CN115464002A - Gas diffuser shaping device and gas diffuser correction method - Google Patents

Abstract

The invention discloses a gas diffuser shaping device and a gas diffuser straightening method, which belong to the technical field of gas diffuser shaping and processing. The shaping device has a raised arc surface; the arc surface radian is larger than the standard forming surface arc , so that when the arc-shaped surface is attached to the standard molding surface, there is a gap between the two; the gap is equal to the deformation of the gas diffuser due to internal stress or external force. The amount of gap reserved by the shaping device after shaping can offset the rebound amount and the deformation amount affected by its own gravity. After offsetting, the molding surface of the gas diffuser is exactly consistent with the standard molding surface. Improved shaping accuracy.

Description

A gas diffuser shaping device and a gas diffuser correction method

technical field

The invention belongs to the technical field of gas diffuser shaping and processing, and in particular relates to a gas diffuser shaping device and a gas diffuser correcting method.

Background technique

During the manufacturing process of the liquid crystal display panel, it is necessary to use a chemical vapor deposition (chemical vapor deposition, CVD for short) process to deposit some functional thin films on the surface of the glass substrate. In the process of chemical vapor deposition, the gas diffuser can make the gas diffuse evenly on the substrate.

As the gas diffuser is used for a long time, its shape will be deformed, resulting in uneven gas diffusion. When the deformation of the gas diffuser exceeds a certain range, it will cause uneven film formation in some areas of the entire substrate. At this time, the gas diffuser needs to be removed and the flatness correction process should be carried out.

In the prior art, the flatness of the gas diffuser is usually corrected by means of local heat treatment and shaping. For example, the Chinese Invention Patent Publication No. CN110961489A disclosed a flatness thermal shaping treatment process for gas diffusers on April 7, 2020. The deformed gas diffuser is placed on the pad, and then aluminum foil paper is laid on the gas diffuser, and counterweights of corresponding weight are laid layer by layer on the aluminum foil paper. Through the heating process of the electric heating furnace, the deformed gas diffuser One-time heating treatment into an inverted bowl shape reduces the risk of bumps and injuries due to multiple hoisting, flanging, testing and transportation in the middle, and the flatness and surface shape of the corrected gas diffuser are not easy to rebound, which can Improve its service life and reduce maintenance costs." In the above invention patent, heat treatment furnace is used, and local point support and gravity briquetting are used for shaping, which eliminates the internal stress problem during shaping, but there are still the following shortcomings and deficiencies:

(1) The use of local point support will cause concave points at the corresponding support points (the contact point pressure is high, which will easily cause the molding surface of the gas diffuser to be sunken), and the entire gas diffuser molding surface cannot form a uniform and smooth transition surface.

(2) As the temperature changes during the heat treatment process, irregular deformation will occur on the unsupported part of the forming surface of the gas diffuser, which cannot be precisely controlled, resulting in poor shaping accuracy.

(3) After shaping, the gas diffusion surface is deformed due to the amount of rebound and its own gravity, resulting in poor shaping accuracy.

Contents of the invention

1. Problems to be solved

Aiming at the technical problem of poor shaping accuracy existing in the prior art, the present invention provides a gas diffuser shaping device and a gas diffuser correction method. By setting the arc-shaped surface of the shaping device and reserving a gap, the plane of the gas diffuser can be solved. Can not form a complete uniform and smooth transition surface and poor shaping accuracy technical problems.

2. Technical solution

In order to solve the above problems, the present invention adopts the following technical solutions:

A gas diffuser shaping device, used to modify the shape of the molding surface of the gas diffuser, the shaping device has a convex arc surface; the curvature of the arc surface is larger than the standard molding surface curvature, so that the arc When the molding surface is attached to the standard molding surface, there is a gap between them; the gap is equal to the deformation of the gas diffuser due to internal stress or external force on the molding surface.

Preferably, the deformation amount includes the rebound shrinkage amount a of the gas diffuser after shaping and/or the gravity deformation amount b of the gas diffuser due to its own gravity.

Preferably, the calculation formula of the center height h of the arc-shaped surface is as follows:

h=s-a-b;

Among them, s is the center height of the standard molding surface.

Preferably, several counterweights are included for being arranged above the gas diffuser to be shaped to apply loads for shaping the gas diffuser.

Preferably, the weight block is wrapped with aluminum foil.

A gas diffuser correction method,

S1: Upside down the forming surface of the gas diffuser to be shaped on the arc surface of the gas diffuser shaping device;

S2: Place several counterweights above the gas diffuser, and the several counterweights are unevenly distributed on the top of the gas diffuser during the shaping process.

S3: Place the gas diffuser, the gas diffuser shaping device and several counterweights arranged in steps S1 and S2 as a whole in a heating furnace for heat treatment to eliminate the internal stress of the gas diffuser.

Preferably, the number of the counterweights decreases from the edge of the gas diffuser to its center.

Preferably, in step S3, the heat treatment includes a temperature rising stage, a heat preservation stage and a temperature falling stage.

Preferably, in step S3, the cooling stage is segmented cooling, including, the first stage: the furnace door is completely closed, and the gas diffuser is naturally cooled to 250°C; the second stage: the furnace door is not fully opened, and the gas diffuser The temperature of the gas diffuser is naturally lowered to 48°C; the third stage: the furnace door is fully opened and the gas diffuser is naturally cooled to normal temperature.

3. Beneficial effects

Compared with the prior art, the beneficial effects of the present invention are:

(1) The shaping device of the present invention has a raised arc-shaped surface, and the arc-shaped surface shapes the molding surface through surface contact, which solves the problem of local depression defects on the molding surface caused by point contact shaping. On the other hand, the use of curved surface shaping can keep the forming surface consistent with the shape of the curved surface during the entire shaping process of the gas diffuser. Therefore, the shape of the molding surface of the gas diffuser will not undergo uncontrolled deformation due to temperature changes during the heat treatment process, so that the molding surface of the gas diffuser will form a uniform and smooth transitional surface after shaping.

(2) In the present invention, the radian of the arc-shaped surface is greater than the radian of the standard molding surface, so that when the arc-shaped surface is attached to the standard molding surface, there is a gap between the two; It is equal to the amount of deformation of the gas diffuser due to internal stress or external force. The amount of gap reserved by the shaping device after shaping can offset the rebound amount and the deformation amount affected by its own gravity. After offsetting, the molding surface of the gas diffuser is exactly consistent with the radian of the standard molding surface, which ensures the shaping accuracy.

(3) In the present invention, several counterweights are unevenly distributed on the top of the gas diffuser during the shaping process. Its thickness is relatively thin in the center region of the gas diffuser, and relatively thick in the edge region. In order to make the overall load of the gas diffuser within a suitable range (too much load will easily lead to transitional deformation of the forming surface, too small to achieve the shaping effect). Therefore, according to needs, a relatively small number of counterweights are arranged in the central area, and a relatively large number of counterweights are arranged on both sides. By adjusting the distribution number of counterweights, the load applied to the gas diffuser is adjusted to achieve the purpose of improving the precise control of the shaping load.

(4) Put the shaping device together with the gas diffuser into the heating furnace for shaping. While applying force shaping to the gas diffuser, heating the gas diffuser can eliminate its internal stress. After the heat treatment of the gas diffuser, it enters the cooling process. The cooling process is divided into three stages. The first stage: the furnace cover is closed, the heat source is turned off, and the temperature of the gas diffuser is naturally reduced from 450°C to 480°C to about 250°C. At this stage, the temperature is not cooled too quickly to change the crystal structure. The second stage: the furnace roof is slightly opened, and the temperature is lowered to 48°C. In this stage, the temperature is not reduced too fast, which increases the internal stress of the gas diffuser. The third stage: the furnace roof is fully opened, and the temperature is lowered to normal temperature. The whole cooling process is about 48.5 hours, the cooling time is long, and the temperature change rate is low, which can reduce the influence of thermal expansion and contraction of the gas diffuser caused by temperature changes, and improve the accuracy of shaping.

Description of drawings

Figure 1 is a schematic cross-sectional view of a gas diffuser and its standard molding surface;

Fig. 2 is a schematic cross-sectional view of a gas diffuser shaping device and its curved surface;

Figure 3 is a schematic cross-sectional view of the undercut of the standard forming surface on the curved surface;

Fig. 4 is a schematic cross-sectional view of the rebound amount a when the forming surface rebounds;

Fig. 5 is a cross-sectional schematic diagram of the deformation b of the molding surface after the molding surface is deformed by the influence of its own weight;

Fig. 6 is a schematic diagram of the relative positions of the counterweight, the gas diffuser and the shaping device during shaping;

Fig. 7 is a curve diagram of temperature variation of gas diffuser during heat treatment;

Fig. 8 is a local flatness detection diagram of the forming surface before shaping;

Fig. 9 is a local flatness detection diagram of the molding surface after shaping;

In the picture:

1. Gas diffuser; 11. Standard molding surface;

2. Shaping device; 21. Arc surface; 22. Base;

3. Counterweight;

4. Gap amount.

detailed description

The following detailed description of exemplary embodiments of the invention refers to the accompanying drawings, which form a part hereof, and in which is shown by way of example an exemplary embodiment of the invention in which it can be practiced. While these exemplary embodiments have been described in sufficient detail to enable those skilled in the art to practice the invention, it should be understood that other embodiments can be implemented and that various changes can be made in the invention without departing from the spirit and scope of the invention. . The following more detailed description of the embodiments of the invention is not intended to limit the scope of the invention as claimed, but merely to illustrate and not limit the description of the features and characteristics of the invention, in order to suggest the best mode of carrying out the invention , and are sufficient to enable those skilled in the art to implement the present invention. Accordingly, the scope of the invention is to be limited only by the appended claims.

In order to solve the above problems, the following are described in conjunction with the accompanying drawings:

Example

1. Shaping device:

(1) Arc surface 21

As shown in Figures 1-3, the present invention provides a gas diffuser shaping device 2 in order to solve the deficiencies in the prior art. The gas diffuser shaping device 2 includes a base 22, which is cylindrical, but not limited to cylindrical. A protrusion is fixedly connected to the center of the base 22 . The convex surface is an arc surface 21 . The specific shape and size of the arc-shaped surface 21 are determined according to the standard molding surface 11 of the gas diffuser 1 (molding surface: it is the concave surface used for work on the gas diffuser 1. The standard molding surface 11: the gas diffusion that meets the production needs according to the design standard device 1 molding surface).

The arc of the arc surface 21 is greater than the arc of the standard molding surface 11 . When the standard molding surface 11 is reversed on the arc surface 21 (the molding surface does not apply any load), since the arc of the arc surface 21 is larger than the standard molding surface 11, there will be a gap of 4 between the two (the molding surface and The gap between the arc-shaped surfaces), the gap amount 4 is equal to the deformation amount of the gas diffuser 1 due to internal stress or external force. Before shaping, the curved surface of the shaping device 2 is designed to have a radian greater than 11 radians of the standard molding surface, so that there is a reserved gap 4 on the curved surface 21 to offset the springback of the body diffuser after shaping and the influence of its own gravity. deformation amount. After offsetting, the molding surface of the gas diffuser 1 is exactly consistent with the standard molding surface 11 . The shaping accuracy is guaranteed.

Since the clearance 4 is difficult to measure, we use the height difference between the height h at the center of the arc surface 21 and the center height s of the standard forming surface to detect the clearance. Here the height difference between the two is the largest, defined as Δt.

When designing the arc surface 21, the center height of the arc surface is h, the center height of the standard forming surface 11 is s, and the difference between the center height of the arc surface 21 and the center height of the standard forming surface 11 is Δt.

Calculate the center height h=s-Δt of the arc surface 21 .

The gap amount 4 is equal to the deformation amount of the gas diffuser 1 itself or due to external force after shaping.

The deformation of the gas diffuser 1 itself or due to external force includes but not limited to the rebound shrinkage a of the gas diffuser 1 after heat treatment and the gravity deformation b of the gas diffuser 1 due to its own gravity. It can also be the amount of deformation caused by the external force received by the molding surface, etc.

1) When Δt=a; at this time, only consider the impact of the rebound shrinkage a of the molding surface of the gas diffuser 1 after heat treatment on the shaping accuracy

Calculate the height of the center of the arc surface: h=s-a;

2) When Δt=b; at this time, only consider the influence of the gravity deformation b of the heat-treated forming surface of the gas diffuser 1 due to its own gravity on the shaping accuracy;

Calculate the height of the center of the arc surface: h=s-b;

3) When Δt=a+b; at this time, only consider the impact of the rebound shrinkage a of the molding surface of the gas diffuser 1 after heat treatment and the gravity deformation b caused by its own gravity on the shaping accuracy;

Calculate the height of the center of the arc surface: h=s-a-b;

(2) Rebound shrinkage a of gas diffuser 1 after heat treatment:

Wherein, as shown in Fig. 4, in the shaping process of the present invention, the molding surface of the gas diffuser 1 is molded through the arc surface 21, and when the arc surface 21 is used for molding, a large amount of internal stress will be generated in the molding surface . Once the load is removed, the forming surface will partially recover under the influence of internal stress, which will cause shaping deviation. In order to eliminate internal stress, heat treatment is carried out on the forming surface during the shaping and loading process to eliminate its internal stress and reduce the deformation of the forming surface after shaping due to internal stress. However, due to the use of surface contact molding, the entire surface of the molding surface is under load during the molding process, which increases the internal stress in the gas diffuser 1. Even if the heat treatment process is used, it is difficult to completely eliminate the internal stress, resulting in Certain rebound deformation (deformation amount is a). Therefore, when designing the center height of the arc-shaped surface 21, the rebound shrinkage a of the gas diffuser 1 after heat treatment is taken into consideration, and the spring-back is reserved by reducing the center height of the arc-shaped surface 21 in advance (the reduction is a). quantity. After heat treatment on the forming surface, springback deformation occurs, which can be used to offset this part of the error, thereby improving the shaping accuracy. The value of a is mainly affected by the material of the molding surface, the applied load for shaping, and heat treatment.

a is measured as follows:

1) Prepare a gas diffuser 1 with a standard molding surface 11 and a gas diffuser shaping device 2 (the arc surface 21 of the shaping device 2 is at the same height as the center of the standard molding surface 11);

2) Upside down the forming surface of the gas diffuser 1 on the arc surface 21 of the shaping device 2;

3) Apply and maintain a load above the gas diffuser 1;

4) Place the gas diffuser 1 and the shaping device 2 in a heating furnace for heat treatment;

5) Take it out after the heat treatment is completed, and measure the center height a1 of the standard forming surface 11;

6) Calculate a=a1-s.

The value of the above measurement a is the initial value, and the value of a is based on the quality inspection parameters during the production process (the center height measured on the molding surface of the gas diffuser 1 after shaping is compared with the center height of the standard molding surface 11, based on the difference between the two) It is constantly revised to improve the accuracy of a value, the more accurate the value of a, the higher the accuracy of shaping. After the value a is adjusted, the materials used in the follow-up shaping device 2, the shaping method and the shaping heat treatment parameters are all kept the same, and the

(3) The gravity deformation b of gas diffuser 1 due to its own gravity:

Wherein, as shown in FIG. 5 , the gravitational deformation b of the gas diffuser 1 due to its own gravity is due to the error of the profile caused by the use of the gas diffuser 1 . When the gas diffuser 1 is in use, it adopts the installation method of hanging in the middle and fixing the four corners. Affected by its own weight, the forming surface will be sunken inward, and this deformation will increase the curvature of the forming surface and the center height of the forming surface. Therefore, when designing the center height of the arc-shaped surface 21, the gravity deformation b caused by the heat of the gas diffuser 1 due to its own gravity is taken into consideration, and the center height of the arc-shaped surface 21 is reduced in advance (the amount of reduction is b). The large arc surface is 21 radians. When used on the forming surface, it just offsets this part of the error, thereby improving the shaping accuracy.

b is measured as follows:

1) Take a gas diffuser 1 with a standard molding surface 11, and turn the standard molding surface 11 upward;

2) Place the gas diffuser 1 on the workbench, and pad the four corners of the bottom with reference blocks so that the gas diffuser 1 is placed horizontally;

3) Measure and obtain the center height b1 of the molding surface;

4) Calculate b=b1-s.

Based on the above reasons, when designing, the difference Δt=a+b between the center height of the arc surface 21 and the center height of the standard molding surface 11; the arc surface 21 design height h=s-Δt, preferably, h=s-a-b ; When the height of the curved surface 21 is designed to be h, the errors caused by a and b are offset to improve the shaping accuracy.

2. Counterweight 3:

As shown in FIG. 6 , the counterweight 3 uses its own gravity to apply load to the gas diffuser 1 during the shaping process. Counterweight block 3 is cuboid shape, has several pieces. Several counterweights 3 can regulate the load force applied to different parts of the gas diffuser 1 . During the shaping process, the counterweight 3 is located above the gas diffuser 1 and exerts a load on the gas diffuser 1 by its own gravity. Under the action of gravity of the counterweight 3 , the forming surface of the gas diffuser 1 is in close contact with the arc-shaped surface 21 of the shaping device 2 and is shaped. The counterweights 3 are unevenly distributed on the gas diffuser 1 . Specifically, the gas diffuser 1 has a small number distributed in the central area and a large number distributed in the edge area. The main reason is that the central region has a molding surface, resulting in a relatively thinner central region and a relatively thicker edge region. In order to make the overall load of the gas diffuser 1 suitable (too much load will easily lead to transitional deformation of the molding surface, too small to achieve the shaping effect), so relatively few counterweights 3 are arranged in the central area, and relatively few counterweights 3 are arranged on both sides. More counterweights3. The counterweight 3 is generally made of metal iron. When in use, it includes a material sheet of the same material as the gas diffuser 1 to prevent the material of the counterweight 3 from contaminating the material of the gas diffuser 1 during the heating process. In the present invention, the gas diffuser 1 is made of aluminum, so the outer surface of the counterweight 3 is wrapped with aluminum foil.

3. Heat treatment:

As shown in FIG. 7 , the arc-shaped surface 21 is a uniform transition photothermal treatment as a key step for eliminating internal stress in the shaping process of the gas diffuser 1 . Including heating process, heat preservation process and cooling process. After placing the shaping device 2, the gas diffuser 1 and the counterweight 3 according to the corresponding positions, put them into a heating furnace for heat treatment.

Heating process: close the top cover of the electric heating furnace, and start to uniformly heat the heating furnace. The heating rate is set as: 80°C/h, and the temperature of the gas diffuser 1 is heated to 450-480°C within 6 hours.

Heat preservation process: After reaching the highest temperature, the temperature is monitored by the thermocouple of the electric heating furnace, and the electric heating furnace is controlled to keep warm. The heat preservation is divided into the first stage and the second stage. In the first stage, the temperature of the gas diffuser 1 is slowly lowered from 480°C to 400°C; in the second stage: the heating furnace is ignited, and the temperature of the gas diffuser 1 is slowly raised to 450°C-480°C and maintained. At this temperature, after a certain holding time, the gas diffuser 1 is fully deformed. The holding time of the first stage and the second stage is about 20.5 hours. If the holding time is too short, the diffuser will not deform sufficiently; if the holding time is too long, energy and cost will be wasted.

Cooling process: After the holding time is over, it will automatically cool down with the heating furnace, and the cooling time is slow to eliminate the internal stress caused by deformation. The cooling process is divided into three stages. The first stage: the furnace cover is closed, the heat source is turned off, and the temperature of the gas diffuser 1 is naturally reduced from 450°C to 480°C to about 250°C. At this stage, the temperature is not cooled too fast to change the crystal structure. The second stage: the furnace roof is slightly opened, and the temperature is lowered to 48°C. In this stage, the temperature should not drop too fast, which will increase the internal stress of the gas diffuser 1 . The third stage: the furnace roof is fully opened, and the temperature is lowered to normal temperature. The entire cooling process is about 48.5 hours, the cooling time is long, and the temperature change rate is low, which can reduce the influence of thermal expansion and contraction of the gas diffuser 1 caused by temperature changes, and improve the accuracy of shaping. When the temperature reaches normal temperature, the weighted briquettes are taken out first, and then the heated and shaped gas diffuser 1 is lifted out of the heating furnace.

Table 1: Heat treatment temperature control parameters:

4. Correction method of gas diffuser 1

Based on above-mentioned shaping device 2, provide following shaping method:

S1: Upside down the forming surface of the gas diffuser 1 to be shaped on the arc surface 21 of the corresponding gas diffuser shaping device 2;

S2: Place several counterweights 3 above the gas diffuser 1 , and the several counterweights 3 are unevenly distributed on the top of the gas diffuser 1 during the shaping process. The number of counterweights 3 distributed at the center of the gas diffuser 1 is small, and the number of counterweights 3 distributed at the edge is large. A more optimal solution is that the number of the counterweights 3 decreases gradually from the edge of the gas diffuser 1 to its center.

S3: Put the gas diffuser 1 , the gas diffuser shaping device 2 and several counterweights 3 arranged according to the steps of S1 and S2 into a heating furnace for heat treatment to eliminate the internal stress of the gas diffuser 1 .

Heat treatment includes a heating stage, a heat preservation stage and a cooling stage.

Among them, the cooling stage is divided into three stages of cooling. Including, the first stage: the furnace door is completely closed, and the gas diffuser 1 is naturally cooled to 250°C; the second stage: the furnace door is not fully opened, and the gas diffuser 1 is naturally cooled to 48°C; the third stage: the furnace door Fully open the gas diffuser 1 and cool down to normal temperature naturally.

As shown in Fig. 8 and Fig. 9, by comparing the molding surfaces before and after shaping, it can be clearly seen that the shaping surface of the gas diffuser 1 after shaping by this method is obviously smoother, and the shaping effect is good.

The above schematically describes the present invention and its implementation, which is not restrictive, and what is shown in the drawings is only one of the implementations of the present invention, and the actual structure is not limited thereto. Therefore, if a person of ordinary skill in the art is inspired by it, without departing from the inventive concept of the present invention, without creatively designing a structural mode and embodiment similar to the technical solution, it shall all belong to the protection scope of the present invention .

Claims (9)

1. A gas diffuser shaping device for correcting the shape of the molding surface of the gas diffuser (1), characterized in that the shaping device (2) has a raised arc surface (21); the The radian of the arc-shaped surface (21) is greater than the radian of the standard molding surface (11), so that when the arc-shaped surface (21) is attached to the standard molding surface (11), there is a gap (4) between the two ; The amount of gap (4) is equal to the deformation of the molding surface of the gas diffuser (1) due to internal stress or external force. 2. The gas diffuser shaping device according to claim 1, characterized in that, the deformation amount includes the rebound shrinkage a of the gas diffuser (1) molding surface after shaping and/or the heat of the gas diffuser (1) The gravitational deformation b caused by its own gravity. 3. The gas diffuser shaping device according to claim 2, characterized in that, the calculation formula of the center height h of the arc-shaped surface (21) is as follows: h=s-a-b; Wherein, s is the center height of the standard forming surface (11). 4. The gas diffuser shaping device according to claim 1, characterized in that it comprises several counterweights for being arranged above the gas diffuser (1) to be shaped, for the gas diffuser (1) Shaping applied load. 5 . The gas diffuser shaping device according to claim 4 , wherein the weight block is wrapped with aluminum foil. 6 . 6. A gas diffuser correction method, characterized in that, S1: Upside down the forming surface of the gas diffuser (1) to be shaped on the arc surface (21) of the gas diffuser shaping device; S2: Place several counterweights above the gas diffuser (1), and the several counterweights are unevenly distributed on the top of the gas diffuser (1) during the shaping process. S3: Place the gas diffuser (1), the gas diffuser shaping device and several counterweights arranged in steps S1 and S2 as a whole in the heating furnace, and the gas diffuser (1) is loaded and shaped and heat treated synchronously. The internal stress of the gas diffuser (1) is eliminated while shaping. 7. The gas diffuser correction method according to claim 6, characterized in that, the number of the counterweights decreases gradually from the edge of the gas diffuser (1) to its center. 8. The gas diffuser rectification method according to claim 7, characterized in that, in step S3, the heat treatment includes a heating stage, a heat preservation stage and a cooling stage. 9. The gas diffuser rectification method according to claim 8, characterized in that, in the step S3, the cooling stage is subsection cooling, comprising, the first stage: the furnace door is completely closed, and the gas diffuser (1) Natural cooling to 250°C; the second stage: the furnace door is not fully opened, and the gas diffuser (1) is naturally cooled to 48°C; the third stage: the furnace door is fully opened and the gas diffuser (1) is naturally cooled to normal temperature.

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