CN115453434A - Multifunctional micro-nano focusing polar direction longitudinal integrated magneto-optical Kerr effect device - Google Patents
Multifunctional micro-nano focusing polar direction longitudinal integrated magneto-optical Kerr effect device Download PDFInfo
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Abstract
The invention relates to a multifunctional micro-nano focusing polar-direction longitudinal integrated magneto-optical Kerr effect device which comprises a laser, a first total reflection mirror, a beam expander, a first diaphragm, a first turnable optical frame, a longitudinal optical path system, a polar-direction optical path system, a third turnable optical frame, a third diaphragm, a photoelectric detection system, a third total reflection mirror, an electric control system, a white light system and a computer, wherein the laser, the first total reflection mirror, the beam expander, the first diaphragm, the first turnable optical frame, the longitudinal optical path system, the polar-direction optical path system, the third turnable optical frame, the third diaphragm, the photoelectric detection system, the third total reflection mirror, the electric control system, the white light system and the computer are arranged on an optical platform. The invention uses the high-precision turnable optical frame to realize the measurement of Kerr signals of the magnetic sample in the polar direction and the longitudinal direction, thereby greatly simplifying the measurement modes of polar direction and longitudinal light paths; in addition, the magneto-optical effect measurement of a magnetic film sample and a magnetic micro-nano device is realized by selecting micro-nano focusing lenses with different specifications according to the measurement requirement and combining a self-developed photoelectric detection system; the system is integrated with electric control equipment, so that the magneto-optical signal of the magnetic micro-nano device is measured, and the electric field regulation and control and the magneto-electric transport property of the device are measured.
Description
Technical Field
The invention relates to the technical field of optical measurement, in particular to a multifunctional micro-nano focusing polar direction longitudinal integrated magneto-optical Kerr effect device.
Background
The magneto-optical Kerr effect instrument is an important means for researching surface magnetism, the working principle of the magneto-optical Kerr effect instrument is based on the magneto-optical Kerr effect caused by the interaction between light and a magnetized medium, the magneto-optical Kerr effect instrument can not only carry out non-contact magnetic detection on a single atomic layer thickness material, but also has important application in the research on the aspects of magnetic anisotropy, interlayer coupling, magnetic order, phase change behavior of a magnetic ultrathin film and the like. The study of the magneto-optical Kerr effect on surface magnetics is represented by the magneto-optical Kerr effect (MOKE). As the laser technology is developed, the MOKE technology becomes more sophisticated, but the MOKE technology can be used only for measuring a magnetic thin film. With the development of magnetic recording and nanotechnology, the required magnetic recording density has been greatly increased, and magnetic nanostructures have been the target of the next generation of magnetic recording development. Therefore, the MOKE technology is further upgraded to a micro-nano focusing magneto-optical Kerr technology.
In recent years, related technicians have continuously improved micro-nano focusing magneto-optical kerr effect measuring devices, such as: the space resolution magneto-optical Kerr effect measuring device disclosed in Chinese patent CN105891744A realizes regional scanning measurement of longitudinal and polar Kerr signals, the resolution of a focusing light spot can reach 550nm, only a longitudinal light path device is provided, and the measurement of longitudinal and polar integration is not described; the method for measuring magneto-optical Kerr signals disclosed in Chinese patent CN108680875B uses an optical bridge detector and an optical fiber to protect an optical path so as to improve the signal-to-noise ratio of measurement. Although the existing micro-nano focusing magneto-optical Kerr effect measuring device realizes high sensitivity and high signal-to-noise measurement, the cost is also greatly increased. In addition, in order to complete the measurement of longitudinal and polar light paths under the condition of changing a magnetic field component, a magneto-optical kerr instrument needs to reduce the magnetic field intensity and complete magnetic field scanning by using a small magnet (or a small electromagnet), and because the weight of the electromagnet with a large magnetic field (more than 1 Tesla) is generally more than dozens of kilograms and even hundreds of kilograms, the magneto-optical kerr instrument is not suitable for carrying. Therefore, the current commercial magneto-optical kerr instrument cannot simultaneously measure polar direction and longitudinal light path under the regulation and control of a large magnetic field (more than 1 Tesla) under the condition of not changing a magnetic field component. With the development of big data and 5G internet of things, the magnetic storage density is inevitably required to be further improved, the smaller the storage unit and the faster the reading speed are the requirements of the development of the next generation of magnetic storage, and therefore, the magnetic research of the current artificial magnetic nano structure is also a hot problem of the magnetic storage. For a micro-nano magnetic structure, the coercive force and a switching field of the micro-nano magnetic structure are greatly increased compared with a film of the micro-nano magnetic structure, and a large magnetic field is required to be used for regulation and control in measurement, so that the application range of the magneto-optical Kerr effect is greatly limited.
Disclosure of Invention
The invention aims to overcome the defects of the prior art, provides a multifunctional micro-nano focusing polar direction longitudinal integrated magneto-optical Kerr effect device, and solves the problems of the prior device.
The purpose of the invention is realized by the following technical scheme: a multifunctional micro-nano focusing polar-direction longitudinal integrated magneto-optical Kerr effect device comprises a laser, a first total reflection mirror, a beam expander, a first diaphragm, a first turnable optical frame, a longitudinal optical path system, a polar-direction optical path system, a third turnable optical frame, a third diaphragm, a photoelectric detection system, a third total reflection mirror, an electric control system and a computer, wherein the laser, the first total reflection mirror, the beam expander, the first diaphragm, the first turnable optical frame, the longitudinal optical path system, the polar-direction optical path system, the third turnable optical frame, the third diaphragm, the photoelectric detection system, the third total reflection mirror, the electric control system and the computer are arranged on an optical platform; laser emitted by a laser device is incident on a first turnable optical frame provided with a total reflection mirror sequentially through a first total reflection mirror, a beam expanding mirror and a first diaphragm, when the first turnable optical frame is adjusted to form an included angle of 90 degrees with an optical platform, the laser is reflected by the first turnable optical frame to enter a longitudinal light path system, longitudinal magneto-optical Kerr signal measurement of a sample is realized, and when the first turnable optical frame is adjusted to be parallel to the optical platform, the laser enters a polar light path system, polar magneto-optical Kerr signal measurement of the sample is realized; the laser passes through the longitudinal light path system, then sequentially passes through the third reversible optical frame provided with the total-reflection mirror and the third diaphragm and enters the photoelectric detection system, and the laser passes through the polar light path system, then sequentially passes through the third total-reflection mirror, the third reversible optical frame provided with the total-reflection mirror and the third diaphragm and enters the photoelectric detection system; the photoelectric detection system measures to obtain an electric signal and inputs the electric signal into a computer; the electric control system is used for introducing electric field control or independently measuring magnetoelectric transport signals in the longitudinal and polar magneto-optical Kerr signal measuring process.
The white light system comprises a white light source, a first focusing lens, a first concave lens, a fifth turnable optical frame, a fifth diaphragm, a fourth full mirror and a sixth diaphragm; white light generated by the white light source sequentially passes through the first focusing lens and the first concave lens and is incident on the fifth turnable optical frame provided with the total reflection lens, and when the fifth turnable optical frame is adjusted to be parallel to the optical platform, the white light enters the longitudinal light path system through the fifth diaphragm; when the fifth turnable optical frame is adjusted to form an included angle of 90 degrees with the optical platform, white light is reflected by the fifth turnable optical frame to the fourth full-reflecting mirror and then enters the polar light path system through the sixth diaphragm.
The longitudinal optical path system comprises a first beam splitter prism, a first polarizer, a second diaphragm, a focusing system, a first electromagnet, a first sample frame, a focusing system II, a second turnable optical frame and a first visualization device; the laser sequentially passes through the first beam splitter prism, the first polarizer, the second diaphragm, the first sample of the focusing system is incident on a sample of a first sample frame placed between two magnetic poles of the first electromagnet, the laser enters the second focusing system through the sample reflection and then is incident on a second turnable optical frame provided with the full reflecting mirror, when the second turnable optical frame is adjusted to form a 90-degree included angle with the optical platform, the laser is reflected into the first visualization device by the second turnable optical frame, when the second turnable optical frame and the third turnable optical frame are adjusted to be parallel to the optical platform, the laser is incident on the photoelectric detection system through the third diaphragm.
The polar light path system comprises a second total reflection mirror, a second beam splitting prism, a second polarizer, a third beam splitting prism, a fourth diaphragm, a focusing system III, a second electromagnet, a second sample frame, a fourth turnable optical frame and a second visualization device; the laser sequentially passes through the second full-reflecting mirror, the second beam splitting prism, the second polarizer, the third beam splitting prism, the fourth diaphragm and the third focusing system and is incident on a sample of a second sample frame arranged in the second electromagnet, the laser sequentially passes through the third focusing system, the fourth diaphragm and the third beam splitting prism after being reflected by the sample, the laser is reflected to a fourth turnable optical frame provided with the full-reflecting mirror through the third beam splitting prism, when the fourth turnable optical frame is adjusted to form a 90-degree included angle with the optical platform, the laser is reflected into the second visualization device by the fourth turnable optical frame, when the fourth turnable optical frame is adjusted to be parallel to the optical platform and when the third turnable optical frame is adjusted to form a 90-degree included angle with the optical platform, the laser is incident on the photoelectric detection system through the third full-reflecting mirror, the third turnable optical frame and the third diaphragm.
The focusing system comprises a third focusing lens and a first micro-nano focusing lens, the focusing system comprises a second micro-nano focusing lens, and laser sequentially passes through the third focusing lens, the first micro-nano focusing lens and the second micro-nano focusing lens; when the sample on the first sample holder is a magnetic thin film sample, removing the first micro-nano focusing lens and the second micro-nano focusing lens and turning off the white light source, so that light reflected by the magnetic thin film sample can be detected; when the sample on the first sample holder is the magnetic micro-nano device, the third focusing lens is removed, the white light source is turned on, and the magnetic micro-nano device sample can be measured.
The focusing system III comprises a fourth focusing lens and a third micro-nano focusing lens, and laser sequentially passes through the fourth focusing lens and the third micro-nano focusing lens; when the sample on the second sample holder is a magnetic film sample, removing the third micro-nano focusing lens and closing the white light source, and detecting light reflected by the film sample; and when the sample on the second sample holder is the magnetic micro-nano device sample, removing the fourth focusing lens and turning on the white light source to measure the magnetic micro-nano device sample.
The photoelectric detection system is a high-sensitivity optical bridge type detection system and comprises a quarter-wave plate, a Wollaston prism, a second focusing lens and an optical bridge type detector. The laser sequentially passes through the quarter-wave plate, the Wollaston prism and the second focusing lens and then enters the optical bridge type detector to receive and convert optical signals.
The optical bridge type detector comprises an operational amplifier U 3 Andphotodiode D 1 And D 2 Photo diode D 1 Is connected to a positive bias voltage, a photodiode D 2 Is connected to a negative bias voltage, D 1 Positive electrode and D 2 Negative pole connected to obtain current difference I between two serially connected photodiodes at the connected node 3 ，I 3 Through an operational amplifier U 3 Is converted into voltage signal, amplified and finally output, and a slide rheostat R is arranged between the positive bias voltage and the negative bias voltage c ，R c The pin of the sliding end passes through a resistor R 4 Connected to the non-inverting terminal of the operational amplifier to adjust R c Can be used for the photodiode D 1 And D 2 The generated photocurrent difference value I 3 And carrying out zero setting.
The invention has the following advantages: a multifunctional micro-nano focusing polar direction and longitudinal direction integrated magneto-optical Kerr effect device realizes the measurement of magnetic sample polar direction and longitudinal direction Kerr signals, and greatly simplifies the measurement mode of polar direction and longitudinal light path; in addition, micro-nano focusing lenses with different specifications are selected according to measurement requirements, and a self-developed photoelectric detection system is combined to realize measurement of a magnetic thin film sample and a magnetic micro-nano device; the system is integrated with electric control equipment, so that the magneto-optical signal of the magnetic micro-nano device is measured, and the electric field regulation and control and the magneto-electric transport property of the device are measured.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2a is a schematic diagram of a light path of the focusing system of the present invention;
FIG. 2b is a schematic diagram of a second optical path of the focusing system of the present invention;
FIG. 2c is a schematic diagram of three optical paths of the focusing system of the present invention;
FIG. 3 is a schematic diagram of an optical bridge detection system according to the present invention;
FIG. 4 is a schematic view of an optical bridge probe according to the present invention;
FIG. 5 is a schematic diagram of measurement of a CoFeB micro-nano device sample according to the invention;
in the figure: 1-a laser, 2-a first total reflection mirror, 3-a beam expander, 4-a first diaphragm, 5-a first turnable optical frame, 6-a first beam splitter prism, 7-a first polarizer, 8-a second diaphragm, 9-a focusing system, 10-a first electromagnet, 11-a first sample frame, 12-a focusing system two, 13-a second turnable optical frame, 14-a third turnable optical frame, 15-a third diaphragm, 16-a photoelectric detection system, 17-a second total reflection mirror, 18-a second beam splitter prism, 19-a second polarizer, 20-a third beam splitter prism, 21-a fourth diaphragm, 22-a focusing system three, 23-a second electromagnet, 24-a second sample frame, 25-a fourth turnable optical frame, 26-a third total reflection mirror, 27-a white light source, 28-a first focusing lens, 29-a first concave lens, 30-a fifth turnable optical frame, 31-a fifth diaphragm, 32-a first visualization device, 33-a fourth total reflection mirror, 34-a sixth diaphragm, 35-a second visualization device, 36-a current source meter, 37-a multimeter, 38-a quarter wave plate, 39-a Wollaston prism, 40-a second focusing lens, 41-an optical bridge detector, 42-a third focusing lens, 43-a first micro-nano focusing lens, 44-a second micro-nano focusing lens, 45-a fourth focusing lens, and 46-a third micro-nano focusing lens.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all the embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations. Thus, the detailed description of the embodiments of the present application provided below in connection with the appended drawings is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present application without making any creative effort, shall fall within the protection scope of the present application. The invention is further described below with reference to the accompanying drawings.
In the technology provided by the invention, a high-precision adjustable turnover optical mirror bracket is used for completing simple operation of longitudinal and polar magneto-optical integrated measurement in a large magnetic field regulation and control mode, electric field regulation and magneto-electric transport measurement are simultaneously carried out while magneto-optical signals are measured, and meanwhile, an optical bridge detection system with high sensitivity and high signal-to-noise ratio is self-developed, so that extremely weak magneto-optical signals of magnetic micro-nano devices can be measured, and a new thought is provided for a multifunctional, integrated, high signal-to-noise ratio, simple operation and low cost magneto-optical magneto-electric measurement system.
As shown in figure 1, the invention relates to a multifunctional micro-nano focusing polar direction longitudinal integration magneto-optical Kerr effect device, which can adjust a focusing system and realize the measurement of a magnetic film sample and a magnetic micro-nano device by using a self-developed photoelectric detection system, improves the measurement precision and sensitivity, effectively reduces the application cost of the magneto-optical Kerr effect, and can also perform electric field regulation and control while measuring magneto-optical signals and measure the magneto-electric transport property of the magnetic micro-nano device.
The device comprises a laser 1, a first total reflection mirror 2, a beam expander 3, a first diaphragm 4, a first turnable optical frame 5, a longitudinal light path system, a polar light path system, a third turnable optical frame 14, a third diaphragm 15, a photoelectric detection system 16, a third total reflection mirror 26, an electric control system and a computer, which are arranged on an optical platform; laser emitted by a laser 1 sequentially passes through a first total reflection mirror 2, a beam expander 3 and a first diaphragm 4 and is incident on a first turnable optical frame 5 provided with the total reflection mirror, when the first turnable optical frame 5 is adjusted to form an included angle of 90 degrees with an optical platform, the laser is reflected by the first turnable optical frame 5 and enters a longitudinal optical path system, longitudinal magneto-optical Kerr signal measurement of a sample is realized, and when the first turnable optical frame 5 is adjusted to be parallel to the optical platform, the laser enters a polar optical path system, polar magneto-optical Kerr signal measurement of the sample is realized; the laser passes through the longitudinal light path system, then sequentially passes through the third reversible optical frame 14 provided with the total-reflection mirror and the third diaphragm 15, and then enters the photoelectric detection system 16, and the laser passes through the polar light path system, then sequentially passes through the third total-reflection mirror 26, the third reversible optical frame 14 provided with the total-reflection mirror and the third diaphragm 15, and then enters the photoelectric detection system 16; the photoelectric detection system 16 measures and obtains an electric signal to be input into the computer; the electric control system is used for simultaneously introducing electric field control or independently measuring magnetoelectric transport signals in the longitudinal and polar magneto-optical Kerr signal measuring process; the beam expanding lens 3 and the first diaphragm 4 can realize beam expanding and shaping of laser, and the shaped laser can obtain better nanoscale light spots through the nanometer focusing system.
Wherein, a LabVIEW program is arranged in the computer for automatic control; the electric control system controls the electric control equipment to provide power supply and measurement feedback electric signals for the sample through a LabVIEW program in the computer, and finally, the electric control equipment is analyzed and stored in the LabVIEW program.
Further, the present invention also includes a white light system, which includes a white light source 27, a first focusing lens 28, a first concave lens 29, a fifth reversible optical frame 30, a fifth diaphragm 31, a fourth holophote 33, and a sixth diaphragm 34; the white light source 27 generates white light which sequentially passes through the first focusing lens 28 and the first concave lens 29 and is incident on the fifth turnable optical frame 30 provided with the total reflection mirror, and when the fifth turnable optical frame 30 is adjusted to be parallel to the optical platform, the white light enters the longitudinal optical path system through the fifth diaphragm 31; when the fifth turnable optical frame 30 is adjusted to form an included angle of 90 ° with the optical platform, the white light is reflected by the fifth turnable optical frame 30 to the fourth total reflection mirror 33, and then enters the polar optical path system through the sixth diaphragm 34.
Wherein, the laser 1 can select semiconductor and solid laser according to the requirement. The white light source 27 may be a halogen lamp or a high power LED lamp, or may be a white light source with different power produced by other companies according to the requirement.
Further, the longitudinal optical path system comprises a first beam splitter prism 6, a first polarizer 7, a second diaphragm 8, a focusing system 9, a first electromagnet 10, a first sample holder 11, a focusing system II 12, a second turnable optical frame 13 and a first visualization device 32; the laser sequentially passes through a first beam splitter prism 6, a first polarizer 7, a second diaphragm 8 and a focusing system 9 and is incident on a sample of a first sample frame 11 arranged between two magnetic poles of a first electromagnet 10, the laser enters a focusing system two 12 through the reflection of the sample and then is incident on a second turnable optical frame 13 provided with a full-reflecting mirror, when the second turnable optical frame 13 is adjusted to form an included angle of 90 degrees with an optical platform, the laser is reflected into a first visualization device 32 by the second turnable optical frame 13, and when the second turnable optical frame 13 and a third turnable optical frame 14 are adjusted to be parallel to the optical platform, the laser is incident on a photoelectric detection system 16 through a third diaphragm 15.
Further, the polar optical path system comprises a second fully-reflecting mirror 17, a second beam splitting prism 18, a second polarizer 19, a third beam splitting prism 20, a fourth diaphragm 21, a focusing system III 22, a second electromagnet 23, a second sample holder 24, a fourth turnable optical frame 25 and a second visualization device 35; the laser sequentially passes through a second full-reflecting mirror 17, a second beam splitting prism 18, a second polarizer 19, a third beam splitting prism 20, a fourth diaphragm 21 and a third focusing system 22 and is incident on a sample of a second sample frame 24 arranged in a second electromagnet 23, the laser sequentially passes through the third focusing system 22, the fourth diaphragm 21 and the third beam splitting prism 20 after being reflected by the sample, and is reflected to a fourth turnable optical frame 25 provided with the full-reflecting mirror through the third beam splitting prism 20, when the fourth turnable optical frame 25 is adjusted to form a 90-degree included angle with an optical platform, the laser is reflected into a second visualization device 35 by the fourth turnable optical frame 25, when the fourth turnable optical frame 25 is adjusted to be parallel to the optical platform, and when the third turnable optical frame 14 is adjusted to form a 90-degree included angle with the optical platform, the laser is incident on the photoelectric detection system 16 through the third full-reflecting mirror 26, the third turnable optical frame 14 and the third diaphragm 15.
The white light emitted from the white light source 27 sequentially passes through the first focusing lens 28 and the first concave lens 29 and enters the fifth reversible optical frame 30 with high precision, which is provided with a total reflection mirror, so that the white light application of a longitudinal light path and a polar light path can be realized. Longitudinal light path white light application: when the fifth turnable optical frame 30 with high accuracy is manually adjusted to be parallel to the optical platform, white light directly enters the first beam splitter prism 6 through the fifth diaphragm 31, then sequentially passes through the first polarizer 7, the second diaphragm 8 and other elements to be collinear with the incident laser of the longitudinal light path, and the first visualization device 32 is located beside the third turnable optical frame 13 and used for observing the surface information of the sample. Poloidal light path white light application: when the included angle between the fifth turnover optical frame 30 and the optical platform is adjusted to be 90 degrees, white light sequentially passes through the fourth total reflection mirror 33 and the sixth diaphragm 34 and is incident to the second beam splitter prism 18, then sequentially passes through the second polarizer 19, the third beam splitter prism 20 and other elements and is collinear with the incident laser of the poloidal light path, and the second visualization device 35 is located beside the fourth turnover optical frame 25 with high precision and used for observing the surface information of the sample of the micro-nano device.
When a magnetic thin film sample is measured, a common focusing lens is generally used for focusing light spots so as to improve the signal-to-noise ratio of the measurement; when a magnetic micro-nano device is measured, a common focusing lens cannot meet the size of a light spot required by measurement, so that the micro-nano focusing lens is usually used for focusing the light spot to a micron order or even a nanometer order (about 600 nanometers), and the problem of poor measurement signal-to-noise ratio and the like is brought to the measurement of the magnetic thin film by the small focusing light spot. In summary, different focusing systems should be used for measurement according to the difference of the types of the samples to be measured, so as to achieve the best measurement effect.
As shown in fig. 2a and 2b, the focusing system 9 includes a third focusing lens 42 and a first micro-nano focusing lens 43, the focusing system 12 includes a second micro-nano focusing lens 44, and the laser sequentially passes through the third focusing lens 42, the first micro-nano focusing lens 43 and the second micro-nano focusing lens 44; when the sample on the first sample holder 11 is a film sample, removing the first micro-nano focusing lens 43 and the second micro-nano focusing lens 44, turning off the white light source 27, and detecting the reflected light of the film sample; when the sample on the first sample holder 11 is a micro-nano device sample, the micro-nano device sample can be measured by removing the third focusing lens 42 and turning on the white light source 27.
As shown in fig. 2c, the focusing system iii 22 includes a fourth focusing lens 45 and a third micro-nano focusing lens 46, and the laser sequentially passes through the fourth focusing lens 45 and the third micro-nano focusing lens 46; when the sample on the second sample holder 24 is a film sample, removing the third micro-nano focusing lens 46 and turning off the white light source 27, and detecting the reflected light of the film sample; when the sample on the second sample holder 24 is the micro-nano device sample, the fourth focusing lens 45 is removed and the white light source 27 is turned on, and the micro-nano device sample is measured.
Further, the first micro-nano focusing lens 43, the second micro-nano focusing lens 44 and the third micro-nano focusing lens 46 can simultaneously select a lens cone with the matching length of 5cm to install an Olympus 50 times telephoto microscope objective to realize the transverse resolution of 600 nanometers as required, and can also select a lens cone with the matching length of 10cm to install an Air-Spaced Achromatic double to realize the transverse resolution of 5 micrometers.
As shown in FIG. 3, the photodetection system 16 is a highly sensitive optical bridge detection system. The highly sensitive optical bridge detection system comprises a quarter wave plate 38, a wollaston prism 39, a second focusing lens 40 and an optical bridge detector 41. The laser light sequentially passes through a quarter wave plate 38, a Wollaston prism 39 and a second focusing lens 40 and then enters an optical bridge type detector 41 to receive and convert optical signals, and finally the optical signals are input into a computer.
As shown in FIG. 4, the optical bridge detector 41 includes an operational amplifier U 3 And a photodiode D 1 And D 2 Photo diode D 1 Is connected to a positive bias voltage, a photodiode D 2 Is connected to a negative bias voltage, D 1 Positive electrode and D 2 Negative pole connected to obtain current difference I between two serially connected photodiodes at the connected node 3 ，I 3 Through an operational amplifier U 3 Is converted into voltage signal, amplified and finally output, and a slide rheostat R is arranged between the positive bias voltage and the negative bias voltage c ，R c The pin of the sliding end passes through a resistor R 4 Connected to the non-inverting terminal of the operational amplifier to regulate R c Can be used for the photodiode D 1 And D 2 The generated photocurrent difference value I 3 And carrying out zero setting.
The electric control system comprises a current source meter 36 and a universal meter 37, when Kerr signals of the micro-nano device sample are measured in the longitudinal and polar light paths, direct current is introduced into the micro-nano device sample by using the current source meter 36, and feedback electric signals are measured by using the universal meter 37, so that the magneto-optical effect of the sample under the control of a direct current electric field can be researched, and the magneto-electric transport property of the sample can also be measured.
Specifically, longitudinal light path application: adjusting the high-precision first turnable optical frame 5 to form a 90-degree included angle with the optical platform, and reflecting laser to enter a longitudinal light path; the fifth turnable optical frame 30 with high precision is adjusted to be parallel to the optical platform, and white light enters a longitudinal light path and finally collinearly enters the surface of the sample together with incident laser; the third turnable optical frame 14 for adjusting high precision is parallel to the optical platform, and the longitudinal optical path detects light to enter the photoelectric detection system 16. The first focusing system 9 and the second focusing system 12 are adjusted, so that the measurement of a magnetic film sample and a magnetic micro-nano device can be realized:
1. magnetic thin film sample measurement: removing a first micro-nano focusing lens 43 in the focusing system I9 and a second micro-nano focusing lens 44 in the focusing system II 12, turning off the white light source 27, adjusting the high-precision second turnable optical frame 13 to be parallel to the optical platform, and enabling reflected light to enter the optical bridge type detection system to realize measurement;
2. measuring a magnetic micro-nano device: removing the third focusing lens 42 in the focusing system 9, turning on the white light source 27, adjusting the included angle of the high-precision second turnable optical frame 13 and the optical platform to be 90 degrees, the first visualization device 32 can clearly collect the information of the sample surface, and further can adjust the first sample frame 11 to enable the laser to hit the specific position of the sample surface; the second turnable optical frame 13 for adjusting high precision is parallel to the optical path, and at this time, the reflected light enters the optical bridge type detection system to realize measurement. In the optical bridge type detection system, two photodiodes of an optical bridge type detector 41 respectively receive two linearly polarized light signals emitted from a Wollaston prism 39, and when the two photodiodes receive the same light intensity, the circuit output voltage is 0; when the two detecting heads receive different light intensities, the signals amplified by the amplifying circuit are all the difference values of the two light intensities. Before measurement, the zero setting knob at the top of the optical bridge type detector 41 is manually adjusted, so that the output voltage of the circuit is 0.
Specifically, the poloidal optical path application case: adjusting a first turnable optical frame 5 with high precision to be parallel to the optical platform, and enabling laser to enter a polar light path; the high-precision fifth turnable optical frame 30 is adjusted to form a 90-degree included angle with the optical platform, and white light enters a polar light path and finally enters the surface of the sample together with incident laser; the third turnable optical frame 14 for adjusting high precision forms an included angle of 90 degrees with the optical platform, and the polar light path detects light and enters the photoelectric detection system 16. The third 22 focusing system is adjusted, so that the measurement of the magnetic film sample and the magnetic micro-nano device can be realized:
1. magnetic thin film sample measurement: removing the third micro-nano focusing lens 46 in the third focusing system 22, turning off the white light source 27, adjusting the fourth reversible optical frame 25 with high precision to be parallel to the optical platform, and enabling reflected light to enter the optical bridge type detection system to realize measurement;
2. measuring a magnetic micro-nano device: removing a fourth focusing lens 45 in the focusing system III 22, turning on a white light source 27, adjusting a high-precision fourth turnable optical frame 25 to form a 90-degree included angle with the optical platform, and clearly collecting the information of the surface of the sample by using a second visualization device 35 so as to adjust a second sample frame 24 to enable the laser to be irradiated to a specific position of the surface of the sample; the fourth turnable optical frame 25 for high precision adjustment is parallel to the optical platform, and the reflected light enters the optical bridge detection system to realize measurement.
As shown in fig. 5, four metal pins on the magnetic micro-nano device are connected with an integrated circuit by using wires, and four pins of the integrated circuit are connected with an electric control device; the left graph is a graph of sample structure information observed in a visualization device, and the right graph is a hysteresis loop measured by an optical bridge type detection system. The figure also shows a schematic connection diagram of a micro-nano device sample and an electric control system, the sample is connected with a current source meter 36 and a digital multimeter 37 through a specially designed integrated circuit, the electric control device is controlled through a LabVIEW program to provide a power supply and measure feedback electric signals for the sample, and finally, the analysis and storage are carried out in the LabVIEW program.
The foregoing is illustrative of the preferred embodiments of this invention, and it is to be understood that the invention is not limited to the precise form disclosed herein and that various other combinations, modifications, and environments may be resorted to, falling within the scope of the concept as disclosed herein, either as described above or as apparent to those skilled in the relevant art. And that modifications and variations may be effected by those skilled in the art without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (8)
1. A multifunctional micro-nano focusing polar direction longitudinal integration magneto-optical Kerr effect device is characterized in that: the device comprises a laser (1), a first total reflection mirror (2), a beam expander (3), a first diaphragm (4), a first turnable optical frame (5), a longitudinal light path system, a polar light path system, a third turnable optical frame (14), a third diaphragm (15), a photoelectric detection system (16), a third total reflection mirror (26), an electric control system and a computer, wherein the laser is arranged on an optical platform; laser emitted by a laser (1) sequentially passes through a first full-reflecting mirror (2), a beam expander (3) and a first diaphragm (4) and is incident on a first turnable optical frame (5) provided with the full-reflecting mirror, when the first turnable optical frame (5) is adjusted to form an included angle of 90 degrees with an optical platform, the laser is reflected by the first turnable optical frame (5) and enters a longitudinal optical path system, longitudinal magneto-optical Kerr signal measurement of a sample is realized, and when the first turnable optical frame (5) is adjusted to be parallel to the optical platform, the laser enters a polar optical path system, and polar magneto-optical Kerr signal measurement of the sample is realized; the laser passes through the longitudinal light path system, then sequentially enters the photoelectric detection system (16) through a third turnable optical frame (14) provided with a total reflection mirror and a third diaphragm (15), and then passes through the polar light path system, sequentially enters the photoelectric detection system (16) through a third total reflection mirror (26), a third turnable optical frame (14) provided with a total reflection mirror and a third diaphragm (15); the photoelectric detection system (16) measures to obtain an electric signal and inputs the electric signal into a computer; the electric control system is used for introducing electric field control or independently measuring the magneto-electric transport signal in the longitudinal and polar magneto-optical Kerr signal measuring process.
2. The multifunctional micro-nano focusing polar direction longitudinal integration magneto-optical Kerr effect device according to claim 1, characterized in that: the white light system comprises a white light source (27), a first focusing lens (28), a first concave lens (29), a fifth turnable optical frame (30), a fifth diaphragm (31), a fourth total reflection mirror (33) and a sixth diaphragm (34); the white light source (27) generates white light which sequentially passes through the first focusing lens (28) and the first concave lens (29) and is incident on a fifth turnable optical frame (30) provided with a total reflection mirror, and when the fifth turnable optical frame (30) is adjusted to be parallel to the optical platform, the white light enters a longitudinal light path system through a fifth diaphragm (31); when the fifth turnable optical frame (30) is adjusted to form an included angle of 90 degrees with the optical platform, white light is reflected by the fifth turnable optical frame (30) to the fourth full-reflecting mirror (33) and then enters the polar light path system through the sixth diaphragm (34).
3. The multifunctional micro-nano focusing polar direction longitudinal integration magneto-optical Kerr effect device according to claim 2, characterized in that: the longitudinal optical path system comprises a first beam splitter prism (6), a first polarizer (7), a second diaphragm (8), a focusing system unit (9), a first electromagnet (10), a first sample rack (11), a focusing system unit (12), a second turnable optical frame (13) and a first visualization device (32); the laser sequentially passes through a first beam splitter prism (6), a first polarizer (7), a second diaphragm (8) and a focusing system (9) and is incident on a sample of a first sample frame (11) arranged between two magnetic poles of a first electromagnet (10), the laser enters a focusing system II (12) through the sample reflection and then is incident on a second turnable optical frame (13) provided with a full-reflecting mirror, when the second turnable optical frame (13) is adjusted to form an included angle of 90 degrees with an optical platform, the laser is reflected into a first visualization device (32) by the second turnable optical frame (13), and when the second turnable optical frame (13) and a third turnable optical frame (14) are adjusted to be parallel to the optical platform, the laser is incident on a photoelectric detection system (16) through the third diaphragm (15).
4. The multifunctional micro-nano focusing polar direction longitudinal integration magneto-optical Kerr effect device according to claim 2, characterized in that: the polar light path system comprises a second total reflection mirror (17), a second beam splitting prism (18), a second polarizer (19), a third beam splitting prism (20), a fourth diaphragm (21), a focusing system III (22), a second electromagnet (23), a second sample rack (24), a fourth turnable optical frame (25) and a second visualization device (35); the laser sequentially passes through a second full-reflecting mirror (17), a second beam splitting prism (18), a second polarizer (19), a third beam splitting prism (20), a fourth diaphragm (21) and a focusing system (22) and is incident on a sample of a second sample frame (24) arranged in a second electromagnet (23), the laser sequentially passes through the focusing system (22), the fourth diaphragm (21) and the third beam splitting prism (20) after being reflected by the sample, the laser is reflected to a fourth turnable optical frame (25) provided with the full-reflecting mirror through the third beam splitting prism (20), when the fourth turnable optical frame (25) is adjusted to be 90-degree included angle with an optical platform, the laser is reflected into a second visualization device (35) by the fourth turnable optical frame (25), when the fourth turnable optical frame (25) is adjusted to be parallel to the optical platform, and when the third turnable optical frame (14) is adjusted to be 90-degree included angle with the optical platform, the laser is incident to a third full-reflecting mirror (26), a third turnable optical frame (14) and a third turnable optical diaphragm (15) and an electrical detection system (16).
5. The multifunctional micro-nano focusing polar direction longitudinal integration magneto-optical Kerr effect device according to claim 3, characterized in that: the focusing system I (9) comprises a third focusing lens (42) and a first micro-nano focusing lens (43), the focusing system II (11) comprises a second micro-nano focusing lens (44), and laser sequentially passes through the third focusing lens (42), the first micro-nano focusing lens (43) and the second micro-nano focusing lens (44); when the sample on the first sample rack (11) is a magnetic thin film sample, the first micro-nano focusing lens (43) and the second micro-nano focusing lens (44) are removed, the white light source (27) is turned off, and light reflected by the thin film sample can be detected; when the sample on the first sample rack (11) is a magnetic micro-nano device, the third focusing lens (42) is removed, the white light source (27) is turned on, and the magnetic micro-nano device sample can be measured.
6. The multifunctional micro-nano focusing polar-direction longitudinal integrated magneto-optical Kerr effect device according to claim 4, characterized in that: the focusing system III (22) comprises a fourth focusing lens (45) and a third micro-nano focusing lens (46), and laser sequentially passes through the fourth focusing lens (45) and the third micro-nano focusing lens (46); when the sample on the second sample holder (24) is a magnetic film sample, removing the third micro-nano focusing lens (46) and closing the white light source (27), and detecting the light reflected by the film sample; when the sample on the second sample holder (24) is a magnetic micro-nano device, the fourth focusing lens (45) is removed, the white light source (27) is turned on, and the magnetic micro-nano device sample is measured.
7. The multifunctional micro-nano focusing polar direction longitudinal integration magneto-optical Kerr effect device according to claim 1, characterized in that: the photoelectric detection system (16) is a high-sensitivity optical bridge type detection system and comprises a quarter-wave plate (38), a Wollaston prism (39), a second focusing lens (40) and an optical bridge type detector (41). The laser light sequentially passes through a quarter wave plate (38), a Wollaston prism (39) and a second focusing lens (40) and then enters an optical bridge type detector (41) to receive and convert optical signals.
8. The multifunctional micro-nano focusing polar direction longitudinal integration magneto-optical Kerr effect device according to claim 7, characterized in that: the optical bridge detector (41) comprises an operational amplifier U 3 And a photodiode D 1 And D 2 Photo diode D 1 Is connected to a positive bias voltage, a photodiode D 2 Is connected to a negative bias voltage, D 1 Positive electrode and D 2 Negative pole connected to obtain current difference I between two serially connected photodiodes at the connected node 3 ，I 3 Through an operational amplifier U 3 Is converted into voltage signal, amplified and finally output, and a slide rheostat R is arranged between the positive bias voltage and the negative bias voltage c ，R c The pin of the sliding end passes through a resistor R 4 Connected to the non-inverting terminal of the operational amplifier to regulate R c Can be used for the photodiode D 1 And D 2 The generated photocurrent difference value I 3 And carrying out zero setting.
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