CN115479892A - Multi-angle visual detection device for micro-fluidic chip and detection method thereof - Google Patents
Multi-angle visual detection device for micro-fluidic chip and detection method thereof Download PDFInfo
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- CN115479892A CN115479892A CN202211010654.3A CN202211010654A CN115479892A CN 115479892 A CN115479892 A CN 115479892A CN 202211010654 A CN202211010654 A CN 202211010654A CN 115479892 A CN115479892 A CN 115479892A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
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Abstract
The invention belongs to the field of micro-electro-mechanical systems, and relates to a multi-angle visual detection device for a microfluidic chip and a detection method thereof. The invention has the advantages that: after the device is combined with a common metallographic microscope for use, the observation range and the observation angle of the microscope can be effectively expanded through the multi-angle detection adjusting arm on the device, and multi-angle visual detection on a micro-fluidic chip or other micro-nano scale devices with a complex structure and a large depth-to-width ratio is realized.
Description
Technical Field
The invention belongs to the field of Micro-electro Mechanical Systems (MEMS), and relates to a multi-angle visual detection device for a Micro-fluidic chip and a detection method thereof.
Background
Since the 80 s of the 20 th century, MEMS has been developed at a rapid pace into an emerging research field integrating micromachines, microsensors, microdrivers, microcontrollers, microactuators, signal processing, and intelligent control. As an important component of MEMS devices, micro total analysis systems (μ TAS) have the characteristics of small volume, high integration level, excellent compatibility and the like, have become indispensable analytical means in the fields of biology, medicine, chemistry, environment and the like by combining detection methods such as mass spectrum, optics, electrochemistry and the like, and also become ideal choices for a Micro cantilever sensor to get rid of the constraint of laboratory conditions, meet the requirements of real-time and miniaturized detection and expand application scenes. With the increasing maturity of MEMS technologies such as soft etching, 3D printing, nanoimprint and the like, the prepared microfluidic device has smaller and smaller size and higher precision and structure complexity, which not only puts higher requirements on the assembly process of the device, but also puts higher requirements on the detection of indexes such as structural integrity, consistency, smoothness and the like of the device.
For the metal material MEMS device or the MEMS device whose surface is easy to be metallized, scanning Electron Microscope (SEM) is undoubtedly the first choice for testing the technical indexes of device structure integrity, consistency, smoothness, etc. However, for the micro total analysis system device made of polymer or silicon dioxide material, because the material is not conductive, before SEM test, the metallization of the device surface must be realized by additional steps such as spraying gold, and the like, so as to prepare for the test. However, the gold spraying process is time-consuming, labor-consuming and high in cost, and more importantly, the gold spraying process can cause irreversible damage to the internal structure precision, the biocompatibility, the microfluid movement and the like of the microfluidic device, so that the performance of the device is seriously influenced. With the appearance and rapid development of image processing technology, pictures shot by a common metallographic microscope are visualized, namely, a machine vision detection technology is mature. The appearance of the technology not only solves the difficulty encountered when the SEM equipment tests the indexes such as structural integrity, consistency, smoothness and the like of the microfluidic device, but also greatly reduces the detection cost and the detection time, and can be applied to the wide fields of detection, measurement, assembly and the like of small parts, so that the technology has very high practical value and forms a research heat tide gradually in society. However, when a metallographic microscope is used for shooting a microfluidic device with a complex structure and a large depth-to-width ratio, the angle of the obtained picture is often single, only the upper surface or the lower surface of the device can be obtained, and the structural overall appearance cannot be accurately restored.
Disclosure of Invention
Object of the Invention
In order to solve the defects of the prior art, the invention provides a multi-angle visual detection device for a micro-fluidic chip, which is used in combination with a metallographic microscope to realize multi-angle visual detection on a micro-fluidic device with a complex structure and a large depth-to-width ratio.
In order to achieve the purpose, the invention provides the following technical scheme:
a clamping mechanism for multi-angle visual detection of a microfluidic chip comprises an annular base and a multi-angle detection adjusting arm,
the annular base is provided with an adjusting arm entering channel;
the multi-angle detection adjusting arm comprises an adapter fixing bolt, a fixture adapter and a chip fixture, wherein the adapter fixing bolt is in threaded connection with the adjusting arm entering channel, one end of the adapter fixing bolt is fixed on the outer side of the adjusting arm entering channel, and the other end of the adapter fixing bolt extends into the adjusting arm entering channel and extends inwards; the fixture adapter is arranged on the inner side of the annular base, one side of the fixture adapter is hinged to the adapter fixing bolt and fixed through the bolt, the other side of the fixture adapter is hinged to the chip fixture and fixed through the bolt, and the fixture adapter can rotate along the vertical direction relative to the adapter fixing bolt.
As a further description of the above scheme, the LED lighting device further includes a ring-shaped LED light strip, where the ring-shaped LED light strip is provided with a plurality of LED lamps, and the ring-shaped LED light strip is arranged on the ring-shaped base; and a liquid inlet hose fixing groove is also formed in the annular base.
As a further description of the above scheme, the chip clamp further includes a chip clamping slot, a chip fixing member, and a clamp arm; the chip clamping groove is of a groove body structure with an inward opening; the chip fixing piece comprises a chip fixing disc, a threaded rod and a chip fixing wrench, wherein the chip fixing disc is positioned inside the chip clamping groove, and the chip fixing wrench is positioned outside the chip clamping groove; the threaded rod is in threaded connection with a top plate or a bottom plate of the chip clamping groove, one end of the threaded rod is connected with the chip fixing disc, and the other end of the threaded rod is connected with the chip fixing wrench;
one end of the fixture arm is fixedly connected with the side wall of the chip clamping groove, and the other end of the fixture arm is fixedly connected with the fixture adapter through a bolt.
A multi-angle visual detection device for a microfluidic chip comprises a scanning electron microscope and the clamping mechanism,
the scanning electron microscope comprises a supporting seat, an objective table, an objective lens and an eyepiece, wherein the objective table is provided with an objective table light-transmitting hole, and the objective table light-transmitting hole is arranged in the center of the objective table;
the annular base is arranged on the top surface of the object stage.
As a further description of the above scheme, the lamp strip further comprises a connecting bolt, the annular base is provided with a plurality of base fixing bolt holes, the annular LED lamp strip is placed on the top surface of the annular base, the annular LED lamp strip is provided with lamp strip fixing holes, the lamp strip fixing holes and the base fixing bolt holes are on the same axis, and the annular LED lamp strip and the annular base are fixedly connected with the objective table through connecting bolts.
A method for detecting a microfluidic device by using the multi-angle visual detection device for the microfluidic chip comprises the following steps:
step 1: opening an illumination system of the scanning electron microscope, and selecting an objective lens according to the magnification requirement;
step 2: fixing the micro-fluidic chip to be detected at the central position of the objective table through a clamping mechanism;
and step 3: observing different positions of the micro-fluidic chip to be detected on the horizontal plane;
and 4, step 4: adjusting the angle of the micro-fluidic chip to be detected and observing;
and 5: and (4) repeating the step (4), closing the scanning electron microscope after the observation of the micro-fluidic chip to be detected is finished, and taking down the micro-fluidic chip to be detected.
As a further description of the above solution, the step 3 of observing different positions of the microfluidic chip on the horizontal plane includes the following steps:
step A: rotating a coarse regulator of the scanning electron microscope to enable the objective lens to descend and to be close to the surface of the micro-fluidic chip to be detected, and changing to a fine regulator when the brightness of a view field is enhanced until an object image is clear;
and B: adjusting the position of a reflector of the electron microscope;
and C: adjusting a moving knob of an objective table of the scanning electron microscope, observing different positions of the micro-fluidic chip to be detected on a horizontal plane, and selecting a required view field to take a picture;
as a further description of the above scheme, the adjusting the angle of the microfluidic chip and observing in step 4 includes the following steps:
rotating a coarse regulator of the scanning electron microscope to enable the objective lens to descend and to be close to the surface of the micro-fluidic chip to be detected, and changing to a fine regulator when the brightness of a view field is enhanced until an object image is clear;
and B: adjusting the position of a reflector of the electron microscope;
step C: and adjusting an objective table moving knob of the scanning electron microscope, observing different positions of the micro-fluidic chip to be detected on the horizontal plane, and selecting a view field for taking a picture.
Advantages and effects
1. After the multi-angle visual detection device for the microfluidic chip is combined with a common metallographic microscope for use, the observation range and the observation angle of the microscope can be effectively expanded through the multi-angle detection adjusting arm on the device, and multi-angle visual detection on the microfluidic chip or other micro-nano scale devices with complex structures and large depth-to-width ratios is realized.
2. And then, on the basis of the advantages of customized processing, rapid forming, integrated production and the like, a customized preparation method is provided by fully utilizing the additive manufacturing technology, and the multi-angle visual detection device for the microfluidic chip can be prepared in a customized manner according to the model of the microscope and the size of the microfluidic chip.
3. When the detection device is used for the leakage test of the microfluidic chip, the liquid leakage caused by loose connection of the liquid inlet hose due to the fact that the liquid inlet pressure is continuously increased in the detection process can be avoided through the components such as the chip clamp, the liquid inlet hose fixing groove and the like.
Drawings
FIG. 1 is a schematic structural diagram of a clamping mechanism for multi-angle visual inspection of a microfluidic chip according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of the ring-shaped base with the liquid inlet hose fixing groove in fig. 1, wherein the left picture is a top view of the ring-shaped base with the liquid inlet hose fixing groove, the upper right picture is a side view of the ring-shaped base, and the lower right picture is a sectional view of the liquid inlet hose fixing groove;
figure 3 is a schematic structural view of the clamp adapter of figure 1, wherein the top left view is a top view of the clamp adapter, the bottom left view is a side view of the clamp adapter, the top right view is a left side view of the clamp adapter, and the bottom right view is a right side view of the clamp adapter;
FIG. 4 is a schematic diagram showing the structure of the die attachment jig of FIG. 1, wherein the first left drawing is a top view of the die attachment jig, the second left drawing is a front view of the die attachment jig, the second left drawing is a left side view of the die attachment jig, and the second left drawing is a right side view of the die attachment jig;
figure 5 is a schematic structural view of the adapter fixing bolt of figure 1, wherein the first left drawing is a left side view of the adapter fixing bolt, the second left drawing is a top view of the adapter fixing bolt, the third left drawing is a front view of the adapter fixing bolt, and the fourth left drawing is a right side view of the adapter fixing bolt;
FIG. 6 is a schematic structural diagram of the multi-angle detection adjustment arm of FIG. 1, wherein the upper view is a front view of the multi-angle detection adjustment arm, and the lower view is a top view of the multi-angle detection adjustment arm;
fig. 7 is a schematic structural diagram of the annular LED strip of fig. 1;
FIG. 8 is a schematic view of an installation structure of a chip holder according to an embodiment of the present invention;
fig. 9 is an assembly view of the annular base with the liquid inlet hose fixing groove and the annular LED lamp strip according to the embodiment of the present invention, where the left one is a structural schematic diagram of forward installation of the annular LED lamp strip and the annular base with the liquid inlet hose fixing groove, and the left two is a structural schematic diagram of reverse installation of the annular LED lamp strip and the annular base with the liquid inlet hose fixing groove;
FIG. 10 is a schematic diagram of a conventional optical metallographic microscope imaging;
FIG. 11 is a schematic structural diagram of a conventional optical metallographic microscope;
FIG. 12 is a top view of the stage of FIG. 11;
FIG. 13 is a schematic view of the structure of FIG. 1 mounted with an optical metallographic microscope;
fig. 14 is a detection schematic diagram of a multi-angle visual detection apparatus for a microfluidic chip according to an embodiment of the present invention, an upper diagram is a multi-angle visual detection state diagram of the microfluidic chip, and a lower diagram is a multi-angle visual detection state diagram of the microfluidic chip.
Description of reference numerals:
1. a ring-shaped base; 101. the adjusting arm enters the channel; 102. a base fixing bolt hole; 103. a liquid inlet hose fixing groove; 104. an annular base fixing bolt; 2. a chip clamp; 201. a chip fixing member; 2011. a chip fixing disc; 2012. fixing a wrench on the chip; 202. a bolt hole is fixed by the chip clamp; 203. a clamp arm; 204. the fixture adapter is provided with a fixing hole; 3. the adapter fixing bolt; 301. an adapter fixing hole; 4. a fixture adapter; 401. chip clamp fixing holes; 402. an adapter fixing hole; 5. fixing a bolt by the chip clamp; 6. a microfluidic chip; 7. an annular LED strip; 701. a lamp strip fixing hole; 702. an LED lamp; 8. detecting a regulating arm at multiple angles; 9. a supporting seat; 10. a reflective mirror; 11. an object stage; 1101. a stage light-transmitting sheet; 1102. a light hole of the objective table; 1103. an object stage light-transmitting sheet mounting table; 12. a fine adjuster; 13. a coarse adjuster; 14. a coarse movement limiter; 15. an objective lens; 16. an objective table moving knob; 17. an eyepiece.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it is to be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention.
As shown in fig. 1, a clamping mechanism for multi-angle visual inspection of a microfluidic chip according to an embodiment of the present invention includes an annular base 1 and a multi-angle inspection adjusting arm 8, wherein the annular base 1 is provided with an adjusting arm entering channel 101; a plurality of multi-angle detection adjusting arms 8 are arranged, the multi-angle detection adjusting arms 8 are circumferentially arranged on the annular base 1 at equal intervals through an adjusting arm entering channel 101, each multi-angle detection adjusting arm 8 comprises an adapter fixing bolt 3, a fixture adapter 4 and a chip fixture 2, the adapter fixing bolt 3 is in threaded connection with the adjusting arm entering channel 101, one end of the adapter fixing bolt 3 is fixed on the outer side of the adjusting arm entering channel 101, the other end of the adapter fixing bolt 3 extends into the adjusting arm entering channel 101 and extends into the annular base 1, and an adapter fixing hole 301 for connecting the adapter fixture 4 is formed in the adapter fixing bolt 3; fixture adapter 4 sets up in 1 inboard of loop type base, 4 one sides of fixture adapter are offered and are used for 2 fixed chip fixture fixing holes 401 of chip fixture, 4 opposite sides of fixture adapter are offered and are used for the adapter fixing hole 402 fixed with adapter fixing bolt 3, 4 one sides of fixture adapter articulate with adapter fixing bolt 3 and pass through the bolt fastening, the opposite side of fixture adapter 4 articulates with chip fixture 2 and passes through the bolt fastening, and the fixture adapter 4 can be relative adapter fixing bolt 3 along vertical direction rotatory. The structure can fix the microfluidic chip 6 and also facilitate the adjustment of the position of the microfluidic chip 6.
The clamping mechanism for the multi-angle visual detection of the microfluidic chip further comprises an annular LED lamp strip 7, wherein the annular LED lamp strip 7 is provided with a plurality of LED lamps 702, a plurality of lamp strip fixing holes 701 are formed in the annular LED lamp strip 7, and the annular LED lamp strip 7 is fixed on the annular base 1 by penetrating bolts through the lamp strip fixing holes 701 during installation; a liquid inlet hose fixing groove 103 for fixing a liquid inlet hose is arranged on the annular base 1, wherein the liquid inlet hose is a hose for transporting a sample to be detected and a reagent for the microfluidic chip 6; and still set up base fixing bolt hole 102 on annular base 1, subassembly such as chip fixture 2, feed liquor hose fixed slot 103 are passed through in this kind of design, when being used for the little fluidic chip 6 leakage test, can also avoid the not hard up sample seepage or the lens that shelters from that causes of feed liquor hose in the testing process.
The chip clamp 2 of the embodiment of the invention comprises a chip clamping groove, a chip fixing piece 201 and a clamp arm 203; the chip clamping groove is of a groove body structure with an inward opening; the chip fixing part 201 comprises a chip fixing disc 2011, a threaded rod and a chip fixing wrench 2012, wherein the chip fixing disc 2011 is located inside a chip clamping groove, and the chip fixing wrench 2012 is located outside the chip clamping groove; the threaded rod is in threaded connection with a top plate or a bottom plate of the chip clamping groove, one end of the threaded rod is connected with the chip fixing disc 2011, and the other end of the threaded rod is connected with the chip fixing wrench 2012; one end of the fixture arm 203 is fixedly connected with the side wall of the chip clamping groove, and the other end of the fixture arm 203 is fixedly connected with the fixture adapter 4 through a bolt.
A multi-angle visual detection device for a microfluidic chip comprises a scanning electron microscope and the clamping mechanism,
the scanning electron microscope comprises a supporting seat 9, an objective table 11, an objective lens 15 and an eyepiece 17, wherein the objective table is provided with an objective table light-transmitting hole 1102, and the objective table light-transmitting hole 1102 is arranged at the central position of the objective table 11; wherein the ring-shaped base 1 is arranged on the top surface of the object stage 11; specifically, the base fixing bolt 104 passes through the base fixing bolt hole 102 to fix the annular base 1 to the support base 9; the annular LED lamp strip 7 can be arranged on the upper surface or the lower surface of the annular base 1 according to the position change of the microfluidic chip 6 so as to meet different requirements of visual detection illumination; after the multi-angle visual detection device for the microfluidic chip is used in combination with a common metallographic microscope, the observation range and the observation angle of the microscope can be effectively expanded through the multi-angle detection adjusting arm 8 on the device, and multi-angle visual detection is realized on the microfluidic chip 6 or other micro-nano scale devices with complex structures and large depth-to-width ratios; in addition, when the detection device is used for the leakage test of the microfluidic chip 6, the liquid leakage caused by loose connection of the liquid inlet hose due to the fact that the liquid inlet pressure is continuously increased in the detection process can be avoided.
The multi-angle visual detection device for the microfluidic chip disclosed by the embodiment of the invention further comprises a connecting bolt 104, wherein the annular base 1 is provided with a plurality of base fixing bolt holes 102, the annular LED lamp strip 7 is placed on the top surface of the annular base 1, the annular LED lamp strip 7 is provided with a lamp strip fixing hole 702, the lamp strip fixing hole 702 and the base fixing bolt holes 102 are on the same axis, and the annular LED lamp strip 7 and the annular base 1 are fixedly connected with the object stage 11 through the connecting bolt 104.
A method for detecting a microfluidic device by using the multi-angle visual detection device for the microfluidic chip comprises the following steps:
step 1: turning on an illumination system of the scanning electron microscope, and selecting an objective lens 15 according to the magnification requirement;
step 2: fixing the micro-fluidic chip 6 to be detected at the central position of the objective table 11 through a clamping mechanism;
and step 3: observing different positions of the micro-fluidic chip 6 to be detected on the horizontal plane;
and 4, step 4: adjusting the angle of the micro-fluidic chip 6 to be detected and observing;
and 5: and (4) repeating the step (4), closing the scanning electron microscope after the observation of the micro-fluidic chip (6) to be detected is finished, and taking down the micro-fluidic chip (6) to be detected.
The observation of different positions of the microfluidic chip 6 on the horizontal plane in the step 3 includes the following steps:
step A: rotating a coarse regulator 13 of the scanning electron microscope to enable an objective lens 15 to descend and to be close to the surface of the micro-fluidic chip 6 to be detected, and changing to a fine regulator 12 when the brightness of a view field is enhanced until an object image is clear;
and B: adjusting the position of a reflector 10 of the electron microscope;
and C: adjusting an objective table moving knob 16 of the scanning electron microscope, observing different positions of the micro-fluidic chip 6 to be detected on a horizontal plane, and selecting a required view field for photographing;
the adjusting and observing of the angle of the microfluidic chip 6 in the step 4 comprises the following steps:
rotating a coarse regulator 13 of the scanning electron microscope to enable an objective lens 15 to descend and to be close to the surface of the micro-fluidic chip 6 to be detected, and changing a fine regulator 12 when the brightness of a view field is enhanced until an object image is clear;
and B: adjusting the position of a reflector 10 of the electron microscope;
and C: and adjusting an objective table moving knob 16 of the scanning electron microscope, observing different positions of the micro-fluidic chip 6 to be detected on the horizontal plane, and selecting a view field for photographing.
The design principle of the invention is as follows:
the imaging principle of the microscope is shown in fig. 10, and a group of lenses facing an object AB to be observed is called an objective lens 15; the set of lenses facing the eyes is called the eyepiece 17. When the object AB to be observed is placed slightly far in front of the objective lens 15, the reflected light from the object passes through the objective lens 15 and is refracted, so that an enlarged real image a 'B' (referred to as an intermediate image) is obtained. If a 'B' is within the focal length of the eyepiece 17, the objective lens 15 observed through the eyepiece 17 is a virtual image a "B" that is magnified again by the eyepiece 17. The total magnification of the metallurgical microscope is the product of the magnification of the objective lens 15 and the magnification of the ocular lens 17, for example, the magnification of the objective lens 15 is 20 KHz, the magnification of the ocular lens 17 is 10 KHz, and the magnification of the microscope is 200 KHz. The definition of the virtual image A 'B' is related to the distance between human eyes and the virtual image, and researches show that the optimal distance for observing an object by normal human eyes is 250mm (called the photopic distance), so that the virtual image A 'B' just falls at the position 250mm away from the human eyes, and the image of the observed object can be most clear.
As shown in fig. 11, the optical metalloscope depends on the above optical system to realize the magnifying effect, and its main using steps are as follows:
1. the power is switched on, the lighting system is turned on, the objective lens 15 is selected according to the requirement of the magnification factor, and if the image needs to be displayed by a computer, the image can be transmitted to computer software through a video adapter cable.
2. The sample is placed on the stage transparency 1101 in the center of the stage 11 and is held by the coarse stop 14.
3. The coarse actuator 13 is rotated to lower the stage close to the specimen surface, and the fine actuator 12 is used when the field brightness increases until the object image is sharp.
4. The position of the reflector is adjusted to meet the observation and illumination requirements.
5. Adjusting the stage movement knob 16 to observe different positions of the sample on the horizontal plane and select the desired field of view for taking a picture
6. After the observation of the sample is completed, the power is turned off, the coarse adjustment device 13 is twisted to the initial position, and the sample is taken down.
According to the operation steps, when the common optical metallographic microscope is detected, the position of a detection object can be adjusted on the horizontal plane only through the object stage moving knob 16, and multi-angle detection cannot be achieved. The defect is more prominent when the metallographic microscope is used for detecting the micro-fluidic chip 6 with a complex structure.
As shown in fig. 12, in order to solve the problem, after carefully researching the structure of the stage of the metallographic microscope, the invention provides a multi-angle visual inspection device for a microfluidic chip, which is installed on a mounting table 1103 of the stage light-transmitting sheet of the microscope, and provides a space for the rotation of the microfluidic chip 6 by using a light-transmitting hole 1102 of the stage, thereby realizing the function expansion of multi-angle inspection without changing the original structure of the microscope.
As shown in fig. 13, a process of mounting the multi-angle vision inspection apparatus for a microfluidic chip on a microscope stage includes the following steps:
first, the stage light transmissive sheet 1101 and coarse movement limiter 14 are removed.
Then, the annular LED strip 7 (forward mounting method) and the annular base 1 having the inlet hose fixing groove 103 are sequentially mounted on the stage light transmitting sheet mounting table 1103 and fixed by the annular base fixing bolt 104.
In this example, a QbeamLab type commercial open-source electron beam metal 3D printing device is selected to prepare a multi-angle visual inspection device for a microfluidic chip. The QbeamLab type commercial open-source electron beam metal 3D printing equipment is the first open-source electron beam metal 3D printer in China, and has multiple advantages of open source of process parameters, modularization and customization, active powder supply, grid scanning and heating, automatic electron beam calibration, online process monitoring and the like. The QbeamLab type commercial open source electron beam metal 3D printing equipment has the following main technical parameters: 200 × 240mm3 of maximum forming size, +/-0.2 mm of precision, 3kW of maximum electron beam power, 60kV of electron beam accelerating voltage, 0-50mA of electron beam current, direct heating type tungsten filament cathode, 200 μm of minimum beam spot diameter, 10,000m/s of maximum electron beam jump speed, 10-2Pa of ultimate vacuum and adjustable helium partial pressure of 0.05-1.0Pa, heating the powder bed by adopting a grid scanning method, enabling the surface temperature of the powder bed to reach 1100 ℃, cooling parts by adopting an active cooling block, and monitoring the process by adopting an optical camera.
The method comprises the following specific implementation steps:
1. preparing materials: the QbeamLab type commercial open source electron beam metal 3D printing apparatus supports a variety of metal materials such as titanium alloys, high temperature alloys, high melting point alloys, and copper alloys. According to the application environment of the device and the comprehensive consideration of cost factors, the copper alloy with better corrosion resistance and lower price is selected as the main material of the device.
2. And (3) slicing the device: and cutting the three-dimensional model of the device into a series of cross-section sheets along the selected forming direction through GMslicer slicing software matched with a printer, and guiding the sliced device into a printer memory. GMslicer software has an automatic layout function, slices by adopting an efficient parallel algorithm, and can output various slice formats including CLI and STL.
3. The process optimization: and (3) performing process optimization on the CLI layer sheet file or the STL three-dimensional model file output by the GMslicer by using process control software metaBuild. The metaBuild software opens the source of 7 groups of process parameters which total hundreds items, allows the user to program, and the process parameter packages of all models can be respectively appointed, thereby improving the process optimization efficiency.
4. And (3) printer testing: before printing, the QbeamLab printer needs to perform power-on test on functional modules such as a power supply function, a knob function, an electron beam emission function, a powder feeding and spreading device and the like so as to ensure that the device processing process is smooth.
5. Printing the device: a QbeamLab 3D printer is adopted, copper alloy materials are filled, and components such as a ring-shaped base 1 with a liquid inlet hose fixing groove, a chip clamp 2, an adapter fixing bolt 3, a clamp adapter 4, a chip clamp fixing bolt 5 and the like are prepared.
Assembling according to the drawings of 4-13, installing a multi-angle visual detection device for the microfluidic chip, compared with the prior art, the device of the application realizes multi-angle visual detection on the microfluidic chip 6 with a complex structure and a large depth-to-width ratio after being combined with a metallographic microscope; in addition, when the device is used for the leakage test of the microfluidic chip 6, the leakage of a sample or the shielding of a lens caused by the looseness of a liquid inlet hose in the detection process can be avoided.
It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the invention and are not intended to limit the embodiments of the present invention, and that various other modifications and changes may be made on the basis of the above description by those skilled in the art.
Claims (8)
1. The utility model provides a latch mechanism that is used for multi-angle visual detection of micro-fluidic chip which characterized in that: comprises an annular base (1) and a multi-angle detection adjusting arm (8),
the annular base (1) is provided with an adjusting arm entering channel (101);
the multi-angle detection adjusting arm comprises a plurality of multi-angle detection adjusting arms (8), wherein the multi-angle detection adjusting arms (8) are circumferentially arranged on an annular base (1) at equal intervals through an adjusting arm entering channel (101), each multi-angle detection adjusting arm (8) comprises an adapter fixing bolt (3), a fixture adapter (4) and a chip fixture (2), the adapter fixing bolts (3) are in threaded connection with the adjusting arm entering channel (101), one end of each adapter fixing bolt (3) is fixed to the outer side of the adjusting arm entering channel (101), and the other end of each adapter fixing bolt (3) extends into the adjusting arm entering channel (101) and extends into the annular base (1); fixture adapter (4) set up in ring type base (1) inboard, fixture adapter (4) one side is articulated and passes through the bolt fastening with adapter fixing bolt (3), and the opposite side of fixture adapter (4) is articulated and passes through the bolt fastening with chip fixture (2), just fixture adapter (4) can be relative adapter fixing bolt (3) along vertical direction rotatory.
2. The clamping mechanism for multi-angle visual inspection of microfluidic chips of claim 1, wherein: the LED lamp is characterized by further comprising an annular LED lamp strip (7), wherein the annular LED lamp strip (7) is provided with a plurality of LED lamps (702), and the annular LED lamp strip (7) is arranged on the annular base (1);
a liquid inlet hose fixing groove (103) is further formed in the annular base (1).
3. The clamping mechanism for multi-angle visual inspection of microfluidic chips according to claim 2, wherein: the chip clamp (2) comprises a chip clamping groove, a chip fixing piece (201) and a clamp arm (203); the chip clamping groove is of a groove body structure with an inward opening; the chip fixing part (201) comprises a chip fixing disc (2011), a threaded rod and a chip fixing wrench (2012), wherein the chip fixing disc (2011) is located inside a chip clamping groove, and the chip fixing wrench (2012) is located outside the chip clamping groove; the threaded rod is in threaded connection with a top plate or a bottom plate of the chip clamping groove, one end of the threaded rod is connected with the chip fixing disc (2011), and the other end of the threaded rod is connected with the chip fixing wrench (2012);
one end of the fixture arm (203) is fixedly connected with the side wall of the chip clamping groove, and the other end of the fixture arm (203) is fixedly connected with the fixture adapter (4) through a bolt.
4. The utility model provides a multi-angle visual detection device for micro-fluidic chip which characterized in that: comprising a scanning electron microscope and a clamping mechanism according to any of claims 1 to 3,
the scanning electron microscope comprises a supporting seat (9), an objective table (11), an objective lens (15) and an eyepiece lens (17), wherein the objective table is provided with an objective table light-transmitting hole (1102), and the objective table light-transmitting hole (1102) is arranged at the central position of the objective table (11);
the annular base (1) is arranged on the top surface of the objective table (11).
5. The multi-angle visual inspection device for microfluidic chips of claim 4, wherein: still include connecting bolt (104), a plurality of base fixing bolt holes (102) have been seted up in annular base (1), place on the top surface of annular base (1) annular LED lamp area (7), lamp area fixed orifices (702) have been seted up in annular LED lamp area (7), just lamp area fixed orifices (702) and base fixing bolt hole (102) are on same axis, annular LED lamp area (7) and annular base (1) are through connecing bolt (104) and objective table (11) fixed connection.
6. A method for inspecting a microfluidic device using the multi-angle vision inspection apparatus for microfluidic chips of claim 4 or 5, comprising the steps of:
step 1: turning on an illumination system of the scanning electron microscope, and selecting an objective lens (15) according to the magnification requirement;
step 2: fixing the micro-fluidic chip (6) to be detected at the central position of the objective table (11) through a clamping mechanism;
and step 3: observing different positions of the micro-fluidic chip (6) to be detected on the horizontal plane;
and 4, step 4: adjusting the angle of the micro-fluidic chip (6) to be detected and observing;
and 5: and (4) repeating the step (4), closing the scanning electron microscope after the micro-fluidic chip (6) to be detected is observed, and taking down the micro-fluidic chip (6) to be detected.
7. The multi-angle visual inspection device for microfluidic chips according to claim 6, wherein the step 3 of observing different positions of the microfluidic chip (6) on the horizontal plane comprises the following steps:
step A: rotating a coarse regulator (13) of the scanning electron microscope to enable an objective lens (15) to descend and be close to the surface of the micro-fluidic chip (6) to be detected, and using a fine regulator (12) when the brightness of a field of view is enhanced until an object image is clear;
and B: adjusting the position of a reflector (10) of the electron microscope;
and C: and adjusting an object stage moving knob (16) of the scanning electron microscope, observing different positions of the micro-fluidic chip (6) to be detected on a horizontal plane, and selecting a required view field to take a picture.
8. The multi-angle visual inspection device for microfluidic chips according to claim 6, wherein the adjusting and observing the angle of the microfluidic chip (6) in step 4 comprises the following steps:
rotating a coarse regulator (13) of the scanning electron microscope to enable an objective lens (15) to descend and to be close to the surface of the micro-fluidic chip (6) to be detected, and using a fine regulator (12) when the brightness of a visual field is enhanced until an object image is clear; and B: adjusting the position of a reflector (10) of the electron microscope;
and C: and adjusting an object stage moving knob (16) of the scanning electron microscope, observing different positions of the micro-fluidic chip (6) to be detected on the horizontal plane, and selecting a view field for photographing.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211010654.3A CN115479892A (en) | 2022-08-23 | 2022-08-23 | Multi-angle visual detection device for micro-fluidic chip and detection method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117169214A (en) * | 2023-09-05 | 2023-12-05 | 武汉大学 | Multi-scale observation platform |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117169214A (en) * | 2023-09-05 | 2023-12-05 | 武汉大学 | Multi-scale observation platform |
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