CN115477275A - Pulse sensor, dielectric layer template, preparation method of dielectric layer template and preparation method of dielectric layer - Google Patents
Pulse sensor, dielectric layer template, preparation method of dielectric layer template and preparation method of dielectric layer Download PDFInfo
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- B81—MICROSTRUCTURAL TECHNOLOGY
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- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
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- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/02—Detecting, measuring or recording pulse, heart rate, blood pressure or blood flow; Combined pulse/heart-rate/blood pressure determination; Evaluating a cardiovascular condition not otherwise provided for, e.g. using combinations of techniques provided for in this group with electrocardiography or electroauscultation; Heart catheters for measuring blood pressure
- A61B5/021—Measuring pressure in heart or blood vessels
- A61B5/02108—Measuring pressure in heart or blood vessels from analysis of pulse wave characteristics
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/02—Detecting, measuring or recording pulse, heart rate, blood pressure or blood flow; Combined pulse/heart-rate/blood pressure determination; Evaluating a cardiovascular condition not otherwise provided for, e.g. using combinations of techniques provided for in this group with electrocardiography or electroauscultation; Heart catheters for measuring blood pressure
- A61B5/021—Measuring pressure in heart or blood vessels
- A61B5/02108—Measuring pressure in heart or blood vessels from analysis of pulse wave characteristics
- A61B5/02125—Measuring pressure in heart or blood vessels from analysis of pulse wave characteristics of pulse wave propagation time
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
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- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
- B81C1/00523—Etching material
- B81C1/00547—Etching processes not provided for in groups B81C1/00531 - B81C1/00539
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- A—HUMAN NECESSITIES
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- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/12—Manufacturing methods specially adapted for producing sensors for in-vivo measurements
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Abstract
The invention discloses a pulse sensor based on a laser etching insection microstructure, a dielectric layer template, a preparation method of the dielectric layer template and a preparation method of the dielectric layer, wherein the pulse sensor based on the laser etching insection microstructure comprises an upper electrode layer, a dielectric layer and a lower electrode layer which are sequentially stacked from top to bottom, the dielectric layer is an elastic composite layer made of elastic polymers and conductive materials, the conductive materials are not in contact with the upper electrode layer and the lower electrode layer, an insection microstructure is arranged on one side of the dielectric layer close to the lower electrode layer, the insection microstructure comprises parallel insection strips, the cross sections of the insection strips are inverted triangles, the upper electrode layer and the lower electrode layer respectively comprise a flexible substrate and a conductive layer, the conductive layer is positioned on the inner side and close to the dielectric layer, the flexible substrate is positioned on the outer side and is in contact with skin, a leading-out part is connected onto the conductive layer, the leading-out part is used for transmitting signals of the upper electrode layer and the lower electrode layer, the dielectric layer can deform under the pressure, and the change of capacitance value is utilized to obtain a pulse wave.
Description
Technical Field
The invention relates to a pulse sensor based on a laser etching insection microstructure, a dielectric layer template, a preparation method of the dielectric layer template and a preparation method of a dielectric layer, in particular to a pulse sensor of a microstructure array, and belongs to the technical field of wearable electronics and composite materials.
Background
With the development of medical treatment technology improved by living standard, concepts such as intelligent medical treatment and health monitoring are provided, and people pay more and more attention to healthy life. The human body contains a plurality of mechanical signals which are closely related to the health condition of the human body, and quantitative research on the signals is helpful for monitoring the human body state. The mechanical sensor is used as a transducer, can convert mechanical signals into electric signals easy to process, is a core device for sensing human body conditions, and is an important component of a plurality of wearable electronic devices. However, most of the mechanical signals in the human body are weak and susceptible to noise interference, and many conventional sensing elements are not suitable, which brings great challenges to signal detection.
The pulse wave, which is a typical mechanical signal in the human body, is caused by the periodic beating of the heart, through which blood is pumped throughout the body and exerts pressure on the walls of the blood vessels, causing the blood vessels to contract and relax periodically. The pulse waveform contains many information, the position of the body surface can sense the pulse beat, taking the radial pulse waveform as an example, as shown in fig. 4, which is a typical radial pulse waveform, a complete pulse fluctuation period can be subdivided into six parts: 1) And (3) branch lifting: the rapid ejection of blood caused by ventricular contraction leads to rapid rise of pulse pressure; 2) Main peak (P1): is the main body of pulse wave, and the pressure in the artery reaches the maximum to form a peak value; 3) Branch reduction: is a descending curve behind the main peak, and the arterial pressure is reduced due to the reduction of blood output in the later period of the ejection period; 4) Dicrotic wavefront (P2): the left ventricle stops shooting blood, the artery expands, the pulse pressure decreases, and the blood is formed by the reflection of the peripheral vascular network. Is positioned after the main peak and before the dicrotic wave, and is generally lower than the main peak and higher than the dicrotic wave; 5) The central depression (D): is a boundary point of the contraction and the relaxation of the heart for reducing to the notch trough formed by the dicrotic wave; 6) Dicrotic wave (P3): is the echo formed by the closing of the aorta and the elastic contraction of the aorta. Therefore, the pulse wave contains many details, which are closely related to the health condition of the human body. However, the pulse beat is very weak, and it is very difficult to detect all the waveform characteristics, so that the invention of a pulse sensor with high sensitivity is necessary.
The flexible sensor is made of flexible materials, has excellent deformation capacity, variable structure, light weight and portability, can be attached to the surface of irregular skin, and is favorable for improving the signal quality. At present, flexible sensors can be classified into resistive type, piezoresistive type, capacitive type and the like, and the capacitive type sensors are widely concerned by researchers due to the excellent characteristics of good dynamic response, low power consumption, simple structure and the like. According to the formula of capacitance calculation
Some conductive electrodes with a micro-pillar structure are prepared as the electrode plates of the capacitive sensor, and when the conductive electrodes are subjected to pressure, the conductive electrodes deform, and the relative areas of the two electrode plates change. However, this method requires deposition of conductive material on the micro-pillar structure, and the manufacturing process is complicated. Still other researchers have designed dielectric layers with pyramidal microstructures that compress when subjected to pressure, reducing the distance between the two plates of a capacitive sensor. The pyramid structure unit has the size of several micrometers, needs an accurate micro-nano processing technology and has a small detection range. And other capacitance sensors such as a porous structure, a micro-wrinkle structure, a microsphere structure and the like are difficult to achieve high sensitivity and are not suitable for pulse monitoring.
In summary, at present, a capacitive flexible pressure sensor which has high sensitivity, reasonable structure and easy preparation is urgently needed to be found, so that the capacitive flexible pressure sensor is suitable for accurately monitoring the human pulse for a long time.
Disclosure of Invention
The invention aims to provide a pulse sensor based on a laser etching insection microstructure, which can realize long-time continuous monitoring of human pulse waves and is used for overcoming the technical problem that biomechanical signals are difficult to collect. Meanwhile, the invention also provides a medium layer template of the pulse sensor based on the laser etching insection microstructure, a preparation method of the medium layer template and a preparation method of the medium layer.
The pulse sensor based on the laser etching insection microstructure adopts the following technical scheme: the pulse sensor comprises an upper electrode layer, a dielectric layer and a lower electrode layer which are sequentially stacked from top to bottom, wherein the dielectric layer is an elastic composite layer made of elastic polymers and conductive materials, the conductive materials are not in contact with the upper electrode layer and the lower electrode layer, the side, close to the lower electrode layer, of the dielectric layer is provided with a insection microstructure, the insection microstructure comprises parallelly arranged insection strips, the cross sections of the insection strips are inverted triangles, the upper electrode layer and the lower electrode layer respectively comprise a flexible substrate and a conductive layer, the conductive layer is located on the inner side and close to the dielectric layer, the flexible substrate is located on the outer side and is used for being in contact with skin, and a leading-out portion is connected onto the conductive layer and used for transmitting signals of the upper electrode layer and the lower electrode layer.
The conductive material is one or more than two of liquid metal, carbon nano tube, silver nano wire and carbon black.
The elastic polymer is one or more than two of Polydimethylsiloxane (PDMS), silicon rubber, polyester and polyvinyl alcohol.
The upper side and the lower side of the dielectric layer are respectively provided with an upper insulating layer and a lower insulating layer, and the upper insulating layer and the lower insulating layer are formed by insulating materials coated on the conducting layers of the upper electrode layer and the lower electrode layer respectively.
The insulating material is one or two of parylene and polyimide.
The conducting layer is formed by depositing a conducting metal material on the flexible substrate by a vacuum evaporation method; or the conductive layer is made of copper foil or aluminum foil.
The flexible substrate used for the upper electrode layer and the lower electrode layer is made of polydimethylsiloxane, silicon rubber, polyester or polyvinyl alcohol.
The height of the tooth stripes is 20 to 300um, the width of the root of each tooth stripe is 50 to 100um, and the distance between every two adjacent tooth stripes is 50 to 300um.
The invention relates to a medium layer template of a pulse sensor based on a laser etching insection microstructure, which adopts the following technical scheme: a dielectric layer template of a pulse sensor based on a laser etching insection microstructure comprises a base plate made of hard materials, wherein a micro insection groove array is formed in one surface of the base plate through laser etching, the micro insection groove array is composed of parallel and spaced insection grooves, the insection grooves are of a long strip-shaped groove structure formed through laser etching, the cross section of each insection groove is in an inverted triangle shape, an inverted insection strip is arranged between every two adjacent insection grooves, and the cross section of the inverted insection strip is trapezoidal.
The depth of the tooth line groove is 20 to 300um, the width of the top of the tooth line groove is 50 to 100um, and the distance between adjacent tooth lines is 50 to 300um.
The preparation method of the dielectric layer template of the pulse sensor based on the laser etching insection microstructure adopts the following technical scheme: a preparation method of a dielectric layer template of a pulse sensor based on a laser etching insection microstructure comprises the following steps: a substrate made of hard materials is selected, wherein the hard materials are polyethylene glycol terephthalate, a strip-shaped micro-tooth groove array is etched on one surface of the substrate by a laser etching method, the micro-tooth groove array is composed of parallel and spaced tooth grooves, the tooth grooves are of a long strip-shaped groove structure formed by laser etching, and the cross section of each tooth groove is in an inverted triangle shape.
The depth of the tooth grooves is 20 to 300um, the width of the top of the tooth grooves is 50 to 100um, and the distance between adjacent tooth stripes is 50 to 300um.
The preparation method of the dielectric layer with the insection microstructure adopts the following technical scheme: a preparation method of a dielectric layer with an insection microstructure comprises the following steps: the method comprises the steps of carrying out hydrophobic treatment on a micro-tooth-groove array on a medium layer template of the pulse sensor based on the laser etching of the tooth-line microstructure, spin-coating an elastic composite material on the micro-tooth-groove array, wherein the elastic composite material is formed by an elastic polymer doped with a conductive material, the coating height of the elastic composite material is larger than the depth of the tooth-line groove, and stripping the elastic composite material to form the tooth-line microstructure medium layer after the elastic composite material is formed.
The invention has the beneficial effects that: when the pulse sensor based on the laser etching insection microstructure is used, the flexible substrate of the lower electrode layer is attached to the skin at the radial artery of the wrist, the insection microstructure dielectric layer is deformed due to pulse pulsation, so that the distance between the upper electrode layer and the lower electrode layer is changed, the capacitance value of the sensor is changed, the leading-out part is connected with a testing instrument through a lead, and the capacitance value of the sensor is detected, so that pulse waves are obtained. The flexible substrate is made of flexible materials, can be attached to the surface of curved skin for flexible sensing, and is light, thin and portable, the whole thickness of the sensor is less than 500 microns, and the sensor is comfortable to wear. The invention can realize high-sensitivity detection on weak pressure and can accurately monitor the pulse pulsation of the radial artery of a human body.
The medium layer with the insection microstructure is made of an elastic composite material and is formed by turning over a medium layer template, and the medium layer with the insection microstructure is simple in processing technology, low in cost, capable of being rapidly prepared in batches and controllable in structure; the medium layer with the insection microstructure has good deformation capability and stability, high response speed and high sensitivity, can be applied to the field of intelligent medical treatment, and has a wide prospect.
According to the invention, the dielectric layer template is prepared by adopting a laser etching process, the micro-tooth groove array is processed on the substrate through laser etching, and the size of the micro-tooth groove array can be adjusted through the power, linear density and times of laser etching, so that the detection range and sensitivity of the sensor are adjusted, the processing speed is high, the microstructure is controllable, the sensitivity of the capacitive pressure sensor with the dielectric layer with the tooth-line microstructure is greatly improved, and the weak pulse signals of a human body can be accurately detected.
Preferably, the conductive material is added into the dielectric layer, so that the dielectric constant of the dielectric layer is increased while the elastic modulus of the dielectric layer is not greatly changed, and the capacitance of the sensor is increased.
Preferably, the upper and lower insulating layers can ensure that the dielectric layer is not in contact with the upper and lower electrode layers, and prevent the conductive material in the dielectric layer from being in contact with the upper electrode layer and the lower electrode layer.
Drawings
FIG. 1 is a schematic diagram of a pulse sensor based on a laser etched insection microstructure according to an embodiment of the present invention;
FIG. 2 is a schematic illustration of a dielectric layer template of a pulse sensor laser etched based on a striated microstructure;
FIG. 3 is a cross-sectional view of a dielectric layer template;
FIG. 4 is a graph of a typical pulse waveform for the radial artery;
FIG. 5 is a schematic diagram of the pulse sensor of FIG. 1 for detecting the pulse of the radial artery of a human body;
FIG. 6 is a 10s waveform of the radial pulse of the human body and the acceleration pulse wave obtained by the second differential, which are acquired by the pulse sensor in FIG. 1;
FIG. 7 is a waveform diagram of 100s pulse waveform of the radial artery of the human body collected by the pulse sensor in FIG. 1 and an acceleration pulse wave obtained after the second differential;
FIG. 8 is a systolic pressure curve calculated by the pulse sensor according to the acquired pulse wave data;
FIG. 9 is a table of calculated pulse transit times (PPT) and Systolic Blood Pressure (SBP) measured with a commercial sphygmomanometer.
In the figure: 1. an upper electrode layer; 2. an upper insulating layer; 3. a dielectric layer; 4. a lower insulating layer; 5. a lower electrode layer; 51. a lead-out section; 6. an inverted insection microstructure template; 7. a laser generator.
Detailed Description
The invention is described in detail below with reference to the figures and the specific embodiments.
The pulse sensor based on the laser-etched insection microstructure comprises an upper electrode layer 1, a dielectric layer 3 and a lower electrode layer 5 which are sequentially fixed from top to bottom, wherein the dielectric layer 3 is an elastic composite layer made of elastic polymers and conductive materials, the dielectric layer 3 can deform when being pressed, the conductive materials are not in contact with the upper electrode layer 1 and the lower electrode layer 5, an insection microstructure is arranged on one side, close to the lower electrode layer 5, of the dielectric layer 3, the insection microstructure comprises parallelly arranged insection strips, the cross sections of the insection strips are inverted triangles, the heights of the insection strips are 20 to 300um, the widths of roots of the insection strips are 50 to 100um, and the intervals between adjacent insection strips are 50 to 300um. The insection microstructure is formed by turning the elastic composite material on the inverted insection microstructure template 6 in the figure 2, and the insection microstructure has the advantages of simple processing technology, low cost, rapid batch preparation and controllable structure.
In this embodiment, an upper insulating layer 2 and a lower insulating layer 4 are respectively disposed on upper and lower sides of a dielectric layer 3, and the upper insulating layer 2 and the lower insulating layer 4 are formed of insulating materials respectively coated on conductive layers of an upper electrode layer 1 and a lower electrode layer 5. The insulating material is one or two of parylene and polyimide. In other embodiments of the present invention, the upper insulating layer and the lower insulating layer may be omitted if it is ensured that the conductive material in the dielectric layer is not conductive with the upper electrode layer and the lower electrode layer, or the dielectric layer has very good insulating properties with the upper electrode layer and the lower electrode layer. When the insulating layer is not needed, the dielectric layer, the upper electrode layer and the lower electrode layer are attached together, and finally, the whole pulse sensor can be packaged by using transparent adhesive tapes or flexible polymers.
The dielectric layer 3 is internally provided with a conductive material which is not in contact with the upper electrode layer 1 and the lower electrode layer 5, and the conductive material is one or more than two of liquid metal, carbon nano tubes, silver nano wires and carbon black. The elastic polymer is one or more of Polydimethylsiloxane (PDMS), silicon rubber, polyester and polyvinyl alcohol. The dielectric layer 3 of the insection microstructure of the embodiment is made of a composite material formed by liquid metal and Polydimethylsiloxane (PDMS), the PDMS is a flexible material and can bear certain deformation, and the PDMS is free of biological toxicity, and the doped liquid metal can ensure that the dielectric constant of the dielectric layer is increased while the elastic modulus of the dielectric layer is not greatly changed, so that the capacitance of the sensor is increased, and the sensitivity of the sensor is greatly improved due to the design that the micro insections are in an array.
The upper electrode layer 1 and the lower electrode layer 5 both comprise flexible substrates and conductive layers, the conductive layers are located on the inner sides and close to the dielectric layer 3, the flexible substrates are located on the outer sides and are used for being in contact with skin, the conductive layers of the upper electrode layer 1 and the lower electrode layer 3 are respectively connected with leading-out portions 51, and the leading-out portions 51 are used for transmitting signals of the upper electrode layer 1 and the lower electrode layer 5.
The material of the flexible substrate used for the upper electrode layer 1 and the lower electrode layer 5 is one of polydimethylsiloxane, silicone rubber, polyester, and polyvinyl alcohol. The flexible substrate can be directly attached to the skin and deforms along with the movement of the attached part. The conducting layer in the embodiment is formed by depositing a conducting metal material on the flexible substrate by a vacuum evaporation method; in other embodiments of the present invention, the conductive layer may also be made of copper foil or aluminum foil.
As shown in fig. 5, the pulse sensor of the present embodiment is used for detecting the pulse of the radial artery of a human body, the flexible substrate of the lower electrode layer 5 is attached to the skin of the radial artery of the wrist, and the pulse beats to deform the striated microstructure dielectric layer 3, so that the distance between the upper electrode layer 1 and the lower electrode layer 5 changes, the capacitance value of the pulse sensor changes, the lead-out portion 51 is connected to a testing instrument through a wire, and is used for detecting the capacitance value of the pulse sensor to obtain a pulse wave, and the detected pulse wave data is shown in fig. 6. Comparing with fig. 4, it can be seen that the pulse sensor of the present embodiment can obviously detect the main peak P1 and the pre-dicrotic wave P2, and can detect the pre-dicrotic wave P3 at some time.
According to the research of the prior art, the PPT (pulse wave transit time) has great correlation with the systolic pressure, and the PPT can be obtained by calculating pulse wave data, so that the data acquired by the pulse sensor can be post-processed to obtain the blood pressure of a human body, and the monitoring of the blood pressure is realized. The specific implementation method comprises the following steps:
1) After sitting still for 5min, the testee uses the pulse sensor of the embodiment to collect pulse data and uses a commercial sphygmomanometer to detect blood pressure;
2) The testee moves for 5min to increase blood pressure, a pulse sensor is used for collecting pulse data, and a commercial sphygmomanometer is used for detecting the blood pressure;
3) Then sitting still, and collecting data by using a pulse sensor and a commercial sphygmomanometer every 1 min;
4) Performing a second difference operation on the pulse wave data to obtain an acceleration pulse wave, as shown in fig. 6;
5) Extracting characteristic points in the acceleration pulse wave, such as a point A and a point B in the graph 6, wherein the time interval between the two points is the pulse wave conduction time;
6) Systolic Blood Pressure (SBP) and Pulse Transit Time (PTT) have the following relationship according to the prior art:
fitting the collected data according to the formula to obtain a calculation formula of the systolic pressure. The test of the subject according to the above procedure resulted in 7 times of systolic blood pressure and pulse transit time, as shown in the table in fig. 9, and fitting resulted in a =3.357 and b =33.46. Recording pulse wave conduction time (PPT) calculated by collecting pulse waves by 7 tested pulse sensors and systolic pressure (SBP) data measured by a commercial sphygmomanometer
The pulse sensor is used to continuously acquire 100s pulse data and the two-time difference is used to calculate the pulse wave transit time, as shown in fig. 7, and finally calculate the systolic blood pressure SBP, as shown in fig. 8.
As shown in fig. 2, a dielectric layer template 6 of a pulse sensor based on a laser etching insection microstructure according to an embodiment of the present invention includes a substrate made of a hard material, a micro insection groove array is etched on one surface of the substrate by laser, the micro insection groove array is composed of parallel and spaced insection grooves, the insection groove is a strip-shaped groove structure formed by laser etching, a cross section of the insection groove is an inverted triangle, an inverted insection stripe is arranged between adjacent insection grooves, and a cross section of the inverted insection stripe is a trapezoid. The depth of the tooth grooves is 20 to 300um, the width of the top of the tooth grooves is 50 to 100um, and the distance between adjacent tooth stripes is 50 to 300um.
The invention discloses a preparation method of a dielectric layer template of a pulse sensor based on a laser etching insection microstructure, which comprises the following steps: a substrate made of hard materials is selected, wherein the hard materials are polyethylene glycol terephthalate, a strip-shaped micro-flute array is etched on one surface of the substrate by using a laser etching method, laser is generated by a laser generator 7, the micro-flute array is composed of parallel and spaced flutes, the flutes are in a strip-shaped groove structure formed by laser etching, and the cross section of each flute is in an inverted triangle shape. The depth of the tooth grooves is 20 to 300um, the width of the top of the tooth grooves is 50 to 100um, and the distance between adjacent tooth stripes is 50 to 300um.
The preparation method of the dielectric layer with the insection microstructure comprises the following steps of: the method comprises the steps of carrying out hydrophobic treatment on a micro-tooth-groove array on a medium layer template of the pulse sensor based on a laser etching insection microstructure, coating an elastic composite material on the micro-tooth-groove array in a spinning mode, wherein the elastic composite material is formed by an elastic polymer doped with a conductive material, the coating height of the elastic composite material is larger than the depth of the insection groove, and stripping the elastic composite material to form the insection microstructure medium layer after the elastic composite material is formed.
Although the embodiments of the present invention have been described above in detail, the present invention is not limited to the above-described embodiments. The scope of the invention defined by the appended claims encompasses all equivalent substitutions and modifications.
Claims (13)
1. The utility model provides a pulse sensor based on laser sculpture insection microstructure which characterized in that: the electrode comprises an upper electrode layer, a dielectric layer and a lower electrode layer which are sequentially stacked from top to bottom, wherein the dielectric layer is an elastic composite layer made of elastic polymers and conductive materials, the conductive materials are not in contact with the upper electrode layer and the lower electrode layer, one side of the dielectric layer, which is close to the lower electrode layer, is provided with a sawtooth microstructure, the sawtooth microstructure comprises parallel arranged sawtooth strips, the cross sections of the sawtooth strips are inverted triangles, the upper electrode layer and the lower electrode layer respectively comprise a flexible substrate and a conductive layer, the conductive layer is positioned on the inner side and close to the dielectric layer, the flexible substrate is positioned on the outer side and is used for being in contact with skin, and a leading-out part is connected onto the conductive layer and is used for transmitting signals of the upper electrode layer and the lower electrode layer.
2. The pulse sensor based on the laser-etched insection microstructure of claim 1, wherein: the conductive material is one or more than two of liquid metal, carbon nano tube, silver nano wire and carbon black.
3. The pulse sensor based on the laser-etched insection microstructure of claim 1, wherein: the elastic polymer is one or more than two of Polydimethylsiloxane (PDMS), silicon rubber, polyester and polyvinyl alcohol.
4. The pulse sensor based on the laser-etched insection microstructure of claim 1, wherein: the upper side and the lower side of the dielectric layer are respectively provided with an upper insulating layer and a lower insulating layer, and the upper insulating layer and the lower insulating layer are formed by insulating materials respectively coated on the conducting layers of the upper electrode layer and the lower electrode layer.
5. The pulse sensor based on the laser-etched insection microstructure of claim 4, wherein: the insulating material is one or two of parylene and polyimide.
6. The pulse sensor based on the laser etching insection microstructure of claim 1, wherein: the conducting layer is formed by depositing a conducting metal material on the flexible substrate by a vacuum evaporation method; or the conducting layer is made of copper foil or aluminum foil.
7. The pulse sensor based on the laser-etched insection microstructure of claim 1, wherein: the flexible substrate used for the upper electrode layer and the lower electrode layer is made of polydimethylsiloxane, silicon rubber, polyester or polyvinyl alcohol.
8. The pulse sensor based on the laser-etched insection microstructure of claim 1, wherein: the height of the tooth stripes is 20 to 300um, the width of the root of each tooth stripe is 50 to 100um, and the distance between every two adjacent tooth stripes is 50 to 300um.
9. A medium layer template of a pulse sensor based on a laser etching insection microstructure is characterized in that: the micro-tooth-groove array is formed on one surface of the substrate through laser etching, the micro-tooth-groove array is composed of parallel and spaced tooth grooves, each tooth groove is of a long-strip-shaped groove structure formed through laser etching, the cross section of each tooth groove is in an inverted triangle shape, reverse tooth stripes are arranged between every two adjacent tooth grooves, and the cross section of each reverse tooth stripe is trapezoidal.
10. The dielectric layer template of the pulse sensor based on the laser etching insection microstructure as recited in claim 10, wherein: the depth of the tooth grooves is 20 to 300um, the width of the top of the tooth grooves is 50 to 100um, and the distance between adjacent tooth stripes is 50 to 300um.
11. A preparation method of a dielectric layer template of a pulse sensor based on a laser etching insection microstructure is characterized by comprising the following steps: a substrate made of hard materials is selected, wherein the hard materials are polyethylene glycol terephthalate, a strip-shaped micro-tooth groove array is etched on one surface of the substrate by a laser etching method, the micro-tooth groove array is composed of parallel and spaced tooth grooves, the tooth grooves are of a long strip-shaped groove structure formed by laser etching, and the cross section of each tooth groove is in an inverted triangle shape.
12. The method for preparing the dielectric layer template of the pulse sensor based on the laser etching insection microstructure as recited in claim 12, wherein the method comprises the following steps: the depth of the tooth grooves is 20 to 300um, the width of the top of the tooth grooves is 50 to 100um, and the distance between adjacent tooth stripes is 50 to 300um.
13. A preparation method of a dielectric layer with a insection microstructure is characterized by comprising the following steps: the method comprises the steps of carrying out hydrophobic treatment on a micro-tooth-groove array on a medium layer template of the pulse sensor based on the laser-etched insection microstructure in claim 9, spin-coating an elastic composite material on the micro-tooth-groove array, wherein the elastic composite material is formed by an elastic polymer doped with a conductive material, the coating height of the elastic composite material is larger than the depth of the insection groove, and stripping the elastic composite material to form the insection microstructure medium layer after the elastic composite material is formed.
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