CN115484699A

CN115484699A - Wiring device and wiring process for heating pipe and thermocouple

Info

Publication number: CN115484699A
Application number: CN202211169708.0A
Authority: CN
Inventors: 贾坤良; 游利; 陆浩; 周红旗; 孙屹
Original assignee: Wuxi Xianyan New Material Technology Co ltd; Jingjiang Xianfeng Semiconductor Technology Co ltd
Current assignee: Wuxi Xianyan New Material Technology Co ltd; Jingjiang Xianfeng Semiconductor Technology Co ltd
Priority date: 2022-09-22
Filing date: 2022-09-22
Publication date: 2022-12-16
Anticipated expiration: 2042-09-22
Also published as: CN115484699B

Abstract

The invention provides a wiring device for a heating pipe and a thermocouple, which comprises a positioning pipe (1) capable of being opened and closed, a thermocouple assembly, a flexible heater (2), a clamping device (3) for clamping the flexible heater and a fixing piece (4), wherein the thermocouple assembly (5) comprises a thermocouple (501), a wiring cap (502) and a lead (503), the lead (503) is fixedly arranged on the fixing piece (4) in a penetrating mode, the fixing piece (4) is fixedly embedded at the head end of the positioning pipe (1), a penetrating exhaust hole (402) is formed in the fixing piece (4), the positioning pipe (1) comprises 2 semicircular pipes (101), and the fixing piece (4) comprises 2 semicircular plates (401). The invention also provides a wiring process. According to the invention, the fixing and drying can be realized on the assembly site without dismounting the protection and accessories which cannot resist high temperature and entering the oven, so that the time of the heating pipe and the thermocouple wiring process of the wafer heater is shortened, and the yield of the wafer heater is improved.

Description

Wiring device and wiring process for heating pipe and thermocouple

Technical Field

The invention relates to the technical field of wafer heaters, in particular to a wiring device and a wiring process for a heating pipe and a thermocouple.

Background

In the process of manufacturing the wafer heater, the wafer heater comprises a heating pipe and a thermocouple, the length range of leads of the heating pipe and the thermocouple is 1-4 meters, the subsequent processing is unchanged due to the fact that the leads are firstly connected, generally, after the wafer heater is machined and polished, after an important appearance surface is well protected, the heating pipe and the thermocouple which are embedded inside are connected, high-temperature-resistant epoxy glue is filled and sealed, and in order to obtain good sealing performance, the wafer heater needs to be dried in an oven. Before drying, the protection and accessories which are not high temperature resistant need to be removed; the wafer heater body needs to be prevented from being damaged and scratched during transportation; when mass production is carried out, the situation that parts wait for the oven for a long time and are easily scratched when the parts enter and exit the baking oven occurs, and the situation that wires are easily displaced in the curing process needs to be reworked, so that the production efficiency is seriously influenced. Therefore the urgent need a novel device need not to demolish the protection, can let the wafer heater need not to get into the oven, and the epoxy of embedment glues just can realize good stoving solidification effect to can guarantee that the wire is in central point and put in the curing process, guarantee good outward appearance, promote yield and production efficiency by a wide margin. Therefore, a new technical solution is needed to solve at least one of the above technical problems.

Disclosure of Invention

An object of the present invention is to provide a connection device for heating pipes and thermocouples which does not require dismantling of the protection and fittings which are not resistant to high temperatures, prevents the wires from shifting, does not require entry into an oven, and enables fixing and drying at the assembly site. Another object of the present invention is to provide a wiring process, which does not require placing the thermocouple assembly in an oven, does not scratch the surface of the wafer heater due to the entrance and exit of the thermocouple assembly into and out of the oven, does not require dismantling other fittings on the thermocouple assembly, has a good wiring effect, and greatly improves the yield.

In order to achieve the technical purpose and achieve the technical requirements, the technical scheme adopted by the invention is as follows: the utility model provides a termination for heating pipe and thermocouple, includes the registration arm that can open and shut, wears to establish thermocouple subassembly on the registration arm, pastes and establishes at the global flexible heater of registration arm outside, clamping device, the mounting that is used for pressing from both sides tight flexible heater, thermocouple subassembly includes thermocouple, wiring cap and wire, the wire is fixed to be worn to establish on the mounting, the fixed head end of establishing at the registration arm that inlays of mounting, be equipped with the exhaust hole that runs through on the mounting, the registration arm includes 2 semicircle pipes, the mounting includes 2 semicircle boards.

As a preferred technical scheme, an axially-through mounting hole is formed in the positioning pipe, and the mounting hole is of a stepped hole structure.

According to a preferable technical scheme, the mounting hole comprises a first section, a second section and a third section which are sequentially connected, the diameter of the first section and the diameter of the third section are smaller than that of the second section, the first section axially penetrates through the head end of the positioning pipe, and the third section axially penetrates through the tail end of the positioning pipe.

The flexible heater comprises an outer insulating film, an inner insulating film, a plurality of groups of heating wires arranged between the outer insulating film and the inner insulating film, a temperature control switch arranged on the outer peripheral surface of the outer insulating film, and electric wires respectively electrically connected with the heating wires and the temperature control switch.

As a preferable technical scheme, a partitioned heat insulation groove is formed in the inner wall of the positioning pipe.

As a preferred technical scheme, the positioning pipe comprises 2 semicircular pipes, and the fixing piece comprises 2 semicircular plates.

As a preferred technical scheme, the number of the clamping devices is 2, wherein 1 clamping device is arranged at the head end of the positioning pipe, and the other 1 clamping device is arranged at the tail end of the positioning pipe.

Preferably, the clamping device comprises 2 semicircular clamping blocks and bolts, and the 2 semicircular clamping blocks are connected through the bolts.

As a preferred technical scheme, the tail end of the positioning pipe is provided with a limiting step.

The invention also provides a wiring process, which adopts the wiring device for wiring and comprises the following steps:

step one, brazing the lead and a binding post on the thermocouple, and sleeving an insulating sleeve after brazing;

step two, after the step one is finished, enabling the lead and the thermocouple to penetrate through the wiring cap, then filling epoxy resin into the wiring cap for epoxy potting, and fixing the lead and the thermocouple to obtain a thermocouple assembly;

putting the thermocouple assembly into 1 of the semicircular tubes, clamping the lead by the fixing piece, covering the other 1 semicircular tube to obtain the positioning tube, and embedding the fixing piece at the front end of the positioning tube;

step four, the flexible heater is hot-pressed to the peripheral surface of the positioning pipe, and then the clamping device is screwed down to fix the 2 semicircular pipes;

step five, starting the flexible heater to dry and heat, wherein the heating temperature is 80-100 ℃, and the operation time is 2-4 hours;

and step six, closing the flexible heater, unscrewing the clamping device, taking down the flexible heater, then opening the positioning pipe and the fixing piece, and taking out the thermocouple assembly.

As a preferred technical scheme, the middle section of the insulating sleeve is arc-shaped.

The invention has the beneficial effects that:

1) The flexible heater is attached to the outer peripheral surface of the positioning tube, then the positioning tube and the flexible heater are fixed through the clamping device, the flexible heater heats the positioning tube, the positioning tube dries epoxy resin in the wiring cap, so that parts which cannot resist high temperature are not required to be dismantled, the whole part does not need to enter an oven, the installation is convenient, and a fixing piece is used for fixing a lead on a thermocouple, so that the fixing and the drying can be realized on an assembly site, the steps of entering and exiting the oven are reduced, the time of a wiring process is greatly shortened, and the working efficiency and the yield are greatly improved;

2) Preferably, the stepped hole structure forms a plurality of stepped holes, so that a fixing piece, a thermocouple and a thermocouple wiring cap can be conveniently installed in the installation hole, and further preferably, the first section is used for installing the fixing piece, the second section is used for installing the thermocouple wiring cap, the third section is used for installing the thermocouple, the diameter of the second section is large, the wiring cap can be limited, and excessive displacement can be prevented;

3) Preferably, the positioning pipe is divided into a plurality of heating areas by a plurality of groups of heating wires;

4) Preferably, the partitioned heat insulation groove is arranged corresponding to the plurality of groups of heating wires, and plays a role in heat insulation for the adjacent 2 heating areas;

5) Preferably, the positioning pipe comprises 2 semicircular pipes, so that each part can be conveniently installed in the positioning pipe, and the fixing piece comprises 2 semicircular plates, so that the conducting wire can be conveniently fixed;

6) Preferably, the clamping effect is improved through 2 clamping devices, further preferably, the clamping can be realized by screwing the bolt, the operation is simple, and the installation and the disassembly are convenient;

7) Preferably, the tail end of the positioning pipe is provided with a limiting step for limiting the clamping device so as to prevent the clamping device from falling off in the installation process;

8) The wiring process can better cure the epoxy resin, does not need to be carried into an oven, avoids the surface of the heating pipe from being scratched, and greatly improves the yield of the heating pipe;

9) Preferably, the middle section of the insulating sleeve is arc-shaped and has a buffering effect.

Drawings

FIG. 1 is a three-dimensional view of one embodiment of the present invention;

FIG. 2 is a cross-sectional view of a positioning tube according to one embodiment of the present invention;

FIG. 3 is a cross-sectional view of one embodiment of the present invention;

FIG. 4 is a block diagram of a flexible heater according to one embodiment of the present invention;

FIG. 5 is a block diagram of a clamping assembly according to one embodiment of the present invention;

FIG. 6 is a block diagram of an insulating sleeve according to an embodiment of the present invention;

in fig. 1-6, 1, a positioning tube; 101. a semicircular tube; 102. mounting holes; 1021. a first stage; 1022. a second stage; 1023. a third stage; 103. a partitioned heat insulation groove; 104. caulking grooves; 105. a limiting step; 2. a flexible heater; 201. an outer insulating film; 202. an internal insulating film; 203. heating wires; 204. a temperature control switch; 205. an electric wire; 3. a clamping device; 301. a clamping block; 3011. an empty avoiding groove; 302. a bolt; 4. a fixing member; 401. a semicircular plate; 402. an exhaust hole; 5. a thermocouple assembly; 501. a thermocouple; 502. a wiring cap; 503. a wire; 6. a connector; 7. an insulating sleeve; 8. and (3) epoxy resin.

Detailed Description

The invention is further described below with reference to the accompanying drawings.

Referring to fig. 1 to 6, an embodiment of the present invention provides a wiring device for a heating pipe and a thermocouple, including a positioning pipe 1 capable of opening and closing, a thermocouple assembly 5 penetrating through the positioning pipe 1, a flexible heater 2 attached to an outer circumferential surface of the positioning pipe 1, at least 1 clamping device 3 for clamping the flexible heater 2, and a fixing member 4, wherein the fixing member 4 is fixedly embedded at a head end of the positioning pipe 1, the positioning pipe 1 includes 2 semicircular pipes 101, the fixing member 4 includes 2 semicircular plates 401, the thermocouple assembly 5 includes a thermocouple 501, a wiring cap 502 and a lead 503, epoxy resin 8 is filled in the wiring cap 502, the 2 semicircular pipes 101 have an opening and closing function, the thermocouple 501 and the wiring cap 502 can be fixed after being clamped by the clamping device 3, when disassembly is required, the clamping device 3 is loosened, the fixing member 4 is correspondingly provided with the 2 semicircular plates 401, the fixing device has the advantages that the lead 503 can be clamped, the fixing effect is good, the clamping device 3 is loosened, the fixing part 4 can be quickly taken down, the installation and the disassembly are more convenient, the flexible heater 2 is attached to the outer peripheral surface of the positioning tube 1, then the positioning tube 1 and the flexible heater 2 are fixed through the clamping device 3, the positioning tube 1 is heated through the flexible heater 2, the positioning tube 1 is heated to dry the epoxy resin 8 in the wiring cap 502, the curing of the epoxy resin 8 is accelerated, so that the parts which cannot resist high temperature are not required to be disassembled, the integral entering of the oven is not required, the installation and the disassembly are convenient, the lead 503 on the thermocouple 5 is fixed through the fixing part 4, the lead 503 is prevented from shifting, the fixation and the drying can be realized on the assembly site, the steps of entering and exiting the oven are reduced, the time of a wiring process is greatly shortened, the working efficiency and the yield are greatly improved, the vent 402 also allows for venting of gases generated during curing of the epoxy resin 8.

Furthermore, a plurality of exhaust holes 402 which are circumferentially arranged are correspondingly arranged on the fixing member 4 in a penetrating manner, and the exhaust holes 402 are used for drying and exhausting the positioning pipe 1.

Furthermore, the front end of the positioning tube 1 is provided with a caulking groove 104, and the fixing piece 4 is embedded in the caulking groove 104, so that the structure is simple and practical.

As shown in fig. 1-6, in some embodiments, the positioning tube 1 is provided with an axially extending mounting hole 102, and the mounting hole 102 has a stepped hole structure.

Furthermore, the mounting hole 102 includes a first section 1021, a second section 1022 and a third section 1023 which are connected in sequence, the diameters of the first section 1021 and the third section 1023 are smaller than the diameter of the second section 1022, the first section 1021 axially penetrates through the head end of the positioning tube 1, the third section 1023 axially penetrates through the tail end of the positioning tube 1, the first section 1021 is used for mounting a lead 6 on the thermocouple 5, the second section 1022 is used for mounting a terminal cap 7 on the thermocouple 5, the third section 1023 is used for mounting the thermocouple 5, and the diameter of the second section 1022 is larger than the diameters of the first section 1021 and the third section 1023, so that the terminal cap 7 is limited, the terminal cap 7 is prevented from excessive sliding, and the wiring effect is prevented from being affected.

As shown in fig. 1 to 6, in some embodiments, the flexible heater 2 includes an outer insulating film 201, an inner insulating film 202, a plurality of sets of heating wires 203 disposed between the outer insulating film 201 and the inner insulating film 202, a thermostat 204 disposed on an outer circumferential surface of the outer insulating film 201, and electric wires 205 electrically connected to the heating wires 203 and the thermostat 204, respectively, and the heating wires 203 are prevented from contacting with an external conductive member to cause short circuit by the outer insulating film 201 and the inner insulating film 202, and further, the number of the heating wires 203 is 3 sets, so that the positioning pipe 1 is divided into 3 heating zones, and the positioning pipe 1 is subjected to zone heating control, thereby improving drying efficiency.

Further, the plurality of electric wires 203 are collected by the connector 6, thereby preventing the electric wires 203 from being disordered and from being wrongly wired.

As shown in fig. 1 to 6, in some embodiments, the inner wall of the positioning tube 1 is provided with a partitioned heat insulation groove 103, which has a certain insulation effect on the internal heat conduction of 2 adjacent heating areas, so that the independent temperature control effect of each heating area is better, further, the number of the partitioned heat insulation grooves 103 is 4, and 2 partitioned heat insulation grooves 103 are provided at the joints of 2 adjacent heating areas.

As shown in fig. 1-6, in some embodiments, the number of the clamping devices 3 is 2, wherein 1 clamping device 3 is disposed at the head end of the positioning tube 1, and another 1 clamping device 3 is disposed at the tail end of the positioning tube 1, and 2 clamping devices 3 can have better clamping effect on the flexible heater 2.

As shown in fig. 1-6, in some embodiments, the clamping device 3 comprises 2 semicircular clamping blocks 301,

bolts

302, and 2 semicircular clamping blocks 301 are connected through the bolts 302, so that the structure is simple and practical, and the installation and the disassembly are easy.

Further, the inner peripheral surface of the clamping block 301 is provided with a plurality of clearance grooves 3011 which are uniformly distributed on the circumference, the clearance grooves 3011 can reduce the contact area, the clamping effect is good, and further, the clearance grooves 3011 are arc-shaped.

As shown in fig. 1-6, in some embodiments, the tail end of the positioning tube 1 is provided with a limiting step 105 for limiting the clamping device 3 and preventing the clamping device 3 from falling off during installation.

step one, the lead 503 and a binding post 5011 on the thermocouple 501 are brazed, an insulating sleeve 7 is sleeved after brazing, and further, the middle section of the insulating sleeve 7 is arc-shaped and has a buffering effect, so that the epoxy resin 8 is prevented from being cured, tightened and damaged to connect the lead 503 and the binding post 5011;

step two, after the step one is finished, penetrating the lead 503 and the thermocouple 501 through the wiring cap 502, then filling epoxy resin into the wiring cap 502 for epoxy potting, and fixing the lead 503 and the thermocouple 501 to obtain a thermocouple assembly 5;

placing the thermocouple assembly 5 into 1 of the semicircular tubes 101, clamping the lead by the fixing piece 4, covering another 1 of the semicircular tubes 101 to obtain the positioning tube 1, and embedding the fixing piece 4 at the front end of the positioning tube 1;

step four, the flexible heater 2 is hot-pressed to the peripheral surface of the positioning tube 1, and then the clamping device 3 is screwed down to fix the 2 semicircular tubes 101;

step five, the flexible heater 2 is started to dry and heat, the heating temperature is 80-100 ℃, the operation time is 2-4 hours, the epoxy resin 8 is hard after being cured, the curing effect is good, if the flexible heater is not heated and dried, the curing is carried out at the room temperature of 25 ℃ for more than 12 hours, the curing efficiency is obviously improved, and the flexible heater does not need to enter an oven;

and step six, closing the flexible heater 2, unscrewing the clamping device 3, taking down the flexible heater 2, then opening the positioning pipe 1 and the fixing piece 4, and taking out the thermocouple assembly 5.

Because the wafer heater comprises the heating pipe and the thermocouple assembly 5, the wafer heater of some models is heavier, the wafer heater is inconvenient to carry to the oven, the surface of the wafer heater is easy to scratch in the process of the oven entering and exiting, the parts which cannot resist high temperature are removed before drying, and the wafer heater is reassembled after drying.

The above examples are given for the purpose of illustrating the invention in a clear and non-limiting manner, and it will be apparent to those skilled in the art that many more modifications and variations can be made in the above-described embodiments without departing from the spirit and scope of the invention.

Claims

1. The utility model provides a termination for heating pipe and thermocouple, its characterized in that, including locating tube (1) that can open and shut, wear to establish thermocouple subassembly (5) on locating tube (1), paste and establish flexible heater (2) in locating tube (1) outer peripheral face, be used for pressing from both sides clamping device (3), mounting (4) of tight flexible heater (2), thermocouple subassembly (5) include thermocouple (501), wiring cap (502) and wire (503), wire (503) are fixed to be worn to establish on mounting (4), the fixed head end of establishing in locating tube (1) of inlaying of mounting (4), be equipped with exhaust hole (402) that run through on mounting (4), locating tube (1) includes 2 semicircle pipes (101), mounting (4) include 2 semicircle boards (401).

2. A terminal device for heating pipes and thermocouples according to claim 1, characterized in that the positioning pipe (1) is provided with an axially extending mounting hole (102), and the mounting hole (102) has a stepped hole structure.

3. A terminal block for heating tubes and thermocouples according to claim 2, wherein the mounting hole (102) comprises a first section (1021), a second section (1022) and a third section (1023) connected in series, the first section (1021) and the third section (1023) having a smaller diameter than the second section (1022), the first section (1021) axially extending through a head end of the positioning tube (1), and the third section (1023) axially extending through a tail end of the positioning tube (1).

4. A wiring device for a heating pipe and a thermocouple according to claim 1, wherein the flexible heater (2) comprises an outer insulating film (201), an inner insulating film (202), a plurality of sets of heating wires (203) disposed between the outer insulating film (201) and the inner insulating film (202), a temperature controlled switch (204) disposed on an outer peripheral surface of the outer insulating film (201), and electric wires (205) electrically connected to the heating wires (203) and the temperature controlled switch (204), respectively.

5. A wiring device for heating pipes and thermocouples according to claim 4, characterized in that the inner wall of the positioning pipe (1) is provided with a zoned heat insulation groove (103).

6. A connection device for heating tubes and thermocouples according to claim 1, characterized in that the number of said clamping devices (3) is 2, of which 1 clamping device (3) is arranged at the head end of the positioning tube (1) and the other 1 clamping device (3) is arranged at the tail end of the positioning tube (1).

7. A terminal arrangement for heating tubes and thermocouples according to claim 6, characterized in that the clamping means (3) comprises 2 semicircular clamping blocks (301), bolts (302), 2 of the semicircular clamping blocks (301) being connected by bolts (302).

8. A wiring device for heating pipes and thermocouples according to claim 1, characterized in that the tail end of the positioning pipe (1) is provided with a limit step (105).

9. A wiring process for a thermoelement assembly, wherein the wiring is performed using the wiring device as set forth in any one of claims 1 to 8, comprising the steps of:

step one, brazing the lead (503) and a binding post (5011) on the thermocouple (501), and sleeving an insulating sleeve (7) after brazing;

step two, after the step one is finished, the lead (503) and the thermocouple (501) penetrate through the wiring cap (502), then epoxy resin (8) is poured into the wiring cap (502) for epoxy potting, and the lead (503) and the thermocouple (501) are fixed to obtain a thermocouple assembly (5);

putting the thermocouple assembly (5) into 1 of the semicircular tubes (101), clamping the wire by the fixing piece (4), covering another 1 of the semicircular tubes (101) to obtain the positioning tube (1), and embedding the fixing piece (4) at the front end of the positioning tube (1);

step four, the flexible heater (2) is hot-pressed to the peripheral surface of the positioning pipe (1), and then the clamping device (3) is screwed to fix the 2 semicircular pipes (101);

step five, starting the flexible heater (2) to dry and heat, wherein the heating temperature is 80-100 ℃, and the operation time is 2-4 hours;

and step six, closing the flexible heater (2), unscrewing the clamping device (3), taking down the flexible heater (2), then opening the positioning pipe (1) and the fixing piece (4), and taking out the thermocouple assembly (5).

10. A thermocouple wiring process according to claim 9, characterized in that the middle section of the insulating sleeve (7) is arc-shaped.