 to rotate, the first rotating shaft 17 drives the second rotating shaft 19 to rotate through the belt pulley 21 and the belt 22, the second rotating shaft 19 drives the first gear 20 to rotate, the first gear 20 drives the second gear 35 to rotate, the second gear 35 drives the turning shaft to rotate, the turning shaft drives the turning plate 30 to rotate and turn over, so that the heat source is isolated downward, thereby reducing evaporation waste, after the turning over, the motor 14 drives the push ring 15 to drive the air pumping ring 15 to move, the transition tube 11 to drive the transition cylinder 8 to rotate, thereby sealing the baffle 10 to further seal the two ends of the air pumping pipe, thereby sealing piston 7 and further sealing the sealing effect is performed;
the substrate and the evaporation source are arranged oppositely, sputtering deposition can be completed, and after deposition is completed, the turnover disc 30 finally slowly falls down and then is turned over to be arranged backwards.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the equipment or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.
Claims (9)
1. A vacuum evaporation device capable of realizing real-time monitoring comprises a tank body (1) and a tank cover (2), and is characterized in that two pressing assemblies are arranged between the tank body (1) and the tank cover (2), a plurality of electric heating rods (28) are arranged on the inner wall array of the tank body (1), an evaporation source placing assembly is movably sleeved outside the electric heating rods (28), and a substrate placing assembly is arranged on the inner wall of the top of the tank cover (2);
the vacuumizing assemblies are arranged on two sides of the outer wall of the tank body (1), and a supporting plate (6) fixedly connected with the outer wall of the tank body (1) is arranged above the vacuumizing assemblies;
and the adjusting driving component is arranged on one side of the vacuumizing component and is connected with the supporting plate (6).
2. A vacuum evaporation apparatus with real-time monitoring according to claim 1, wherein the compressing assembly comprises a rotating plate (3) rotatably disposed on the outer wall of the tank body (1), a bolt (4) is screwed on the rotating plate (3), and a pressing plate (5) is rotatably disposed at the bottom end of the bolt (4).
3. The vacuum evaporation equipment for real-time monitoring according to claim 1, wherein the evaporation source placing assembly comprises a movable seat which is movably sleeved outside the electric heating rod (28), a movable disc (29) is fixedly connected to one side of the movable seat, a turnover disc (30) is arranged inside the movable disc (29) in a rotating mode, two electromagnets (31) are fixedly connected to the top and the bottom of the turnover disc (30), guide rods (32) are fixedly connected to two sides of each electromagnet (31), a clamping plate (33) is sleeved outside the guide rods (32), a spring (34) which is sleeved outside the guide rods (32) is connected between the clamping plate (33) and the electromagnets (31), and a second gear (35) is fixedly connected to the turnover disc (30) along one side of a rotating axis.
4. A real-time monitoring vacuum evaporation apparatus according to claim 1, wherein the substrate placement assembly comprises two vertical rods (23) fixedly connected to the inner wall of the top of the tank cover (2), the bottom ends of the vertical rods (23) are fixedly connected with a top plate (24), the top of the top plate (24) is fixedly connected with an electronic balance scale (25), the top end of the electronic balance scale (25) is fixedly connected with a pressing plate (26), and both sides of the bottom of the pressing plate (26) are fixedly connected with a substrate supporting plate (27).
5. The vacuum evaporation equipment for real-time monitoring according to claim 1, wherein the vacuumizing assembly comprises a transition cylinder (8) movably sleeved on two sides of the tank body (1), a sealing piston is movably sleeved inside the transition cylinder (8), a piston rod (9) penetrating through the transition cylinder (8) is fixedly connected to one side of the sealing piston, a baffle (10) is fixedly connected to one end, far away from the sealing piston, of the piston rod (9), a limiting rod (11) fixedly connected with the outer wall of the tank body (1) is arranged on one side of the baffle (10), an exhaust tube (11) communicated with the bottom of the transition cylinder (8) is fixedly connected to the bottom of the transition cylinder (8), an exhaust pump (12) is fixedly arranged in the middle of the exhaust tube (11), a first bevel gear (13) is fixedly connected to an output shaft extension end of the exhaust pump (12), and an electromagnetic valve is arranged on one side, close to the transition cylinder (8), of the exhaust tube (11).
6. The vacuum evaporation equipment for real-time monitoring according to claim 5, wherein the adjusting driving assembly comprises a push rod motor (14) hinged to a support plate (6), an output shaft of the push rod motor (14) is fixedly connected with a push pull ring (15), the push pull ring (15) is movably sleeved outside the exhaust pipe (11), a positioning plate (16) is fixedly connected between the two support plates (6), a first rotating shaft (17) is movably sleeved inside the positioning plate (16), one end of the first rotating shaft (17) is fixedly connected with a second bevel gear (18), the second bevel gear (18) is in meshing transmission with the first bevel gear (13), a second rotating shaft (19) is rotatably arranged on the tank body (1), one end of the second rotating shaft (19) extending into the tank body (1) is fixedly connected with a first gear (20), the second rotating shaft (19) and the first rotating shaft (17) are both fixedly connected with belt pulleys (21), and belts (22) are sleeved outside the two belt pulleys (21).
7. The vacuum evaporation equipment with real-time monitoring according to claim 5, wherein a poke rod is fixedly connected to the inner wall of one side of the transition cylinder (8), and the sealing piston is movably sleeved outside the poke rod.
8. The vacuum evaporation equipment with the real-time monitoring function as claimed in claim 3, wherein the movable disc (29) is provided with a turnover hole, a turnover shaft is rotatably arranged in the turnover hole, the turnover disc (30) is movably sleeved outside the turnover shaft, and the second gear (35) is fixedly connected with the turnover shaft.
9. A real-time monitoring vacuum evaporation apparatus according to claim 1, wherein a diversion cover (36) fixedly connected with the inner wall of the tank body (1) is arranged above the electric heating rod (28).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211086364.7A CN115537735B (en) | 2022-09-06 | 2022-09-06 | Real-time supervision's vacuum evaporation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211086364.7A CN115537735B (en) | 2022-09-06 | 2022-09-06 | Real-time supervision's vacuum evaporation equipment |
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| Publication Number | Publication Date |
|---|---|
| CN115537735A true CN115537735A (en) | 2022-12-30 |
| CN115537735B CN115537735B (en) | 2024-07-26 |
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| CN202211086364.7A Active CN115537735B (en) | 2022-09-06 | 2022-09-06 | Real-time supervision's vacuum evaporation equipment |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10265954A (en) * | 1997-03-25 | 1998-10-06 | Asahi Optical Co Ltd | Device for monitoring film thickness, vacuum deposition method and vacuum deposition device |
| CN113355646A (en) * | 2021-06-10 | 2021-09-07 | 西华师范大学 | Film monitoring preparation device and method based on multi-source co-evaporation technology |
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- 2022-09-06 CN CN202211086364.7A patent/CN115537735B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10265954A (en) * | 1997-03-25 | 1998-10-06 | Asahi Optical Co Ltd | Device for monitoring film thickness, vacuum deposition method and vacuum deposition device |
| CN113355646A (en) * | 2021-06-10 | 2021-09-07 | 西华师范大学 | Film monitoring preparation device and method based on multi-source co-evaporation technology |
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