CN115463494A - Structure and method for preventing process furnace tail air extraction pipeline from being blocked - Google Patents
Structure and method for preventing process furnace tail air extraction pipeline from being blocked Download PDFInfo
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- CN115463494A CN115463494A CN202211132868.8A CN202211132868A CN115463494A CN 115463494 A CN115463494 A CN 115463494A CN 202211132868 A CN202211132868 A CN 202211132868A CN 115463494 A CN115463494 A CN 115463494A
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- 238000000034 method Methods 0.000 title claims abstract description 95
- 238000000605 extraction Methods 0.000 title claims abstract description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 84
- 238000001816 cooling Methods 0.000 claims abstract description 71
- 238000004140 cleaning Methods 0.000 claims abstract description 47
- 239000007789 gas Substances 0.000 claims abstract description 43
- 239000002699 waste material Substances 0.000 claims abstract description 33
- 239000002912 waste gas Substances 0.000 claims abstract description 10
- 238000001514 detection method Methods 0.000 claims description 11
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 claims description 6
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 6
- 239000000523 sample Substances 0.000 claims description 5
- 238000004891 communication Methods 0.000 claims description 4
- 238000011049 filling Methods 0.000 claims description 4
- 239000004327 boric acid Substances 0.000 claims description 3
- 229910052810 boron oxide Inorganic materials 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 238000005516 engineering process Methods 0.000 claims 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 11
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 5
- 238000010438 heat treatment Methods 0.000 abstract description 4
- 230000000737 periodic effect Effects 0.000 abstract description 2
- 239000000110 cooling liquid Substances 0.000 description 7
- 239000010453 quartz Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000017525 heat dissipation Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/24—Particle separators, e.g. dust precipitators, using rigid hollow filter bodies
- B01D46/2403—Particle separators, e.g. dust precipitators, using rigid hollow filter bodies characterised by the physical shape or structure of the filtering element
- B01D46/2411—Filter cartridges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/66—Regeneration of the filtering material or filter elements inside the filter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/90—Devices for taking out of action one or more units of multi-unit filters, e.g. for regeneration or maintenance
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
- B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
- B08B9/0321—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing using pressurised, pulsating or purging fluid
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The invention discloses a structure and a method for preventing a tail part air extraction pipeline of a process furnace from being blocked, wherein the method for preventing the tail part air extraction pipeline of the process furnace from being blocked comprises the following steps: the process furnace chamber, the water cooling bottle, the filter bottle, the vacuum pump and the waste discharge pipeline are communicated through a gas pipeline to jointly form an air exhaust pipeline system at the tail part of the process furnace, process waste gas is exhausted into the waste discharge pipeline from the process furnace chamber through the water cooling bottle and the filter bottle by the vacuum pump, a cleaning device is further communicated on the gas pipeline at the exhaust port of the process furnace chamber, and the cleaning device introduces cleaning gas into the air exhaust pipeline system at the tail part of the process furnace and cleans the inner wall of the air exhaust pipeline. The cleaning device provided with the air exhaust pipeline disclosed by the invention can realize periodic cleaning of the pipeline and the filter element of the filter flask by heating to form water vapor and introducing nitrogen to carry water molecules.
Description
Technical Field
The invention relates to the field of photovoltaic cell manufacturing, in particular to a structure and a method for preventing an air exhaust pipeline at the tail of a process furnace from being blocked.
Background
The solar photovoltaic cell is a novel cell which directly converts solar light energy into electric energy. Silicon-based silicon photovoltaic cells are commonly used today, including single crystal silicon, polycrystalline silicon, and amorphous silicon photovoltaic cells. In the preparation process of the solar photovoltaic cell, the silicon wafer needs to be subjected to the procedures of texturing, diffusion, etching, film coating, printing and the like in sequence. In the preparation process of the photovoltaic cell, a large amount of tiny solid particles are contained in waste gas generated in a process chamber of the boron diffusion furnace, and particularly after the temperature is suddenly reduced, the gaseous solid particles are easily attached to the inner wall of a pipeline or block a filter element of a filter bottle to cause blockage. The high-frequency cleaning pipeline and the filter element greatly increase the operation cost of a production line and reduce the production efficiency.
Disclosure of Invention
The applicant provides a structure and a method for preventing the exhaust pipeline at the tail part of the process furnace from being blocked, which are reasonable in structure, aiming at the problems in the prior art, and realizes the periodical cleaning of the pipeline through process setting, so that the blocking risk is reduced, and the pressure difference between the front part and the rear part of a filter bottle is dynamically monitored; when the pressure difference between the front and the back of the filter bottle reaches a set early warning value, the air exhaust pipeline is automatically switched from one filter bottle channel to the other filter bottle channel, so that the maintenance and production stop time caused by the blockage of the air exhaust pipeline can be greatly reduced.
The technical scheme adopted by the invention is as follows:
a method for preventing the exhaust pipeline at tail of technological furnace from being blocked includes such steps as connecting technological furnace cavity, water cooling bottle, filter bottle, vacuum pump and exhaust pipeline via gas pipeline to form an exhaust pipeline system at tail of technological furnace, exhausting the technological exhaust gas from said technological furnace cavity via water cooling bottle and filter bottle to exhaust pipeline, connecting a cleaning unit to gas pipeline at exhaust outlet of technological furnace cavity, and introducing cleaning gas to exhaust pipeline system at tail of technological furnace and cleaning the inner wall of exhaust pipeline.
As a further improvement of the above technical solution:
and the air exhaust pipeline system at the tail part of the process furnace is also provided with pressure detection equipment for dynamically monitoring the pressure difference in the front pipeline and the rear pipeline of the filter flask and feeding the pressure difference back to the cleaning device for cleaning operation.
The filter bottle comprises two parallel filter bottles and corresponding control valves, and the system automatically controls whether one filter bottle channel is automatically switched to the other filter bottle channel or not through setting of detected pipeline pressure difference.
Introducing a cleaning gas which is water vapor, and reacting the water vapor with boron oxide attached to the inner wall of the air exhaust pipeline to generate boric acid to realize a cleaning effect; the reaction chemical formula is: B2O3+ H2O → H3BO3.
The utility model provides a prevent structure of process furnace tail portion gas-extraction pipeline jam, includes process furnace chamber, water-cooling bottle, filter flask, vacuum pump and exhaust pipe at least, process furnace chamber, water-cooling bottle, filter flask, vacuum pump and exhaust pipe pass through the gas pipeline intercommunication and constitute the gas-extraction pipeline system of process furnace tail portion jointly, still communicate on the gas pipeline of the gas vent of process furnace chamber and be equipped with belt cleaning device, and belt cleaning device carries out the cleaning operation to the gas-extraction pipeline inner wall.
As a further improvement of the technical scheme:
the cleaning device comprises a water bath bottle, a water bath bottle heater, an air guide pipe communicated into the liquid in the water bath bottle and a water bath bottle temperature probe, wherein the water bath bottle is provided with a water filling port and an air outlet, and the air outlet is communicated with an air exhaust pipeline system at the tail part of the process furnace through a gas pipeline.
The air exhaust pipeline system at the tail part of the process furnace is also provided with pressure detection equipment for dynamically monitoring the pressure difference in the front pipeline and the rear pipeline of the filter flask.
The pressure detection equipment comprises a first pressure gauge and a second pressure gauge, the first pressure gauge is arranged on the process furnace chamber and used for taking values of air pressure in the process furnace chamber, and the second pressure gauge is arranged on a pipeline between the filter flask and the vacuum pump.
The filter bottles comprise two parallel filter bottles and control valves corresponding to the two filter bottles.
The two paths of filter bottles are arranged behind the water cooling bottle and in front of the vacuum pump through gas pipelines.
The water-cooling bottle comprises a cylindrical cooling cavity, a derivative collecting cavity which is arranged in the cooling cavity and is provided with an arc surface from top to bottom, and an air inlet pipe, an air outlet pipe and a waste discharge pipe which are communicated with the derivative collecting cavity.
The air inlet pipe is spirally abutted against and surrounds the outer side of the cylindrical cooling chamber, and one end of the air inlet pipe is communicated with the derivative collecting chamber; the air outlet pipe is spirally abutted and wound on the inner side of the cylindrical cooling chamber, and one end of the air outlet pipe is communicated with the derivative collecting chamber.
The air inlet pipe, the air outlet pipe and the communication port of the derivative collecting chamber are respectively arranged at two sides of the water-cooling bottle and are in a 180-degree corresponding angle with each other.
The invention has the following beneficial effects:
the cleaning device provided with the air exhaust pipeline disclosed by the invention can realize periodic cleaning of the pipeline and the filter element of the filter flask by heating to form water vapor and introducing nitrogen to carry water molecules. The on-off of the cleaning device and the air exhaust pipeline system is controlled by a diaphragm valve, the diaphragm valve is opened, and water molecules enter the pipeline under the carrying of nitrogen, so that the pipeline and the filter element of the filter flask are cleaned; closing the diaphragm valve, and completely isolating the cleaning device from the air exhaust pipeline system; the invention is provided with two filter bottles which are connected into an air exhaust pipeline system in a parallel mode, and when one filter bottle is blocked, the filter bottle is automatically switched to the other filter bottle channel under the alarm driving of the pressure difference of two pressure gauges. The water cooling bottle adopts an integrated structure for collecting derivatives in the process waste gas and cooling the process waste gas, and the air inlet pipe and the air outlet pipe are spirally and tightly close to the outer side and the inner side of the cooling chamber respectively.
Drawings
FIG. 1 is a schematic diagram of the present invention.
FIG. 2 is a schematic view of the cleaning apparatus of the present invention.
Fig. 3 is a schematic view of the water-cooling bottle of the present invention.
Fig. 4 is a cross-sectional view of fig. 3.
Fig. 5 is a rear view of fig. 3.
In the figure: 1. a process furnace chamber; 2. a pressure detection device; 3. a water-cooling bottle; 4. a cleaning device; 5. filtering the bottle; 6. a control valve; 7. a vacuum pump; 8. a waste pipe; 2-1, a first pressure gauge; 2-2, a second pressure gauge; 3-1, an air inlet pipe; 3-2, cooling the chamber; 3-3, an air outlet pipe; 3-4, a derivative collection chamber; 3-5, a waste discharge pipe; 4-1, water bath bottle; 4-2, a water bath bottle heater; 4-3, an air duct; 4-4, a water bath bottle temperature probe; 4-5, a water injection port; 4-6 and an air outlet.
Detailed Description
The following describes embodiments of the present invention with reference to the drawings.
As shown in fig. 1 to 5, the structure for preventing the blocking of the exhaust pipeline at the tail of the process furnace at least comprises a process furnace chamber 1, a water cooling bottle 3, a filter bottle 5, a vacuum pump 7 and an exhaust pipeline 8, wherein the process furnace chamber 1, the water cooling bottle 3, the filter bottle 5, the vacuum pump 7 and the exhaust pipeline 8 are communicated with each other through a gas pipeline to form an exhaust pipeline system at the tail of the process furnace. An exhaust port of the process furnace chamber 1 is communicated with an air inlet pipe 3-1 of a water cooling bottle 3 through an air pipeline, an air outlet pipe 3-3 of the water cooling bottle 3 is communicated with a filter flask 5 through an air pipeline, the filter flask 5 is communicated with a vacuum pump 7 through an air pipeline, and the vacuum pump 7 is communicated with a waste discharge pipeline 8 through an air pipeline.
The process gas and the derivatives thereof under high temperature are discharged into a waste discharge pipeline 8 from the process furnace chamber 1 through a water cooling bottle 3 and a filter bottle 5 by a vacuum pump 7, and finally discharged into the atmosphere. After the process waste gas is cooled and precipitated at the water cooling bottle 3, large-particle waste in the gas is filtered out through the filter flask 5, reaches the vacuum pump 7 and is discharged through the waste discharge pipeline 8.
And a cleaning device 4 is also communicated with the gas pipeline of the exhaust port of the process furnace chamber 1, and the cleaning device 4 introduces cleaning gas into the exhaust pipeline system at the tail part of the process furnace and cleans the inner wall of the exhaust pipeline. The cleaning device 4 is preferably a water bath device. The water bath device comprises a water bath bottle 4-1, a water bath bottle heater 4-2, an air guide pipe 4-3 leading into liquid in the water bath bottle 4-1 and a water bath bottle temperature probe 4-4, wherein the water bath bottle 4-1 is provided with a water filling port 4-5 and an air outlet 4-6, the air outlet 4-6 is communicated with an air exhaust pipeline system at the tail part of the process furnace through a gas pipeline, and the gas pipeline and a filter element of the filter bottle 5 are periodically cleaned in a mode of heating to form water vapor and simultaneously leading in nitrogen to carry water molecules. During cleaning, a channel of the water bath device is opened under the control of the diaphragm valve, water vapor is discharged into the waste discharge pipeline 8 through the water cooling bottle 3 and the filter bottle 5 in sequence under the pumping action of the vacuum pump 7, and the water vapor cleans the inner wall of the gas pipeline and the filter element of the filter bottle 5. The introduced water vapor reacts with boron oxide attached to the inner wall of the air exhaust pipeline to generate boric acid to realize the cleaning effect; the reaction chemical formula is: B2O3+ H2O → H3BO3.
The on-off of water bath device and air exhaust pipeline system is controlled by the diaphragm valve that corresponds, and the diaphragm valve is opened, and the hydrone gets into air exhaust pipeline under carrying of nitrogen gas, realizes the washing to gas pipeline and 5 filter cores of filter flask, and the diaphragm valve is closed, and water bath device and process furnace tail air exhaust pipeline are completely isolated.
The air exhaust pipeline system at the tail part of the process furnace is also provided with a pressure detection device 2, the pressure detection device 2 comprises a first pressure gauge 2-1 and a second pressure gauge 2-2, the first pressure gauge 2-1 is arranged on the air exhaust pipeline system in front of the filter flask 5, the air pressure of the pipeline in front of the filter flask 5 is taken as a first value taking point, preferably the air pressure is directly arranged on the process furnace chamber 1, and the air pressure in the process furnace chamber 1 is taken as a value. The second pressure gauge 2-2 is arranged on an air exhaust pipeline system behind the filter flask 5, and is used for taking the value of the pipeline air pressure behind the filter flask 5 as a second value taking point, preferably arranged on a pipeline between the filter flask 5 and the vacuum pump 7.
Preferably, the filter bottle 5 comprises two filter bottles connected in parallel and control valves 6 corresponding to the two filter bottles, and the control valves 6 are preferably diaphragm valves. The filter flask 5 adopts a large filter flask 5 with the specification of 20 inches, and the maintenance period is prolonged under the same process conditions. The two paths of filter bottles are arranged behind the water cooling bottle 3 and in front of the vacuum pump 7 through gas pipelines. Through the setting of the pressure difference of the two pressure gauges 2, the system automatically controls whether to automatically switch from one path of filter bottle channel to the other path of filter bottle channel. When the difference value of the two pressure gauges 2 reaches a set alarm value, the pipeline of the exhaust system at the tail of the process furnace is automatically switched to the passage of the other filter flask 5 from the passage of one filter flask 5 under the control of the diaphragm valve.
The water-cooling bottle 3 comprises a cylindrical cooling chamber 3-2, a derivative collecting chamber 3-4 which is arranged in the cooling chamber 3-2 and is provided with an upper arc surface and a lower arc surface, and an air inlet pipe 3-1, an air outlet pipe 3-3 and a waste discharge pipe 3-5 which are communicated with the derivative collecting chamber 3-4. The water cooling bottle 3 is preferably a quartz water cooling bottle. The cooling chamber 3-2 is preferably a liquid-filled cooling chamber 3-2, into which a cooling liquid is injected in the cooling chamber 3-2. The air inlet pipe 3-1 is spirally abutted and wound on the outer side of the cylindrical cooling chamber 3-2, and one end of the air inlet pipe is communicated with the derivative collecting chamber 3-4; the air outlet pipe 3-3 is spirally abutted and wound on the inner side of the cylindrical cooling chamber 3-2, and one end of the air outlet pipe is communicated with the derivative collecting chamber 3-4; the waste discharge pipe 3-5 is arranged at the bottom of the derivative collecting chamber 3-4, and one end of the waste discharge pipe is communicated with the derivative collecting chamber 3-4; the air inlet pipe 3-1, the air outlet pipe 3-3, the derivative collecting chamber 3-4 and the waste discharge pipe 3-5 form a closed vacuum chamber. The cylindrical cooling chamber 3-2 is communicated with the atmosphere and is isolated from a vacuum chamber formed by the air inlet pipe 3-1, the air outlet pipe 3-3, the derivative collecting chamber 3-4 and the waste discharge pipe 3-5.
The air inlet pipe 3-1 and the air outlet pipe 3-3 are spiral and respectively and tightly lean against the outer side and the inner side of the cylindrical cooling chamber 3-2, so that the heat dissipation is more sufficient. The communicating ports of the air inlet pipe 3-1, the air outlet pipe 3-3 and the derivative collecting chamber 3-4 are respectively arranged at two sides of the water cooling bottle 3 and are in 180 degrees corresponding to each other. The communication port of the waste discharge pipe 3-5 and the derivative collection chamber 3-4, namely the waste discharge port of the water cooling bottle 3, is arranged at the bottom or the side surface of the derivative collection chamber 3-4 near the bottom. When in use, the quartz water-cooling bottle 3 is always kept in a cooling liquid state, and the total amount of the cooling liquid is not less than 3/5 of the total height of the water-cooling bottle 3.
Cooling liquid such as water is injected into the cylindrical cooling chamber 3-2, and the temperature of process waste gas passing through coils such as the quartz gas inlet pipe 3-1 and the gas outlet pipe 3-3 is reduced by means of evaporation and heat dissipation of the water; meanwhile, the derivatives in the process waste gas can accumulate and precipitate in the derivative collecting chamber 3-4 at the bottom of the quartz water-cooling bottle 3, and the generated waste liquid can be discharged from the waste discharge pipe 3-5 when accumulated to a certain degree. The cooled process waste gas passes through the filter flask 5 and is discharged into a waste discharge pipeline 8 by a diaphragm pump, and finally is discharged.
The invention also provides a method for preventing the exhaust pipeline at the tail part of the process furnace from being blocked, which comprises the following steps: the process furnace chamber 1, the water cooling bottle 3, the filter flask 5, the vacuum pump 7 and the waste discharge pipeline 8 are communicated through a gas pipeline to jointly form an air exhaust pipeline system at the tail part of the process furnace, an air exhaust port of the process furnace chamber 1 is communicated with an air inlet pipe 3-1 of the water cooling bottle 3 through a gas pipeline, an air outlet pipe 3-3 of the water cooling bottle 3 is communicated with the filter flask 5 through a gas pipeline, the filter flask 5 is communicated with the vacuum pump 7 through a gas pipeline, and the vacuum pump 7 is communicated with the waste discharge pipeline 8 through a gas pipeline. The process waste gas is discharged into a waste discharge pipeline 8 from the process furnace chamber 1 through a water cooling bottle 3 and a filter bottle 5 by a vacuum pump 7, a cleaning device 4 is also communicated with a gas pipeline at an exhaust port of the process furnace chamber 1, and the cleaning device 4 introduces cleaning gas into an exhaust pipeline system at the tail part of the process furnace and cleans the inner wall of the exhaust pipeline.
The cleaning device 4 is preferably a water bath device. The water bath device comprises a water bath bottle 4-1, a water bath bottle heater 4-2, an air guide pipe 4-3 leading into liquid in the water bath bottle 4-1 and a water bath bottle temperature probe 4-4, wherein the water bath bottle 4-1 is provided with a water filling port 4-5 and an air outlet 4-6, the air outlet 4-6 is communicated with an air exhaust pipeline system at the tail part of the process furnace through a gas pipeline, and the gas pipeline and a filter element of the filter bottle 5 are periodically cleaned in a mode of heating to form water vapor and simultaneously leading in nitrogen to carry water molecules.
The air exhaust pipeline system at the tail part of the process furnace is also provided with a pressure detection device 2 which dynamically monitors the pressure difference in the front pipeline and the rear pipeline of the filter bottle 5 and feeds the pressure difference back to the cleaning device 4 for cleaning operation. The pressure detection device 2 comprises a first pressure gauge 2-1 and a second pressure gauge 2-2, the first pressure gauge 2-1 is arranged on an air exhaust pipeline system in front of the filter flask 5, the air pressure of a pipeline in front of the filter flask 5 is taken as a first value taking point, preferably, the first pressure gauge is directly arranged on the process furnace chamber 1, and the air pressure in the process furnace chamber 1 is taken. The second pressure gauge 2-2 is arranged on the air exhaust pipeline system behind the filter flask 5, and is used for taking the value of the pipeline air pressure behind the filter flask 5 as a second value taking point, preferably arranged on the pipeline between the filter flask 5 and the vacuum pump 7.
The filter bottle 5 comprises two filter bottles connected in parallel and control valves 6 corresponding to the two filter bottles, and the system automatically controls whether one filter bottle channel is automatically switched to the other filter bottle channel or not by setting the pressure difference of the two pressure gauges 2.
The water-cooling bottle 3 comprises a cylindrical cooling chamber 3-2, a derivative collecting chamber 3-4 which is arranged in the cooling chamber 3-2 and is provided with an upper arc surface and a lower arc surface, and an air inlet pipe 3-1, an air outlet pipe 3-3 and a waste discharge pipe 3-5 which are communicated with the derivative collecting chamber 3-4.
A cooling liquid is injected into the cooling chamber 3-2. The air inlet pipe 3-1 is spirally abutted and wound on the outer side of the cylindrical cooling chamber 3-2, and one end of the air inlet pipe is communicated with the derivative collecting chamber 3-4; the air outlet pipe 3-3 is spirally abutted and wound on the inner side of the cylindrical cooling chamber 3-2, and one end of the air outlet pipe is communicated with the derivative collecting chamber 3-4; the waste discharge pipe 3-5 is arranged at the bottom of the derivative collecting chamber 3-4, and one end of the waste discharge pipe is communicated with the derivative collecting chamber 3-4; the air inlet pipe 3-1, the air outlet pipe 3-3, the derivative collecting chamber 3-4 and the waste discharge pipe 3-5 form a closed vacuum chamber. The cylindrical cooling chamber 3-2 is communicated with the atmosphere and is isolated from a vacuum chamber formed by the air inlet pipe 3-1, the air outlet pipe 3-3, the derivative collecting chamber 3-4 and the waste discharge pipe 3-5.
The air inlet pipe 3-1 and the air outlet pipe 3-3 are spiral and respectively and tightly lean against the outer side and the inner side of the cylindrical cooling chamber 3-2, so that the heat dissipation is more sufficient. The communicating ports of the air inlet pipe 3-1, the air outlet pipe 3-3 and the derivative collecting chamber 3-4 are respectively arranged at two sides of the water cooling bottle 3 and are in 180 degrees corresponding to each other. The communication port of the waste discharge pipe 3-5 and the derivative collection chamber 3-4, namely the waste discharge port of the water cooling bottle 3, is arranged at the bottom or the side surface of the derivative collection chamber 3-4 close to the bottom. When in use, the quartz water-cooling bottle 3 is always kept in a cooling liquid state, and the total amount of the cooling liquid is not lower than 3/5 of the total height of the water-cooling bottle 3.
The foregoing description is illustrative of the present invention and is not to be construed as limiting thereof, as the invention may be modified in any manner without departing from the spirit thereof.
Claims (13)
1. The method for preventing the process furnace tail air exhaust pipeline from being blocked is characterized in that a process furnace chamber (1), a water cooling bottle (3), a filter bottle (5), a vacuum pump (7) and a waste exhaust pipeline (8) are communicated through a gas pipeline to jointly form an air exhaust pipeline system at the tail of the process furnace, process waste gas is exhausted into the waste exhaust pipeline (8) from the process furnace chamber (1) through the water cooling bottle (3) and the filter bottle (5) through the vacuum pump (7), a cleaning device (4) is further communicated on the gas pipeline of an air exhaust port of the process furnace chamber (1), and the cleaning device (4) introduces cleaning gas into the air exhaust pipeline system at the tail of the process furnace and cleans the inner wall of the air exhaust pipeline.
2. The method for preventing the exhaust pipeline at the tail part of the process furnace from being blocked according to claim 1, wherein a pressure detection device (2) is further arranged in the exhaust pipeline system at the tail part of the process furnace, the pressure difference in the pipelines before and after the filter flask (5) is dynamically monitored, and the pressure difference is fed back to the cleaning device (4) for cleaning operation.
3. The method for preventing the exhaust pipeline at the tail part of the process furnace from being blocked according to the claim 1, wherein the filter bottles (5) comprise two filter bottles connected in parallel and control valves (6) corresponding to the two filter bottles, and the system automatically controls whether one filter bottle channel is automatically switched to the other filter bottle channel or not through setting of the detected pipeline pressure difference.
4. The method for preventing the exhaust pipeline at the tail part of the process furnace from being blocked according to claim 1, wherein the introduced cleaning gas is water vapor, and the water vapor reacts with boron oxide attached to the inner wall of the exhaust pipeline to generate boric acid so as to realize the cleaning effect; the reaction chemical formula is: B2O3+ H2O → H3BO3.
5. The utility model provides a prevent structure of technology stove tail portion gas-extraction pipeline jam, its characterized in that includes technology furnace chamber (1), water-cooling bottle (3), filter flask (5), vacuum pump (7) and exhaust pipe (8) at least, technology furnace chamber (1), water-cooling bottle (3), filter flask (5), vacuum pump (7) and exhaust pipe (8) constitute the gas-extraction pipeline system of technology stove afterbody jointly through the gas piping intercommunication, still communicate on the gas piping of the gas vent of technology furnace chamber (1) and be equipped with belt cleaning device (4), and belt cleaning device (4) carry out the cleaning operation to the gas-extraction pipeline inner wall.
6. The structure for preventing the air exhaust pipeline at the tail part of the process furnace from being blocked according to claim 5, wherein the cleaning device (4) comprises a water bath bottle (4-1), a water bath bottle heater (4-2), an air guide pipe (4-3) which is introduced into liquid in the water bath bottle (4-1) and a water bath bottle temperature probe (4-4), the water bath bottle (4-1) is provided with a water filling port (4-5) and an air outlet (4-6), and the air outlet (4-6) is communicated with an air exhaust pipeline system at the tail part of the process furnace through a gas pipeline.
7. The structure for preventing the exhaust pipeline at the tail part of the process furnace from being blocked according to claim 5, wherein the exhaust pipeline system at the tail part of the process furnace is also provided with a pressure detection device (2) for dynamically monitoring the pressure difference in the pipelines before and after the filter bottle (5).
8. The structure for preventing the exhaust pipeline at the tail part of the process furnace from being blocked according to claim 7, wherein the pressure detection device (2) comprises a first pressure gauge (2-1) and a second pressure gauge (2-2), the first pressure gauge (2-1) is arranged on the process furnace chamber (1) and is used for taking the value of the air pressure in the process furnace chamber (1), and the second pressure gauge (2-2) is arranged on the pipeline between the filter flask (5) and the vacuum pump (7).
9. The structure for preventing the exhaust pipeline at the tail part of the process furnace from being blocked according to the claim 5, characterized in that the filter flask (5) comprises two filter flasks connected in parallel and control valves (6) corresponding to the two filter flasks.
10. The structure for preventing the exhaust pipeline at the tail part of the process furnace from being blocked according to the claim 9, characterized in that the two filter bottles are arranged behind the water cooling bottle (3) and in front of the vacuum pump (7) through gas pipelines.
11. The structure for preventing the exhaust pipeline at the tail part of the process furnace from being blocked according to the claim 5, characterized in that the water cooling bottle (3) comprises a cylindrical cooling chamber (3-2), a derivative collecting chamber (3-4) which is arranged in the cooling chamber (3-2) and is provided with an upper arc surface and a lower arc surface, and an air inlet pipe (3-1), an air outlet pipe (3-3) and a waste discharge pipe (3-5) which are communicated with the derivative collecting chamber (3-4).
12. The structure for preventing the blockage of the exhaust duct at the tail of the process furnace according to claim 11, characterized in that the inlet pipe (3-1) is spirally abutted and surrounded on the outer side of the cylindrical cooling chamber (3-2) and one end of the inlet pipe is communicated with the derivative collecting chamber (3-4); the air outlet pipe (3-3) is spirally abutted and wound on the inner side of the cylindrical cooling chamber (3-2), and one end of the air outlet pipe is communicated with the derivative collecting chamber (3-4).
13. The structure for preventing the exhaust pipeline at the tail part of the process furnace from being blocked according to claim 11, wherein the communication ports of the air inlet pipe (3-1), the air outlet pipe (3-3) and the derivative collecting chamber (3-4) are respectively arranged at two sides of the water-cooled bottle (3) and are mutually corresponding at 180 degrees.
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