CN115505453A - 一种用于金刚线切割大尺寸硅片的切削液及其制备方法 - Google Patents

一种用于金刚线切割大尺寸硅片的切削液及其制备方法 Download PDF

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CN115505453A
CN115505453A CN202211292392.4A CN202211292392A CN115505453A CN 115505453 A CN115505453 A CN 115505453A CN 202211292392 A CN202211292392 A CN 202211292392A CN 115505453 A CN115505453 A CN 115505453A
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陈立飞
陈燕杰
马清怡
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Shanghai Polytechnic University
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Abstract

本发明公开了一种用于金刚线切割大尺寸硅片的切削液及其制备方法。所述切削液的组分包括β‑萘酚聚氧乙烯醚助溶剂、脂肪酸二乙醇酰胺乳化剂、消泡剂、复合润湿剂或非离子有机超级润湿剂、油胺润滑剂和水。本发明的切削液能快速润湿硅粉、金刚线及硅片表面,减少线痕、TTV及脏片,减少金刚石磨料之间的堆粉现象,保持金刚线表面粗糙度,有利于晶硅切割的高效稳定进行,可满足大尺寸硅片细金刚线高速切割要求。

Description

一种用于金刚线切割大尺寸硅片的切削液及其制备方法
技术领域
本发明属于硅片切削液技术领域,特别涉及一种用于金刚线切割大尺寸硅片的切削液及其制备方法。
背景技术
光伏发电就是把太阳能转化为电能,光伏发电具有显著的能源、环保和经济效益,是最优质的绿色能源之一,光伏发电可以从各方面助力国家实现双碳目标。降低光伏发电成本,提高转换效率,是整个光伏产业链孜孜不倦的追求,让清洁的能源更易获取,更有竞争力。用于制作电池组件的硅片的切割厂家而言,对于硅片通过使用金刚线工艺,相比早期的砂浆切割,已经使切片成本大幅下降,但仍然面临着持续降本的挑战。采用更细的金刚线以降低切缝损失,提高出片率是目前主要的趋势;光伏组件的发电成本随着硅片尺寸的增加而显著降低;提高硅片质量才能确保光伏发电效率。那么由此也带来更大的挑战,如:线速度越快、线直径越小,就有更多更细的硅粉需要快速分散;切割阻力增加,易断线;硅片表面更加难清洁,容易出脏污片。
发明内容
为了解决上述技术问题,本发明的目的在于提供一种出片率高、硅片表面无线痕且容易清洗的且适用于大硅片高速金刚线切割用切削液及其制备方法。本发明的切削液可以快速冲洗并带走切割面上的硅粉,降低切割时的阻力,减少断线,减少硅片表面线痕,硅片表面易于清洁,保证硅片质量,以确保后续制作高效电池组件。
本发明的技术方案具体介绍如下。
本发明提供一种用于金刚线切割大尺寸硅片的切削液,以质量百分比计,其由以下组分组成:
助溶剂 1-5%,乳化剂30-40%,消泡剂1%,润湿剂5-12%,润滑剂1-3%,余量为水,
以上总重量满足100%;其中:
助溶剂为β-萘酚聚氧乙烯醚;
乳化剂为脂肪酸二乙醇酰胺;
润湿剂为复合润湿剂或者非离子有机超级润湿剂,复合润湿剂由炔二醇类润湿剂和炔二醇醚类润湿剂组成;
润滑剂为油胺。
本发明中,助溶剂和体系中的乳化剂和润湿剂具有很好的相容性,并能提高乳化剂和润湿剂的溶解能力。
本发明中,消泡剂选自炔二醇类消泡剂或者活性聚醚消泡剂中的一种。进一步优选的,炔二醇类消泡剂为SURFYNOL*DF110-D消泡剂,活性聚醚消泡剂为TEGO*Antifoam KS911消泡剂。
本发明中,乳化剂为椰油酸二乙醇酰胺,其具有很好的渗透去污、稳泡和抗硬水的能力,其对硅粉起到很好的包覆和分散作用,使得硅粉能快速分散在水中,提高切割的安全性。
本发明中,炔二醇类润湿剂为SURFYNOL*104H,炔二醇醚类润湿剂为SURFYNOL*420;非离子有机表面活性剂为DYNOL 810。润湿剂的作用在于,快速提高硅粉表面的浸润性,使其易于分散,金刚线上的硅粉被迅速移除,降低切割扭矩,不易断线。
本发明中,润滑剂为油胺,润滑剂起到润滑作用,少量添加即可减少切片表面划痕。
本发明中,水为去离子水。
本发明中,大尺寸硅片的直径在182-210nm之间。
本发明还提供一种上述大尺寸硅片金刚线切割的切削液的制备方法,包括以下步骤:
在室温下,先将助溶剂与水混合,再依次加入乳化剂、润滑剂和润湿剂,搅拌均匀后再加入消泡剂,持续搅拌至澄清透明液,获得用于金刚线切割大尺寸硅片的切削液。
和现有技术相比,本发明的有益效果在于:
本发明极大提升了切削液的润湿和润滑性能,使得切削液能对更多更细的硅粉快速润湿起到清洁金刚线的作用,实现硅粉的快速“移除”,保证金刚线良好的切割能力;降低切割时的阻力,减少断线,减少硅片表面线痕,硅片表面易于清洁,保证硅片质量,以确保后续制作高效电池组件。
本发明的切削液能快速润湿硅粉、金刚线及硅片表面,减少线痕、TTV及脏片,减少金刚石磨料之间的堆粉现象,保持金刚线表面粗糙度,有利于晶硅切割的高效稳定进行,可满足大尺寸硅片细金刚线高速切割要求。
具体实施方式
下面将结合具体实施例对本发明作进一步的说明。
实施例中,所用原材料来自海安石化。
实施例1
一种适用大尺寸硅片细金刚线高速切割的切削液,由β-萘酚聚氧乙烯醚3%、椰油酸二乙醇酰胺35%,炔二醇类分子消泡剂(SURFYNOL*DF110-D )1%、复合润湿剂(SURFYNOL*104H和SURFYNOL*420)7%、油胺2%、水52%组成,以质量百分比计算。在室温下,先将助溶剂β-萘酚聚氧乙烯醚与水混合,再依次加入乳化剂椰油酸二乙醇酰胺、润滑剂油胺和复合润湿剂,搅拌均匀后再加入炔二醇类分子消泡剂,持续搅拌至澄清透明液形成。用于切割182*182硅片,成品率超过98%,硅片表面无划痕,硅片易清洗。
实施例2
一种适用大尺寸硅片细金刚线高速切割的切削液,由β-萘酚聚氧乙烯醚1%、椰油酸二乙醇酰胺30%,活性聚醚消泡剂(TEGO*Antifoam KS 911)1%、复合润湿剂(SURFYNOL*104H和SURFYNOL*420)10%、油胺1%、水57%组成,以质量百分比计算。在室温下,先将助溶剂β-萘酚聚氧乙烯醚与水混合,再依次加入乳化剂椰油酸二乙醇酰胺、润滑剂油胺和复合润湿剂,搅拌均匀后再加入活性聚醚消泡剂,持续搅拌至澄 清透明液形成。用于切割210*210硅片,成品率超过98%,硅片表面无划痕,硅片易清洗。
实施例3
一种适用大尺寸硅片细金刚线高速切割的切削液,由β-萘酚聚氧乙烯醚5%、椰油酸二乙醇酰胺40%,炔二醇类分子消泡剂(SURFYNOL*DF110-D)1%、复合润湿剂(SURFYNOL*104H和SURFYNOL*420)5%、油胺3%、水46%组成,以质量百分比计算。在室温下,先将助溶剂β-萘酚聚氧乙烯醚与水混合,再依次加入乳化剂椰油酸二乙醇酰胺、润滑剂油胺和复合润湿剂,搅拌均匀后再加入炔二醇类分子消泡剂,持续搅拌至澄清透明液形成。用于切割210*210硅片,成品率超过97%,硅片表面无划痕,硅片易清洗。
实施例4
一种适用大尺寸硅片细金刚线高速切割的切削液,由β-萘酚聚氧乙烯醚2%、椰油酸二乙醇酰胺35%,活性聚醚消泡剂(TEGO*Antifoam KS 911)1%、非离子有机超级润湿剂(DYNOL 8106)%、油胺2%、水54%组成,以质量百分比计算。在室温下,先将助溶剂β-萘酚聚氧乙烯醚与水混合,再依次加入乳化剂椰油酸二乙醇酰胺、润滑剂油胺和非离子有机超级润湿剂,搅拌均匀后再加入活性聚醚消泡剂,持续搅拌至澄清透明液形成。用于切割182*182硅片,成品率超过98%,硅片表面无划痕,硅片易清洗。
实施例5
一种适用大尺寸硅片细金刚线高速切割的切削液,由β-萘酚聚氧乙烯醚5%、椰油酸二乙醇酰胺30%,炔二醇类分子消泡剂(SURFYNOL*DF110-D)1%、非离子有机超级润湿剂(DYNOL 8106)12%、油胺3%、水49%组成,以质量百分比计算。在室温下,先将助溶剂β-萘酚聚氧乙烯醚与水混合,再依次加入乳化剂椰油酸二乙醇酰胺、润滑剂油胺和非离子有机超级润湿剂,搅拌均匀后再加入炔二醇类分子消泡剂,持续搅拌至澄清透明液形成。用于切割210*210硅片,成品率超过97%,硅片表面无划痕,硅片易清洗。

Claims (7)

1.一种用于金刚线切割大尺寸硅片的切削液,其特征在于,以质量百分比计,其由以下组分组成:
助溶剂 1-5%,乳化剂30-40%,消泡剂1%,润湿剂5-12%,润滑剂1-3%,余量为水,以上总重量满足100%;其中:
助溶剂为β-萘酚聚氧乙烯醚;
乳化剂为脂肪酸二乙醇酰胺;
润湿剂为复合润湿剂或者非离子有机超级润湿剂,复合润湿剂由炔二醇类润湿剂和炔二醇醚类润湿剂组成;
润滑剂为油胺。
2.如权利要求1所述的大尺寸硅片金刚线切割的切削液,其特征在于,消泡剂选自炔二醇类消泡剂或者活性聚醚消泡剂中的一种。
3.如权利要求2所述的大尺寸硅片金刚线切割的切削液,其特征在于,炔二醇类消泡剂为SURFYNOL*DF110-D消泡剂,活性聚醚消泡剂为TEGO*Antifoam KS 911消泡剂。
4.如权利要求1所述的大尺寸硅片金刚线切割的切削液,其特征在于,乳化剂为椰油酸二乙醇酰胺。
5.如权利要求1所述的大尺寸硅片金刚线切割的切削液,其特征在于,炔二醇类润湿剂为SURFYNOL*104H,炔二醇醚类润湿剂为SURFYNOL*420;非离子有机表面活性剂为DYNOL810。
6.如权利要求1所述的大尺寸硅片金刚线切割的切削液,其特征在于,大尺寸硅片的直径在182-210nm之间。
7.一种如权利要求1所述的大尺寸硅片金刚线切割的切削液的制备方法,其特征在于,包括以下步骤:
在室温下,先将助溶剂与水混合,再依次加入乳化剂、润滑剂和润湿剂,搅拌均匀后再加入消泡剂,持续搅拌至澄清透明液,获得用于金刚线切割大尺寸硅片的切削液。
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