CN115507832A - Micro-shell vibrating gyroscope, gyroscope vibrator and gyroscope vibrator preparation method - Google Patents
Micro-shell vibrating gyroscope, gyroscope vibrator and gyroscope vibrator preparation method Download PDFInfo
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- CN115507832A CN115507832A CN202211255407.XA CN202211255407A CN115507832A CN 115507832 A CN115507832 A CN 115507832A CN 202211255407 A CN202211255407 A CN 202211255407A CN 115507832 A CN115507832 A CN 115507832A
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- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
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Abstract
The invention belongs to the field of micro-shell gyroscopes, and particularly relates to a micro-shell gyroscope vibrator which comprises a shell and a metal film, wherein the shell comprises a cylindrical shell wall and a disc-shaped shell bottom which are mutually connected, a boss is convexly arranged at the center of the shell bottom towards one side of the shell wall, a groove is arranged from the shell bottom to the boss center, and the metal film at least covers the bottom surface of the shell bottom and the surface of the groove. In addition, a metal film does not need to be plated on the shell wall, the area of the metal film is greatly reduced compared with that of a metal film of a gyroscope oscillator with a conventional semicircular structure, the damping and stress influence of the metal film is effectively reduced, and the gyroscope oscillator has a remarkable effect on improving the quality factor of the structure, so that the gyroscope oscillator has higher precision potential. Thereby realizing extremely high figure of merit potential while improving the output signal-to-noise ratio.
Description
Technical Field
The invention belongs to the field of micro-shell gyroscopes, and particularly relates to a micro-shell vibrating gyroscope, a gyroscope vibrator and a gyroscope vibrator preparation method.
Background
The micro-shell vibrating gyroscope is a novel micro-electromechanical gyroscope appearing in recent years, is derived from miniaturization of a traditional hemispherical shell vibrating gyroscope, has a completely symmetrical structural form, and is high in precision, good in reliability and strong in impact vibration resistance. When the device works in a rate integration mode, the device can reach extremely high range without generating scale factor nonlinearity, becomes an ideal choice for measuring large-dynamic and high-precision angular velocity, and is applied to multiple fields such as attitude measurement and control, inertial navigation and the like.
The micro-shell vibrating gyroscope mainly comprises a vibrator, an electrode substrate and a driving detection circuit, wherein the vibrator is a highly symmetrical thin-wall shell, is generally made of fused quartz materials, has extremely small thermal expansion coefficient, thermal conductivity and damping coefficient, and ensures the high sensitivity and temperature stability of the structure.
For example, in patent CN 105698780A-micro shell vibrating gyroscope and its manufacturing method, the existing vibrator is generally a hemispherical structure, and in order to enable the vibrator and the driving circuit on the electrode substrate to form a capacitor, it needs to be satisfied at the same time, 1, the lip edge of the side edge of the hemispherical shell and the driving electrode are disposed in a corresponding gap; 2, the middle of the hemispherical shell is connected with the electrode substrate; and 3, carrying out metal coating on the whole of the hemispherical shell to enable the side edge lip to be connected with the electrode substrate through the metal coating. At the moment, two problems exist, namely 1, the area of a side edge lip edge corresponding to a plane electrode on an electrode substrate is small, so that the area of a driving/detecting electrode of a vibrator is small, and the output noise is large; 2, the area of the metal coating on the inner wall surface of the hemispherical shell is larger than the surface area of the hemispherical shell, and the damping coefficient of the metal coating is far larger than that of the fused quartz structure layer, so that the area of the coating area of the micro-shell vibration gyro with a high quality factor is reduced as much as possible. Then, in the existing structure, the area of the metal coating film is further increased while the area of the lip edge is increased, and the area of the driving/detecting electrode of the vibrator and the area of the metal coating film cannot be optimized simultaneously.
Disclosure of Invention
The invention aims to provide a micro-shell vibrating gyroscope with a driving/detecting electrode area and a metal coating area optimized simultaneously, a gyroscope oscillator and a gyroscope oscillator preparation method.
The invention provides a micro-shell vibration gyro vibrator which comprises a shell and a metal film, wherein the shell comprises a cylindrical shell wall and a disc-shaped shell bottom which are connected with each other, a boss is convexly arranged at the center of the shell bottom towards one side of the shell wall, a groove is arranged from the shell bottom to the center of the boss, and the metal film at least covers the bottom surface of the shell bottom and the surface of the groove.
Further, the housing is blow molded from a single substrate.
Further, the substrate is a fused silica plate.
Further, the substrate has a thickness of 50 μm to 200 μm.
Further, the shell wall has a height of 5mm to 10mm and a diameter of 8mm to 11mm.
Furthermore, the connecting part of the shell wall and the shell bottom is in circular arc transition.
Further, the metal film covers a circular arc at the junction of the shell wall and the shell bottom.
Furthermore, a skirt is extended outwards from one side of the shell wall, which is far away from the shell bottom.
The invention also provides a preparation method of the micro-shell vibration gyro vibrator, which comprises the following steps:
placing a base material on the circular groove-shaped forming cavity, and heating and softening the base material through heating equipment;
vacuumizing the forming cavity, and deforming the softened base material along the inner wall of the circular groove-shaped forming cavity until the base material is formed into a cylindrical shell wall, a circular disc-shaped shell bottom, a boss and a groove;
and plating metal films on the bottom surface of the shell and the surface of the groove by using coating equipment.
The invention also provides a micro-shell vibrating gyroscope which comprises a micro-shell vibrating gyroscope vibrator and an electrode substrate, wherein the electrode substrate wraps a substrate, a plurality of fixed capacitor plates which are arranged in an annular array are arranged on the substrate, a support is convexly arranged on the substrate at the center of the fixed capacitor plates, and a groove of the micro-shell vibrating gyroscope vibrator is matched with the support.
The gyroscope vibrator has the beneficial effects that the shell bottom of the gyroscope vibrator is of a planar structure, the metal film is plated, and the whole planar part of the shell bottom is deformed through electrostatic driving to generate a standing wave mode, so that the area of a driving/detecting electrode can be greatly increased, and the sensitivity and the output signal-to-noise ratio are improved. In addition, a metal film does not need to be plated on the shell wall, the area of the metal film is greatly reduced compared with the area of the metal film of the gyroscope oscillator with the conventional semicircular structure, the damping and stress influence of the metal film is further effectively reduced, and the gyroscope oscillator has a remarkable effect on improving the quality factor of the structure, so that the gyroscope oscillator has higher precision potential. Therefore, the output signal-to-noise ratio is improved, and meanwhile, the potential of extremely high quality factor is achieved. In addition, because no metal coating film is needed on the shell wall, the end part of the shell wall can be conveniently modulated by the laser.
Drawings
Fig. 1 is a schematic structural diagram of a first angle of a gyro oscillator according to the present invention.
Fig. 2 is a schematic structural diagram of a second angle of the gyro oscillator according to the present invention.
Fig. 3 is a sectional view of a gyro vibrator according to the present invention.
Fig. 4 is a schematic structural diagram of a micro-shell vibratory gyroscope according to the present invention.
FIG. 5 is a schematic diagram of a process for fabricating a gyroscope according to the present invention.
FIG. 6 is a schematic structural view of a molding die of the present invention.
Fig. 7 is a schematic view of a first angle of the finished gyro-vibrator according to the present invention.
Fig. 8 is a schematic diagram of a second angle of the finished gyro oscillator according to the present invention.
Fig. 9 is a schematic diagram of a modulation process of a gyro oscillator according to the present invention.
In the figure, 1-housing; 11-shell wall; 12-shell bottom; 13-boss; 14-a groove; 15-skirt edge; 2-a metal film; 3-an electrode substrate; 31-a substrate; 32-fixed capacitive plates; 33-supporting; 4-forming a mould; 41-a mould body; 42-forming a cavity; 43-cylinder; 44-negative pressure through holes; 5-heating equipment; 6-a laser; 7-a substrate.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that all directional indicators (such as up, down, left, right, front, back \8230;) in the embodiments of the present invention are only used to explain the relative positional relationship between the components, the motion situation, etc. in a specific posture (as shown in the attached drawings), and if the specific posture is changed, the directional indicator is changed accordingly.
In addition, the descriptions related to "first", "second", etc. in the present invention are only for descriptive purposes and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless explicitly specified otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "connected," "secured," and the like are to be construed broadly, and for example, "secured" may be a fixed connection, a removable connection, or an integral part; the connection can be mechanical connection, electrical connection, physical connection or wireless communication connection; they may be directly connected or indirectly connected through intervening media, or they may be interconnected within two elements or in a relationship where two elements interact with each other unless otherwise specifically limited. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In addition, the technical solutions in the embodiments of the present invention may be combined with each other, but it must be based on the realization of the technical solutions by those skilled in the art, and when the technical solutions are contradictory to each other or cannot be realized, such a combination of the technical solutions should not be considered to exist, and is not within the protection scope of the present invention.
As shown in fig. 1-9, the present invention provides a micro-shell vibrating gyroscope vibrator, which comprises a shell 1 and a metal film 2, wherein the shell 1 comprises a cylindrical shell wall 11 and a disc-shaped shell bottom 12 which are connected with each other, a boss 13 is convexly arranged at the center of the shell bottom 12 towards one side of the shell wall 11, a groove 14 is arranged from the shell bottom 12 to the center of the boss 13, and the metal film 2 at least covers the bottom surface of the shell bottom 12 and the surface of the groove 14.
The shell bottom 12 of the gyroscope oscillator is of a planar structure and is plated with the metal film 2, and the whole planar part of the shell bottom 12 is deformed through electrostatic driving to generate a standing wave mode, so that the area of a driving/detecting electrode can be greatly increased, and the sensitivity and the output signal-to-noise ratio are improved; specifically, the effective capacitance area of the conventional micro-hemispherical resonator is only the bowl opening area, while the whole shell bottom 12 of the spiral resonator provided by the invention can be used for electrode driving or detection, the areas of the plurality of fixed capacitance plates 32 of the electrode substrate 3 matched with the micro-hemispherical resonator can be synchronously increased, and when the bottom surface of the shell bottom 12 and the surface of the groove 14 covered by the metal film 2 and the plurality of fixed capacitance plates 32 of the electrode substrate 3 form a plurality of high-efficiency capacitors, the areas are larger, so that a larger driving force can be applied and weaker vibration can be detected. In addition, the shell wall 11 is not required to be plated with the metal film 2, at the moment, the area of the metal film 2 is greatly reduced compared with the area of the metal film 2 of the gyroscope oscillator with the conventional semicircular structure, the damping and stress influence of the metal film 2 is further effectively reduced, the structure quality factor is obviously improved, and therefore the gyroscope oscillator has higher precision potential. Therefore, the output signal-to-noise ratio is improved, and meanwhile, the potential of extremely high quality factor is achieved.
In addition, because the shell wall 11 does not need to be plated with the metal film 2, the end part of the shell wall 11 is convenient to modulate through the laser 6, and further the structural mass balance degree of the gyro oscillator is convenient to improve, when the end part of the shell wall 11 is modulated to remove the quality, the action position of the laser 6 has a certain distance with the metal film 2, so the gyro oscillator and the metal film 2 are not mutually influenced, the situation that the metal film 2 is ablated due to overhigh local temperature in the trimming process of the laser 6 is avoided, and compared with the gyro oscillator with a hemispherical structure needing a complete film plating, the gyro oscillator of the invention is greatly convenient to trim on the premise of simultaneously improving the output signal-to-noise ratio and the quality factor.
The shell 1 is formed by blowing through the base material 7, in the embodiment, the diameter of the shell 1 can be smaller than 10mm, compared with the traditional machining modes such as grinding and polishing, the size of the gyroscope oscillator can be greatly reduced, the material cost and the processing cost are reduced, meanwhile, the shell 1 is formed by blowing, the connection position of the shell wall 11 and the shell bottom 12 in the shell 1 and the connection position of the shell bottom 12 and the groove 14 are in smooth transition, and when the metal film 2 is plated, the uniform thickness and the uniform connection of the metal film 2 can be ensured.
In one embodiment, the substrate 7 is a fused silica sheet, wherein the thickness of the substrate 7 is 50 μm to 200 μm, the height of the shell wall 11 is 5mm to 10mm, and the diameter is 8mm to 11mm, so that the size of the gyroscope oscillator meets the miniaturization requirement and is suitable for more application scenes.
In the embodiment, the arc transition is naturally formed in the blow molding process of the base material 7, so that stress concentration can be avoided, and the structural strength of the shell 1 is improved.
The metal film 2 covers the arc at the joint of the shell wall 11 and the shell bottom 12, and the electrode area is increased.
The skirt edge 15 is further outwards extended from one side, which is far away from the shell bottom 12, of the shell wall 11, the skirt edge 15 is generated during blow molding of the base material 7, part of the skirt edge 15 is reserved when redundant mass blocks are cut off after blow molding, and therefore the debugging of the mass balance of the gyroscope oscillator structure is greatly facilitated, as shown in fig. 9, after the gyroscope oscillator is tested, the symmetry of the mass block adjusting structure can be removed at the skirt edge 15 through the laser 6, the distance between the skirt edge 15 and the metal film 2 is far, when the mass blocks are repaired and adjusted through the laser 6, the metal film 2 cannot be affected by high temperature of the high temperature, and the metal film 2 ablation caused by over-high local temperature in the repairing and adjusting process of the laser 6 is avoided. In addition, the skirt 15 may be used for topology optimization, for example, modulating the skirt 15 with a periodic corrugation structure may enhance vibration sensitivity. And the structure optimization is decoupled from the shape of the bottom electrode, so that the area of the driving detection electrode is not influenced, and the flexibility is brought to the design.
The invention also provides a preparation method of the micro-shell vibrating gyroscope oscillator, which uses a forming die 4 and a heating device 5, wherein the heating device 5 is used for generating high-temperature flame, the forming die 4 comprises a die body 41, a circular groove-shaped forming cavity 42 is arranged on the die body 41, a cylinder 43 is arranged at the center of the bottom of the forming cavity 42, a negative pressure through hole 44 penetrating through the die body 41 is arranged at the bottom of the forming cavity 42, and the negative pressure through hole 44 is used for generating negative pressure on the forming cavity 42.
The method comprises the following steps:
s1, as shown in figure 5, placing a substrate 7 on a circular groove-shaped forming cavity 42, and heating and softening the substrate 7 through a heating device 5;
s2, as shown in figures 7 and 8, vacuumizing the forming cavity 42 through the negative pressure through hole 44, deforming the softened base material 7 along the inner wall of the circular groove-shaped forming cavity 42 until the cylindrical shell wall 11 and the circular disc-shaped shell bottom 12 are formed, and forming a boss 13 and a groove 14 in the center of the shell bottom 12 through the existence of the cylinder 43;
and S3, plating a metal film 2 on the bottom surface of the shell bottom 12 and the surface of the groove 14 through a plating device.
The invention also provides a micro-shell vibrating gyroscope, which comprises a micro-shell vibrating gyroscope vibrator and an electrode substrate 3, wherein the electrode substrate 3 wraps a substrate 31, a plurality of fixed capacitor plates 32 which are arranged in an annular array are arranged on the substrate 31, a support 33 is convexly arranged at the central position of the plurality of fixed capacitor plates 32 on the substrate 31, and the groove 14 of the micro-shell vibrating gyroscope vibrator is matched with the support 33. As shown in fig. 4, the fixed capacitor plate 32 is a sector structure with a plurality of annular arrays, which can effectively increase the area of the driving/detecting electrodes.
Details not described in this specification are within the skill of the art that are well known to those skilled in the art.
Claims (10)
1. The utility model provides a little casing vibration top oscillator, characterized by includes casing (1) and metal membrane (2), casing (1) is including the cylinder conch wall (11) and the disc shell bottom (12) of interconnect, shell bottom (12) center is protruding to be provided with boss (13) towards conch wall (11) one side, shell bottom (12) to boss (13) center is provided with recess (14), metal membrane (2) cover the bottom surface of shell bottom (12) and the surface of recess (14) at least.
2. A micro-shell vibrating gyroscopic vibrator according to claim 1, in which the shell (1) is blow moulded from a base material (7).
3. A micro-shell vibratory gyroscope oscillator as claimed in claim 2 characterised in that the substrate (7) is a fused silica plate.
4. A micro-shell vibrating gyroscope oscillator as claimed in claim 3 characterised in that the thickness of the substrate (7) is 50 μm to 200 μm.
5. A micro-shell vibrating gyroscopic oscillator according to claim 3, in which the walls (11) have a height of 5mm to 10mm and a diameter of 8mm to 11mm.
6. A micro-shell vibrating gyroscope transducer as claimed in any one of claims 1 to 5 characterised in that the junction of the shell wall (11) and the shell base (12) is in the form of a circular arc transition.
7. A micro-shell vibratory gyroscope oscillator as claimed in claim 6 wherein the metal membrane (2) covers the arc of a circle at the junction of the housing wall (11) and the housing bottom (12).
8. A micro-shell vibratory gyroscope oscillator as claimed in any of claims 1-5 and 7 wherein the side of the housing wall (11) facing away from the housing bottom (12) is further extended by a skirt (15).
9. A preparation method of a micro-shell vibration gyro vibrator is characterized by comprising the following steps:
placing the base material (7) on a circular groove-shaped forming cavity (42), and heating and softening the base material (7) through heating equipment (5);
vacuumizing the forming cavity (42), and deforming the softened base material (7) along the inner wall of the circular groove-shaped forming cavity (42) until a cylindrical shell wall (11), a circular disc-shaped shell bottom (12), a boss (13) and a groove (14) are formed;
and plating a metal film (2) on the bottom surface of the shell bottom (12) and the surface of the groove (14) by using plating equipment.
10. A micro-shell vibratory gyroscope, characterized in that it comprises a micro-shell vibratory gyroscope oscillator according to any of claims 1 to 8 and an electrode base (3), the electrode base (3) wraps a substrate (31), the substrate (31) is provided with a plurality of fixed capacitor plates (32) arranged in an annular array, the substrate (31) is convexly provided with a support (33) at the center of the plurality of fixed capacitor plates (32), and the groove (14) of the micro-shell vibratory gyroscope oscillator is matched with the support (33).
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| CN202211255407.XA CN115507832A (en) | 2022-10-13 | 2022-10-13 | Micro-shell vibrating gyroscope, gyroscope vibrator and gyroscope vibrator preparation method |
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| CN202211255407.XA CN115507832A (en) | 2022-10-13 | 2022-10-13 | Micro-shell vibrating gyroscope, gyroscope vibrator and gyroscope vibrator preparation method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117570951A (en) * | 2024-01-17 | 2024-02-20 | 中国船舶集团有限公司第七〇七研究所 | Resonant gyroscope, mold and blowing method of resonant gyroscope |
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2022
- 2022-10-13 CN CN202211255407.XA patent/CN115507832A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117570951A (en) * | 2024-01-17 | 2024-02-20 | 中国船舶集团有限公司第七〇七研究所 | Resonant gyroscope, mold and blowing method of resonant gyroscope |
| CN117570951B (en) * | 2024-01-17 | 2024-04-05 | 中国船舶集团有限公司第七〇七研究所 | Resonant gyroscope, mold and blowing method of resonant gyroscope |
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