CN115468986A - Resistivity probe for ultrapure deionized water - Google Patents
Resistivity probe for ultrapure deionized water Download PDFInfo
- Publication number
- CN115468986A CN115468986A CN202110653804.1A CN202110653804A CN115468986A CN 115468986 A CN115468986 A CN 115468986A CN 202110653804 A CN202110653804 A CN 202110653804A CN 115468986 A CN115468986 A CN 115468986A
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- electrode
- shell
- deionized water
- sleeve
- sealing ring
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000008367 deionised water Substances 0.000 title claims abstract description 22
- 229910021641 deionized water Inorganic materials 0.000 title claims abstract description 22
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 22
- 239000000523 sample Substances 0.000 title claims abstract description 21
- 238000007789 sealing Methods 0.000 claims abstract description 35
- 125000006850 spacer group Chemical group 0.000 claims abstract description 20
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 239000004677 Nylon Substances 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 239000012212 insulator Substances 0.000 claims description 3
- 229920001778 nylon Polymers 0.000 claims description 3
- 230000000712 assembly Effects 0.000 claims description 2
- 238000000429 assembly Methods 0.000 claims description 2
- 238000010030 laminating Methods 0.000 claims 1
- 238000012856 packing Methods 0.000 claims 1
- 238000002360 preparation method Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 abstract description 6
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/06—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a liquid
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
- H01L22/34—Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A90/00—Technologies having an indirect contribution to adaptation to climate change
- Y02A90/30—Assessment of water resources
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Pathology (AREA)
- Electrochemistry (AREA)
- Automation & Control Theory (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
The invention provides a resistivity probe used by ultrapure deionized water, which comprises an outer shell component, an electrode component and a sealing component, wherein the outer shell component is provided with a plurality of electrodes; the outer shell component comprises a shell which is arranged in a cylindrical shape, and a lower shell which is matched with the shell and is arranged at the bottom of the shell in a clamping and embedding manner; the electrode assembly comprises an electrode, a sleeve and a spacer; the sleeve and the spacer bush are respectively sleeved on the upper part and the lower part of the electrode; the electrode, a sleeve and a spacer bush which are sleeved on the upper part and the lower part of the electrode penetrate through a middle cavity formed by the clamping and embedding of the shell and the lower shell; the sealing assembly comprises a lower gasket, a small sealing ring and a large sealing ring; the lower gasket is arranged between the lower end of the electrode and the lower surface of the shell; the small sealing ring and the large sealing ring are arranged between the spacer bush and the electrode; the invention has the beneficial effects that: compact structure and small size, and can adapt to specific semiconductor equipment.
Description
Technical Field
The invention mainly relates to the technical field of semiconductor detection, in particular to a resistivity probe used for ultrapure deionized water.
Background
The temperature control of a reaction kettle is usually required in a semiconductor key process, the temperature control is carried out through special media, one commonly used medium is ultrapure deionized water, the resistivity of the ultrapure deionized water is required to be monitored when the medium is used, a probe which is in contact with the medium is required to be used for monitoring the medium, the detection requirement of the semiconductor industry on the ultrapure deionized water cannot be completely met by the common probe on the market at present under the consideration of interface specification, size, electrode constant and the like, and particularly, a probe which is required to be used on specific equipment and has a small size and a specification matched with the electrode constant cannot be found. Therefore, there is a need to develop a resistivity probe suitable for a specific device in the semiconductor industry for use with ultra-pure deionized water, which has a small size and meets the specification of the device requirement.
Disclosure of Invention
In view of the above-mentioned drawbacks of the prior art, the present invention provides a resistivity probe for ultrapure deionized water, which is used for resistivity monitoring of ultrapure deionized water.
A resistivity probe for use with ultra-pure deionized water includes an outer housing assembly, an electrode assembly and a seal assembly;
the outer shell component comprises a shell 1 arranged in a cylindrical shape and a lower shell 2 which is matched with the shell 1 and is arranged at the bottom of the shell 1 in a clamping and embedding manner;
the electrode assembly comprises an electrode 4, a sleeve 3 and a spacer 6; the sleeve 3 and the spacer bush 6 are respectively sleeved on the upper part and the lower part of the electrode 4; the electrode 4, the sleeve 3 sleeved on the upper part and the lower part of the electrode 4 and the spacer 6 are arranged in a middle cavity formed by the clamping and embedding of the shell 1 and the lower shell 2 in a penetrating manner;
the sealing assembly comprises a lower gasket 5, a small sealing ring 7 and a large sealing ring 8; the lower gasket 5 is arranged between the lower end of the electrode 4 and the lower surface of the shell 2; the small sealing ring 7 and the large sealing ring 8 are arranged between the spacer bush 6 and the electrode;
the sealing assembly further comprises a flat washer 9, a sawtooth washer 10 and a nut 11; the nut 11 is sleeved on the top of the electrode 4, and the electrode 4 is fixed on the sleeve 3; the sawtooth washer 10 and the flat washer 9 are sequentially arranged on the top of the electrode 4 from top to bottom and are pressed and attached to the sleeve 3 by the nut 11.
Preferably, the shell 1 is made of copper.
Preferably, the shell 2, the sleeve 3 and the spacer 6 are all made of insulators.
Preferably, the lower gasket 5 is made of nylon.
Preferably, the electrode 4 is a titanium-plated electrode.
Preferably, two electrodes 4 are arranged in parallel; each electrode 4 is provided with a sleeve 3, a group of nuts 11, a sawtooth washer 10 and a flat washer 9.
Preferably, the large sealing ring 8 is annularly sleeved outside the two electrodes 4; the number of the small sealing rings 7 is two, and the small sealing rings are respectively sleeved on the two electrodes 4.
Preferably, the nut 11, the sawtooth washer 10 and the flat washer 9 which are arranged in sequence from top to bottom form a group of fixing components; two groups of fixing assemblies are sequentially arranged at the top of each electrode 4 from top to bottom.
The invention has the beneficial effects that: compact structure and small size, and can adapt to specific semiconductor equipment.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 isbase:Sub>A cross-sectional view taken along line A-A of FIG. 1;
in the figure, the position of the upper end of the main shaft,
1. a housing; 2. a lower housing; 3. a sleeve; 4. an electrode; 5. a lower gasket; 6. a spacer bush; 7. a small seal ring; 8. a large seal ring; 9. a flat washer; 10. a serrated washer; 11. and a nut.
Detailed Description
The present invention will now be described in detail with reference to the drawings, which are provided for illustrative and explanatory purposes only and are not intended to limit the scope of the present invention.
The invention provides a resistivity probe used by ultrapure deionized water, which comprises an outer shell component, an electrode component and a sealing component, wherein the outer shell component is provided with a plurality of electrodes;
the outer shell component comprises a shell 1 arranged in a cylindrical shape and a lower shell 2 which is matched with the shell 1 and is arranged at the bottom of the shell 1 in a clamping and embedding manner;
the electrode assembly comprises an electrode 4, a sleeve 3 and a spacer 6; the sleeve 3 and the spacer bush 6 are respectively sleeved on the upper part and the lower part of the electrode 4; the electrode 4, the sleeve 3 sleeved on the upper part and the lower part of the electrode 4 and the spacer 6 are arranged in a middle cavity formed by the clamping and embedding of the shell 1 and the lower shell 2 in a penetrating manner;
the sealing assembly comprises a lower gasket 5, a small sealing ring 7 and a large sealing ring 8; the lower gasket 5 is arranged between the lower end of the electrode 4 and the lower surface of the shell 2; the small sealing ring 7 and the large sealing ring 8 are both arranged between the spacer bush 6 and the electrode;
the sealing assembly further comprises a flat washer 9, a sawtooth washer 10 and a nut 11; the nut 11 is sleeved on the top of the electrode 4, and the electrode 4 is fixed on the sleeve 3; the sawtooth washer 10 and the flat washer 9 are sequentially arranged on the top of the electrode 4 from top to bottom and are pressed and attached to the sleeve 3 by the nut 11.
In this embodiment, the material of the housing 1 is preferably copper.
In this embodiment, the shell 2, the sleeve 3, and the spacer 6 are preferably made of insulators.
In this embodiment, preferably, the lower pad 5 is made of nylon.
In this embodiment, the electrode 4 is preferably a titanium-plated electrode.
In the present embodiment, preferably, two electrodes 4 are arranged in parallel; each electrode 4 is provided with a sleeve 3, a group of nuts 11, a sawtooth washer 10 and a flat washer 9.
In this embodiment, preferably, the large sealing ring 8 is annularly sleeved outside the two electrodes 4; the number of the small sealing rings 7 is two, and the small sealing rings are respectively sleeved on the two electrodes 4.
In the preferred embodiment, the nut 11, the serrated washer 10 and the flat washer 9 which are sequentially arranged from top to bottom form a set of fixing components; two groups of fixing components are sequentially arranged on the top of each electrode 4 from top to bottom.
The working principle is as follows: the center distance between the two electrodes 4 of the resistivity probe related by the invention is 1cm. When the probe is screwed into a medium system through a sealing taper thread on the shell 1, the casing 2 and the two titanium-plated electrodes 4 are immersed by the ultra-pure deionized water, and an external voltage is applied from the other end of the electrodes 4 at the moment, so that current can be generated between the electrodes immersed in the medium. The resistivity of the ultrapure deionized water can be calculated by measuring the voltage and current across the electrodes.
It should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
The above-described embodiments of the present invention do not limit the scope of the present invention. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the scope of the claims of the present invention.
Claims (8)
1. A resistivity probe for use with ultra-pure deionized water includes an outer housing assembly, an electrode assembly and a seal assembly;
it is characterized in that the preparation method is characterized in that,
the shell body component comprises a shell (1) which is arranged in a cylindrical shape, and a lower shell (2) which is matched with the shell (1) and is arranged at the bottom of the shell (1) in a clamping and embedding manner;
the electrode assembly comprises an electrode (4), a sleeve (3) and a spacer (6); the sleeve (3) and the spacer bush (6) are respectively sleeved on the upper part and the lower part of the electrode (4); the electrode (4) and a sleeve (3) and a spacer bush (6) which are sleeved on the upper part and the lower part of the electrode (4) penetrate through a middle cavity formed by the clamping and embedding of the shell (1) and the lower shell (2);
the sealing assembly comprises a lower gasket (5), a small sealing ring (7) and a large sealing ring (8); the lower gasket (5) is arranged between the lower end of the electrode (4) and the lower surface of the shell (2); the small sealing ring (7) and the large sealing ring (8) are arranged between the spacer bush (6) and the electrode;
the sealing assembly further comprises a flat washer (9), a sawtooth washer (10) and a nut (11); the nut (11) is sleeved on the top of the electrode (4) to fix the electrode (4) on the sleeve (3); sawtooth packing ring (10) and plain washer (9) from last to setting gradually down electrode (4) top is compressed tightly the laminating by nut (11) and is in on sleeve (3).
2. The resistivity probe for use with ultrapure deionized water as claimed in claim 1 wherein: the shell (1) is made of copper.
3. The resistivity probe for use with ultrapure deionized water as claimed in claim 1 wherein: the shell (2), the sleeve (3) and the spacer bush (6) are all insulators.
4. The resistivity probe for use with ultrapure deionized water as claimed in claim 1 wherein: the lower gasket (5) is made of nylon.
5. The resistivity probe for ultra-pure deionized water according to claim 1, wherein: the electrode (4) is a titanium-plated electrode.
6. The resistivity probe for ultra-pure deionized water according to claim 1, wherein: two electrodes (4) are arranged in parallel; each electrode (4) is provided with a sleeve (3), a group of nuts (11), a sawtooth washer (10) and a flat washer (9).
7. The resistivity probe for ultra-pure deionized water according to claim 6, wherein: the large sealing ring (8) is annularly sleeved outside the two electrodes (4); the number of the small sealing rings (7) is two, and the small sealing rings are sleeved on the two electrodes (4) respectively.
8. The resistivity probe for ultra-pure deionized water of claim 7, wherein: the nut (11), the sawtooth washer (10) and the flat washer (9) are sequentially arranged from top to bottom to form a group of fixed components; two groups of fixing assemblies are sequentially arranged on the top of each electrode (4) from top to bottom.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110653804.1A CN115468986A (en) | 2021-06-11 | 2021-06-11 | Resistivity probe for ultrapure deionized water |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110653804.1A CN115468986A (en) | 2021-06-11 | 2021-06-11 | Resistivity probe for ultrapure deionized water |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115468986A true CN115468986A (en) | 2022-12-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110653804.1A Pending CN115468986A (en) | 2021-06-11 | 2021-06-11 | Resistivity probe for ultrapure deionized water |
Country Status (1)
| Country | Link |
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| CN (1) | CN115468986A (en) |
Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5057212A (en) * | 1990-03-09 | 1991-10-15 | Burrows Bruce D | Water conductivity monitor and circuit with extended operating life |
| US5466366A (en) * | 1994-02-01 | 1995-11-14 | New Gulf Measurement Instrument Ltd. Company | Water temperature and conductivity detector for reverse-osmosis water purifier systems |
| US20020105345A1 (en) * | 1998-07-23 | 2002-08-08 | Yoshimichi Yasuda | Sensor for measuring resistivity |
| CN2762126Y (en) * | 2005-01-11 | 2006-03-01 | 陈辉 | Domestic pure water determination instrument |
| CN2800276Y (en) * | 2005-05-27 | 2006-07-26 | 房千贺 | Hand-held pure water quality detector |
| CN201053958Y (en) * | 2007-06-08 | 2008-04-30 | 上海康雷分析仪器有限公司 | Small sized resistivity sensor for super pure water device for lab |
| CN104995503A (en) * | 2013-02-12 | 2015-10-21 | 株式会社堀场先进技术 | Resistivity-measuring circuit, cell for measuring liquid sample, resistivity-measuring apparatus, liquid sample control method and liquid sample control system |
| CN106198641A (en) * | 2016-08-30 | 2016-12-07 | 北京智博联科技股份有限公司 | The probe of resistivity of media in measurement prefabricated concrete structure reinforced bar sleeve |
| CN109406584A (en) * | 2018-12-06 | 2019-03-01 | 深圳市深舍传感科技有限公司 | A kind of two-channel digital TDS sensor and its implementation |
| CN211553845U (en) * | 2020-01-19 | 2020-09-22 | 烟台凯米斯仪器有限公司 | Metal electrode conductivity sensor with built-in temperature sensor |
| CN212207188U (en) * | 2020-04-28 | 2020-12-22 | 广西职业技术学院 | Pure water identifier |
| CN212622359U (en) * | 2020-05-15 | 2021-02-26 | 上海水仪科技有限公司 | Quadrupole type titanium alloy conductivity electrode |
| CN215640993U (en) * | 2021-06-11 | 2022-01-25 | 无锡迈泰科技有限公司 | Resistivity probe for ultrapure deionized water |
-
2021
- 2021-06-11 CN CN202110653804.1A patent/CN115468986A/en active Pending
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5057212A (en) * | 1990-03-09 | 1991-10-15 | Burrows Bruce D | Water conductivity monitor and circuit with extended operating life |
| US5466366A (en) * | 1994-02-01 | 1995-11-14 | New Gulf Measurement Instrument Ltd. Company | Water temperature and conductivity detector for reverse-osmosis water purifier systems |
| US20020105345A1 (en) * | 1998-07-23 | 2002-08-08 | Yoshimichi Yasuda | Sensor for measuring resistivity |
| CN2762126Y (en) * | 2005-01-11 | 2006-03-01 | 陈辉 | Domestic pure water determination instrument |
| CN2800276Y (en) * | 2005-05-27 | 2006-07-26 | 房千贺 | Hand-held pure water quality detector |
| CN201053958Y (en) * | 2007-06-08 | 2008-04-30 | 上海康雷分析仪器有限公司 | Small sized resistivity sensor for super pure water device for lab |
| CN104995503A (en) * | 2013-02-12 | 2015-10-21 | 株式会社堀场先进技术 | Resistivity-measuring circuit, cell for measuring liquid sample, resistivity-measuring apparatus, liquid sample control method and liquid sample control system |
| CN106198641A (en) * | 2016-08-30 | 2016-12-07 | 北京智博联科技股份有限公司 | The probe of resistivity of media in measurement prefabricated concrete structure reinforced bar sleeve |
| CN109406584A (en) * | 2018-12-06 | 2019-03-01 | 深圳市深舍传感科技有限公司 | A kind of two-channel digital TDS sensor and its implementation |
| CN211553845U (en) * | 2020-01-19 | 2020-09-22 | 烟台凯米斯仪器有限公司 | Metal electrode conductivity sensor with built-in temperature sensor |
| CN212207188U (en) * | 2020-04-28 | 2020-12-22 | 广西职业技术学院 | Pure water identifier |
| CN212622359U (en) * | 2020-05-15 | 2021-02-26 | 上海水仪科技有限公司 | Quadrupole type titanium alloy conductivity electrode |
| CN215640993U (en) * | 2021-06-11 | 2022-01-25 | 无锡迈泰科技有限公司 | Resistivity probe for ultrapure deionized water |
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